Flow path member, method for manufacturing flow path member, and liquid ejecting head

Abstract

The present application provides a flow path member, a method for manufacturing a flow path member, and a liquid ejecting head. A flow path member has a first substrate having a first flow path; a second substrate having a second flow path and stacked on the first substrate; a film member arranged between the first substrate and the second substrate, including a plurality of through holes that allow the first flow path and the second flow path to communicate with each other in the film member; and an adhesive that bonds the first substrate and the film member, wherein liquid flows from the first flow path to the second flow path via the through holes, wherein inner walls of the through holes include a region in which a diameter decreases from the first substrate side toward the second substrate side, and wherein at least one of the plurality of through holes is clogged by the adhesive that has entered at least a portion of the region.

Description

Technical Field

[0001] This disclosure relates to a flow path component for a liquid injection head, a method for manufacturing the flow path component, and a liquid injection head using the flow path component. Background Technology

[0002] As a liquid ejection device, for example, an inkjet liquid ejection device is a device that ejects ink from the nozzle of a liquid ejection head to print on a medium. In liquid ejection heads, there are cases where foreign matter in the liquid blocks the ejection port of the liquid ejection device, leading to liquid ejection defects. As a method to suppress such ejection failures, there is a method of installing a filter with a through-hole smaller than the liquid ejection port in the liquid flow path. For example, Japanese Patent Publication No. 2024-071153 discloses a liquid ejection head having a structure in which a filter with a through-hole is bonded to a flow path substrate with an adhesive.

[0003] Depending on the filter's orifice in the flow path components, there is a possibility that the orifice can become clogged with excess adhesive, and this excess adhesive is difficult to retain within the orifice. Therefore, there is a concern that the adhesive may peel off at the meniscus and become foreign matter in the liquid downstream of the filter. Summary of the Invention

[0004] The problem the invention aims to solve A flow path component is needed that prevents excess adhesive that has entered the filter's orifice from peeling off and becoming foreign matter in the liquid downstream of the filter.

[0005] Solution for solving the problem The flow path component according to this disclosure is a flow path component comprising: a first substrate having a first flow path; a second substrate having a second flow path and stacked on the first substrate; a membrane component disposed between the first substrate and the second substrate, the membrane component including a plurality of through holes allowing the first flow path and the second flow path to communicate with each other; and an adhesive for bonding the first substrate and the membrane component, wherein liquid flows from the first flow path to the second flow path through the through holes, wherein the inner wall of the through holes includes a region whose diameter decreases from the first substrate side toward the second substrate side, and wherein at least one of the plurality of through holes is blocked by at least a portion of the adhesive that has entered the region.

[0006] The features of this disclosure will become apparent from the following description of embodiments with reference to the accompanying drawings. The following description of the embodiments is by way of example. Attached Figure Description

[0007] Figure 1 This is a schematic diagram showing a flow path component according to a first embodiment of the present disclosure, wherein, Figure 1(a) is a cross-sectional view of the flow path component. Figure 1 (b) is along Figure 1 The planar diagram intercepted by line Ib-Ib in (a).

[0008] Figure 2 (a) to (e) are cross-sectional views showing the through-hole of a filter according to a first embodiment of the present disclosure.

[0009] Figure 3 (a) to (g) are cross-sectional views showing the state of the adhesive in the through-hole of the filter according to the first embodiment of the present disclosure.

[0010] Figure 4 (a) to (g) are cross-sectional views of the manufacturing method of the flow path component of this disclosure.

[0011] Figure 5 This is a perspective view of the liquid jet head disclosed herein.

[0012] Figure 6 (a) and (b) are cross-sectional views of a comparative example of a filter used to describe a liquid jet head. Detailed Implementation

[0013] In liquid jet heads, liquid jetting failures can occur due to foreign matter in the liquid clogging the jet orifice. To suppress such failures, a method exists for installing a filter with a through-hole smaller than the liquid jet orifice in the liquid flow path. For example, a liquid jet head has been proposed that has a structure in which a filter with a through-hole is bonded to a flow path substrate with an adhesive. In this liquid jet head, excess adhesive enters the vertical filter through the through-hole. In a liquid jet head with such a filter, where the inner wall of the through-hole is vertical (the diameter of the hole does not change along the thickness direction of the filter), the through-hole of the filter may be difficult to clog with excess adhesive. Regarding the excess adhesive clogging the through-hole, there is a concern that the adhesive may peel off due to the flow of liquid and become foreign matter in the liquid downstream of the filter.

[0014] Regarding the above issues, we will use Figure 6 As a comparative example of this disclosure, a case is described where excess adhesive forms a meniscus in the filter's through-holes and blocks the through-holes. Figure 6 (a) shows a meniscus formed by adhesive 43 in the through-hole 42 of filter 41 to block the through-hole 42. In the through-hole 42, liquid flows from the upstream side (upper side in the drawing) to the downstream side (lower side in the drawing) in the direction of liquid flow 44. Figure 6 As shown in (a), the inner wall of the through-hole 42 of the filter 41 is vertical and does not have a structure that supports the adhesive 43 from the downstream side (the lower side in the drawing). Therefore, as... Figure 6As shown in (b), there is a concern that the meniscus of the adhesive 43 may peel off due to the liquid flow 44 and become foreign matter in the liquid downstream of the filter. For example, in the case of pressurization and suction operations as a recovery operation of the liquid jet head, in the flow path component having the above-described filter, there is a concern that the meniscus of the adhesive may peel off from the through-hole and become foreign matter in the liquid downstream of the filter, thereby causing liquid jetting failure.

[0015] This disclosure relates to a flow path component that can prevent excess adhesive that has entered the through-holes of the filter from peeling off and becoming foreign matter in the liquid downstream of the filter.

[0016] Please refer to the appendix Figures 1 to 5 An embodiment of the flow path component according to this disclosure is described.

[0017] [First Embodiment] Will use Figure 1 A flow path component according to a first embodiment of the present disclosure is described.

[0018] The flow path component 10 has: a first flow path 12 in a first substrate 11; a membrane component 14 bonded to the first substrate 11 via an adhesive 13 to cover the first flow path 12; and a second flow path 16 in a second substrate 15 bonded to the first substrate 11 via the membrane component 14. For example, a monocrystalline silicon substrate can be used for the first substrate 11 and the second substrate 15. For the adhesive 13, materials such as epoxy resin, acrylic resin, polyurethane, silicone, benzocyclobutene, polyimide, polyamide, polyamide-imide, cyanoacrylate, phenolic resin, melamine resin, styrene resin, cyclized rubber, or mixtures thereof can be used. The membrane component 14 can be flexible, and in one embodiment, it can be a flexible membrane. For example, a resin component such as polyimide, polyamide, polyamide-imide, or epoxy resin can be used for the membrane component 14. The membrane thickness of the membrane component 14 is, for example, 5 μm or less, and in one embodiment, the membrane thickness can be 3 μm or less. In the flow path component 10, a through-hole 17 is formed in the membrane component 14, through which the first flow path 12 and the second flow path 16 communicate with each other, and liquid (not shown) flows from the first flow path 12 to the second flow path 16. The inner wall of the through-hole 17 includes a region whose diameter decreases from the side of the first substrate 11 toward the side of the second substrate 15, and the through-hole 17 is blocked by adhesive 13 that has entered at least a portion of this region. Figure 1 (b) is a diagram of the flow path member 10 cut along Ib-Ib, and a plan view of the membrane member 14 viewed from the side of the second substrate 15. In the plurality of through holes 17, adhesive 13 enters at least one through hole 17, and the through hole 17 is blocked by adhesive 13. Figure 1(b) shows a case where the adhesive 13 enters the through-holes 17 located in the corners (e.g., the four corners) of an area (filter area) where a plurality of through-holes 17 are arranged, and these through-holes 17 are blocked.

[0019] Figure 2 An example of the cross-sectional shape of the through-hole 17 of the membrane member 14 is shown. Figure 2 In the diagram, the first flow path 12 side of the membrane component 14 is the upper side of the drawing, and the second flow path 16 side is the lower side of the drawing. For example... Figure 2 As shown, it is sufficient for the through-hole 17 to have a region where its diameter decreases in the film thickness direction of the membrane member 14. In this embodiment, it is desirable for the diameter of the through-hole 17 to have a region that decreases from the first flow path 12 side to the second flow path 16 side. Figure 2 In this specification, the value of the approximate maximum diameter (maximum portion) of the through-hole 17 is indicated by W1, and the value of the approximate minimum diameter (minimum portion) is indicated by W2. The term "approximately" may be used in this specification. The word "approximately" means that there is a predetermined width within the upper or lower limit of a term with the prefix. Therefore, a term with the prefix "approximately" means that it includes its surrounding range in addition to the meaning or value of the term itself. For example, the approximate maximum and approximate minimum diameters of the through-hole respectively represent a portion of the maximum diameter and a portion of the minimum diameter of the through-hole and their surroundings. Figure 2 (a) through (e) are examples with the following characteristics. Figure 2 (a) shows an example where the diameter of the through-hole 17 continuously decreases in the film thickness direction of the membrane member 14. Furthermore, Figure 2 (b) shows an example of a region where the diameter continuously decreases from the middle of the through-hole 17 in the film thickness direction. Figure 2 (c) is an example of a value W1 that has a substantially maximum portion (maximum portion) in the middle of the through hole 17 in the film thickness direction and a substantially minimum portion (minimum portion) value W2 on the second flow path 16 side of the membrane member 14. Figure 2 (d) and Figure 2 (e) is an example of a value W2 having a roughly minimum location (minimum location) in the middle of the through-hole 17 in the film thickness direction. Figure 2 In (d), there is a value W1 at approximately the maximum location (maximum location) on the first flow path side of the through-hole 17, and in this embodiment, in Figure 2 In (e), there is a value W1 at approximately the maximum location (maximum location) on the second flow path side of through-hole 17. For example... Figure 2As shown in (e), the via 17 may have a value W2 of approximately minimum diameter (minimum portion) on the first flow path 12 side in the film thickness direction, and a value W1 of approximately maximum diameter (maximum portion) on the second flow path 16 side in the film thickness direction. The value W2 of approximately minimum diameter (minimum portion) of the via 17 is, for example, 50 μm or less, and in one embodiment, it may be 30 μm or less. Furthermore, the value W1 of approximately maximum diameter (maximum portion) of the via 17 is, for example, 1.1 times or more than W2. The ratio (W1 / W2) of approximately minimum diameter (minimum portion) value W2 to approximately maximum diameter (maximum portion) value W1 of the via 17 may be 1.1 or more, in one embodiment, it may be 1.1 or more and 3.0 or less, and in another embodiment, it may be 1.1 or more and 2.0 or less. Furthermore, it is desirable for the inner wall of the via 17 to have an inclination angle θ in the region where the diameter of the via 17 continuously decreases. Figure 2 As shown, the tilt angle θ is the angle between the inner wall of the through-hole 17 and the hole surface or a surface parallel to the hole surface on the second flow path 16 side of the through-hole 17. In one embodiment, the tilt angle can be an obtuse angle. The angle can be 135° or greater, and it is suitable if the angle is 150° or greater. By having such an angle, the flow path member 10 can support the adhesive 13 that has entered the through-hole 17 from the downstream side (second flow path 16 side). Therefore, it is possible to prevent excess adhesive that has entered the filter of the flow path member 10 through the through-hole 17 from peeling off and becoming foreign matter in the liquid. Note that the planar shape (shape of the opening) of the through-hole 17 can be, for example, quadrilateral or polygonal. In one embodiment, the planar shape can be circular. Furthermore, the tilt angle θ of the through-hole 17 may not be point-symmetric, and the tilt angles may be partially different.

[0020] Figure 3 This is an example showing the cross-sectional shape of the adhesive 13 in the through-hole 17. Figure 3 In the drawing, the first flow path 12 side of the membrane component 14 is the upper side, and the second flow path 16 side is the lower side. The through-hole 17 has a region where the diameter decreases in the film thickness direction of the membrane component 14, and the region including the approximate minimum diameter (minimum portion) of the through-hole 17 is blocked by adhesive 13. The adhesive 13 that has entered the interior of the through-hole 17 is supported from the downstream side (second flow path side) by the sloping portion of the region where the diameter decreases in the film thickness direction of the membrane component 14. Figure 3 As shown in (a) to (c), it is sufficient that the adhesive 13 in the through-hole 17 is supported from the downstream side (second flow path side) by a region where the diameter of the through-hole 17 continuously decreases in the film thickness direction of the membrane member 14. These are examples of values ​​W2 for approximately the minimum portion (minimum portion) of the diameter of the through-hole 17 on the surface of the membrane member 14 on the second flow path 16 side (downstream surface of the membrane member 14). Furthermore, as Figure 3 As shown in (d), the adhesive 13 in the through-hole 17 can be supported from the downstream side (second flow path 16 side) by a region whose diameter continuously decreases in the depth direction of the through-hole 17. In this case, as Figure 3 As shown in (d), the downstream side 19 (second flow path 16 side) of the approximate minimum diameter of the through-hole 17 (minimum portion) W2 does not need to be blocked by the adhesive 13. Furthermore, Figure 3 (e) is a configuration having a value W2 for the approximately minimum diameter of the upstream side (first flow path 12 side) of the through-hole 17 and a value W1 for the approximately maximum diameter of the downstream side (second flow path 16 side). Similarly, in this configuration, it is sufficient that the adhesive 13 in the through-hole 17 is supported from the downstream side (second flow path 16 side) by a region whose diameter continuously decreases in the depth direction of the through-hole 17. Furthermore, the bonding surface between the membrane member 14 and the first substrate 11 (not shown) can be as follows... Figure 3 As shown in (a) to (e), they are located on the upstream side (on the side of the first flow path 12), or as Figure 3 As shown in (f), it is located on the downstream side (second flow path 16 side). Even in cases such as Figure 3 In the case shown in (f), it is sufficient that the adhesive 13 in the through-hole 17 is supported from the downstream side by the region where the diameter of the through-hole 17 continuously decreases. Furthermore, as... Figure 3 As shown in (g), for the adhesive 13 that has entered the through-hole 17 of the membrane member 14, it is desirable that the film thickness A of the adhesive 13 in the depth direction of the through-hole 17 and the film thickness B of the membrane member satisfy A / B ≥ 1 / 3, and in one embodiment, A / B ≥ 1 / 2. Note that the film thickness A of the adhesive 13 is approximately the minimum (minimum) of the film thickness of the adhesive 13 that has entered the interior of the through-hole 17. In this case, since the area supported from the downstream side increases by utilizing the region where the diameter of the through-hole 17 continuously decreases in the film thickness direction of the membrane member 14, the adhesive 13 is further suppressed from being pushed out of the downstream side of the through-hole 17 by the liquid flow. Note that the film thickness B of the membrane member 14 can be, for example, 5 μm or less, and in one embodiment, it can be 3 μm or less.

[0021] As described above, the flow path component according to this disclosure includes: a first substrate having a first flow path; a second substrate having a second flow path and stacked on the first substrate; a membrane component disposed between the first substrate and the second substrate, the membrane component including a plurality of through holes allowing the first flow path and the second flow path to communicate with each other; and an adhesive bonding the first substrate and the membrane component, wherein liquid flows from the first flow path to the second flow path through the through holes, wherein the inner wall of the through holes includes a region whose diameter decreases from the first substrate side toward the second substrate side, and wherein at least one of the plurality of through holes is blocked by at least a portion of the adhesive that has entered the region. More specifically, the flow path component includes: a first substrate having a first flow path disposed thereon; a membrane component bonded to the first substrate via an adhesive to cover the first flow path; and a second substrate bonded to the first substrate via the membrane component and having a second flow path disposed thereon, wherein a through-hole is formed in the membrane component, the first flow path and the second flow path communicate with each other through the through-hole, and liquid flows from the first flow path to the second flow path, wherein the inner wall of the through-hole includes a region whose diameter decreases from the first substrate side toward the second substrate side, and wherein the through-hole is blocked by at least a portion of the adhesive that has entered the region.

[0022] Therefore, according to this disclosure, it is possible to provide a flow path component that prevents excess adhesive that has entered the through-holes of the filter of the flow path component from peeling off and becoming foreign matter in the liquid.

[0023] [Second Embodiment (Manufacturing Method of Flow Path Components)] Will use Figure 4 The manufacturing method of the flow path component according to the second embodiment of the present disclosure is described by cross-sectional views (a) to (g). The flow path component 10 can be manufactured according to... Figure 4 The manufacturing process is carried out according to the steps shown in (a) to (g).

[0024] like Figure 4 As shown in (a), a first substrate 11 having a first flow path 12 is prepared. For the first substrate 11, a single-crystal silicon substrate may be used, for example, and the thickness of the substrate is, for example, 725 μm.

[0025] like Figure 4 As shown in (b), a support substrate 18 is prepared, which has a film of a film member 14 formed on one surface thereon. For example, a monocrystalline silicon substrate can be used for the support substrate 18, and the substrate thickness is, for example, 725 μm. For example, in the film member 14, a material comprising a resin member such as polyimide, polyamide, polyamide-imide, or epoxy resin is formed on the support substrate 18. An adhesion improver (not shown) may be formed between the film member 14 and the support substrate 18. Note that, for example, a protective film (not shown), such as an oxide film or a nitride film, may be formed between the support substrate 18 and the film member 14.

[0026] like Figure 4 As shown in (c), a plurality of through-holes 17 are formed in the film member 14. The through-holes 17 are formed to penetrate the film member 14. The through-holes 17 are formed such that the inner wall of the through-holes 17 has a region whose diameter decreases toward the support substrate 18. The through-holes 17 can be formed by dry etching of the film member 14 using, for example, an etching mask (not shown) made of photoresist. In order to form the through-holes 17 of the above shape, in the case of dry etching, isotropic etching can be performed, for example, by setting the pressure during etching to a value of 20 Pa or more and 70 Pa or less. Furthermore, this can be achieved by making the etch selectivity ratio between the etching mask (not shown) and the film member 14 less than 1, and, for example, in one embodiment, the etch selectivity ratio can be less than 0.5. For example, oxygen can be used for the etching gas, or a mixture of oxygen and tetrafluoromethane can be used. After the through-holes 17 are formed, the etching mask (not shown) is removed. In the case that the etching mask is photoresist, the etching mask can be removed by, for example, treatment with a photoresist stripping solution.

[0027] like Figure 4 As shown in (d), adhesive 13 is applied to the surface of the first substrate 11. The adhesive 13 can be applied, for example, by dispensing, screen printing, or transferring the adhesive 13 formed as a dry film. For the adhesive 13, materials such as epoxy resin, acrylic resin, polyurethane, silicone, benzocyclobutene, polyimide, polyamide, polyamide-imide, cyanoacrylate, phenolic resin, melamine resin, styrene resin, cyclized rubber, or mixtures thereof can be used.

[0028] like Figure 4 As shown in (e), the first substrate 11 and the support substrate 18 on which the membrane member 14 is formed are aligned using alignment marks (not shown), such that a plurality of through holes 17 formed in the membrane member 14 are positioned directly above the first flow path 12.

[0029] Next, as Figure 4As shown in (f), a first substrate 11 and a support substrate 18 on which a membrane member 14 is formed are pressurized and joined, and brought into contact via an adhesive 13. Excess portions of the adhesive 13 protrude from the joining interface and enter at least one of the plurality of through-holes 17 of the membrane member 14. At this time, since the membrane member 14 is supported by the support substrate 18, the adhesive 13 entering the through-hole 17 blocks the through-hole 17. Because the through-hole 17 has a region whose diameter decreases towards the support substrate 18, the adhesive 13 easily enters the bottom of the through-hole 17, and the through-hole 17 is blocked by the adhesive 13. Next, the adhesive 13 is cured. In the case that the adhesive 13 is, for example, a thermosetting adhesive, heat treatment can be performed to cure the adhesive.

[0030] Next, as Figure 4 As shown in (g), the support substrate 18 is removed. Thus, a device can be manufactured as shown in (g). Figure 4 The flow path member 10 is shown in (g). Note that, in order to remove the support substrate 18, methods such as dry etching, wet etching, polishing, etc., can be used, and combinations of these methods can also be used. Next, by bonding the second substrate 15 having the second flow path 16 to the film member 14, for example, it can be manufactured as follows: Figure 1 The flow path member 10 is shown in (a). In the flow path member 10, the adhesive 13 that has entered the interior of the through-hole 17 blocks the region where the diameter decreases in the film thickness direction of the membrane member 14, and is supported from the downstream side (second flow path side) by its inclined portion. For this reason, the adhesive 13 that has entered the interior of the through-hole 17 is inhibited from flowing to the downstream side (second flow path side) of the membrane member 14.

[0031] As described above, the method for manufacturing a flow path component according to the present disclosure is a method for manufacturing a flow path component, comprising: preparing a first substrate having a first flow path; forming a membrane component on a support substrate, comprising forming a plurality of through holes in the membrane component having a region whose diameter decreases toward the support substrate; applying an adhesive to the first substrate and bonding the first substrate and the membrane component on the support substrate via the adhesive; curing the adhesive; and removing the support substrate, wherein, when bonding the membrane component, the through holes are blocked by at least a portion of the adhesive that has entered the region. More specifically, the method for manufacturing a flow path component according to the present disclosure is a method for manufacturing a flow path component, comprising: preparing a first substrate having a first flow path; preparing a support substrate and forming a membrane component on the support substrate; forming a plurality of through holes in the membrane component having a region whose diameter decreases toward the support substrate; applying an adhesive to the first substrate; bonding the first substrate and the membrane component via the adhesive, with the plurality of through holes facing the first flow path; curing the adhesive; and removing the support substrate, wherein, when bonding the membrane component, the through holes are blocked by at least a portion of the adhesive that has entered the region.

[0032] Therefore, according to this disclosure, a method for manufacturing a flow path component can be provided, which prevents excess adhesive that has entered the through-holes of the filter of the flow path component from peeling off and becoming foreign matter in the liquid.

[0033] [Third Embodiment (Liquid Injector)] Will use Figure 5The perspective view depicts a liquid jet head using a flow path component according to a third embodiment of the present disclosure. The liquid jet head 30 has a plurality of pressure chambers 23 respectively communicating with a plurality of injection ports 22, and a plurality of individual flow paths 24 respectively communicating with the plurality of pressure chambers 23. On the surfaces of the plurality of individual flow paths 24 facing the surfaces having pressure chambers, there is a common flow path 25 communicating with the plurality of individual flow paths 24 (the common flow path 25 corresponds to the second flow path 16 of the second substrate of the first embodiment). Furthermore, the liquid jet head 30 has a membrane component 14 bonded between the common flow path 25 and a groove 26 via an adhesive (not shown), wherein the groove 26 is covered by a membrane component extending along the array direction of the respective flow paths 24. In the liquid jet head 30, liquid (not shown) is supplied from a liquid supply flow path 27 (the liquid supply flow path 27 corresponds to the first flow path 12 of the first substrate of the first embodiment) through a plurality of through holes 17 formed in the membrane component 14. The liquid is filtered by passing through the through holes, passes through the common flow path 25, and is supplied to the pressure chambers 23 via the individual flow paths 24. The liquid jet head 30 displaces the vibrating plate 20 via a piezoelectric element 29, which is mounted via the vibrating plate 20 at a position facing the pressure chamber 23. Due to this displacement, the volume of the pressure chamber 23 changes, causing liquid to be ejected from the jet nozzle 22. The membrane member 14 serves as a damper to suppress the transmission of vibrations of the vibrating plate 20 through the liquid in the common flow path 25 to the adjacent pressure chamber 23 during liquid jetting, and also serves as a filter for filtering the liquid supplied from the liquid supply flow path 27 to the common flow path 25. In the liquid jet head 30 according to this embodiment, a flow path member 28 having a plurality of through holes 17 covering the liquid supply flow path 27 is bonded with an adhesive (not shown). The inner wall of the through holes 17 includes a region whose diameter decreases from the liquid supply flow path 27 side toward the common flow path 25 side (from the first flow path of the first substrate toward the second flow path of the second substrate). The through holes 17 then have a shape, for example, described in the first embodiment, and are blocked by adhesive that has entered at least a portion of the area of ​​the through holes 17. Therefore, the adhesive that has entered the interior of the through-hole 17 is supported from the downstream side (common flow path 25 side) by an inclined portion of the region whose diameter decreases in the membrane thickness direction of the membrane member 14. Thus, the adhesive that has entered the through-hole 17 is prevented from flowing downstream due to liquid flow. Furthermore, in the liquid jet head 30, even during recovery operations via pressurization and suction, the adhesive that has entered the through-hole 17 is prevented from flowing downstream (common flow path 25 side) for the same reason as described above. Therefore, the liquid jet head 30 can prevent liquid jetting failures caused by excess adhesive peeling off from the filter opening (through-hole 17) of the flow path member and becoming foreign matter in the liquid.

[0034] As described above, the liquid jet head of this disclosure includes: a plurality of jet nozzles; a first substrate having a first flow path; a second substrate having a second flow path communicating with the plurality of jet nozzles; a membrane member disposed between the first substrate and the second substrate, the membrane member including a plurality of through holes allowing the first flow path and the second flow path to communicate with each other; and an adhesive for bonding the first substrate and the membrane member, and the liquid jet head includes a flow path member for supplying liquid to flow from the first flow path to the second flow path via the through holes, wherein the inner wall of the through hole includes a region whose diameter decreases from the first substrate side toward the second substrate side, and wherein at least a portion of the through hole is blocked by at least a portion of the adhesive that has entered the region. More specifically, the liquid jet head disclosed herein is a liquid jet head comprising: a plurality of jet ports; a plurality of pressure chambers respectively communicating with the plurality of jet ports; a plurality of separate flow paths respectively communicating with the plurality of pressure chambers; and a flow path component in which a common flow path communicating with the plurality of separate flow paths, a liquid supply flow path for supplying liquid to the common flow path, and a membrane component having a plurality of through holes covering the liquid supply flow path and bonded with an adhesive are disposed on the opposing surfaces of the plurality of separate flow paths, wherein the inner wall of the through holes includes a region whose diameter decreases from the liquid supply flow path side toward the common flow path side, and wherein the through holes are blocked by adhesive that has entered at least a portion of the region.

[0035] Therefore, according to this disclosure, a liquid jet head can be provided that suppresses liquid jetting failures caused by excess adhesive peeling off from the opening (through hole) of the filter entering the flow path member and becoming foreign matter in the liquid.

[0036] [Example] (Example 1) Will use Figure 1 Describes a flow path component according to a first example of this disclosure.

[0037] The membrane component 14 of the flow path member has a membrane thickness of 3 μm and is made of polyimide. The smallest portion (approximately the smallest portion) of the diameter of the through-hole is located further downstream (second flow path side) than the largest portion (approximately the largest portion), and the smallest portion of the diameter of the through-hole is located at the most downstream part. The diameter of the largest portion of the through-hole is 40 μm, and the diameter of the smallest portion of the through-hole is 30 μm. The angle (θ) formed by the smallest portion and the inner wall of the through-hole is approximately 150°. In the multiple through-holes, in the openings at the corner portions of the filtration area, the adhesive blocks the through-holes with a thickness of approximately 2 μm. In the case where this flow path member is used as a filter for a liquid jet head, as described above, the adhesive that blocks the filter through-holes becomes the cause of liquid jet failure on the downstream side (second flow path side) of the filter, and serves as a filter. Therefore, according to this disclosure, a flow path substrate can be provided that prevents excess adhesive that has entered the through-holes of the filter of the flow path member from becoming foreign matter in the liquid on the downstream side (second flow path side) of the filter.

[0038] (Example 2) Regarding the manufacturing method of the flow path component according to the second embodiment of this disclosure, the flow path component is manufactured by means of, as Figure 4 The method shown in the second embodiment is similar to that used in the manufacturing process. The materials, dimensions, and other characteristics of the components in the flow path are the same as in Embodiment 1. Since the adhesive 13 that has entered the interior of the through hole 17 is supported from the downstream side (second flow path side) by the inclined portion of the region whose diameter decreases in the film thickness direction of the membrane component 14, the flow to the downstream side due to liquid flow is suppressed.

[0039] In the case where the flow path component in this example is used as a filter, as described above, the adhesive that suppresses the blockage of the filter orifice becomes the cause of liquid jetting failure on the downstream side (second flow path side) of the filter, and thus functions as a filter. Therefore, according to this disclosure, it is possible to provide a method for manufacturing a flow path component that suppresses excess adhesive that has entered the filter orifice of the flow path component from becoming foreign matter in the liquid downstream of the filter.

[0040] (Example 3) Will use Figure 5Describes a liquid jet head according to a third example of this disclosure. The liquid jet head 30 has a flow path member 28 as described in the third embodiment. The flow path member 28 has the configuration described in the first embodiment. With respect to the liquid jet head 30, after recovery through pressurization and suction treatment, liquid (not shown) is jetted. As a result of jetting, the liquid (not shown) is able to be jetted normally, and the adhesive blocking the through-holes of the filter is suppressed from becoming the cause of liquid jetting failure on the downstream side (second flow path side) of the filter. Therefore, according to this disclosure, a liquid jet head can be provided that suppresses excess adhesive that has entered the through-holes of the filter in the flow path member from becoming foreign matter in the liquid on the downstream side (second flow path side) of the filter.

[0041] While this disclosure has been described with reference to embodiments, it should be understood that this disclosure is not limited to the disclosed embodiments. The scope of the above claims should be given the broadest interpretation to cover all such modifications and equivalent structures and functions.

[0042] According to this disclosure, it is possible to prevent excess adhesive that has entered the through-holes of the filter in the flow path component from peeling off and becoming foreign matter in the liquid.

Claims

1. A flow path component, comprising: A first substrate having a first flow path; A second substrate having a second flow path and stacked on the first substrate; A membrane component disposed between the first substrate and the second substrate, the membrane component including a plurality of through holes that allow the first flow path and the second flow path to communicate with each other; as well as An adhesive that bonds the first substrate and the membrane component. The liquid flows from the first flow path to the second flow path through the through-hole. The inner wall of the through hole includes a region whose diameter decreases from the first substrate side toward the second substrate side, and, At least one of the plurality of through holes is blocked by adhesive that has entered at least a portion of the region.

2. The flow path component according to claim 1, wherein, The membrane component is a flexible membrane.

3. The flow path component according to claim 2, wherein, In the region where the diameter of the through hole decreases, the angle between the surface of the through hole and the inner wall is 150° or more.

4. The flow path component according to claim 3, wherein, In the region where the diameter of the through hole decreases, the location of the smallest diameter part is the part adjacent to the second flow path side of the through hole.

5. The flow path component according to claim 4, wherein, In the region where the diameter of the through hole decreases, the diameter of the smallest part is less than 30 μm.

6. The flow path component according to claim 1, wherein, The ratio of the diameter of the largest part of the through hole, W1, to the diameter of the smallest part, W2, i.e., W1 / W2, is 1.1 or more.

7. The flow path component according to claim 6, wherein, The ratio of the diameter of the largest part of the through hole, W1, to the diameter of the smallest part, W2, i.e., W1 / W2, is greater than 1.1 and less than 3.

0.

8. The flow path component according to claim 1, wherein, If the thickness of the adhesive entering the through hole is A, and the thickness of the membrane component is B, then A / B ≥ 1 / 3 is satisfied.

9. The flow path component according to claim 8, wherein, The membrane thickness of the membrane component is less than 3 μm.

10. The flow path component according to claim 9, wherein, The membrane component is polyimide.

11. A method for manufacturing a flow path component, comprising: Prepare a first substrate having a first flow path; A membrane component is formed on a support substrate, comprising forming a plurality of through holes in the membrane component having a region whose diameter decreases toward the support substrate; An adhesive is applied to the first substrate, and the membrane component on the first substrate and the support substrate is attached via the adhesive; Curing the adhesive; as well as Remove the support substrate. During the application of the membrane component, the through-hole is blocked by adhesive that has already entered at least a portion of the area.

12. The method for manufacturing a flow path component according to claim 11, wherein, The step of forming multiple vias is performed using an etching mask, and in the case of forming multiple vias, the etching selectivity ratio between the etching mask and the film component is 0.5 or less.

13. A liquid injection head, comprising: Multiple injection nozzles; A first substrate having a first flow path; The second substrate includes a second flow path communicating with the plurality of injection ports; A membrane component disposed between the first substrate and the second substrate, the membrane component including a plurality of through holes that allow the first flow path and the second flow path to communicate with each other; as well as An adhesive that bonds the first substrate and the membrane component. The liquid injection head includes a flow path component for supplying liquid to flow from the first flow path to the second flow path via the through-hole, wherein, The inner wall of the through hole includes a region whose diameter decreases from the first substrate side to the second substrate side, and, At least a portion of the through holes are blocked by adhesive that has already entered at least a portion of the area.

14. The liquid injection head according to claim 13, wherein, The through-hole blocked by the adhesive is a through-hole located at a corner of the area where the through-hole is arranged.

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