Precise parallel decoupling air-floating static pressure motion platform and method
By fixing X-axis and Y-axis linear motor stators on the base and combining them with a high-resolution grating feedback device and multi-dimensional deviation compensation, a precision parallel decoupled air-bearing hydrostatic motion platform with low inertia and high stability is achieved. This solves the problems of large motion inertia and severe thermal deformation of existing platforms and is suitable for high-end precision manufacturing.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- XIAN TECH UNIV
- Filing Date
- 2026-04-03
- Publication Date
- 2026-07-17
AI Technical Summary
Existing motion platforms suffer from problems such as large moment of inertia, severe thermal deformation, poor decoupling effect, and low control precision, making it difficult to meet the needs of precision manufacturing.
The precision parallel decoupled air-float hydrostatic motion platform is adopted. By fixing the stators of the X and Y linear motors to the base and combining them with the convex multi-layer composite lightweight guide rail design, the X and Y directions are completely decoupled. The platform is controlled by a high-resolution grating feedback device and a multi-dimensional deviation compensation mechanism.
It significantly reduces the platform system's moment of inertia and thermal deformation, improves positioning accuracy and motion stability, and enables independent and precise motion in the X and Y directions, making it suitable for high-end precision manufacturing scenarios.
Smart Images
Figure CN122401334A_ABST