A multi-degree-of-freedom adaptive adjusting device for a magnet based on real-time feedback

Abstract

This invention relates to a magnet multi-degree-of-freedom adaptive adjustment device based on real-time feedback, comprising: a multi-degree-of-freedom adaptive adjustment mechanism uniformly distributed on a welded steel base; the multi-degree-of-freedom adaptive adjustment mechanism includes a horizontal XY plane positioning module and a vertical Z-axis leveling module, the horizontal XY plane positioning module being arranged on the welded steel base, and the vertical Z-axis leveling module being arranged on the moving part of the horizontal XY plane positioning module; the horizontal XY plane positioning module includes two sets of orthogonally arranged first transmission mechanisms, and the vertical Z-axis leveling module includes a second transmission mechanism, the second transmission mechanism being used to convert horizontal displacement into vertical displacement; and a control system communicatively connected to displacement sensors on the multi-degree-of-freedom adaptive adjustment mechanism, the displacement sensors acquiring the three-dimensional spatial displacement of the magnet in real time and feeding it back to the control system, the control system then controlling the movement of the multi-degree-of-freedom adaptive adjustment mechanism, i.e., adjusting the three-dimensional spatial position of the magnet.

Description

Technical Field

[0001] This invention relates to a multi-degree-of-freedom adaptive adjustment device for magnets based on real-time feedback, belonging to the field of precision instruments and equipment technology. Background Technology

[0002] In high-end equipment such as particle accelerators, synchrotron radiation sources, and high-end lithography machines, the magnetic field centers of quadrupole magnets, dipole magnets, etc., must be precisely positioned and oriented at the theoretically designed spatial coordinates and angles. Their positioning accuracy is usually required to reach the micrometer level. Any tiny deviation in position or orientation will directly lead to a decrease in the quality of the particle beam or light beam, seriously affecting the performance and effect of the entire device system.

[0003] Therefore, the magnet support system of large scientific facilities faces a dual challenge. First, it needs to achieve extremely high initial positioning accuracy during the initial installation phase. Second, during its decades-long operation, it must continuously resist significant deformation and displacement caused by slow settlement of the civil foundation, release of thermal stress from the magnets themselves, and environmental vibrations. Deformation mainly includes three-dimensional spatial deformation such as vertical settlement and tilting of the support base, and horizontal drift and torsion. The long-term cumulative displacement of the magnet's spatial position will directly lead to asymmetry in the magnetic field distribution of the vacuum gap of the diode magnet, causing the beam trajectory to deviate from the theoretically designed path. This results in a serious deviation between the ideal trajectory of the beam spot and the theoretically designed geometric position of the vacuum chamber, which in turn impacts the inner wall of the vacuum chamber, causing severe beam loss and a decrease in dynamic vacuum. This will lead to deterioration of beam quality and reduction in transmission efficiency. Furthermore, thin-walled vacuum chambers are prone to fatigue deformation and sealing failure due to increased local thermal load and continuous stress, and even vacuum leakage, ultimately affecting the long-term operational stability and reliability of the entire system.

[0004] Currently, the adjustment scheme for magnet supports used in large scientific facilities mainly achieves horizontal X and Y-axis position control by arranging multiple manually adjustable bolt pushing mechanisms at the bottom or side of the magnet support, and uses a simple mechanical lifting mechanism to achieve height Z-axis control. Although this scheme achieves multi-degree-of-freedom adjustment to a certain extent, the adjustment process is cumbersome and difficult to control precisely. Furthermore, the bolt pushing and simple lifting mechanisms lack precise guidance and feedback mechanisms. For magnets installed on structures such as large welded steel bases, the simple leveling mechanism suffers from insufficient support stiffness, low adjustment resolution, and poor repeatability. It is also difficult to meet the comprehensive requirements of large range, high precision, and high dynamic response in terms of structure. The accurate position of the magnet is only accurate for a short period of time after installation and commissioning. However, during long-term operation, factors such as magnet thermal cycling and foundation settlement cause deviations in its spatial position.

[0005] Traditional magnet support adjustment mechanisms lack automatic sensing and real-time compensation capabilities. Any adjustment to the magnets must be completed after shutdown, relying on manual intervention and offline measurement by external equipment. This cannot cope with the continuous slow deformation that occurs during operation. Large scientific facilities have tight operating schedules, and shutdown maintenance is difficult and time-consuming, which seriously affects the beam supply time. This not only results in low efficiency but also fails to guarantee long-term stability.

[0006] To address the issue of magnet displacement due to various factors during long-term operation and to achieve continuous and precise control of its three-dimensional spatial position, it is urgent to invent a magnet multi-degree-of-freedom adaptive adjustment device based on real-time feedback. This device needs to be compact in structure, maintain the original bearing and connection relationship between the magnet and the foundation, and not interfere with the beam path and the layout of surrounding equipment. Summary of the Invention

[0007] To address the aforementioned technical problems, this invention provides a magnet multi-degree-of-freedom adaptive adjustment device based on real-time feedback. Through high-precision pose feedback and micro-force drive technology, it achieves online, closed-loop, adaptive adjustment and long-term stable maintenance of the three-dimensional spatial position of large magnets, thereby improving the high pose accuracy, long-term stability and reliability of the magnet system during the operation of large scientific devices.

[0008] To achieve the above objectives, the present invention adopts the following technical solution:

[0009] A magnet multi-degree-of-freedom adaptive adjustment device based on real-time feedback, comprising: A number of multi-degree-of-freedom adaptive adjustment mechanisms are evenly distributed on a welded steel base, and the top of each of the multi-degree-of-freedom adaptive adjustment mechanisms is used to support a magnet-fixed support plate. The multi-degree-of-freedom adaptive adjustment mechanism includes a horizontal XY plane positioning module and a vertical Z-axis leveling module. The horizontal XY plane positioning module is vertically arranged on the welded steel base via a lower fixed platform. The vertical Z-axis leveling module is vertically arranged on the moving part of the horizontal XY plane positioning module via a base. The magnet fixing support plate is set on the upper fixed platform of the vertical Z-axis leveling module. The horizontal XY plane positioning module includes two sets of orthogonally arranged first transmission mechanisms to achieve independent linear motion in the X and Y axis directions. The vertical Z-axis leveling module includes a second transmission mechanism, which is used to convert horizontal displacement into vertical displacement, thereby pushing the magnet fixed support plate to move vertically. The control system is communicatively connected to displacement sensors on several of the multi-degree-of-freedom adaptive adjustment mechanisms. The displacement sensors collect the three-dimensional spatial displacement of the magnet in real time and feed it back to the control system. The control system then controls the movement of the multi-degree-of-freedom adaptive adjustment mechanisms, that is, adjusts the three-dimensional spatial position of the magnet.

[0010] The aforementioned magnet multi-degree-of-freedom adaptive adjustment device based on real-time feedback preferably comprises two sets of orthogonally arranged first transmission mechanisms, each including an X-axis lateral adjustment unit, a Y-axis longitudinal adjustment unit, an X-direction moving platform, and a Y-direction moving platform. The Y-axis longitudinal adjustment unit is rigidly connected to the lower fixed platform, and the Y-direction moving platform is detachably connected to the moving part of the Y-axis longitudinal adjustment unit. The X-axis lateral adjustment unit is rigidly connected to the Y-direction moving platform, and the X-direction moving platform is detachably connected to the moving part of the X-axis lateral adjustment unit and located above the Y-direction moving platform. Guide rails are arranged between the X-direction moving platform and the Y-direction moving platform, and between the Y-direction moving platform and the lower fixed platform.

[0011] The aforementioned magnet multi-degree-of-freedom adaptive adjustment device based on real-time feedback, preferably, includes an X-axis lateral adjustment unit comprising a first lead screw, a drive connecting plate, and a horizontal drive mechanism base. The two ends of the first lead screw are respectively connected to the horizontal drive mechanism base via a first bearing seat assembly and a first bearing. A first nut is sleeved on the first lead screw, and the first nut is fastened to a nut seat. The first side of the nut seat is connected to the drive connecting plate, and the drive connecting plate is connected to the X-direction moving platform. One end of the first lead screw is connected to a servo motor via a first coupling.

[0012] Preferably, in the real-time feedback-based multi-degree-of-freedom adaptive adjustment device for magnets, the second side opposite to the first side of the nut seat is connected to the first slider via a connecting plate, the first slider is slidably connected to the first support guide rail, and the first support guide rail is arranged parallel to the first lead screw.

[0013] The aforementioned magnet multi-degree-of-freedom adaptive adjustment device based on real-time feedback preferably includes a second transmission mechanism as a wedge block transmission mechanism, comprising a second ball screw pair and a pair of wedge blocks with matched inclined surfaces. The second ball screw pair is connected to a second drive mechanism and is disposed on the pair of wedge blocks with matched inclined surfaces. The second drive mechanism pushes the pair of wedge blocks to move horizontally, and through the action of the wedge inclined surfaces, converts the horizontal displacement into vertical displacement, thereby pushing the magnet fixed support plate to move vertically.

[0014] The aforementioned magnet multi-degree-of-freedom adaptive adjustment device based on real-time feedback preferably includes a pair of wedge blocks with matched inclined surfaces, comprising a driven wedge block, an active wedge block, and a driven guide rail and an active guide rail arranged between the two wedge blocks. The driven guide rail is fastened to the driven wedge block, the active guide rail is fastened to the active wedge block, and the driven wedge block is fastened to the upper fixed platform.

[0015] Preferably, in the real-time feedback-based multi-degree-of-freedom adaptive adjustment device for magnets, the second ball screw pair includes a second screw and a second nut sleeved on the second screw. The second nut is fastened to the active wedge block. The two ends of the second screw are respectively connected to the Z-axis leveling module base through second bearings. The second bearing located at the first end of the second screw is axially fixed in the second bearing seat assembly through a first bearing cover. The second bearing seat assembly is fastened to the Z-axis leveling module base. The second bearing located at the second end of the second screw is axially fastened to the Z-axis leveling module base through a second bearing cover.

[0016] The aforementioned magnet multi-degree-of-freedom adaptive adjustment device based on real-time feedback preferably includes a set of heavy-duty linear guide rails configured between the active wedge block and the Z-axis leveling module base. A second slider is provided on the active wedge block, and a second support guide rail is provided on the Z-axis leveling module base that is adapted to the second slider and arranged parallel to the second lead screw. A linear guide rail is vertically installed between the side of the driven wedge block and the Z-axis leveling module base. A third support guide rail is provided on the driven wedge block, and a third slider adapted to the third support guide rail is provided on the Z-axis leveling module base.

[0017] Preferably, the multi-degree-of-freedom adaptive adjustment device for magnets based on real-time feedback is further provided with an optical grating ruler or a magnetic grating ruler.

[0018] An operation method for a magnet multi-degree-of-freedom adaptive adjustment device based on real-time feedback includes the following steps: The bottom of the multi-degree-of-freedom adaptive adjustment mechanism is connected to the welded steel base, and the top is connected to the magnet fixing support plate. Then the magnet is fixed on the magnet fixing support plate. With the magnet in a stopped state, a laser tracker is used to scan the theoretical position of the magnet to generate three-dimensional reference coordinates. The reference coordinates are then entered through the control system, and the moving parts of each axis of the multi-degree-of-freedom adaptive adjustment mechanism are driven to the mechanical zero point to complete the position calibration. During machine operation, displacement sensors collect the displacement of the magnet in three-dimensional space in real time. Based on the obtained displacement data, inverse kinematics calculation is used to decompose the required magnet pose correction amount into the target displacement of several support points, thereby driving the independent or coordinated movement of each unit of the multi-degree-of-freedom adaptive adjustment mechanism, that is, adjusting the position of the magnet in three-dimensional space. After the adjustment is completed, the displacement sensors re-measure the magnet pose. If the position deviation in the corresponding direction is greater than the set threshold, a second adjustment compensation will be performed until the set position is reached.

[0019] The present invention has the following advantages due to the adoption of the above technical solutions: 1. The device structure of this invention adopts a distributed modular design. The installation and debugging process does not require disassembling the magnet, adjusting or changing the accelerator tunnel layout, or pausing the device operation. It completely maintains the original mechanical and vacuum integrity of the magnet system and can achieve interference-free integration and upgrading of online devices.

[0020] 2. The device of this invention realizes the transformation of the operation and maintenance mode of magnets from passive offline manual intervention to active online automatic maintenance, and can realize remote monitoring, automatic adjustment and posture maintenance, significantly improving the operating efficiency and long-term reliability of large-scale scientific devices.

[0021] 3. The device of the present invention acts directly on the original support structure of the magnet through a high-rigidity distributed execution unit (multi-degree-of-freedom adaptive adjustment mechanism). It adopts a rigid connection and force dispersion design to ensure that the applied adjustment force is evenly transmitted, avoiding local overstress or structural deformation to the magnet or support components, and enhancing the overall rigidity of the system while realizing position adjustment.

[0022] 4. The device of this invention adopts a non-invasive external installation method, which does not require any structural modification to the magnet body, foundation or beam pipe, and has high compatibility and plug-and-play characteristics with the magnet support system of various existing large scientific devices.

[0023] 5. The device of this invention is applicable to various types of magnets (including dipole magnets, quadrupole magnets, and calibration magnets) in a variety of large scientific facilities such as synchrotron radiation, particle accelerators, and free electron lasers. It is not only suitable for newly built facilities, but also provides a general solution for improving the accuracy and intelligent transformation of existing facilities, and has broad engineering applicability and promotional value. Attached Figure Description

[0024] Figure 1 This is a diagram showing the pose of a magnet on a fixed support, provided as an example of the present invention. Figure 2 This is a schematic diagram of the specific structure of the magnet multi-degree-of-freedom adaptive adjustment device provided in this embodiment of the present invention. Figure 3This is a schematic diagram of the horizontal XY plane positioning module structure layout of the magnet multi-degree-of-freedom adaptive adjustment device provided in this embodiment of the present invention; Figure 4 This is a schematic diagram of the X-axis longitudinal adjustment unit of the magnet multi-degree-of-freedom adaptive adjustment device provided in this embodiment of the present invention; Figure 5 This is a cross-sectional view of the vertical Z-axis leveling module of the magnet multi-degree-of-freedom adaptive adjustment device provided in this embodiment of the present invention. Figure 6 A perspective view of the vertical Z-axis leveling module of the magnet multi-degree-of-freedom adaptive adjustment device provided in this embodiment of the present invention; The attached figures are labeled as follows: 1-Welded steel base; 2-Multi-degree-of-freedom adaptive adjustment mechanism; 3-Magnet-fixed support plate; 4-Magnet; 5-Horizontal XY plane positioning module; 6-Vertical Z-axis leveling module; 7-Y-axis longitudinal adjustment unit; 8-Lower fixed platform; 9-X-axis lateral adjustment unit; 10-X-direction moving platform; 11-Y-direction moving platform; 12-High-performance servo motor; 13-First coupling; 14-First bearing housing assembly; 15-First nut; 16-First support guide rail; 17-Connecting plate; 18-First slider; 19-Horizontal drive mechanism base; 20-First bearing; 21-First limit switch; 22-First lead screw ; 23-Nut seat; 24-Drive connecting plate; 25-High-resolution stepper motor; 26-Motor support; 27-Upper fixed platform; 28-Driven wedge block; 29-Z-axis leveling module base; 30-First bearing cover; 31-Second bearing seat assembly; 32-Second lead screw; 33-Second slider; 34-Second support guide rail; 35-Second nut; 36-Active wedge block; 37-Second bearing; 38-Second coupling; 39-Bumper block; 40-Driven guide rail; 41-Second limit switch; 42-Active guide rail; 43-Third slider; 44-Third support guide rail; 45-Limit switch; 46-Second bearing cover. Detailed Implementation

[0025] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention are described clearly and completely below. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without creative effort are within the scope of protection of this invention.

[0026] Unless otherwise defined, the technical or scientific terms used in this invention shall have the ordinary meaning understood by one of ordinary skill in the art to which this invention pertains. The terms "first," "second," "third," "fourth," and similar terms used in this invention do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Terms such as "comprising" or "including" mean that the element or object preceding the word encompasses the elements or objects listed following the word and their equivalents, without excluding other elements or objects. Terms such as "connected" or "linked" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect.

[0027] For ease of description, spatial relative terms may be used in the text to describe the relationship of one element or feature relative to another element or feature as shown in the figure. These relative terms include, for example, "inside," "outside," "middle," "outer," "below," "above," etc. Such spatial relative terms are intended to include different orientations of the device in use or operation, other than those depicted in the figure.

[0028] Currently, the adjustment scheme for magnet supports used in large scientific facilities mainly achieves horizontal X and Y-axis position control by arranging multiple manually adjustable bolt pushing mechanisms at the bottom or side of the magnet support, and uses a simple mechanical lifting mechanism to achieve height Z-axis control. Although this scheme achieves multi-degree-of-freedom adjustment to a certain extent, the adjustment process is cumbersome and difficult to control precisely. Furthermore, the bolt pushing and simple lifting mechanisms lack precise guidance and feedback mechanisms. For magnets installed on structures such as large welded steel bases, the simple leveling mechanism suffers from insufficient support stiffness, low adjustment resolution, and poor repeatability. It is also difficult to meet the comprehensive requirements of large range, high precision, and high dynamic response in terms of structure. The accurate position of the magnet is only accurate for a short period of time after installation and commissioning. However, during long-term operation, factors such as magnet thermal cycling and foundation settlement cause deviations in its spatial position. On the other hand, traditional magnet support adjustment mechanisms are completely lacking in automatic sensing and real-time compensation capabilities. Any adjustment to the magnet must be completed after shutdown, relying on manual intervention and offline measurement by external equipment. This cannot cope with the slow deformation that occurs continuously during operation. Large scientific facilities have tight operating schedules, and shutdown maintenance is difficult and time-consuming, which seriously affects the beam supply time. This not only results in low efficiency but also fails to guarantee long-term stability.

[0029] To address the aforementioned technical issues, this invention provides a multi-degree-of-freedom adaptive adjustment device for a magnet support based on real-time feedback. Its mechanical structure design, based on multi-point distributed independent adjustment units and a global real-time feedback closed loop, enables the device to achieve high rigidity load-bearing capacity, large-stroke precision positioning, micron-level steady-state maintenance, and online dynamic compensation. This transforms the support adjustment mode of the magnet support from a reliance on periodic offline manual correction to a continuous online autonomous stabilization mode, thereby improving the long-term stability and operational efficiency of the beam optical performance of large scientific devices.

[0030] like Figure 1 , Figure 2 , Figure 3 , Figure 5 As shown, the multi-degree-of-freedom adaptive adjustment device for a magnet support based on real-time feedback involved in this invention includes: The system includes a welded steel base 1, a multi-degree-of-freedom adaptive adjustment mechanism 2, and a magnet fixing support plate 3. The multi-degree-of-freedom adaptive adjustment mechanism 2 includes a horizontal XY plane positioning module 5 and a vertical Z-axis leveling module 6. The horizontal XY plane positioning module 5 is vertically arranged on the welded steel base 1 via a lower fixing platform 8. The vertical Z-axis leveling module 6 is vertically arranged on the moving part of the horizontal XY plane positioning module 5 via a Z-axis leveling module base 29. The magnet fixing support plate 3 is fixed to the upper fixing platform 27 by high-strength bolts. After the magnet fixing support plate 3 fixes the magnet 4 by a bolt pushing mechanism, the controller obtains the position information of the magnet 4, analyzes the position error, and then controls the adjustment units in the three directions to adjust the three-dimensional spatial position of the magnet 4 accordingly.

[0031] like Figure 1 As shown, the present invention provides four multi-degree-of-freedom adaptive adjustment mechanisms 2. These four mechanisms are distributed and fixed in a rectangular geometric layout on the four corners of the welded steel base 1, together rigidly supporting the magnet-fixed support plate 3 above. Of course, the number of multi-degree-of-freedom adaptive adjustment mechanisms 2 is not limited to four; it can be other numbers, depending on the shape of the magnet-fixed support plate 3.

[0032] The horizontal XY plane positioning module 5 of this invention uses a high-precision, high-rigidity linear motion pair to achieve displacement adjustment. It includes two sets of orthogonally arranged ball screw transmission mechanisms. Each mechanism is driven by a servo motor and connected to a precision ball screw through a coupling. The screw nut is fixedly connected to a movable slide. The movable slide is guided by a high-rigidity linear guide rail to ensure its motion accuracy and anti-overturning torque capability in a single direction. The two sets of ball screw transmission mechanisms are stacked, so that the adjustment unit has independent linear motion capability in the X and Y axis directions. Each linear motion axis is equipped with a high-resolution optical or magnetic scale to form a fully closed-loop position feedback, thereby realizing the precise two-dimensional positioning of the support point in the horizontal plane.

[0033] The vertical Z-axis leveling module 6 of this invention directly bears the local load of the magnet 4 and realizes precise vertical lifting and angle fine-tuning. Its core adopts a wedge block transmission mechanism to obtain high mechanical gain and self-locking. The module includes a base fixed on the horizontal XY plane positioning module 5, a pair of precisely matched wedge blocks, namely the active wedge block and the driven wedge block, and a high-resolution stepper motor that drives the active wedge block to move horizontally. When the drive mechanism pushes the active wedge block to move horizontally, the horizontal displacement is converted into the vertical displacement of the driven wedge block, i.e., the lifting block, through the action of the wedge inclined surface, thereby pushing the magnet fixing support plate 3. This design converts the large thrust of the drive motor into the fine displacement of the lifting end. At the same time, with the large contact area of ​​the wedge surface and the inclined self-locking effect, it provides extremely high vertical stiffness and stable posture holding capability. The vertical Z-axis leveling modules 6 on the four adjustment units work together to realize the overall height adjustment, horizontal leveling, and roll angle and yaw angle fine-tuning of the magnet 4 around the horizontal X and Y axes.

[0034] The upper fixed platform 27 of the vertical Z-axis leveling module 6 is directly and rigidly connected to the upper magnet fixed support plate 3 by high-strength bolts. All drive motors used for the X, Y and Z-axis adjustment units are scheduled by the control system. The control system receives the overall pose feedback of the magnet 4 from the laser tracker. Through inverse kinematics calculation, the required magnet pose correction amount is decomposed into the target displacement of the four support points, thereby driving each unit to move independently or collaboratively, and finally realizing the precise setting and adaptive stability of the magnet 4 pose.

[0035] like Figure 3 As shown, the horizontal XY plane positioning module 5 includes an X-axis lateral adjustment unit 9, a Y-axis longitudinal adjustment unit 7, an X-direction moving platform 10, and a Y-direction moving platform 11. Specifically, the base of the Y-axis longitudinal adjustment unit 7 is fixed to the lower fixed platform 8 by bolts, the Y-direction moving platform 11 is fixed to the moving part of the Y-axis longitudinal adjustment unit 7 by bolts, the base of the X-axis lateral adjustment unit 9 is fixed to the Y-direction moving platform 11 by bolts, and the X-direction moving platform 10 is fixed to the moving part of the X-axis lateral adjustment unit 9 by bolts. Guide rails are arranged between the X-direction moving platform 10 and the Y-direction moving platform 11, and between the Y-direction moving platform 11 and the lower fixed platform 8, providing a high-precision linear motion reference for the moving parts. During operation, the Y-axis longitudinal adjustment unit 7 drives the Y-direction moving platform 11 to move longitudinally along the Y-axis, and the X-axis lateral adjustment unit 9 drives the X-direction moving platform 10 to move laterally along the X-axis, thereby realizing two-dimensional adjustment of the magnet 4 in horizontal space.

[0036] Furthermore, such as Figure 4As shown, the X-axis lateral adjustment unit 9 includes a first lead screw 22 and a nut seat 23 sleeved on the first lead screw 22. The first nut 15 and the nut seat 23 are connected together by bolts. The two ends of the first lead screw 22 are respectively connected to the horizontal drive mechanism base 19 through a first bearing seat assembly 14 and a first bearing 20. The first bearing seat assembly 14 is fixed to the horizontal drive mechanism base 19 by bolts. The first bearing 20 is fixed to the horizontal drive mechanism base 19 by an interference fit. The first end (the first end refers to the first end of the first lead screw 22) is closer to the first lead screw 22. Figure 4 The left side of the middle, the second end refers to Figure 4 On the right side of the nut seat 23, a first coupling 13 is provided to connect to the output end of the high-performance servo motor 12 (first drive mechanism). The high-performance servo motor 12 is fixed to the horizontal drive mechanism base 19 by bolts. In order to effectively suppress the radial overturning tendency of the ball screw under cantilever load or eccentric working conditions, the first slider 18 and the first support guide rail 16 are arranged parallel to each other on the side of the nut seat 23 to ensure the motion accuracy and stability of the drive system under high speed and high acceleration. During operation, the output of the high-performance servo motor 12 drives the first lead screw 22 to rotate through the first coupling 13, which in turn drives the first nut 15 to rotate. The first nut 15 is connected to the nut seat 23 by bolts. One end of the nut seat 23 is fixed to the drive connecting plate 24 by bolts, and the other end is connected to the first slider 18 through the connecting plate 17. This causes the drive connecting plate 24 on the moving part of the X-axis lateral adjustment unit 9 to reciprocate along the direction of the first support guide rail 16, thereby driving the X-direction moving platform 10 arranged on the drive connecting plate 24 to reciprocate left and right, thus realizing the lateral adjustment of the three-dimensional spatial position of the magnet.

[0037] like Figure 3 As shown, the structure of the Y-axis longitudinal adjustment unit 7 is exactly the same as that of the X-axis transverse adjustment unit 9, and their working principle is also similar. The drive connecting plate 24 on the moving part of the Y-axis longitudinal adjustment unit 7 reciprocates along the direction of the first support guide rail 16, thereby driving the Y-direction moving platform 11 arranged on the drive connecting plate 24 to reciprocate back and forth, thereby realizing the longitudinal adjustment of the three-dimensional spatial position of the magnet.

[0038] like Figure 5 , Figure 6 As shown, the vertical Z-axis leveling module 6 includes a second ball screw pair, a pair of precision wedges with matched inclined surfaces, and a second drive mechanism. The second ball screw pair is connected to the second drive mechanism, and the second ball screw pair is mounted on the precision wedges. Figure 5As shown, a pair of precision wedge blocks with matched inclined surfaces include a driven wedge block 28, an active wedge block 36, and a driven guide rail 40 and an active guide rail 42 arranged between the two wedge blocks. The driven guide rail 40 is connected to the driven wedge block 28 by bolts, the active guide rail 42 is connected to the active wedge block 36 by bolts, and the driven wedge block 28 is connected to the upper fixed platform 27 by bolts.

[0039] The second ball screw assembly includes a second screw 32 and a second nut 35 sleeved on the second screw 32. The second nut 35 is bolted to the active wedge block 36. The two ends of the second screw 32 are respectively connected to the Z-axis leveling module base 29 through the second bearing 37. The first end of the second screw 32 is located at the first end. Figure 5 The second bearing 37 (on the left side) is axially fixed in the second bearing housing assembly 31 by the first bearing cap 30. The second bearing housing assembly 31 is fixed to the Z-axis leveling module base 29 by bolts and is located at the second end of the second lead screw 32. Figure 5 (On the right side) The second bearing 37 is axially fixed to the Z-axis leveling module base 29 via the second bearing cap 46. The second end near the second lead screw 32 (the first end refers to...) Figure 6 The left side of the middle, the second end refers to Figure 6 A second coupling 38 is provided on the right side of the high-resolution stepper motor 25, which is connected to the output end of the high-resolution stepper motor 25. The high-resolution stepper motor 25 is fixed to the side of the Z-axis leveling module base 29 by a motor support 26. The output end of the high-resolution stepper motor 25 is connected to the second lead screw 32 by the second coupling 38. In order to ensure that the active wedge block 36 moves accurately along an absolutely horizontal trajectory under the drive of the second lead screw 32 and to eliminate the sway caused by the radial force of the lead screw, a set of heavy-duty linear guides is arranged between the active wedge block 36 and the Z-axis leveling module base 29. The second slider 33 is connected to the active wedge block 36 by bolts, and the second support guide 34 is fixed to the Z-axis leveling module base 29 by bolts. The second slider 33 is adapted to the second support guide 34, and the second support guide 34 is arranged parallel to the second lead screw 32. Meanwhile, the top surface of the driven wedge block 28 is connected to the upper fixed platform 27. Therefore, in order to suppress any horizontal degree of freedom of the wedge block, its movement is strictly limited to the Z-axis. A high-rigidity linear guide is installed vertically on the side of the driven wedge block 28 and the Z-axis leveling module base 29 so that it can fully bear the bending moment and eccentric load moment caused by the working load. The third support guide 44 is connected to the driven wedge block 28 by bolts, and the third slider 43 is fixed on the Z-axis leveling module base 29 by bolts. The third slider 43 is adapted to the third support guide 44.

[0040] During operation, the output of the high-resolution stepper motor 25 drives the second lead screw 32 to rotate through the second coupling 38, which in turn drives the second nut 35 to rotate. This causes the active wedge block 36 on the moving part of the vertical Z-axis leveling module 6 to move up and down along the second support rail 34, thereby driving the magnet fixing support plate 3 arranged on the moving part of the vertical Z-axis leveling module 6 to move vertically up and down, realizing the vertical adjustment of the three-dimensional spatial position of the magnet 4.

[0041] Furthermore, to ensure that the moving parts do not experience excessive displacement while sliding on the corresponding guide rails, a first limit switch 21 for limiting the movement distance is provided on the first support guide rail 16, and second limit switches 41 and limit switches 45 for limiting the movement distance are provided on both sides of the second support guide rail 34. The impact block 39 is fixed to the side of the active wedge block 36 by bolts. Limit switches are installed at the extreme positions of the X, Y, and Z axes to prevent mechanical overtravel collisions caused by abnormal control, incorrect parameters, or misoperation, thereby avoiding damage to precision transmission components. Moreover, the precisely calibrated limit switch positions provide a stable mechanical reference origin, ensuring the repeatability and reliability of long-term operation, and achieving safe, accurate, and maintainable operation of the equipment.

[0042] The device of this invention can achieve a movement range of 30 mm in each of the X, Y and Z directions. In terms of adjustment accuracy, the overall positioning error of the system does not exceed ±2 micrometers, and it can stably and repeatedly reach the same position with a repeatability error of less than ±1 micrometer. The whole system relies on global feedback and collaborative control to meet the comprehensive performance requirements of high-precision equipment for nanometer-level dynamic posture stability within a 30 mm working space.

[0043] The present invention also provides an operation method for a magnet multi-degree-of-freedom adaptive adjustment device based on real-time feedback, comprising the following steps: The bottom of the multi-degree-of-freedom adaptive adjustment mechanism 2 is connected and fixed to the welded steel base 1 by bolts, and the top is connected to the magnet fixing support plate 3 by bolts. Then, the magnet 4 is fixed on the magnet fixing support plate 3. With magnet 4 in a stopped state, a laser tracker is used to scan the theoretical position of magnet 4 to generate three-dimensional reference coordinates (X, Y, Z). The reference coordinates are then entered through the closed-loop control module in the control system, and the moving parts of each axis of the multi-degree-of-freedom adaptive adjustment mechanism 2 are driven to the mechanical zero point to complete the position calibration. During accelerator operation, the laser displacement sensor collects the displacement of magnet 4 in three-dimensional space in real time. Based on the obtained displacement data, the required magnet 4 pose correction amount is decomposed into the target displacement of four support points through inverse kinematics calculation. This drives the independent or coordinated movement of each unit of the multi-degree-of-freedom adaptive adjustment mechanism 2, that is, to adjust the position of magnet 4 in three-dimensional space. After the adjustment is completed, the laser sensor remeasures the pose of magnet 4. If the position deviation in the corresponding direction is greater than the set threshold, a second adjustment compensation will be performed until the set position is reached.

[0044] This invention's device directly acts on the original support structure of the magnet through a high-rigidity distributed actuator (multi-degree-of-freedom adaptive adjustment mechanism). Employing rigid connections and a force-distribution design, it ensures uniform transmission of the applied adjustment force, avoiding localized overstress or structural deformation of the magnet or support components. This enhances the overall rigidity of the system while achieving pose adjustment. The device uses a non-invasive external installation method, requiring no structural modifications to the magnet body, foundation, or beam pipe. It exhibits high compatibility and plug-and-play characteristics with magnet support systems in various existing large-scale scientific facilities. This invention is applicable to various types of magnets (including dipole magnets, quadrupole magnets, and calibration magnets) in large-scale scientific facilities such as synchrotron radiation, particle accelerators, and free-electron lasers. It is suitable not only for new facilities but also provides a universal solution for improving the accuracy and intelligent transformation of existing facilities, possessing broad engineering applicability and promotional value.

[0045] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A magnet multi-degree-of-freedom adaptive adjustment device based on real-time feedback, characterized in that, include: Several multi-degree-of-freedom adaptive adjustment mechanisms (2) are evenly distributed on the welded steel base (1), and the top of several of the multi-degree-of-freedom adaptive adjustment mechanisms (2) is used to support the magnet fixing support plate (3). The multi-degree-of-freedom adaptive adjustment mechanism (2) includes a horizontal XY plane positioning module (5) and a vertical Z-axis leveling module (6). The horizontal XY plane positioning module (5) is vertically arranged on the welded steel base (1) via a lower fixed platform (8). The vertical Z-axis leveling module (6) is vertically arranged on the moving part of the horizontal XY plane positioning module (5) via a base. The magnet fixing support plate (3) is set on the upper fixed platform (27) of the vertical Z-axis leveling module (6). The horizontal XY plane positioning module (5) includes two sets of orthogonally arranged first transmission mechanisms to realize independent linear motion in the X and Y axis directions. The vertical Z-axis leveling module (6) includes a second transmission mechanism, which is used to convert horizontal displacement into vertical displacement, thereby pushing the magnet fixed support plate (3) to move vertically. The control system is communicatively connected to the displacement sensors on the multi-degree-of-freedom adaptive adjustment mechanism (2). The displacement sensors collect the three-dimensional spatial displacement of the magnet (4) in real time and feed it back to the control system. The control system then controls the movement of the multi-degree-of-freedom adaptive adjustment mechanism (2), that is, adjusts the three-dimensional spatial position of the magnet (4).

2. The magnet multi-degree-of-freedom adaptive adjustment device based on real-time feedback according to claim 1, characterized in that, The two sets of orthogonally arranged first transmission mechanisms include an X-axis lateral adjustment unit (9), a Y-axis longitudinal adjustment unit (7), an X-direction moving platform (10), and a Y-direction moving platform (11). The Y-axis longitudinal adjustment unit (7) is fixedly connected to the lower fixed platform (8). The Y-direction moving platform (11) is detachably connected to the moving part of the Y-axis longitudinal adjustment unit (7). The X-axis lateral adjustment unit (9) is fixedly connected to the Y-direction moving platform (11). The X-direction moving platform (10) is detachably connected to the moving part of the X-axis lateral adjustment unit (9) and located above the Y-direction moving platform (11). Guide rails are arranged between the X-direction moving platform (10) and the Y-direction moving platform (11), and between the Y-direction moving platform (11) and the lower fixed platform (8).

3. The magnet multi-degree-of-freedom adaptive adjustment device based on real-time feedback according to claim 2, characterized in that, The X-axis lateral adjustment unit (9) includes a first lead screw (22), a drive connection plate (24), and a horizontal drive mechanism base (19). The two ends of the first lead screw (22) are connected to the horizontal drive mechanism base (19) through a first bearing seat assembly (14) and a first bearing (20), respectively. A first nut (15) is sleeved on the first lead screw (22). The first nut (15) is fastened to a nut seat (23). The first side of the nut seat (23) is connected to the drive connection plate (24). The drive connection plate (24) is connected to the X-direction moving platform (10). One end of the first lead screw (22) is connected to a servo motor through a first coupling (13).

4. The magnet multi-degree-of-freedom adaptive adjustment device based on real-time feedback according to claim 3, characterized in that, The second side opposite to the first side of the nut seat (23) is connected to the first slider (18) via a connecting plate (17). The first slider (18) is slidably connected to the first support rail (16). The first support rail (16) is arranged parallel to the first lead screw (22).

5. The magnet multi-degree-of-freedom adaptive adjustment device based on real-time feedback according to claim 1, characterized in that, The second transmission mechanism is a wedge block transmission mechanism, including a second ball screw pair and a pair of wedge blocks with matching inclined surfaces. The second ball screw pair is connected to the second drive mechanism. The second ball screw pair is set on the pair of wedge blocks with matching inclined surfaces. The second drive mechanism pushes the pair of wedge blocks to move horizontally. Through the action of the wedge inclined surfaces, the horizontal displacement is converted into vertical displacement, thereby pushing the magnet fixed support plate (3) to move vertically.

6. The magnet multi-degree-of-freedom adaptive adjustment device based on real-time feedback according to claim 5, characterized in that, The pair of wedges with matching inclined planes include a driven wedge (28), an active wedge (36), and a driven guide rail (40) and an active guide rail (42) arranged between the two wedges. The driven guide rail (40) is fastened to the driven wedge (28), the active guide rail (42) is fastened to the active wedge (36), and the driven wedge (28) is fastened to the upper fixed platform (27).

7. The magnet multi-degree-of-freedom adaptive adjustment device based on real-time feedback according to claim 6, characterized in that, The second ball screw assembly includes a second screw (32) and a second nut (35) sleeved on the second screw (32). The second nut (35) is fastened to the active wedge block (36). The two ends of the second screw (32) are respectively connected to the Z-axis leveling module base (29) through the second bearing (37). The second bearing (37) located at the first end of the second screw (32) is axially fixed in the second bearing seat assembly (31) through the first bearing cover (30). The second bearing seat assembly (31) is fastened on the Z-axis leveling module base (29). The second bearing (37) located at the second end of the second screw (32) is axially fastened on the Z-axis leveling module base (29) through the second bearing cover (46).

8. The magnet multi-degree-of-freedom adaptive adjustment device based on real-time feedback according to claim 7, characterized in that, A set of heavy-duty linear guide rails is configured between the active wedge block (36) and the Z-axis leveling module base (29). A second slider (33) is provided on the active wedge block (36), and a second support guide rail 34 is provided on the Z-axis leveling module base (29) that is adapted to the second slider (33) and arranged parallel to the second lead screw (32). A linear guide rail is vertically installed between the side of the driven wedge block (28) and the Z-axis leveling module base (29). A third support guide rail (44) is provided on the driven wedge block (28), and a third slider (43) adapted to the third support guide rail (44) is provided on the Z-axis leveling module base (29).

9. The magnet multi-degree-of-freedom adaptive adjustment device based on real-time feedback according to claim 1, characterized in that, The multi-degree-of-freedom adaptive adjustment mechanism (2) is also equipped with a grating ruler or a magnetic grating ruler.

10. An operation method for a magnet multi-degree-of-freedom adaptive adjustment device based on real-time feedback, characterized in that, Includes the following steps: The bottom of the multi-degree-of-freedom adaptive adjustment mechanism (2) is connected to the welded steel base (1), and the top is connected to the magnet fixing support plate (3). Then the magnet (4) is fixed on the magnet fixing support plate (3). When the magnet (4) is stopped, the theoretical position of the magnet (4) is scanned using a laser tracker to generate three-dimensional reference coordinates. The reference coordinates are entered through the control system, and the moving parts of each axis of the multi-degree-of-freedom adaptive adjustment mechanism (2) are driven to the mechanical zero point to complete the position calibration. During machine operation, the displacement sensor collects the displacement of the magnet (4) in three-dimensional space in real time. Based on the obtained displacement data, the required magnet (4) pose correction amount is decomposed into the target displacement of several support points through inverse kinematics calculation, thereby driving the independent or coordinated movement of each unit of the multi-degree-of-freedom adaptive adjustment mechanism (2), that is, adjusting the position of the magnet (4) in three-dimensional space. After the adjustment is completed, the displacement sensor re-measures the pose of the magnet (4). If the position deviation in the corresponding direction is greater than the set threshold, a second adjustment compensation will be performed until the set position is adjusted.

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