Transfer printing seal integrated with perceptual drive sensing system and transfer printing method of transfer printing seal

By integrating a driving sensing system into the transfer stamp, the shortcomings of adhesion and multidimensional force sensing in transfer technology are solved, enabling precise adhesion control and multidimensional force detection at the interface between the stamp and micro/nano devices, thus improving the reliability and efficiency of the transfer process.

CN122126796APending Publication Date: 2026-06-02TIANJIN UNIV
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Patent Information

Application Number
CN202610278215.2
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-03-09
Publication Date
2026-06-02

AI Technical Summary

Technical Problem

Existing transfer technologies have shortcomings in multidimensional force sensing and adhesion force control, making it difficult to achieve precise transfer and positioning of micro and nano devices.

Method used

Design a transfer stamp that integrates controllable adhesion force and multidimensional force sensing. The stamp unit is made of viscoelastic material and integrates a driving sensing system, including a stool-shaped frame, a driving module and a sensing module. The stamp's curvature and force sensing are controlled by electrical excitation to achieve real-time adjustment of adhesion force and multidimensional force detection.

Benefits of technology

It achieves precise adhesion force control and multi-dimensional force sensing at the interface between the stamp and micro/nano devices, improving the transfer yield and process reliability, and enabling rapid and repeatable extraction and release of micro/nano devices.

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Abstract

The invention discloses a transfer printing seal with controllable adhesive force and multi-dimensional force sensing functions, a driving sensing system is integrated in a cylindrical unit of the seal, the driving sensing system is provided with a stool-shaped frame, and the stool-shaped frame is in an inverted state; a driving module for enabling the system to generate active deformation is arranged on the outer side of any stool leg part of the stool-shaped frame, a sensing module for receiving force change is arranged on the outer side of each of the rest stool leg parts, the sensing module and the driving module are respectively provided with a power-on electrode, the power-on electrodes are arranged on the corresponding foot parts, and the power-on electrodes are electrically connected with the power-on electrodes. The bending amplitude of the seal is changed by regulating and controlling electric excitation parameters of the driving module, and then the adhesive force is adjusted. The invention further discloses a transfer printing method adopting the seal. The device has the functions of active bending and multi-dimensional force sensing, and the adhesive force between the seal and the interface of the micro-nano device can be adjusted, so that switching between the pick-up state and the release state of the micro-nano device is achieved; the pick-up and release states of the micro-nano device can be judged in real time.
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