Single crystal furnace and furnace loading method

Abstract

The application relates to the technical field of single crystal furnaces, in particular to a single crystal furnace and a furnace loading method.The single crystal furnace comprises a furnace body, the furnace body comprises an upper furnace cylinder and a lower furnace cylinder which are connected in a separable mode, and a main chamber is formed by the communication between the inside of the lower furnace cylinder and the inside of the upper furnace cylinder; a heat preservation barrel is arranged in the main chamber in a vertical direction, a supporting ring which protrudes outward in a circumferential direction of the heat preservation barrel is arranged on the heat preservation barrel, and the supporting ring is higher than the joint of the upper furnace cylinder and the lower furnace cylinder; a turnover plate mechanism is arranged on the outer wall of the upper furnace cylinder, the turnover plate mechanism comprises a driving piece and a turnover plate body, and the other end of the turnover plate body is provided with a lifting plate.The single crystal furnace is turned over by the driving piece to drive the turnover plate body, so that the lifting plate and the supporting ring are matched, the heat preservation barrel and the upper furnace cylinder can be lifted or moved together, the problems of poor consistency, high operation strength and easy interference of the mechanism in the manual installation during the disassembly and assembly of the single crystal furnace are solved, the accuracy of the installation position is guaranteed, the disassembly and assembly efficiency of the furnace is improved, and the single crystal furnace is suitable for large-scale production.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of single crystal furnace, in particular to a single crystal furnace and a furnace loading method. BACKGROUND

[0002] At present, the lifting and installation of the heat preservation barrel in the installation process of the single crystal furnace are mainly completed by manual operation or semi-mechanical auxiliary mode. When the manual operation is performed, the installation height and angle of the heat preservation barrel are easily affected by the operation experience, the consistency is poor, and the stability of the thermal field environment of the single crystal furnace is difficult to guarantee, thereby directly affecting the crystal formation yield. Meanwhile, in the furnace dismounting and loading process, the heat preservation barrel needs to be carried and lifted by a large number of manual intervention, which not only has a large labor intensity, but also has the risks of knocking, installation deviation and the like. Although some auxiliary equipment is used for lifting the heat preservation barrel, the auxiliary equipment is easily interfered in the lifting process, has poor versatility, and also cannot realize stable automatic positioning. Therefore, the existing manual or auxiliary equipment structure cannot simultaneously solve the problems of installation consistency, operation intensity and furnace body adaptability in the furnace dismounting and loading process, thereby restricting the further improvement of the furnace loading efficiency and process stability of the single crystal furnace. SUMMARY

[0003] The purpose of the present application is to solve the problems of poor manual installation consistency, high operation intensity and easy interference of the mechanism in the dismounting and loading process of the single crystal furnace by providing a single crystal furnace and a furnace loading method, guarantee the accuracy of the installation position, improve the dismounting and loading efficiency, and adapt to large-scale production.

[0004] In order to solve at least one of the above technical problems, the present application adopts the following technical scheme:

[0005] According to a first aspect of the present application, a single crystal furnace is provided, which comprises a furnace body, the furnace body comprising an upper furnace cylinder and a lower furnace cylinder which are separably connected, and a main chamber formed in communication between the inside of the lower furnace cylinder and the inside of the upper furnace cylinder; a heat preservation barrel arranged in the main chamber in a vertical direction, the heat preservation barrel being provided with a support ring protruding outward in a circumferential direction thereof, the support ring being higher than the connection position of the upper furnace cylinder and the lower furnace cylinder; and a flap mechanism arranged on the outer wall of the upper furnace cylinder, the flap mechanism comprising a driving member and a flap body, the driving member being arranged on the outer wall of the upper furnace cylinder and connected with the flap body, one end of the flap body being hinged to the outer wall of the upper furnace cylinder and the other end of the flap body being provided with a lifting plate, the driving member being used to drive the flap body to turn over, so that the lifting plate enters the main chamber from below the upper furnace cylinder and is located below the support ring, or the lifting plate is moved to the outside of the upper furnace cylinder from below the upper furnace cylinder.

[0006] In one possible implementation of the first aspect described above, the furnace body further includes: a first mounting bracket, one end of which is disposed on the outer wall of the upper furnace cylinder and the other end of which is hinged to the end of the drive member away from the flip plate body via a first shaft; a second mounting bracket, located below the first mounting bracket, one end of which is disposed on the outer wall of the upper furnace cylinder and the other end of which is hinged to the flip plate body via a second shaft; the first shaft is arranged in a horizontal direction and is parallel or tangent to the outer side of the upper furnace cylinder corresponding to it, the first shaft and the second shaft are parallel, the drive member is arranged along the axial direction of the upper furnace cylinder and the end of which is away from the first mounting bracket is hinged to the flip plate body.

[0007] In one possible implementation of the first aspect described above, the flip-plate mechanism further includes: a first ear block disposed on the lower surface of the flip-plate body and hinged to a second mounting bracket via a second shaft; a second ear block disposed on the upper surface of the flip-plate body and hinged to a drive member via a third shaft; the flip-plate body is perpendicular to the lifting plate, and the lifting plate extends axially along the second shaft; there are two symmetrically arranged first ear blocks, and a third ear block is disposed on the second mounting bracket, the third ear block being located between the two first ear blocks, and the two first ear blocks and the third ear block being hinged to each other via the second shaft.

[0008] In one possible implementation of the first aspect mentioned above, the end of the lifting plate away from the flip plate body is provided with an arc-shaped surface that matches the shape of the outer wall of the insulated barrel.

[0009] In one possible implementation of the first aspect above, a reinforcing plate is provided at the connection between the flip-up body and the lifting plate, the reinforcing plate being perpendicular to the flip-up body and the lifting plate and connected to the flip-up body and the lifting plate respectively.

[0010] In one possible implementation of the first aspect described above, the bottom of the upper furnace cylinder is provided with a first flange extending outward in its circumference, and the top of the lower furnace cylinder is provided with a second flange extending outward in its circumference, the first flange and the second flange being detachably connected.

[0011] In one possible implementation of the first aspect mentioned above, the insulated barrel includes an insulated barrel body, an insulation layer is provided on the outside of the insulated barrel body, and a crucible hole is provided at the bottom inside the insulated barrel body.

[0012] In one possible implementation of the first aspect described above, the insulated bucket includes a main body and a contraction section connected above the main body, wherein the inner diameter of the contraction section is smaller than the inner diameter of the main body.

[0013] In one possible implementation of the first aspect mentioned above, the flipping mechanism consists of multiple flaps evenly distributed along the circumference of the upper furnace cylinder, and the outer side of the support ring is provided with multiple outwardly extending protrusions along its circumference, with each protrusion corresponding to a lifting plate; the support ring divides the heat preservation barrel into upper and lower parts.

[0014] According to a second aspect of this application, a method for loading a single crystal furnace, applied to the single crystal furnace of the first aspect of this application, includes at least the following steps:

[0015] The upper furnace cylinder is hoisted upwards to the position above the insulation barrel, and then the upper furnace cylinder is lowered so that the insulation barrel gradually enters the upper furnace cylinder;

[0016] When the upper furnace cylinder descends to the preset height, the driving component of the flipping mechanism drives the flipping body to flip, so that the lifting plate on the flipping mechanism enters the main chamber from below the upper furnace cylinder and is located below the support ring of the insulation barrel.

[0017] Then lift the upper furnace cylinder upwards. Once the lifting plate abuts against the support ring, lift the upper furnace cylinder and the insulation barrel together.

[0018] Then the upper furnace cylinder and the insulation barrel are hoisted to the upper furnace cylinder above the corresponding lower furnace cylinder, and then the upper furnace cylinder and the insulation barrel are lowered.

[0019] When the insulation bucket enters the lower furnace cylinder and its bottom abuts against the bottom wall of the lower furnace cylinder, the driving component drives the flap body to flip, so that the lifting plate moves from below the upper furnace cylinder to outside the upper furnace cylinder.

[0020] Then continue lowering the upper furnace cylinder until its bottom abuts against the top of the lower furnace cylinder, and then connect the upper and lower furnace cylinders to complete the furnace loading.

[0021] The above-mentioned technical solution of this application has at least one of the following beneficial effects:

[0022] According to the single crystal furnace of this application, the furnace body includes a separable upper furnace cylinder and a lower furnace cylinder, the lower furnace cylinder communicating with the upper furnace cylinder to form a main chamber; a heat preservation barrel, on which a support ring protrudes outward along its circumference; and a flipping mechanism, disposed on the outer wall of the upper furnace cylinder, the flipping mechanism including a driving component and a flipping body, the driving component being disposed on the outer wall of the upper furnace cylinder and connected to the flipping body, one end of the flipping body being hinged to the outer wall of the upper furnace cylinder and the other end being provided with a lifting plate. By flipping the flipping body with the driving component, the lifting plate can enter the main chamber from below the upper furnace cylinder and be positioned below the corresponding support ring, thereby allowing the upper furnace cylinder and the heat preservation barrel to rise and move together, achieving precise uniformity of the installation position and angle of the heat preservation barrel, eliminating human operation errors, and significantly improving working stability and crystallization yield; at the same time, this application eliminates the need for manual handling and positioning of the heat preservation barrel, greatly reducing the labor intensity of furnace disassembly and assembly operations, and reducing the risk of bumps and work-related injuries. In addition, the flipping mechanism can avoid the furnace structure during the loading process and is well adapted to the installation space of the single crystal furnace, without the need for large-scale modification of the furnace body, resulting in low installation costs. During the assembly and disassembly of the single crystal furnace, it ensures the accuracy of the installation position, effectively shortens the installation time of the insulation barrel, improves the efficiency of furnace assembly and disassembly, and is suitable for large-scale production.

[0023] In addition, unless otherwise specified in the technical solution of this application, the technical solution can be implemented by conventional means in the field. Attached Figure Description

[0024] To more clearly illustrate the technical solutions in the specific embodiments of this application or the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0025] Figure 1 This is a schematic diagram of the structure of a single crystal furnace according to one embodiment of this application;

[0026] Figure 2 This is a schematic diagram of the structure of a single crystal furnace after loading, according to one embodiment of this application.

[0027] Figure 3 This is a partial structural schematic diagram of a single crystal furnace according to one embodiment of this application;

[0028] Figure 4 This is a front view of the main body of the flip panel according to one embodiment of this application;

[0029] Figure 5 This is a top view of the main body of the flip panel according to one embodiment of this application;

[0030] Figure 6 This is a side view of the main body of the flip panel according to one embodiment of this application;

[0031] Figure 7 This is a schematic diagram of the support ring according to one embodiment of this application;

[0032] Figure 8 This is a cross-sectional view of an insulated bucket according to one embodiment of this application;

[0033] Figure 9 This is a flowchart of a single crystal furnace loading method according to one embodiment of this application.

[0034] Explanation of the labels in the attached drawings:

[0035] 100. Furnace body; 110. Upper furnace cylinder; 111. First flange; 120. Lower furnace cylinder; 121. Second flange; 130. Main chamber; 140. First mounting bracket; 141. First shaft; 150. Second mounting bracket; 151. Second shaft; 152. Third lug;

[0036] 200. Insulated container; 210. Support ring; 211. Protrusion; 220. Main body of the insulated container; 230. Insulation layer; 240. Crucible hole; 250. Main body; 260. Shrinkage section;

[0037] 300. Flip-up mechanism; 310. Driving component; 320. Flip-up body; 330. Lifting plate; 340. First ear block; 350. Second ear block; 360. Reinforcing plate. Detailed Implementation

[0038] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only some, not all, of the embodiments of this application, and are used merely to explain this application and are not intended to limit it. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0039] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "front," "rear," "vertical," "horizontal," "inner," "outer," "both ends," "both sides," "bottom," and "top," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the elements referred to must have a specific orientation or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. In addition, the terms "first," "second," "upper-level," "lower-level," "main," and "secondary," etc., are used for descriptive purposes only and can be simply used to more clearly distinguish different components, and should not be construed as indicating or implying relative importance.

[0040] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, or integral molding; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to the internal communication between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0041] Please refer to Figure 1 and Figure 2The diagram schematically illustrates a single-crystal furnace according to an embodiment of this application, comprising: a furnace body 100, a heat-insulating barrel 200, and a flipping mechanism 300. The furnace body 100 includes a detachably connected upper furnace cylinder 110 and a lower furnace cylinder 120, with the lower furnace cylinder 120 communicating with the upper furnace cylinder 110 to form a main chamber 130. The heat-insulating barrel 200 is vertically disposed within the main chamber 130, and a support ring 210 protruding outwards along its circumference is provided on the heat-insulating barrel 200, the support ring 210 being higher than the connection point between the upper furnace cylinder 110 and the lower furnace cylinder 120. The flipping mechanism 300 is disposed on the outer wall of the upper furnace cylinder 110, and the flipping mechanism 300 includes a driving member 310 and a flipping plate. The main body 320 and the driving component 310 are disposed on the outer wall of the upper furnace cylinder 110 and connected to the flip plate main body 320. One end of the flip plate main body 320 is hinged to the outer wall of the upper furnace cylinder 110 and the other end is provided with a lifting plate 330. The driving component 310 is used to drive the flip plate main body 320 to flip so that the lifting plate 330 enters the main chamber 130 from below the upper furnace cylinder 110 and is located below the support ring 210, or moves the lifting plate 330 from below the upper furnace cylinder 110 to outside the upper furnace cylinder 110.

[0042] This design allows the flip plate body 320 to be flipped by the drive component 310, causing the lifting plate 330 to flip and cooperate with the support ring 210. This enables the insulation container 200 to move synchronously when the upper furnace cylinder 110 is raised, lowered, or moved, eliminating the need for manual handling and positioning of the insulation container 200. This significantly reduces the labor intensity of furnace assembly and disassembly operations and minimizes the risk of bumps and work-related injuries. Furthermore, the cooperation between the flip plate mechanism 300 and the support ring 210 ensures precise and uniform installation position and angle of the insulation container 200, eliminating human error and improving operational stability and crystal yield. Simultaneously, the flip plate mechanism 300 avoids the structure of the furnace body 100 during furnace loading, adapting well to the installation space of the single crystal furnace without requiring large-scale modifications to the furnace body 100, resulting in low installation costs. During the assembly and disassembly of the single crystal furnace, the installation time of the insulation container 200 is effectively shortened, solving the problems of poor consistency, high labor intensity, and easy interference of manual installation. This ensures the accuracy of the installation position, improves the efficiency of furnace assembly and disassembly, and adapts to large-scale production.

[0043] In some embodiments, please refer to Figure 1 , Figure 2 and Figure 3As shown, the furnace body 100 further includes: a first mounting bracket 140, one end of which is disposed on the outer wall of the upper furnace cylinder 110 and the other end of which is hinged to the end of the drive member 310 away from the flip plate body 320 via a first shaft 141; a second mounting bracket 150, located below the first mounting bracket 140, one end of which is disposed on the outer wall of the upper furnace cylinder 110 and the other end of which is hinged to the flip plate body 320 via a second shaft 151; the first shaft 141 is arranged in a horizontal direction and is parallel or tangent to the outer side of the upper furnace cylinder 110 corresponding to it, the first shaft 141 and the second shaft 151 are parallel, the drive member 310 is arranged in an axial direction of the upper furnace cylinder 110 and the end of which is away from the first mounting bracket 140 is hinged to the flip plate body 320.

[0044] The first mounting bracket 140 and the second mounting bracket 150 construct a linkage hinge system between the drive component 310, the flap body 320, and the outer wall of the upper furnace cylinder 110. The first shaft 141 is horizontal and parallel or tangential to the outer side of the upper furnace cylinder 110, while the second shaft 151 is parallel to it, ensuring that the flap body 320 and the lifting plate 330 always move along a predetermined trajectory during opening and closing, improving the smoothness and reliability of the mechanism's movement. The drive component 310 can be a hydraulic cylinder, a pneumatic cylinder, or an electric cylinder, with the output end of the hydraulic cylinder, pneumatic cylinder, or electric cylinder facing downwards.

[0045] This design ensures precise and smooth opening and closing of the flap mechanism 300, guarantees synchronous rotation at both ends of the flap body 320, effectively eliminates lateral torque, and extends the service life of the hinge and drive components 310. The axially arranged drive component 310 reduces lateral space occupation, facilitating the arrangement and maintenance of other equipment around the furnace body 100. The first mounting bracket 140 and the second mounting bracket 150 can be directly adapted to existing mature single crystal furnace equipment without requiring destructive modifications or redesign of the main structure of the furnace body 100, greatly reducing the difficulty of equipment modification. By fully utilizing the reserved space and assembly interfaces on the outer wall of the general single crystal furnace, the entire installation process involves only local welding or bolt fixing, resulting in a small workload, short cycle, and no change to the original stress balance and thermal field distribution characteristics of the furnace body 100. This effectively controls modification costs and implementation risks while improving equipment functionality, facilitating large-scale promotion and application on existing production lines.

[0046] In some embodiments, please refer to Figures 3-6 As shown, the flip-plate mechanism 300 further includes: a first lug 340, disposed on the lower surface of the flip-plate body 320 and hinged to the second mounting bracket 150 via a second shaft 151; a second lug 350, disposed on the upper surface of the flip-plate body 320 and hinged to the drive member 310 via a third shaft; the flip-plate body 320 is perpendicular to the lifting plate 330, and the lifting plate 330 extends axially along the second shaft 151. The first lug 340 is provided with a hole for connecting to the second shaft 151, and the second lug 350 is provided with a hole for connecting to the third shaft.

[0047] As such, the first ear block 340 is located on the lower surface and is hinged to the fixed mounting bracket via the second shaft 151, serving as a fixed fulcrum for the rotation of the flip plate body 320; the second ear block 350 is hinged to the drive component 310 via the third shaft. Simultaneously, the flip plate body 320 is perpendicular to the lifting plate 330, and the lifting plate 330 extends axially along the second shaft 151. When the flip plate body 320 flips to its final point, it is perpendicular to the horizontal plane, while the lifting plate 330 is horizontal. The lifting plate 330 can achieve a large contact area when engaging with the support ring 210, maintaining a stable upward supporting torque on the support ring 210 and the insulation container 200, ensuring the smooth completion of subsequent material transfer or unloading operations.

[0048] In some embodiments, please refer to Figures 4-6 As shown, there are two first ear blocks 340 arranged symmetrically, and a third ear block 152 is provided on the second mounting bracket 150. The third ear block 152 is located between the two first ear blocks 340, and the two first ear blocks 340 and the third ear block 152 are hinged together by the second shaft 151.

[0049] Therefore, a third ear block 152 is positioned between two symmetrical first ear blocks 340. The third ear block 152 has a hole for the second shaft 151 to pass through. Each first ear block 340 has a hole for connecting to the second shaft 151. The two first ear blocks 340 and the third ear block 152 are hinged together via the second shaft 151, aiming to create a stable hinged structure. This symmetrical layout allows the connection load between the flap body 320 and the second mounting bracket 150 to be evenly transferred to the middle third ear block 152 through the two first ear blocks 340, effectively eliminating the eccentric moment that may be generated by unilateral hinges, improving the load-bearing capacity and torsional resistance of the connection, reducing wear and gap widening at the hinge, and extending the maintenance cycle.

[0050] In some embodiments, please refer to Figure 5 and Figure 6 As shown, the end of the lifting plate 330 away from the flip plate body 320 is provided with an arc-shaped surface that matches the shape of the outer wall of the insulated bucket 200.

[0051] Therefore, the purpose of the curved surface is to ensure that when the flipping mechanism 300 is in the supporting state, the end of the lifting plate 330 can penetrate as deeply as possible into the interior of the main chamber 130, making the contact area between the lifting plate 330 and the support ring 210 sufficiently large. This improves the stability of the lifting action, reduces the load on the lifting plate 330, and thus extends the service life of the flipping mechanism 300. The curved surface also allows the lifting plate 330 to obtain the maximum contact area and the best avoidance effect when approaching the insulation barrel 200. This ensures that the lifting plate 330 can smoothly extend into or approach the working area of ​​the insulation barrel 200, while avoiding mechanical interference with the barrel wall, thus ensuring the smooth completion of subsequent material receiving or unloading actions.

[0052] In some embodiments, please refer to Figures 3-6 As shown, a reinforcing plate 360 ​​is provided at the connection between the flip plate body 320 and the lifting plate 330. The reinforcing plate 360 ​​is perpendicular to the flip plate body 320 and the lifting plate 330 respectively and is connected to the flip plate body 320 and the lifting plate 330 respectively.

[0053] Due to the combined effects of material gravity, impact loads, and the opening and closing inertia of the flap mechanism 300, bending deformation or fatigue cracking may occur at the connection between the flap body 320 and the support plate 330. This application addresses this by adding a reinforcing plate 360 ​​at the connection between the flap body 320 and the support plate 330, effectively creating a triangular support rib. This transfers the vertical load borne by the flap body 320 to the support plate 330, while simultaneously transferring the lateral resistance of the support plate 330 back to the flap body 320, thereby improving the bending section modulus and structural stiffness of the connection. Furthermore, given the high operating temperature of the single crystal furnace, the reinforcing plate 360 ​​also prevents permanent deformation of the flap body 320 and the support plate 330 due to thermal creep or repeated loading under long-term high-temperature conditions.

[0054] In some embodiments, please refer to Figure 1 and Figure 2 As shown, the bottom of the upper furnace cylinder 110 is provided with a first flange 111 extending outward along its circumference, and the top of the lower furnace cylinder 120 is provided with a second flange 121 extending outward along its circumference. The first flange 111 and the second flange 121 are detachably connected.

[0055] With this configuration, at the connection between the upper furnace cylinder 110 and the lower furnace cylinder 120, the first flange 111 and the second flange 121 cooperate to ensure the sealing between the upper furnace cylinder 110 and the lower furnace cylinder 120 during the operation of the single crystal furnace after the upper furnace cylinder 110 is attached to the lower furnace cylinder 120 to complete the furnace loading process, thereby reducing the energy consumption of the device and ensuring the working stability of the single crystal furnace.

[0056] In some embodiments, please refer to Figure 8As shown, the insulated barrel 200 includes an insulated barrel body 220, an insulation layer 230 is provided on the outside of the insulated barrel body 220, and a crucible hole 240 is provided at the bottom inside the insulated barrel body 220.

[0057] Therefore, the main body 220 of the insulation tank is primarily used to support the entire structure of the insulation tank 200. The material of the main body 220 can be a carbon-carbon composite material, which, with its excellent high-temperature strength, creep resistance, and dimensional stability, serves as the main support structure to ensure that the entire insulation tank 200 does not collapse or deform during long-term thermal cycling. The insulation layer 230 can be made of adhesive-based soft felt, utilizing its extremely low thermal conductivity and good adhesion to minimize the outward conduction of heat from the main chamber 130. The synergistic cooperation of the main body 220 and the insulation layer 230 leverages both the structural support advantages of the carbon-carbon composite material and the thermal insulation properties of the soft felt material. This significantly improves the thermal insulation performance of the thermal field while ensuring the high-temperature structural reliability of the furnace body 100, thereby effectively reducing heating power consumption, improving temperature uniformity, and extending the service life of the equipment under harsh operating conditions. It should be noted that the crucible hole 240 is used for the support rod to pass through. The support rod extends upward from the lower furnace cylinder 120 through the crucible hole 240 into the heat preservation barrel 200. A quartz crucible is set on the top of the support rod. The corresponding driving device drives the support rod to rotate and lift, so that the quartz crucible rotates and lifts. The support rod, quartz crucible and driving device can adopt the existing single crystal furnace mechanism, which will not be described in detail here.

[0058] In some embodiments, please refer to Figure 8 As shown, the insulated bucket 200 includes a main body 250 and a shrinkable part 260 connected above the main body 250. The inner diameter of the shrinkable part 260 is smaller than the inner diameter of the main body 250.

[0059] This design allows the reduced inner diameter of the contraction section 260 to concentrate the high-temperature gas on the key heating zone or crystal growth interface within the upper furnace cylinder 110. At the same time, the step formed by the contraction section 260 provides physical barrier, which effectively inhibits excessive heat diffusion to the upper non-working area, reduces heat loss at the furnace opening, and thus improves the controllability of the axial temperature gradient in the furnace and the uniformity of the thermal field, which is beneficial to the stability of crystal growth or heat treatment processes.

[0060] In some embodiments, please refer to Figure 1 , Figure 2 and Figure 7 As shown, the flipping mechanism 300 consists of multiple components evenly distributed along the circumference of the upper furnace cylinder 110. The outer side of the support ring 210 is provided with multiple outwardly extending protrusions 211 along its circumference, and the protrusions 211 correspond one-to-one with the lifting plate 330. The support ring 210 divides the heat preservation barrel 200 into upper and lower parts.

[0061] As such, the protrusion 211 is located on the outside of the insulation bucket 200, and the protrusion 211 corresponds one-to-one with the lifting plate 330, thus facilitating the cooperation between the protrusion 211 and the lifting plate 330 to lift the entire insulation bucket 200. The entire support ring 210 is set inside the wall of the insulation bucket 200, and the support ring 210 divides the insulation bucket 200 into upper and lower parts. The upper and lower parts of the insulation bucket 200 clamp the insulation bucket 200 to form a stable integrated structure, so that while the lifting plate 330 lifts the protrusion 211, the support ring 210 is lifted upward stably in its radial direction by a lifting force.

[0062] In some embodiments, please refer to Figure 9 As shown, a method for loading a single crystal furnace according to an embodiment of this application is also provided, applied to the single crystal furnace described above. The method for loading a single crystal furnace according to this application includes at least the following steps:

[0063] S1: Hoist the upper furnace cylinder 110 upwards to the position above the insulation barrel 200, and then lower the upper furnace cylinder 110 so that the insulation barrel 200 gradually enters the upper furnace cylinder 110;

[0064] S2: When the upper furnace cylinder 110 descends to the preset height, the driving component 310 of the flipping mechanism 300 drives the flipping body 320 to flip, so that the lifting plate 330 on the flipping mechanism 300 enters the main chamber 130 from below the upper furnace cylinder 110 and is located below the support ring 210 of the heat preservation barrel 200.

[0065] S3: Then lift the upper furnace cylinder 110 upwards. After the lifting plate 330 abuts against the support ring 210, lift the upper furnace cylinder 110 and the insulation barrel 200 together.

[0066] S4: Then hoist the upper furnace cylinder 110 and the insulation barrel 200 to the upper furnace cylinder 120 above it, and then lower the upper furnace cylinder 110 and the insulation barrel 200.

[0067] S5: When the heat preservation barrel 200 enters the lower furnace cylinder 120 and its bottom abuts against the bottom wall inside the lower furnace cylinder 120, the driving component 310 drives the flip plate body 320 to flip, so that the lifting plate 330 moves from below the upper furnace cylinder 110 to outside the upper furnace cylinder 110.

[0068] S6: Then continue to lower the upper furnace cylinder 110 so that the bottom of the upper furnace cylinder 110 abuts against the top of the lower furnace cylinder 120, and then connect the upper furnace cylinder 110 and the lower furnace cylinder 120 to complete the furnace loading.

[0069] Therefore, the furnace loading method of this application for single crystal furnace solves the problems of poor consistency in manual installation, high labor intensity, and easy interference of mechanisms during the assembly process of single crystal furnace, ensuring the accuracy of the installation position, improving the furnace loading efficiency, and adapting to large-scale production. Furthermore, the furnace dismantling method for single crystal furnace is based on the same principle as the furnace loading method described above, and will not be repeated here.

[0070] Based on the various embodiments of this application described above, in the absence of explicit denial or conflict, the technical features of one embodiment may be advantageously combined with one or more other embodiments.

[0071] The above are merely some embodiments of this application, used only to illustrate the technical solution of this application, and not to limit it. It should be understood that those skilled in the art can make improvements or substitutions based on the above description without departing from the inventive concept of this application, and all such improvements and substitutions should fall within the protection scope of this application. In this case, all details can be replaced with equivalent elements, and the materials, shapes, and sizes can also be arbitrary.

Claims

1. A single crystal furnace, characterized in that, include: The furnace body (100) includes a separable upper furnace cylinder (110) and a lower furnace cylinder (120), the lower furnace cylinder (120) communicating with the upper furnace cylinder (110) to form a main chamber (130). A heat preservation barrel (200) is set vertically inside the main chamber (130). A support ring (210) protruding outward along its circumference is provided on the heat preservation barrel (200). The support ring (210) is higher than the connection between the upper furnace cylinder (110) and the lower furnace cylinder (120). A flipping mechanism (300) is provided on the outer wall of the upper furnace cylinder (110). The flipping mechanism (300) includes a driving member (310) and a flipping body (320). The driving member (310) is provided on the outer wall of the upper furnace cylinder (110) and connected to the flipping body (320). One end of the flipping body (320) is hinged to the outer wall of the upper furnace cylinder (110) and the other end is provided with a lifting plate (330). The driving member (310) is used to drive the flipping body (320) to flip so that the lifting plate (330) enters the main chamber (130) from below the upper furnace cylinder (110) and is located below the support ring (210), or moves the lifting plate (330) from below the upper furnace cylinder (110) to outside the upper furnace cylinder (110).

2. A single crystal furnace according to claim 1, characterized in that, The furnace body (100) also includes: The first mounting bracket (140) has one end disposed on the outer wall of the upper furnace cylinder (110) and the other end of it is hinged to the end of the drive member (310) away from the flip plate body (320) via a first shaft (141); The second mounting bracket (150) is located below the first mounting bracket (140). One end of the second mounting bracket (150) is disposed on the outer wall of the upper furnace cylinder (110), and the other end is hinged to the flap body (320) through the second shaft (151). The first shaft (141) is arranged in the horizontal direction and is parallel or tangent to the outer side of the corresponding upper furnace cylinder (110). The first shaft (141) and the second shaft (151) are parallel. The drive member (310) is arranged along the axial direction of the upper furnace cylinder (110) and its end away from the first mounting bracket (140) is hinged to the flip plate body (320).

3. A single crystal furnace according to claim 2, characterized in that, The flip-up mechanism (300) also includes: The first ear block (340) is disposed on the lower surface of the flap body (320) and is hinged to the second mounting bracket (150) via the second shaft (151); The second ear block (350) is disposed on the upper surface of the flap body (320) and is hinged to the drive member (310) via a third axis; The flap body (320) is perpendicular to the lifting plate (330), and the lifting plate (330) extends along the axial direction of the second axis (151); The first ear block (340) is two symmetrically arranged, and the second mounting bracket (150) is provided with a third ear block (152). The third ear block (152) is located between the two first ear blocks (340), and the two first ear blocks (340) and the third ear block (152) are hinged through the second shaft (151).

4. A single crystal furnace according to claim 3, characterized in that, The lifting plate (330) has an arc-shaped surface at one end away from the flip plate body (320) that matches the shape of the outer wall of the insulated bucket (200).

5. A single crystal furnace according to claim 4, characterized in that, A reinforcing plate (360) is provided at the connection between the flip plate body (320) and the lifting plate (330). The reinforcing plate (360) is perpendicular to the flip plate body (320) and the lifting plate (330) respectively and is connected to the flip plate body (320) and the lifting plate (330) respectively.

6. A single crystal furnace according to claim 1, characterized in that, The bottom of the upper furnace cylinder (110) is provided with a first flange (111) extending outward along its circumference, and the top of the lower furnace cylinder (120) is provided with a second flange (121) extending outward along its circumference. The first flange (111) and the second flange (121) are detachably connected.

7. A single crystal furnace according to claim 1, characterized in that, The insulated bucket (200) includes an insulated bucket body (220), an insulation layer (230) is provided on the outside of the insulated bucket body (220), and a crucible hole (240) is provided at the bottom inside the insulated bucket body (220).

8. A single crystal furnace according to claim 1, characterized in that, The insulated bucket (200) includes a main body (250) and a shrinkable part (260) connected above the main body (250), wherein the inner diameter of the shrinkable part (260) is smaller than the inner diameter of the main body (250).

9. A single crystal furnace according to claim 1, characterized in that, The flipping mechanism (300) consists of multiple components evenly distributed along the circumference of the upper furnace cylinder (110). The outer side of the support ring (210) is provided with multiple outwardly extending protrusions (211) along its circumference. The protrusions (211) correspond one-to-one with the lifting plate (330). The support ring (210) divides the insulated bucket (200) into upper and lower parts.

10. A method for loading a single crystal furnace, characterized in that, The single crystal furnace applied to any one of claims 1 to 9 comprises at least the following steps: The upper furnace cylinder (110) is hoisted upward to the position above the insulation barrel (200), and then the upper furnace cylinder (110) is lowered so that the insulation barrel (200) gradually enters the upper furnace cylinder (110); When the upper furnace cylinder (110) descends to a preset height, the driving component (310) of the flipping mechanism (300) drives the flipping body (320) to flip, so that the lifting plate (330) on the flipping mechanism (300) enters the main chamber (130) from below the upper furnace cylinder (110) and is located below the support ring (210) of the heat preservation barrel (200); Then the upper furnace cylinder (110) is lifted upwards. After the lifting plate (330) abuts against the support ring (210), the upper furnace cylinder (110) and the heat preservation barrel (200) are lifted together. Then the upper furnace cylinder (110) and the heat preservation barrel (200) are hoisted to the upper position above the lower furnace cylinder (120), and then the upper furnace cylinder (110) and the heat preservation barrel (200) are lowered. When the heat preservation barrel (200) enters the lower furnace cylinder (120) and its bottom abuts against the bottom wall inside the lower furnace cylinder (120), the driving component (310) drives the flip plate body (320) to flip, so that the lifting plate (330) moves from below the upper furnace cylinder (110) to outside the upper furnace cylinder (110); Then continue to lower the upper furnace cylinder (110) so that the bottom of the upper furnace cylinder (110) abuts against the top of the lower furnace cylinder (120), and then connect the upper furnace cylinder (110) and the lower furnace cylinder (120) to complete the furnace loading.

Images