A seed crystal preparation device for single crystal silicon production

Abstract

This invention discloses a seed crystal preparation device for monocrystalline silicon production, belonging to the technical field of monocrystalline silicon production equipment. It includes a mounting frame installed on a housing, with a clamping mechanism and a lifting mechanism for driving the vertical movement of the clamping mechanism. The seed crystal preparation device also includes a polishing mechanism and a driving mechanism, with the driving mechanism driving the clamping mechanism and the polishing mechanism to rotate simultaneously and in opposite directions. The polishing mechanism includes a polishing disc, a hollow cylinder, multiple through pipes, and a rotating cylinder. The polishing mechanism of this invention, by setting up a hollow cylinder, horizontal cylinder, through pipes, rotating cylinder, connecting pipe, and four-way connector, can provide a pipeline foundation for the liquid-gas supply of subsequent polishing, cleaning, and drying processes, eliminating the need to build multiple sets of delivery pipelines, greatly simplifying the equipment pipeline layout and reducing the equipment footprint. Simultaneously, it eliminates the need to transfer seed crystals across equipment, avoiding defects such as micro-cracks and edge chipping on the seed crystal surface.

Description

Technical Field

[0001] This invention belongs to the technical field of monocrystalline silicon production equipment, and particularly relates to a seed crystal preparation device for monocrystalline silicon production. Background Technology

[0002] As a core material in the semiconductor and photovoltaic industries, monocrystalline silicon's crystal growth relies heavily on the precision of its seed crystal preparation for lattice orientation consistency and defect rate control. The surface flatness, cleanliness, and structural integrity of the seed crystal have become key factors restricting the quality of finished monocrystalline silicon products. Therefore, upgrading and iterating seed crystal preparation technology is an important research direction in the monocrystalline silicon production field. Currently, the core processes in monocrystalline silicon seed crystal preparation include polishing, cleaning, and drying. The industry continues to demand higher levels of integration, precision, and non-destructive performance from seed crystal preparation equipment. Various polishing devices have been developed and applied, such as using a circulating liquid supply structure to improve polishing slurry utilization and utilizing a dual-rotating disk structure to optimize polishing uniformity, which have improved the efficiency and precision of seed crystal preparation to some extent.

[0003] While existing equipment for preparing single-crystal silicon seed crystals has achieved basic preparation functions, it still has the following shortcomings in practical applications: First, existing equipment mostly adopts a separate operation mode for polishing, cleaning and drying, which requires manual or mechanical transfer of seed crystals across equipment. This can easily cause seed crystals to be bumped and scratched, resulting in defects such as surface micro-cracks and edge chipping. At the same time, the pipelines and transmission structures of the separate equipment are set up independently, which not only increases the equipment footprint but also reduces the efficiency of process connection. Secondly, in terms of clamping and positioning, special fixtures need to be replaced for seed crystals of different diameters, resulting in low clamping efficiency and the centering accuracy relying on manual adjustment, making it difficult to meet the production needs of multiple varieties and small batches. Summary of the Invention

[0004] The purpose of this invention is to provide a seed crystal preparation device for monocrystalline silicon production, which solves the technical problem that existing equipment mostly adopts a discrete operation mode of polishing, cleaning and drying, and requires manual or mechanical transfer of seed crystals across equipment, which easily causes seed crystals to be bumped and scratched, resulting in defects such as surface microcracks and edge chipping.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: A seed crystal preparation apparatus for monocrystalline silicon production includes a mounting frame installed on a housing. The mounting frame is equipped with a clamping mechanism and a lifting mechanism for driving the clamping mechanism to move vertically. It also includes a polishing mechanism and a driving mechanism, wherein the driving mechanism drives the clamping mechanism and the polishing mechanism to rotate simultaneously and in opposite directions. The polishing mechanism includes: a polishing disc rotatably connected to the housing via a vertical shaft, with multiple through holes; a hollow cylinder coaxially fixed around the outer periphery of the vertical shaft, with a horizontally extending transverse cylinder on its outer wall, and multiple through pipes installed on the transverse cylinder, each through pipe being inserted into one of the through holes; and a rotating cylinder rotatably connected to the hollow cylinder and internally communicating with it, with a connecting pipe connected to it. A four-way connector is installed at the end of the connecting pipe away from the rotating cylinder, and the remaining ports of the four-way connector are used to connect to a polishing slurry supply source, a cleaning slurry supply source, and a gas drying supply source, respectively.

[0006] Preferably, the lifting mechanism includes: a guide rail mounted on the mounting frame, on which a sliding frame is slidably connected; a second mounting plate fixedly mounted on the mounting frame; and a hydraulic cylinder mounted on the second mounting plate, with its extension end fixedly connected to the sliding frame.

[0007] Preferably, the clamping mechanism includes: a hollow rod rotatably connected to the sliding frame; a cylinder rotatably mounted on the mounting frame, with a plug rod at its bottom that engages with the hollow rod; a fixed disk fixedly connected to the lower end of the hollow rod, with a storage cavity at its bottom; a drive plate rotatably connected to the bottom surface of the fixed disk, with multiple drive grooves on its surface and toothed grooves on its side; an adjustment assembly for driving the drive plate to rotate; and multiple sets of clamping assemblies evenly distributed circumferentially within the storage cavity, each set of clamping assemblies being drively connected to a corresponding drive groove for self-centering clamping of the seed crystal.

[0008] Preferably, the clamping assembly includes: a mounting frame installed in the storage slot of the fixed plate; two hinge seats, both slidably connected to the mounting frame, each with a rack mounted on its opposite side; two hinge rods, each hinged to one of the two hinge seats, with a first rubber clamping seat mounted on the end of each hinge rod away from the hinge seat; and a drive rod rotatably connected to the middle of both hinge rods and forming a sliding fit with the drive slot.

[0009] Preferably, the clamping assembly further includes: two transmission gears, both rotatably connected to the mounting frame and respectively meshing with the two racks; two inserts, one end of each insert having a movable rod inserted into it, and the two ends of each movable rod being respectively fitted with a spring and a second rubber clamping seat; and two driven gears, each fixedly connected to the end of one of the two inserts away from the second rubber clamping seat, both rotatably connected to the fixed disc and respectively meshing with the two transmission gears.

[0010] Preferably, the clamping mechanism further includes: a threaded plate, which is fixedly connected to the fixed disk and has a threaded hole therethrough; and a limiting plate, which is fixedly connected to the fixed disk and has a circular groove therethrough.

[0011] Preferably, the adjusting assembly includes: a threaded rod, threadedly connected to the threaded plate, with a turntable mounted on its upper end and a hexagonal prism mounted on its lower end; a drive gear, having a prism groove matching the hexagonal prism through it, and meshing with the gear groove; and a limiting ring, rotatably connected to a circular groove on the limiting plate and fixedly connected to the drive gear.

[0012] Preferably, the drive mechanism includes: a first mounting plate fixedly connected to the mounting bracket, on which a motor is mounted; a shaft fixedly connected to the power output shaft of the motor; a first horizontal plate mounted on the outer surface of the housing, with its top surface rotatably connected to the shaft; a second horizontal plate mounted on the inner wall of the housing, with a rotating shaft rotatably mounted on its top surface; a first gear mounted on the upper end of the rotating shaft, meshing with a second gear mounted on the lower end of the vertical shaft; a first transmission belt for connecting the shaft and the rotating shaft; and a second transmission belt for connecting the shaft and the cylinder.

[0013] Preferably, it further includes: a liquid receiving tube, which is fixedly connected to the housing, the polishing disc is located inside the liquid receiving tube, and the vertical shaft passes through the liquid receiving tube and is rotatably connected to the liquid receiving tube; and a drain pipe, one end of which is fixedly connected to the liquid receiving tube and the other end of which extends outside the housing.

[0014] Preferably, the clamping mechanism further includes: multiple guide grooves, all formed on the drive plate; and multiple guide posts, all mounted on the bottom surface of the fixed plate, which respectively pass through the multiple guide grooves and are slidably connected to the guide grooves.

[0015] In summary, due to the adoption of the above technical solution, the beneficial effects of the present invention are: 1. The polishing mechanism in this invention, by setting up a hollow cylinder, a horizontal cylinder, a through pipe, a rotating cylinder, a connecting pipe, and a four-way connector, can provide a pipeline foundation for the liquid and gas supply of subsequent polishing, cleaning, and drying processes. It eliminates the need to build multiple sets of delivery pipelines separately, greatly simplifies the equipment pipeline layout, and reduces the equipment footprint. At the same time, it eliminates the need to transfer seed crystals across equipment, avoiding defects such as microcracks and edge chipping on the seed crystal surface.

[0016] 2. The driving mechanism in this invention comprises a first mounting plate, a motor, a shaft, a first horizontal plate, a second horizontal plate, a rotating shaft, a first gear, a first transmission belt, and a second transmission belt. The motor drives the shaft, which in turn drives the clamping mechanism and the seed crystal to rotate via the second transmission belt. Simultaneously, the first transmission belt, the rotating shaft, the first gear, and the second gear drive the polishing disc to rotate in the opposite direction. At the same rotation speed, higher polishing efficiency can be achieved. Furthermore, the opposite rotation of the two components results in a cross-shaped network of polishing patterns, avoiding unidirectional scratches caused by rotation in the same direction and improving the surface finish of the seed crystal. It also reduces the number of motors and lowers equipment costs.

[0017] 3. The adjustment component in this invention is equipped with a threaded rod, a hexagonal prism, a drive gear, a prism groove, and a limiting ring. By rotating the threaded rod, the drive gear is driven, and the drive plate is rotated through the groove. This causes the drive groove on the drive plate to drive the drive rods of multiple clamping components to move synchronously, allowing the multiple clamping components to converge towards the center simultaneously. This automatically positions the seed crystal to the geometric center of the fixed disk, eliminating the need for manual alignment and ensuring the parallelism between the polished surface and the polishing disk. Simultaneously, the same drive plate drives multiple clamping components, ensuring balanced force at each clamping point and preventing seed crystal breakage due to single-point overpressure. Furthermore, the threaded pair between the threaded rod and the threaded plate has a self-locking characteristic, maintaining the clamping force without additional locking devices after adjustment, preventing loosening caused by polishing vibration.

[0018] 4. The clamping assembly in this invention is provided with a rack, a transmission gear, a cylinder, a movable rod, a spring, a driven gear, and a second rubber clamping seat. When the drive rod moves, the hinge rod drives the first rubber clamping seat to clamp the outer wall of the seed crystal. At the same time, the sliding of the hinged seat will also drive the rack, and then the transmission gear and the driven gear will cause the cylinder to rotate. In turn, the second rubber clamping seat will rotate to the corner of the seed crystal to form an elastic clamping, which further improves the clamping stability of the seed crystal. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a three-dimensional representation of the seed crystal preparation apparatus for monocrystalline silicon production in this invention. Figure 1 ; Figure 2 This is a three-dimensional representation of the seed crystal preparation apparatus for monocrystalline silicon production in this invention. Figure 2 ; Figure 3 This is a schematic diagram of the assembly structure of the polishing mechanism, driving mechanism, clamping mechanism and lifting mechanism in this invention; Figure 4 This is a schematic diagram of the internal structure of the hollow cylinder and the rotating cylinder in this invention; Figure 5 This is a perspective view of the clamping mechanism in this invention; Figure 6 In this invention Figure 5 Exploded view; Figure 7 In this invention Figure 6 Enlarged schematic diagram of part A; Figure 8 This is a schematic diagram of the assembly structure of the drive gear and the limiting ring in this invention; Figure 9 This is a perspective view of the clamping component in this invention; Figure 10 This is a schematic diagram of the assembly structure of the rack, transmission gear, and driven gear in this invention; Figure 11 This is a schematic diagram of the assembly structure of the movable rod, spring, and second rubber clamp in this invention; Reference numerals: 100, housing; 101, mounting bracket; 102, receiving tube; 103, drain pipe; 110, polishing mechanism; 111, polishing disc; 1111, through hole; 1112, vertical shaft; 112, hollow cylinder; 113, horizontal cylinder; 114, through pipe; 115, rotating cylinder; 116, connecting pipe; 117, four-way connector; 118, second gear; 120, drive mechanism; 121, first mounting plate; 122, motor; 123, shaft; 124, first horizontal plate; 125, second horizontal plate; 126, rotating shaft; 127, first gear; 128, first transmission belt; 129, second transmission belt; 130, clamping mechanism; 131, hollow rod; 132, cylinder; 133, insertion rod; 134, fixing plate; 134, threaded plate; 134, ... 2. Limiting plate; 135. Drive plate; 1351. Drive groove; 1352. Gear groove; 136. Adjustment assembly; 1361. Threaded rod; 1362. Turntable; 1363. Hexagonal prism; 1364. Drive gear; 1365. Prism groove; 1366. Limiting ring; 137. Clamping assembly; 1371. Mounting frame; 1372. Hinge seat; 1373. Hinge rod; 13731. First rubber clamping seat; 1374. Drive rod; 1375. Rack; 1376. Transmission gear; 1377. Insert cylinder; 13771. Movable rod; 13772. Spring; 1378. Driven gear; 1379. Second rubber clamping seat; 140. Lifting mechanism; 141. Guide rail; 142. Sliding frame; 143. Second mounting plate; 144. Hydraulic cylinder. Detailed Implementation

[0021] To make the above-mentioned objects, features, and advantages of the present invention more apparent and understandable, specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of them. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of the present invention.

[0022] Many specific details are set forth in the following description in order to provide a full understanding of the invention. However, the invention may also be practiced in other ways different from those described herein, and those skilled in the art can make similar extensions without departing from the spirit of the invention. Therefore, the invention is not limited to the specific embodiments disclosed below.

[0023] Secondly, the term "one embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The phrase "in one embodiment" appearing in different places in this specification does not necessarily refer to the same embodiment, nor is it a single or selective embodiment that is mutually exclusive with other embodiments.

[0024] This invention is described in detail with reference to the accompanying drawings. When detailing the embodiments of this invention, for ease of explanation, the cross-sectional views illustrating the device structure may be partially enlarged, not to scale. Furthermore, the accompanying drawings are merely examples and should not be construed as limiting the scope of protection of this invention. In actual fabrication, the three-dimensional spatial dimensions of length, width, and depth should be included.

[0025] Furthermore, it should be noted in the description of this invention that the terms "first," "second," or "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0026] Unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" in this invention should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; similarly, they can refer to mechanical connections, electrical connections, or direct connections, or indirect connections through an intermediate medium, or internal connections between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0027] Example 1: As Figures 1 to 5 As shown, a seed crystal preparation device for monocrystalline silicon production includes a mounting frame 101 mounted on a housing 100. The mounting frame 101 is equipped with a clamping mechanism 130 and a lifting mechanism 140 for driving the clamping mechanism 130 to move vertically. The seed crystal preparation device for monocrystalline silicon production also includes a polishing mechanism 110 and a driving mechanism 120. The driving mechanism 120 is used to drive the clamping mechanism 130 and the polishing mechanism 110 to rotate simultaneously and in opposite directions.

[0028] The polishing mechanism 110 includes a polishing disc 111, a hollow cylinder 112, multiple through-tubes 114, and a rotating cylinder 115. The polishing disc 111 is located directly below the clamping mechanism 130 and is rotatably connected to the housing 100 via a vertical shaft 1112. Multiple through-holes 1111 are formed in the polishing disc 111. The hollow cylinder 112 is fixedly sleeved on the vertical shaft 1112, and a horizontal cylinder 113 is fixedly connected to the hollow cylinder 112, communicating with the interior of the hollow cylinder 112. Multiple through-tubes 114 are installed on the horizontal cylinder 113, and each through-tube 114... The lower end is inserted into the through holes 1111 on the polishing disc 111. The rotating cylinder 115 is rotatably connected to the hollow cylinder 112, and the interiors of the rotating cylinder 115 and the hollow cylinder 112 are connected. A connecting pipe 116 is connected to the rotating cylinder 115, and a four-way connector 117 is installed at the other end of the connecting pipe 116. The other three ends of the four-way connector 117 are respectively connected to the polishing liquid delivery pipe, the clean water delivery pipe, and the blower air delivery pipe. The other end of the polishing liquid delivery pipe is connected to the polishing liquid delivery device; the other end of the clean water delivery pipe is connected to the water pump; and the other end of the blower air delivery pipe is connected to the blower. One-way valves are installed in the polishing liquid delivery pipe, the clean water delivery pipe, and the blower air delivery pipe to prevent liquid and gas backflow.

[0029] Specifically, the polishing surface of the polishing pad 111 is provided with a diamond micro powder sintered polishing layer, which can ensure polishing efficiency and surface precision. Multiple through holes 1111 can provide installation and insertion positions for the through pipe 114, and also allow polishing fluid, clean water and air to be directly delivered to the contact area between the seed crystal and the polishing pad 111 through the through holes 1111, so as to achieve precise supply and improve resource utilization efficiency. Hollow cylinder 112 is fixedly connected to vertical shaft 1112, enabling hollow cylinder 112 to rotate synchronously with vertical shaft 1112. Hollow cylinder 112 is also rotatably connected to rotating cylinder 115. Hollow cylinder 112 is also connected to pipe 114 through horizontal cylinder 113, realizing multi-stage liquid-gas conduction. The rotatable connection design between rotating cylinder 115 and hollow cylinder 112 ensures that rotating cylinder 115 and connecting pipe 116 remain stationary when hollow cylinder 112 rotates with vertical shaft 1112, preventing liquid-gas conduction pipeline from tangling or being damaged due to rotation, and ensuring the stability of pipeline connection.

[0030] like Figure 3 As shown, the lifting mechanism 140 includes a guide rail 141, a second mounting plate 143, and a hydraulic cylinder 144; wherein, the guide rail 141 is mounted on the mounting frame 101, and a sliding frame 142 is slidably connected to the guide rail 141; the second mounting plate 143 is mounted on the mounting frame 101; the hydraulic cylinder 144 is mounted on the second mounting plate 143, and the extension end of the hydraulic cylinder 144 is fixedly connected to the sliding frame 142.

[0031] Specifically, the sliding engagement between the guide rail 141 and the sliding frame 142 provides guidance and limitation for the vertical movement of the clamping mechanism 130, ensuring the coaxiality of the clamping mechanism 130 during the lifting process and preventing seed crystal offset from causing contact deviation with the polishing disc 111. The hydraulic cylinder 144, as a power source, features high lifting accuracy and stable operation, and can precisely control the descent distance of the sliding frame 142, thereby controlling the contact pressure between the seed crystal and the polishing disc 111, avoiding excessive contact that could cause seed crystal indentation or polishing layer wear. At the same time, the hydraulic cylinder 144 can quickly separate the seed crystal from the polishing disc 111, meeting the process switching requirements of polishing, cleaning, or drying.

[0032] like Figure 5 and Figure 6 As shown, the clamping mechanism 130 includes a hollow rod 131, a cylinder 132, a fixed plate 134, a drive plate 135, an adjustment assembly 136, and multiple sets of clamping assemblies 137; wherein, the hollow rod 131 is rotatably connected to the sliding frame 142; the cylinder 132 is rotatably mounted on the mounting frame 101, and a plug rod 133 that engages with the hollow rod 131 is installed at the bottom of the cylinder 132; the fixed plate 134 is fixedly connected to the lower end of the hollow rod 131, and the fixed plate 135... The bottom of the 34 has a storage cavity; the drive plate 135 is rotatably connected to the bottom surface of the fixed plate 134, and the drive plate 135 has multiple drive grooves 1351, which are arc-shaped grooves. The drive plate 135 has toothed grooves 1352 on its side; the adjustment component 136 is used to drive the drive plate 135 to rotate; multiple clamping components 137 are installed in the storage cavity of the fixed plate 134, and the multiple clamping components 137 are used to clamp and fix the seed crystal.

[0033] Specifically, the hollow rod 131 is rotatably connected to the sliding frame 142 and can rise and fall along the guide rail 141 with the sliding frame 142. The other end of the hollow rod 131 is fixedly connected to the fixed plate 134, thereby driving the seed crystal to rise, fall and rotate synchronously. The cylinder 132 is rotatably connected to the mounting bracket 101, and the insertion rod 133 at the bottom of the cylinder 132 is inserted into the hollow rod 131. This insertion structure enables the hollow rod 131 to maintain a power connection with the cylinder 132 during the process of rising and falling with the sliding frame 142, ensuring the continuous power output of the drive mechanism 120 to the clamping mechanism 130.

[0034] Multiple drive slots 1351 on the drive plate 135 are evenly distributed along the circumference. Each drive slot 1351 corresponds to a set of clamping components 137. The rotation of the drive plate 135 will drive the multiple sets of clamping components 137 to open and close synchronously through the multiple drive slots 1351, ensuring the coaxiality of the seed crystal clamping. The adjustment component 136 provides power and precise adjustment for the rotation of the drive plate 135, making the opening and closing degree of the clamping components 137 controllable and adaptable to the clamping requirements of seed crystals of different diameters.

[0035] like Figure 5 and Figure 6 As shown, the clamping mechanism 130 also includes multiple guide grooves and multiple guide posts; wherein, the multiple guide grooves are all formed on the drive plate 135; the multiple guide posts are all installed on the bottom surface of the fixed plate 134, and the multiple guide posts pass through the multiple guide grooves and are slidably connected to the guide grooves.

[0036] Specifically, the guide groove on the drive plate 135 slides with the guide post on the bottom surface of the fixed plate 134, which can provide guidance and limit for the rotation of the drive plate 135, prevent radial displacement during the rotation of the drive plate 135, ensure that the drive groove 1351 on the drive plate 135 and the drive rod 1374 of the clamping assembly 137 always maintain a precise sliding fit, and improve the opening and closing synchronization of the clamping assembly 137.

[0037] like Figure 5 , Figure 6 and Figures 9-11 As shown, the clamping assembly 137 includes a mounting frame 1371, two hinge seats 1372, two hinge rods 1373, and a drive rod 1374. The mounting frame 1371 is installed in the storage slot of the fixed plate 134. Both hinge seats 1372 are slidably connected to the mounting frame 1371, and racks 1375 are installed on the opposite sides of the two hinge seats 1372. The two hinge rods 1373 are respectively hinged to the two hinge seats 1372, and a first rubber clamping seat 13731 is installed at the end of the hinge rod 1373 away from the hinge seat 1372. The drive rod 1374 is rotatably connected to the two hinge rods 1373 and slidably connected to the drive groove 1351.

[0038] Furthermore, the clamping assembly 137 also includes two drive gears 1376, two inserts 1377, and two driven gears 1378; both drive gears 1376 are rotatably connected to the mounting frame 1371, and both drive gears 1376 are respectively meshed with two racks 1375; one end of each insert is connected to a movable rod 13771, and both ends of the movable rod 13771 are respectively equipped with a spring 13772 and a second rubber clamping seat 1379; the two driven gears 1378 are respectively fixedly connected to the ends of the two inserts 1377 away from the second rubber clamping seat 1379, both driven gears 1378 are rotatably connected to the fixed disk 134, and both driven gears 1378 are respectively meshed with the two drive gears 1376.

[0039] The first rubber clamping seat 13731 and the second rubber clamping seat 1379 are designed to ensure the friction of clamping while avoiding scratches on the surface of the seed crystal. At the same time, the rubber material has a certain degree of corrosion resistance and can adapt to the corrosion of polishing fluid.

[0040] Specifically, by setting an arc-shaped drive groove 1351, when the drive plate 135 rotates, it will drive the drive rod 1374 to move through the drive groove 1351, thereby converting the rotational motion of the drive plate 135 into the linear motion of the drive rod 1374, which in turn drives the two hinge rods 1373 to rotate around the drive rod 1374, completing the opening and closing of the first rubber clamping seat 13731 and realizing the initial clamping of the seed crystal.

[0041] When the drive rod 1374 moves, the hinge seat 1372 slides along the mounting frame 1371, which drives the rack 1375 to move synchronously. Since the rack 1375 meshes with the transmission gear 1376, when the rack 1375 moves, it drives the transmission gear 1376 to rotate, which in turn drives the driven gear 1378 and the insert 1377 to rotate, so that the second rubber clamping seat 1379 rotates with the insert 1377 to the corner position of the seed crystal, completing the circumferential all-round clamping of the seed crystal and avoiding radial and circumferential displacement of the seed crystal during the polishing process. Furthermore, the insertion and engagement of the movable rod 13771 and the insert 1377, combined with the elastic buffering effect of the spring 13772, enable the second rubber clamping seat 1379 to have elastic clamping capability. It can be elastically adjusted according to the size and shape of the seed crystal, avoiding seed crystal indentation and edge damage caused by rigid clamping. At the same time, the preload of the spring 13772 can ensure the stability of clamping.

[0042] like Figure 7 and Figure 8 As shown, the clamping mechanism 130 also includes a threaded plate 1341 and a limiting plate 1342; wherein, the threaded plate 1341 is fixedly connected to the fixed disk 134, and a threaded hole is provided through the threaded plate 1341; the limiting plate 1342 is fixedly connected to the fixed disk 134, and a circular groove is provided through the limiting plate 1342.

[0043] The adjusting assembly 136 includes a threaded rod 1361, a drive gear 1364, and a limiting ring 1366. The threaded rod 1361 is threadedly connected to a threaded plate 1341. A turntable 1362 is mounted on the upper end of the threaded rod 1361, and a hexagonal prism 1363 is mounted on the lower end of the threaded rod 1361. A prism groove 1365 matching the hexagonal prism 1363 is formed through the drive gear 1364, and the drive gear 1364 is meshed with the tooth groove 1352. The limiting ring 1366 is rotatably connected to a circular groove on the limiting plate 1342, and the limiting ring 1366 is fixedly connected to the drive gear 1364.

[0044] Specifically, when the drive plate 135 needs to be rotated, the turntable 1362 is rotated, which drives the threaded rod 1361 to rotate, which in turn drives the hexagonal prism 1363 to rotate, which in turn drives the drive gear 1364 to rotate, which in turn drives the drive plate 135 to rotate through the tooth groove 1352, which drives multiple sets of clamping components 137 to open and close synchronously.

[0045] Furthermore, the threaded engagement between the threaded rod 1361 and the threaded plate 1341 has a self-locking function, which can ensure that the position is fixed after adjustment and prevent the clamping component 137 from loosening due to vibration during the polishing process. The rotatable connection between the limiting ring 1366 and the groove of the limiting plate 1342 provides rotational guidance and radial limiting for the drive gear 1364, ensuring the meshing accuracy between the drive gear 1364 and the tooth groove 1352, while preventing the drive gear 1364 from axially shifting.

[0046] like Figure 3 As shown, the drive mechanism 120 includes a first mounting plate 121, a motor 122, a shaft 123, a first horizontal plate 124, a second horizontal plate 125, a rotating shaft 126, a first gear 127, a first transmission belt 128, and a second transmission belt 129. The first mounting plate 121 is fixedly connected to the mounting bracket 101, and the motor 122 is mounted on the first mounting plate 121. The shaft 123 is fixedly connected to the power output shaft of the motor 122. The first horizontal plate 124 is mounted on the outer surface of the housing 100, and the top surface of the first horizontal plate 124 rotates with the shaft 123. The second horizontal plate 125 is installed on the inner wall of the housing 100, and a rotating shaft 126 is rotatably installed on the top surface of the second horizontal plate 125; the first gear 127 is installed on the upper end of the rotating shaft 126, and the first gear 127 meshes with the second gear 118 installed on the lower end of the vertical shaft 1112; the first pulley is fixedly sleeved on both the shaft 123 and the rotating shaft 126, and the first transmission belt 128 is sleeved on the two first pulleys; the second pulley is fixedly sleeved on both the shaft 123 and the cylinder 132, and the second transmission belt 129 is sleeved on the two second pulleys.

[0047] Specifically, when the motor 122 is running, it will drive the shaft 123 to rotate, which will drive the cylinder 132 to rotate through the second transmission belt 129, which in turn will drive the hollow rod 131 to rotate, which will drive the fixed disk 134 to rotate, which will drive the clamped seed crystal to rotate. Furthermore, when the shaft 123 rotates, it will also drive the rotating shaft 126 to rotate through the first belt pulley, which in turn drives the first gear 127 to rotate, which in turn drives the second gear 118 to rotate, which in turn drives the vertical shaft 1112 and the polishing disc 111 to rotate. At the same time, the meshing transmission of the first gear 127 and the second gear 118 changes the direction of power transmission. Combined with the power transmission of the cylinder 132 by the second transmission belt 129, the seed crystal and the polishing disc 111 rotate in opposite directions synchronously.

[0048] Working principle: Before use, connect the four ports of the four-way connector 117 to the connecting pipe 116, the polishing liquid delivery pipe, the clean water delivery pipe and the fan air delivery pipe respectively.

[0049] In use, the single-crystal silicon seed crystal to be polished is placed at the center of the polishing disk 111 directly below the fixed disk 134; then, the turntable 1362 of the adjusting component 136 is rotated, so that the turntable 1362 drives the threaded rod 1361 to rotate around the threaded hole of the threaded plate 1341. When the threaded rod 1361 rotates, it will drive the drive gear 1364 to rotate around the limit ring 1366, and then drive the drive plate 135 to rotate through the tooth groove 1352. During the rotation of the drive plate 135, the multiple drive grooves 1351 on the drive plate 135 drive the drive rods 1374 of the multiple clamping components 137 to slide linearly. The drive rods 1374 drive the two hinge rods 1373 to rotate, so that the two first rubber clamping seats 13731 in the same clamping component 137 approach each other until they contact the outer wall of the seed crystal, thus achieving the initial clamping of the seed crystal.

[0050] When the hinge rod 1373 rotates, it drives the hinge seat 1372 to slide along the mounting frame 1371. The moving hinge seat 1372 drives the rack 1375 to move, and the moving rack 1375 drives the transmission gear 1376 to rotate, which in turn meshes with and drives the driven gear 1378 to rotate, thereby causing the insert 1377 to rotate. This causes the second rubber clamping seat 1379 to rotate with the insert 1377 to the corner position of the seed crystal and abut against the surface of the seed crystal. This abutting force generates an axial compressive force on the movable rod 13771. The movable rod 13771 slides inward along the insert 1377, compressing the spring 13772. The spring 13772 generates an elastic reaction force, causing the second rubber clamping seat 1379 to elastically clamp the seed crystal, thus completing the seed crystal clamping.

[0051] Then, the hydraulic cylinder 144 of the lifting mechanism 140 is activated. The extension end of the hydraulic cylinder 144 extends downward, driving the sliding frame 142 to slide downward along the guide rail 141. The sliding frame 142 drives the hollow rod 131 to move downward. The hollow rod 131 slides downward along the insertion rod 133, and at the same time drives the fixed plate 134, multiple sets of clamping components 137 and the clamped seed crystal to move downward synchronously until the bottom surface of the seed crystal is in close contact with the polishing surface of the polishing plate 111. Then, the hydraulic cylinder 144 is closed. Then, through the motor 122, the power output shaft of the motor 122 drives the shaft 123 to rotate. While the shaft 123 rotates, it drives the cylinder 132 to rotate through the second transmission belt 129, and then drives the hollow rod 131 to rotate through the insertion rod 133. When the hollow rod 131 rotates, it drives the fixed disk 134, the clamping assembly 137 and the clamped seed crystal to rotate synchronously. Furthermore, as the shaft 123 rotates, it drives the rotating shaft 126 to rotate via the first transmission belt 128. The rotating shaft 126 drives the first gear 127 to rotate synchronously. The rotating first gear 127 meshes with and drives the second gear 118 to rotate, which in turn drives the vertical shaft 1112 and the polishing disc 111 to rotate. Moreover, the rotation direction of the polishing disc 111 is opposite to the rotation direction of the seed crystal.

[0052] Then, by opening the valve of the polishing fluid delivery pipe, the polishing fluid enters the connecting pipe 116 through the four-way connector 117, then enters the interior of the hollow cylinder 112 through the rotating drum 115, and then is distributed to each through pipe 114 through the horizontal cylinder 113. Finally, it is delivered to the contact area between the seed crystal and the polishing disc 111 through the through hole 1111 of the polishing disc 111, thereby facilitating the polishing of the seed crystal.

[0053] After the preset polishing time is reached, close the valve of the polishing fluid delivery pipe. While keeping the motor 122 running, start the hydraulic cylinder 144, causing the extension end of the hydraulic cylinder 144 to retract upwards, thereby driving the sliding frame 142, hollow rod 131, and the clamped seed crystal to move upwards, separating the seed crystal from the polishing disc 111. Control the separation distance to be 5-10mm, then close the hydraulic cylinder 144, and then open the valve of the clean water delivery pipe. Clean water flows through the four-way connector 117, connecting pipe 116, rotating drum 115, hollow cylinder 112, horizontal cylinder 113, through pipe 114, and through hole 1111 onto the rotating seed crystal surface. During the rotation of the seed crystal, the clean water forms a centrifugal rinsing effect on its surface, removing polishing fluid residue from the surface and corners of the seed crystal. After rinsing for the preset time, close the valve of the clean water delivery pipe.

[0054] Then, by opening the valve of the blower's air supply pipe, the air generated by the blower is blown onto the rotating seed crystal surface through the four-way connector 117, connecting pipe 116, rotating cylinder 115, hollow cylinder 112, horizontal cylinder 113, through pipe 114, and through hole 1111. During the high-speed rotation of the seed crystal, the air forms a centrifugal drying effect on its surface, quickly removing the moisture from the seed crystal surface and preventing water stains from adhering, thus achieving water-mark-free drying of the seed crystal. After drying is completed, the valves of the motor 122 and the blower's air supply pipe are closed, and the hydraulic cylinder 144 is started to move the seed crystal upward to the preset height.

[0055] Finally, the turntable 1362 is rotated in the opposite direction, causing the threaded rod 1361 to rotate, which in turn causes the drive gear 1364 to rotate in the opposite direction. The drive plate 135 then rotates in the opposite direction, which in turn causes the drive rod 1374 of the clamping assembly 137 to slide in the opposite direction, so that the first rubber clamping seats 13731 in the same group move away from each other. At the same time, the rack 1375, the transmission gear 1376 and the driven gear 1378 drive in the opposite direction, so that the second rubber clamping seat 1379 separates from the seed crystal. After the clamping assembly 137 is fully opened, the prepared seed crystal is removed, and the polishing operation of the seed crystal is completed.

[0056] Example 2: As Figure 5 and Figure 6 As shown, while all other parts are the same as in Example 1, the difference between this example and Example 1 is that: The seed crystal preparation device for monocrystalline silicon production also includes a liquid receiving cylinder 102 and a liquid drain pipe 103; wherein, the liquid receiving cylinder 102 is fixedly connected to the housing 100, the polishing disk 111 is located inside the liquid receiving cylinder 102, and the vertical shaft 1112 passes through the liquid receiving cylinder 102 and is rotatably connected to the liquid receiving cylinder 102; one end of the liquid drain pipe 103 is fixedly connected to the liquid receiving cylinder 102, and the other end of the liquid drain pipe 103 extends outside the housing 100.

[0057] Working principle: The receiving cylinder 102 covers the polishing disc 111, which can collect polishing liquid and cleaning wastewater in a unified manner. The drain pipe 103 can transport the waste liquid collected by the receiving cylinder 102 to the outside of the tank 100, which facilitates the unified treatment and recycling of waste liquid and meets the requirements of environmental protection production.

[0058] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

[0059] The preferred embodiments of the present invention disclosed above are merely illustrative of the invention. These preferred embodiments do not exhaustively describe all details, nor do they limit the invention to specific implementations. Clearly, many modifications and variations can be made based on the content of this specification. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of the invention, thereby enabling those skilled in the art to better understand and utilize the invention. The invention is limited only by the claims and their full scope and equivalents.

Claims

1. A seed crystal preparation apparatus for monocrystalline silicon production, comprising a mounting frame mounted on a housing, wherein a clamping mechanism and a lifting mechanism for driving the clamping mechanism to move vertically are mounted on the mounting frame, characterized in that, It also includes a polishing mechanism and a driving mechanism, wherein the driving mechanism is used to drive the clamping mechanism and the polishing mechanism to rotate simultaneously and in opposite directions; the polishing mechanism includes: The polishing disc is rotatably connected to the housing via a vertical shaft, and has multiple through holes. A hollow cylinder is coaxially fixedly sleeved on the outer periphery of the vertical shaft. A horizontal cylinder extends horizontally from the outer wall of the hollow cylinder. Multiple through pipes are installed on the horizontal cylinder, and the multiple through pipes are respectively inserted into multiple through holes. A rotating drum is rotatably connected to the hollow drum and the two are internally connected. A connecting pipe is connected to the rotating drum. A four-way connector is installed at the end of the connecting pipe away from the rotating drum. The other ports of the four-way connector are used to connect to the polishing liquid supply source, the cleaning liquid supply source, and the gas drying supply source, respectively.

2. The seed crystal preparation apparatus for monocrystalline silicon production according to claim 1, characterized in that, The lifting mechanism includes: A guide rail is mounted on the mounting bracket, and a sliding bracket is slidably connected to it. The second mounting plate is fixedly mounted on the mounting bracket; A hydraulic cylinder is mounted on the second mounting plate, and its extended end is fixedly connected to the sliding frame.

3. The seed crystal preparation apparatus for monocrystalline silicon production according to claim 2, characterized in that, The clamping mechanism includes: A hollow rod is rotatably connected to the sliding frame; A cylinder is rotatably mounted on the mounting bracket, and a plug rod is installed at its bottom to engage with the hollow rod. A fixed plate is fixedly connected to the lower end of the hollow rod, and a storage cavity is opened at its bottom; The drive plate is rotatably connected to the bottom surface of the fixed plate, and has multiple drive grooves on its surface and toothed grooves on its side surface. An adjustment component is used to drive the drive plate to rotate; Multiple sets of clamping components are evenly distributed circumferentially within the placement cavity. Each set of clamping components is connected to a corresponding drive slot for self-centering clamping of the seed crystal.

4. The seed crystal preparation apparatus for monocrystalline silicon production according to claim 3, characterized in that, The clamping assembly includes: The mounting frame is installed in the storage slot of the fixed plate; Both hinged seats are slidably connected to the mounting frame, and racks are installed on their opposite sides. Two hinge rods are respectively hinged to two hinge seats, and a first rubber clamping seat is installed at the end of each hinge rod away from the hinge seat; The drive rod is rotatably connected to the middle of the two hinged rods and forms a sliding fit with the drive groove.

5. The seed crystal preparation apparatus for monocrystalline silicon production according to claim 4, characterized in that, The clamping assembly further includes: Both transmission gears are rotatably connected to the mounting frame and mesh with the two racks respectively; Two inserts, one end of which is connected to a movable rod, and the two ends of the movable rod are respectively equipped with a spring and a second rubber clamp. Two driven gears are fixedly connected to the ends of the two inserts away from the second rubber clamp, respectively, and are rotatably connected to the fixed disk, respectively meshing with the two transmission gears.

6. The seed crystal preparation apparatus for monocrystalline silicon production according to claim 3, characterized in that, The clamping mechanism further includes: A threaded plate is fixedly connected to the fixed disk, and a threaded hole is provided through it. A limiting plate is fixedly connected to the fixed plate, and a circular groove is formed through it.

7. The seed crystal preparation apparatus for monocrystalline silicon production according to claim 6, characterized in that, The adjustment component includes: A threaded rod is threadedly connected to the threaded plate, with a turntable installed at its upper end and a hexagonal prism installed at its lower end; A drive gear has a prism groove through which it is matched with a hexagonal prism and meshes with the tooth groove; The limiting ring is rotatably connected to the circular groove on the limiting plate and fixedly connected to the drive gear.

8. The seed crystal preparation apparatus for monocrystalline silicon production according to claim 3, characterized in that, The drive mechanism includes: A first mounting plate is fixedly connected to the mounting frame, and a motor is mounted on it; The shaft is fixedly connected to the power output shaft of the motor; The first horizontal plate is installed on the outer surface of the box, and its top surface is rotatably connected to the shaft. The second horizontal plate is installed on the inner wall of the box, and a rotating shaft is rotatably installed on its top surface; The first gear is installed on the upper end of the rotating shaft and meshes with the second gear installed on the lower end of the vertical shaft. A first transmission belt is used to connect the shaft and the rotating shaft; The second transmission belt is used to connect the shaft and the cylinder.

9. The seed crystal preparation apparatus for monocrystalline silicon production according to claim 1, characterized in that, Also includes: A liquid receiving tube is fixedly connected to the box body, the polishing disc is located inside the liquid receiving tube, and the vertical shaft passes through the liquid receiving tube and is rotatably connected to the liquid receiving tube. The drain pipe has one end fixedly connected to the receiving cylinder and the other end extending outside the box.

10. The seed crystal preparation apparatus for monocrystalline silicon production according to claim 3, characterized in that, The clamping mechanism further includes: Multiple guide slots are formed on the drive plate; Multiple guide posts are installed on the bottom surface of the fixed plate, and each of them passes through multiple guide grooves and is slidably connected to the guide grooves.

Images