Preparation method of high-temperature and high-pressure reaction kettle silver inner liner for large-size gallium nitride crystal growth

By using silver to prepare the reactor liner, combined with hot isostatic pressing and silver-copper brazing processes, the problems of high cost and difficult processing of platinum and platinum-iridium alloys were solved, enabling the efficient and stable preparation of large-size gallium nitride crystals that meet the requirements of extreme working conditions.

CN122406385APending Publication Date: 2026-07-17CHONGQING MATERIALS RES INST +1
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
CHONGQING MATERIALS RES INST
Filing Date
2026-05-26
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

In existing technologies, the preparation of reactor linings using platinum and platinum-iridium alloys is costly, difficult to process, and has a low yield. It cannot simultaneously meet the stringent requirements of extreme working condition tolerance, interface cleanliness, and sealing compatibility, making it difficult to achieve large-scale preparation of large-size gallium nitride single crystals.

Method used

The reactor liner is made of silver. Through processes such as chemical purification, hydrogen reduction, hot isostatic pressing, cold rolling, spinning, welding and electroplating, the density and mechanical properties of the silver liner are improved. The sealing seat is connected by silver-copper brazing to ensure sealing and interface cleanliness.

Benefits of technology

This reduces the equipment cost of the reactor liner, improves the high temperature and high pressure resistance and corrosion resistance of the silver liner, ensures the stability and sealing reliability of gallium nitride crystal growth, and realizes the efficient and stable preparation of large-size gallium nitride crystals.

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Abstract

本发明公开了一种大尺寸氮化镓晶体生长用高温高压反应釜银内衬的制备方法,通过稀硝酸溶解、氨水络合、水合肼还原制备高纯度银粉,经还原干燥、真空精炼、定向凝固、锻造、热等静压、冷轧、多道次数控强力旋压及银铜钎焊制成。通过控制热等静压温度600~750℃、压力150~250MPa、时间20~40min,使银材致密度≥99.99%;采用多道次强力旋压成型,保证组织均匀连续;密封座采用环保镀银,避免杂质污染;通过银铜钎焊实现异质材料密封连接。本发明制备的银内衬纯度高、致密度高、力学性能优异、气密性好、耐高温高压、无杂质污染,可显著提升氮化镓晶体生长环境稳定性与产品质量,适用于大尺寸、极端工况反应釜内衬。
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