An online graphite boat conveying mechanism suitable for a coating process

Abstract

The application relates to an online graphite boat conveying mechanism suitable for a coating process and belongs to the technical field of silicon wafer coating. The online graphite boat conveying mechanism suitable for the coating process comprises two graphite boats, the two graphite boats are arranged in parallel, additionally comprises an added frame, the top of the added frame is located above each graphite boat, one end of each graphite boat penetrates through the added frame, so that the two graphite boats are arranged close to each other, and the top of the added frame is additionally provided with a conveying robot, and the conveying robot is used for adsorbing and transporting silicon wafers. The application has the effect of reducing the time required for the conveying robot to rotate between the two graphite boats.

Description

Technical Field

[0001] This application relates to the field of silicon wafer coating technology, and in particular to an online graphite boat conveying mechanism suitable for coating processes. Background Technology

[0002] In the manufacturing process of crystalline silicon photovoltaic cells, the coating process is a crucial step in forming the core functional thin films (such as the silicon nitride antireflection passivation layer). This process is typically carried out using tubular plasma-enhanced chemical vapor deposition (PECVD) equipment. This process requires batch processing of a large number of silicon wafers in high-temperature, vacuum, or specific reactive atmospheres. In this stage, the graphite boat, as the core carrier supporting the silicon wafers, plays a vital role in supporting the wafers within the coating furnace and ensuring uniform and precise spacing between them to achieve consistent film deposition.

[0003] An existing technology provides an online graphite boat conveying mechanism suitable for coating processes. This mechanism includes two graphite boats and a conveying robot. The two graphite boats are arranged parallel to each other, and each has guide rails at its bottom for movement on the ground. The two graphite boats move in parallel (i.e., along their length) but in opposite directions. One graphite boat holds coated silicon wafers, while the other is empty. The conveying robot is positioned between the two graphite boats, and a stacking rack is located on one side of the robot. This rack holds several uncoated silicon wafers for stacking coated silicon wafers. In operation, the conveying robot picks up uncoated silicon wafers from the stacking rack and inserts them into the empty graphite boat. Then, it rotates to pick up the silicon wafers from the graphite boat containing coated wafers and conveys them to the stacking rack (completing one transfer operation). Subsequently, both graphite boats are moved a certain distance, alternating back and forth, so that the uncoated silicon wafers are moved to the empty graphite boat, and the silicon wafers on the graphite boat with coated silicon wafers are moved to the stacking rack (completing the entire transfer).

[0004] Regarding the aforementioned technologies, since the existing conveying robot is positioned between two graphite boats, and the distance between the two graphite boats is generally set to be large in order to accommodate the conveying robot, the conveying robot needs to rotate a large angle (close to 180 degrees) between the two graphite boats to complete the transplant. This increases the time required for the conveying robot to rotate between the two graphite boats, thereby reducing the transplant efficiency, and therefore needs to be improved. Summary of the Invention

[0005] To reduce the time required for the conveying robot to rotate between two graphite boats, this application provides an online graphite boat conveying mechanism suitable for coating processes.

[0006] This application provides an online graphite boat conveying mechanism suitable for coating processes, which adopts the following technical solution: An online graphite boat conveying mechanism suitable for coating processes includes two graphite boats arranged in parallel, and an extension frame with its top positioned above each graphite boat. One end of each graphite boat passes through the extension frame so that the two graphite boats are arranged close together. A conveying robot is also provided on the top of the extension frame for adsorbing and transporting silicon wafers.

[0007] By adopting the above technical solution, compared with the prior art where the conveying robot is placed between two graphite boats, requiring the robot to rotate a large angle (close to 180 degrees) between the two boats to complete the transfer, the present application improves efficiency by adding a support frame. This allows the conveying robot to be placed above the graphite boats, bringing them closer together and effectively reducing the distance between them. This significantly reduces the angle the robot needs to rotate to be directly above the other boat after inserting the uncoated silicon wafer from the stacking rack into the empty graphite boat. This shortens the robot's movement path, increases its cycle time, and reduces the rotation time, thus improving transfer efficiency. Furthermore, it saves the floor space required for this application and reduces the risk of malfunctions due to excessive movement, enhancing the stability and reliability of the operation.

[0008] Preferably, the top of the additional frame is also provided with an inclined platform, one side of the top of the inclined platform is inclined downward, and the conveying robot is disposed on the inclined platform.

[0009] By adopting the above technical solution, the tilting platform is set up so that the conveying robot can be tilted, thereby tilting the conveying robot towards the two graphite boats. This reduces the distance and range of movement of the conveying robot between the two graphite boats, thereby reducing the time required for the conveying robot to move between the two graphite boats and effectively improving the transplanting efficiency.

[0010] Preferably, the tilting platform is slidably connected to the addition frame, and the sliding direction is parallel to the length direction of the addition frame. The addition frame is also provided with a driving mechanism, which is used to drive the tilting platform to slide along its own sliding direction.

[0011] By adopting the above technical solution and configuring the drive mechanism, the drive mechanism can drive the tilting platform to slide relative to the additional frame. This allows the conveying robot on the tilting platform to be positioned directly above the corresponding graphite boat after movement, effectively reducing the distance between the conveying robot and the graphite boat. At the same time, it allows the conveying robot to directly move the adsorbed silicon wafers downwards, effectively shortening the movement trajectory of the conveying robot and reducing the angle required for the conveying robot to rotate between the two graphite boats, thereby reducing the rotation time and improving the transfer efficiency.

[0012] Preferably, the tilting platform includes a sliding frame and a tilting frame, the sliding frame is slidably connected to the additional frame, the driving mechanism is used to drive the sliding frame to slide, the tilting frame is rotatably connected to the sliding frame, and the additional frame is also provided with a rotating mechanism, the rotating mechanism is used to drive the tilting frame to rotate relative to the sliding frame.

[0013] By adopting the above technical solution, the tilting frame and the rotating mechanism are configured so that the rotating mechanism can drive the tilting frame to rotate relative to the sliding frame. This allows the sliding frame to rotate to an angle directly facing the stacking platform when it is close to the stacking platform, which effectively facilitates the conveying robot to remove silicon wafers from the stacking platform and place silicon wafers on the stacking platform.

[0014] Preferably, the rotating mechanism includes a rotating cylinder and a rotating assembly. The rotating cylinder is sleeved on one end of the tilting frame along its own axis and is slidably connected to the tilting frame. The sliding direction is the axial direction of the tilting frame. The rotating assembly is used to drive the rotating cylinder to rotate.

[0015] By adopting the above technical solution and setting the rotating mechanism, the rotating component can drive the rotating cylinder to rotate. After the rotating cylinder rotates, it can drive the tilting frame to rotate relative to the sliding frame, thereby driving the rotation of the tilting frame. This allows the rotating cylinder to be set on the additional frame, thereby reducing the overall weight of the tilting table, thereby reducing the load on the driving mechanism and ensuring the smooth sliding of the sliding frame.

[0016] Preferably, the number of rotating cylinders is set to two, and the two rotating cylinders are respectively sleeved on both ends of the inclined frame along its own axis, and both are rotatably connected to the placement frame. The rotating assembly is used to drive one of its rotating cylinders to rotate.

[0017] By adopting the above technical solution, the rotating cylinder is configured such that when the sliding frame approaches one of the rotating cylinders, and the end of the tilting frame is embedded in the rotating cylinder, the rotating component can drive the rotating cylinder to rotate, thereby driving the tilting frame to rotate. By controlling the position of the sliding frame, the rotation of the two rotating cylinders can be alternately driven, so that the tilting frame can rotate to a specified angle after moving above each graphite boat.

[0018] Preferably, the rotating assembly includes two linkage rods, which are respectively disposed at both ends of the sliding frame along its own sliding direction and extend into the corresponding rotating cylinder. Each linkage rod has a linkage part at the end away from the sliding frame. Each rotating cylinder has a spiral groove on its inner sidewall, and each linkage part extends into the corresponding spiral groove and abuts against the inner wall of the corresponding spiral groove.

[0019] By adopting the above technical solution and configuring the rotating component, when the sliding frame moves and approaches one of its rotating cylinders, the linkage part on the corresponding end of the linkage rod abuts against the inner wall of the spiral groove on the rotating cylinder, thereby pushing the rotating cylinder to rotate and thus driving the rotating cylinder. This achieves linkage between the sliding frame and the rotating cylinder, effectively saving the active device required to drive the rotating cylinder to rotate, thereby reducing the installation space required for adding the frame.

[0020] Preferably, a transition groove is provided on the inner sidewall of each of the rotating cylinders. Each transition groove extends along the axial direction of the corresponding rotating cylinder, with one end communicating with the corresponding spiral groove and the other end extending to the outside of the end of the corresponding rotating cylinder.

[0021] By adopting the above technical solution, the transition groove is designed so that when the sliding frame slides towards one of its rotating cylinders, the linkage part on the linkage frame of the sliding frame near the other rotating cylinder can move into the transition groove on the other rotating cylinder, thereby allowing the rotating cylinder to maintain its own state and not rotate. This facilitates docking between the tilting frame and the rotating cylinder when the sliding frame slides in the opposite direction, effectively ensuring the smooth rotation of the tilting frame.

[0022] Preferably, the tilting frame is provided with several linkage protrusions at both ends along the axial direction, and each of the rotating cylinders is provided with several linkage grooves on the inner side wall of one end of the tilting frame. The linkage protrusions are adapted to the linkage grooves, and each linkage protrusion is used to be embedded in the corresponding linkage groove.

[0023] By adopting the above technical solution, the linkage protrusion and linkage groove are designed so that when the tilting frame is connected to one of its rotating cylinders, the linkage protrusion on the tilting frame can be embedded in the corresponding linkage groove on the rotating cylinder. This allows the inner wall of the linkage groove to abut against the side wall of the linkage protrusion, thereby pushing the tilting frame to rotate relative to the sliding frame. This effectively ensures that the rotating cylinder drives the tilting frame to rotate, thus ensuring the smooth rotation of the tilting frame and the stability of the conveying robot.

[0024] Preferably, the sliding frame is further provided with a support mechanism, which includes a support frame and a transmission frame. One end of the support frame is slidably connected to the sliding frame, and the sliding direction is the height direction of the sliding frame. One end of the transmission frame is rotatably connected to the support frame, and the other end is rotatably connected to the tilting frame.

[0025] By adopting the above technical solution and setting the support mechanism, the tilting frame can drive the corresponding support frame to slide through the transmission frame during the rotation of the tilting frame relative to the sliding frame, thereby adapting to the rotation of the tilting frame. Furthermore, the support frame and the sliding frame can resist each other to prevent the tilting frame from rotating unexpectedly, thus supporting the tilting frame and ensuring its stability.

[0026] In summary, this application includes at least one of the following beneficial technical effects: The addition of a support frame allows the conveyor robot to be placed above the graphite boat, bringing the two graphite boats closer together. This effectively reduces the distance between the two graphite boats, thereby reducing the angle the conveyor robot needs to rotate to be directly above the other graphite boat after inserting the uncoated silicon wafer from the stacking rack into the empty graphite boat. This shortens the trajectory required for the conveyor robot to move, resulting in a faster cycle time and reduced rotation time, thus improving the efficiency of the transfer. It also effectively saves the floor space required for this application and reduces the risk of failure caused by excessive movement range, improving the stability and reliability of the application's operation. The drive mechanism is designed to allow the tilting platform to slide relative to the mounting frame, so that the conveying robot on the tilting platform can be positioned directly above the corresponding graphite boat after movement. This effectively reduces the distance between the conveying robot and the graphite boat, and also allows the conveying robot to move the adsorbed silicon wafer directly downwards, thus shortening the movement trajectory of the conveying robot and reducing the angle required for the conveying robot to rotate between the two graphite boats, thereby reducing the rotation time and improving the transfer efficiency. The tilting frame and the rotating mechanism are designed so that the rotating mechanism can drive the tilting frame to rotate relative to the sliding frame. This allows the sliding frame to rotate to an angle directly facing the stacking platform when it is close to it, which effectively facilitates the transport robot to remove silicon wafers from the stacking platform and place silicon wafers on the stacking platform. Attached Figure Description

[0027] Figure 1 This is a schematic diagram of the overall online graphite boat conveying mechanism applicable to the coating process, as shown in Embodiment 1 of this application.

[0028] Figure 2 This is a schematic diagram illustrating the structure of the tilting stage in Embodiment 2 of this application.

[0029] Figure 3 This is a schematic diagram illustrating the structure of the tilting frame in Embodiment 2 of this application.

[0030] Figure 4 This is a structural schematic diagram of the support mechanism used in Embodiment 2 of this application.

[0031] Figure 5 This is a schematic diagram illustrating the structure of the rotating cylinder in Embodiment 2 of this application.

[0032] Explanation of reference numerals in the attached drawings: 1. Graphite boat; 2. Addition frame; 3. Conveying robot; 4. Inclined platform; 41. Sliding frame; 42. Inclined frame; 421. Linkage protrusion; 5. Drive mechanism; 6. Rotating mechanism; 61. Rotating cylinder; 611. Spiral groove; 612. Transition groove; 613. Linkage groove; 62. Rotating assembly; 621. Linkage rod; 6221. Linkage part; 7. Support mechanism; 71. Support frame; 72. Transmission frame. Detailed Implementation

[0033] The following is in conjunction with the appendix Figure 1-5 This application will be described in further detail.

[0034] Example 1

[0035] Embodiment 1 of this application discloses an online graphite boat conveying mechanism suitable for coating processes. (Refer to...) Figure 1 The online graphite boat conveying mechanism suitable for coating processes includes two graphite boats 1 and an extension frame 2, with the two graphite boats 1 arranged in parallel. The top of the extension frame 2 is located above each graphite boat 1, and one end of each graphite boat 1 passes through the extension frame 2, so that the two graphite boats 1 are arranged close together. A conveying robot 3 is also provided on the top of the extension frame 2, which is used to pick up and transport silicon wafers.

[0036] Reference Figure 1In this embodiment of the application, each graphite boat 1 is provided with a guide rail at its bottom, and each graphite boat 1 is also provided with a number of movable wheels and a drive structure for driving the movable wheels to rotate, so that the movable wheels can rotate relative to the graphite boat 1. The bottom of each movable wheel abuts against the guide rail, so that it can move along the extension direction of the guide rail.

[0037] Reference Figure 1 The additional frame 2 is placed on the ground, with its top higher than the top of each graphite boat 1. One end of each graphite boat 1 passes through the additional frame 2, so that the two graphite boats 1 can be set close to each other, thereby reducing the distance between the graphite boats 1.

[0038] Reference Figure 1 The top of the addition frame 2 is also equipped with a tilting platform 4, which is fixedly connected to the top of the addition frame 2 by welding or bolts, and the tilting platform 4 is located in the middle between the two graphite boats 1. One end of the tilting platform 4 along the length of the graphite boat 1 is also tilted downward so that the top wall faces the stacking platform on one side (not shown in the attached figure). The conveying robot 3 is fixedly installed on the top of the tilting platform 4, and a suction cup is provided on its working end for adsorbing and conveying silicon wafers.

[0039] The implementation principle of an online graphite boat conveying mechanism applicable to coating processes in Embodiment 1 of this application is as follows: The addition of the frame 2 allows the conveying robot 3 to be placed above the graphite boat 1, thereby bringing the two graphite boats 1 closer together and effectively reducing the distance between them. This, in turn, reduces the angle required for the conveying robot 3 to rotate to be directly above the other graphite boat 1 after inserting the uncoated silicon wafer from the stacking rack onto the empty graphite boat 1. This effectively shortens the trajectory required for the conveying robot 3 to move, resulting in a faster cycle time and reduced rotation time, thus improving the efficiency of transfer. At the same time, it also effectively saves the floor space required for this application and reduces the risk of failure caused by excessive movement range, thereby improving the stability and reliability of the operation.

[0040] Example 2

[0041] The difference between Embodiment 2 and Embodiment 1 in this application is that: (Refer to...) Figure 2 , Figure 3 and Figure 4 The tilting platform 4 includes a sliding frame 41 and a tilting frame 42. The sliding frame 41 is slidably connected to the top of the auxiliary frame 2 via a sliding groove, and the sliding direction is the length direction of the auxiliary frame 2. The tilting frame 42 is sleeved on the top of the sliding frame 41 and is rotatably connected to the sliding frame 41, and the length direction of the rotation axis is parallel to the sliding direction of the sliding frame 41. The conveying robot 3 is fixedly installed on the top of the tilting frame 42 by bolts.

[0042] Reference Figure 2 and Figure 3 The addition frame 2 is also equipped with a drive mechanism 5. In this embodiment, the drive mechanism 5 is an electric cylinder. The electric cylinder is fixedly installed on the top of the addition frame 2, and the extension direction of the piston rod is the length direction of the addition frame 2. The piston rod is fixedly connected to the sliding frame 41 by bolts to drive the sliding frame 41 to slide. The electric cylinder can control its own stroke through the PLC controller, thereby realizing the change of the position of the sliding frame 41.

[0043] Reference Figure 2 , Figure 3 and Figure 4 The auxiliary frame 2 is equipped with a rotating mechanism 6, which includes a rotating cylinder 61 and a rotating assembly 62. Two rotating cylinders 61 are provided, located on opposite sides of the sliding frame 41 along its sliding direction. Each rotating cylinder 61 is rotatably connected to the auxiliary frame 2 via a pin. Each rotating cylinder 61 has an opening at its end near the sliding frame 41.

[0044] Reference Figure 3 and Figure 5 Each rotating cylinder 61 has several spiral grooves 611 on its inner wall. In this embodiment, each rotating cylinder 61 has three spiral grooves 611, and each spiral groove 611 is spirally arranged along the axial direction of the corresponding rotating cylinder 61. Each rotating cylinder 61 also has a transition groove 612 on its inner wall. In this embodiment, the number of transition grooves 612 is also three, and they correspond one-to-one with the three spiral grooves 611. One end of each transition groove 612 is connected to one end of the corresponding spiral groove 611, and the other end extends along the axial direction of the rotating cylinder 61 and extends to the outside of the opening of the corresponding rotating cylinder 61 to communicate with the outside.

[0045] Reference Figure 3 and Figure 5 The tilting frame 42 has several linkage protrusions 421 at both ends along its own axis. The linkage protrusions 421 are distributed at equal angles around the axis of the tilting frame 42 and are integrally formed with the tilting frame 42. Each rotating cylinder 61 has several linkage grooves 613 on the inner side wall of its open end, and the linkage grooves 613 are all located on the side of the corresponding spiral groove 611 near the tilting frame 42.

[0046] Reference Figure 3 and Figure 5Several linkage grooves 613 are distributed at equal angles along the circumference of the axis of the corresponding rotating cylinder 61. Linkage protrusions 421 are set one-to-one with linkage grooves 613, and one end of each linkage protrusion 421 is embedded in the corresponding linkage groove 613, so that the open ends of the two rotating cylinders 61 are fitted on the tilting frame 42. At this time, the tilting frame 42 is located in the middle of its displacement path when it slides together with the sliding frame 41, that is, between the two graphite boats 1.

[0047] Reference Figure 3 and Figure 5 The rotating assembly 62 includes two linkage rods 621, which are located at opposite ends of the sliding frame 41 along its sliding direction, with one end of each rod fixedly connected to the sliding frame 41 by welding. The other end of each linkage rod 621 extends into the opening of the corresponding rotating cylinder 61, and each end is provided with a linkage portion 6221. In this embodiment, each linkage rod 621 has three linkage portions 6221, which correspond one-to-one with the transition grooves 612. Each linkage portion 6221 is integrally formed with the linkage rod 621, and its end is embedded in the corresponding spiral groove 611, abutting against the inner wall of the corresponding spiral groove 611.

[0048] Reference Figure 2 , Figure 3 and Figure 5 In the initial state, when the sliding frame 41 is located in the middle of its sliding path, and the conveying robot 3 is directly above the two graphite boats 1, each linkage protrusion 421 is embedded in the corresponding linkage groove 613 of the two rotating cylinders 61. At this time, the conveying robot 3 on the tilting frame 42 is close to the stacking frame. After the conveying robot 3 adsorbs the silicon wafers on the stacking frame, the drive mechanism 5 drives the sliding frame 41 to slide, thereby moving the sliding frame 41 to directly above the empty graphite boat 1. At this time, the linkage protrusion 421 is gradually embedded in the rotating cylinder 61 close to the empty graphite boat 1, and gradually moves away from the other rotating cylinder 61, and then gradually detaches from the linkage groove 613 of the rotating cylinder 61.

[0049] Reference Figure 2 , Figure 3 and Figure 5During this process, the linkage rods 621 on the sliding frame 41 slide together, causing the linkage part 6221 on the linkage rod 621 closest to the empty graphite boat 1 to enter the spiral groove 611 from the transition groove 612 on the corresponding rotating cylinder 61. The linkage part 6221 on the other linkage rod 621 remains displaced within the corresponding transition groove 612. Subsequently, the linkage part 6221 entering the spiral groove 611 displaces within the spiral groove 611, and through its contact with the spiral groove 611, pushes the rotating cylinder 61 to rotate, causing the rotating cylinder 61 to drive the tilting frame 42 to rotate together. This causes the tilting frame 42 to tilt downwards, allowing the conveying robot 3 to approach the empty graphite boat 1, thus facilitating the insertion of the adsorbed silicon wafers into the empty graphite boat 1.

[0050] Reference Figure 2 , Figure 3 and Figure 5 Subsequently, the drive mechanism 5 drives the sliding frame 41 to slide in the opposite direction, causing the sliding frame 41 to gradually approach the other rotating cylinder 61. During this process, one of its linkage rods 621 gradually disengages from the spiral groove 611 and enters the transition groove 612, while the tilting frame 42 rotates and gradually returns to its initial position. At this time, the other linkage rod 621 gradually enters the spiral groove 611 in the other rotating cylinder 61 (i.e., the rotating cylinder 61 located above the graphite boat 1 loaded with coated silicon wafers), causing the tilting frame 42 to continue rotating, allowing the conveying robot 3 to approach the graphite boat 1 loaded with coated silicon wafers, thus facilitating the adsorption of the coated silicon wafers.

[0051] Reference Figure 3 and Figure 4 The sliding frame 41 is also provided with a support mechanism 7. In this embodiment, the number of support mechanisms 7 is set to several, and they are respectively located on both sides of the tilting frame 42 along the width direction of the additional frame 2. Each support mechanism 7 includes a support frame 71 and a transmission frame 72. Each support frame 71 is slidably connected to the sliding frame 41 through a slide rail, and the sliding direction is set to the height direction of the sliding frame 41. One end of each transmission frame 72 is rotatably connected to the corresponding support frame 71 through a pin, and the other end is rotatably connected to the tilting frame 42 through a pin, so that the support frame 71 and the transmission frame 72 can support the tilting frame 42, thereby reducing the load on the drive mechanism 5 and reducing the probability of the tilting frame 42 rotating unexpectedly.

[0052] The implementation principle of an online graphite boat conveying mechanism applicable to the coating process in Embodiment 2 of this application is as follows: When the conveying robot 3 adsorbs the silicon wafer on the stacking rack, the driving mechanism 5 drives the sliding frame 41 to slide, thereby causing the sliding frame 41 to move directly above the empty graphite boat 1. At this time, the linkage protrusion 421 is gradually embedded in the rotating cylinder 61 close to the empty graphite boat 1, and gradually moves away from the other rotating cylinder 61, and then gradually disengages from the linkage groove 613 of the rotating cylinder 61.

[0053] During this process, the linkage rods 621 on the sliding frame 41 slide together, causing the linkage part 6221 on the linkage rod 621 closest to the empty graphite boat 1 to enter the spiral groove 611 from the transition groove 612 on the corresponding rotating cylinder 61. The linkage part 6221 on the other linkage rod 621 remains displaced within the corresponding transition groove 612. Subsequently, the linkage part 6221 entering the spiral groove 611 displaces within the spiral groove 611, and through its contact with the spiral groove 611, pushes the rotating cylinder 61 to rotate. This causes the rotating cylinder 61 to drive the tilting frame 42 to rotate together, causing the tilting frame 42 to tilt downwards. This allows the conveying robot 3 to approach the empty graphite boat 1, facilitating the insertion of the adsorbed silicon wafers into the empty graphite boat 1.

[0054] Subsequently, the drive mechanism 5 drives the sliding frame 41 to slide in the opposite direction, causing the sliding frame 41 to gradually approach the other rotating cylinder 61. During this process, one of its linkage rods 621 gradually disengages from the spiral groove 611 and enters the transition groove 612, while the tilting frame 42 rotates and gradually returns to its initial position. At this time, the other linkage rod 621 gradually enters the spiral groove 611 in the other rotating cylinder 61 (i.e., the rotating cylinder 61 located above the graphite boat 1 loaded with coated silicon wafers), causing the tilting frame 42 to continue rotating, allowing the conveying robot 3 to approach the graphite boat 1 loaded with coated silicon wafers, thus facilitating the adsorption of the coated silicon wafers.

[0055] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. An online graphite boat conveying mechanism suitable for coating processes, comprising two graphite boats (1) arranged in parallel, characterized in that: It also includes an extension frame (2), the top of which is located above each graphite boat (1), one end of each graphite boat (1) passes through the extension frame (2) so that the two graphite boats (1) are arranged close to each other. The top of the extension frame (2) is also provided with a conveying robot (3) for adsorbing and transporting silicon wafers.

2. The online graphite boat conveying mechanism suitable for coating processes according to claim 1, characterized in that: The top of the additional frame (2) is also provided with an inclined platform (4), one side of the top of the inclined platform (4) is inclined downward, and the conveying robot (3) is set on the inclined platform (4).

3. The online graphite boat conveying mechanism suitable for coating processes according to claim 2, characterized in that: The tilting platform (4) is slidably connected to the addition frame (2), and the sliding direction is parallel to the length direction of the addition frame (2). The addition frame (2) is also provided with a driving mechanism (5), which is used to drive the tilting platform (4) to slide along its own sliding direction.

4. The online graphite boat conveying mechanism suitable for coating processes according to claim 3, characterized in that: The tilting platform (4) includes a sliding frame (41) and a tilting frame (42). The sliding frame (41) is slidably connected to the additional frame (2). The driving mechanism (5) is used to drive the sliding frame (41) to slide. The tilting frame (42) is rotatably connected to the sliding frame (41). The additional frame (2) is also provided with a rotating mechanism (6). The rotating mechanism (6) is used to drive the tilting frame (42) to rotate relative to the sliding frame (41).

5. The online graphite boat conveying mechanism suitable for coating processes according to claim 4, characterized in that: The rotating mechanism (6) includes a rotating cylinder (61) and a rotating assembly (62). The rotating cylinder (61) is sleeved on one end of the tilting frame (42) along its own axis and is slidably connected to the tilting frame (42). The sliding direction is the axial direction of the tilting frame (42). The rotating assembly (62) is used to drive the rotating cylinder (61) to rotate.

6. The online graphite boat conveying mechanism suitable for coating processes according to claim 5, characterized in that: The number of rotating cylinders (61) is set to two, and the two rotating cylinders (61) are respectively sleeved on both ends of the inclined frame (42) along its own axis direction, and are rotatably connected to the placement frame. The rotating assembly (62) is used to drive one of its rotating cylinders (61) to rotate.

7. An online graphite boat conveying mechanism suitable for coating processes according to claim 6, characterized in that: The rotating assembly (62) includes two linkage rods (621), which are respectively disposed at both ends of the sliding frame (41) along its own sliding direction and extend into the corresponding rotating cylinder (61). Each linkage rod (621) has a linkage part (6221) at the end away from the sliding frame (41). Each rotating cylinder (61) has a spiral groove (611) on its inner sidewall. Each linkage part (6221) extends into the corresponding spiral groove (611) and abuts against the inner wall of the corresponding spiral groove (611).

8. The online graphite boat conveying mechanism suitable for coating processes according to claim 7, characterized in that: Each of the rotating cylinders (61) has a transition groove (612) on its inner sidewall. Each transition groove (612) extends along the axial direction of the corresponding rotating cylinder (61), with one end connected to the corresponding spiral groove (611) and the other end extending to the outside of the end of the corresponding rotating cylinder (61).

9. An online graphite boat conveying mechanism suitable for coating processes according to claim 5, characterized in that: The inclined frame (42) is provided with a plurality of linkage protrusions (421) at both ends along the axial direction. Each rotating cylinder (61) is fitted onto the inner side wall of one end of the inclined frame (42) and is provided with a plurality of linkage grooves (613). The linkage protrusions (421) are adapted to the linkage grooves (613), and each linkage protrusion (421) is used to be embedded in the corresponding linkage groove (613).

10. An online graphite boat conveying mechanism suitable for coating processes according to claim 4, characterized in that: The sliding frame (41) is also provided with a support mechanism (7), which includes a support frame (71) and a transmission frame (72). One end of the support frame (71) is slidably connected to the sliding frame (41), and the sliding direction is the height direction of the sliding frame (41). One end of the transmission frame (72) is rotatably connected to the support frame (71), and the other end is rotatably connected to the tilting frame (42).

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