Piezoelectric motor high load cooperation device and operating method

Abstract

The present application relates to high-end electronic manufacturing technology field, especially to a piezoelectric motor high load coordination device and operation method. The device includes: three-axis motion platform for carrying workpiece and realizing nanometer displacement adjustment; opening and closing mechanism includes fixed bottom plate, jaw cylinder, electromagnetic valve, locking piece, guide shaft and fixed side plate. The electromagnetic valve is connected with the jaw cylinder to control the opening and closing of the jaw. The locking piece includes first locking arm, second locking arm and locking block, the first locking arm is linked with the jaw cylinder through the first transmission member, the second locking arm is linked with the first locking arm through the first transmission member, and the locking piece slides along the corresponding guide shaft; each guide shaft is sleeved with an elastic element for unlocking reset. In the locked state, the transmission member drives the locking piece to expand along the guide shaft, and synchronously abuts against the moving end face of the three-axis motor to realize locking; in the unlocked state, the elastic element drives the locking piece to retract and release the motor. The present application effectively resists external lateral load and overturning moment, and synchronously locks the three-axis piezoelectric motor.

Description

Technical Field

[0001] This invention relates to the field of high-end electronic manufacturing technology, and in particular to a piezoelectric motor high-load collaborative device and operating method, which can be widely used in PCB positioning, tin scraping and other PCB printing and circuit printing fields with high-precision positioning and large shearing force requirements. Background Technology

[0002] With the continuous development of electronic manufacturing technology, higher requirements are being placed on the processing precision of printed circuit boards (PCBs). The PCB printing process typically includes the following steps: First, the position information of the PCB is acquired by a camera and sent to the control center, where a nano-piezoelectric motion platform corrects the PCB's position under the action of a drive signal; then, molten solder is coated onto the PCB surface, ensuring the molten solder adheres evenly to the PCB pads to achieve corrosion protection and enhance mechanical properties; finally, excess solder is scraped off using a scraper.

[0003] In the aforementioned process, high-precision positioning of the PCB is a crucial step in ensuring coating quality. Therefore, before applying molten solder, positional errors must be fed back via a camera, and a motion platform must be used to perform high-precision position correction on the PCB. In existing technologies, nanopiezoelectric motion platforms typically consist of three-axis piezoelectric motors (X-axis, Y-axis, and R-axis), achieving nanometer-level displacement adjustment through coordinated operation of these three axes, thereby completing the precise positioning of the PCB.

[0004] However, during the solder scraping process, the motion platform needs to provide a large holding force to prevent the scraper from being pushed directly away from its original position due to the external force applied exceeding the maximum static friction inside the motion platform while scraping off excess solder, thus causing the PCB to lose its precise positioning function.

[0005] Therefore, the external lateral loads that can be applied to the moving end of the motion table motor are currently limited; at the same time, any form of overturning moment must be avoided to ensure the performance and service life of the motor. Summary of the Invention

[0006] Therefore, the technical problem to be solved by the present invention is to overcome the problems in the prior art, thereby providing a piezoelectric motor high-load coordination device and operation method.

[0007] In a first aspect, a high-load coordination device for a piezoelectric motor is provided, comprising:

[0008] At least one set of three-axis motion tables, including an X-axis piezoelectric motor, a Y-axis piezoelectric motor and an R-axis piezoelectric motor, are used to carry the workpiece and achieve nanometer-level displacement adjustment;

[0009] The opening and closing mechanism includes a fixed base plate, a gripper cylinder, a solenoid valve, a locking component, a guide shaft, and a fixed side plate; the gripper cylinder is mounted on the fixed base plate, and the solenoid valve is connected to the gripper cylinder to control the opening and closing movement of the gripper cylinder;

[0010] The locking component includes a first locking arm arranged along the X-axis direction, a second locking arm arranged along the Y-axis direction, and a locking block arranged along the R-axis direction; the guide shaft includes a first guide shaft arranged along the X-axis direction, a second guide shaft arranged along the Y-axis direction, and a third guide shaft arranged along the R-axis direction.

[0011] The first locking arm is connected to the gripper of the gripper cylinder via a first transmission member, and is slidably connected to the fixed base plate via a first guide shaft; the second locking arm is connected to the first locking arm via a second transmission member, and is slidably connected to the fixed side plate via a second guide shaft; the locking block is slidably connected to the second locking arm via a third guide shaft.

[0012] Elastic elements are respectively sleeved on the first guide shaft, the second guide shaft and the third guide shaft, and the elastic elements are used to drive the locking member to reset in the unlocked state;

[0013] In the locked state, the locking arm of the opening and closing mechanism opens outward along the guide axis under the drive of the transmission component, and abuts against the moving end faces of the X-axis piezoelectric motor, Y-axis piezoelectric motor and R-axis piezoelectric motor respectively, so as to lock the X-axis piezoelectric motor, Y-axis piezoelectric motor and R-axis piezoelectric motor simultaneously; in the unlocked state, the elastic element drives the locking component to retract inward, releasing the X-axis piezoelectric motor, Y-axis piezoelectric motor and R-axis piezoelectric motor.

[0014] In one embodiment of the present invention, a piezoelectric ceramic buffer element is provided between the locking block and the contact end face of the R-axis piezoelectric motor.

[0015] In one embodiment of the present invention, the piezoelectric ceramic buffer element includes a piezoelectric ceramic sheet and a flexible conductive layer covering its outer periphery; one side of the piezoelectric ceramic buffer element is fixedly connected to the end face of the locking block, and the other side abuts against the moving end face of the R-axis piezoelectric motor in the locked state.

[0016] In one embodiment of the present invention, the piezoelectric ceramic buffer element is further disposed between the gripper cylinder and the fixed base plate to isolate the impact vibration generated when the gripper cylinder moves.

[0017] In one embodiment of the present invention, two first locking arms are provided, respectively located on both sides of the X-axis piezoelectric motor; when the gripper of the gripper cylinder moves closer, the first transmission member retracts inward, driving the two first locking arms to open outward along the first guide axis away from each other, abutting against the end face of the X-axis piezoelectric motor, thereby locking the X-axis piezoelectric motor; two second locking arms are provided, respectively linked to the two first locking arms; when the first locking arms open outward, the second locking arms open outward along the Y-axis wedge groove away from each other, abutting against the end face of the Y-axis piezoelectric motor, thereby locking the Y-axis piezoelectric motor; the locking block is provided on the end face of the second locking arm, and the locking block abuts against the end face of the R-axis piezoelectric motor, thereby locking the R-axis piezoelectric motor.

[0018] In one embodiment of the present invention, the Y-axis wedge groove is formed at the linkage connection between the first locking arm and the second locking arm; the second locking arm moves along the Y-axis direction under the guidance of the Y-axis wedge groove.

[0019] In one embodiment of the present invention, the first transmission member includes an integrally formed first wedge-shaped portion, a first straight rod portion, and a connecting portion; two first locking arms clamp the first wedge-shaped portion; one end of the first straight rod portion is connected to the first wedge-shaped portion, and the other end is connected to the connecting portion; the connecting portion and the gripper of the gripper cylinder are fixedly connected.

[0020] In one embodiment of the present invention, the second transmission member includes an integrally formed second wedge portion and a second straight rod portion; two second locking arms clamp the second wedge portion; one end of the second straight rod portion is connected to the second wedge portion, and the other end is connected to the first locking arm.

[0021] In one embodiment of the present invention, a control module is further included; the control module is used to acquire the current working condition information of the three-axis motion table, the working condition information including the external lateral load to be applied; determine the target displacement corresponding to the current working condition according to the preset displacement and force mapping relationship; send a control signal to the solenoid valve to drive the gripper of the gripper cylinder to move to the target displacement, so that the locking member applies a target locking force matching the current working condition to the piezoelectric motor of the three-axis motion table.

[0022] In one embodiment of the present invention, a camera is also included; the camera is used to acquire workpiece position information and send it to the control module, the control module controls the three-axis motion table to perform position correction according to the position error, and controls the opening and closing mechanism to enter the locking state after the position correction is completed.

[0023] In one embodiment of the present invention, the three-axis motion table is provided in eight groups; each group of four three-axis motion tables is provided with one group of opening and closing mechanisms, and each group of opening and closing mechanisms is controlled independently.

[0024] Secondly, an operating method is provided, implemented using the aforementioned piezoelectric motor high-load coordination device, comprising the following steps:

[0025] S1. Place the workpiece to be processed on the three-axis motion table, collect the workpiece position information through the camera and send it to the control module;

[0026] S2. The control module calculates the workpiece position error and controls the three-axis motion table to perform position correction on the X, Y and R axes.

[0027] S3. After the position correction is completed, the control module controls the gripper cylinder to move through the solenoid valve, so that the locking part opens outward along the guide axis and locks the X-axis piezoelectric motor, Y-axis piezoelectric motor and R-axis piezoelectric motor simultaneously.

[0028] S4. Perform large transverse load machining operations on the workpiece;

[0029] S5. After the processing is completed, the control module controls the gripper cylinder to reverse its movement through the solenoid valve, and the elastic element drives the locking part to reset, simultaneously unlocking the X-axis piezoelectric motor, Y-axis piezoelectric motor and R-axis piezoelectric motor.

[0030] S6. Remove the workpiece and wait for the next operation.

[0031] Compared with the prior art, the above-described technical solution of the present invention has the following advantages:

[0032] 1. The piezoelectric motor high-load coordination device described in this invention maintains high precision. Through synchronous locking, it eliminates inter-axis stress coupling and position drift caused by differences in locking timing, ensuring the position locking accuracy of the precision displacement stage;

[0033] 2. The piezoelectric motor high-load coordination device described in this invention has a compact structure and low cost. It adopts a single power source mechanical linkage structure, reducing the number of sensors, controllers, and actuators, which simplifies the electrical control logic, reduces manufacturing costs, and improves the overall reliability of the device.

[0034] 3. The piezoelectric motor high-load coordination device of the present invention adapts to various working conditions. Through a proportional cylinder and wedge mechanism, stepless adjustment of the locking force is achieved, making it suitable for various external lateral load conditions and improving the versatility of the equipment.

[0035] 4. The piezoelectric motor high-load collaborative device of the present invention provides real-time sensing and shock absorption, high-frequency vibration isolation, and locking force. By setting a piezoelectric ceramic buffer element, the instantaneous impact generated by the locking action is effectively absorbed, avoiding damage to the precision motor from rigid collisions and extending the equipment life; the piezoelectric ceramic material has excellent isolation capability for high-frequency micro-vibrations, which can significantly reduce the impact of external environmental vibration or cylinder action vibration on the positioning accuracy of the motion table; utilizing the positive piezoelectric effect of the piezoelectric material, the buffer element is also used as a force sensor to realize real-time monitoring and closed-loop control of the locking force. Attached Figure Description

[0036] To make the content of this invention easier to understand, the invention will be further described in detail below with reference to specific embodiments and accompanying drawings.

[0037] Figure 1 This is a schematic diagram of the high-load collaborative device for piezoelectric motors in this invention;

[0038] Figure 2 This is a top view of the opening and closing mechanism in this invention;

[0039] Figure 3 This is a schematic diagram of the locking and unlocking states of the opening and closing mechanism in this invention;

[0040] Figure 4 This is a first-view structural schematic diagram of the opening and closing mechanism in this invention;

[0041] Figure 5 This is a second-view structural schematic diagram of the opening and closing mechanism in this invention;

[0042] Figure 6 This is a partially enlarged schematic diagram of the opening and closing mechanism involving the R-axis pressure block in this invention;

[0043] Figure 7 This is a partially enlarged schematic diagram of the opening and closing mechanism involving the Y-axis wedge groove in this invention;

[0044] Figure 8 This is a schematic diagram of the X-axis locking and unlocking states of the opening and closing mechanism in this invention;

[0045] Figure 9 This is a schematic diagram of the locking and unlocking states of the Y-axis and R-axis of the opening and closing mechanism in this invention.

[0046] Explanation of reference numerals in the instruction manual:

[0047] 100. Camera;

[0048] 200. Three-axis motion table;

[0049] 300. Gripper cylinder;

[0050] 400. Solenoid valve;

[0051] 500. Opening and closing mechanism; 501. Fixed base plate; 502. First transmission component; 503. Second transmission component; 504. First locking arm; 505. Second locking arm; 506. Locking block; 507. First guide shaft; 508. Second guide shaft; 509. Third guide shaft; 510. Elastic element; 511. Fixed side plate; 512. Piezoelectric ceramic buffer element; 513. Y-axis wedge groove;

[0052] 600. Work surface. Detailed Implementation

[0053] The present invention will be further described below with reference to the accompanying drawings and specific embodiments, so that those skilled in the art can better understand and implement the present invention. However, the embodiments described are not intended to limit the present invention.

[0054] When traditional nanopiezoelectric motion platforms perform large lateral load operations such as solder scraping, the external load may exceed the maximum static friction force inside the motor, causing displacement of the motor's moving end and thus rendering the precise positioning function of the workpiece ineffective. This situation limits the range of external lateral loads that the motion platform can withstand and may introduce overturning moments, affecting the performance and lifespan of the piezoelectric motor.

[0055] In this regard, combined with Figure 1 , Figure 2 , Figures 4 to 7 This embodiment proposes a high-load coordination device for piezoelectric motors to solve the above-mentioned problems. By setting an opening and closing mechanism 500, the device can synchronously lock the X-axis, Y-axis, and R-axis piezoelectric motors of the three-axis motion table 200 when high load support is required, thereby improving its positioning stability under high load conditions.

[0056] The device includes at least one set of three-axis motion stages 200, which integrate an X-axis piezoelectric motor, a Y-axis piezoelectric motor, and an R-axis piezoelectric motor. The three-axis motion stages 200 are configured to carry the workpiece and achieve nanometer-level displacement adjustment.

[0057] Furthermore, the device also includes an opening and closing mechanism 500. This opening and closing mechanism 500 consists of a fixed base plate 501, a gripper cylinder 300, a solenoid valve 400, a locking element, a guide shaft, and a fixed side plate 511. The gripper cylinder 300 is mounted on the fixed base plate 501, and the solenoid valve 400 is connected to the gripper cylinder 300 to control the opening and closing movement of the gripper's jaws.

[0058] Combination Figures 4 to 7The locking element includes a first locking arm 504 arranged along the X-axis, a second locking arm 505 arranged along the Y-axis, and a locking block 506 arranged along the R-axis. These components are designed to abut against the moving end face of the triaxial piezoelectric motor, respectively. The guide shaft includes a first guide shaft 507 arranged along the X-axis, a second guide shaft 508 arranged along the Y-axis, and a third guide shaft 509 arranged along the R-axis, providing guidance for the movement of the locking element.

[0059] Specifically, the locking member arranged along the X-axis, namely the first locking arm 504, is connected to the gripper of the gripper cylinder 300 via the first transmission member 502. The first locking arm 504 is slidably connected to the fixed base plate 501 via the first guide shaft 507 arranged along the X-axis to ensure its movement along the X-axis. The second locking arm 505 is connected to the first locking arm 504 via the second transmission member 503 and is slidably connected to the fixed side plate 511 via the second guide shaft 508, enabling it to move along the Y-axis. The locking block 506 is slidably connected to the second locking arm 505 via the third guide shaft 509, thereby realizing movement along the R-axis.

[0060] To achieve automatic reset of the locking element, elastic elements 510 are respectively fitted on the first guide shaft 507, the second guide shaft 508, and the third guide shaft 509. The elastic element 510 is configured to drive the locking element to retract inward in the unlocked state, so that it disengages from the piezoelectric motor.

[0061] With the opening / closing mechanism 500 locked, the solenoid valve 400 controls the gripper movement of the gripper cylinder 300, driving the locking member to open outward along the guide axis via the transmission component. Consequently, the first locking arm 504, the second locking arm 505, and the locking block 506 respectively abut against the moving end faces of the X-axis piezoelectric motor, the Y-axis piezoelectric motor, and the R-axis piezoelectric motor, thus achieving synchronous locking of the three-axis piezoelectric motors.

[0062] In the unlocked state, the solenoid valve 400 controls the gripper cylinder 300 to reverse its movement, releasing the driving force on the transmission component. At this time, the elastic element 510 drives the locking component to retract inward, disengaging it from the X-axis piezoelectric motor, Y-axis piezoelectric motor, and R-axis piezoelectric motor, thereby releasing these piezoelectric motors and enabling them to perform normal displacement adjustment.

[0063] This device, by incorporating an opening and closing mechanism 500 next to the piezoelectric motor on the three-axis motion table 200, can synchronously lock the moving end faces of the X-axis, Y-axis, and R-axis piezoelectric motors via locking components under conditions requiring large lateral loads. This effectively enhances the holding force of the piezoelectric motors under external loads, preventing displacement of the motor's moving end due to force, thus ensuring precise workpiece positioning during high-load operations such as soldering. This design avoids the positioning accuracy degradation problem caused by load limitations in traditional solutions and helps extend the service life of the piezoelectric motor.

[0064] Combination Figure 6 This embodiment further proposes that a piezoelectric ceramic buffer element 512 be provided between the locking block 506 and the contact end face of the R-axis piezoelectric motor. The piezoelectric ceramic buffer element 512 is a buffer structure made using the piezoelectric effect of piezoelectric ceramic materials. Its core function is to convert mechanical energy into electrical energy or vice versa, thereby providing a flexible response when subjected to mechanical stress. As a buffer element, its main function is to absorb and disperse mechanical impacts or vibrations, and provide a certain degree of elasticity or flexible connection.

[0065] Specifically, the piezoelectric ceramic damping element 512 can be composed of one or more piezoelectric ceramic sheets, and its structural design can be optimized according to actual application requirements. For example, its damping characteristics can be controlled by adjusting the thickness, area, or stacking method of the ceramic sheets. To enhance its damping performance and protect the piezoelectric ceramic body, the element is typically covered with a flexible material, such as an elastic polymer or rubber, to provide additional shock absorption and durability. Furthermore, to ensure close contact with the moving end face of the R-axis piezoelectric motor in the locked state while effectively absorbing impacts, the piezoelectric ceramic damping element 512 can be designed with an appropriate preload.

[0066] By placing a piezoelectric ceramic buffer element 512 between the locking block 506 and the contact end face of the R-axis piezoelectric motor, this device can effectively alleviate the direct mechanical impact and stress on the R-axis piezoelectric motor generated by the locking component during the locking process. The elastic properties of the piezoelectric ceramic buffer element 512 enable it to absorb and disperse the force, avoiding localized stress concentration and wear that may be caused by rigid contact, thereby protecting the precision moving end face of the R-axis piezoelectric motor and extending its service life. In addition, due to the inherent properties of piezoelectric ceramic materials, the piezoelectric ceramic buffer element 512 can also produce slight deformation under the action of locking force, providing a certain degree of flexible support, which helps to achieve a more stable and uniform locking force distribution, further improving the stability and reliability of locking, and ensuring that the piezoelectric motor can maintain its nanometer-level displacement accuracy and stability when performing large lateral load machining operations.

[0067] This embodiment further proposes that the piezoelectric ceramic buffer element 512 includes a piezoelectric ceramic sheet and a flexible conductive layer covering its outer periphery; one side of the piezoelectric ceramic buffer element 512 is fixedly connected to the end face of the locking block 506, and the other side abuts against the moving end face of the R-axis piezoelectric motor in the locked state.

[0068] Specifically, the piezoelectric ceramic sheet is the core functional component of the piezoelectric ceramic buffer element 512. Its main function is to utilize the piezoelectric effect to generate an electric charge when subjected to mechanical stress or to induce mechanical deformation when an electric field is applied. In this application, it is mainly used to absorb and buffer the impact force generated between the locking block 506 and the R-axis piezoelectric motor during locking or unlocking, thereby protecting the R-axis piezoelectric motor from excessive impact loads and ensuring the smoothness of the locking process. The piezoelectric ceramic sheet is usually made of piezoelectric materials such as lead zirconate titanate (PZT), which has high stiffness and good piezoelectric properties. The flexible conductive layer covers the outer periphery of the piezoelectric ceramic sheet, and its main functions are twofold: first, to provide electrical connection, ensuring that the electrical signal generated by the piezoelectric ceramic sheet under stress can be effectively collected or actively controlled by applying an electric field when needed; second, to provide a certain degree of mechanical protection and stress distribution, preventing damage to the piezoelectric ceramic sheet due to local stress concentration and enhancing its bonding strength with the external structure. The flexible conductive layer can be made of materials such as conductive polymers, thin metal foils or conductive adhesives. Its flexibility helps to adapt to the small deformations of the piezoelectric ceramic sheet and ensures stable electrical contact.

[0069] One side of the piezoelectric ceramic buffer element 512 is fixedly connected to the end face of the locking block 506. This fixed connection ensures that the locking force applied by the locking block 506 can be stably and effectively transmitted to the piezoelectric ceramic buffer element 512, avoiding energy loss or unstable locking due to loosening or relative displacement. The fixed connection can be achieved in various ways, such as bonding with high-strength structural adhesive, mechanical fixing with micro-bolts or clips, or metallurgical bonding through brazing. The choice of fixing method depends on the specific material compatibility, working environment, and required connection strength. The other side of the piezoelectric ceramic buffer element 512 abuts against the moving end face of the R-axis piezoelectric motor in the locked state. This means that when the locking mechanism is activated, this side of the piezoelectric ceramic buffer element 512 directly contacts the moving end face of the R-axis piezoelectric motor and bears the locking force. This abutment method allows the piezoelectric ceramic buffer element 512 to directly sense and buffer the axial force on the R-axis piezoelectric motor, thereby achieving effective protection and stable locking of the R-axis piezoelectric motor.

[0070] This embodiment further proposes that the piezoelectric ceramic buffer element 512 is also disposed between the gripper cylinder 300 and the fixed base plate 501, which is not shown in the figure.

[0071] Specifically, the piezoelectric ceramic damping element 512 is a device capable of converting mechanical energy into electrical energy or dissipating energy through its internal damping characteristics, commonly used to absorb and attenuate mechanical vibrations and impacts. In this embodiment, the element is strategically placed between the bottom of the gripper cylinder 300 and the fixed base plate 501. Its installation can be achieved through various methods such as bonding, bolting, or clamping to ensure it can effectively receive and buffer the impact force generated when the gripper cylinder 300 operates. To achieve optimal isolation, the material selection, thickness, and elastic modulus of the piezoelectric ceramic damping element 512 should be optimized to effectively match and absorb the impact vibrations of specific frequencies and energy generated by the gripper cylinder 300 during rapid operation.

[0072] This design aims to isolate the impact vibrations generated during the operation of the gripper cylinder 300. When performing clamping or releasing operations, the gripper cylinder 300 generates transient impacts and high-frequency vibrations due to the rapid application of pneumatic force and the instantaneous contact of internal mechanical components. If these impact vibrations are not effectively addressed, they will be directly transmitted to the entire structure of the piezoelectric motor high-load coordinating device through the fixed base plate 501, thus affecting the precise positioning capability of the three-axis motion stage 200. Especially during nanometer-level displacement adjustments, any minute external disturbance can lead to a decrease in accuracy. Through the intervention of the piezoelectric ceramic buffer element 512, these impact energies are effectively absorbed and dissipated, thereby preventing the vibrations from propagating to other parts of the device.

[0073] This embodiment proposes a high-load coordinated device for piezoelectric motors. In the locked state, its opening and closing mechanism 500 abuts against the moving end face of the piezoelectric motor on the three-axis motion table 200 via a locking member, synchronously locking the X-axis, Y-axis, and R-axis piezoelectric motors. However, in practical applications, improper design of the locking member may lead to uneven distribution of locking force, affecting the stability and reliability of locking, especially under high-load conditions. This may prevent the effective suppression of minute displacements of the piezoelectric motors, thus affecting machining accuracy.

[0074] To address the aforementioned issues, this embodiment further proposes a specific locking component structure and linkage method. Specifically, two first locking arms 504 are provided, located on both sides of the X-axis piezoelectric motor. This symmetrical arrangement aims to provide a balanced locking force, preventing the X-axis piezoelectric motor from experiencing uneven loading or tilting during the locking process, thereby improving the stability and reliability of the locking mechanism. The two first locking arms 504 can be designed with a symmetrical structure and synchronously driven by the first transmission component 502, causing them to open outwards at the same speed and stroke, simultaneously contacting the two end faces of the X-axis piezoelectric motor and applying a locking force.

[0075] When the gripper of the gripper cylinder 300 moves closer, the first transmission component 502 retracts inward, driving the two first locking arms 504 to open outward along the first guide shaft 507, abutting against the end face of the X-axis piezoelectric motor, thus locking the X-axis piezoelectric motor. This action mechanism details the specific process of X-axis locking. The retraction motion of the gripper of the gripper cylinder 300 is converted into the relative opening motion of the two first locking arms 504 through the first transmission component 502. The first transmission component 502 can adopt a wedge structure or a linkage mechanism to convert the linear motion of the gripper cylinder 300 into the symmetrical outward sliding of the two first locking arms 504 along the first guide shaft 507, ensuring that the X-axis piezoelectric motor is effectively locked on both sides simultaneously. The first guide shaft 507 ensures the smoothness and accuracy of the movement of the first locking arms 504.

[0076] Two second locking arms 505 are provided, each linked to one of the two first locking arms 504. This arrangement, corresponding to the first locking arms 504, aims to achieve symmetrical locking of the Y-axis piezoelectric motor. The linkage ensures that the X-axis locking action can synchronously trigger the Y-axis locking action, achieving multi-axis coordinated locking. The linkage can be implemented through a mechanical structure, such as a pin, slider, or a specific geometry, allowing the movement of the first locking arms 504 to directly or indirectly drive the movement of the second locking arms 505.

[0077] When the first locking arm 504 opens outward, the second locking arm 505 opens outward along the Y-axis wedge groove 513, moving away from each other, and abuts against the end face of the Y-axis piezoelectric motor, thus locking the Y-axis piezoelectric motor. This further clarifies the linkage mechanism of the Y-axis locking. Through the linkage connection and the guiding effect of the Y-axis wedge groove 513, the second locking arm 505 also opens outward, thereby locking the Y-axis piezoelectric motor. The Y-axis wedge groove 513 can be designed on the first locking arm 504 or the second locking arm 505 and work in conjunction with the mating structure on another component to convert the movement of the first locking arm 504 into the opening movement of the second locking arm 505 along the Y-axis direction.

[0078] A locking block 506 is disposed on the end face of the second locking arm 505. The locking block 506 abuts against the end face of the R-axis piezoelectric motor, thereby locking the R-axis piezoelectric motor. By disposing the locking block 506 on the end face of the second locking arm 505, the opening movement of the second locking arm 505 can drive the locking block 506 to contact the R-axis piezoelectric motor, thus locking the R-axis and further improving the mechanical linkage of the three-axis coordinated locking. The locking block 506 can be directly fixed to the end face of the second locking arm 505, or installed through an adjustable connection method to facilitate adjustment of its abutment position and locking force against the end face of the R-axis piezoelectric motor.

[0079] A Y-axis wedge groove 513 is formed at the linkage connection between the first locking arm 504 and the second locking arm 505; the second locking arm 505 moves along the Y-axis direction under the guidance of the Y-axis wedge groove 513. As a key component in the linkage connection between the first locking arm 504 and the second locking arm 505, the Y-axis wedge groove 513 not only transmits force but, more importantly, provides precise guidance, ensuring that the second locking arm 505 can move smoothly and accurately along the preset Y-axis direction, thereby achieving reliable Y-axis locking. The Y-axis wedge groove 513 can be a V-shaped or U-shaped groove, with its slope angle and depth precisely designed to ensure that when the first locking arm 504 moves, the force can be efficiently converted into the Y-axis movement of the second locking arm 505, and to provide sufficient support and guidance.

[0080] Through the above technical solution, this embodiment provides a more refined and reliable triaxial piezoelectric motor cooperative locking mechanism. By setting both the first locking arm 504 and the second locking arm 505 as two symmetrical pairs, and utilizing the first transmission component 502 and the Y-axis wedge groove 513 to achieve mechanical linkage between multiple axes, it ensures that the X-axis, Y-axis, and R-axis piezoelectric motors are subjected to uniform force and move synchronously during the locking process. This design avoids the off-center load and instability that may be caused by unilateral locking, significantly improving the locking accuracy and reliability. Especially under working conditions that require bearing large lateral loads, it can effectively prevent the piezoelectric motors from displacement or vibration caused by external loads, thereby ensuring the stability of workpiece processing or operation. At the same time, through the ingenious mechanical linkage design, the control complexity is simplified. Only the gripper cylinder 300 needs to be driven to achieve synchronous locking of the three axes, improving the integration and operating efficiency of the device.

[0081] This embodiment further proposes that the first transmission member 502 includes an integrally formed first wedge-shaped portion, a first straight rod portion, and a connecting portion; two first locking arms 504 clamp the first wedge-shaped portion; one end of the first straight rod portion is connected to the first wedge-shaped portion, and the other end is connected to the connecting portion; the connecting portion and the gripper of the gripper cylinder 300 are fixedly connected; the second transmission member 503 includes an integrally formed second wedge-shaped portion and a second straight rod portion; two second locking arms 505 clamp the second wedge-shaped portion; one end of the second straight rod portion is connected to the second wedge-shaped portion, and the other end is connected to the first locking arm 504.

[0082] Specifically, the first transmission component 502 is designed as a one-piece structure, internally comprising a first wedge-shaped portion, a first straight rod portion, and a connecting portion. This integrated design helps improve the overall rigidity and stability of the component, reduces gaps and errors that may arise from the assembly of multiple components, thereby ensuring the accuracy of the transmission process. The first wedge-shaped portion is the key component for converting linear motion into lateral opening motion; its inclined structure effectively decomposes the thrust along the X-axis into a component force that drives the first locking arm 504 to open outward. The first straight rod portion, as the intermediate link connecting the first wedge-shaped portion and the connecting portion, transmits the driving torque or thrust from the connecting portion and maintains the straightness of the transmission path. The connecting portion serves as the interface between the first transmission component 502 and the external drive source, namely the gripper of the gripper cylinder 300, and is responsible for reliably transmitting the action of the gripper cylinder 300 to the entire first transmission component 502.

[0083] Two first locking arms 504 are configured to clamp the first wedge-shaped portion. When the first transmission member 502 moves under the drive of the gripper cylinder 300, the first wedge-shaped portion generates an outward thrust between the two first locking arms 504, causing them to move away from each other and open outward along the first guide shaft 507. This clamping method ensures the directness and efficiency of force transmission, enabling the first locking arms 504 to move synchronously and stably.

[0084] One end of the first straight rod is connected to the first wedge-shaped part, and the other end is connected to the connecting part. This connection method ensures that the force applied by the gripper of the gripper cylinder 300 can be transmitted to the first wedge-shaped part through the connecting part and the first straight rod, forming a complete force transmission path.

[0085] The connecting part is fixedly connected to the gripper of the gripper cylinder 300. This fixed connection method ensures that the precise displacement of the gripper cylinder 300 can be transmitted to the first transmission component 502 without loss, avoiding energy loss or displacement error during the transmission process, thereby improving the response speed and control accuracy of the entire locking mechanism.

[0086] The second transmission component 503 also includes an integrally formed second wedge-shaped portion and a second straight rod portion. Similar to the first transmission component 502, the integrated design of the second transmission component 503 aims to improve structural strength and transmission accuracy. The second wedge-shaped portion is responsible for converting the lateral movement of the first locking arm 504 into the lateral opening movement of the second locking arm 505, achieving locking in the Y-axis direction. The second straight rod portion serves as the structure connecting the second wedge-shaped portion and the first locking arm 504, transmitting motion and force.

[0087] Two second locking arms 505 clamp the second wedge-shaped portion. When the first locking arm 504 opens outward, it drives the second transmission member 503 to move through its connection with the second straight rod portion, thereby causing the second wedge-shaped portion to generate an outward thrust between the two second locking arms 505, driving them to move away from each other along the Y-axis wedge groove 513 and open outward, abutting against the end face of the Y-axis piezoelectric motor.

[0088] One end of the second straight rod is connected to the second wedge-shaped part, and the other end is connected to the first locking arm 504. This connection establishes a linkage between the first locking arm 504 and the second transmission member 503. When the first locking arm 504 opens outward under the drive of the first transmission member 502, its movement is transmitted to the second wedge-shaped part through the second straight rod, thereby driving the second locking arm 505 to open outward. This cascaded transmission design enables the locking actions of the X-axis and Y-axis to be synchronized.

[0089] This embodiment further proposes a piezoelectric motor high-load collaborative device, which also includes a control module and a camera 100.

[0090] The control module is an intelligent unit integrating hardware and software, which can be implemented using a microcontroller, programmable logic controller, or industrial computer, and is responsible for the intelligent management and coordination of the entire device. This control module acquires the current operating condition information of the three-axis motion table 200, including the external lateral load to be applied. The external lateral load can be acquired by direct measurement using a force sensor or by estimation based on preset machining program parameters (such as tool feed rate, depth of cut, material hardness, etc.) combined with a material property database. Based on this operating condition information, the control module can determine the target displacement corresponding to the current operating condition according to a preset displacement-force mapping relationship. The displacement-force mapping relationship is usually established through experimental calibration or theoretical modeling and stored in the control module's memory, converting the required locking force into a precise displacement of the gripper cylinder 300. Subsequently, the control module sends a control signal, such as a pulse width modulation signal or an analog voltage signal, to the solenoid valve 400 to drive the gripper of the gripper cylinder 300 to move to the target displacement. By precisely controlling the extension length of the piston rod of the gripper cylinder 300, the locking components (including the first locking arm 504, the second locking arm 505, and the locking block 506) can apply a target locking force to the piezoelectric motor of the three-axis motion table 200 that matches the current working condition.

[0091] In addition, this device also includes a camera 100. The camera 100 is a vision sensor, such as an industrial CCD or CMOS camera, used to acquire workpiece position information and send it to the control module. The camera 100 captures images of the workpiece and uses image processing algorithms to identify feature points on the workpiece, thereby calculating the precise position coordinates and orientation information of the workpiece on the X, Y, and R axes. After receiving this position information, the control module compares it with a preset ideal target position and calculates the position error. Based on the calculated position error, the control module generates corresponding control commands to drive the X-axis piezoelectric motor, Y-axis piezoelectric motor, and R-axis piezoelectric motor of the three-axis motion stage 200 to perform micron- or nanometer-level position correction until the error between the actual position and the target position of the workpiece is within the allowable range. After the position correction is completed, the control module issues a command to control the opening and closing mechanism 500 to enter the locking state, ensuring reliable locking only after the workpiece is in a precise position.

[0092] Through the above technical solution, this embodiment achieves intelligent control of the high-load collaborative device for piezoelectric motors. The control module can acquire the current working condition information of the three-axis motion stage 200 in real time, especially the external lateral load to be applied, and accurately calculate the target displacement required by the gripper cylinder 300 based on the preset displacement and force mapping relationship. This allows the locking component to apply a locking force to the piezoelectric motor of the three-axis motion stage 200 that is precisely matched to the current working condition, effectively solving the problem that traditional fixed locking forces cannot adapt to variable loads, and avoiding workpiece slippage caused by insufficient locking force or component wear caused by excessive locking force. At the same time, the introduction of the camera 100 enables accurate acquisition of workpiece position information before locking, and the control module performs nanometer-level position correction on the three-axis motion stage 200 to ensure that the workpiece is locked in the optimal position, greatly improving processing accuracy and reliability. This intelligent collaborative control allows the device to dynamically adjust the locking strategy according to actual needs, thereby ensuring high-precision positioning while effectively coping with high-load operations, improving the adaptability and processing quality of the entire system.

[0093] Combination Figures 1 to 3 In this embodiment, it is further proposed that the three-axis motion table 200 is provided with eight groups; each group of four three-axis motion tables 200 is provided with a corresponding opening and closing mechanism 500, and each group of opening and closing mechanisms 500 is independently controlled.

[0094] Specifically, the three-axis motion stage 200 is provided in eight sets. This means that the device does not contain just one three-axis motion stage 200, but is configured with eight independent or semi-independent three-axis motion stage 200 units. Each three-axis motion stage 200 unit has the ability to carry a workpiece and achieve nanometer-level displacement adjustment. The purpose of this multi-set configuration is to achieve parallel processing or multi-point operation; for example, eight different workpieces can be processed simultaneously, or synchronous or asynchronous precision operations can be performed in different areas of a large workpiece. This design greatly expands the application range and processing capacity of the device.

[0095] Based on this, each set of four three-axis motion tables 200 is equipped with a corresponding opening and closing mechanism 500. Specifically, each set of four three-axis motion table units 200 is equipped with a complete opening and closing mechanism 500, which includes components such as a fixed base plate 501, a gripper cylinder 300, a solenoid valve 400, a locking element, a guide shaft, and a fixed side plate 511. When high loads are required, it can effectively lock its X-axis piezoelectric motor, Y-axis piezoelectric motor, and R-axis piezoelectric motor simultaneously to withstand external lateral loads.

[0096] Meanwhile, the opening and closing mechanisms 500 are independently controlled. This means that the action (locking or unlocking) of each opening and closing mechanism 500 can be managed through independent control signals, without affecting each other. For example, an independent control command can be sent to the solenoid valve 400 of each opening and closing mechanism 500 through a central control module (such as the control module mentioned above) or a distributed control system. This independent control capability allows different processing units to flexibly perform locking and unlocking operations according to their respective processing progress and needs, thereby achieving a high degree of operational parallelism and flexibility.

[0097] Through the above technical solution, this embodiment designs the piezoelectric motor high-load collaborative device as multiple parallel working modes, significantly improving the overall processing capacity and production efficiency of the device. Specifically, the eight sets of three-axis motion tables 200 can simultaneously carry and process multiple workpieces, or perform multi-point precision operations on a large workpiece, thereby effectively solving the efficiency bottleneck of a single device when facing high throughput demands. Each four sets of three-axis motion tables 200 are equipped with independent opening and closing mechanisms 500 and achieve independent control, ensuring that each processing unit can independently and reliably perform high-load locking after nanometer-level displacement adjustment, withstand external lateral loads, and that there is no interference between the units. This modular and independently controlled design not only improves the flexibility and reliability of the system, allowing processing tasks at different stations to be performed asynchronously, but also simplifies system integration in large production lines, providing a more powerful solution for high-precision and high-efficiency industrial manufacturing.

[0098] Combination Figure 3 , Figure 8 and Figure 9This embodiment also proposes an operating method, including the following steps:

[0099] First, in step S1, the workpiece to be processed is placed on the worktable 600 of the three-axis motion stage 200. The workpiece position information is acquired by the camera 100 and sent to the control module. Specifically, workpiece placement can be done manually or using an automated robotic arm. The camera 100 is typically a high-resolution industrial camera, such as a CCD or CMOS camera, which acquires two-dimensional or three-dimensional image data of the workpiece through an optical imaging system. This image data is then transmitted to the control module for processing. The control module can be an industrial PC, PLC, or embedded system with built-in image processing algorithms that can accurately identify feature points of the workpiece from the image and calculate the workpiece's current position coordinates. This step aims to provide accurate initial position data for subsequent precise displacement adjustments.

[0100] Next, in step S2, the control module calculates the workpiece position error and controls the three-axis motion stage 200 to perform position correction along the X, Y, and R axes. Specifically, the control module compares the current workpiece position information obtained in step S1 with preset target position information to calculate the position deviations in the X, Y, and R axes. Based on these deviations, the control module generates corresponding control commands and sends them to the X-axis, Y-axis, and R-axis piezoelectric motors of the three-axis motion stage 200 via the drive circuit. These piezoelectric motors respond to the control commands, performing nanometer-level precise displacement adjustments until the workpiece position error is corrected to a preset allowable range. This step ensures the initial positioning accuracy of the workpiece before high-load machining operations.

[0101] Subsequently, in step S3, after the position correction is completed, the control module controls the gripper cylinder 300 to move via the solenoid valve 400, causing the locking element to open outward along the guide axis, simultaneously locking the X-axis piezoelectric motor, Y-axis piezoelectric motor, and R-axis piezoelectric motor. Specifically, when the control module confirms that the workpiece has been accurately corrected, it sends a signal to the solenoid valve 400. Upon receiving the signal, the solenoid valve 400 controls the air supply to move, driving the piston rod of the gripper cylinder 300. The movement of the gripper cylinder 300, through the first transmission component 502 and the second transmission component 503, drives the locking element (including the first locking arm 504, the second locking arm 505, and the locking block 506) to open outward along the first guide axis 507, the second guide axis 508, and the third guide axis 509. The opening locking mechanism will tightly abut against the moving end faces of the X-axis piezoelectric motor, Y-axis piezoelectric motor, and R-axis piezoelectric motor respectively, thereby firmly locking these piezoelectric motors in their current positions and preventing them from shifting under external loads.

[0102] Next, in step S4, a large lateral load machining operation is performed on the workpiece. This step is the core objective of the entire operation method: to perform machining operations that require large lateral forces or torques while the workpiece is precisely fixed and locked. For example, this can include processes such as precision cutting, grinding, polishing, drilling, or assembly. Because the piezoelectric motor of the three-axis motion table 200 is locked, it can withstand loads far exceeding its own driving capacity, thus ensuring the stability and accuracy of the machining process.

[0103] Following this, in step S5, after the machining operation is completed, the control module controls the gripper cylinder 300 to reverse its movement via the solenoid valve 400. The elastic element 510 drives the locking element to reset, simultaneously unlocking the X-axis, Y-axis, and R-axis piezoelectric motors. Specifically, when the control module detects that the machining operation is complete, it sends a reverse control signal to the solenoid valve 400 again. The solenoid valve 400 switches the air path, causing the piston rod of the gripper cylinder 300 to move in the reverse direction. As the gripper cylinder 300 reverses its movement, the transmission component drives the locking element to retract inward. At this time, the elastic element 510 (e.g., a compression spring) sleeved on the first guide shaft 507, second guide shaft 508, and third guide shaft 509 releases its stored elastic potential energy, actively pushing the locking element to retract inward, disengaging it from the contact with the moving end face of the piezoelectric motor, thereby simultaneously releasing the locking of the X-axis, Y-axis, and R-axis piezoelectric motors.

[0104] Finally, in step S6, the workpiece is removed, awaiting the next operation. This step marks the end of a complete machining cycle. The workpiece can be removed manually by the operator or automatically by the automated system. The system then enters standby mode, ready to receive the next workpiece and begin a new machining cycle.

[0105] Through the above technical solution, this embodiment provides a systematic and automated operation process, effectively solving the efficiency and reliability problems of high-precision, high-load machining operations on a piezoelectric motor high-load collaborative device. The method first utilizes the camera 100 and control module to perform precise initial positioning and nanometer-level position correction of the workpiece, ensuring basic accuracy before machining. Then, before the machining operation begins, the control module, solenoid valve 400, and gripper cylinder 300 collaboratively drive the locking mechanism to firmly lock the piezoelectric motor of the three-axis motion table 200, enabling it to stably withstand large lateral loads and avoiding the risk of piezoelectric motor displacement or damage due to external forces during machining, greatly improving the device's load-bearing capacity and machining stability. After the machining operation is completed, the piezoelectric motor is quickly and synchronously unlocked by reverse control of the gripper cylinder 300 and the reset action of the elastic element 510, improving the convenience and efficiency of operation. Overall, this operating method closely integrates high-precision positioning, high-load locking, and automated processes, enabling the piezoelectric motor high-load coordination device to complete precision machining operations efficiently and reliably, while ensuring the safe operation and long service life of the piezoelectric motor.

[0106] The following example will provide a more detailed explanation of the above technical solution:

[0107] In a high-precision electronics manufacturing environment, users need to perform fine machining on printed circuit boards, including a solder scraping operation. This operation generates significant lateral loads, posing a challenge to the positioning accuracy of the workpiece. To address this issue, this device is deployed on the production line.

[0108] First, the user places the printed circuit board to be processed onto a three-axis motion stage 200. The three-axis motion stage 200 includes an X-axis piezoelectric motor, a Y-axis piezoelectric motor, and an R-axis piezoelectric motor, used to support the workpiece and achieve nanometer-level displacement adjustment. Then, a camera 100 acquires the current position information of the printed circuit board and sends this information to the control module. Based on the acquired position information, the control module calculates the position error of the workpiece and sends control commands to the three-axis motion stage 200 to drive the X-axis, Y-axis, and R-axis piezoelectric motors to perform position correction along the X, Y, and R axes, ensuring that the printed circuit board achieves the expected nanometer-level positioning accuracy. In traditional solutions, after this precise positioning is completed, the motion stage is susceptible to displacement due to external lateral forces during soldering operations, leading to a loss of positioning accuracy.

[0109] After the position correction is completed, the control module determines the target displacement corresponding to the current working condition based on the preset displacement-force mapping relationship and the current working condition information (e.g., the external lateral load to be applied). The control module sends a control signal to the solenoid valve 400, which then controls the gripper cylinder 300 to operate. The gripper cylinder 300 is mounted on the fixed base plate 501, and a piezoelectric ceramic buffer element 512 is provided between the gripper cylinder 300 and the fixed base plate 501 to isolate the impact vibration generated when the gripper cylinder 300 operates, ensuring system stability.

[0110] The gripper of the gripper cylinder 300 moves to the target displacement, driving the first transmission component 502. The first transmission component 502 includes an integrally formed first wedge-shaped portion, a first straight rod portion, and a connecting portion, wherein the connecting portion is fixedly connected to the gripper of the gripper cylinder 300. The first wedge-shaped portion of the first transmission component 502 drives two first locking arms 504 to open outward along the first guide shaft 507. The first guide shaft 507 is slidably connected to the fixed base plate 501. The two first locking arms 504 are located on both sides of the X-axis piezoelectric motor, and after opening outward, they abut against the moving end face of the X-axis piezoelectric motor to lock the X-axis piezoelectric motor.

[0111] Simultaneously, the two first locking arms 504 are linked to the two second locking arms 505 via the second transmission member 503. The second transmission member 503 includes an integrally formed second wedge-shaped portion and a second straight rod portion, with the second straight rod portion connected to the first locking arms 504. As the first locking arms 504 open outward, the second locking arms 505, guided by the Y-axis wedge groove 513, open outward along the second guide shaft 508. The Y-axis wedge groove 513 is located at the linkage connection between the first locking arms 504 and the second locking arms 505. The second guide shaft 508 is slidably connected to the fixed side plate 511. After the two second locking arms 505 open outward, they abut against the moving end face of the Y-axis piezoelectric motor, thereby locking the Y-axis piezoelectric motor.

[0112] Furthermore, a locking block 506 is disposed on the end face of the second locking arm 505 and is slidably connected to the second locking arm 505 via a third guide shaft 509. The locking block 506 moves as the second locking arm 505 opens, abutting against the moving end face of the R-axis piezoelectric motor to lock the R-axis piezoelectric motor. A piezoelectric ceramic buffer element 512 is disposed between the locking block 506 and the abutting end face of the R-axis piezoelectric motor. This piezoelectric ceramic buffer element 512 includes a piezoelectric ceramic sheet and a flexible conductive layer covering its outer periphery. One side of the element is fixedly connected to the end face of the locking block 506, and the other side abuts against the moving end face of the R-axis piezoelectric motor in the locked state. This buffer element can absorb the impact during locking and provide a stable abutting force, preventing damage to the piezoelectric motor while ensuring the reliability of locking.

[0113] Through the aforementioned coordinated actions, the opening and closing mechanism 500 enters the locking state, simultaneously locking the X-axis piezoelectric motor, Y-axis piezoelectric motor, and R-axis piezoelectric motor. Compared to the traditional solution that relies solely on the internal friction of the piezoelectric motors for holding, this device significantly improves the ability of the three-axis motion table 200 to resist external lateral loads and overturning moments through external mechanical locking, ensuring that the positioning accuracy of the printed circuit board remains unaffected during processing operations with large lateral loads, such as solder scraping.

[0114] In the locked state, the system performs large lateral load processing on the printed circuit board. Because the piezoelectric motor is firmly locked, the workpiece will not shift under the action of the scraper, thus ensuring processing quality.

[0115] After the machining operation is completed, the control module controls the gripper cylinder 300 to reverse its movement via the solenoid valve 400. At this time, the elastic element 510, which is sleeved on the first guide shaft 507, the second guide shaft 508, and the third guide shaft 509, activates, driving the first locking arm 504, the second locking arm 505, and the locking block 506 to retract inward, resetting the locking components and simultaneously unlocking the X-axis piezoelectric motor, the Y-axis piezoelectric motor, and the R-axis piezoelectric motor. After unlocking, the three-axis motion table 200 regains its nanometer-level displacement adjustment capability. The user can then remove the machined printed circuit board and wait for the next operation.

[0116] Furthermore, to meet the needs of large-scale production, the device can be configured with multiple sets of three-axis motion tables 200 (e.g., eight sets). Each set of four sets of three-axis motion tables 200 is equipped with a set of opening and closing mechanisms 500, and each set of opening and closing mechanisms 500 is independently controlled, thereby realizing parallel or sequential operation of multiple workstations and improving production efficiency.

[0117] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the scope of protection of this invention.

Claims

1. A high-load coordination device for a piezoelectric motor, characterized in that, include: At least one set of three-axis motion tables (200), including an X-axis piezoelectric motor, a Y-axis piezoelectric motor and an R-axis piezoelectric motor, are used to carry the workpiece and achieve nanometer-level displacement adjustment; The opening and closing mechanism (500) includes a fixed base plate (501), a gripper cylinder (300), a solenoid valve (400), a locking element, a guide shaft, and a fixed side plate (511); the gripper cylinder (300) is mounted on the fixed base plate (501), and the solenoid valve (400) is connected to the gripper cylinder (300) to control the opening and closing movement of the gripper cylinder (300); The locking component includes a first locking arm (504) arranged along the X-axis direction, a second locking arm (505) arranged along the Y-axis direction, and a locking block (506) arranged along the R-axis direction; the guide shaft includes a first guide shaft (507) arranged along the X-axis direction, a second guide shaft (508) arranged along the Y-axis direction, and a third guide shaft (509) arranged along the R-axis direction. The first locking arm (504) is connected to the gripper of the gripper cylinder (300) via the first transmission member (502), and is slidably connected to the fixed base plate (501) via the first guide shaft (507); the second locking arm (505) is connected to the first locking arm (504) via the second transmission member (503), and is slidably connected to the fixed side plate (511) via the second guide shaft (508); the locking block (506) is slidably connected to the second locking arm (505) via the third guide shaft (509); Elastic elements (510) are respectively sleeved on the first guide shaft (507), the second guide shaft (508) and the third guide shaft (509), and the elastic elements (510) are used to drive the locking member to reset in the unlocked state; In the locked state, the locking arm of the opening and closing mechanism (500) opens outward along the guide axis under the drive of the transmission member, and abuts against the moving end faces of the X-axis piezoelectric motor, Y-axis piezoelectric motor and R-axis piezoelectric motor respectively, so as to lock the X-axis piezoelectric motor, Y-axis piezoelectric motor and R-axis piezoelectric motor simultaneously; in the unlocked state, the elastic element (510) drives the locking member to retract inward, releasing the X-axis piezoelectric motor, Y-axis piezoelectric motor and R-axis piezoelectric motor.

2. The piezoelectric motor high-load coordination device according to claim 1, characterized in that, A piezoelectric ceramic buffer element (512) is provided between the locking block (506) and the contact end face of the R-axis piezoelectric motor.

3. The piezoelectric motor high-load coordination device according to claim 2, characterized in that, The piezoelectric ceramic buffer element (512) includes a piezoelectric ceramic sheet and a flexible conductive layer covering its outer periphery; one side of the piezoelectric ceramic buffer element (512) is fixedly connected to the end face of the locking block (506), and the other side abuts against the moving end face of the R-axis piezoelectric motor in the locked state.

4. The piezoelectric motor high-load coordination device according to claim 2, characterized in that, The piezoelectric ceramic buffer element (512) is also disposed between the gripper cylinder (300) and the fixed base plate (501) to isolate the impact vibration generated when the gripper cylinder (300) operates.

5. The high-load coordinating device for piezoelectric motors according to claim 1, characterized in that, Two first locking arms (504) are provided, located on both sides of the X-axis piezoelectric motor respectively; when the gripper of the gripper cylinder moves closer, the first transmission member (502) retracts inward, driving the two first locking arms (504) to open outward along the first guide shaft (507) away from each other, and abut against the end face of the X-axis piezoelectric motor to lock the X-axis piezoelectric motor; two second locking arms (505) are provided, respectively locking the two first locking arms. The locking arm (504) is linked; when the first locking arm (504) opens outward, the second locking arm (505) opens outward away from each other along the Y-axis wedge groove (513) and abuts against the end face of the Y-axis piezoelectric motor to lock the Y-axis piezoelectric motor; the locking block (506) is disposed on the end face of the second locking arm (505), and the locking block (506) abuts against the end face of the R-axis piezoelectric motor to lock the R-axis piezoelectric motor.

6. The piezoelectric motor high-load coordination device according to claim 5, characterized in that, The Y-axis wedge groove (513) is formed at the linkage connection between the first locking arm (504) and the second locking arm (505); the second locking arm (505) moves along the Y-axis direction under the guidance of the Y-axis wedge groove (513).

7. The high-load coordinating device for piezoelectric motors according to claim 5, characterized in that, The first transmission component (502) includes an integrally formed first wedge-shaped portion, a first straight rod portion, and a connecting portion; two first locking arms (504) clamp the first wedge-shaped portion; one end of the first straight rod portion is connected to the first wedge-shaped portion, and the other end is connected to the connecting portion; the connecting portion is fixedly connected to the jaws of the gripper cylinder (300).

8. The high-load coordinating device for piezoelectric motors according to claim 5, characterized in that, The second transmission member (503) includes an integrally formed second wedge portion and a second straight rod portion; two second locking arms (505) clamp the second wedge portion; one end of the second straight rod portion is connected to the second wedge portion, and the other end is connected to the first locking arm (504).

9. The piezoelectric motor high-load coordination device according to claim 1, characterized in that, It also includes a control module; the control module is used to acquire the current working condition information of the three-axis motion table (200), the working condition information including the external lateral load to be applied; determine the target displacement corresponding to the current working condition according to the preset displacement and force mapping relationship; send a control signal to the solenoid valve (400) to drive the gripper of the gripper cylinder to move to the target displacement, so that the locking member applies a target locking force matching the current working condition to the piezoelectric motor of the three-axis motion table (200).

10. The piezoelectric motor high-load coordination device according to claim 9, characterized in that, It also includes a camera (100); the camera (100) is used to collect workpiece position information and send it to the control module. The control module controls the three-axis motion table (200) to perform position correction according to the position error, and controls the opening and closing mechanism (500) to enter the locking state after the position correction is completed.

11. The piezoelectric motor high-load coordination device according to claim 1, characterized in that, The three-axis motion table (200) is provided in eight groups; each group of four three-axis motion tables (200) is provided with one group of opening and closing mechanisms (500), and each group of opening and closing mechanisms (500) is independently controlled.

12. An operating method, characterized in that, The implementation using the piezoelectric motor high-load coordination device as described in any one of claims 1-11 includes the following steps: S1. Place the workpiece to be processed on the three-axis motion table (200), collect the workpiece position information through the camera (100) and send it to the control module; S2. The control module calculates the workpiece position error and controls the three-axis motion table (200) to perform position correction on the X-axis, Y-axis and R-axis. S3. After the position correction is completed, the control module controls the gripper cylinder (300) to move through the solenoid valve (400), so that the locking part opens outward along the guide axis and locks the X-axis piezoelectric motor, Y-axis piezoelectric motor and R-axis piezoelectric motor simultaneously. S4. Perform large transverse load machining operations on the workpiece; S5. After the processing is completed, the control module controls the gripper cylinder (300) to reverse its movement through the solenoid valve (400), and the elastic element (510) drives the locking part to reset, and simultaneously unlocks the X-axis piezoelectric motor, Y-axis piezoelectric motor and R-axis piezoelectric motor. S6. Remove the workpiece and wait for the next operation.

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