Galvanometer mechanism and laser processing device

Abstract

This invention discloses a galvanometer mechanism and a laser processing apparatus. The galvanometer mechanism includes a carrier, a galvanometer, a drive module, and a first sealing member. The carrier has a mounting cavity and a spherical hole connecting the mounting cavity and the outside of the carrier. The galvanometer is disposed within the mounting cavity. The drive module is mounted in the spherical hole and partially extends into the mounting cavity to connect with the galvanometer. The drive module located within the spherical hole has a spherical surface, which rotatably engages with the spherical hole. The first sealing member is disposed between the hole wall and the spherical surface of the spherical hole and is arranged circumferentially around the drive module. The technical solution of this invention can achieve effective sealing of the optical path while simultaneously enabling galvanometer position adjustment.

Description

Technical Field

[0001] This invention relates to the field of laser processing technology, and in particular to a galvanometer mechanism and a laser processing apparatus. Background Technology

[0002] Due to errors in processing or assembly, the laser optical path formed by a laser processing device generally needs to be adjusted and calibrated. This adjustment is primarily achieved by adjusting the position of the galvanometer.

[0003] Therefore, in related technologies, a sealing ring is set between the drive module that connects to the galvanometer and the through hole for mounting the drive module, so that the drive module can adjust its position within a certain range by compressing the sealing ring, thereby adjusting the position of the galvanometer.

[0004] However, during this adjustment process, because the sealing ring is subjected to greater compression on one side while the other side is not compressed, the overall force on the sealing ring is uneven, resulting in the inability to effectively seal the optical path in all circumferential directions. Summary of the Invention

[0005] The main objective of this invention is to provide a galvanometer mechanism that achieves effective sealing of the optical path while adjusting the position of the galvanometer.

[0006] To achieve the above objectives, the galvanometer mechanism proposed in this invention includes:

[0007] A carrier, the carrier having a mounting cavity and a spherical hole connecting the mounting cavity and the outside of the carrier;

[0008] A galvanometer, wherein the galvanometer is disposed within the mounting cavity;

[0009] A drive module is mounted in the spherical hole and partially extends into the mounting cavity to connect with the galvanometer. The drive module located within the spherical hole has a spherical surface, which rotatably engages with the spherical hole.

[0010] A first sealing element is disposed between the hole wall of the spherical hole and the spherical surface, and is arranged around the circumference of the drive module.

[0011] Optionally, the spherical hole is flared in the direction from one end near the mounting cavity to the other end away from the mounting cavity, and the shape of the spherical surface matches the shape of the spherical hole.

[0012] Optionally, the drive module includes:

[0013] The motor body is mounted in the spherical hole and partially extends into the mounting cavity to connect with the galvanometer; and

[0014] The mounting base includes a spherical ring that is arranged around the circumference of the motor body, and the outer side of the spherical ring has a spherical surface.

[0015] Optionally, the fixing base further includes a fixing plate, which is connected to the spherical ring and located outside the support member. The fixing plate and the support member are spaced apart on the side through which the spherical hole passes.

[0016] The fixing plate is provided with through holes, and the bearing member is provided with connecting holes at the positions corresponding to the through holes;

[0017] The galvanometer mechanism also includes an adjusting member, which passes through the through hole and is threadedly connected to the connecting hole. The adjusting member and the hole wall of the through hole are spaced apart.

[0018] Optionally, the number of through holes is at least two, wherein at least two through holes are located on both sides of the spherical hole in a first direction, and the first direction intersects the center line direction of the spherical hole;

[0019] The number of connecting holes and adjusting members corresponds to the number of through holes. Each adjusting member is inserted into the corresponding through hole and threadedly connected to the corresponding connecting hole.

[0020] Optionally, the carrier is provided with a limiting portion on at least one of the opposite sides of the spherical hole in the second direction, the second direction intersecting the first direction and the center line direction of the spherical hole;

[0021] The fixed plate is provided with a limiting engagement part corresponding to the position of the limiting part. The limiting engagement part and the limiting part abut against each other to prevent the drive module from rotating in the second direction.

[0022] Optionally, the limiting part is a protrusion provided on the bearing member, the limiting mating part is an opening provided on the fixing plate, and the protrusion is inserted into the opening;

[0023] Alternatively, the limiting part is a protrusion provided on the bearing member, and the limiting mating part is the side surface of the fixing plate in the second direction, with the protrusion abutting against the side surface.

[0024] Optionally, the number of through holes is at least four, wherein some of the through holes are located on both sides of the spherical hole in a first direction, and some of the through holes are located on both sides of the spherical hole in a second direction, the second direction intersecting the first direction and the center line direction of the spherical hole.

[0025] Optionally, the fixing plate is arranged in a ring-shaped integral structure around the circumference of the spherical ring;

[0026] Alternatively, the fixing plate may include at least two sub-plates, which are spaced apart circumferentially along the spherical ring, and at least one of the sub-plates may have the through hole.

[0027] Optionally, the carrier further includes an extension hole, which connects the end of the spherical hole away from the mounting cavity and the outside of the carrier. In the direction of the centerline of the spherical hole, the projection of the spherical hole is located inside the extension hole.

[0028] The fixing base also includes an extension section, which is disposed in the extension hole and spaced apart from the hole wall of the extension hole. The two ends of the extension section are respectively connected to the spherical ring and the fixing plate.

[0029] Optionally, the extension section is a cylindrical structure and surrounds the motor body;

[0030] And / or, one end of the spherical ring near the extension section extends into the extension hole;

[0031] And / or, the end of the spherical ring away from the extension section extends into the mounting cavity.

[0032] Optionally, the mounting base and the motor body are configured as separate units, and the galvanometer mechanism further includes a locking member that connects the mounting base and the motor body;

[0033] The support member is also provided with a clearance hole that communicates with the extension hole, and the clearance hole is provided corresponding to the locking member.

[0034] Optionally, the extension section is provided with a locking hole at the position corresponding to the clearance hole, the locking member passes through the locking hole and is threadedly connected to the motor body;

[0035] Alternatively, the extension section is a cylindrical structure and surrounds the motor body, with the locking member and the locking hole threadedly connected and extending into the extension section to abut against the motor body.

[0036] Optionally, the galvanometer mechanism further includes a housing, in which the support member and the drive module are disposed, and the housing has an exposure hole at the position corresponding to the adjustment member.

[0037] Optionally, the mounting base and the motor body are provided as separate structures;

[0038] Alternatively, the mounting base and the motor body can be configured as a single unit.

[0039] Optionally, when the fixed base and the motor body are arranged in a separate structure, the galvanometer mechanism further includes a second sealing member, which is disposed between the fixed base and the motor body and is arranged around the circumference of the drive module.

[0040] Optionally, one of the mounting base and the motor body is provided with a second groove, the second groove being arranged around the circumference of the drive module, and the second seal is installed in the second groove.

[0041] Optionally, one of the hole wall of the spherical hole and the spherical surface is provided with a first groove, the first groove is arranged around the circumference of the drive module, and the first seal is installed in the first groove.

[0042] The present invention also proposes a laser processing apparatus, comprising a laser, a galvanometer mechanism as described in any one of claims 1 to 16, and a focusing lens, wherein the galvanometer in the galvanometer mechanism is configured to reflect laser light emitted by the laser to the focusing lens.

[0043] The galvanometer mechanism of this invention uses a spherical surface and a spherical hole as the driving module and the support component for rotational engagement, allowing the driving module to rotate and thus adjusting the position of the galvanometer connected to it. Simultaneously, the galvanometer mechanism in this solution also includes a first sealing element that surrounds the driving module circumferentially between the spherical surface and the hole wall. Since the distance between the spherical surface and the hole wall is equal at all points, the pressure exerted on the first sealing element by the spherical surface and the hole wall is equal at all points in the circumferential direction during the rotation adjustment of the driving module, ensuring uniform force on the first sealing element and guaranteeing a consistent seal. Therefore, the galvanometer mechanism in this solution achieves both galvanometer position adjustment and effective sealing of the optical path. Attached Figure Description

[0044] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0045] Figure 1 This is a schematic diagram of the structure of an embodiment of the laser processing apparatus of the present invention;

[0046] Figure 2 This is a schematic diagram of the structure of one embodiment of the galvanometer mechanism of the present invention;

[0047] Figure 3 for Figure 2 A schematic diagram of the galvanometer mechanism with part of the housing removed;

[0048] Figure 4 for Figure 2 A partial structural diagram of the galvanometer mechanism;

[0049] Figure 5 for Figure 4 A cross-sectional schematic diagram of the galvanometer mechanism;

[0050] Figure 6 for Figure 4 A schematic diagram of an exploded structure of a galvanometer mechanism;

[0051] Figure 7 for Figure 6 Schematic diagram of the middle fixed base;

[0052] Figure 8 This is a schematic diagram of another embodiment of the galvanometer mechanism of the present invention;

[0053] Figure 9 for Figure 8 A schematic diagram of an exploded structure of a galvanometer mechanism;

[0054] Figure 10 for Figure 9 A schematic diagram of the assembly structure of the drive module and the galvanometer.

[0055] Explanation of icon numbers:

[0056] label name label name 1000 Laser processing equipment 331 spherical ring 100 Galvanometer mechanism 3311 spherical surface 10 load-bearing components 334 Fixed plate 11 Main body 3340 Through hole 111 Mounting cavity 3341 Limiting and fitting parts 112 spherical hole 3342 Opening 113 First groove 3343 side surface 114 entrance aperture 3345 Subplate 115 light hole 335 extension 116 Connection hole 3351 Locking hole 117 Extension hole 3352 Second groove 118 clearance hole 40 First sealing element 119 Limiting part 50 Adjustment component 1191 bump 60 Locking parts 13 Holding section 70 Second seal 20 Galvanometer 90 chassis 30 drive module 91 Exposed hole 31 motor body 300 laser 33 Fixed base 500 Focusing lens

[0057] The realization of the objective, functional features and advantages of the present invention will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0058] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present invention.

[0059] It should be noted that all directional indications (such as up, down, left, right, front, back, etc.) in the embodiments of the present invention are only used to explain the relative positional relationship and movement of each component in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indication will also change accordingly.

[0060] In this invention, unless otherwise explicitly specified and limited, the terms "connection," "fixed," etc., should be interpreted broadly. For example, "fixed" can mean a fixed connection, a detachable connection, or an integral part; it can mean a mechanical connection or an electrical connection; it can mean a direct connection or an indirect connection through an intermediate medium; it can mean the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0061] Furthermore, the use of terms such as "first" and "second" in this invention is for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the word "and / or" throughout the text means including three parallel solutions; for example, "A and / or B" includes solution A, solution B, or a solution that simultaneously satisfies A and B. Furthermore, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of a person skilled in the art to implement them. When the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this invention.

[0062] This invention proposes a laser processing device 1000, which can be a laser welding machine, a laser cutting machine, or a laser marking machine, etc. This application does not limit the type of laser processing device 1000, as long as it is a device that performs processing through a laser.

[0063] The laser processing device 1000 may include a laser 300, a galvanometer mechanism 100, and a focusing lens 500. The laser 300 can be used to emit laser light, and the galvanometer mechanism 100 can be used to reflect the laser light emitted by the laser 300 to the focusing lens 500, so that the laser light is focused by the focusing lens 500 and projected onto the workpiece to be processed to achieve the corresponding processing of the workpiece.

[0064] Furthermore, the galvanometer mechanism 100 may include a carrier 10, a galvanometer 20, a drive module 30, and a first seal 40. The carrier 10 is provided with a mounting cavity 111 and a spherical hole 112 connecting the mounting cavity 111 and the outside of the carrier 10; the galvanometer 20 is disposed in the mounting cavity 111; the drive module 30 is mounted in the spherical hole 112 and partially extends into the mounting cavity 111 and is connected to the galvanometer 20. The drive module 30 located in the spherical hole 112 is provided with a spherical surface 3311, and the spherical surface 3311 and the spherical hole 112 are rotatably engaged; the first seal 40 is disposed between the hole wall of the spherical hole 112 and the spherical surface 3311, and is arranged around the circumference of the drive module 30.

[0065] The carrier 10 can be provided with a mounting position through the mounting cavity 111 and the spherical hole 112, so that the galvanometer mechanism 100 can be assembled into a whole for use. To reduce the volume of the mounting cavity 111 and improve the convenience of its processing and shaping, the laser 300 and focusing lens 500 described above can be disposed on the outside of the carrier 10. In this case, the carrier 10 can also be provided with an entrance hole 114 and an exit hole 115. The entrance hole 114 allows the laser emitted by the laser 300 to enter the mounting cavity 111 and be projected onto the galvanometer 20, while the exit hole 115 allows the laser reflected by the galvanometer 20 to exit and be projected onto the focusing lens 500. Of course, this application is not limited to this; in other embodiments, the laser 300 and focusing lens 500 can also be integrated and disposed within the mounting cavity 111, in which case the carrier 10 can be provided with a light-transmitting hole corresponding to the focusing lens 500. Alternatively, the laser processing device 1000 can be a handheld processing device, such as a handheld laser welding machine or a handheld laser cutting machine. In this case, for ease of use by the user, the carrier 10 may include a main body segment 11 and a grip segment 13 for the user to hold. The grip segment 13 can be connected to the main body segment 11 and is set at an angle to the main body segment 11. A mounting cavity 111, a spherical hole 112, a light inlet hole 114, and a light outlet hole 115 can be provided on the main body segment 11. Furthermore, to reduce the overall size of the laser processing device 1000 for handheld use, the laser 300 can be set independently of the carrier 10 as described above and can be connected to the light inlet hole 114 via a laser transmission line. The focusing lens 500 can be integrated into the end of the main body segment 11 of the carrier 10 away from the grip segment 13. At this time, the end of the main body segment 11 away from the holding segment 13 can be provided with a light channel communicating with the light output hole 115. The end of the light channel away from the light output hole 115 forms a light transmission hole, and the focusing lens 500 can be disposed in the light channel. Of course, in some embodiments, the laser 300 can also be integrated on the carrier 10. In this case, the holding segment 13 can be provided with a cavity communicating with the light input hole 114, and the laser 300 can be disposed in the cavity. In addition, in some embodiments, the laser processing device 1000 can also be an automatic processing device. In this case, when the focusing lens 500 is integrated on the carrier 10, the laser processing device 1000 can include a moving mechanism formed by a linear module or a lead screw motor, so as to drive the carrier 10 to move through the moving mechanism to realize automatic processing of the workpiece. Alternatively, when the focusing lens 500 is set independently of the carrier 10, the carrier 10 and the object used to mount the focusing lens 500 can be driven by the same moving mechanism or different moving mechanisms.

[0066] The galvanometer 20 can be a plate structure to reflect the light emitted by the laser 300 to the focusing lens 500 through a surface. The shape of the galvanometer 20 can be rectangular, approximately rectangular (e.g., with rounded or beveled corners), square, approximately square, or circular, etc. This application does not limit the shape of the galvanometer 20.

[0067] The drive module 30 can be used to drive the galvanometer 20 to swing around the axis of the drive module 30, so as to deflect the laser to the required processing position. Specifically, the drive module 30 can be a motor for the galvanometer 20.

[0068] The first sealing element 40 can be an annular structure and is arranged around the drive module 30 to seal the space between the carrier 10 and the drive module 30 at the spherical hole 112, preventing laser leakage between the hole wall of the spherical hole 112 and the drive module 30. The first sealing element 40 can be made of silicone or rubber to make it elastic. When compressed by the carrier 10 and the drive module 30, it can undergo elastic deformation to form a deformation elastic force, which, under the action of the deformation elastic force, tightly adheres to the carrier 10 and the drive module 30, improving the sealing effect of the first sealing element 40. Furthermore, the cross-section of the first sealing element 40 can be any shape, such as circular, square, or rectangular.

[0069] The galvanometer mechanism 100 of the present invention configures the drive module 30 and the support member 10 as a rotatable fit between a spherical surface 3311 and a spherical hole 112, thereby driving the drive module 30 to rotate and adjusting the position of the galvanometer 20 connected to the drive module 30. Simultaneously, the galvanometer mechanism 100 in this solution also provides a first sealing member 40 arranged circumferentially around the drive module 30 between the spherical surface 3311 and the hole wall of the spherical hole 112. The distance between each point of the spherical surface 3311 and the hole wall of the spherical hole 112 is equal, ensuring that during the rotation adjustment of the drive module 30, the first sealing member 40 experiences equal pressure from the spherical surface 3311 and the hole wall of the spherical hole 112 at all points in the circumferential direction, achieving uniform force on the first sealing member 40 to guarantee a consistent sealing effect. Therefore, the structure of the galvanometer mechanism 100 in this solution not only enables the position adjustment of the galvanometer 20, but also provides effective sealing of the optical path.

[0070] In one embodiment of this application, one of the hole wall of the spherical hole 112 and the spherical surface 3311 is provided with a first groove 113. The first groove 113 is arranged around the circumference of the drive module 30, and the first seal 40 is installed in the first groove 113.

[0071] In this embodiment, the first sealing element 40 is installed in the first groove 113, so that the first groove 113 can position and limit the first sealing element 40, allowing the first sealing element 40 to be accurately and stably installed in the preset installation position. Simultaneously, it eliminates the need for a connecting structure for the first sealing element 40, allowing it to be directly installed in the first groove 113, thus improving the ease of installation. Furthermore, this arrangement also improves the compactness of the distribution among the carrier 10, the drive module 30, and the first sealing element 40, further enhancing the sealing effect. Of course, this application is not limited to this; in other embodiments, when the first groove 113 is not provided on the hole wall and spherical surface 3311 of the spherical hole 112, the first sealing element 40 can be bonded to the hole wall or spherical surface 3311 of the spherical hole 112.

[0072] In one embodiment of this application, the spherical hole 112 is flared in the direction from one end of the spherical hole 112 near the mounting cavity 111 to the end away from the mounting cavity 111, and the shape of the spherical surface 3311 is adapted to the shape of the spherical hole 112.

[0073] The flared shape means that the cross-sections of the spherical hole 112 and the spherical surface 3311 gradually decrease from the inside to the outside, so that the spherical hole 112 and the spherical surface 3311 can be hemispherical.

[0074] In this embodiment, the spherical hole 112 is flared, making the opening at the outer end of the spherical hole 112 larger. The shape of the spherical surface 3311 of the drive module 30 matches the shape of the spherical hole 112, allowing the drive module 30 to be directly inserted into the spherical hole 112 from the outside, thus improving the ease of installation. Furthermore, it should be noted that in other embodiments, the cross-section of the spherical hole 112 can be increased and decreased in the direction from the end near the mounting cavity 111 to the end away from the mounting cavity 111, so that the spherical hole 112 and the spherical surface 3311 can form a complete spherical shape. In this case, the carrier 10 can be divided into at least two parts to enclose and form the spherical hole 112, facilitating the placement of a portion of the drive module 30 between the two parts.

[0075] In one embodiment of this application, the drive module 30 includes a motor body 31 and a mounting base 33. The motor body 31 is installed in the spherical hole 112 and partially extends into the mounting cavity 111 and is connected to the galvanometer 20. The mounting base 33 includes a spherical ring 331, which is arranged around the circumference of the motor body 31. The outer side of the spherical ring 331 is provided with a spherical surface 3311.

[0076] The motor body 31 can be cylindrical and serves as the main structure of the drive module 30 to drive the galvanometer 20 to swing. The fixed base 33 can be used to rotate with the support member 10.

[0077] In this embodiment, the drive module 30 is configured to include a motor body 31 and a mounting base 33 including a spherical ring 331, such that the mounting base 33 can be arranged around the motor body 31. This reduces the size of the drive module 30 in its axial direction and improves the ease of installation on the support member 10. Furthermore, it should be noted that in other embodiments, the mounting base 33 may also include a spherical head, and the end of the motor body 31 away from the galvanometer 20 may be connected to this spherical head.

[0078] In one embodiment of this application, the fixing base 33 further includes a fixing plate 334, which is connected to the spherical ring 331 and located outside the support member 10. The fixing plate 334 and the support member 10 are spaced apart on the side through which the spherical hole 112 passes. The fixing plate 334 is provided with a through hole 3340, and the support member 10 is provided with a connecting hole 116 at the position corresponding to the through hole 3340. The galvanometer mechanism 100 further includes an adjusting member 50, which passes through the through hole 3340 and is threadedly connected to the connecting hole 116. The adjusting member 50 and the hole wall of the through hole 3340 are spaced apart.

[0079] In this embodiment, since the adjusting member 50 and the supporting member 10 are threadedly connected by the connecting hole 116, the adjusting member 50 can be rotated to achieve a relatively precise sliding in the axial direction. Meanwhile, the fixing plate 334 and the supporting member 10 are spaced apart, and the through holes 3340 on the adjusting member 50 and the fixing plate 334 are also spaced apart, giving the fixing plate 334 sufficient movement space. This allows the driving module 30 to rotate precisely as the adjusting member 50 slides. Therefore, using the rotating adjusting member 50 to adjust the rotation of the driving module 30 simplifies the position adjustment process of the galvanometer 20 while maintaining high adjustment accuracy. Furthermore, it should be noted that in other embodiments, when the fixing base 33 does not include the fixing plate 334 and is not equipped with the adjusting member 50, the spherical surface 3311 can be clamped and limited by the spherical hole 112, using the damping force between them to limit and fix the driving module 30 after it has rotated to its position.

[0080] In one embodiment of this application, the number of through holes 3340 is at least two, wherein the at least two through holes 3340 are respectively located on both sides of the spherical hole 112 in a first direction, and the first direction intersects the center line direction of the spherical hole 112; the number of connecting holes 116 and adjusting members 50 corresponds to the number of through holes 3340, and each adjusting member 50 is inserted into the corresponding through hole 3340 and threadedly connected to the corresponding connecting hole 116.

[0081] In this embodiment, when the first direction is vertical, adjusting members 50 are provided above and below the spherical hole 112. This allows the driving module 30 to rotate counterclockwise when tightened via the adjusting member 50 above the spherical hole 112, and clockwise when tightened via the adjusting member 50 below the spherical hole 112. This enables bidirectional rotation adjustment of the driving module 30, further improving the convenience of adjusting the position of the galvanometer 20. The number of adjusting members 50 above and below the spherical hole 112 can be the same or different. Furthermore, it should be noted that the first direction can also be horizontal; this application does not limit the specific orientation of the first direction.

[0082] In one embodiment of this application, when only rotational adjustment of the drive module 30 is required in the first direction, the carrier 10 is provided with a limiting part 119 on at least one of the opposite sides of the spherical hole 112 in the second direction, and the second direction intersects the first direction and the center line direction of the spherical hole 112; the fixing plate 334 is provided with a limiting engagement part 3341 corresponding to the position of the limiting part 119, and the limiting engagement part 3341 and the limiting part 119 abut against each other to prevent the drive module 30 from rotating in the second direction.

[0083] When the first direction is up or down as described above, the second direction can be a horizontal direction, such as left or right. Of course, when the first direction is horizontal, the second direction can be up or down.

[0084] In this embodiment, by providing a limiting part 119 and a limiting engagement part 3341 in the second direction, the drive module 30 can only rotate in the first direction, which helps to improve the stability of the rotation adjustment of the drive module 30.

[0085] In one embodiment of this application, the limiting part 119 is a protrusion 1191 provided on the carrier 10, and the limiting mating part 3341 is an opening 3342 provided on the fixing plate 334, with the protrusion 1191 inserted into the opening 3342.

[0086] In this embodiment, the insertion of the protrusion 1191 and the opening 3342 enables the driving module 30 to be limited in the second direction, while improving the compactness of their distribution. Of course, in other embodiments, the limiting mating part 3341 can also be the side surface 3343 of the fixing plate 334 in the second direction, with the protrusion 1191 directly abutting against the side surface 3343 for limiting. This eliminates the need for a limiting structure on the fixing plate 334, thus simplifying the structure. Alternatively, the limiting part 119 can be the opening 3342 provided on the carrier 10, and the limiting mating part 3341 can be the protrusion 1191 provided on the fixing plate 334.

[0087] In one embodiment of this application, to enable rotational adjustment of the drive module 30 in multiple directions, in some embodiments, a plurality of through holes 3340 can be evenly spaced along the circumference of the spherical hole 112. For example, the number of through holes 3340 is at least four, wherein some through holes 3340 are located on both sides of the spherical hole 112 in a first direction, and some through holes 3340 are located on both sides of the spherical hole 112 in a second direction, the second direction intersecting the first direction and the centerline direction of the spherical hole 112. With this arrangement, the drive module 30 can be driven to rotate and adjust in both the first and second directions.

[0088] In one embodiment of this application, the fixing plate 334 is an integral ring structure that surrounds the spherical ring 331 in the circumferential direction. This simplifies the structure of the fixing seat 33 and improves the overall strength of the fixing seat 33. Of course, in other embodiments, the fixing plate 334 may also include at least two sub-plates 3345, which are spaced apart in the circumferential direction of the spherical ring 331, and at least one sub-plate 3345 is provided with a through hole 3340. For example, when adjusting members 50 are provided on both sides of the spherical hole 112 in the first direction as described above, sub-plates 3345 can be provided on both sides of the spherical hole 112 in the first direction, and through holes 3340 can be provided on the sub-plates 3345. In addition, when the fixing plate 334 is provided with a limiting fitting part 3341 as described above, the limiting fitting part 3341 can be provided on some of the sub-plates 3345. For example, as described above, when limiting portions 119 are provided on both sides of the spherical hole 112 in the second direction, sub-plate bodies 3345 can be provided on both sides of the spherical hole 112 in the second direction, and limiting fitting portions 3341 can be provided on the sub-plate bodies 3345. In this case, by setting the fixing plate 334 to have the sub-plate bodies 3345 spaced apart, the raw materials required for manufacturing the fixing plate 334 can be reduced, thereby reducing manufacturing costs.

[0089] In one embodiment of this application, the carrier 10 is further provided with an extension hole 117, which connects the end of the spherical hole 112 away from the mounting cavity 111 and the outside of the carrier 10. In the direction of the center line of the spherical hole 112, the projection of the spherical hole 112 is located inside the extension hole 117. The fixing seat 33 also includes an extension section 335, which is disposed in the extension hole 117 and spaced apart from the hole wall of the extension hole 117. The two ends of the extension section 335 are respectively connected to the spherical ring 331 and the fixing plate 334.

[0090] The centerline of the extension hole 117 may coincide with the centerline of the spherical hole 112 and be located on the side of the spherical hole 112 away from the mounting cavity 111. The extension section 335 may extend along the centerline of the extension hole 117 and connect the spherical ring 331 and the fixing plate 334. The extension section 335 may be a cylindrical structure as described below, or it may be a plate structure.

[0091] In this embodiment, by providing an extension hole 117 on the outside of the spherical hole 112, the spherical hole 112 does not need to form a complete hemisphere, which helps to reduce the volume of the spherical hole 112 and thus reduce the overall size of the fixing seat 33, improving the convenience of installing the fixing seat 33 on the carrier 10.

[0092] In one embodiment of this application, the extension segment 335 is a cylindrical structure and surrounds the motor body 31. In this case, making the extension segment 335 cylindrical facilitates the provision of a mounting position for connecting the fixing plate 334. Especially when the fixing plate 334 is configured as described above, comprising at least two spaced sub-plates 3345, the connection of at least two sub-plates 3345 can be achieved through a single extension segment 335. Simultaneously, this configuration also makes the structure of the fixing base 33 more regular, thereby improving its manufacturing convenience. This also enhances the overall strength of the fixing base 33. Furthermore, to further improve the fit and compactness of the installation between the carrier 10 and the fixing base 33, the projections of the extension hole 117 and the extension segment 335 can be circular in the centerline direction of the extension hole 117. Moreover, the extension segment 335 can be tangent to the spherical ring 331.

[0093] In one embodiment of this application, the end of the spherical ring 331 near the extension section 335 extends into the extension hole 117, so that when the drive module 30 is rotated, it can make as much contact as possible with the wall of the spherical hole 112 through the spherical surface 3311, thereby improving the stability of the rotation adjustment. Similarly, the end of the spherical ring 331 away from the extension section 335 extends into the mounting cavity 111.

[0094] In one embodiment of this application, the fixed base 33 and the motor body 31 are arranged in a separate structure. The galvanometer mechanism 100 further includes a locking member 60, which connects the fixed base 33 and the motor body 31. The bearing member 10 is also provided with a clearance hole 118 that communicates with the extension hole 117. The clearance hole 118 is provided corresponding to the locking member 60.

[0095] In this embodiment, the mounting base 33 and the motor body 31 are designed as separate structures, allowing them to be manufactured separately and then assembled together to form the drive module 30. The structures of the separate mounting base 33 and motor body 31 are relatively simple, thus improving the ease of manufacturing the drive module 30. The support member 10 has a clearance hole 118 corresponding to the locking member 60, which facilitates operation of the locking member 60 to connect or disconnect the mounting base 33 and the motor body 31.

[0096] In one embodiment of this application, the extension section 335 is provided with a locking hole 3351 at the position corresponding to the clearance hole 118. When the extension section 335 is a cylindrical structure as described above, the locking member 60 is threadedly connected to the locking hole 3351 and extends into the extension section 335 to abut against the motor body 31.

[0097] In this embodiment, by using the locking member 60 to abut and limit the motor body 31 through the extension section 335, the connection structure between the fixing base 33 and the motor body 31 is simplified, facilitating assembly and disassembly. Simultaneously, it eliminates the need for a connection structure on the motor body 31, thus protecting the structure of the motor body 31 itself. Furthermore, it should be noted that in other embodiments, the locking member 60 may pass through the locking hole 3351 and be threadedly connected to the motor body 31. Alternatively, when the extension section 335 is a plate structure, the locking member 60 may be an L-shaped clamping member rotatably connected to the motor body 31 and located on one side of the extension section 335. In this case, the locking member 60 can be rotated to clamp the side of the extension section 335 away from the motor body 31, thereby limiting and fixing the fixing base 33 and the motor body 31.

[0098] In one embodiment of this application, when the fixed base 33 and the motor body 31 are arranged in a separate structure, the galvanometer mechanism 100 further includes a second sealing member 70. The second sealing member 70 is disposed between the fixed base 33 and the motor body 31 and is arranged around the circumference of the drive module 30. In this case, the sealing effect on the optical path can be further improved by sealing the space between the fixed base 33 and the motor body 31 through the second sealing member 70. Furthermore, one of the fixed base 33 and the motor body 31 is provided with a second groove 3352. The second groove 3352 is arranged around the circumference of the drive module 30, and the second sealing member 70 is installed in the second groove 3352 to improve the positioning and limiting function of the second groove 3352 on the second sealing member 70, thereby improving the accuracy and stability of the installation of the second sealing member 70. When the fixed base 33 includes a spherical ring 331 and an extension section 335, the second seal 70 can be disposed between the spherical ring 331 and the motor body 31, or it can be disposed between the extension section 335 and the motor body 31.

[0099] In one embodiment of this application, in order to simplify the number of parts, the mounting base 33 and the motor body 31 can also be configured as an integral structure.

[0100] In one embodiment of this application, the galvanometer mechanism 100 further includes a housing 90, with the support member 10 and the drive module 30 disposed within the housing 90. The housing 90 has an exposure hole 91 at the position corresponding to the adjusting member 50. This housing provides isolation and protection for the support member 10 and the drive module 30, while also improving the aesthetics of the galvanometer mechanism 100. The exposure hole 91 allows adjustment of the adjusting member 50 without removing the housing 90, thus improving the convenience of adjustment.

[0101] The above are merely preferred embodiments of the present invention and do not limit the scope of the patent. Any equivalent structural transformations made using the contents of the specification and drawings of the present invention under the inventive concept of the present invention, or direct / indirect applications in other related technical fields, are included within the scope of patent protection of the present invention.

Claims

1. A galvanometer mechanism, characterized in that, include: A carrier, the carrier having a mounting cavity and a spherical hole connecting the mounting cavity and the outside of the carrier; A galvanometer, wherein the galvanometer is disposed within the mounting cavity; A drive module is installed in the spherical hole and partially extends into the mounting cavity and is connected to the galvanometer. The drive module located in the spherical hole has a spherical surface, and the spherical surface and the spherical hole are rotatably engaged. as well as A first sealing element is disposed between the hole wall of the spherical hole and the spherical surface, and is arranged around the circumference of the drive module.

2. The galvanometer mechanism as described in claim 1, characterized in that, The spherical hole is flared in the direction from one end near the mounting cavity to the other end away from the mounting cavity, and the shape of the spherical surface matches the shape of the spherical hole.

3. The galvanometer mechanism as described in claim 2, characterized in that, The drive module includes: The motor body is mounted in the spherical hole and partially extends into the mounting cavity to connect with the galvanometer; and The mounting base includes a spherical ring that is arranged around the circumference of the motor body, and the outer side of the spherical ring has a spherical surface.

4. The galvanometer mechanism as described in claim 3, characterized in that, The fixing base also includes a fixing plate, which is connected to the spherical ring and located outside the support member. The fixing plate and the support member are spaced apart on the side through which the spherical hole passes. The fixing plate is provided with through holes, and the bearing member is provided with connecting holes at the positions corresponding to the through holes; The galvanometer mechanism also includes an adjusting member, which passes through the through hole and is threadedly connected to the connecting hole. The adjusting member and the hole wall of the through hole are spaced apart.

5. The galvanometer mechanism as described in claim 4, characterized in that, The number of through holes is at least two, and the at least two through holes are respectively located on both sides of the spherical hole in a first direction, the first direction intersecting the center line direction of the spherical hole; The number of connecting holes and adjusting members corresponds to the number of through holes. Each adjusting member is inserted into the corresponding through hole and threadedly connected to the corresponding connecting hole.

6. The galvanometer mechanism as described in claim 5, characterized in that, The support member is provided with a limiting portion on at least one of the opposite sides of the spherical hole in the second direction, and the second direction intersects the first direction and the center line direction of the spherical hole; The fixed plate is provided with a limiting engagement part corresponding to the position of the limiting part. The limiting engagement part and the limiting part abut against each other to prevent the drive module from rotating in the second direction.

7. The galvanometer mechanism as described in claim 6, characterized in that, The limiting part is a protrusion provided on the bearing member, the limiting mating part is an opening provided on the fixing plate, and the protrusion is inserted into the opening; Alternatively, the limiting part is a protrusion provided on the bearing member, and the limiting mating part is the side surface of the fixing plate in the second direction, with the protrusion abutting against the side surface.

8. The galvanometer mechanism as described in claim 5, characterized in that, The number of through holes is at least four, with some of the through holes located on both sides of the spherical hole in a first direction, and some of the through holes located on both sides of the spherical hole in a second direction, the second direction intersecting the first direction and the center line direction of the spherical hole.

9. The galvanometer mechanism as described in claim 4, characterized in that, The fixing plate is wrapped around the circumference of the spherical ring to form an integral ring structure; Alternatively, the fixing plate may include at least two sub-plates, which are spaced apart circumferentially along the spherical ring, and at least one of the sub-plates may have the through hole.

10. The galvanometer mechanism as described in any one of claims 4 to 9, characterized in that, The carrier is further provided with an extension hole, which connects the end of the spherical hole away from the mounting cavity and the outside of the carrier. In the direction of the center line of the spherical hole, the projection of the spherical hole is located inside the extension hole. The fixing base also includes an extension section, which is disposed in the extension hole and spaced apart from the hole wall of the extension hole. The two ends of the extension section are respectively connected to the spherical ring and the fixing plate.

11. The galvanometer mechanism as described in claim 10, characterized in that, The extension section is a cylindrical structure and surrounds the motor body; And / or, one end of the spherical ring near the extension section extends into the extension hole; And / or, the end of the spherical ring away from the extension section extends into the mounting cavity.

12. The galvanometer mechanism as described in claim 10, characterized in that, The fixed base and the motor body are arranged in a separate structure. The galvanometer mechanism also includes a locking member, which connects the fixed base and the motor body. The support member is also provided with a clearance hole that communicates with the extension hole, and the clearance hole is provided corresponding to the locking member.

13. The galvanometer mechanism as described in claim 12, characterized in that, The extension section is provided with a locking hole at the position corresponding to the clearance hole. The locking member passes through the locking hole and is threadedly connected to the motor body. Alternatively, the extension section is a cylindrical structure and surrounds the motor body, with the locking member and the locking hole threadedly connected and extending into the extension section to abut against the motor body.

14. The galvanometer mechanism as described in any one of claims 4 to 9, characterized in that, The galvanometer mechanism also includes a housing, in which the support member and the drive module are disposed. The housing has an exposure hole at the position corresponding to the adjustment member.

15. The galvanometer mechanism as described in claim 3, characterized in that, The mounting base and the motor body are configured as separate units; Alternatively, the mounting base and the motor body can be configured as a single unit.

16. The galvanometer mechanism as described in claim 15, characterized in that, When the fixed base and the motor body are arranged in a separate structure, the galvanometer mechanism further includes a second sealing member, which is disposed between the fixed base and the motor body and is arranged around the circumference of the drive module.

17. The galvanometer mechanism as described in claim 16, characterized in that, One of the mounting base and the motor body is provided with a second groove, the second groove is arranged around the circumference of the drive module, and the second seal is installed in the second groove.

18. The galvanometer mechanism as described in any one of claims 1 to 9, characterized in that, One of the spherical hole wall and the spherical surface is provided with a first groove, the first groove is arranged around the circumference of the drive module, and the first seal is installed in the first groove.

19. A laser processing apparatus, characterized in that, The device includes a laser, a galvanometer mechanism as described in any one of claims 1 to 18, and a focusing lens, wherein the galvanometer in the galvanometer mechanism is configured to reflect laser light emitted by the laser to the focusing lens.

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