A grill jig

Abstract

The present application provides a grill jig, which can be compatible with multiple specifications while ensuring that the reel is vertically placed, and ensures airflow circulation during the drying process, and is suitable for automated handling. It comprises: a pair of hollow vertical plates, the width of the upper region of each hollow vertical plate is greater than the lower region, the bottom of the upper region is recessed inward on both sides to form a mechanical arm support notch; two bottom support cylindrical rods; and two side edge limiting cylindrical rods; a pair of the hollow vertical plates are arranged in parallel along the length direction, the lower regions of the two hollow vertical plates are fixedly connected through the two bottom support cylindrical rods on both sides, the upper regions of the two hollow vertical plates are fixedly connected through the two side edge limiting cylindrical rods on both sides, and the bottom support cylindrical rod and the side edge limiting cylindrical rod on the same side are symmetrically arranged with respect to the width median plane of the hollow vertical plate relative to the bottom support cylindrical rod and the side edge limiting cylindrical rod on the other side.

Description

Technical Field

[0001] This invention relates to the technical field of semiconductor manufacturing auxiliary equipment, specifically a baking rack fixture. Background Technology

[0002] In the semiconductor packaging process, reels need to be dehumidified and cured by baking before being loaded onto the production line and after being collected. The reel structure consists of two φ530 discs on both sides and a φ100 cylinder in the middle, and is available in three thickness specifications: 45mm, 55mm, and 80mm.

[0003] Existing technologies for drying reels typically involve stacking the reels flat or simply relying on a flat surface for support. This approach has the following problems: poor reel stability, making them prone to tipping over; different thicknesses require different fixtures, leading to complex management; stacked reels have a large contact area with the bearing surface, severely affecting hot air circulation; the reels can be placed in any orientation, affecting baking consistency; and they cannot be adapted for automated handling by robotic arms, relying on manual operation.

[0004] Therefore, there is an urgent need to develop a special baking rack fixture that can ensure the reels are placed vertically, is compatible with multiple specifications, guarantees airflow circulation, and is suitable for automated handling. Summary of the Invention

[0005] To address the aforementioned problems, this invention provides a drying rack fixture that ensures the reels are placed vertically while being compatible with various specifications, guaranteeing airflow circulation during the drying process, and is also suitable for automated handling.

[0006] A grill fixture, characterized in that it comprises: A pair of hollowed-out vertical plates, the upper area of ​​each hollowed-out vertical plate is wider than the lower area, and the bottom two sides of the upper area are concave inward to form a support notch for the robotic arm; Two bottom supporting cylindrical rods; And two side-limiting cylindrical rods; The two hollowed-out vertical plates are arranged parallel to each other at intervals along the length direction. The lower areas of the two hollowed-out vertical plates are fixed together by two bottom support cylindrical rods on both sides. The upper areas of the two hollowed-out vertical plates are fixed together by two side limiting cylindrical rods on both sides. The bottom support cylindrical rods and side limiting cylindrical rods on the same side are arranged symmetrically with respect to the bottom support cylindrical rods and side limiting cylindrical rods on the other side about the width of the hollowed-out vertical plate. The two bottom support cylindrical rods bear the main load of the reel structure; one side limiting cylindrical rod on each side is used for lateral limiting and anti-tipping of the reel structure.

[0007] Its further features are: Each of the aforementioned hollowed-out vertical panels has a large-area hollowed-out structure, which reduces heat shielding and improves the overall weight-to-strength ratio. The distance between the two side limiting cylindrical rods is less than the diameter of the two discs on both sides of the reel structure. The opposing arc surfaces of the two side limiting cylindrical rods are respectively machined with a number of concave limiting grooves. The concave limiting grooves are used to reliably lock the corresponding side discs of the reel structure. The concave limiting grooves of the two side limiting cylindrical rods are arranged symmetrically with respect to the vertical plane of the width of the hollow vertical plate, which makes the reel structure reliably vertically arranged. Each of the bottom supporting cylindrical rods has a recessed limiting groove sequentially arranged on its upper surface along its length. The recessed limiting groove is set at the length position of the inner limiting groove. The recessed limiting groove is used to reliably lock the bottom position of the corresponding side disc of the reel structure. Combined with the inner limiting groove of the side limiting cylindrical rod, it ensures that the reel structure is placed stably and reliably vertically, and makes the edge of the reel structure in line contact with the four cylinders. The reel structure is suspended in the air, avoiding large-area contact that would obstruct the hot air. The distance between the outer edges of the two side-limiting cylindrical rods is greater than the diameter of the two discs on both sides of the reel structure, which ensures that the side-limiting cylindrical rods have a protective function for the reel structure. The concave limiting groove of the side limiting cylindrical rod is also compatible with discs of different thicknesses of 45 / 55 / 80. The recessed limiting groove of the bottom supporting cylindrical rod is also compatible with discs of different thicknesses: 45 / 55 / 80. The starting and ending positions of the concave limiting groove and the lower limiting groove are all spaced apart from the inner surface of the corresponding hollow vertical plate to ensure that the vertical placement of the reel structure does not interfere with the hollow vertical plate. The position of the robotic arm support notch is located outside the surface area of ​​the reel structure it supports, ensuring that the reel structure will not be damaged during the robotic arm's transport process. The upper part of the hollowed-out vertical plate has upper fixing holes at both ends of the width direction at the top position of the upper region. The lower part of the lower region of the hollowed-out vertical plate has lower fixing holes arranged on both sides of the connecting plate. The two ends of the bottom support cylindrical rod on each side are fixed to the lower fixing holes of the two hollowed-out vertical plates by fasteners. The two ends of the side limiting cylindrical rod on each side are fixed to the upper fixing holes of the two hollowed-out vertical plates by fasteners. This allows the hollowed-out vertical plate, bottom support cylindrical rod, and side limiting cylindrical rod to be separated by removing the fasteners when not in use, without occupying a large material storage space. The upper region of the hollowed-out panel has a top hollowed-out area at the middle of its top width. Rectangular hollowed-out areas are provided on both sides of the corresponding positions at the lower middle of the upper region and the upper middle of the lower region. The lower region of the hollowed-out panel has a bottom hollowed-out area at the middle of its bottom. The space below the robotic arm support notch of the hollowed-out panel is also a hollowed-out area.

[0008] With this invention, reel structures of different thicknesses are arranged vertically. The two discs on both sides of the reel structure are supported by two bottom supporting cylindrical rods. The height of the two discs on both sides of the reel structure is supported by the side limiting cylindrical rods. The robotic arm supports the notch so that the robotic arm can be easily inserted to automatically pick up and put down the reel or transport the entire baking rack. While ensuring that the reel is placed vertically, it can be compatible with multiple specifications and ensure airflow circulation during the drying process, while also being suitable for automated handling. Attached Figure Description

[0009] Figure 1 This is a top view structural diagram of the present invention; Figure 2 This is a perspective view of the present invention with multiple sets of reel structures; Figure 3 This is a side view showing the multiple sets of reel structures of the present invention; Figure 4 This is a front view of the hollowed-out vertical plate of the present invention; The names corresponding to the serial numbers in the diagram are as follows: Hollowed-out vertical plate 10, upper area 101, lower area 102, upper fixing hole 11, lower fixing hole 12, robotic arm support notch 1, connecting plate 2, top hollowed-out area 3, rectangular hollowed-out area 4, bottom hollowed-out area 5; Bottom support cylindrical rod 20, concave limiting groove 21, side limiting cylindrical rod 30, concave limiting groove 31, reel structure 40, disc 401. Detailed Implementation

[0010] A type of grill fixture, see Figures 1-4 It includes a pair of hollowed-out upright plates 10, two bottom supporting cylindrical rods 20, and two side limiting cylindrical rods 30; The width of the upper region 101 of each hollowed-out vertical plate 10 is greater than that of the lower region 102, and the bottom sides of the upper region 101 are concave towards the center to form a mechanical arm support notch 1. A pair of hollowed-out vertical plates 10 are arranged parallel to each other along the length direction. The lower regions 102 of the two hollowed-out vertical plates 10 are fixedly connected by two bottom support cylindrical rods 20 on both sides. The upper regions 101 of the two hollowed-out vertical plates 10 are fixedly connected by two side limiting cylindrical rods 30 on both sides. The bottom support cylindrical rods 20 and side limiting cylindrical rods 30 on the same side are arranged symmetrically with respect to the bottom support cylindrical rods 20 and side limiting cylindrical rods 30 on the other side about the width of the hollowed-out vertical plate 10. The two bottom support cylindrical rods 20 at the bottom bear the main load of the reel structure 40; one side limiting cylindrical rod 30 on each side is used for lateral limiting and anti-tipping of the reel structure 40.

[0011] In a specific embodiment, each hollowed-out vertical plate 10 has a large-area hollowed-out structure, which reduces heat shielding and improves the overall weight-strength ratio. The distance between the two side limiting cylindrical rods 30 is less than the diameter of the two side discs 401 of the reel structure 40. The opposing arc surfaces of the two side limiting cylindrical rods 30 are respectively machined with a number of concave limiting grooves 31. The concave limiting grooves 31 are used to reliably lock the corresponding side discs 401 of the reel structure 40. The concave limiting grooves 31 of the two side limiting cylindrical rods 30 are arranged symmetrically about the width of the hollow vertical plate 10, which makes the reel structure 40 reliably vertically arranged. Each bottom supporting cylindrical rod 20 has a recessed limiting groove 21 sequentially arranged on its upper surface along its length. The recessed limiting groove 21 is set at the length position of the inner limiting groove 31. The recessed limiting groove 21 is used to reliably lock the bottom position of the corresponding side disc 401 of the reel structure 40. Combined with the inner limiting groove 31 of the side limiting cylindrical rod 30, it ensures that the reel structure 40 is placed stably and reliably in an upright position, and makes the edge of the reel structure 40 in line contact with the four cylinders (two bottom supporting cylindrical rods 20 and two side limiting cylindrical rods 30). The reel structure 40 is suspended in the air, avoiding large-area contact that would obstruct the hot air. The distance between the outer edges of the two side limiting cylindrical rods 30 is greater than the diameter of the two discs 401 on both sides of the reel structure 40, which ensures that the side limiting cylindrical rods 30 have a protective function for the reel structure 40. The concave limiting groove 31 of the side limiting cylindrical rod 30 is also adapted to the disc 401 of the reel structure 40 with different thicknesses of 45 / 55 / 80. The recessed limiting groove 21 of the bottom supporting cylindrical rod 20 is also adapted to the disc 401 of the reel structure 40 with different thicknesses of 45 / 55 / 80. The starting and ending positions of the concave limiting groove 31 and the concave limiting groove 21 are all spaced from the inner surface of the corresponding hollow vertical plate 10 to ensure that the vertical placement of the reel structure does not interfere with the hollow vertical plate 10. The position of the robotic arm support notch 1 is located outside the surface area of ​​the reel structure 40 it supports, ensuring that the robotic arm transfer process will not damage the reel structure 40. The upper region 101 of the hollow upright plate 10 has upper fixing holes 11 at both ends of the width direction at the top position. The lower region 102 of the hollow upright plate 10 has lower fixing holes 12 arranged on both sides on the connecting plate 2. The two ends of the bottom support cylindrical rod 20 on each side are fixed to the lower fixing holes 12 of the two hollow upright plates 10 by fasteners. The two ends of the side limiting cylindrical rod 30 on each side are fixed to the upper fixing holes 11 of the two hollow upright plates 10 by fasteners. This allows the hollow upright plate 10, the bottom support cylindrical rod 20, and the side limiting cylindrical rod 30 to be separated by removing the fasteners when not in use, without occupying a large material storage space. The upper region 101 of the hollowed-out vertical plate 10 has a top hollowed-out area 3 at the middle of its top width. Rectangular hollowed-out areas 4 are provided on both sides of the corresponding positions of the lower middle of the upper region 101 and the upper middle of the lower region 102 of the hollowed-out vertical plate 10. The lower region 102 of the hollowed-out vertical plate 10 has a bottom hollowed-out area 5 at the middle of its bottom. The space below the robotic arm support notch 1 of the hollowed-out vertical plate 10 is also a hollowed-out area.

[0012] The reel structures of different thicknesses are arranged vertically. The two discs on both sides of the reel structure are supported by two bottom support cylinders. The height of the two discs on both sides of the reel structure is supported by the side limit cylinders. The robotic arm supports the notch so that the robotic arm can be easily inserted to automatically pick up and put down the reel or transport the whole rack. While ensuring that the reel is placed vertically, it can be compatible with multiple specifications, ensure airflow circulation during the drying process, and is also suitable for automated handling.

[0013] This fixture is compatible with three different thicknesses of reel structures. Four cylindrical rods with limiting grooves ensure absolute stability of the reel structure in its vertical position, preventing it from tipping over. All reel mechanisms are placed vertically to guarantee consistent baking. Furthermore, the reel structure is suspended by only four cylindrical rods, with spacing between adjacent reel structures, allowing for 360° hot air circulation and significantly improving baking efficiency. The hollowed-out upright design is lightweight and facilitates airflow. The robotic arm support notch is compatible with the robotic arm insertion port design, perfectly adapting to automation. When multi-layer batch operations are required, the robotic arm support notch is attached to the layering rod, enabling multi-layer batch handling and significantly increasing production capacity.

[0014] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the present invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0015] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A grill fixture, characterized in that, It includes: A pair of hollowed-out vertical plates, the upper area of ​​each hollowed-out vertical plate is wider than the lower area, and the bottom two sides of the upper area are concave inward to form a support notch for the robotic arm; Two bottom supporting cylindrical rods; And two side-limiting cylindrical rods; The two hollowed-out vertical plates are arranged parallel to each other at intervals along the length direction. The lower areas of the two hollowed-out vertical plates are fixed together by two bottom support cylindrical rods on both sides. The upper areas of the two hollowed-out vertical plates are fixed together by two side limiting cylindrical rods on both sides. The bottom support cylindrical rods and side limiting cylindrical rods on the same side are arranged symmetrically with respect to the bottom support cylindrical rods and side limiting cylindrical rods on the other side about the width of the hollowed-out vertical plate. The two bottom support cylindrical rods bear the main load of the reel structure; one side limiting cylindrical rod on each side is used for lateral limiting and anti-tipping of the reel structure.

2. The grill fixture according to claim 1, characterized in that: Each of the aforementioned perforated panels has a large-area perforated structure.

3. The grill fixture according to claim 2, characterized in that: The distance between the two side limiting cylindrical rods is less than the diameter of the two discs on both sides of the reel structure. The opposing arc surfaces of the two side limiting cylindrical rods are respectively machined with a number of concave limiting grooves. The concave limiting grooves are used to reliably lock the corresponding side discs of the reel structure. The concave limiting grooves of the two side limiting cylindrical rods are arranged symmetrically with respect to the vertical plane of the width of the hollow vertical plate.

4. The grill fixture according to claim 3, characterized in that: Each of the bottom supporting cylindrical rods has a recessed limiting groove sequentially arranged on its upper surface along its length. The recessed limiting groove is positioned at the length of the inner limiting groove and is used to reliably lock the bottom of the corresponding side disc of the reel structure at the corresponding position.

5. A grill fixture according to claim 1, characterized in that: The distance between the outer edges of the two side-limiting cylindrical rods is greater than the diameter of the two discs on both sides of the reel structure.

6. A grill fixture according to claim 4, characterized in that: The concave limiting groove of the side limiting cylindrical rod is also compatible with discs of different thicknesses of 45 / 55 / 80.

7. A grill fixture according to claim 6, characterized in that: The recessed limiting groove of the bottom supporting cylindrical rod is also compatible with discs of different thicknesses of 45 / 55 / 80 reel structures. The starting groove position and the ending groove position of the recessed limiting groove and the lower groove are all spaced apart from the inner surface of the corresponding hollow vertical plate.

8. A grill fixture according to claim 1, characterized in that: The location of the robotic arm support notch is outside the surface area of ​​the reel structure it supports.

9. A grill fixture according to claim 1, characterized in that: The upper part of the upper region of the hollowed-out vertical plate has upper fixing holes at both ends of the width direction at the top position. The lower part of the lower region of the hollowed-out vertical plate has lower fixing holes arranged on both sides on the connecting plate. The two ends of the bottom supporting cylindrical rod on each side are fixed to the lower fixing holes of the two hollowed-out vertical plates by fasteners. The two ends of the side limiting cylindrical rod on each side are fixed to the upper fixing holes of the two hollowed-out vertical plates by fasteners.

10. A grill fixture according to claim 2, characterized in that: The upper region of the hollowed-out panel has a top hollowed-out area at the middle of its top width. Rectangular hollowed-out areas are provided on both sides of the corresponding positions at the lower middle of the upper region and the upper middle of the lower region. The lower region of the hollowed-out panel has a bottom hollowed-out area at the middle of its bottom. The space below the robotic arm support notch of the hollowed-out panel is also a hollowed-out area.

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