Thickness measuring device

Abstract

According to an embodiment, a thickness measuring device includes: a light emitting portion configured to emit light generated by a light source; a standard sample support table spaced apart from the light emitting portion in a first direction and configured to perform a rotational motion about a rotational axis parallel to the first direction and to be located on or off a path of the emitted light; a light receiving portion spaced apart from the standard sample support table in the first direction and spaced apart from the light emitting portion in a second direction intersecting the first direction and located on a path of the light passing through the standard sample support table; and a rotational driving portion coupled to one end of the standard sample support table and configured to provide a driving force for rotating the standard sample support table.

Description

Technical Field

[0001] This disclosure relates to a thickness measuring device. Background Technology

[0002] The manufacturing processes for various semiconductor devices and display devices may include the process of stacking multiple thin films on a mother substrate. Since these thin films are one of the factors affecting the characteristics and performance of the devices, thickness measurements can be performed to manage the quality of the films.

[0003] After the process of laminating thin films onto the mother substrate is performed, the film thickness can be measured to check for defects. To ensure the reliability of the thickness measurement device, standard samples can be used. Standard samples are made of materials with known precise thicknesses, and the error of the measurement device can be evaluated and corrected by comparing them with the measured values. This maintains the measurement performance of the thickness measurement device and improves the reliability of process monitoring. Summary of the Invention

[0004] This disclosure aims to provide a thickness measuring device that can easily measure the thickness of a standard specimen.

[0005] Furthermore, this disclosure aims to provide a thickness measuring device that can reliably ensure thickness data of standard specimens.

[0006] One embodiment of the thickness measuring device includes: a light-emitting section configured to emit light generated by a light source; a standard sample support stage spaced apart from the light-emitting section in a first direction and configured to rotate about a rotation axis parallel to the first direction and located on or away from the path of the emitted light; a light-entry section spaced apart from the standard sample support stage in the first direction and spaced apart from the light-emitting section in a second direction intersecting the first direction and located on the path of the light passing through the standard sample support stage; and a rotation drive unit coupled to one end of the standard sample support stage and configured to provide a driving force for rotating the standard sample support stage.

[0007] The thickness measuring device may further include: a stop located on the path of the rotational movement of the standard sample support and used to limit the rotational movement of the standard sample support.

[0008] The standard sample support platform may be rod-shaped.

[0009] The standard specimen support may include a standard specimen placement section with a groove at the other end of the standard specimen support.

[0010] The standard specimen support may further include: a connecting portion, which is connected to the rotation drive portion at one end of the standard specimen support; and an extension portion, located between the standard specimen placement portion and the connecting portion.

[0011] The standard sample placement portion may be located on the first surface of the standard sample support platform, and the standard sample support platform may further include a recessed portion extending along the length direction of the standard sample support platform on the second surface, the second surface being the surface of the standard sample support platform opposite to the first surface.

[0012] The standard specimen support platform may include: a first support portion and a second support portion, which extend from the rotation axis in directions intersecting the first direction toward opposite sides.

[0013] The standard sample support platform may include a third support portion and a fourth support portion, extending from the rotation axis along a direction intersecting the first direction, and the third support portion and the fourth support portion extending in different directions at an angle greater than 0 degrees and less than 180 degrees to each other.

[0014] The standard sample support platform may include: a fifth support portion and a sixth support portion, extending from the rotation axis in directions intersecting the first direction toward opposite sides; and a seventh support portion, extending from the rotation axis, wherein the seventh support portion extends at an angle greater than 0 degrees and less than 180 degrees with the fifth support portion or the sixth support portion, respectively.

[0015] The thickness measuring device may further include a polarizer for polarizing the light emitted by the light source and transmitting it to the light-emitting section.

[0016] The thickness measuring device may further include: an analyzer for measuring the polarization characteristics of the light incident on the incident light portion; and a detector for measuring the intensity of the light transmitted by the analyzer.

[0017] The thickness measuring device may further include: a standard sample, located on the standard sample support platform.

[0018] One embodiment of the thickness measuring device includes: a standard sample support stage, spaced apart from the light-emitting section in a first direction, and configured to move linearly in a direction intersecting the first direction and located on or away from the path of the emitted light; a light-incident section, spaced apart from the standard sample support stage in the first direction and spaced apart from the light-emitting section in a second direction intersecting the first direction and located on the path of the light passing through the standard sample support stage; and a linear motion drive unit, coupled to one end of the standard sample support stage and configured to provide a driving force for causing the standard sample support stage to perform the linear motion.

[0019] According to an embodiment, the thickness measuring device can easily measure the thickness of a standard sample.

[0020] In addition, the thickness measuring device can reliably ensure the thickness data of standard samples.

[0021] Furthermore, according to the embodiments, there are advantageous effects that can be identified throughout the specification. Attached Figure Description

[0022] Figure 1 This is a schematic diagram showing a display panel assembly including a unit area and a marking area.

[0023] Figure 2 This diagram illustrates the process of depositing materials onto a display panel assembly simultaneously through multiple chambers.

[0024] Figure 3 It is a schematic three-dimensional diagram showing the logistics chamber and the thickness measuring device.

[0025] Figure 4 This is a bottom view schematically showing the logistics chamber and thickness measuring device.

[0026] Figure 5 This is a perspective view showing a portion of a thickness measuring device according to an embodiment.

[0027] Figure 6 This is a side view showing a portion of a thickness measuring device according to an embodiment.

[0028] Figure 7 This is a rear view showing a portion of a thickness measuring device according to an embodiment.

[0029] Figure 8 This is a bottom view showing a portion of a thickness measuring device according to an embodiment.

[0030] Figure 9 This is a schematic diagram showing the functional components of a thickness measuring device.

[0031] Figure 10This is a three-dimensional view of the rotational movement path of the standard specimen support platform as observed from below.

[0032] Figure 11 This is a three-dimensional view of the rotational movement path of the standard specimen support platform as observed from above.

[0033] Figure 12 This is a diagram showing a standard specimen support stage with a relatively large diameter through hole.

[0034] Figure 13 This is a diagram showing a standard specimen support stage with a relatively small diameter through hole.

[0035] Figure 14 This is a diagram showing a standard specimen support stage including a recess on the second surface.

[0036] Figure 15 This is a three-dimensional view of a standard specimen support platform in the shape of a straight line, viewed from above.

[0037] Figure 16 This is a three-dimensional view of a standard specimen support platform in the shape of a straight line, viewed from below.

[0038] Figure 17 This is a three-dimensional view of the L-shaped standard specimen support platform as seen from above.

[0039] Figure 18 This is a three-dimensional view of the L-shaped standard specimen support platform as seen from below.

[0040] Figure 19 This is a three-dimensional view of a T-shaped standard specimen support platform as seen from above.

[0041] Figure 20 This is a three-dimensional view of a T-shaped standard specimen support platform as seen from below.

[0042] Figure 21 This is a side view showing a portion of a thickness measuring device according to an embodiment.

[0043] Explanation of reference numerals in the attached figures

[0044] 10, 10': Thickness measuring device

[0045] 12: Logistics Chamber

[0046] 20: Display panel assembly

[0047] 21: Mother substrate

[0048] 22: Marked Area

[0049] 23: Unit Area

[0050] 100: Light output part

[0051] 101: Light Source

[0052] 102: Polarizer

[0053] 200, 200A', 200B', 200A, 200B, 200C, 200': Standard specimen support platform

[0054] 201, 201A, 201B: Rotating shafts

[0055] 202: Rotational Motion Path

[0056] 221, 221', 221A, 221B, 221C: Standard sample placement section

[0057] 222, 222A', 222B', 222A, 222B: Extensions

[0058] 223, 223A, 223B, 223C, 223': Joints

[0059] 251, 261: Through holes

[0060] 231, 232, 233, 234, 235, 236, 237: First Support Section, Second Support Section, Third Support Section, Fourth Support Section, Fifth Support Section, Sixth Support Section, Seventh Support Section

[0061] 271: Depression

[0062] 300: Light entrance part

[0063] 301: Analyzer

[0064] 302: Detector

[0065] 400: Stopper

[0066] 500: Rotary drive unit

[0067] 700: Linear Motion Drive Unit

[0068] 900: Standard Sample

[0069] LI: Light Detailed Implementation

[0070] The present invention will now be described in detail with reference to the accompanying drawings, enabling those skilled in the art to readily implement it. The present invention can be implemented in many different forms and is not limited to the embodiments described herein.

[0071] To clearly illustrate the invention, irrelevant parts have been omitted, and the same reference numerals are used for the same or similar structural elements throughout the specification.

[0072] Furthermore, for ease of explanation, the size and thickness of the structures shown in the accompanying drawings are arbitrarily illustrated; therefore, the present invention is not necessarily limited to the content shown in the drawings. In the drawings, the thickness is shown enlarged to clearly illustrate multiple layers and regions. Also, for ease of explanation, the thickness of some layers and regions is exaggerated in the drawings.

[0073] Furthermore, when referring to a layer, membrane, region, plate, or other part as being "above" or "on top of" another part, this includes not only the case where it is "directly" above the other part, but also the case where there are other parts between them. Conversely, when referring to a part as being "directly" above another part, it means that there are no other parts between them. Additionally, being "above" or "on top of" a reference part means being above or below the reference part, and does not necessarily mean being "above" or "on top" facing the opposite direction of gravity.

[0074] Furthermore, throughout the specification, when a part is referred to as "including" a structural element, unless otherwise stated, this means that other structural elements may be included, but not excluded.

[0075] Furthermore, throughout the instruction manual, when "on a plane" is mentioned, it refers to the view of the object from above, and when "on a cross section" is mentioned, it refers to the view of the cross section of the object being cut vertically from the side.

[0076] The thickness measuring apparatus of one embodiment will now be described with reference to the accompanying drawings. The thickness measuring apparatus can measure the thickness of a thin film. For example, the thickness measuring apparatus can utilize a marking area of ​​a display panel assembly to measure the thickness of the thin film. The display panel assembly may include a cell area and a marking area defined on a mother substrate. The thickness measuring apparatus can measure the thickness of the cell area by measuring the film thickness of the marking area. The thickness measuring apparatus can check for defects in the thin film deposition process by measuring the thickness of the thin film formed on the mother substrate. For example, the thin film to be measured may be an inorganic film formed by chemical vapor deposition (CVD).

[0077] Figure 1 This is a schematic diagram showing a display panel assembly including a unit area and a marking area.

[0078] The display panel assembly 20 may include a mother substrate 21, a unit area 23, and a marking area 22. The unit area 23 and the marking area 22 may be defined on the mother substrate 21.

[0079] The mother substrate 21 can be a rigid substrate formed of glass. Alternatively, the mother substrate 21 can be a flexible substrate formed of polymers such as polyimide (PI), polyamide (PA), and polyethylene terephthalate (PET).

[0080] Multiple unit regions 23 may be defined on the mother substrate 21. The multiple unit regions 23 may be arranged in a matrix. A display panel may be manufactured in each unit region 23. The display panel may be a device that receives electrical signals to display images. The display panel may include conductive patterns, transistors, light-emitting materials, etc.

[0081] One or more marking regions 22 may be defined on the mother substrate 21. The marking regions 22 may be provided for indirectly measuring the film thickness of the unit region 23. The thickness measuring device can obtain the thickness data of the film stacked on the unit region 23 by measuring the thickness of the film stacked on the marking regions 22.

[0082] In unit area 23, a display panel can be manufactured by laminating multiple thin films. These multiple thin films can be formed on the display panel assembly 20 simultaneously through multiple chambers, such as process chambers and logistics chambers. The display panel assembly 20 can be mounted on a transfer device and moved between the multiple chambers.

[0083] Below, refer to Figure 2 The process of laminating thin films onto display panel assemblies is explained in detail. Figure 2 This diagram illustrates the process of a display panel assembly undergoing deposition while passing through multiple chambers.

[0084] The display panel assembly 20 can be mounted on a transfer device and transferred into a chamber. The chamber can be a device that performs manufacturing processes for semiconductor devices or display devices. The chamber may include a process chamber and a material transport chamber, in which core processes such as deposition and etching are performed, and the material transport chamber is responsible for transferring the display panel assembly 20 between the process chambers.

[0085] After a process is completed in one chamber, the display panel assembly 20 can be moved to another chamber for subsequent processes. For example, after a first thin film deposition process on the display panel assembly 20 is completed in one chamber, the display panel assembly 20 can be moved to another chamber by a transfer device for a subsequent second thin film deposition process.

[0086] Reference Figure 2As shown, the display panel assembly 20 can be transferred to the first process chamber 11. A first thin film deposition process on the mother substrate 21 can be completed in the first process chamber 11. After the first thin film deposition is completed, the display panel assembly 20 can be loaded onto a transfer device and transferred via a material flow chamber 12 to the second process chamber 13. Subsequent processes can be performed in the second process chamber 13. Display panels can be manufactured in various unit areas 23 simultaneously, passing through multiple chambers.

[0087] The material flow chamber 12 can be used to measure the thickness of the deposited film. The material flow chamber 12 may include one or more thickness measuring devices 10. For example, the thickness of the first film deposited in the first process chamber 11 can be measured by the thickness measuring device 10 in the material flow chamber 12. Measuring the film thickness can determine whether the deposition process was performed accurately. The thickness measuring device 10 may be positioned corresponding to the marking area 22 of the display panel assembly 20.

[0088] Figure 2 The thickness measuring device 10 is located between the first process chamber 11 and the second process chamber 13, but the location of the thickness measuring device 10 is not limited to this. For example, the thickness measuring device 10 may be located between the second process chamber 13 and the third process chamber.

[0089] Below, refer to Figure 3 and Figure 4 The thickness measuring device arranged in the logistics chamber is described in detail. Figure 3 It is a schematic three-dimensional diagram showing the logistics chamber and the thickness measuring device. Figure 4 This is a bottom view schematically showing the logistics chamber and thickness measuring device.

[0090] Multiple thickness measuring devices 10 can be arranged in the logistics chamber 12. Figure 3 and Figure 4 The image shows three thickness measuring devices 10 arranged in the logistics chamber 12.

[0091] Thickness measuring devices 10, positioned at different locations, can each measure the corresponding marked area 22. The marked area 22 of the display panel assembly 20 can be formed in any region that does not overlap with the unit area 23. The thickness measuring devices 10 can be arranged in the material flow chamber 12 corresponding to the position of the marked area 22. Alternatively, the position of the marked area 22 can be defined on the display panel assembly 20 corresponding to the position of the thickness measuring device 10. By measuring multiple marked areas 22 separately by multiple thickness measuring devices 10, the reliability of the film thickness measurement of the display panel assembly 20 can be improved.

[0092] The thickness measuring device 10 can be fixed to the material handling chamber 12. The display panel assembly 20 can be transferred by a transfer device and placed on the worktable 122 of the material handling chamber 12. The thickness measuring device 10 can measure the thickness of the film using the marking area 22 of the display panel assembly 20 placed on the worktable 122.

[0093] The thickness measuring device 10 may include a first functional unit 14 and a second functional unit 15. The first functional unit 14 may include a light source capable of emitting light and a polarizer for polarizing the light emitted by the light source. Furthermore, the first functional unit 14 may include an analyzer for measuring the polarization characteristics of the light and a detector for measuring the intensity of the light emitted by the analyzer. Additionally, the first functional unit 14 may further include means for controlling the light intensity or for collecting and analyzing data. The second functional unit 15 may include a light-emitting section that emits light toward the sample and an incident section into which light reflected from the sample enters. Furthermore, the second functional unit 15 may include a standard sample support stage for supporting a standard sample and a rotary drive unit that provides driving force to rotate the standard sample support stage. The structural elements included in the first functional unit 14 and the second functional unit 15 are not limited thereto. Furthermore, the aforementioned structure of the first functional unit 14 may be included in the second functional unit 15. For example, the polarizer and the analyzer may be included in the second functional unit 15.

[0094] Below, refer to Figures 5 to 8 A thickness measuring device according to one embodiment will be described in detail. Figure 5 This is a perspective view showing a portion of a thickness measuring device according to an embodiment. Figure 6 This is a side view showing a portion of a thickness measuring device according to an embodiment. Figure 7 This is a rear view showing a portion of a thickness measuring device according to an embodiment. Figure 8 This is a bottom view showing a portion of a thickness measuring device according to an embodiment.

[0095] Figures 5 to 8 The thickness measuring device 10 shown may include a light-emitting section 100, a standard sample support stage 200, a light-entry section 300, and a rotation drive section 500. The standard sample 900 may be located on the standard sample support stage 200.

[0096] The light-emitting section 100 can emit light of a specific wavelength generated by the light source. The light emitted by the light-emitting section 100 can be polarized light. The light emitted by the light-emitting section 100 can be linearly polarized light. The light-emitting section 100 can emit light toward the sample, and the light emitted by the light-emitting section 100 can illuminate a specific area of ​​the sample.

[0097] The sample can be a standard sample 900 or a target sample. The target sample can be a thin film that serves as the target for thickness measurement. For example, the thin film defined in the marking area 22 of the display panel assembly 20 can be a target sample.

[0098] The standard specimen 900 can be a reference specimen used to verify or calibrate the accuracy of the thickness measuring device 10. Since the accurate physical property values ​​or characteristics of the standard specimen 900 have been determined, it can serve as a reliable reference point.

[0099] The standard specimen 900 can be selected and prepared according to the type and purpose of the object to be measured. The thickness measuring device 10 can use the standard specimen 900 with known accurate thickness values ​​to verify the measurement accuracy of the device. The thickness measuring device 10 can use the standard specimen 900 to check the device status and perform calibration when necessary. For example, the standard specimen 900 can provide a reference for 100 Å, 250 Å, 600 Å, or 10000 Å. 1 Å (angstrom) is 10 -10 m (meter). In the thickness measuring device 10, the standard sample 900 can be located on the standard sample support 200 and fixed.

[0100] The thickness measuring device 10 needs to periodically verify its measurement accuracy using a standard sample 900. If an error occurs in the thickness measurement of the standard sample 900, the reliability of the thickness measuring device 10 may decrease. Since the thickness measuring device 10, which is mounted and fixed in the material flow chamber 12, includes a standard sample 900 that rotates around the rotation axis 201, the thickness of the standard sample 900 can be easily measured.

[0101] The standard sample support stage 200 may be spaced apart from the light-emitting section 100 in the first direction D1. The standard sample support stage 200 may be bar-shaped. The standard sample support stage 200 may include a rotation axis 201 parallel to the first direction D1 on one end 204. The standard sample support stage 200 may be configured to rotate about the rotation axis 201 parallel to the first direction D1. The standard sample 900 may be placed on the other end 205 of the standard sample support stage 200. The standard sample 900 may perform circular motion corresponding to the rotational motion of the standard sample support stage 200.

[0102] The standard specimen support stage 200 may comprise a rigid metal. For example, the standard specimen support stage 200 may comprise 6061 aluminum alloy or 7075 aluminum alloy.

[0103] The standard specimen support stage 200 may include a standard specimen placement part 221, an extension part 222, and a joint part 223.

[0104] When the standard sample support stage 200 rotates, the relative position of the light-emitting section 100 and the standard sample 900 may change. Furthermore, with the rotation of the standard sample support stage 200, the relative position of the light-emitting section 100 and the standard sample placement section 221 may change. The standard sample placement section 221 may be located on the other end 205 of the standard sample support stage 200. The standard sample placement section 221 may include a groove. By inserting the standard sample 900 into the groove of the standard sample placement section 221, the movement of the standard sample 900 may be restricted. The standard sample placement section 221 may be located on the first surface 210 of the standard sample support stage 200 opposite to the light-emitting section 100 and the light-receiving section 300.

[0105] The connecting portion 223 may be located on one end 204 of the standard sample support stage 200. The connecting portion 223 may accommodate the rotating shaft 201. The standard sample support stage 200 and the rotary drive unit 500 can be connected at the connecting portion 223. The standard sample support stage 200 can receive driving force from the rotary drive unit 500 and rotate around the rotating shaft 201.

[0106] The extension 222 may be located between the standard specimen placement portion 221 and the connecting portion 223. The extension 222 may connect the standard specimen placement portion 221 and the connecting portion 223. The extension 222 may provide a rotation radius for the standard specimen support stage 200.

[0107] When it is necessary to measure the accuracy of the thickness measuring device 10 using a standard sample 900, the standard sample support stage 200 can be rotated to bring the relative positions of the standard sample placement section 221 of the standard sample support stage 200 and the light-emitting section 100 closer together. This allows the standard sample 900 placed in the standard sample placement section 221 to be positioned on the path of light emitted from the light-emitting section 100. In this case, the standard sample support stage 200 can be shaped to extend along a third direction D3. The third direction D3 intersects the first direction D1.

[0108] When the thickness measurement of the standard sample 900 is completed, the standard sample support stage 200 can rotate approximately 90 degrees. This can be a preparation process for measuring a target sample. For example, it can be a preparation process for measuring the film thickness of a display panel assembly 20.

[0109] When the thickness measuring device 10 measures the thickness of the target sample, the relative position between the standard sample placement portion 221 of the standard sample support stage 200 and the light-emitting portion 100 can be increased. In this case, the standard sample support stage 200 can be shaped to extend along the second direction D2. The second direction D2 intersects the first direction D1 and the third direction D3. For example, when measuring the film thickness of the display panel assembly 20 transferred to the logistics chamber 12 to check for film defects, the standard sample 900 placed on the standard sample support stage 200 can be positioned away from the light-emitting portion 100 and the light-receiving portion 300. Thus, the standard sample 900 can be located at a position that is out of the path of the light emitted from the light-emitting portion 100. If the standard sample support stage 200 is located close to the light-emitting portion 100 and the light-receiving portion 300, it may cause an obstacle when measuring the film thickness of the display panel assembly 20.

[0110] Since the standard sample support stage 200 is configured to rotate, the thickness measuring device 10 fixed to the material flow chamber 12 can easily perform thickness measurement of the standard sample 900.

[0111] Furthermore, since the standard sample 900 can be automatically brought close to the light-emitting part 100 and the light-receiving part 300 according to the control signal using the electrical signal, the positional accuracy of the standard sample 900 can be improved, thereby improving the reliability of the measurement.

[0112] Furthermore, since the standard specimen 900 is placed and fixed on the standard specimen support 200, vibration of the standard specimen 900 is prevented. This prevents errors in the thickness measurement of the standard specimen 900.

[0113] Furthermore, an automated system for periodically measuring the thickness of the standard sample 900 can be constructed. Since the thickness of the standard sample 900 can be easily measured by rotating the standard sample support stage 200 based on an electrical signal, there is no need to stop the operation of the entire manufacturing process equipment to provide the standard sample 900 to the thickness measuring device 10. This improves the yield of semiconductor device or display device manufacturing processes.

[0114] Furthermore, since the thickness measuring device 10 is equipped with a standard sample support stage 200 that can rotate, the position of the standard sample 900 within the material flow chamber 12 can be ensured.

[0115] Light emitted from the light-emitting section 100 and reflected by the standard sample 900 can enter the light-entry section 300. The light-entry section 300 is spaced apart from the standard sample support stage 200 in the first direction D1 and from the light-emitting section 100 in the second direction D2.

[0116] The rotary drive unit 500 can be coupled to one end 204 of the standard specimen support stage 200 and is configured to cause the standard specimen support stage 200 to rotate about the rotation axis 201. The rotary drive unit 500 can provide a rotary driving force to the standard specimen support stage 200.

[0117] The rotary drive unit 500 may include a motor, a driver, a reducer, and an encoder. The motor provides driving force. The driver precisely controls the rotational speed and direction of the motor. The reducer converts the high-speed rotation of the motor into a low-speed rotation for more precise control and can transmit high torque to the standard sample support stage 200. The encoder can be a sensor that senses the rotational position and speed. The rotary drive unit 500 can use the driving force of the motor to rotate the standard sample support stage 200 at a specific angle and speed.

[0118] The thickness measuring device 10 may further include a main body 800. The main body 800 may be a frame that supports the rotary drive unit 500 and the standard sample support stage 200. In addition, the main body 800 may support the light-emitting part 100 and the light-receiving part 300. The main body 800 shall not be easily bent or deformed by external forces.

[0119] Below, refer to Figure 9 The thickness measurement process of the thickness measuring device is described in detail. Figure 9 This is a schematic diagram showing the functional components of a thickness measuring device.

[0120] The thickness measuring device 10 can precisely measure the thickness of the thin film through non-destructive analysis. For example, the thickness measuring device 10 can be an ellipsometer and can perform ellipsometry. Ellipsometry is a technique that uses the polarization properties of light to measure the thickness of a thin film and optical properties such as refractive index.

[0121] Figure 9 The thickness measuring device 10 may include a light source 101, a polarizer 102, a light emitting part 100, a standard sample support stage 200, a light incident part 300, an analyzer 301, and a detector 302.

[0122] Light source 101 generates and emits light LI. The light LI emitted by light source 101 is simultaneously polarized by polarizer 102. The light LI polarized by polarizer 102 is transmitted to light emitting section 100, and the light LI emitted from light emitting section 100 can enter standard sample 900 located on standard sample support stage 200. In this case, it can be said that standard sample support stage 200 is located in the path of light LI. The polarization characteristics of the light LI emitted from light emitting section 100 can be changed by interference with the light LI generated according to the thickness of standard sample 900. The light LI reflected by standard sample 900 and having its polarization characteristics changed can enter light incident section 300. The polarization characteristics of the light LI emitted from light incident section 300 can be measured by analyzer 301. That is, analyzer 301 can measure the polarization characteristics of the light LI incident into light incident section 300. Analyzer 301 can measure the thickness of the thin film by measuring the amount of polarization change of the incident and reflected light relative to standard sample 900. The analyzer 301 can measure the polarization characteristics of the light LI emitted by the polarizer 102, which vary according to the thickness of the standard sample 900, based on the polarization characteristics of the light LI. The detector 302 can measure the intensity of the light LI transmitted by the analyzer 301 and convert the measured intensity of the light LI into an electrical signal.

[0123] Below, refer to Figure 10 and Figure 11 The rotational motion path and stop of the standard specimen support platform are described in detail. Figure 10 This is a three-dimensional view of the rotational movement path of the standard specimen support platform as observed from below. Figure 11 This is a three-dimensional view of the rotational movement path of the standard specimen support platform as observed from above.

[0124] exist Figure 10 and Figure 11 The thickness measuring device 10, with some structural components omitted, is shown in the image. Figure 10 and Figure 11 The diagram shows a standard specimen support platform 200, a standard specimen 900, and a rotary drive unit 500.

[0125] The standard specimen support stage 200 can rotate clockwise or counterclockwise around a rotation axis 201 parallel to the first direction D1. To limit the rotational movement path 202 of the standard specimen support stage 200, the thickness measuring device 10 may include a stopper 400.

[0126] To ensure smooth rotation of the standard sample support stage 200, a circular area with a radius equal to the length of the standard sample support stage 200 needs to be ensured. However, depending on the location where the thickness measuring device 10 is installed, this circular area may not be possible. In this case, the standard sample support stage 200 may collide with other equipment besides the thickness measuring device 10. To reduce collisions between the standard sample support stage 200 and other equipment, the rotation angle of the standard sample support stage 200 can be limited.

[0127] Furthermore, the rotation of the standard specimen support 200 may deviate from the specified range due to errors in the electrical signals controlling the rotary drive unit 500 or malfunctions of the rotary drive unit 500. The stop 400 can prevent the standard specimen support 200 from colliding with other equipment by limiting the rotational movement path 202 of the standard specimen support 200.

[0128] Below, refer to Figures 12 to 14 An example of a rod-shaped standard specimen support is given. Figure 12 This is a diagram showing a standard specimen support stage with a relatively large diameter through hole. Figure 13 This is a diagram showing a standard specimen support stage with a relatively small diameter through hole. Figure 14 This is a diagram showing a standard specimen support stage including a recess on the second surface.

[0129] exist Figure 12 and Figure 13 The standard specimen support stages 200A' and 200B' with through holes are shown. Figure 12 A relatively large-diameter through hole 251 may be defined on the extension 222A' of the standard specimen support stage 200A' shown. Figure 13 The extension 222B' of the standard specimen support stage 200B' shown may be defined with a relatively small diameter through hole 261.

[0130] exist Figure 14 The diagram shows a standard specimen support 200 with a recess 271 formed on the second surface 220 (specifically, the portion corresponding to the extension 222). The second surface 220 may be the surface opposite to the first surface 210. The standard specimen support 200 may be rib-shaped. The recess 271 may extend along the length of the standard specimen support 200. There may be one or more recesses 271. The depth of the recess 271 is not limited. By having the recess 271, the stiffness and strength of the standard specimen support 200 can be enhanced.

[0131] Below, refer to Figures 15 to 20 Examples of standard specimen support stages of various shapes are illustrated.

[0132] Figure 15 This is a three-dimensional view of a standard specimen support platform in the shape of a straight line, viewed from above. Figure 16 This is a three-dimensional view of a standard specimen support platform in the shape of a straight line, viewed from below.

[0133] The standard sample support stage 200A may include: a first support portion 231 extending from the rotation axis 201A in a direction intersecting the first direction D1; and a second support portion 232 extending from the rotation axis 201A in a direction opposite to the extending direction of the first support portion 231. That is, the standard sample support stage 200A may include a first support portion 231 and a second support portion 232 extending from the rotation axis 201A in a direction intersecting the first direction D1 towards opposite sides. In other words, the first support portion 231 and the second support portion 232 may extend from the connecting portion 223A including the rotation axis 201A in the same direction towards opposite sides.

[0134] The first support portion 231 and the second support portion 232 can form a rod shape. When the standard sample support stage 200A rotates around the rotation axis 201A, the first support portion 231 and the second support portion 232 can rotate together.

[0135] The first support portion 231 and the second support portion 232 may each include a standard sample placement portion 221A. Thus, the standard sample support stage 200A can support different standard samples 900. These different standard samples 900 can serve as standard samples that are different thickness measurement references.

[0136] Figure 17 This is a three-dimensional view of the L-shaped standard specimen support platform as seen from above. Figure 18 This is a three-dimensional view of the L-shaped standard specimen support platform as seen from below.

[0137] The standard sample support stage 200B may include: a third support portion 233 extending from the rotation axis 201B in a direction intersecting the first direction D1; and a fourth support portion 234 extending from the rotation axis 201B in a direction intersecting the third support portion 233. That is, the standard sample support stage 200B may include a third support portion 233 and a fourth support portion 234 extending from the rotation axis 201B in a direction intersecting the first direction D1 and extending in different directions at angles greater than 0 degrees and less than 180 degrees to each other. In other words, the third support portion 233 and the fourth support portion 234 may extend from the joint portion 223B including the rotation axis 201B in different directions at angles greater than 0 degrees and less than 180 degrees to each other. The angle may be 90 degrees.

[0138] When the standard sample support platform 200B rotates around the rotation axis 201B, the third support part 233 and the fourth support part 234 can rotate together.

[0139] The third support portion 233 and the fourth support portion 234 may each include a standard specimen placement portion 221B. Thus, the standard specimen support platform 200B can support different standard specimens 900.

[0140] Figure 19 This is a three-dimensional view of a T-shaped standard specimen support platform as seen from above. Figure 20 This is a three-dimensional view of a T-shaped standard specimen support platform as seen from below.

[0141] The standard sample support stage 200C may include: a fifth support portion 235 extending from the rotation axis 201C in a direction intersecting the first direction D1; a sixth support portion 236 extending from the rotation axis 201C in a direction opposite to the extending direction of the fifth support portion 235; and a seventh support portion 237 extending from the rotation axis 201C, intersecting the fifth support portion 235 and the sixth support portion 236 respectively. That is, the standard sample support stage 200C may include: a fifth support portion 235 and a sixth support portion 236 extending from the rotation axis 201C in directions opposite to each other in a direction intersecting the first direction D1; and a seventh support portion 237 extending from the rotation axis 201C, wherein the seventh support portion 237 extends at an angle greater than 0 degrees and less than 180 degrees with either the fifth support portion 235 or the sixth support portion 236. In other words, the fifth support portion 235 and the sixth support portion 236 can extend from the joint portion 223C including the rotation shaft 201C in the same direction but to opposite sides, and the seventh support portion 237 can extend from the joint portion 223C including the rotation shaft 201C at an angle greater than 0 degrees and less than 180 degrees with either the fifth support portion 235 or the sixth support portion 236. The angle can be 90 degrees.

[0142] When the standard sample support platform 200C rotates around the rotation axis 201C, the fifth support part 235, the sixth support part 236 and the seventh support part 237 can rotate as a whole.

[0143] The fifth support section 235, the sixth support section 236, and the seventh support section 237 may each include a standard specimen placement section 221C. Thus, the standard specimen support stage 200C can support different standard specimens 900.

[0144] Below, refer to Figure 21 A thickness measuring device according to one embodiment will be described in detail. Figure 21 This is a side view showing a portion of a thickness measuring device according to an embodiment.

[0145] Figure 21 The thickness measuring device 10' may include a standard sample support stage 200' that performs linear motion. Thus, the relative position of the standard sample 900 and the light-emitting section can be adjusted by linear motion, rather than by rotational motion. Descriptions of structural elements that are repeated in the thickness measuring device 10 described above will be omitted.

[0146] The standard specimen support stage 200' can move linearly along a direction intersecting the first direction D1. For example, the standard specimen support stage 200' can reciprocate linearly along the third direction D3.

[0147] When it is necessary to use a standard sample 900 to measure the accuracy of the thickness measuring device 10', the standard sample support stage 200' can be moved linearly to bring the relative position of the standard sample placement section 221' of the standard sample support stage 200' closer to the light emission section. As a result, the standard sample 900 placed on the standard sample placement section 221' can be positioned on the path of the light emitted from the light emission section.

[0148] When the thickness measuring device 10' measures the thickness of the target sample, the relative position of the standard sample placement section 221' of the standard sample support stage 200' and the light-emitting section can be increased. For example, when measuring the film thickness of the display panel assembly 20 transferred to the logistics chamber 12 to check for film defects, the standard sample 900 placed on the standard sample support stage 200' can be positioned away from the light-emitting and light-receiving sections. Thus, the standard sample 900 can be located away from the path of the light emitted from the light-emitting section.

[0149] The thickness measuring device 10' may further include a linear motion drive unit 700. The linear motion drive unit 700 may be coupled to one end 204' of the standard sample support stage 200' and is used to transmit the driving force that causes the standard sample support stage 200' to move linearly. The linear motion drive unit 700 may be coupled to the coupling portion 223' of the standard sample support stage 200'.

[0150] The linear motion drive unit 700 may include a motor, a driver, a reducer, and an encoder. The motor provides driving force. The driver precisely controls the rotational speed and direction of the motor. The reducer converts the high-speed rotation of the motor into a low-speed rotation, allowing for more precise control and transmitting high torque to the standard sample support stage 200'. The encoder can be a sensor that senses the position of the standard sample support stage 200'. The linear motion drive unit 700 utilizes the driving force of the motor to move the standard sample support stage 200' linearly in a direction intersecting the first direction D1.

[0151] The embodiments of the present invention have been described in detail above, but the scope of the present invention is not limited thereto. Various modifications and improvements made by those skilled in the art using the basic concepts of the present invention as defined in the claims also fall within the scope of the present invention.

Claims

1. A thickness measuring device, comprising: The light-emitting section is configured to emit light generated by the light source; A standard sample support stage is spaced apart from the light-emitting part in a first direction and is configured to rotate about a rotation axis parallel to the first direction and be located on or away from the path of the emitted light. The light-incident section is spaced apart from the standard sample support in the first direction, and spaced apart from the light-exiting section in a second direction intersecting the first direction and located on the path of the light passing through the standard sample support. and A rotary drive unit is coupled to one end of the standard specimen support platform and is used to provide a driving force to rotate the standard specimen support platform.

2. The thickness measuring device according to claim 1, further comprising: A stop is located on the path of the rotational movement of the standard specimen support and is used to limit the rotational movement of the standard specimen support.

3. The thickness measuring device according to claim 1, wherein, The standard specimen support platform is rod-shaped.

4. The thickness measuring device according to claim 1, wherein, The standard specimen support platform includes a standard specimen placement section with a groove at the other end of the standard specimen support platform.

5. The thickness measuring device according to claim 4, wherein, The standard specimen support stage further includes: The connecting part is coupled to the rotary drive part at one end of the standard sample support; and An extension is located between the standard sample placement portion and the joint portion.

6. The thickness measuring device according to claim 4, wherein, The standard specimen placement section is located on the first surface of the standard specimen support platform. The standard specimen support further includes a recess on a second surface extending along the length direction of the standard specimen support, the second surface being the surface of the standard specimen support opposite to the first surface.

7. The thickness measuring device according to claim 1, wherein, The standard sample support platform includes a first support portion and a second support portion, which extend from the rotation axis in directions intersecting the first direction toward opposite sides.

8. The thickness measuring device according to claim 1, wherein, The standard sample support platform includes a third support portion and a fourth support portion, which extend from the rotation axis along a direction intersecting the first direction, and the third support portion and the fourth support portion extend in different directions at an angle greater than 0 degrees and less than 180 degrees to each other.

9. The thickness measuring device according to claim 1, wherein, The standard specimen support stage includes: The fifth and sixth support portions extend from the rotation axis in directions intersecting the first direction toward opposite sides; and A seventh support extends from the rotation axis, and the seventh support extends at an angle greater than 0 degrees and less than 180 degrees with the fifth support or the sixth support.

10. The thickness measuring device according to claim 1, further comprising: A polarizer is used to polarize the light emitted by the light source and transmit it to the light-emitting section.

11. The thickness measuring device according to claim 1, further comprising: An analyzer for measuring the polarization characteristics of the light incident on the incident light section; and A detector for measuring the intensity of the light transmitted by the analyzer.

12. The thickness measuring device according to claim 1, further comprising: The standard specimen is located on the standard specimen support platform.

13. A thickness measuring device, comprising: The light-emitting section is configured to emit light generated by the light source; A standard sample support stage is spaced apart from the light-emitting part in a first direction and is configured to move linearly in a direction intersecting the first direction and be located on or away from the path of the emitted light. The light-incident portion is spaced apart from the standard sample support stage in the first direction, and spaced apart from the light-exiting portion in a second direction intersecting the first direction, and located on the path of the light passing through the standard sample support stage; and A linear motion drive unit is coupled to one end of the standard sample support platform and is used to provide a driving force for the standard sample support platform to perform the linear motion.

14. The thickness measuring device according to claim 13, wherein, The standard specimen support platform is rod-shaped.

15. The thickness measuring device according to claim 13, wherein, The standard specimen support platform includes a standard specimen placement section with a groove at the other end of the standard specimen support platform.

16. The thickness measuring device according to claim 15, wherein, The standard specimen support stage further includes: The connecting part is coupled to the linear motion drive part at one end of the standard sample support platform; and An extension is located between the standard sample placement portion and the joint portion.

17. The thickness measuring device according to claim 15, wherein, The standard specimen placement section is located on the first surface of the standard specimen support platform. The standard specimen support further includes a recess on a second surface extending along the length direction of the standard specimen support, the second surface being the surface of the standard specimen support opposite to the first surface.

18. The thickness measuring device according to claim 13, further comprising: A polarizer is used to polarize the light emitted by the light source and transmit it to the light-emitting section.

19. The thickness measuring device according to claim 13, further comprising: An analyzer for measuring the polarization characteristics of the light incident on the incident light section; and A detector for measuring the intensity of the light transmitted by the analyzer.

20. The thickness measuring device according to claim 13, further comprising: The standard specimen is located on the standard specimen support platform.

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