A three-dimensional topography measurement method and system based on interference image space modulation
By extracting spatial modulation information from the interferometric image to construct a focusing curve, the problem of insufficient measurement accuracy and robustness of traditional methods under complex structures is solved, and stable three-dimensional morphology reconstruction is achieved under the condition of interference fringe degradation.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
- Filing Date
- 2026-04-09
- Publication Date
- 2026-07-17
AI Technical Summary
Existing three-dimensional topography measurement methods based on coherent scanning interferometry are prone to interference signal degradation when the measured surface has a large tilt angle, steep structure, or high curvature region, resulting in reduced measurement accuracy and insufficient robustness.
By extracting spatial modulation information from the interferometric image, constructing a focusing curve, and locating the peak, axial height measurement can be achieved, reducing the dependence on the spatial sampling quality of the interferometric fringes and improving the applicability and robustness of the measurement.
It maintains stable measurement performance under conditions of interference fringe degradation, significantly improves measurement capability, enhances measurement stability and efficiency, and is compatible with existing interferometric measurement system structures.
Smart Images
Figure CN122408653A_ABST