A multilayer micro flexoelectric fan, method of fabrication and use

Abstract

This invention relates to the field of micro fan technology, and discloses a multi-layer micro flexural electric fan, its manufacturing and usage method, including a shell and a multi-layer micro flexural assembly; the multi-layer micro flexural assembly is disposed inside the shell; the shell includes a top cover and a bottom plate; the top cover is disposed on the bottom plate, and the multi-layer micro flexural assembly is disposed between the top cover and the bottom plate; the multi-layer micro flexural assembly includes flexural electrical units and interconnecting electrode units, which are alternately stacked and aligned, and the two sides of the interconnecting electrode units are connected to an external drive circuit through the two sides of the top cover and the bottom plate, respectively; the flexural electrical units have air chamber units; the interconnecting electrode units have gas flow channel units; and gas flow holes are opened between the top cover and the bottom plate corresponding to the gas flow channel units. This invention solves the technical problems of complex structure, difficulty in reducing thickness, low drive efficiency, difficulty in multi-layer integration, and discontinuous airflow output in existing micro fans.

Description

Technical Field

[0001] This invention relates to the field of micro fan technology, specifically to a multi-layer micro flexural electric fan, its manufacturing process, and its usage. Background Technology

[0002] As electronic devices continue to evolve towards higher performance, higher integration, and miniaturization, their internal power density is constantly increasing, making heat dissipation an increasingly prominent issue. Traditional heat dissipation methods, such as natural convection and metal heat sinks, are no longer sufficient to meet the heat dissipation requirements in compact spaces. Miniature fans, as an active cooling method, have attracted widespread attention due to their advantages such as compact structure and controllable airflow.

[0003] Most common micro fans are based on electromagnetic or piezoelectric drive principles. Electromagnetically driven fans are typically complex in structure, large in size, and suffer from electromagnetic interference. Piezoelectric driven fans utilize the inverse piezoelectric effect of piezoelectric materials to drive airflow through a vibrating diaphragm. Although the structure is relatively simple, piezoelectric drives often rely on an external metal or polymer substrate as a vibration carrier, increasing the structural thickness and complexity. The driving efficiency of piezoelectric materials decreases significantly at small sizes, making it difficult to achieve sufficient amplitude in extremely thin structures. When multiple layers are stacked, the air and circuit layouts between layers are complex, making assembly difficult and costly.

[0004] The inverse flexoelectric effect is a mechanoelectric coupling effect that can induce bending deformation by applying a non-uniform electric field, converting electric field energy into mechanical energy to directly drive vibration. The flexoelectric effect exhibits a significant size effect, meaning its driving efficiency is higher at the micro- and nano-scale, making it particularly suitable for micro-actuators and fluid drive devices. However, no micro-fans based on the inverse flexoelectric effect have yet been observed, and technological gaps remain in terms of structural integration, driving efficiency, and fabrication processes.

[0005] Therefore, research on fans based on the reverse flexure effect is of great significance for designing and manufacturing high-efficiency micro fans and improving the heat dissipation capacity of micro fans. Summary of the Invention

[0006] In order to overcome the defects of the prior art, the present invention aims to provide a multi-layer micro flexible electric fan, a method for manufacturing and using it, so as to solve the technical problems of complex structure, difficulty in reducing thickness, low driving efficiency, difficulty in multi-layer integration and discontinuous airflow output of the micro fan in the prior art.

[0007] This invention is achieved through the following technical solution: In a first aspect, the present invention provides a multi-layer micro-flexible electric fan device, comprising a housing and a multi-layer micro-flexible assembly; the multi-layer micro-flexible assembly is disposed within the housing. The outer casing includes a top cover and a bottom plate; the top cover is disposed on the bottom plate, and the multi-layer micro-flexible assembly is disposed between the top cover and the bottom plate; The multilayer micro-flexible assembly includes a flexural electrical unit and an interconnected electrode unit. The flexural electrical unit and the interconnected electrode unit are stacked alternately and aligned. The two sides of the interconnected electrode unit are connected to an external driving circuit through the two sides of the top cover and the bottom plate, respectively, for driving the flexural electrical unit to vibrate up and down through the interconnected electrode unit. The flexure electric unit is equipped with an air cavity unit, which is used to generate airflow through the up-and-down vibration of the flexure electric unit; The interconnected electrode unit is provided with a gas flow channel unit for exhausting or inleting air into the gas chamber unit. Gas flow holes are provided between the top cover and the bottom plate corresponding to the gas flow channel unit.

[0008] Preferably, the flexural unit includes a first flexural element, a second flexural element, and a third flexural element; The interconnected electrode unit includes a first interconnected electrode, a second interconnected electrode, a third interconnected electrode, and a fourth interconnected electrode; The first flexure electrical element, the second flexure electrical element, and the third flexure electrical element are alternately stacked and aligned with the first interconnecting electrode plate, the second interconnecting electrode plate, the third interconnecting electrode plate, and the fourth interconnecting electrode plate; The first interconnecting electrode plate, the second interconnecting electrode plate, the third interconnecting electrode plate, and the fourth interconnecting electrode plate are all stacked around the first flexure electrical element, the second flexure electrical element, and the third flexure electrical element, and are respectively bonded and fixed to the first flexure electrical element, the second flexure electrical element, and the third flexure electrical element by conductive adhesive and are conductive. Electrode layers are provided on the upper and lower surfaces of the first flexure electrical element, the second flexure electrical element, and the third flexure electrical element, and the upper and lower electrode layers are insulated from each other.

[0009] Furthermore, the air chamber unit includes a first air chamber, a second air chamber, a third air chamber, and a fourth air chamber; The first air cavity is located between the first flexible electrical element and the base plate; The second air chamber is located between the first flexure electrical element and the second flexure electrical element; The third air chamber is located between the second flexure electrical element and the third flexure electrical element; The fourth air chamber is located between the third flexible electrical element and the top cover.

[0010] Furthermore, the first interconnecting electrode plate, the second interconnecting electrode plate, the third interconnecting electrode plate, and the fourth interconnecting electrode plate all include an electrode plate frame; the electrode plate frame has a frame structure; the interior of the electrode plate frame is a gas cavity; the gas flow channel unit is a flow channel opened on one side of the electrode plate frame for exhaust or intake; an electrode is provided on one side of the frame of the electrode plate frame, and the electrode is connected to an external driving circuit through a top cover and a bottom plate.

[0011] Furthermore, the flow channels and electrode directions of the first interconnect plate and the third interconnect plate are consistent; The flow channels and electrode directions of the second and fourth interconnecting plates are consistent; The flow channels of the first and third interconnecting plates are located on the same side as the flow channels of the second and fourth interconnecting plates, and the electrodes of the first and third interconnecting plates are located on opposite sides as the electrodes of the second and fourth interconnecting plates.

[0012] Furthermore, the top cover has a raised structure along its edge and a recessed structure in the middle. The gas flow holes are the first and second air outlets opened on one side of the top cover. The first and second air outlets correspond to the flow channels of the first and third interconnecting plates, as well as the second and fourth interconnecting plates, respectively, for connecting the flow channels with the outside. The top cover has a first top cover electrode lead groove and a second top cover electrode lead groove on both sides respectively; the first top cover electrode lead groove and the second top cover electrode lead groove correspond to the electrode settings of the first interconnect electrode plate and the third interconnect electrode plate and the second interconnect electrode plate and the fourth interconnect electrode plate respectively, and are used for electrode lead-out.

[0013] Furthermore, the bottom plate has a raised edge and a positioning groove in the middle for positioning the first interconnecting electrode plate; the bottom plate has a second bottom plate electrode lead groove and a first bottom plate electrode lead groove respectively at the electrode positions of the first interconnecting electrode plate, the third interconnecting electrode plate, the second interconnecting electrode plate, and the fourth interconnecting electrode plate, for leading out electrodes by correspondingly connecting the first top cover electrode lead groove and the second top cover electrode lead groove.

[0014] Furthermore, the first flexure electrical element, the second flexure electrical element, and the third flexure electrical element have the same structure, all of which are rectangular sheet structures with a thickness ranging from 5 μm to 250 μm.

[0015] Secondly, the present invention also provides a method for manufacturing a multi-layer micro-flexible electric fan device, for obtaining the aforementioned multi-layer micro-flexible electric fan device, the specific process of which is as follows: Flexible electrical units were prepared by tape casting, and interconnected electrode units were fabricated by stamping or laser cutting of metal sheets. Flexural electrical units and interconnected electrode units are alternately stacked to form a multilayer micro-flexible assembly; The outer shell is obtained through injection molding, 3D printing, or CNC machining. The multi-layer micro-flexible assembly is placed inside the housing, the gas flow channel unit of the multi-layer micro-flexible assembly is aligned with the gas flow hole of the housing, and the electrode of the multi-layer micro-flexible assembly is connected to the external drive circuit through the housing to complete the fabrication of the multi-layer micro-flexible electric fan device.

[0016] Thirdly, the present invention also provides a method of using a multi-layer micro-flexible electric fan device, which, based on the above-described multi-layer micro-flexible electric fan device, includes the following process: During operation, the external drive circuit applies sinusoidal AC voltages to the two electrodes of the alternating interconnected electrode units, causing the flexural units to be driven by opposite electric fields, thus achieving synchronous reverse vibration. When the flexural units vibrate synchronously in opposite directions, the volume of the air chamber unit within the flexural units changes. When the volume increases, a negative pressure is generated, and the air chamber unit draws in gas through the gas flow channel unit. When the volume decreases, a positive pressure is generated, and the air chamber unit discharges the drawn-in gas through the gas flow channel unit.

[0017] Compared with the prior art, the present invention has the following beneficial technical effects: This invention provides a multi-layered micro-flexible electric fan. By employing an integrated structure where multiple layers of micro-flexible components are integrated with a housing, the applied electric field is converted into bending deformation using the flexoelectric effect of the material. Airflow is driven by the bending deformation of the flexoelectric units, avoiding the dependence of piezoelectric micro-fans on a base layer, reducing the volume and space occupied by the base layer in the fan, and lowering structural complexity. Simultaneously, the alternating alignment and stacking of flexoelectric units and interconnecting electrode units in the multi-layered micro-flexible components avoids the problem of excessive area caused by horizontally arranging multiple components, reducing component volume, increasing the number of components per unit area, and improving efficiency. The fan's output air volume is increased; the interconnected plate unit combines mechanical support, airflow channel and electrical interconnection functions, realizing the integrated design of structure and function, avoiding the need for additional wiring, flexible circuit boards or flying wires in traditional micro fans, significantly simplifying the internal circuit layout, reducing the number of components and assembly processes, and improving the compactness, reliability and manufacturability of the structure; the air chamber unit cooperates with the gas flow channel unit and gas flow hole to realize stable gas intake and exhaust, solving the technical problems of complex structure, difficulty in reducing thickness, low drive efficiency, difficulty in multi-layer integration and discontinuous airflow output in existing micro fans.

[0018] Furthermore, by defining the specific structures of the flexural element and interconnect plate unit, multiple flexural elements and multiple interconnect plates are alternately stacked and aligned, increasing the number of elements per unit area and improving the fan's output airflow. The interconnect plates are stacked around the flexural elements and are bonded and fixed to the flexural elements with conductive adhesive, ensuring reliable electrical connection between the two and forming a sealed air cavity to prevent insufficient air tightness from reducing fan airflow. At the same time, it avoids fragile flying wires or flexible circuit connections, reducing structural complexity, improving the module's mechanical reliability, assembly consistency, and long-term stability, and compressing internal space. The upper and lower surfaces of the flexural elements are provided with mutually insulated electrode layers to ensure that the electric field can stably act on the flexural elements, ensuring the stability and effectiveness of the drive, improving drive efficiency, and contributing to the miniaturization of the device.

[0019] Furthermore, the air chamber unit is specifically defined, forming multiple independent air chambers in a multi-layer stacked structure. This achieves efficient integration in the vertical direction, improving the working efficiency and air volume output capacity per unit projection area of ​​the device. The multiple air chambers correspond to the upper and lower sides of different flexural electrical elements, allowing the vibration of each flexural electrical element to independently drive the volume change of the corresponding air chamber. The coordinated work of multiple air chambers effectively solves the problem of discontinuous airflow output, improves the stability and uniformity of airflow output, and optimizes the space utilization of the device, helping to reduce the thickness of the device.

[0020] Furthermore, the specific structure of the interconnected electrode plate is defined by designing the electrode plate frame as a frame structure. The internal air cavity holes correspond to the air cavity units, and the flow channel on one side serves as a gas flow channel unit, enabling smooth gas intake and exhaust and ensuring the stability of the airflow output. The electrode extending from one side of the electrode plate frame is used to connect with the external drive circuit, which enhances the electrical interconnection function of the interconnected electrode plate. No additional wiring is required, simplifying the internal circuit layout and improving the structural compactness. The frame structure of the electrode plate frame also serves as a mechanical support, ensuring the stability of the multi-layer stacked structure, avoiding structural loosening during multi-layer integration, solving the problem of multi-layer integration difficulties, and improving the mechanical reliability of the device.

[0021] Furthermore, by defining the flow channels and electrode directions of adjacent interconnected plates and adopting a staggered arrangement, the flow channels and electrodes of adjacent plates can be misaligned simply by flipping the interconnected plates. This results in all air outlets being evenly or alternately distributed, which helps to expand the effective heat dissipation area or promote the orderly convergence of multiple airflows, thereby improving airflow utilization efficiency. The electrodes are arranged on opposite sides, so that the electrode leads of each layer are arranged in a regular pattern along the side of the device, which facilitates reliable connection with an external power source. The flippable part design eliminates the cost of customizing special molds for different parts, significantly reducing processing costs. At the same time, it simplifies the assembly process, which is conducive to achieving automated assembly and large-scale production, and improves the manufacturability of the device.

[0022] Furthermore, by defining the top cover structure, the raised structure, in conjunction with the base plate, can better secure the multi-layer micro-flexible components, improving the overall sealing and stability of the device. The grooved structure adapts to the installation of the multi-layer micro-flexible components, optimizing space utilization and helping to reduce the device thickness. The flow channel settings of the first and second air outlets corresponding to the interconnected electrode plates ensure smooth gas communication with the outside, guaranteeing the stability and efficiency of airflow output. The electrode lead grooves of the first and second top cover are corresponding to the electrode settings, facilitating electrode lead-out without the need for additional lead space, simplifying the assembly process, improving the structural compactness, and avoiding connection failures caused by tangled leads, thus improving the reliability of the device.

[0023] Furthermore, by defining the base plate structure, the edge protrusions cooperate with the top cover to improve the device's sealing performance, ensure the airtightness of the air chamber, and avoid airflow loss. The central positioning groove is used to position the interconnected electrode plates, ensuring precise alignment of the multi-layer stacked structure, solving the problem of multi-layer integration difficulties, and improving assembly consistency. The first and second base plate electrode lead slots correspond to the electrode lead slots on the top cover, enabling reliable electrode lead-out, simplifying the electrode connection process, avoiding flying wire connections, reducing structural complexity, and improving the stability and reliability of electrode connections, thus ensuring the stability of the device drive.

[0024] Furthermore, by limiting the structure and thickness of the flexoelectric element, the rectangular sheet structure facilitates multi-layer stacking, improves space utilization, and helps miniaturize the device. The limited thickness range matches the size effect of the flexoelectric effect. The small-sized flexoelectric element has a larger amplitude and lower driving voltage than the piezoelectric element, which not only improves the miniaturization potential of the element, but also effectively increases the air volume of the micro fan, while reducing driving energy consumption and optimizing driving efficiency, thus solving the problems of low driving efficiency and difficulty in miniaturization of existing micro fans.

[0025] This invention also provides a method for manufacturing a multi-layer micro-flexible electric fan. The flexural units are prepared using a casting method, a mature and controllable process that allows for precise control of the thickness and performance of the flexural units, ensuring stable flexural effect. Interconnected electrode units are fabricated using stamping or laser cutting processes, offering high processing efficiency and precision, meeting the precise processing requirements of the frame structure, flow channels, and electrodes, while reducing processing costs. An alternating stacking assembly method ensures precise integration of the multi-layer micro-flexible components, solving the problem of difficult multi-layer integration. The outer shell is manufactured using injection molding, 3D printing, or CNC machining, allowing for flexible selection of processes to adapt to different batch production needs, while ensuring precise fit between the shell structure and the multi-layer micro-flexible components. The overall manufacturing process is simple, reducing assembly steps, improving assembly efficiency and consistency, facilitating automated assembly and large-scale production, reducing production costs, and ensuring the performance stability and reliability of the device.

[0026] This invention also provides a method for using a multi-layer micro flexural electric fan. A sinusoidal AC voltage is applied to the two electrodes of the interconnected plate unit via an external drive circuit, causing the flexural units to be driven by opposite electric fields, achieving synchronous reverse vibration. This fully utilizes the advantages of the flexural effect, achieving a larger amplitude with a lower drive voltage, thus improving drive efficiency and airflow. The synchronous reverse vibration of the flexural units causes periodic changes in the volume of the air chamber unit, generating negative and positive pressures through these volume changes, achieving stable gas intake and exhaust. This solves the problem of discontinuous airflow output in existing micro fans, ensuring the stability and uniformity of airflow output. The entire process requires no complex drive structure, making operation simple. Furthermore, relying on the structural advantages of the device, reliability and stability are ensured during use, showcasing the device's compact structure and high-efficiency drive characteristics. Attached Figure Description

[0027] Figure 1 This is a schematic diagram of the overall structure of the multi-layer micro-flexible electric fan in an embodiment of the present invention; Figure 2 for Figure 1 Sectional view of AA; Figure 3 for Figure 1 BB section view; Figure 4 This is an assembly diagram of the outer shell and the multilayer micro-flexible assembly in an embodiment of the present invention; Figure 5 This is an exploded view of a multi-layer flexural electric fan in an embodiment of the present invention; Figure 6 This is a schematic diagram of the exhaust airflow in the interconnected electrode plate air chamber in an embodiment of the present invention; Figure 7 This is a bottom view of the top cover in an embodiment of the present invention; Figure 8This is a top view of the base plate in an embodiment of the present invention; In the diagram: 1. Outer shell; 2. Multilayer micro-flexible assembly; 3. Top cover; 4. Base plate; 5. Flexural unit; 6. Interconnected electrode unit; 7. Air cavity unit; 31. Protruding structure; 32. First air outlet; 33. Second air outlet; 34. First top cover electrode lead groove; 35. Second top cover electrode lead groove; 41. Positioning groove; 42. First base plate electrode lead groove; 43. Second base plate electrode lead groove; 51. First flexural element; 52. Second flexural element; 53. Third flexural element; 61. First interconnecting electrode plate; 62. Second interconnecting electrode plate; 63. Third interconnecting electrode plate; 64. Fourth interconnecting electrode plate; 65. Electrode frame; 66. Gas cavity hole; 67. Flow channel; 68. Electrode; 71. First air chamber; 72. Second air chamber; 73. Third air chamber; 74. Fourth air chamber. Detailed Implementation

[0028] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of the present invention.

[0029] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this invention are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of the invention described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover a non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0030] The purpose of this invention is to provide a multi-layer micro flexural electric fan, its manufacturing and usage methods, in order to solve the technical problems of existing micro fans, such as complex structure, difficulty in reducing thickness, low driving efficiency, difficulty in multi-layer integration, and discontinuous airflow output.

[0031] The present invention will now be described in further detail with reference to the accompanying drawings: Example 1 See Figure 1 , Figure 2 Figure 3 , Figure 4 as well as Figure 5 In one embodiment of the present invention, a multi-layer micro-flexible electric fan device is provided, the specific structure of which is as follows: The multi-layer micro-flexible electric fan device mainly consists of two parts: the outer shell 1 and the multi-layer micro-flexible component 2. The multi-layer micro-flexible component 2 is encapsulated inside the outer shell 1. The outer shell 1 serves to encapsulate and protect, position and install the device, and provide airflow channels and electrode lead-out interfaces. The multi-layer micro-flexible component 2, as the core driving component, is used to realize the conversion of electric field into mechanical vibration, thereby driving airflow generation.

[0032] The outer casing 1 includes a top cover 3 and a bottom plate 4, which fit together to form a complete encapsulation cavity, enclosing and protecting the multi-layer micro-flexible assembly 2, while simultaneously enabling airflow communication with the outside and connection to the electrode 68. The top cover 3 has a raised structure 31 along its edge and a recessed structure in the center. The inner wall size of the raised structure 31 matches the outer contour size of the multi-layer micro-flexible assembly 2, facilitating the positioning and installation of the assembly. The multi-layer micro-flexible assembly 2 is embedded and fixed inside the raised structure 31. A first air outlet 32 ​​and a second air outlet 33 are provided on one side of the top cover 3 as gas flow holes to enable gas communication between the device and the outside. A first top cover electrode lead groove 34 and a second top cover electrode lead groove 35 are also provided on both sides of the top cover 3 for leading out the electrode 68, protecting the electrode 68 and guiding it out of the outer casing 1. Figure 7 As shown.

[0033] The base plate 4 has a raised edge, and its planar shape matches the edge of the top cover 3 for fastening. The base plate 4 and the top cover 3 are firmly joined by ultrasonic welding or adhesive bonding, ensuring good airtightness at the joint of the outer shell 1 and reliable electrical insulation between the entire outer shell 1 and the internally charged multilayer micro-flexible assembly 2. A positioning groove 41 is provided in the middle of the base plate 4 for positioning the first interconnecting electrode plate 61, ensuring the assembly accuracy of the multilayer micro-flexible assembly 2. On both sides of the base plate 4, corresponding to the electrode 68 positions of the first interconnecting electrode plate 61, the third interconnecting electrode plate 63, the second interconnecting electrode plate 62, and the fourth interconnecting electrode plate 64, there are second base plate electrode lead grooves 43 and first base plate electrode lead grooves 42, respectively, for correspondingly connecting the first top cover electrode lead groove 34 and the second top cover electrode lead groove 35 to lead out the electrode 68. When the top cover 3 and the base plate 4 are fastened together, these lead grooves form a complete channel, protecting and guiding the electrode 68 out of the outer shell 1, such as... Figure 8 As shown.

[0034] The multi-layer micro-flexible assembly 2 is disposed between the top cover 3 and the bottom plate 4 and is installed on the positioning groove 41 of the bottom plate 4. It includes a flexural electrical unit 5 and an interconnected electrode plate unit 6. The flexural electrical unit 5 and the interconnected electrode plate unit 6 are alternately stacked to form a seven-layer sandwich structure. The two sides of the interconnected electrode plate unit 6 are connected to the external driving circuit through the two sides of the top cover 3 and the bottom plate 4, respectively, for driving the flexural electrical unit 5 to vibrate up and down through the interconnected electrode plate unit 6.

[0035] The flexural unit 5 includes a first flexural element 51, a second flexural element 52, and a third flexural element 53. All three have identical structures, each a rectangular sheet with a thickness ranging from 5 μm to 250 μm. They are made of barium strontium titanate ceramic material, which exhibits a strong flexural effect response, to fully utilize the enhanced characteristics of the flexural effect at the microscale. A metal electrode layer is coated on the upper and lower surfaces of the first flexural element 51, the second flexural element 52, and the third flexural element 53 using processes such as magnetron sputtering or screen printing. The electrode material can be gold, silver, or other materials with a conductivity higher than 20 × 10⁻⁶. 6 The metal has an S / m thickness, and the electrode layer thickness ranges from 0.01μm to 10μm. The upper and lower electrode layers are insulated from each other so as to excite the overall bending deformation of the flexural element under an applied electric field.

[0036] The interconnecting electrode unit 6 includes a first interconnecting electrode 61, a second interconnecting electrode 62, a third interconnecting electrode 63, and a fourth interconnecting electrode 64. All four have identical structures, being rectangular thin plates with outer dimensions consistent with the flexible electrical element. They are made of stainless steel or other metal sheets through stamping or laser cutting processes, with a thickness between 50μm and 500μm. Each of the first, second, third, and fourth interconnecting electrode plates includes an electrode frame 65. The electrode frame 65 is a frame structure, and its interior contains air chamber holes 66, serving as the core space of the cavity. A gas flow channel unit is a flow channel 67 opened on one side of the electrode frame 65, used for exhausting or intakeing air into the air chamber unit 7, ensuring smooth gas flow. An electrode 68 extends from one side of the frame of the electrode frame 65. The electrode 68 is connected to an external driving circuit through lead grooves in the top cover 3 and the bottom plate 4 to transmit current. Figure 6 As shown.

[0037] The first flexural element 51, the second flexural element 52, and the third flexural element 53 are alternately stacked with the first interconnecting plate 61, the second interconnecting plate 62, the third interconnecting plate 63, and the fourth interconnecting plate 64. Specifically, the stacking order is as follows: the first interconnecting plate 61 is at the bottom, followed by the first flexural element 51, the second interconnecting plate 62, the third interconnecting plate 63, and the fourth interconnecting plate 64, with the fourth interconnecting plate 64 at the top. The first interconnecting plate 61, the second interconnecting plate 62, the third interconnecting plate 63, and the fourth interconnecting plate 64 are all stacked around the first flexural element 51, the second flexural element 52, and the third flexural element 53, and are respectively bonded and fixed to the first flexural element 51, the second flexural element 52, and the third flexural element 53 with conductive adhesive, thus ensuring electrical conductivity. A layer of conductive adhesive, approximately 1 μm to 100 μm thick, is pre-coated or printed on the upper and lower surfaces of the interconnect electrode plate. The conductive adhesive not only bonds the adjacent flexural elements to the interconnect electrode plate or housing component, ensuring tight bonding and good airtightness between layers, but also transmits the current from the interconnect electrode plate to the electrode layer on the surface of the flexural element in contact with it.

[0038] The flow channels 67 and electrodes 68 of the first interconnecting electrode plate 61 and the third interconnecting electrode plate 63 are aligned, as are the flow channels 67 and electrodes 68 of the second interconnecting electrode plate 62 and the fourth interconnecting electrode plate 64. The flow channels 67 of the first interconnecting electrode plate 61 and the third interconnecting electrode plate 63 are located on the same side as the flow channels 67 of the second interconnecting electrode plate 62 and the fourth interconnecting electrode plate 64, and the electrodes 68 of the first interconnecting electrode plate 61 and the third interconnecting electrode plate 63 are located on opposite sides as the electrodes 68 of the second interconnecting electrode plate 62 and the fourth interconnecting electrode plate 64.

[0039] Specifically, the second interconnect plate 62 is flipped before stacking, so that the opening direction of its flow channel 67 is offset from that of the flow channel 67 of the first interconnect plate 61 on the horizontal plane, and the positions of the electrodes 68 are opposite to those of the electrodes 68 of the first interconnect plate 61. The direction of the third interconnect plate 63 is consistent with that of the first interconnect plate 61, and the direction of the fourth interconnect plate 64 is consistent with that of the second interconnect plate 62, so that the electrodes 68 of the first interconnect plate 61 and the third interconnect plate 63 are located on one side of the assembly, while the electrodes 68 of the second interconnect plate 62 and the fourth interconnect plate 64 are located on the opposite side of the assembly. This design allows the airflow outlets to be spatially alternately distributed, avoiding mutual interference of airflow generated by adjacent cavities, and helping the airflow to be more evenly dispersed or converged. At the same time, all electrodes 68 are neatly arranged on both sides of the assembly, which facilitates subsequent electrode 68 connection operations.

[0040] The flexoelectric unit 5 contains an air chamber unit 7, which generates airflow through the up-and-down vibration of the flexoelectric unit 5. The air chamber unit 7 includes a first air chamber 71, a second air chamber 72, a third air chamber 73, and a fourth air chamber 74. Each air chamber is formed by the combination of a lower element surface, an upper element surface, and an intermediate interconnecting electrode plate. Specifically, the first air chamber 71 is located between the first flexoelectric element 51 and the base plate 4; the second air chamber 72 is located between the first flexoelectric element 51 and the second flexoelectric element 52; the third air chamber 73 is located between the second flexoelectric element 52 and the third flexoelectric element 53; and the fourth air chamber 74 is located between the third flexoelectric element 53 and the top cover 3. Each air chamber is connected to the air outlet of the top cover 3 through a flow channel 67 on its corresponding interconnecting electrode plate. The first air chamber 71 and the third air chamber 73 are connected to the first air outlet 32 ​​through the flow channel 67, and the second air chamber 72 and the fourth air chamber 74 are connected to the second air outlet 33 through the flow channel 67, thereby realizing the intake and exhaust of gas.

[0041] The electrodes 68 in the multilayer micro-flexible assembly 2 are interconnected by bending them. The electrodes 68 of the first interconnecting plate 61 and the third interconnecting plate 63 are connected to form a positive electrode, and the electrodes 68 of the second interconnecting plate 62 and the fourth interconnecting plate 64 are connected to form a negative electrode. The electrodes 68 are electrically connected using conductive adhesive, and the positive and negative electrodes remain insulated from each other. The electrodes 68 extend from the base plate 4 through the first base plate electrode lead groove 42 and the second base plate electrode lead groove 43. The extended portions are bent and folded to fit tightly against the bottom of the base plate 4, serving as electrodes for connecting to external circuitry.

[0042] Example 2 This embodiment provides a method for manufacturing a multi-layer micro-flexible electric fan device, used to prepare the multi-layer micro-flexible electric fan device described in Embodiment 1. The specific process steps are as follows: Step 1: Preparation of Flexural Unit 5 The flexure electrical unit 5, which serves as the core driving unit, is fabricated. The flexure electrical unit 5 includes a first flexure electrical element 51, a second flexure electrical element 52, and a third flexure electrical element 53. The fabrication process for the three elements is the same, as detailed below: Ceramic materials with high flexural coefficients are selected, preferably barium strontium titanate (BaxSr1-xTiO3, BST) system. By adjusting the molar ratio of barium to strontium, the flexural coefficient and Curie temperature of the material are optimized to match the requirements of different application scenarios for driving performance and operating temperature.

[0043] Ceramic green bodies are prepared using a casting process. BST ceramic powder is uniformly mixed with organic binders, solvents, etc. according to a specific formula to form a stable ceramic slurry. Subsequently, the slurry is scraped onto a carrier film using a casting machine to form a wet film of uniform thickness. After drying, a ceramic green body strip with a certain degree of flexibility is obtained. The thickness of the green body strip is designed according to the target thickness of the final component and the sintering shrinkage rate.

[0044] Laser cutting technology is used to cut ceramic green strips into component green sheets of predetermined sizes. Laser cutting has advantages such as high precision, good edge quality, and strong adaptability, and can meet the dimensional tolerance requirements of micro components.

[0045] The cut green ceramic blanks are processed by high-temperature sintering and then processed according to a preset sintering curve, which includes debinding, sintering, heat preservation and cooling stages. The peak sintering temperature is determined according to the BST material system and is usually between 1300℃ and 1400℃. This process completely densifies the ceramic green blank, removes organic matter, and forms a high-density flexible electric ceramic element matrix with the required crystal phase structure.

[0046] After obtaining the ceramic substrate, patterned electrode layers are fabricated on its upper and lower surfaces. Two mainstream processes can be used: For high performance and high consistency requirements, magnetron sputtering is preferred, sputtering gold or platinum as the main electrode layer, followed by photolithography and etching to pattern the continuous metal film, forming the desired specific electrode 68 pattern; for cost-sensitive mass production, screen printing can be used, employing conductive silver paste. The paste is directly printed onto the ceramic sheet surface through a screen mask with a specific pattern, followed by low-temperature sintering or curing, allowing the metal particles in the paste to form a conductive network and adhere firmly, thus forming the patterned electrode layer. The patterning design is optimized based on finite element simulation analysis of the bending vibration modes of the component. Complete coverage of the electrodes 68 is ensured in areas of maximum vibration strain to guarantee effective actuation, while the electrode 68 material is appropriately reduced at displacement nodes or in areas of low strain to decrease rigidity and maximize actuation efficiency and effective amplitude.

[0047] Step 2: Fabrication of interconnected electrode unit 6 The interconnect electrode unit 6 includes a first interconnect electrode 61, a second interconnect electrode 62, a third interconnect electrode 63, and a fourth interconnect electrode 64. All four are manufactured using the same process, as detailed below: Interconnect plates are fabricated using thin metal sheets. Stainless steel or copper sheets with a thickness of 50 μm to 500 μm are selected. Interconnect plates containing air cavities 66, flow channels 67, and outwardly extending electrodes 68 are machined onto the metal sheets using stamping or laser cutting processes. All interconnect plates have identical designs, with their outer contour dimensions consistent with the flexible electrical element. The air cavity 66 is located at the center, the flow channel 67 extends from one side of the air cavity 66 to the edge, and the electrode 68 is located on the opposite edge perpendicular to the flow channel 67.

[0048] The prepared interconnect plate is cleaned to remove oil and oxides. Then, a conductive adhesive layer is uniformly coated on its upper and lower surfaces by screen printing or precision dispensing. The thickness of the adhesive layer is controlled in the range of 1μm to 100μm. Epoxy conductive silver paste with a volume resistivity of less than 1×10-4Ω·cm is preferred. The curing temperature is 80℃~150℃ and the curing time is 30min~120min.

[0049] Step 3: Assembly of the multilayer micro-flexible assembly 2 On a dedicated fixture or alignment platform, the flexural electrical unit 5 and the interconnected electrode unit 6 are sequentially and alternately stacked to form a multi-layer micro-flexible assembly 2. The specific stacking process is as follows: First, place the first interconnect plate 61, then precisely place the first flexure electrode 51 on the first interconnect plate 61, ensuring that the first flexure electrode 51 is aligned with the outer contour of the first interconnect plate 61. Before stacking, flip the second interconnect plate 62 as a whole, align it with the outer contour of the first flexure electrode 51, and place it on the first flexure electrode 51. At this time, the flow channels 67 of the second interconnect plate 62 and the first interconnect plate 61 are horizontally offset, and the electrodes 68 of the second interconnect plate 62 are opposite in direction to the electrodes 68 of the first interconnect plate 61. Repeat this process to stack the second flexure electrode 52, the third interconnect plate 63, the third flexure electrode 53, and the fourth interconnect plate 64 in sequence.

[0050] The entire stacking process is carried out in a clean environment, and slight pressure is applied to ensure that the layers are firmly connected; the electrodes 68 of the first interconnect plate 61 and the third interconnect plate 63, and the electrodes 68 of the second interconnect plate 62 and the fourth interconnect plate 64 are respectively connected to form positive and negative electrodes, and the positive and negative electrodes are kept insulated from each other.

[0051] Step 4: Preparation of Outer Shell 1 The outer shell 1 includes a top cover 3 and a bottom plate 4. The outer shell can be made of metal, and the metal outer shell can be insulated by setting an internal insulating layer, preferably an insulating engineering plastic or resin, which can be obtained by injection molding, 3D printing or CNC machining. The specific manufacturing process is as follows: Fabrication of top cover 3: The inner side of top cover 3 is designed with a downwardly protruding rectangular protrusion structure 31, the inner cavity size of which matches the outer contour of the multilayer micro-flexible component 2, and plays a positioning and limiting role; on the side wall of the protrusion structure 31, at the position corresponding to the lead groove of the bottom plate 4, the first top cover electrode lead groove 34 and the second top cover electrode lead groove 35 are processed; on the side wall of the protrusion structure 31, at the outlet of the flow channel 67 corresponding to each interconnected electrode plate, the first air outlet 32 ​​and the second air outlet 33 are opened; an insulating layer can be pre-set on the inner surface of top cover 3.

[0052] Fabrication of base plate 4: The upper surface of base plate 4 is designed with positioning groove 41 that matches the contour of the first interconnect electrode plate 61 for accurately placing the multilayer micro-flexible assembly 2; On the side wall of base plate 4, corresponding to the lead-out position of the electrode 68 on the stacked multilayer micro-flexible assembly 2, the first base plate electrode lead groove 42 and the second base plate electrode lead groove 43 are processed; An insulating layer can be pre-set on the inner surface of base plate 4.

[0053] Step 5: Encapsulation of the outer casing 1 and lead-out of electrode 68 The multi-layer micro-flexible assembly 2 is placed inside the housing 1. The gas flow channel unit of the multi-layer micro-flexible assembly 2 is aligned with the gas flow hole of the housing 1. The electrode terminals of the multi-layer micro-flexible assembly 2 are connected to the external drive circuit through the housing 1, thus completing the fabrication of the multi-layer micro-flexible electric fan device. The specific process is as follows: Connect the multi-layer micro-flexible assembly 2 to the base plate 4: Place the multi-layer micro-flexible assembly 2 on the positioning groove 41 of the base plate 4, so that the first interconnecting electrode plate 61 at its bottom is connected to the base plate 4; bend the electrodes 68 extending from each interconnecting electrode plate toward the bottom of the base plate 4, so that the electrodes 68 pass through the corresponding first base plate electrode lead groove 42 and second base plate electrode lead groove 43 on the base plate 4.

[0054] Connect the multi-layer micro-flexible assembly 2 to the top cover 3: Press the top cover 3 down vertically so that the multi-layer micro-flexible assembly 2 is embedded in its protruding structure 31; at this time, the bent electrode 68 passes through the corresponding first top cover electrode lead groove 34 and second top cover electrode lead groove 35 on the top cover 3; at the same time, the first air outlet 32 ​​and the second air outlet 33 of the top cover 3 are aligned with the outlet of the flow channel 67 of each interconnected electrode plate to ensure that the airflow channel is unobstructed.

[0055] Connecting the top cover 3 and the bottom plate 4: Apply adhesive to the joint interface between the top cover 3 and the bottom plate 4, or use ultrasonic welding process to fuse the two into one; or pre-embed screw posts at the corresponding positions and tighten and seal them with micro screws to ensure good airtightness at the joint of the outer shell 1, and maintain reliable electrical insulation between the entire outer shell 1 and the internally charged multi-layer micro-flexible assembly 2.

[0056] Example 3 This embodiment provides a method for using a multi-layer micro-flexible electric fan device, based on the multi-layer micro-flexible electric fan device described in Embodiment 1. The specific process is as follows: When the multi-layer micro flexural fan device is working, the external drive circuit is first connected to the electrode 68 extending from the lead slot of the outer casing 1. One end of the external drive circuit is connected to the electrode 68 (positive) of the first interconnect plate 61 and the third interconnect plate 63, and the other end is connected to the electrode 68 (negative) of the second interconnect plate 62 and the fourth interconnect plate 64.

[0057] The external driving circuit applies sinusoidal AC voltages to the two electrode terminals of the alternating interconnected electrode unit 6, with a voltage amplitude range of 5V to 50V. The driving frequency matches the first-order resonant frequency (1kHz to 20kHz) of the flexural element. The current is transmitted through the interconnected electrode body and the conductive adhesive layer on its surface to the surface electrode layer of each flexural element, so that each flexural element in the driving flexural unit 5 is driven by opposite electric fields, achieving synchronous reverse vibration.

[0058] When the flexural elements in the flexural unit 5 vibrate synchronously in opposite directions, the volume of each air cavity in the air cavity unit 7 within the flexural unit 5 will change periodically. The specific working process is as follows: Taking the second air chamber 72 as an example, its upper and lower sides are respectively the first flexure electrical element 51 and the second flexure electrical element 52. When the driving signal causes the first flexure electrical element 51 to bend downward, it simultaneously causes the second flexure electrical element 52 to bend upward, resulting in the expansion of the volume of the second air chamber 72 and the generation of negative pressure. Air is drawn in from the outside through the flow channel 67 of the second interconnecting plate 62 and the corresponding second air outlet 33 on the top cover 3. At the same time, as the first flexure electrical element 51 bends downward, the volume of the first air chamber 71 between its lower surface and the first interconnecting plate 61 shrinks, and the air in the chamber is discharged at high speed through the flow channel 67 of the first interconnecting plate 61. Similarly, the second flexure electrical element 52 bends upward, causing the volume of the third air chamber 73 between its upper surface and the third interconnecting plate 63 to shrink, and air is discharged.

[0059] After half a driving cycle, the voltage phase reverses, and the bending directions of the first flexural element 51, the second flexural element 52, and the third flexural element 53 also reverse. At this time, the volume of the second air chamber 72 shrinks, and air is discharged through the flow channel 67; the volume of the first air chamber 71 and the third air chamber 73 expands, and air is drawn in through the corresponding flow channel 67 and the air outlet; the fourth air chamber 74 operates synchronously with the second air chamber 72, and the first air chamber 71 and the third air chamber 73 operate synchronously, realizing the alternating and continuous intake and exhaust process of multiple air chambers, thereby synthesizing a stable airflow output.

[0060] Throughout the entire process, the multi-layer stacked structure of the multi-layer micro-flexible component 2, in conjunction with the encapsulation structure of the outer shell 1, ensures unobstructed airflow channels and good airtightness. The regular arrangement of the electrodes 68 ensures reliable connection of the drive circuit. The size advantage of the flexural effect enables the device to achieve a large amplitude with a lower drive voltage, improving drive efficiency and air volume, and meeting the usage requirements of micro fans.

[0061] In summary, this invention provides a multi-layered micro flexural electric fan, its manufacturing process, and its usage method. This device directly generates bending vibrations to drive airflow through flexural elements based on the inverse flexural effect, avoiding the dependence of piezoelectric devices on a substrate, thus simplifying the structure and reducing thickness. By alternately stacking interconnected plates and flexural elements, a multi-layered compact structure is formed, integrating multiple drive units and air chambers within a limited area, improving the airflow output per unit area. By driving adjacent flexural elements to vibrate in opposite directions, the deformation of a single element simultaneously acts on two adjacent air chambers, achieving continuous alternating intake and exhaust of air, improving airflow and working efficiency. The corresponding manufacturing method, through the preparation of flexural elements and interconnected plates and the bonding and fixing with conductive adhesive, achieves electrical interconnection and hermetically sealed packaging of the multi-layered structure, possessing good process controllability and potential for large-scale production.

[0062] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and not to limit it. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art should understand that modifications or equivalent substitutions can still be made to the specific implementation of the present invention. Any modifications or equivalent substitutions that do not depart from the spirit and scope of the present invention should be covered within the scope of protection of the claims of the present invention.

Claims

1. A multi-layer micro-flexible electric fan device, characterized in that, It includes a housing (1) and a multi-layer micro-flexibility assembly (2); the multi-layer micro-flexibility assembly (2) is disposed inside the housing (1); The outer shell (1) includes a top cover (3) and a bottom plate (4); the top cover (3) is placed on the bottom plate (4), and the multi-layer micro-flexible assembly (2) is disposed between the top cover (3) and the bottom plate (4); The multilayer micro-flexible assembly (2) includes a flexural electrical unit (5) and an interconnected electrode unit (6). The flexural electrical unit (5) and the interconnected electrode unit (6) are stacked alternately and aligned. The two sides of the interconnected electrode unit (6) are connected to the external driving circuit through the top cover (3) and the bottom plate (4) respectively, for driving the flexural electrical unit (5) to vibrate up and down through the interconnected electrode unit (6). The flexure electric unit (5) is provided with an air cavity unit (7) for generating airflow through the up-and-down vibration of the flexure electric unit (5); The interconnected electrode plate unit (6) is provided with a gas flow channel unit for exhausting or inletting air into the gas chamber unit (7); Gas flow holes are provided between the top cover (3) and the bottom plate (4) corresponding to the gas flow channel unit.

2. The multi-layer micro-flexible electric fan device according to claim 1, characterized in that, The flexure electrical unit (5) includes a first flexure electrical element (51), a second flexure electrical element (52), and a third flexure electrical element (53). The interconnect plate unit (6) includes a first interconnect plate (61), a second interconnect plate (62), a third interconnect plate (63), and a fourth interconnect plate (64). The first flexure electrical element (51), the second flexure electrical element (52), and the third flexure electrical element (53) are alternately stacked and aligned with the first interconnect plate (61), the second interconnect plate (62), the third interconnect plate (63), and the fourth interconnect plate (64); The first interconnecting electrode plate (61), the second interconnecting electrode plate (62), the third interconnecting electrode plate (63), and the fourth interconnecting electrode plate (64) are all stacked around the first flexural element (51), the second flexural element (52), and the third flexural element (53), and are respectively bonded and fixed to the first flexural element (51), the second flexural element (52), and the third flexural element (53) by conductive adhesive and are conductive. Electrode layers are provided on the upper and lower surfaces of the first flexural element (51), the second flexural element (52), and the third flexural element (53), and the upper and lower electrode layers are insulated from each other.

3. The multi-layer micro-flexible electric fan device according to claim 2, characterized in that, The air chamber unit (7) includes a first air chamber (71), a second air chamber (72), a third air chamber (73), and a fourth air chamber (74); The first air cavity (71) is located between the first flexible electrical element (51) and the base plate (4); The second air chamber (72) is located between the first flexure electrical element (51) and the second flexure electrical element (52); The third air chamber (73) is located between the second flexure electrical element (52) and the third flexure electrical element (53); The fourth air chamber (74) is located between the third flexural element (53) and the top cover (3).

4. A multi-layer micro-flexible electric fan device according to claim 2, characterized in that, The first interconnecting electrode plate (61), the second interconnecting electrode plate (62), the third interconnecting electrode plate (63), and the fourth interconnecting electrode plate (64) all include an electrode plate frame (65); the electrode plate frame (65) has a frame structure; the inside of the electrode plate frame (65) is a gas cavity hole (66); the gas flow channel unit is a flow channel (67) opened on one side of the electrode plate frame (65) for exhaust or intake; an electrode (68) is provided on one side of the frame of the electrode plate frame (65), and the electrode (68) is connected to the external driving circuit through the top cover (3) and the bottom plate (4).

5. A multi-layer micro-flexible electric fan device according to claim 4, characterized in that, The flow channels (67) and electrodes (68) of the first interconnect plate (61) and the third interconnect plate (63) are aligned; The flow channels (67) and electrodes (68) of the second interconnect plate (62) and the fourth interconnect plate (64) are aligned; The flow channels (67) of the first interconnect plate (61) and the third interconnect plate (63) are located on the same side as the flow channels (67) of the second interconnect plate (62) and the fourth interconnect plate (64), and the electrodes (68) of the first interconnect plate (61) and the third interconnect plate (63) are located on opposite sides as the electrodes (68) of the second interconnect plate (62) and the fourth interconnect plate (64).

6. A multi-layer micro-flexible electric fan device according to claim 5, characterized in that, The top cover (3) has a raised structure (31) on its edge and a groove structure in the middle. The gas flow hole is a first air outlet (32) and a second air outlet (33) opened on one side of the top cover (3). The first air outlet (32) and the second air outlet (33) are respectively set to the flow channels (67) of the first interconnecting plate (61) and the third interconnecting plate (63), as well as the second interconnecting plate (62) and the fourth interconnecting plate (64), for the connection between the flow channels (67) and the outside world. The top cover (3) has a first top cover electrode lead groove (34) and a second top cover electrode lead groove (35) respectively on both sides; the first top cover electrode lead groove (34) and the second top cover electrode lead groove (35) are respectively set for the electrodes (68) of the first interconnect electrode plate (61), the third interconnect electrode plate (63), the second interconnect electrode plate (62), and the fourth interconnect electrode plate (64), and are used for the lead-out of the electrodes (68).

7. A multi-layer micro-flexible electric fan device according to claim 6, characterized in that, The bottom plate (4) has a raised edge and a positioning groove (41) in the middle for positioning the first interconnect plate (61). The bottom plate (4) has a second bottom plate electrode lead groove (43) and a first bottom plate electrode lead groove (42) respectively at the positions of the electrodes (68) of the first interconnect plate (61), the third interconnect plate (63), the second interconnect plate (62), and the fourth interconnect plate (64), for correspondingly connecting the electrodes (68) to the first top cover electrode lead groove (34) and the second top cover electrode lead groove (35).

8. A multi-layer micro-flexible electric fan device according to claim 2, characterized in that, The first flexure electrical element (51), the second flexure electrical element (52) and the third flexure electrical element (53) have the same structure, all of which are rectangular sheet structures with a thickness ranging from 5 μm to 250 μm.

9. A method for manufacturing a multi-layered micro-flexible electric fan device, characterized in that, The specific process for obtaining the multi-layer micro-flexible electric fan device according to any one of claims 1-8 is as follows: The flexible electrical unit (5) was prepared by casting, and the interconnected electrode unit (6) was fabricated by stamping or laser cutting of metal sheet. The flexural electrical unit (5) and the interconnected electrode unit (6) are alternately stacked to form a multilayer micro-flexible assembly (2); The outer shell is obtained by injection molding, 3D printing or CNC machining (1); The multi-layer micro-flexible assembly (2) is placed inside the housing (1), the gas flow channel unit of the multi-layer micro-flexible assembly (2) is aligned with the gas flow hole of the housing (1), and the electric terminals of the multi-layer micro-flexible assembly (2) are connected to the external drive circuit through the housing (1) to complete the fabrication of the multi-layer micro-flexible electric fan device.

10. A method of using a multi-layer micro-flexible electric fan device, characterized in that, A multi-layer micro-flexible electric fan device according to any one of claims 1-8 includes the following process: During operation, the external drive circuit applies sinusoidal AC voltage to the two electrodes of the alternating interconnected electrode unit (6), causing the flexural electric unit (5) to be driven by opposite electric fields, thus achieving synchronous reverse vibration. When the flexural electric unit (5) vibrates synchronously in opposite directions, the volume of the air cavity unit (7) inside the flexural electric unit (5) changes. When the volume increases, a negative pressure is generated, and the air cavity unit (7) draws in gas through the gas flow channel unit. When the volume decreases, a positive pressure is generated, and the air cavity unit (7) discharges the gas drawn in through the gas flow channel unit.

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