A hot CVD reaction chamber embedded temperature sensor and a manufacturing method thereof
By embedding a single-crystal sapphire fiber Bragg grating sensor within the CVD reaction chamber, combined with composite packaging and ALD technology, the durability and accuracy issues of sensors in high-temperature CVD processes are solved, enabling stable and accurate high-temperature measurement and distributed monitoring.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- SHANDONG UNIV
- Filing Date
- 2026-06-11
- Publication Date
- 2026-07-17
AI Technical Summary
Existing temperature sensors lack durability and accuracy in high-temperature CVD processes. Traditional fiber Bragg grating sensors have low temperature resistance limits and poor demodulation accuracy. Their packaging structures cannot effectively prevent corrosion from corrosive gases, leading to a decline in long-term stability.
By employing a single-crystal sapphire fiber Bragg grating sensor, combined with a composite packaging structure and atomic layer deposition technology, a multi-scale protection system is constructed to achieve high-temperature stability and high-precision measurement of the sensor.
It achieves long-term stable operation in high-temperature environments above 1800℃ and in highly corrosive atmospheres, possesses high-precision temperature measurement capabilities, is immune to electromagnetic interference, provides distributed measurement capabilities, and improves the accuracy of process control.
Smart Images
Figure CN122408992A_ABST