High-precision robot titanium alloy component and machining process thereof

Abstract

The application discloses a high-precision robot titanium alloy part and a machining process thereof, relates to the field of metal processing, and selects a blank, and special machining and machining are performed on the blank by adopting five-axis machining according to a preset scheme to obtain a semi-finished product; wherein the machining is segmented machining, and the machining comprises primary machining, secondary machining and final machining which are sequentially performed; the secondary machining comprises low-temperature cutting machining, face milling and spiral feeding path machining; the final machining comprises at least one of electrolytic machining and grinding machining; post-processing is performed on the semi-finished product to obtain the high-precision robot titanium alloy part; the post-processing comprises shot blasting treatment, ion implantation treatment and surface coating treatment. The application provides a high-precision robot titanium alloy part and a machining process thereof, and effectively solves the problems of low precision, insufficient strength and unstable surface quality of titanium alloy parts in a traditional machining process by means of a multi-stage process of special machining, machining and post-processing.

Description

Technical Field

[0001] This invention relates to the field of metal processing, and in particular to a high-precision robot titanium alloy component and its processing technology. Background Technology

[0002] Titanium alloys are widely used in high-end manufacturing fields such as aerospace, automotive, and robotics due to their excellent high strength, low density, corrosion resistance, and good fatigue strength. Titanium alloys are particularly important in the design and manufacture of robot components because they effectively meet the requirements for high strength, lightweight, high temperature resistance, and wear resistance. Especially in critical components such as robot joints and structural parts, the application of titanium alloys can reduce overall weight while ensuring component strength and rigidity, thereby improving the dynamic response capability and working efficiency of the robot system. Furthermore, the excellent corrosion resistance and oxidation resistance of titanium alloys make it possible for robots to operate stably for extended periods in harsh environments.

[0003] In existing titanium alloy machining technologies, the material properties of titanium alloys present challenges such as low precision, low strength, and unstable surface quality. Due to the unique material properties of titanium alloys, a series of machining difficulties are frequently encountered. Titanium alloys, such as TC4 and Ti-6Al-4V, have low thermal conductivity, resulting in ineffective heat dissipation during cutting, causing heat accumulation and leading to easy tool wear. Furthermore, titanium alloys have high chemical reactivity, especially at high temperatures, easily reacting with tool materials, increasing tool wear and damage, thus affecting machining efficiency and accuracy. Another significant characteristic is the low elastic modulus of titanium alloys, making tool springback prone to occur during machining, resulting in rough surfaces and affecting the precision and finish of the parts. Moreover, titanium alloys exhibit a strong tendency for work hardening during machining; even slight errors in cutting parameters can lead to surface quality deterioration, or even cracks or other defects in the workpiece.

[0004] Therefore, a high-precision robot titanium alloy component and its processing technology are proposed to solve the problems of low precision, low strength and unstable surface quality. Summary of the Invention

[0005] The purpose of this invention is to provide a high-precision robot titanium alloy component and its processing technology, solving the problems of low precision, low strength and unstable surface quality.

[0006] To achieve this objective, the present invention adopts the following technical solution: A machining process for high-precision titanium alloy parts for robots, the machining process comprising the following steps: Step S1: Select the titanium alloy billet and perform special machining and processing on the titanium alloy billet using five-axis machining according to the preset plan to obtain a semi-finished product; wherein, the machining is segmented machining, which includes primary machining, secondary machining and final machining in sequence; In the initial machining, a five-axis machining center is used to cut the titanium alloy billet, leaving a machining allowance of 0.5-1mm; after cutting, the resulting workpiece is annealed to obtain the part to be processed again. In the reprocessing, a low-temperature cutting method is used to process the workpiece. During the cutting process, oil mist coolant is used to cool the cutting area. The machining path includes climb milling path and helical feed path, and a machining allowance of 0.03-0.05mm is retained to obtain the final workpiece. In the final processing, the curved surfaces, shaft structures, and hole structures of the workpiece to be processed are processed; the curved surfaces are processed by five-axis milling and electrolytic machining in sequence, and the shaft structures and hole structures are processed by grinding and planetary roller screw grinding in sequence to obtain semi-finished products; Step S2: Post-processing of the semi-finished product, which includes shot peening, nitrogen ion implantation, ALD atomic layer deposition, and aging treatment. Among them, ALD atomic layer deposition forms a titanium nitride coating on the surface of the semi-finished product. After the treatment is completed, a high-precision robot titanium alloy part is obtained.

[0007] The special processing is additive composite processing or secondary processing; the preset scheme is the first scheme or the second scheme.

[0008] When processing the billet according to the first scheme, a near-net-shape material is first formed on the billet through additive composite treatment to obtain a composite material. Then, the composite material is processed in sequence through primary processing, secondary processing and final processing to obtain a semi-finished product. The composite material is obtained according to the following steps: Molding powder is laid on the corresponding position on the blank, and the powder is scanned and melted layer by layer by laser to build the component layer by layer. When each layer of molten molding powder cools and solidifies, a near-net-shape material is formed on the blank, resulting in a composite material.

[0009] When processing the billet according to the second scheme, the billet is first processed in sequence through initial processing, secondary processing and final processing to obtain intermediate material, and then the intermediate material is processed a second time to obtain semi-finished product; The secondary processing includes at least one of drilling, laser processing, and electrolytic processing. The drilling process uses an internally cooled drill bit to drill the intermediate material, with a straightness of ≤0.004mm / m and a coolant pressure of 20MPa inside the drill bit; The laser processing uses a femtosecond laser to process the intermediate material to form holes with a diameter of 0.3±0.01mm; The electrolytic treatment uses an electrolyte to process the intermediate material to form pores with a diameter of 0.3±0.01mm.

[0010] When processing the billet according to the first scheme, in the initial processing, the machine tool cuts the composite material at a cutting speed of 1500-2000 rpm, a feed rate of 0.03-0.08 mm / r, and a cutting depth of 0.1-0.15 mm, leaving a machining allowance of 0.5-1 mm. During the cutting process, a water-soluble cutting fluid with a pressure of ≥20 MPa and a temperature of ≤30℃ is sprayed to cool the cutting area, resulting in composite material a. After cutting, composite material a is annealed at a temperature of 550-600℃ for 1.5-2 hours and cooled in the furnace, and then annealed at a temperature of 580-620℃ for 1.5-2 hours and cooled in the furnace to obtain composite material b.

[0011] When processing the blank according to the first scheme, in the second processing, the machine tool cuts the composite material b at a cutting speed of 60-80 m / min, a feed rate of 0.0008-0.0015 mm / r, and a depth of cut of 0.002-0.005 mm, and cuts the composite material b according to climb milling and helical feed paths, leaving a machining allowance of 0.03-0.05 mm; during the cutting process, the cutting area of ​​the composite material b is cooled with oil mist coolant at -20℃. After the cutting is completed, the composite material c is obtained.

[0012] When the blank is processed according to the first scheme, in the final processing, after forming curved surfaces and shafts and holes with Ra≤0.05μm on the composite material c, a semi-finished product is obtained; In forming the curved surface, the composite material c is first machined using a five-axis milling machining center at a cutting speed of 70-100 m / min, a feed rate of 0.001-0.003 mm / r, and a depth of cut of 0.002-0.005 mm. Then, an electrolytic composite machining system is used with an electrolyte of 15% NaCl aqueous solution, a voltage of 20V, and a feed rate of 0.3 mm / min. When forming shafts and holes, a cubic boron nitride grinding wheel is used to grind the outer diameter or inner hole of the composite material c at a speed of 8000-12000 r / min, followed by planetary roller screw grinding.

[0013] When processing the billet according to the second scheme, in the initial processing, the machine tool cuts the billet at a cutting speed of 1500-2000 rpm, a feed rate of 0.03-0.08 mm / r, and a cutting depth of 0.1-0.15 mm, leaving a machining allowance of 0.5-1 mm. During the cutting process, water-soluble cutting fluid with a pressure of ≥20 MPa and a temperature of ≤30℃ is sprayed to cool the cutting area, resulting in billet a. After cutting, billet a is annealed at a temperature of 550-600℃ for 1.5-2 hours and cooled in the furnace, and then annealed at a temperature of 580-620℃ for 1.5-2 hours and cooled in the furnace, resulting in billet b.

[0014] When processing the blank according to the second scheme, in the second processing, the machine tool cuts the blank b at a cutting speed of 60-80 m / min, a feed rate of 0.0008-0.0015 mm / r, and a cutting depth of 0.002-0.005 mm, and cuts the blank b according to climb milling and helical feed paths, leaving a machining allowance of 0.03-0.05 mm; during the cutting process, the cutting area of ​​the blank b is cooled with oil mist coolant at -20℃. After the cutting is completed, blank c is obtained.

[0015] When the blank is processed according to the second scheme, in the final processing, after forming curved surfaces and shafts and holes with Ra≤0.05μm on the blank c, a semi-finished product is obtained; In forming the curved surface, the blank c is first machined using a five-axis milling machining center at a cutting speed of 70-100 m / min, a feed rate of 0.001-0.003 mm / r, and a depth of cut of 0.002-0.005 mm. Then, an electrolytic composite machining system is used with an electrolyte of 15% NaCl aqueous solution, a voltage of 20V, and a feed rate of 0.3 mm / min. When forming shafts and holes, a cubic boron nitride grinding wheel is used to grind the outer diameter or inner hole on the blank c at a speed of 8000-12000 r / min, followed by planetary roller screw grinding.

[0016] The high-precision robot titanium alloy component is obtained according to the following steps: First, the semi-finished product is placed in a shot blasting machine, where metal particles are used to blast the surface of the semi-finished product. Then, the semi-finished product is placed in an ion implantation device and implanted with a nitrogen ion source. Next, the semi-finished product is placed in an ALD device for atomic layer deposition, which forms a titanium nitride coating with a thickness of 90-110 nm on the semi-finished product. Finally, the semi-finished product is subjected to aging treatment at a temperature of 130-170℃ for 1.5-2.5 hours. After the treatment is completed, a high-precision robot titanium alloy part is obtained.

[0017] A high-precision robot titanium alloy component is manufactured using the processing technology described above.

[0018] Compared with the prior art, the present invention has the following beneficial effects: This invention provides a high-precision titanium alloy component for robots and its processing technology. Through a multi-stage process involving special machining, machining, and post-processing, it effectively solves the common problems of low precision, insufficient strength, and unstable surface quality in traditional machining of titanium alloy components. First, a special machining step pre-processes the titanium alloy material to ensure its shape and dimensions closely approximate design requirements, leaving appropriate allowances for subsequent fine machining. Next, a segmented machining stage uses a five-axis machining center for precision cutting to gradually remove excess material, further optimizing the component's dimensions and surface quality, ensuring machining accuracy meets design requirements. Finally, post-processing steps, including appropriate heat treatment and surface strengthening, ensure that the titanium alloy component achieves high standards in terms of mechanical properties and surface quality. This process not only improves the processing efficiency of titanium alloy components but also solves problems such as tool wear, heat accumulation, and surface roughness in traditional machining methods, significantly improving the performance and stability of the component, making it suitable for the production of high-precision titanium alloy components for robots. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] The structures, proportions, sizes, etc., shown in the accompanying drawings of this specification are only for the purpose of assisting those skilled in the art in understanding and reading the content disclosed in the specification, and are not intended to limit the conditions under which the present invention can be implemented. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in the proportions, or adjustments to the size, without affecting the effects and objectives that the present invention can produce, should still fall within the scope of the technical content disclosed in the present invention.

[0021] Figure 1 This is a flowchart of the processing technology in this invention; Figure 2 This is a flowchart of the first solution in the present invention; Figure 3 This is a flowchart of the second scheme in the present invention. Detailed Implementation

[0022] To make the objectives, features, and advantages of this invention more apparent and understandable, the technical solutions of the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the embodiments described below are only some embodiments of this invention, and not all embodiments. Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this invention.

[0023] In the description of this invention, it should be understood that the terms "upper," "lower," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. It should be noted that when a component is considered to be "connected" to another component, it can be directly connected to the other component or there may be a component positioned centrally in the connection.

[0024] Please see Figures 1-3 This embodiment describes a high-precision machining process for a titanium alloy robot component, the process comprising the following steps: Step S1: Select the titanium alloy billet and perform special machining and processing on the titanium alloy billet using five-axis machining according to the preset plan to obtain a semi-finished product; wherein, the machining is segmented machining, which includes primary machining, secondary machining and final machining in sequence; In the initial machining, a five-axis machining center is used to cut the titanium alloy billet, leaving a machining allowance of 0.5-1mm; after cutting, the resulting workpiece is annealed to obtain the part to be processed again. In the reprocessing, a low-temperature cutting method is used to process the workpiece. During the cutting process, oil mist coolant is used to cool the cutting area. The machining path includes climb milling path and helical feed path, and a machining allowance of 0.03-0.05mm is retained to obtain the final workpiece. In the final processing, the curved surfaces, shaft structures, and hole structures of the workpiece to be processed are processed; the curved surfaces are processed by five-axis milling and electrolytic machining in sequence, and the shaft structures and hole structures are processed by grinding and planetary roller screw grinding in sequence to obtain semi-finished products; Step S2: Post-processing of the semi-finished product, which includes shot peening, nitrogen ion implantation, ALD atomic layer deposition, and aging treatment. Among them, ALD atomic layer deposition forms a titanium nitride coating on the surface of the semi-finished product. After the treatment is completed, a high-precision robot titanium alloy part is obtained.

[0025] Specifically, a titanium alloy billet is selected, and according to the preset plan, a five-axis machining process is used to perform special machining and processing on the titanium alloy billet to obtain a semi-finished product; among which, the machining is segmented machining, which includes primary machining, secondary machining and final machining in sequence; In the initial machining, a five-axis machining center is used to cut the titanium alloy billet, leaving a machining allowance of 0.5-1mm; after cutting, the resulting workpiece is annealed to obtain the part to be processed again. In the reprocessing, a low-temperature cutting method is used to process the workpiece. During the cutting process, oil mist coolant is used to cool the cutting area. The machining path includes climb milling path and helical feed path, and a machining allowance of 0.03-0.05mm is retained to obtain the final workpiece. In the final processing, the curved surfaces, shaft structures, and hole structures of the workpiece to be processed are processed; the curved surfaces are processed by five-axis milling and electrolytic machining in sequence, and the shaft structures and hole structures are processed by grinding and planetary roller screw grinding in sequence to obtain semi-finished products; The special processing is additive composite processing or secondary processing; the preset scheme is the first scheme or the second scheme.

[0026] When processing the billet according to the first scheme, a near-net-shape material is first formed on the billet through additive composite processing (in the additive composite processing, the titanium alloy material is gradually constructed into a part close to the target shape through the process of laser layer-by-layer scanning and melting powder, forming a part close to the final product shape on the billet, a near-net-shape material), to obtain a composite material, and then the composite material is processed in sequence through initial processing, secondary processing and final processing to obtain a semi-finished product; The composite material is obtained according to the following steps: Molding powder is laid on the corresponding position on the blank, and the powder is scanned and melted layer by layer by laser to build the component layer by layer. When each layer of molten molding powder cools and solidifies, a near-net-shape material is formed on the blank, resulting in a composite material.

[0027] When processing the billet according to the first scheme, in the initial processing, the machine tool cuts the composite material at a cutting speed of 1500-2000 rpm, a feed rate of 0.03-0.08 mm / r, and a cutting depth of 0.1-0.15 mm, leaving a machining allowance of 0.5-1 mm. During the cutting process, a water-soluble cutting fluid with a pressure of ≥20 MPa and a temperature of ≤30℃ is sprayed to cool the cutting area, resulting in composite material a. After cutting, composite material a is annealed at a temperature of 550-600℃ for 1.5-2 hours and cooled in the furnace, and then annealed at a temperature of 580-620℃ for 1.5-2 hours and cooled in the furnace to obtain composite material b.

[0028] Preferably, when processing the billet according to the first scheme, in the initial processing, the machine tool cuts the composite material at a cutting speed of 1800 rpm, a feed rate of 0.05 mm / r, and a cutting depth of 0.13 mm, while retaining a machining allowance of 0.8 mm; during the cutting process, a water-soluble cutting fluid with a pressure ≥20 MPa and a temperature ≤30℃ is sprayed to cool the cutting area, resulting in composite material a; after cutting, the obtained composite material a is annealed at a temperature of 600℃ for 2 hours and cooled in the furnace, and then the obtained composite material a is annealed at a temperature of 580℃ for 2 hours and cooled in the furnace, resulting in composite material b.

[0029] When processing the blank according to the first scheme, in the second processing, the machine tool cuts the composite material b at a cutting speed of 60-80 m / min, a feed rate of 0.0008-0.0015 mm / r, and a depth of cut of 0.002-0.005 mm, and cuts the composite material b according to climb milling and helical feed paths, leaving a machining allowance of 0.03-0.05 mm; during the cutting process, the cutting area of ​​the composite material b is cooled with oil mist coolant at -20℃. After the cutting is completed, the composite material c is obtained.

[0030] Preferably, when processing the blank according to the first scheme, in the subsequent processing, the machine tool cuts the composite material b at a cutting speed of 70 m / min, a feed rate of 0.0011 mm / r, and a cutting depth of 0.003 mm, and follows climb milling and helical feed paths, while retaining a machining allowance of 0.04 mm; during the cutting process, an oil mist coolant at -20°C is used to cool the cutting area of ​​the composite material b, and after the cutting is completed, the composite material c is obtained.

[0031] When the blank is processed according to the first scheme, in the final processing, after forming curved surfaces and shafts and holes with Ra≤0.05μm on the composite material c, a semi-finished product is obtained; In forming the curved surface, the composite material c is first machined using a five-axis milling machining center at a cutting speed of 70-100 m / min, a feed rate of 0.001-0.003 mm / r, and a depth of cut of 0.002-0.005 mm. Then, an electrolytic composite machining system is used with an electrolyte of 15% NaCl aqueous solution, a voltage of 20V, and a feed rate of 0.3 mm / min. When forming shafts and holes, a cubic boron nitride grinding wheel is used to grind the outer diameter or inner hole of the composite material c at a speed of 8000-12000 r / min, followed by planetary roller screw grinding.

[0032] Preferably, when processing the blank according to the first scheme, in the final processing, after forming curved surfaces and shafts and holes with Ra≤0.05μm on the composite material c, a semi-finished product is obtained; In forming the curved surface, the composite material c is first machined using a five-axis milling machining center at a cutting speed of 85 m / min, a feed rate of 0.002 mm / r, and a cutting depth of 0.003 mm. Then, an electrolytic composite machining system is used with an electrolyte of 15% NaCl aqueous solution, a voltage of 20 V, and a feed rate of 0.3 mm / min. When forming shafts and holes, a cubic boron nitride grinding wheel is used to grind the outer diameter or inner hole of the composite material c at a speed of 10,000 r / min, followed by planetary roller screw grinding.

[0033] In the machining of high-precision titanium alloy components for robots, additive manufacturing is a key step in addressing the precision, strength, and surface quality challenges posed by the properties of titanium alloys. This process uses lasers to precisely control the melting and solidification of powder, ensuring the uniformity and bonding of each layer of material, thus laying a solid foundation for subsequent high-precision machining.

[0034] In additive manufacturing, by adding material layer by layer, near-final shapes can be directly created on the blank, reducing unnecessary material removal. This not only improves processing efficiency but also ensures the accuracy of the shape and dimensions of parts in complex structures, making it particularly suitable for complex geometries. Because the composite material is close to the net shape, subsequent machining no longer requires extensive material removal, thus reducing processing time and tool wear. Furthermore, additive manufacturing technology can directly form the desired internal structures on titanium alloy parts, improving the strength and overall performance of the parts and creating a more ideal material basis for subsequent precision machining.

[0035] Regarding the material properties of titanium alloys, additive manufacturing technology effectively avoids high-temperature reactions in titanium alloys by precisely controlling the melting process, reducing tool wear and ensuring a longer service life. Most importantly, the low elastic modulus of titanium alloys easily leads to springback and deformation in traditional machining, affecting the surface quality and machining accuracy of parts. Additive manufacturing allows for the direct construction of materials close to their final shape, reducing deformation and accuracy deviations in subsequent machining and ensuring the requirements for high precision and high strength. Furthermore, additive manufacturing not only effectively controls the material addition process but also significantly reduces subsequent machining while maintaining structural accuracy, mitigating the machining problems caused by cutting heat and cut hardening in traditional titanium alloy machining. Therefore, additive manufacturing provides the necessary high-quality material foundation for subsequent machining, making subsequent precision machining more efficient and accurate.

[0036] The complex geometry and internal structure of high-precision robotic titanium alloy parts often make it difficult to achieve high-precision forming using traditional machining methods, especially when dealing with thin walls, complex holes, or intricate structures (i.e., the first approach). Traditional methods often lead to material waste and inconsistent machining accuracy. Additive composite processing can directly construct near-net-shape materials on blanks, significantly reducing material waste and laying the foundation for subsequent precision machining.

[0037] In traditional machining processes, the complex geometries and porous structures of titanium alloys often require repeated cutting and adjustments, which not only increases material waste but also makes it difficult to fully control the precision of the final shape. In contrast, additive manufacturing can build parts layer by layer, thereby reducing material waste, avoiding repeated corrections in the machining of complex shapes, and enabling greater control over the quality and precision of each layer of material.

[0038] Traditional machining techniques, especially cutting and grinding, while capable of achieving shape accuracy requirements, are limited by the unique physical and chemical properties of titanium alloys. Specifically, the low thermal conductivity of titanium alloys hinders heat dissipation during cutting, leading to rapid tool wear; its high chemical reactivity makes the material and tool prone to reaction, resulting in compromised machining accuracy. Furthermore, the low elastic modulus of titanium alloys makes them prone to springback, affecting dimensional control during machining.

[0039] In the first approach described above, additive manufacturing allows titanium alloy parts to directly achieve near-net-shape material, reducing the amount of material removed in traditional machining and significantly simplifying subsequent finishing. Additive manufacturing enables more precise and efficient machining. Machining only requires fine adjustments to the additively manufactured part to ensure final dimensions and surface quality, thus avoiding the instability or surface roughness that can occur in traditional machining.

[0040] It should be noted that the equipment and specific methods used in the additive composite process are technical means well known to those skilled in the art, and will not be described in detail in this embodiment.

[0041] The initial machining stage primarily removes most of the excess material, leaving appropriate machining allowance for subsequent processes. This step uses a five-axis milling machine for roughing, ensuring efficient material removal through set cutting speeds, feed rates, and depths of cut, while avoiding excessive heat buildup that could affect the part's accuracy. Next, a second machining stage further releases stress, corrects deformation, and prepares the material for finishing. In this second machining stage, the machine tool's cutting speed, feed rate, and depth of cut are more precisely controlled to maintain higher machining accuracy while reducing material. The final machining stage uses a five-axis machining center for precision cutting, ensuring the titanium alloy part meets stringent dimensional and surface quality requirements. At this stage, the use of precision tools and high-pressure coolant ensures a smooth surface finish and effectively prevents work hardening or other surface defects.

[0042] Machining, through progressive material reduction and refined processing, enables titanium alloy components to ultimately achieve the required dimensions and surface quality. The initial machining stage removes most of the material through roughing, maintaining processing efficiency while leaving a uniform allowance for subsequent machining, ensuring machining accuracy. The second machining stage further improves the surface quality and dimensional accuracy of the machined parts, while releasing internal stresses generated in the initial machining, preventing deformation caused by uneven stress. The final machining stage uses high-precision equipment and precise cutting parameters to achieve the required accuracy and surface finish, ensuring the surface roughness and dimensional tolerances of high-precision components. This phased machining process effectively avoids the inefficiencies or inconsistent accuracy problems associated with traditional single-stage machining methods. Strict control of cutting parameters at each stage ensures the seamless integration of each step, resulting in stable and stringent final machining accuracy and surface quality.

[0043] The initial roughing process quickly removes excess material, avoiding material waste and tool wear caused by over-machining. It also effectively reduces heat buildup during titanium alloy machining, lowering the risk of tool wear. Simultaneously, controlling the cutting speed and feed rate during the initial machining process prevents work hardening of the titanium alloy. The second machining stage uses precise cutting operations to correct any minor deformations that may have occurred during the initial machining and further releases residual stress, preventing dimensional instability caused by internal stress. The final machining stage precisely controls the surface quality and final dimensions of the titanium alloy part, solving the problems of tool wear, excessive surface roughness, and insufficient precision inherent in traditional methods.

[0044] In the initial machining, a cutting speed of 1500-2000 rpm ensures that the tool can effectively remove material during the cutting process, while avoiding excessive temperature accumulation. This reduces the thermal impact on the titanium alloy and prevents rapid tool wear. A feed rate of 0.03-0.08 mm / r ensures the removal speed while controlling the tool load, avoiding heat accumulation caused by vibration or excessive friction during machining. A depth of cut of 0.1-0.15 mm enables rapid material removal while avoiding work hardening caused by excessive cutting. Spraying a water-soluble cutting fluid with a pressure ≥20 MPa and a temperature ≤30℃ can more effectively remove heat, clean chips, and lubricate the tool, reducing tool wear and improving machining efficiency and accuracy. The cutting area is cooled to obtain composite material a. After cutting, composite material a is annealed at 550-600℃ for 1.5-2 hours and cooled in the furnace, and then annealed at 580-620℃ for 1.5-2 hours and cooled in the furnace to obtain composite material b.

[0045] The first annealing temperature during initial machining is 550-600℃, which effectively eliminates some of the internal stress generated during the initial machining process. The second annealing temperature is 580-620℃, which aims to further release the internal stress generated during the initial machining and material cooling process before subsequent machining, thereby avoiding dimensional deformation and accuracy problems caused by incomplete stress release in subsequent machining. This effectively solves the common problems of dimensional instability and low machining accuracy in titanium alloy machining, especially in complex structures and high-precision components.

[0046] In the subsequent machining, a cutting speed of 60-80 m / min improved material removal efficiency while ensuring good surface quality; a feed rate of 0.0008-0.0015 mm / r controlled the tool load during the cutting process, avoiding uneven surfaces; a depth of cut of 0.002-0.005 mm allowed for precise material removal, reducing the risk of work hardening; and an oil mist coolant at -20°C cooled the cutting area, further reducing the heat impact and inhibiting work hardening of the titanium alloy, maintaining high surface quality. Furthermore, the oil mist coolant's good lubrication properties effectively reduced friction and tool wear, more effectively removing heat from the cutting area and lowering local temperatures. Especially in fine machining processes with shallow depths of cut and low feed rates, it better maintained the stability of the titanium alloy surface quality, preventing surface oxidation and work hardening caused by excessive temperatures.

[0047] In the final machining process, a five-axis milling machining center ensures high-precision machining of complex curved surfaces. Five-axis milling can perform cutting at multiple angles simultaneously, making it suitable for machining complex geometries and guaranteeing the accuracy and surface quality of the machined surfaces. Cutting speeds of 70-100 m / min, feed rates of 0.001-0.003 mm / r, and depths of cut of 0.002-0.005 mm ensure machining accuracy while avoiding excessive cutting forces and heat buildup, thus protecting the titanium alloy surface from damage. After five-axis milling, an electrolytic composite machining system is used with a 15% NaCl aqueous solution for further machining. This process uses 20V voltage and a feed rate of 0.3 mm / min for fine machining, further improving the accuracy and surface finish of the curved surfaces, ensuring a stress-free and tool-mark-free surface, and achieving the required high-quality standards.

[0048] For machining shafts and holes, cubic boron nitride (CBN) grinding wheels are used for external cylindrical grinding or internal hole grinding. CBN grinding wheels possess excellent hardness and wear resistance, ensuring a long service life in high-hardness materials such as titanium alloys and providing very high surface finish. Grinding speeds of 8000-12000 rpm effectively remove material and provide a smooth surface, ensuring a surface roughness control of Ra≤0.05μm. Simultaneously, in conjunction with planetary roller screw-specific grinding, suitable for precision thread and hole machining, it ensures hole accuracy of ±0.001mm and maintains a tooth profile accuracy of grade 4, ensuring the high precision requirements of hole machining.

[0049] Through these different processing methods, the final machining process ensures the precise manufacture of complex component structures, achieving stringent requirements for surface quality and dimensional control. Grinding of shafts and holes utilizes cubic boron nitride grinding wheels and planetary roller screws to guarantee high precision for both. Machining of curved surfaces employs a combination of five-axis milling and an electrolytic composite machining system, ensuring that the complex curved surfaces of titanium alloy components achieve the required precision and surface quality. This combination not only improves processing efficiency but also ensures high precision, high strength, and excellent surface quality for the components.

[0050] It should be noted that the equipment and usage methods used in the first solution are all technical means well known to those skilled in the art, and will not be described in detail in this embodiment.

[0051] When processing the billet according to the second scheme, the billet is first processed in sequence through initial processing, secondary processing and final processing to obtain intermediate material, and then the intermediate material is processed a second time to obtain semi-finished product; The secondary processing includes at least one of drilling, laser processing, and electrolytic processing. The drilling process uses an internally cooled drill bit to drill the intermediate material, with a straightness of ≤0.004mm / m and a coolant pressure of 20MPa inside the drill bit; The laser processing uses a femtosecond laser to process the intermediate material to form a hole with a diameter of 0.3 ± 0.01 mm; preferably, the laser processing uses a femtosecond laser to process the intermediate material to form a hole with a diameter of 0.3 mm. The electrolytic treatment uses an electrolyte to process the intermediate material to form pores with a diameter of 0.3 ± 0.01 mm. Preferably, the electrolytic treatment uses an electrolyte to process the intermediate material to form pores with a diameter of 0.3 mm.

[0052] When processing the billet according to the second scheme, in the initial processing, the machine tool cuts the billet at a cutting speed of 1500-2000 rpm, a feed rate of 0.03-0.08 mm / r, and a cutting depth of 0.1-0.15 mm, leaving a machining allowance of 0.5-1 mm. During the cutting process, water-soluble cutting fluid with a pressure of ≥20 MPa and a temperature of ≤30℃ is sprayed to cool the cutting area, resulting in billet a. After cutting, billet a is annealed at a temperature of 550-600℃ for 1.5-2 hours and cooled in the furnace, and then annealed at a temperature of 580-620℃ for 1.5-2 hours and cooled in the furnace, resulting in billet b.

[0053] When processing the blank according to the second scheme, in the second processing, the machine tool cuts the blank b at a cutting speed of 60-80 m / min, a feed rate of 0.0008-0.0015 mm / r, and a cutting depth of 0.002-0.005 mm, and cuts the blank b according to climb milling and helical feed paths, leaving a machining allowance of 0.03-0.05 mm; during the cutting process, the cutting area of ​​the blank b is cooled with oil mist coolant at -20℃. After the cutting is completed, blank c is obtained.

[0054] When the blank is processed according to the second scheme, in the final processing, after forming curved surfaces and shafts and holes with Ra≤0.05μm on the blank c, a semi-finished product is obtained; In forming the curved surface, the blank c is first machined using a five-axis milling machining center at a cutting speed of 70-100 m / min, a feed rate of 0.001-0.003 mm / r, and a depth of cut of 0.002-0.005 mm. Then, an electrolytic composite machining system is used with an electrolyte of 15% NaCl aqueous solution, a voltage of 20V, and a feed rate of 0.3 mm / min. When forming shafts and holes, a cubic boron nitride grinding wheel is used to grind the outer diameter or inner hole on the blank c at a speed of 8000-12000 r / min, followed by planetary roller screw grinding.

[0055] It should be noted that the machining process in the second scheme is the same as that in the second scheme, and will not be described in detail in this implementation.

[0056] In the second approach, after the blank is machined, the focus is on further adjustments to hole diameter accuracy, surface quality, and some complex details. For example, while the final machining has completed the overall shape and surface finishing, some small hole diameters or surface defects may still exist. At this point, secondary machining steps, such as drilling, laser processing, or electrolytic treatment, can further refine the hole diameter accuracy and optimize the surface finish to meet design requirements. Secondary machining allows for fine-tuning and correction of the completed part, ensuring it achieves optimal technical performance.

[0057] Through drilling, laser processing, or electrolytic processing, hole diameter accuracy can be improved to the micrometer level, enabling precise control of hole size and shape. This solves the problem of insufficient hole diameter accuracy in traditional machining, thus improving hole diameter precision. Electrolytic processing and laser processing can further enhance surface finish, remove tool marks and stress, ensure a high-quality surface in the final product, reduce the impact of surface defects on component performance, and improve surface finish.

[0058] During drilling, the internally cooled drill bit, in conjunction with coolant, provides efficient cooling during the cutting process, reducing thermal damage to the material surface caused by excessive temperature. This ensures the stability and reliability of titanium alloy components in high-precision hole machining. At the same time, drilling can efficiently remove material without generating excessive cutting forces, effectively adapting to titanium alloys. Furthermore, the drilling process ensures that the hole diameter error is controlled within ±0.003mm, and the straightness can reach ≤0.004mm / m, thereby ensuring that the hole dimensions meet the accuracy requirements.

[0059] Laser processing utilizes a concentrated, high-energy laser beam to directly process the surface of titanium alloy materials, avoiding direct contact with the tool material and thus preventing tool wear and precision loss caused by chemical reactions. Laser processing can precisely melt and evaporate small defects and imperfections on the titanium alloy surface, significantly improving surface roughness to achieve Ra≤0.05μm. Furthermore, the laser allows for precise energy concentration, enabling fine-diameter machining with apertures controlled within 0.3±0.01mm, ensuring high precision.

[0060] Electrolytic treatment removes surface inhomogeneities and improves surface finish of titanium alloys through electrochemical reactions, further refining surface quality and removing residual tool marks and stress generated during processing. It is particularly suitable for precision machining of small holes and complex structures. Electrolytic treatment not only improves surface finish but also optimizes details without altering the overall material structure. By conducting current through an electrolyte, electrolytic treatment removes surface irregularities; this non-contact processing avoids the mechanical stress on the material, ensuring no surface deformation.

[0061] More specifically, step S1 further includes the following steps: Step S11: Perform ultrasonic testing on the titanium alloy material, select undamaged titanium alloy material, and then press the titanium alloy material to obtain a rod. In step S11, the titanium alloy material is any one of TC4, TC4ELI, and TA15 (TC4, TC4ELI, and TA15 are grades of titanium alloys), and the grain size of the rod is ≤5μm. Step S12: Heat the bar stock to 500-540℃ in a vacuum environment and maintain it for 4-6 hours, then perform an aging treatment. After the aging treatment, anneal the bar stock at 600℃ for 2 hours to obtain the billet. Preferably, the bar stock is heated to 520℃ in a vacuum environment and maintained for 5 hours.

[0062] In step S12, the hardness HRC of the billet is 35-40, and the residual stress is ≤5MPa. Preferably, the hardness HRC of the billet is 38.

[0063] Pressing improves the density of titanium alloy materials and eliminates voids or cracks that may occur in subsequent processes. This process optimizes the grain structure of the titanium alloy, ensuring material uniformity. Controlling the grain size of the titanium alloy rods to ≤5μm through pressing helps improve the strength and fatigue resistance of the titanium alloy material and provides a more stable foundation for subsequent processing.

[0064] Heating the material in a vacuum environment prevents the titanium alloy from reacting with oxygen or nitrogen in the air, reducing oxide formation and ensuring the purity and corrosion resistance of the titanium alloy. The heating temperature is controlled between 500-540℃ and maintained for 4-6 hours, optimizing the grain size within the bar and creating a more uniform internal structure. Subsequent aging treatment helps improve the strength and hardness of the titanium alloy and prepares it for annealing.

[0065] Annealing at 600℃ for 2 hours effectively releases these internal stresses, ensuring dimensional stability and shape accuracy during subsequent machining. At this point, the annealed titanium alloy maintains a hardness of HRC 35-40, and the residual stress is reduced to ≤5MPa, thus providing an ideal material condition for subsequent precision machining.

[0066] Specifically, the semi-finished product undergoes post-processing, which includes shot peening, nitrogen ion implantation, ALD atomic layer deposition, and aging. Among these processes, ALD atomic layer deposition forms a titanium nitride coating on the surface of the semi-finished product, resulting in a high-precision robot titanium alloy component.

[0067] The high-precision robot titanium alloy component is obtained according to the following steps: First, the semi-finished product is placed in a shot peening machine, where metal particles are used to blast its surface. Then, the semi-finished product is placed in an ion implantation device for nitrogen ion implantation. Next, it is placed in an ALD (Atomic Layer Deposition) device for atomic layer deposition, forming a titanium nitride coating with a thickness of 90-110 nm. Finally, the semi-finished product is subjected to an aging treatment at 130-170℃ for 1.5-2.5 hours. After this treatment, a high-precision robot titanium alloy part is obtained. Preferably, the titanium nitride coating thickness is 100 nm; and the semi-finished product is subjected to an aging treatment at 150℃ for 2 hours.

[0068] Step S2 mainly includes shot peening, ion implantation, atomic layer deposition of titanium nitride coating, and aging treatment of the semi-finished product. The purpose of these post-treatment processes is to improve the surface quality of the titanium alloy parts, enhance wear resistance, strengthen corrosion resistance, release internal stress, and ultimately obtain high-precision and high-strength robotic titanium alloy parts. These treatment steps not only solve problems such as heat accumulation, surface defects, and stress concentration in titanium alloy materials during traditional processing, but also improve the stability and durability of titanium alloy parts in long-term high-load working environments. By comprehensively using shot peening, ion implantation, deposition coating, and aging treatment, the problems of unstable precision, strength, and surface quality faced by titanium alloys during processing can be solved, thereby meeting the requirements of high-precision robotic titanium alloy parts.

[0069] Shot peening applies high-speed impact of metal particles to the surface of semi-finished products, forming a compressive stress layer. This compressive stress layer significantly enhances the fatigue strength and wear resistance of titanium alloy components. Titanium alloys are susceptible to surface defects and microcracks during high-precision machining; shot peening effectively eliminates these micro-defects, prevents the propagation of fatigue cracks, and improves the service life of components. Furthermore, shot peening reduces micro-cracks on the titanium alloy surface caused by cutting during machining, enhancing the structural integrity of the material surface.

[0070] Ion implantation uses a nitrogen ion source to inject nitrogen into the surface of titanium alloys, thereby altering the atomic structure of the material surface and improving the hardness and corrosion resistance of the titanium alloys. Titanium alloys are prone to oxidation and corrosion in high-temperature and high-humidity environments, but ion implantation can significantly improve their corrosion resistance by forming a nitride film on the surface. This treatment effectively improves the durability of titanium alloy components in harsh environments, preventing surface oxidation and corrosion under high-intensity operation and repeated load conditions.

[0071] Atomic layer deposition (ALD) of titanium nitride coatings provides additional wear resistance and oxidation protection by depositing a 90-110 nm thick titanium nitride coating on the surface of titanium alloys. Titanium nitride coatings possess excellent hardness and high-temperature resistance, effectively preventing wear of titanium alloys in high-temperature, frictional, or corrosive environments, thus improving the long-term performance of components. Titanium alloy surfaces are often worn due to high temperatures or friction, especially in high-load components such as robot joints. Depositing titanium nitride coatings can significantly increase surface hardness, prevent wear, and improve durability. Furthermore, atomic layer deposition allows for precise control of coating uniformity and thickness, ensuring high quality and reliability, further enhancing the surface hardness of titanium alloys.

[0072] Aging treatment at 130-170℃ for 1.5-2.5 hours can release residual stress generated during processing, stabilize dimensions, and prevent deformation or cracking caused by stress concentration in titanium alloy components. During processing, titanium alloys generate internal stress due to differences in thermal deformation and cooling rates. If this internal stress is not effectively released, it can easily lead to deformation or cracking of components during subsequent use. Aging treatment further stabilizes the atomic structure of the titanium alloy material, reduces internal stress, and ensures that components maintain stable dimensions and shape during subsequent use, thus solving the problem of stress accumulation during titanium alloy processing.

[0073] In summary, the post-processing in step S2, through shot peening, ion implantation, atomic layer deposition of titanium nitride coating, and aging treatment, effectively solves several technical problems faced by titanium alloy materials in high-precision machining. Shot peening improves the fatigue strength and wear resistance of the component; ion implantation enhances the surface corrosion resistance; atomic layer deposition of titanium nitride coating improves surface hardness and wear resistance; and aging treatment effectively releases internal stress, ensuring the dimensional stability and shape accuracy of the component. The comprehensive application of these processes solves the problems of surface quality, durability, and stability of titanium alloy materials under high-intensity, complex load conditions, ensuring the performance and reliability of the final high-precision robot titanium alloy component in long-term use.

[0074] More specifically, step S2 further includes the following steps: Before post-processing the semi-finished product, it can be subjected to vacuum cryogenic treatment. Specifically, after cleaning the semi-finished product, it is placed in a vacuum cryogenic treatment chamber to cool it to (-150℃) - (-196℃) and maintain this temperature for 2-4 hours. After cooling, the cooled semi-finished product is heated to room temperature at a rate of 5-10℃ / min. Preferably, the semi-finished product is cooled to 173℃ and maintained for 3 hours, with a heating rate of 8℃ / min.

[0075] Vacuum cryogenic treatment cools semi-finished products to (-150℃) - (-196℃), releasing residual stress accumulated during processing and optimizing the internal crystal structure of the material. Specifically, vacuum cryogenic treatment stabilizes the crystal structure of titanium alloy materials, reduces stress generated by heat treatment or machining processes, and improves the strength and fatigue resistance of the semi-finished products. This process significantly improves the dimensional stability and shape accuracy of the semi-finished products, especially in the final stages of precision machining, ensuring that the final components maintain good performance during use. During the cooling process, the microstructure of the semi-finished products is optimized, partly due to grain refinement caused by cryogenic treatment, which improves the hardness and wear resistance of the material. In addition, after vacuum cryogenic treatment, the residual stress in the material is released, which means that the components are not easily deformed by external forces or temperature changes during subsequent use, maintaining high structural stability.

[0076] The final machining stage typically involves precision cutting and surface finishing, but titanium alloys often experience slight deformation or surface defects during this process due to heat buildup from cutting and minute stress deformation. Vacuum cryogenic treatment after final machining and before post-processing can effectively release these residual stresses generated during machining, ensuring the part maintains accurate shape and dimensions.

[0077] After undergoing cryogenic vacuum treatment, the semi-finished product exhibits better stability during subsequent post-processing, reducing subsequent deformation or surface unevenness caused by residual stress. Cryogenic vacuum treatment ensures the dimensional stability of titanium alloy components, allowing for more precise surface treatment and aging processes, thus guaranteeing high precision and durability.

[0078] The present invention also proposes a high-precision robot titanium alloy component, wherein the high-precision robot titanium alloy component adopts the processing technology described above.

[0079] The above-described embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit it. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A machining process for high-precision titanium alloy parts for robots, characterized in that, The processing technology includes the following steps: Step S1: Select the titanium alloy billet and perform special machining and processing on the titanium alloy billet using five-axis machining according to the preset plan to obtain a semi-finished product; wherein, the machining is segmented machining, which includes primary machining, secondary machining and final machining in sequence; In the initial machining, a five-axis machining center is used to cut the titanium alloy billet, leaving a machining allowance of 0.5-1mm; after cutting, the resulting workpiece is annealed to obtain the part to be processed again. In the reprocessing, a low-temperature cutting method is used to process the workpiece. During the cutting process, oil mist coolant is used to cool the cutting area. The machining path includes climb milling path and helical feed path, and a machining allowance of 0.03-0.05mm is retained to obtain the final workpiece. In the final processing, the curved surfaces, shaft structures, and hole structures of the workpiece to be processed are processed; the curved surfaces are processed by five-axis milling and electrolytic machining in sequence, and the shaft structures and hole structures are processed by grinding and planetary roller screw grinding in sequence to obtain semi-finished products; Step S2: Post-processing of the semi-finished product, which includes shot peening, nitrogen ion implantation, ALD atomic layer deposition, and aging treatment in sequence; wherein, ALD atomic layer deposition forms a titanium nitride coating on the surface of the semi-finished product, and after the treatment, a high-precision robot titanium alloy part is obtained. The special processing is additive composite processing or secondary processing; the preset scheme is either the first scheme or the second scheme; When processing the billet according to the first scheme, a near-net-shape material is first formed on the billet through additive composite treatment to obtain a composite material. Then, the composite material is processed in sequence through primary processing, secondary processing and final processing to obtain a semi-finished product. The composite material is obtained according to the following steps: Molding powder is laid on the corresponding position on the blank, and the powder is scanned and melted layer by layer by laser to build the component layer by layer. When each layer of molten molding powder cools and solidifies, a near-net-shape material is formed on the blank to obtain the composite material. When processing the billet according to the second scheme, the billet is first processed in sequence through initial processing, secondary processing and final processing to obtain intermediate material, and then the intermediate material is processed a second time to obtain semi-finished product; The secondary processing includes at least one of drilling, laser processing, and electrolytic processing. The drilling process uses an internally cooled drill bit to drill the intermediate material, with a straightness of ≤0.004mm / m and a coolant pressure of 20MPa inside the drill bit; The laser processing uses a femtosecond laser to process the intermediate material to form holes with a diameter of 0.3±0.01mm; The electrolytic treatment uses an electrolyte to process the intermediate material to form pores with a diameter of 0.3±0.01mm.

2. The processing technology for high-precision robot titanium alloy parts according to claim 1, characterized in that, When processing the billet according to the first scheme, in the initial processing, the machine tool cuts the composite material at a cutting speed of 1500-2000 rpm, a feed rate of 0.03-0.08 mm / r, and a cutting depth of 0.1-0.15 mm, leaving a machining allowance of 0.5-1 mm. During the cutting process, a water-soluble cutting fluid with a pressure of ≥20 MPa and a temperature of ≤30℃ is sprayed to cool the cutting area, resulting in composite material a. After cutting, composite material a is annealed at a temperature of 550-600℃ for 1.5-2 hours and cooled in the furnace, and then annealed at a temperature of 580-620℃ for 1.5-2 hours and cooled in the furnace to obtain composite material b.

3. The processing technology for high-precision robot titanium alloy parts according to claim 1, characterized in that, When processing the blank according to the first scheme, in the second processing, the machine tool cuts the composite material b at a cutting speed of 60-80 m / min, a feed rate of 0.0008-0.0015 mm / r, and a depth of cut of 0.002-0.005 mm, and cuts the composite material b according to climb milling and helical feed paths, leaving a machining allowance of 0.03-0.05 mm; during the cutting process, the cutting area of ​​the composite material b is cooled with oil mist coolant at -20℃. After the cutting is completed, the composite material c is obtained.

4. The processing technology for high-precision robot titanium alloy parts according to claim 1, characterized in that, When the blank is processed according to the first scheme, in the final processing, after forming curved surfaces and shafts and holes with Ra≤0.05μm on the composite material c, a semi-finished product is obtained; In forming the curved surface, the composite material c is first machined using a five-axis milling machining center at a cutting speed of 70-100 m / min, a feed rate of 0.001-0.003 mm / r, and a depth of cut of 0.002-0.005 mm. Then, an electrolytic composite machining system is used with an electrolyte of 15% NaCl aqueous solution, a voltage of 20V, and a feed rate of 0.3 mm / min. When forming shafts and holes, a cubic boron nitride grinding wheel is used to grind the outer diameter or inner hole of the composite material c at a speed of 8000-12000 r / min, followed by planetary roller screw grinding.

5. The processing technology for high-precision robot titanium alloy parts according to claim 1, characterized in that, When processing the billet according to the second scheme, in the initial processing, the machine tool cuts the billet at a cutting speed of 1500-2000 rpm, a feed rate of 0.03-0.08 mm / r, and a cutting depth of 0.1-0.15 mm, leaving a machining allowance of 0.5-1 mm. During the cutting process, water-soluble cutting fluid with a pressure of ≥20 MPa and a temperature of ≤30℃ is sprayed to cool the cutting area, resulting in billet a. After cutting, billet a is annealed at a temperature of 550-600℃ for 1.5-2 hours and cooled in the furnace, and then annealed at a temperature of 580-620℃ for 1.5-2 hours and cooled in the furnace, resulting in billet b.

6. The processing technology for high-precision robot titanium alloy parts according to claim 1, characterized in that, When processing the blank according to the second scheme, in the second processing, the machine tool cuts the blank b at a cutting speed of 60-80 m / min, a feed rate of 0.0008-0.0015 mm / r, and a cutting depth of 0.002-0.005 mm, and cuts the blank b according to climb milling and helical feed paths, leaving a machining allowance of 0.03-0.05 mm; during the cutting process, the cutting area of ​​the blank b is cooled with oil mist coolant at -20℃. After the cutting is completed, blank c is obtained.

7. The processing technology for high-precision robot titanium alloy parts according to claim 1, characterized in that, When the blank is processed according to the second scheme, in the final processing, after forming curved surfaces and shafts and holes with Ra≤0.05μm on the blank c, a semi-finished product is obtained; In forming the curved surface, the blank c is first machined using a five-axis milling machining center at a cutting speed of 70-100 m / min, a feed rate of 0.001-0.003 mm / r, and a depth of cut of 0.002-0.005 mm. Then, an electrolytic composite machining system is used with an electrolyte of 15% NaCl aqueous solution, a voltage of 20V, and a feed rate of 0.3 mm / min. When forming shafts and holes, a cubic boron nitride grinding wheel is used to grind the outer diameter or inner hole on the blank c at a speed of 8000-12000 r / min, followed by planetary roller screw grinding.

8. The processing technology for high-precision robot titanium alloy parts according to claim 1, characterized in that, The high-precision robot titanium alloy component is obtained according to the following steps: First, the semi-finished product is placed in a shot blasting machine, where metal particles are used to blast the surface of the semi-finished product. Then, the semi-finished product is placed in an ion implantation device and implanted with a nitrogen ion source. Next, the semi-finished product is placed in an ALD device for atomic layer deposition, which forms a titanium nitride coating with a thickness of 90-110 nm on the semi-finished product. Finally, the semi-finished product is subjected to aging treatment at a temperature of 130-170℃ for 1.5-2.5 hours. After the treatment is completed, a high-precision robot titanium alloy part is obtained.

9. A high-precision robot titanium alloy component, characterized in that, The high-precision robot titanium alloy component is manufactured using the processing technology described in any one of claims 1-8.

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