Flow regulating device

Abstract

The present application provides a flow regulating device that suppresses the undesirable condition of particles being discharged from an outlet port into a liquid flow. The flow regulating device (100) includes: an opening and closing mechanism (30) that is brought into a closed state or an open state by being brought into contact with or separated from a valve seat portion (11); a force generating portion (40) that generates a force that moves the opening and closing mechanism (30) in a direction that brings it into contact with the valve seat portion (11); a diaphragm (50) that is coupled to the opening and closing mechanism (30) and is disposed in a manner that separates a pressure chamber (12) from a valve chamber (22); and a coupling portion (60) that couples the opening and closing mechanism (30) and the diaphragm (50), the opening and closing mechanism (30) having a valve core portion (31) and a shaft portion (32) that is coupled to the valve core portion (31), the diaphragm (50) having a base portion (51) that has a through hole (51a) at the center and a thin film portion (52) that is formed in a ring shape around an axis (X) in a manner that connects with an outer peripheral portion of the base portion (51), and the coupling portion (60) coupling the shaft portion (32) that is inserted into the through hole (51a) and protrudes into the pressure chamber (12) and the base portion (51) within the pressure chamber (12).

Description

Technical Field

[0001] This invention relates to a flow regulating device. Background Technology

[0002] Conventionally, a flow regulating device with a flow regulating section is known to regulate the flow rate of liquids such as pharmaceutical solutions and pure water used in semiconductor manufacturing apparatuses (see, for example, Patent Document 1). The flow regulating device disclosed in Patent Document 1 pressurizes a pressure chamber to pressurize a diaphragm downwards, thereby separating a valve core disposed in a valve chamber from a valve seat, allowing fluid to flow from a first space on the upstream side to a second space on the downstream side. Liquid flowing into the first space from the inlet port flows into the second space and flows out from the outlet port to the outside.

[0003] Prior art literature Patent documents Patent Document 1: Japanese Patent No. 6093206 Summary of the Invention The problem that the invention aims to solve In the flow regulating device disclosed in Patent Document 1, a protrusion formed at the end of a valve core is connected by a clearance fit in a recess formed on the base of a diaphragm that separates the pressure chamber and the valve chamber. The valve core is formed in a shaft shape. By connecting the diaphragm and the valve core, the valve core can be moved in a manner that is linked to the movement of the diaphragm, which bears the pressure of the pressure chamber.

[0004] However, in the flow regulating device disclosed in Patent Document 1, since the connection portion connecting the diaphragm and the valve core is on the valve chamber side, particles present at the connection portion may flow into the liquid. Here, particles refer to, for example, particles of raw materials generated during manufacturing, or tiny particles of raw materials that are shed due to friction generated at the connection portion during the operation of the flow regulating device.

[0005] The present invention was made in view of such circumstances, and its object is to provide a flow regulating device that can suppress the undesirable situation of particulate matter flowing into liquid that flows in from the inlet port and is discharged from the outlet port.

[0006] Methods for solving problems To address the aforementioned issues, the present invention employs the following methods.

[0007] One aspect of the present invention relates to a flow regulating device comprising: a first housing having an internally formed pressure chamber from which operating gas is introduced from the outside; a second housing having an internally formed valve chamber, an upstream flow channel, and a downstream flow channel, wherein the upstream flow channel connects the valve chamber to an inlet port, and the downstream flow channel connects the valve chamber to an outlet port; an opening and closing mechanism having a closed state in which the upstream flow channel and the downstream flow channel are blocked, or an open state in which the upstream flow channel and the downstream flow channel are connected, by contacting or separating from a valve seat portion disposed on the inner circumferential surface of the valve chamber; a force generating unit having a force that moves the opening and closing mechanism in a direction that contacts the valve seat portion; and a first diaphragm connected to the opening and closing mechanism and movable along an axis, for connecting the pressure chamber to the valve seat portion. The valve chamber is disposed between the first housing and the second housing in a spaced manner; a connecting portion connects the opening and closing mechanism to the first diaphragm, the opening and closing mechanism having: a valve core portion housed in the valve chamber and in contact with or separated from the valve seat portion; a shaft portion connected to the valve core portion and formed in an axial shape extending along the axis, the first diaphragm having: a base portion formed in a circular shape around the axis and having a through hole at the center; a first thin film portion formed in an annular shape around the axis in a manner connected to the outer peripheral portion of the base portion, and having a thickness along the axis that is thinner than that of the base portion, the connecting portion connecting the shaft portion to the base portion in the pressure chamber, the shaft portion being inserted into the through hole and protruding into the pressure chamber.

[0008] According to one aspect of the present invention, a flow regulating device comprises a first diaphragm separating the pressure chamber and the valve chamber from which the operating gas is introduced, and an opening and closing mechanism connected together by a connecting portion. Therefore, when the pressure chamber is pressurized, it becomes an open state in which the upstream flow channel and the downstream flow channel are connected, and when the pressure chamber is depressurized, it becomes a closed state in which the upstream flow channel and the downstream flow channel are blocked.

[0009] The opening and closing mechanism has a valve core and a shaft connected to the valve core, the shaft being inserted into a through hole formed on the base of the first diaphragm. The shaft, protruding into the pressure chamber, is connected to the base of the first diaphragm within the pressure chamber via a connecting portion. Since the connecting portion connecting the first diaphragm to the shaft of the opening and closing mechanism is located within the pressure chamber, liquid cannot flow into this connecting portion, nor can particles be mixed into the incoming liquid. Therefore, the undesirable situation of particles flowing into the liquid flowing from the inlet port and being discharged from the outlet port can be suppressed.

[0010] In one aspect of the flow regulating device of the present invention, the structure may also be configured such that the valve chamber has a first space and a second space, the first space is connected to the upstream flow channel and is provided with the valve core, the second space is connected to the downstream flow channel and is provided with the shaft, a valve hole is formed on the second housing, the valve hole connects the first space and the second space and allows the opening and closing mechanism to be inserted, the opening and closing mechanism has a second diaphragm, the second diaphragm has a second thin film portion formed in an annular shape around the axis in a manner connected to the outer peripheral edge of the valve core portion and separating the valve chamber from the lower space where the force generating portion is provided, the second outer diameter of the second thin film portion is smaller than the first outer diameter of the first thin film portion, and the amount of movement of the opening and closing mechanism along the axis from the open state to the closed state is set to less than 10% of the second outer diameter.

[0011] According to the flow regulating device of this structure, since the second outer diameter of the second diaphragm is smaller than the first outer diameter of the first diaphragm, the deformation of the second thin film portion caused by the opening and closing action of the opening and closing mechanism is greater than that of the first thin film portion, making it more prone to deformation and breakage. Therefore, by setting the amount of movement along the axis of the opening and closing mechanism from the open state to the closed state to less than 10% of the second outer diameter, the deformation of the second thin film portion relative to the opening and closing action of the opening and closing mechanism can be reduced, thereby suppressing the undesirable situation of the second thin film portion deforming and breaking. In addition, by reducing the deformation of the second thin film portion relative to the opening and closing action of the opening and closing mechanism, the undesirable situation of particles being mixed into the liquid due to dust generation from the second thin film portion can be prevented.

[0012] In the flow regulating device with the above structure, it is preferable that the valve core, the shaft and the second diaphragm are integrally formed by PFA (Perfluoroalkoxy).

[0013] According to this flow regulating device, the valve core, shaft, and second diaphragm are integrally formed using PFA. The integrally formed components are formed, for example, by melting the PFA. Therefore, compared to the case where components are formed by compacting powdered resin materials (PTFE (Polytetrafluoroethylene), etc.), the undesirable condition of particulate matter mixing into the liquid can be suppressed.

[0014] In one aspect of the flow regulating device according to the present invention, the structure may also be configured such that a sealing protrusion is formed on the end face of the valve chamber side of the base, the sealing protrusion is formed around the axis in a manner surrounding the through hole and protrudes toward the valve chamber, a sealing groove and an external thread are formed on the shaft, the sealing groove is formed in a ring shape around the axis in a manner engaging with the sealing protrusion, the external thread is formed in the region protruding toward the pressure chamber when the shaft is inserted into the through hole, the connecting part is a component having a connecting hole, the connecting hole having an internal thread formed on its inner circumferential surface, the opening and closing mechanism is connected to the first diaphragm by engaging the internal thread of the connecting part with the external thread of the shaft, and when the opening and closing mechanism and the first diaphragm are connected through the connecting part, the sealing protrusion contacts the sealing groove to form a sealing area extending around the axis.

[0015] According to this flow regulating device, the opening / closing mechanism and the first diaphragm are connected by engaging the internal thread of the connecting part with the external thread of the shaft. With the opening / closing mechanism and the first diaphragm connected via the connecting part, the sealing protrusion contacts the sealing groove, thereby forming a sealing area extending around the axis. In this way, a sealing area is formed, thus preventing liquid from flowing from the valve chamber to the pressure chamber while firmly securing the opening / closing mechanism and the first diaphragm together.

[0016] In one aspect of the flow regulating device of the present invention, the structure may also be configured such that the first diaphragm and the opening and closing mechanism are formed of resin material, the connecting part is a welded part, and the welded part is welded together with the region of the shaft portion that is inserted into the through hole and protrudes into the pressure chamber and the region of the base portion surrounding the through hole by means of a welding material that is resin material.

[0017] According to this flow regulating device, by using a welding material made of resin to weld the area of ​​the shaft portion inserted into the through hole and protruding into the pressure chamber to the area of ​​the base surrounding the through hole, a reliable connection between the opening / closing mechanism and the first diaphragm can be achieved. Furthermore, by using the welded portion to surround the through hole, the flow of liquid from the valve chamber into the pressure chamber can be prevented.

[0018] In the flow regulating device with the above structure, it can also be configured such that a stepped portion is formed on the shaft portion, the outer diameter of the stepped portion increases toward the top of the shaft portion, and it is disposed at the end of the through hole with the shaft portion protruding into the pressure chamber.

[0019] According to this flow regulating device, by pressing the shaft portion with a stepped section into a through hole formed on the base of the first diaphragm, it is possible to position the stepped section at the end of the through hole in a state of elastic deformation. Since the shaft portion is positioned relative to the base of the first diaphragm by engaging the stepped section with the end of the through hole, it is easy to perform the operation of forming a welded part using welding material.

[0020] In the flow regulating device with the above structure, it can also be configured such that a sealing groove is formed on the end face of the valve chamber side of the base in a manner that surrounds the through hole, and an annular sealing protrusion is formed on the shaft. The sealing protrusion protrudes along the axis toward the end face of the base in a manner that engages with the sealing groove. When the opening and closing mechanism and the first diaphragm are connected through the connecting part, the sealing protrusion contacts the sealing groove to form a sealing area extending around the axis.

[0021] According to this flow regulating device, when the opening / closing mechanism and the first diaphragm are connected by a weld, the sealing protrusion contacts the sealing groove to form a sealing area extending around the axis. Therefore, a sealing area can be formed to securely connect the opening / closing mechanism and the first diaphragm while preventing liquid from flowing from the valve chamber to the pressure chamber.

[0022] Invention Effects According to the present invention, a flow regulating device is provided that can suppress the undesirable condition of particulate matter flowing into liquid that flows in from the inlet port and is discharged from the outlet port. Attached Figure Description

[0023] Figure 1 This is a longitudinal sectional view showing the fully closed state of the flow regulating device according to the first embodiment of the present invention.

[0024] Figure 2 This is a longitudinal sectional view showing the fully open state of the flow regulating device according to the first embodiment of the present invention.

[0025] Figure 3 for Figure 1 A magnified view of part A shown.

[0026] Figure 4 This is a longitudinal sectional view showing the fully closed state of the flow regulating device according to the second embodiment of the present invention.

[0027] Figure 5 for Figure 4 A magnified view of the vicinity of the weld shown. Detailed Implementation

[0028] [First Implementation] Hereinafter, the flow regulating device 100 according to the first embodiment of the present invention will be described with reference to the accompanying drawings. Figure 1 This is a longitudinal cross-sectional view showing the fully closed state of the flow regulating device 100 of this embodiment. Figure 2 This is a longitudinal cross-sectional view showing the fully open state of the flow regulating device 100 in this embodiment.

[0029] Figure 1 as well as Figure 2 The flow regulating device 100 shown is a flow regulating device used to regulate the flow rate of liquids such as pharmaceutical solutions and pure water used in the manufacture of semiconductors. It is installed on the liquid supply line (not shown) and is generally referred to as a regulator.

[0030] The flow regulating device 100 includes a housing portion 10, an opening and closing mechanism 30, a force generating portion 40, a diaphragm (first diaphragm) 50, and a connecting portion 60. The opening and closing mechanism 30 includes a valve core portion 31, a shaft portion 32, and a diaphragm (second diaphragm) 33.

[0031] The housing portion 10 constituting the external shape of the flow regulating device 100 has three housings 10a, 10b, and 10c, which are joined together using through bolts (not shown). Housing 10b is formed, for example, of a fluoropolymer with excellent chemical resistance, such as PFA (tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer). Housings 10a and 10c are formed, for example, of resin materials such as PFA and PVC (polyvinyl chloride).

[0032] The housing 10a is the base part of the flow regulating device 100 and is fixed to the frame (not shown) on which the flow regulating device 100 is installed by connecting bolts. Inside the housing 10b (second housing) are formed an inlet port 21, an outlet port 24, a valve chamber 22, an upstream flow channel 15, a downstream flow channel 16, an intermediate flow channel 25, and a valve hole 26.

[0033] Valve chamber 22 has a first space 22A communicating with upstream flow channel 15 and having a valve core portion 31 disposed therein, and a second space 22B communicating with downstream flow channel 16 and having a shaft portion 32 disposed therein. Upstream flow channel 15 is a flow channel that connects the first space 22A of valve chamber 22 to inlet port 21. Downstream flow channel 16 is a flow channel that connects the second space 22B of valve chamber 22 to outlet port 24 via intermediate flow channel 25.

[0034] Liquid flowing in from inlet port 21 flows into the first space 22A through upstream flow channel 15. Liquid flowing into the first space 22A flows into the second space 22B through the gap between the outer peripheral surface of valve core 31 and valve seat 11 via valve hole 26. Liquid flowing into the second space 22B flows out from outlet port 24 through intermediate flow channel 25 via downstream flow channel 16. Valve hole 26 connects the first space 22A and the second space 22B and allows the shaft 32 of opening / closing mechanism 30 to be inserted.

[0035] The housing (first housing) 10c has a cylindrical shape with the axis X as its central axis. The axis X is located at the center of the pressure chamber 12, and also at the center of the first space 22A and the second space 22B. The pressure chamber 12 is formed inside the housing 10c, and the pressure chamber 12 is supplied with operating air (operating gas) from an external air pressure supply source (not shown) via an inlet port 13.

[0036] The opening and closing mechanism 30 is a mechanism that, by contacting or separating from the valve seat portion 11 disposed on the inner circumferential surface of the valve chamber 22, can be in a closed state where the upstream flow channel 15 and the downstream flow channel 16 are blocked, or in an open state where the upstream flow channel 15 and the downstream flow channel 16 are connected. The opening and closing mechanism 30 has a valve core portion 31, a shaft portion 32, and a diaphragm 33. The valve core portion 31, the shaft portion 32, and the diaphragm 33 are preferably integrally formed, for example, from PFA.

[0037] The valve core 31 is a component that is housed in the first space 22A of the valve chamber 22 and is in contact with or separate from the valve seat 11 to switch between the closed state and the open state.

[0038] The shaft portion 32 is a component that is connected to the valve core portion 31 and is formed in a shaft shape in a manner that extends along the axis X.

[0039] The diaphragm 33 is a component that separates the valve chamber 22 from the lower space LS where the force generating part 40 is disposed. The diaphragm 33 has a thin film portion (second thin film portion) 33a, an outer peripheral end portion 33b, and an annular protrusion 33c. The thin film portion 33a is formed in an annular shape around the axis X so as to be connected to the outer peripheral edge portion of the valve core portion 31. The outer peripheral end portion 33b is connected to the outer peripheral edge portion of the thin film portion 33a and is provided with a thicker wall compared to the thin film portion 33a. The annular protrusion 33c is provided on the upper surface of the outer peripheral end portion 33b and has an upward protruding shape.

[0040] The outer diameter of the diaphragm 33 is approximately the same as the inner diameter of the diaphragm insertion groove formed on the housing 10b. When the diaphragm 33 is inserted from below the housing 10b and housed in the diaphragm insertion groove, the annular protrusion 33c provided on the diaphragm 33 engages with the annular recess provided at the outer peripheral end of the upper surface of the diaphragm insertion groove.

[0041] The force generating unit 40 is a mechanism that generates a force to move the valve core 31 of the opening and closing mechanism 30 in the direction of contacting the valve seat 11. The force generating unit 40 has a spring 41 and a spring retainer 42. A recess 42a is formed at approximately the center of the upper surface of the spring retainer 42, and the lower end of the valve core 31 is inserted therein.

[0042] A height difference portion is provided midway along the sidewall of the spring retainer 42. The outer diameter of the sidewall extending downwards from the height difference portion is smaller than that of the sidewall extending upwards from the height difference portion. A spring 41 is provided on the outer periphery of the spring retainer 42 extending downwards from the height difference portion. A cylindrical valve core constraint hole 43 is formed at approximately the center of the housing 10a. The valve core constraint hole 43 retains the spring 41 between itself and the spring retainer 42.

[0043] By housing the spring 41 in the valve core constraint hole 43 of the housing 10a and inserting the lower end of the spring retainer 42 connected to the diaphragm 33 into the spring 41, the spring 41 is connected to the valve core 31. The spring 41 exerts a spring force in the extension direction, thereby applying a force to the valve core 31 connected to the spring 41 in the direction that causes the valve core 31 to contact the valve seat 11.

[0044] The diaphragm 50 is a component that moves along the axis X in connection with the opening and closing mechanism 30 and is disposed between the housing 10c and the housing 10b in a manner that separates the pressure chamber 12 from the valve chamber 22. The diaphragm 50 has a base 51, a thin film portion (first thin film portion) 52, an outer peripheral end portion 53, and an annular protrusion 54.

[0045] The base 51 is formed into a circle around the axis X and has a through hole 51a at the center.

[0046] The film portion 52 is a ring-shaped component formed around the axis X, connected to the outer peripheral edge of the valve chamber 22 side surface of the base portion 51. The thickness of the film portion 52 along the axis X is thinner than that of the base portion 51, and it undergoes flexible deformation when the base portion 51 moves along the axis X.

[0047] The outer peripheral end portion 53 is connected to the outer peripheral edge of the film portion 52 and is thicker than the film portion 52. An annular protrusion 54 is provided on the lower surface of the outer peripheral end portion 53 and has a downward protruding shape. The outer diameter of the diaphragm 50 is approximately the same as the inner diameter of the diaphragm insertion groove formed on the housing 10b. When the diaphragm 50 is inserted from above the housing 10b and housed in the diaphragm insertion groove, the annular protrusion 54 provided on the diaphragm 50 engages with the annular recess provided at the outer peripheral end of the upper surface of the diaphragm insertion groove.

[0048] The connecting part 60 is a component that connects the shaft 32 of the opening / closing mechanism 30 to the diaphragm 50. Within the pressure chamber 12, the connecting part 60 connects the shaft 32 to the base 51, the shaft 32 being inserted into a through hole 51a in the base 51 and protruding into the pressure chamber 12. The connecting part 60 is a component having a connecting hole 61, wherein the connecting hole 61 has an internal thread 62 formed on its inner circumferential surface. The connecting part 60 is preferably formed of PEEK (polyetheretherketone).

[0049] An external thread 32a is formed on the outer peripheral surface of the upper region of the shaft portion 32. The external thread 32a is formed in the region protruding into the pressure chamber 12 when the shaft portion 32 is inserted into the through hole 51a. The opening and closing mechanism 30 is connected to the diaphragm 50 by engaging the internal thread 62 of the connecting portion 60 with the external thread 32a of the shaft portion 32. The diaphragm 50 is connected to the opening and closing mechanism 30 by being sandwiched between the lower surface of the connecting portion 60 and the sealing groove 32b of the shaft portion 32.

[0050] Here, the sealing groove 32b formed on the shaft portion 32 and the sealing protrusion 51b formed on the base portion 51 will be described. Figure 3 for Figure 1 A magnified view of part A shown. (See attached image.) Figure 3 As shown, a sealing protrusion 51b is formed on the end face of the base 51 on the valve chamber 22 side. The sealing protrusion 51b is formed around the axis X in a manner that surrounds the through hole 51a and protrudes toward the valve chamber 22.

[0051] A sealing groove 32b is formed on the shaft portion 32, and the sealing groove 32b is formed in an annular shape around the axis X in a manner that engages with the sealing protrusion 51b. When the opening and closing mechanism 30 and the diaphragm 50 are connected by the connecting portion 60, the sealing protrusion 51b contacts the sealing groove 32b to form a sealing area extending around the axis X.

[0052] The operator assembling the flow regulating device 100 inserts the shaft 32 into the through hole 51a of the base 51 and engages the internal thread 62 of the connecting part 60 with the external thread 32a of the shaft 32 protruding from the through hole 51a. When the connecting part 60 is further rotated about the axis X with the lower surface of the connecting part 60 in contact with the upper surface of the base 51, the sealing protrusion 51b will come into contact with the sealing groove 32b and deform locally, thereby forming a sealing area extending about the axis X.

[0053] Here, the amount of movement MV of the opening / closing mechanism 30 along the axis X from the open state to the closed state will be explained. Figure 2As shown, the outer diameter (second outer diameter) OD2 of the thin film portion 33a of the diaphragm 33 is smaller than the outer diameter (first outer diameter) OD1 of the thin film portion 52 of the diaphragm 50. Therefore, compared with the thin film portion 52, the deformation of the thin film portion 33a caused by the opening and closing operation of the opening and closing mechanism 30 is greater, making it more prone to deformation and breakage. Therefore, in order to suppress the undesirable condition of the thin film portion 33a deforming and breaking, it is preferable to set the amount of movement MV of the opening and closing mechanism 30 along the axis X from the open state to the closed state to 10% or less of the outer diameter OD2.

[0054] The function and effect of the flow regulating device 100 of this embodiment described above will be explained.

[0055] According to the flow regulating device 100 of this embodiment, the diaphragm 50, which separates the pressure chamber 12 of the introduced operating gas from the valve chamber 22, and the opening and closing mechanism 30 are connected together by the connecting part 60. Therefore, when the pressure chamber 12 is pressurized, it becomes an open state in which the upstream flow channel 15 and the downstream flow channel 16 are connected, and when the pressure chamber 12 is depressurized, it becomes a closed state in which the upstream flow channel 15 and the downstream flow channel 16 are blocked.

[0056] The opening / closing mechanism 30 has a valve core portion 31 and a shaft portion 32 connected to the valve core portion 31. The shaft portion 32 is inserted into a through hole 51a formed on the base 51 of the diaphragm 50. The shaft portion 32, protruding into the pressure chamber 12, is connected to the base 51 of the diaphragm 50 within the pressure chamber 12 via a connecting portion 60. Since the connecting portion connecting the diaphragm 50 to the shaft portion 32 of the opening / closing mechanism 30 is disposed within the pressure chamber 12, liquid will not flow into this connecting portion, nor will particles mix with the incoming liquid. Therefore, the undesirable situation of particles flowing into the liquid flowing from the inlet port 21 and being discharged from the outlet port 24 can be suppressed.

[0057] According to the flow regulating device 100 of this embodiment, since the outer diameter OD2 of the diaphragm 33 is smaller than the outer diameter OD1 of the diaphragm 50, the deformation of the film portion 33a caused by the opening and closing operation of the opening and closing mechanism 30 is greater than that of the film portion 52, making it more prone to deformation and breakage. Therefore, by setting the amount of movement MV of the opening and closing mechanism along the axis X from the open state to the closed state to 10% or less of OD2, the deformation of the film portion 33a relative to the opening and closing operation of the opening and closing mechanism 30 can be reduced, thereby suppressing the undesirable situation of the film portion 33a deforming and breaking. In addition, by reducing the deformation of the film portion 33a relative to the opening and closing operation of the opening and closing mechanism 30, the undesirable situation of particles being mixed into the liquid due to dust generation from the film portion 33a can be prevented.

[0058] According to the flow regulating device 100 of this embodiment, the valve core 31, shaft 32, and diaphragm 33 are integrally formed using PFA. The integrally formed components are formed, for example, by melting the PFA. Therefore, compared to the case where components are formed by compacting powdered resin materials (PTFE, etc.), the undesirable situation of particulate matter mixing into the liquid can be suppressed. Furthermore, since the shaft 32 has high mechanical strength, the contact between the sealing groove 32b and the sealing protrusion 51b can be reliably maintained, thereby maintaining the sealing area formed by these components.

[0059] According to the flow regulating device 100 of this embodiment, the opening / closing mechanism 30 and the diaphragm 50 are connected by engaging the internal thread 62 of the connecting portion 60 with the external thread 32a of the shaft portion 32. With the opening / closing mechanism 30 and the diaphragm 50 connected via the connecting portion 60, the sealing protrusion 51b contacts the sealing groove 32b, thereby forming a sealing area extending about the axis X. In this way, a sealing area can be formed, thereby preventing liquid from flowing from the valve chamber 22 into the pressure chamber 12 while firmly securing the opening / closing mechanism 30 and the diaphragm 50 together.

[0060] [Second Implementation] Next, the flow regulating device 100A according to the second embodiment of the present invention will be described with reference to the accompanying drawings. This embodiment is a variation of the first embodiment, and except as specifically described below, it is configured in the same manner as the first embodiment, and the descriptions therein are omitted.

[0061] The flow regulating device 100 of the first embodiment connects the opening / closing mechanism 30 and the diaphragm 50 via a connecting portion 60 having a connecting hole 61, wherein the connecting hole 61 has an internal thread 62 formed on its inner circumferential surface that engages with an external thread 32a formed on the shaft portion 32. In contrast, the flow regulating device 100A of this embodiment includes a welding portion (connecting portion) 60A that connects the opening / closing mechanism 30 and the diaphragm 50 via a welding material made of resin.

[0062] Figure 4 This is a longitudinal sectional view showing the fully closed state of the flow regulating device 100A according to the second embodiment of the present invention. Figure 4 As shown, the flow regulating device 100A includes a welding section 60A. In the flow regulating device 100A of this embodiment, the diaphragm 50 and the opening / closing mechanism 30 are respectively formed of resin materials such as PFA.

[0063] The welding part 60A is a component in which the area of ​​the shaft portion 32, which is inserted into the through hole 51a and protrudes into the pressure chamber 12, is welded together with the area of ​​the base portion 51 surrounding the through hole 51a by means of a welding material made of resin. The base portion 51 of the diaphragm 50 and the outer peripheral surface of the shaft portion 32 of the opening and closing mechanism 30 are connected together via the welding part 60A.

[0064] Figure 5 for Figure 4 A magnified view of the vicinity of weld 60A shown. (See attached image.) Figure 5 As shown, a stepped portion 32c is formed on the shaft portion 32. The stepped portion 32c has an increased outer diameter toward the top of the shaft portion 32 and is disposed at the end of the through hole 51a with the shaft portion 32 protruding into the pressure chamber 12.

[0065] According to the flow regulating device 100A of this embodiment, by pressing the shaft portion 32, on which the stepped portion 32c is formed, into the through hole 51a formed on the base 51 of the diaphragm 50, it is possible to position the stepped portion 32c at the end of the through hole 51a in a state of elastic deformation. Since the shaft portion 32 is positioned relative to the base 51 of the diaphragm 50 by engaging the stepped portion 32c with the end of the through hole 51a, it is easy to perform the operation of forming the welded portion 60A using welding material.

[0066] [Other Implementation Methods] Although the flow regulating device 100A of the second embodiment forms a sealing region extending around the axis X by having the sealing protrusion 51b contact the sealing groove 32b in a state where the base 51 and the shaft 32 are connected by the welding part 60A, other methods are also possible. For example, a modified example is possible where the base 51 does not have the sealing protrusion 51b and the shaft 32 does not have the sealing groove 32b. According to this modified example, although the sealing region is not formed by the sealing groove 32b and the sealing protrusion 51b, the welding part 60A can prevent liquid from being introduced into the pressure chamber 12.

[0067] Furthermore, although the flow regulating device 100A of the second embodiment is configured such that the shaft portion 32 has a stepped portion 32c, other configurations are also possible. For example, it is also possible to configure a modified example in which the shaft portion 32 does not have a stepped portion 32c. According to this modified example, although the shaft portion 32 is not positioned relative to the base 51 of the diaphragm 50 by means of the stepped portion 32c, the operator can properly hold the shaft portion 32 inserted into the through hole 51a, thereby enabling the operation of forming the welded portion 60A using welding material.

[0068] Symbol Explanation 10. Shell section; 10a Casing; 10b Housing (Second Housing); 10c Housing (First Housing); 11. Valve seat section; 12 pressure chambers; 13. Import port; 15. Upstream side channel; 16. Downstream side channel; 21. Entry port; 22 Valve chamber; 22A First Space; 22B Second Space; 24. Export ports; 25. Intermediate flow channel; 26. Valve hole; 30. Opening and closing mechanism; 31 Valve core section; 32 Shaft section; 32a External thread; 32b Sealing groove; 32c Stepped section; 33. Diaphragm; 33a Thin film section; 33b Outer peripheral end; 33c Annular protrusion; 40. Force-generating part; 41. Spring; 42 Spring retainer 42a recess; 43 Valve core constraint hole; 50 diaphragms; 51. Base; 51a Through hole; 51b Sealing protrusion; 52 Film Department; 53. Outer peripheral end; 54. Annular protrusion; 60 Connecting parts; 60A Welding part (connection part); 61. Connecting hole; 62 Internal thread; 100, 100A flow regulating device; Space below LS; MV (Mobile Views) OD1, OD2 outer diameter; X-axis.

Claims

1. A flow regulating device, comprising: The first housing has an internally formed pressure chamber from which operating gas is introduced from the outside; The second shell has a valve chamber, an upstream flow channel, and a downstream flow channel formed inside. The upstream flow channel connects the valve chamber to the inlet port, and the downstream flow channel connects the valve chamber to the outlet port; The opening and closing mechanism is configured to either be in a closed state where the upstream flow channel and the downstream flow channel are blocked, or in an open state where the upstream flow channel and the downstream flow channel are connected, by contacting or separating from the valve seat portion disposed on the inner circumferential surface of the valve chamber. The force-generating part generates a force that causes the opening and closing mechanism to move in the direction of contact with the valve seat part; A first diaphragm, which is connected to the opening and closing mechanism and moves along an axis, is disposed between the first housing and the second housing in a manner that separates the pressure chamber from the valve chamber; The connecting part connects the opening and closing mechanism to the first diaphragm. The opening and closing mechanism has: The valve core is housed in the valve chamber and is either in contact with or separate from the valve seat. A shaft portion, which is connected to the valve core portion, is formed in a shaft shape extending along the axis. The first diaphragm has: The base is formed in a circular shape around the axis and has a through hole at the center; The first thin film portion is formed in a ring shape around the axis in a manner connected to the outer peripheral portion of the base portion, and its thickness along the axis is thinner than that of the base portion. The connecting part connects the shaft to the base in the pressure chamber, and the shaft is inserted into the through hole and protrudes into the pressure chamber.

2. The flow regulating device as described in claim 1, wherein, The valve chamber has a first space and a second space. The first space is connected to the upstream flow channel and is where the valve core is disposed. The second space is connected to the downstream flow channel and is where the shaft is disposed. A valve hole is formed on the second housing, the valve hole communicating with the first space and allowing the opening / closing mechanism to be inserted. The opening and closing mechanism has a second diaphragm, which has a second thin film portion formed in an annular shape around the axis in a manner connected to the outer peripheral edge of the valve core portion, and separates the valve chamber from the space below where the force generating portion is disposed. The second outer diameter of the second film portion is smaller than the first outer diameter of the first film portion. The amount of movement of the opening and closing mechanism along the axis from the open state to the closed state is set to less than 10% of the second outer diameter.

3. The flow regulating device as described in claim 2, wherein, The valve core, the shaft, and the second diaphragm are integrally formed from soluble polytetrafluoroethylene.

4. The flow regulating device according to any one of claims 1 to 3, wherein, A sealing protrusion is formed on the end face of the base on the valve chamber side. The sealing protrusion is formed around the axis in a manner that surrounds the through hole and protrudes toward the valve chamber. A sealing groove and an external thread are formed on the shaft portion. The sealing groove is formed in a ring shape around the axis so as to engage with the sealing protrusion. The external thread is formed in the region protruding towards the pressure chamber when the shaft portion is inserted into the through hole. The connecting part is a component with a connecting hole, and the connecting hole has an internal thread formed on its inner circumferential surface. The opening and closing mechanism connects to the first diaphragm by engaging the internal thread of the connecting portion with the external thread of the shaft portion. With the opening / closing mechanism and the first diaphragm connected by the connecting portion, the sealing protrusion contacts the sealing groove to form a sealing area extending around the axis.

5. The flow regulating device according to any one of claims 1 to 3, wherein, The first diaphragm and the opening / closing mechanism are formed of resin material. The connecting part is a welded part, which is welded together with the area of ​​the shaft portion that is inserted into the through hole and protrudes into the pressure chamber by means of a welding material made of resin material, and the area of ​​the base portion surrounding the through hole.

6. The flow regulating device as described in claim 5, wherein, A stepped portion is formed on the shaft portion, the stepped portion having an increased outer diameter toward the top of the shaft portion and being disposed at the end of the through hole with the shaft portion protruding into the pressure chamber.

7. The flow regulating device as described in claim 5, wherein, A sealing groove is formed on the end face of the valve chamber side of the base in a manner that surrounds the through hole. An annular sealing protrusion is formed on the shaft portion, the sealing protrusion protruding along the axis toward the end face of the base in a manner that engages with the sealing groove. With the opening / closing mechanism and the first diaphragm connected by the connecting portion, the sealing protrusion contacts the sealing groove to form a sealing area extending around the axis.

Images