Circulatory system, tank cleaning apparatus and control method thereof

Abstract

The application provides a circulating system, a tank cleaning device and a control method thereof. The circulating system comprises: a circulating pump configured to drive fluid flow by performing a driving action; a driving device configured to intermittently provide power to the circulating pump to make the circulating pump perform the driving action intermittently; and a control device communicatively connected to the driving device, configured to control the time interval of the driving device providing power to the circulating pump to adjust the frequency of the circulating pump performing the driving action. The circulating system of the application makes the driving device intermittently provide power to the circulating pump by setting the driving device and the control device, and controls the interval of the driving device providing power to the circulating pump by using the control device, so that the frequency of the circulating pump performing the driving action is controllable, the frequency of the driving action can be adjusted, and the stability of the circulating pump operation is ensured.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing, and more specifically, to a circulation system, a tank-type cleaning device, and a control method thereof. Background Technology

[0002] In the semiconductor industry, tank cleaning equipment is commonly used to clean wafers. Tank cleaning equipment uses a circulating pump to transfer the cleaning solution in the pipeline, completing the circulation of the solution between the inner and outer tanks. This creates a specific flow field in the inner tank, thereby achieving the removal of impurities from the wafer surface.

[0003] In some related technologies, the circulating pump uses a pneumatic unidirectional diaphragm pump to drive the circulation of the cleaning solution. However, due to the limitations of the diaphragm pump's mechanical structure and working principle, the frequency of the circulating pump's driving action becomes uncontrollable, leading to flow fluctuations in the pipeline and unstable flow field of the cleaning solution in the inner tank, thus affecting the wafer cleaning effect. Summary of the Invention

[0004] The present invention aims to at least solve the problem in the prior art that the frequency of the pneumatic unidirectional diaphragm pump driving action is unstable, which in turn causes flow fluctuations in the pipeline, resulting in unstable flow field of the liquid in the inner tank and affecting the wafer cleaning effect. The invention proposes a circulation system, a tank cleaning device and its control method.

[0005] To achieve the objectives of this invention, a circulation system is provided, comprising: a circulation pump for driving fluid flow by performing a driving action; a driving device for intermittently providing power to the circulation pump so that the circulation pump intermittently performs the driving action; and a control device communicatively connected to the driving device, the control device being used to control the time interval at which the driving device provides power to the circulation pump, thereby adjusting the frequency at which the circulation pump performs the driving action.

[0006] In some embodiments, the circulation system further includes: a first detection device, communicatively connected to the control device, the first detection device being used to acquire information about the completion of a driving action by the circulation pump; the control device being used to acquire information about the completion of a driving action by the circulation pump detected by the first detection device, and after the circulation pump completes one driving action, to start calculating a delayed start time, and after the delayed start time is greater than or equal to a first preset value, to control the driving device to provide power to the circulation pump, thereby controlling the time interval at which the driving device provides power to the circulation pump.

[0007] In some embodiments, the first detection device is used to detect the exhaust pressure of the circulating pump, and when the exhaust pressure of the circulating pump is greater than or equal to a preset pressure value, it is determined that the circulating pump has completed one driving action.

[0008] In some embodiments, the preset pressure value is 85%-95% of the average value of the maximum exhaust pressure of the circulating pump.

[0009] In some embodiments, the circulation system has a first operating mode and a second operating mode, and the control device controls the time interval for the drive device to provide power to the circulation pump according to the operating mode of the circulation system.

[0010] In some embodiments, in the first operating mode of the circulation system, the first preset value is a fixed value so that the frequency of the driving action of the circulation pump is within a preset range.

[0011] In some embodiments, the circulation system further includes: a second detection device, communicatively connected to the control device, the second detection device being used to detect the real-time flow rate of the fluid; in a second operating mode of the circulation system, the control device is used to adjust the first preset value according to the real-time flow rate of the fluid detected by the second detection device, so that the real-time flow rate of the fluid is within a preset range.

[0012] In some embodiments, when the real-time flow rate of the fluid is greater than a preset flow rate, the control device increases the first preset value; when the real-time flow rate of the fluid is less than the preset flow rate, the control device decreases the first preset value; and when the real-time flow rate of the fluid is equal to the preset flow rate, the control device maintains the first preset value.

[0013] In some embodiments, the control device is used to control the circulatory system to enter a second working mode when the working time of the circulatory system in the first working mode is greater than or equal to a second preset value.

[0014] In some embodiments, the cyclic system further has a third operating mode, in which the first preset value is a fixed value.

[0015] In some embodiments, the control device is further configured to acquire a preset instruction and, based on the input preset instruction, control the cyclic system to enter the first working mode or the third working mode.

[0016] According to a second aspect of the present invention, a tank-type cleaning device is also disclosed, comprising: an inner tank, an outer tank, and the aforementioned circulation system, wherein the circulation system is used to circulate the liquid medicine in the outer tank to the inner tank.

[0017] According to a third aspect of the present invention, a control method for the above-mentioned tank cleaning equipment is also disclosed, comprising the following steps: providing power to the circulating pump for a preset duration to enable the circulating pump to perform a driving action; determining whether the driving action of the circulating pump is completed, and after the circulating pump completes one driving action, starting to calculate a delayed start time; after the delayed start time is greater than or equal to a first preset value, returning to the step "providing power to the circulating pump for a preset duration to enable the circulating pump to perform a driving action" until an end signal is obtained.

[0018] In some embodiments, after the delayed start time is greater than or equal to a first preset value, the step of returning to the step "providing power to the circulation pump for a preset duration so that the circulation pump performs a driving action" until the end signal is obtained further includes the following steps: determining the working mode of the circulation system; adjusting the first preset value according to the working mode of the circulation system.

[0019] In some embodiments, the operating modes include: a first operating mode, a second operating mode, and a third operating mode; before providing power to the circulating pump for a preset duration to enable the circulating pump to perform driving actions, the method further includes the following steps: after obtaining a first preset instruction, entering the first operating mode and starting to calculate the operating time in the first operating mode; determining the operating mode of the circulating system includes the following steps: after obtaining a second preset instruction, entering the third operating mode; otherwise, maintaining the current operating mode; obtaining the operating time of the first operating mode; if the operating time of the first operating mode is greater than or equal to a second preset value, entering the second operating mode; otherwise, maintaining the current operating mode.

[0020] In some embodiments, the step of adjusting the first preset value according to the operating mode of the circulation system includes: keeping the first preset value unchanged in the first operating mode; acquiring the real-time flow rate of the fluid in the second operating mode and adjusting the magnitude of the first preset value according to the real-time flow rate of the fluid; and keeping the first preset value unchanged in the third operating mode.

[0021] In some embodiments, in the second operating mode, acquiring the real-time flow rate of the fluid and adjusting the magnitude of the first preset value according to the real-time flow rate of the fluid specifically includes: when the real-time flow rate of the fluid is greater than the preset flow rate, the control device increases the first preset value; when the real-time flow rate of the fluid is less than the preset flow rate, the control device decreases the first preset value; when the real-time flow rate of the fluid is equal to the preset flow rate, the control device maintains the current first preset value.

[0022] The circulation system of the present invention, by setting up a drive device and a control device, enables the drive device to intermittently provide power to the circulation pump, and uses the control device to control the interval of the drive device providing power to the circulation pump, thereby making the frequency of the circulation pump's driving action controllable, adjusting the frequency of the driving action, and thus ensuring the stability of the circulation pump's operation. Attached Figure Description

[0023] Figure 1 This is a structural schematic diagram of a trough-type cleaning equipment in related technologies;

[0024] Figure 2 This is a schematic diagram illustrating the working principle of a circulating pump in related technologies.

[0025] Figure 3 This is a schematic diagram of the structure of a circulating pump in related technologies;

[0026] Figure 4 This is a schematic diagram of the working process of a circulating pump in related technologies;

[0027] Figure 5 This is a schematic diagram of the structure of the circulation system according to an embodiment of the present invention;

[0028] Figure 6 This is a schematic diagram of the first detection device of the circulation system in an embodiment of the present invention detecting the driving action of the circulation pump;

[0029] Figure 7 This is a schematic diagram of the working principle of the circulating pump according to an embodiment of the present invention;

[0030] Figure 8 This is a flowchart illustrating the workflow of the cyclic system according to an embodiment of the present invention.

[0031] Figure 9 This is a flowchart of the cyclic system according to another embodiment of the present invention;

[0032] List of reference numerals in the attached diagram:

[0033] 10. Circulating pump; 20. Drive device; 21. Air source; 22. Solenoid valve; 30. Control device; 31. Data processing module; 32. First timing module; 33. Second timing module; 34. First input module; 35. Second input module; 36. Third input module; 37. Output module; 40. First detection device; 50. Second detection device. Detailed Implementation

[0034] To enable those skilled in the art to better understand the technical solutions of the present invention, the circulation system, tank cleaning equipment and control method provided by the present invention will be described in detail below with reference to the accompanying drawings.

[0035] like Figure 1As shown, in some related technologies, tank-type wet cleaning equipment includes:

[0036] The inner tank 1a, the outer tank 2a, and the circulation system. The inner tank 1a is used to contain and clean the wafer 10a, and the outer tank 2a is located outside the inner tank 1a. The inner tank 1a and the outer tank 2a are connected by the circulation system.

[0037] During use, the inner tank 1a is filled with liquid and overflows into the outer tank 2a. The circulation system drives the liquid in the outer tank 2a to flow back into the inner tank 1a, and makes the liquid in the inner tank 1a form a flow field to clean the wafer 10a in the inner tank 1a.

[0038] Specifically, the circulation system includes: a circulation pump 3a, a pipeline 4a, a heating device 5a, a flow meter 6a, a drive device 7a, and a control device 8a. The inlet of the circulation pump 3a is connected to the outer tank 2a via the pipeline 4a, and the outlet of the circulation pump 3a is connected to the heating device 5a, the flow meter 6a, and the inner tank 1a in sequence via the pipeline 4a. The drive device 7a is connected to the circulation pump 3a and is used to drive the circulation pump 3a to perform driving actions to drive the flow of the medicine solution.

[0039] In related technologies, such as Figure 2 As shown, the circulating pump 3a is a pneumatic one-way diaphragm pump, the driving device 7a consists of an air source 71a and a solenoid valve 72a. The solenoid valve 72a is connected to the air inlet 315a of the one-way diaphragm pump. The control device 8a is communicatively connected to the solenoid valve 72a and is used to control the solenoid valve 72a to remain in a normally open state so that the air source 71a continuously delivers compressed air to the pneumatic one-way diaphragm pump, so that the pneumatic one-way diaphragm pump continuously performs driving actions to drive the liquid medicine to flow in the pipeline 4a.

[0040] like Figure 3 As shown, the circulating pump 3a includes: a valve body 31a, a diaphragm 32a, a main spring 33a, a one-way valve 34a, and a valve core assembly 35a. The diaphragm 32a is disposed inside the valve body 31a, dividing the valve body 31a into a working chamber 311a and a pneumatic chamber 312a. The main spring 33a is disposed within the working chamber 311a. The valve body 31a is provided with a liquid inlet 313a and a liquid outlet 314a communicating with the working chamber 311a. The one-way valve 34a is disposed within both the liquid inlet 313a and the liquid outlet 314a, ensuring that the liquid can only enter the working chamber 311a from the liquid inlet 313a and leave the working chamber 311a from the liquid outlet 314a, preventing reverse flow. The valve body 31a is also provided with an air inlet 315a and an exhaust port 316a that are respectively connected to the pneumatic cavity 312a. The valve core assembly 35a is disposed in the pneumatic cavity 312a and is linked with the diaphragm 32a. The valve core assembly 35a is used to control the opening and closing of the air inlet 315a and the exhaust port 316a respectively.

[0041] In use, when compressed air enters the pneumatic chamber 312a through the air inlet 315a, the increased air pressure causes the diaphragm 32a to move towards the working chamber 311a, which means... Figure 3 The diaphragm moves to the left, compressing the length of the main spring 33a and the volume of the working chamber 311a, discharging the liquid medicine from the working chamber 311a. When the diaphragm 32a is... Figure 3 As the valve moves to the left, it will drive the valve core assembly 35a in tandem. When the diaphragm 32a is in... Figure 3 After moving one distance to the left, the linked valve core assembly 35a closes the air inlet and opens the exhaust port 316a, thereby expelling air from the pneumatic chamber 312a. The pressure inside the pneumatic chamber 312a decreases, and the main spring 33a pushes the diaphragm 32a back to its original position. At this time, the working chamber 311a draws external liquid medicine from the liquid inlet 313a into the working chamber 311a. Simultaneously, the valve core assembly 35a reopens the air inlet 315a, entering the next operating cycle, thus driving the liquid flow in the pipeline 4a. Typically, adjusting the air supply pressure at the air inlet 315a changes the reciprocating speed of the diaphragm 32a inside the circulating pump 3a, thereby changing the liquid flow rate in the pipeline 4a.

[0042] It should be noted that when the circulating pump 3a is turned on, the control device 8a provides a continuous high-level signal to the solenoid valve 72a. The solenoid valve 72a remains open, continuously supplying compressed air into the air inlet 315a of the circulating pump 3a. The internal mechanical structure of the circulating pump 3a automatically performs continuous reciprocating motion, driving the liquid flow. Figure 4 As shown.

[0043] However, when the intake pressure of the circulating pump 3a fluctuates, the deformation speed of the main spring 33a changes, causing the reciprocating frequency of the valve core assembly 35a to be inconsistent and unable to stably output liquid flow.

[0044] Furthermore, during the initial cleaning and drainage stages, due to the low volume of liquid, air may enter the working chamber 311a, causing changes in the liquid content and consequently altering properties such as the liquid viscosity. With the intake pressure remaining constant, these changes in liquid viscosity alter the resistance to the compression of the main spring 33a, leading to increases or decreases in its contraction and release speeds. Since the contraction and release speeds of the main spring 33a are equivalent to the driving speed of the circulating pump 3a, this ultimately results in unstable reciprocating motion within the circulating pump 3a, causing fluctuations in the output flow rate. In other words, in related technologies, the circulating pump 3a's driving speed changes due to the influence of liquid viscosity and intake pressure, resulting in uncontrollable operating frequency and an inability to generate a stable flow rate.

[0045] To solve the above problems, such as Figures 5 to 9As shown, the present invention discloses a circulation system, including: a circulation pump 10, a drive device 20, and a control device 30. The circulation pump 10 is used to drive fluid flow by performing a drive action; the drive device 20 is used to intermittently provide power to the circulation pump 10 so that the circulation pump 10 intermittently performs the drive action; the control device 30 is communicatively connected to the drive device 20, and the control device 30 is used to control the time interval of the drive device 20 providing power to the circulation pump 10, so as to adjust the frequency of the circulation pump 10 performing the drive action.

[0046] In operation, the drive unit 20 intermittently supplies power to the circulation pump 10, and the control unit 30 controls the interval at which the drive unit 20 supplies power to the circulation pump 10. This control over the interval allows for controllable frequency of the circulation pump 10's driving actions. When the control unit 30 increases the power supply interval, the frequency of the circulation pump 10's driving actions decreases; conversely, when the control unit 30 decreases the power supply interval, the frequency of the circulation pump 10's driving actions increases. Therefore, by adjusting the interval at which the drive unit 20 supplies power to the circulation pump 10 when the inlet pressure or the viscosity of the liquid changes, the frequency of the driving action can be adjusted, thereby ensuring the stability of the circulation pump 10's operation.

[0047] The circulation system of the present invention provides a drive device 20 and a control device 30, so that the drive device 20 intermittently provides power to the circulation pump 10, and the control device 30 controls the interval of the drive device 20 providing power to the circulation pump 10, thereby making the frequency of the circulation pump 10's drive action controllable. By adjusting the frequency of the drive action, the stability of the operation of the circulation pump 10 is ensured.

[0048] The circulation system also includes a first detection device 40. The first detection device 40 is communicatively connected to the control device 30. The first detection device 40 is used to detect the completion of the driving action of the circulation pump 10. The control device 30 is used to acquire the completion of the driving action of the circulation pump 10 detected by the first detection device 40, and after the circulation pump 10 completes one driving action, it starts to calculate the delayed start time. After the delayed start time is greater than or equal to a first preset value, it controls the driving device 20 to provide power to the circulation pump 10, so as to control the time interval of the driving device 20 providing power to the circulation pump 10.

[0049] The circulation system of the present invention uses a first detection device 40 to detect when the circulation pump 10 completes a driving action. Once the first detection device 40 determines that the circulation pump 10 has completed one driving action, the control device 30 starts calculating a delayed start time. After the delayed start time reaches a first preset value, the control device starts the circulation pump 10. In other words, after each driving action, the circulation pump 10 is delayed for a period of time before starting, rather than starting immediately, thereby controlling the frequency of the circulation pump 10's driving action.

[0050] In this embodiment, the first detection device 40 is used to detect the exhaust pressure of the circulating pump 10, and when the exhaust pressure of the circulating pump 10 is greater than or equal to a preset pressure value, it is determined that the circulating pump 10 has completed one driving action.

[0051] For example, the first detection device 40 may include a pressure gauge. The pressure gauge is connected to the exhaust port of the circulation pump 10. When compressed air first enters the pneumatic chamber of the circulation pump 10, the pressure gauge displays 0 kPa because the exhaust port is closed at this time. As the compressed air pushes the diaphragm to move, the circulation pump 10 performs a driving action. When the exhaust port is opened to its maximum, it is connected to the pneumatic chamber. At this time, the exhaust pressure detected by the pressure gauge is at its maximum, the main spring in the working chamber is compressed to its maximum, and the circulation pump 10 has completed the driving action. Subsequently, the main spring releases, and as the main spring releases, the air pressure detected by the pressure gauge gradually decreases. When the diaphragm resets, the exhaust port closes again, and the pressure gauge displays 0 kPa.

[0052] like Figure 6 and Figure 7 As shown, after each drive action is completed inside the circulating pump 10, the exhaust port of the circulating pump 10 discharges gas into the pressure gauge. When the pressure gauge detects that the gas pressure exceeds the set output value, it outputs an electrical signal to the control device 30, thereby causing the control device 30 to start calculating the delayed start time. It should be noted that, considering the fluctuation of the intake air pressure, the pressure gauge is set to 85-95% of the average maximum exhaust pressure of the circulating pump 10 to reduce misjudgments of pump operation. For example, the preset pressure value is 90% of the average maximum exhaust pressure of the circulating pump 10.

[0053] It should be noted that in this embodiment, the first detection device 40 detects the exhaust pressure of the circulating pump 10 to determine whether the circulating pump 10 has completed a driving action. When the exhaust pressure is greater than or equal to a preset pressure value, it determines that the circulating pump 10 has completed one driving action. Then, it sends the information that the circulating pump 10 has completed one driving action to the control device 30. In other words, in this embodiment, the first detection device 40 has both detection and judgment functions. However, this is not limiting. In some other embodiments not shown in the figures, the first detection device can be used only to obtain the exhaust pressure of the circulating pump 10 and send the exhaust pressure to the control device 30 in real time. The control device 30 can then use the obtained exhaust pressure to determine whether the circulating pump 10 has completed one driving action, which is also feasible.

[0054] It should be noted that in this embodiment, the circulation system is applied in a tank-type cleaning equipment, which mainly includes three working stages: the liquid inlet stage, the cleaning stage, and the liquid outlet stage. When the tank-type cleaning equipment starts working, it is in the liquid inlet stage. The cleaning solution is first injected into the inner tank. When the inner tank is full, the solution overflows into the outer tank and is then circulated back into the inner tank by the circulation pump 10. After the tank-type cleaning equipment has been in the liquid inlet stage for a period of time, it will enter the cleaning stage. At this time, the inner tank is full of cleaning solution, and the outer tank also contains a large amount of cleaning solution. The wafer cleaning begins. During this stage, it is necessary to ensure the stability of the output flow rate of the circulation pump 10 to ensure a stable flow field in the inner tank. After cleaning is completed, by inputting a command, the tank-type cleaning equipment can enter the liquid outlet stage to gradually discharge the cleaning solution.

[0055] During the liquid inlet and outlet phases, due to the low volume of liquid in the outer tank, the circulation pump 10 draws in some air during operation. This causes a decrease in the viscosity coefficient of the liquid in the working chamber, reducing the resistance generated by the main spring. Consequently, the driving frequency of the circulation pump 10 increases. In these two phases, since cleaning has not yet begun or has already ended, a stable flow rate is not required in the inner tank. Therefore, the circulation pump 10 does not need to maintain a stable driving frequency. However, the increased driving frequency significantly reduces the service life of the circulation pump 10.

[0056] During the liquid intake phase, the amount of liquid in the outer tank significantly reduces the likelihood of air being drawn into the circulation pump 10. However, occasional air intake may still occur. When air is drawn into the circulation pump 10, the viscosity coefficient of the liquid in the working chamber decreases, the driving frequency of the circulation pump 10 increases, and the output flow rate of the circulation pump 10 increases accordingly. Conversely, when no air is drawn into the circulation pump 10, the viscosity coefficient of the liquid in the working chamber is higher, the driving frequency of the circulation pump 10 decreases, and the output flow rate of the circulation pump 10 decreases accordingly, resulting in unstable output flow rate of the circulation pump 10. Furthermore, fluctuations in the intake air pressure will also cause fluctuations in the output flow rate of the circulation pump 10, leading to instability in its output flow rate.

[0057] To address the above issues, in some embodiments, the circulation system has a first operating mode and a second operating mode. The control device 30 controls the time interval for the drive device 20 to provide power to the circulation pump 10 according to the operating mode of the circulation system. When the tank cleaning equipment is in the liquid inlet stage, the circulation system is in the first operating mode; when the tank cleaning equipment is in the cleaning stage, the circulation pump 10 is in the second operating mode. By controlling the time interval for the drive device 20 to provide power to the circulation pump 10 according to the operating mode of the circulation system, the service life of the circulation pump 10 and the stability of the output flow rate are optimized.

[0058] Specifically, in the first operating mode of the circulation system, the first preset value is a fixed value to keep the frequency of the driving action of the circulation pump 10 within a preset range. When the tank cleaning equipment is in the liquid feeding stage, the circulation system is in the first operating mode. Since the circulation pump 10 will frequently draw in air during this stage, resulting in a higher driving frequency, and the stability of the flow rate does not need to be considered, the first preset value can be set to a fixed value. This increases the time interval between two driving actions, thereby reducing the driving frequency and extending the service life of the circulation pump 10.

[0059] During the cleaning phase of the tank cleaning equipment, in order to ensure a stable flow field in the inner tank, the first preset value needs to be adjusted in real time according to the fluid flow rate to keep the fluid flow rate stable.

[0060] Specifically, the circulation system further includes: a second detection device 50, which is communicatively connected to the control device 30, and is used to detect the real-time flow rate of the fluid; in the second working mode of the circulation system, the control device 30 is used to adjust a first preset value according to the real-time flow rate of the fluid detected by the second detection device 50, so that the real-time flow rate of the fluid is within the preset range.

[0061] For example, the second detection device 50 can be a flow meter, which is installed on the pipeline and can detect the fluid flow rate in the pipeline in real time, that is, the flow rate of the medicine in the pipeline.

[0062] When the real-time flow rate of the fluid exceeds the preset flow rate, the control device 30 increases the first preset value. In other words, when the flow rate of the liquid medicine in the pipeline is too high, it indicates that the frequency of the driving action of the circulation pump 10 is too fast. By increasing the first preset value, the time interval between two adjacent driving actions is increased, thereby reducing the number of driving actions performed in the same time period, thus reducing the frequency of the driving action of the circulation pump 10, and consequently reducing the output flow rate of the circulation pump 10, which in turn reduces the flow rate of the liquid medicine in the pipeline.

[0063] When the real-time flow rate of the fluid is less than the preset flow rate, the control device 30 reduces the first preset value; in other words, when the flow rate of the liquid medicine in the pipeline is too small, it means that the frequency of the driving action of the circulating pump 10 is too slow. By reducing the first preset value, the time interval between two adjacent driving actions is shortened, thereby increasing the number of driving actions performed in the same time period, increasing the frequency of the driving action of the circulating pump 10, and thus increasing the output flow rate of the circulating pump 10, which means increasing the flow rate of the liquid medicine in the pipeline.

[0064] When the real-time flow rate of the fluid equals the preset flow rate, the control device 30 maintains the first preset value. In other words, if the flow rate of the liquid medicine in the pipeline is suitable, it means that the frequency of the driving action of the circulating pump 10 is suitable. Therefore, by maintaining the first preset value, the time interval between two adjacent driving actions is also maintained, so that the number of driving actions performed in the same time period remains unchanged, thus keeping the frequency of the driving action of the circulating pump 10 unchanged, and consequently keeping the output flow rate of the circulating pump 10 unchanged, which means that the flow rate of the liquid medicine in the pipeline remains unchanged.

[0065] The circulation system of the present invention adjusts the first preset value according to the flow rate in the pipeline during the cleaning stage of the tank cleaning equipment, so that the flow rate in the pipeline can be kept within a preset range, thereby maintaining the stability of the flow rate, and thus providing a stable liquid flow field and improving the cleaning effect on the wafer.

[0066] After the tank-type cleaning equipment has been running in the liquid inlet stage for a period of time, it will enter the cleaning stage. In order to coordinate with the tank-type cleaning equipment, when the tank-type cleaning equipment enters the liquid inlet stage, the circulation system simultaneously enters the first working mode, and the working time of the circulation system in the first working mode is calculated by the control device 30. When the tank-type cleaning equipment enters the cleaning stage, the circulation system simultaneously enters the second working mode.

[0067] Specifically, the control device 30 is used to control the circulation system to enter the second working mode when the working time of the circulation system in the first working mode is greater than or equal to a second preset value. The second preset time can be set to the length of time the tank-type cleaning equipment operates during the liquid inlet phase.

[0068] Understandably, the circulation system also has a third operating mode. In this mode, the first preset value is fixed to ensure that the frequency of the circulation pump 10's drive action is within a preset range. When the tank cleaning equipment is in the draining stage, the circulation system is in the third operating mode. Since the circulation pump 10 will frequently draw in air during this stage, resulting in a higher drive action frequency, and the stability of the flow rate does not need to be considered, the first preset value can also be set to a fixed value. This increases the time interval between two drive actions, thereby reducing the drive action frequency and extending the service life of the circulation pump 10.

[0069] The control device 30 is also used to acquire preset instructions and control the cyclic system to enter the first working mode or the third working mode according to the input preset instructions.

[0070] Specifically, such as Figure 5 As shown, the control device 30 includes: a data processing module 31 and a first timing module 32, a second timing module 33, a first input module 34, a second input module 35, a third input module 36 and an output module 37, which are respectively communicatively connected to the data processing module 31.

[0071] Output module 37 is communicatively connected to drive device 20. Data processing module 31 sends a signal to drive device 20 through output module 37, causing drive device 20 to supply air to circulation pump 10, thereby causing circulation pump 10 to perform driving action. First timing module 32 is used to calculate delayed start time, and second timing module 33 is used to calculate the time the circulation system is in the first working mode. First input module 34 is communicatively connected to first detection device 40, and data processing module 31 obtains signals from first detection device 40 through first input module 34. Second input module 35 is communicatively connected to second detection device 50, and data processing module 31 obtains signals from second detection device 50 through second input module 35. Third input module 36 is communicatively connected to host computer, and data processing module 31 receives instructions from host computer through third input module 36.

[0072] For example, the drive device 20 includes an air source 21 and a solenoid valve 22. The two ends of the solenoid valve 22 are respectively connected to the air source 21 and the air inlet of the circulation pump 10. The output module 37 is communicatively connected to the solenoid valve 22 and is used to control the opening and closing of the solenoid valve 22. When the solenoid valve 22 is open, the air source 21 is connected to the air inlet, and compressed air enters the pneumatic chamber of the circulation pump 10 to make the circulation pump 10 perform a drive action. When the solenoid valve 22 is closed, the air source 21 is not connected to the air inlet.

[0073] According to another aspect of the present invention, a tank-type cleaning device is also disclosed, comprising: an inner tank, an outer tank, and the aforementioned circulation system, wherein the circulation system is used to circulate the liquid medicine in the outer tank to the inner tank.

[0074] The working principle of the circulation system of the present invention will be further explained below in conjunction with the control method of the tank cleaning equipment. The control method of the tank cleaning equipment includes the following steps:

[0075] S10: Power is supplied to the circulation pump 10 for a preset duration to enable the circulation pump 10 to perform a driving action. In this embodiment, the data processing module 31 controls the solenoid valve 22 to open for a preset duration through the output module 37, thereby connecting the air source 21 and the circulation pump 10 for a period of time. During this process, the air source 21 supplies compressed air to the circulation pump 10 for a fixed duration, thereby enabling the circulation pump 10 to perform a driving action. In this embodiment, the preset duration is a manually set duration, such as 0.1 seconds, 0.2 seconds, 0.4 seconds, etc., and is not limited in this embodiment.

[0076] S20: Determine whether the driving action of the circulating pump 10 is complete, and start calculating the delayed start time after the circulating pump 10 completes one driving action. Simultaneously with the starting of the driving action of the circulating pump 10, the first detection device 40 can detect whether the driving action of the circulating pump 10 is complete. When the first detection device 40 detects that the circulating pump 10 has completed one driving action, it transmits a signal to the data processing module 31 through the first input module 34. The data processing module 31 then starts calculating the delayed start time through the first timing module 32.

[0077] S50: After the delayed start time is greater than or equal to the first preset value, return to the step "provide power to the circulating pump 10 for a preset duration so that the circulating pump 10 performs the driving action" until the end signal is obtained. When the delayed start time calculated by the first timing module 32 reaches the preset value, the data processing module 31 will return to step S10, that is, the data processing module 31 will again control the solenoid valve 22 to open through the output module 37, so that the circulating pump 10 performs the driving action again.

[0078] In some embodiments, the following steps are included before step S10:

[0079] S00: After receiving the first preset instruction, the system enters the first working mode and begins calculating the working time in the first working mode. In step S00, after the data processing module 31 receives the first preset instruction through the third input module 36, the data processing module 31 controls the circulation system to enter the first working mode and starts calculating the working time in the first working mode through the second timing module 33. For example, the first preset instruction is a power-on instruction, that is, after receiving the power-on instruction issued by the host computer, the data processing module 31, in conjunction with the liquid inlet stage of the tank cleaning equipment, causes the circulation system to enter the first working mode.

[0080] In some embodiments, the following steps are included before step S50:

[0081] S30: Determine the operating mode of the circulation system. In step S30, determining the operating mode of the circulation system allows it to better coordinate with the working stages of the tank cleaning equipment. Specifically:

[0082] Step S30 includes the following steps:

[0083] S31: After receiving the second preset instruction, enter the third working mode; otherwise, maintain the current working mode. For example, the second preset instruction is a drain instruction. When the data processing module 31 receives the drain instruction, it indicates that the cleaning work is over. There is no need to ensure the stability of the inner tank flow field; instead, it is necessary to ensure the lifespan of the circulating pump 10. Therefore, it is necessary to switch to the third working mode.

[0084] S32: Obtain the working time of the first working mode. If the working time of the first working mode is greater than or equal to the second preset value, enter the second working mode; otherwise, maintain the current working mode. In step S31, when the working time of the first working mode is greater than or equal to the second preset value, it indicates that the solution in the tank cleaning equipment is sufficient. At this time, the tank cleaning equipment enters the cleaning stage. It is necessary to ensure the stability of the flow field in the inner tank. Therefore, the circulation system also needs to enter the corresponding second working mode to ensure the stability of the flow field in the tank.

[0085] S40: Adjust the first preset value according to the operating mode of the circulation system. Specifically, this includes the following steps:

[0086] S41: In the first working mode or the third working mode, the first preset value remains unchanged;

[0087] S42: In the second working mode, the real-time flow rate of the fluid is acquired, and the magnitude of the first preset value is adjusted according to the real-time flow rate of the fluid.

[0088] S43: In the third working mode, keep the first preset value unchanged;

[0089] Specifically, step S42 includes:

[0090] S421: When the real-time flow rate of the fluid is greater than the preset flow rate, the control device 30 increases the first preset value;

[0091] S422: When the real-time flow rate of the fluid is less than the preset flow rate, the control device 30 reduces the first preset value;

[0092] S423: When the real-time flow rate of the fluid is equal to the preset flow rate, the control device 30 maintains the current first preset value.

[0093] The control method of the circulation system of the present invention adjusts the size of a first preset value according to the flow rate in the pipeline during the cleaning stage of the tank cleaning equipment, so that the flow rate in the pipeline can be kept within a preset range, thereby maintaining the stability of the flow rate, and thus providing a stable liquid flow field and improving the cleaning effect on the wafer.

[0094] It is understood that the above embodiments are merely exemplary implementations used to illustrate the principles of the present invention, and the present invention is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A cyclic system, characterized in that, include: A circulating pump (10) is used to drive fluid flow by performing a driving action; A drive unit (20) is used to intermittently provide power to the circulating pump (10) so that the circulating pump (10) intermittently performs the drive action; A control device (30) is communicatively connected to the drive device (20). The control device (30) is used to control the time interval at which the drive device (20) provides power to the circulation pump (10) in order to adjust the frequency at which the circulation pump (10) performs the drive action.

2. The cyclic system according to claim 1, characterized in that, The circulatory system also includes: The first detection device (40) is communicatively connected to the control device (30), and the first detection device (40) is used to obtain the status of the circulation pump (10) completing the driving action; The control device (30) is used to obtain the status of the circulation pump (10) completing the driving action detected by the first detection device (40), and after the circulation pump (10) completes one driving action, it starts to calculate the delayed start time, and after the delayed start time is greater than or equal to a first preset value, it controls the driving device (20) to provide power to the circulation pump (10) to control the time interval of the driving device (20) providing power to the circulation pump (10).

3. The circulation system according to claim 2, characterized in that, The first detection device (40) is used to detect the exhaust pressure of the circulating pump (10), and when the exhaust pressure of the circulating pump (10) is greater than or equal to a preset pressure value, it is determined that the circulating pump (10) has completed one driving action.

4. The circulation system according to claim 3, characterized in that, The preset pressure value is 85%-95% of the average value of the maximum exhaust pressure of the circulating pump (10).

5. The circulation system according to claim 2, characterized in that, The circulation system has a first working mode and a second working mode. The control device (30) controls the time interval for the drive device (20) to provide power to the circulation pump (10) according to the working mode of the circulation system.

6. The circulating system according to claim 5, characterized in that, In the first operating mode of the circulation system, the first preset value is a fixed value so that the frequency of the driving action of the circulation pump (10) is within a preset range.

7. The circulation system according to claim 5, characterized in that, The circulatory system also includes: The second detection device (50) is communicatively connected to the control device (30), and the second detection device (50) is used to detect the real-time flow rate of the fluid; In the second operating mode of the circulation system, the control device (30) is used to adjust the first preset value according to the real-time flow rate of the fluid detected by the second detection device (50) so that the real-time flow rate of the fluid is maintained within the preset range.

8. The circulation system according to claim 7, characterized in that, If the real-time flow rate of the fluid is greater than the preset flow rate, the control device (30) increases the first preset value; If the real-time flow rate of the fluid is less than the preset flow rate, the control device (30) reduces the first preset value; When the real-time flow rate of the fluid is equal to the preset flow rate, the control device (30) maintains the first preset value.

9. The circulation system according to claim 5, characterized in that, The control device (30) is used to control the circulatory system to enter the second working mode when the working time of the circulatory system in the first working mode is greater than or equal to the second preset value.

10. The circulation system according to claim 5, characterized in that, The cyclic system also has a third working mode, in which the first preset value is a fixed value.

11. The circulation system according to claim 10, characterized in that, The control device is also used to acquire preset instructions and, according to the input preset instructions, control the cyclic system to enter the first working mode or the third working mode.

12. A tank-type cleaning device, characterized in that, include: The inner tank, the outer tank, and the circulation system according to any one of claims 1 to 11, the circulation system being used to circulate the liquid medicine in the outer tank to the inner tank.

13. A control method for the tank-type cleaning equipment of claim 12, characterized in that, Includes the following steps: Power is supplied to the circulating pump (10) for a preset duration so that the circulating pump (10) performs driving actions; Determine whether the driving action of the circulating pump (10) is completed, and start calculating the delayed start time after the circulating pump (10) completes one driving action; After the delayed start time is greater than or equal to the first preset value, return to the step "provide power to the circulating pump (10) for a preset duration so that the circulating pump (10) performs driving action" until the end signal is obtained.

14. The control method according to claim 13, characterized in that, The step of returning to the step "providing power to the circulating pump (10) for a preset duration so that the circulating pump (10) performs a driving action" after the delayed start time is greater than or equal to the first preset value, until the end signal is obtained, also includes the following steps: Determine the operating mode of the cyclic system; Adjust the first preset value according to the working mode of the cyclic system.

15. The control method according to claim 14, characterized in that, The operating modes include: a first operating mode, a second operating mode, and a third operating mode; before providing power to the circulating pump (10) for a preset duration so that the circulating pump (10) performs driving actions, the following steps are also included: After receiving the first preset instruction, it enters the first working mode and begins to calculate the working time in the first working mode; Determining the operating mode of the cyclic system includes the following steps: After receiving the second preset instruction, enter the third working mode; otherwise, maintain the current working mode. Obtain the working time of the first working mode. If the working time of the first working mode is greater than or equal to a second preset value, enter the second working mode; otherwise, maintain the current working mode.

16. The control method according to claim 15, characterized in that, The step of adjusting the first preset value according to the working mode of the cyclic system includes: In the first working mode, the first preset value remains unchanged; In the second working mode, the real-time flow rate of the fluid is acquired, and the magnitude of the first preset value is adjusted according to the real-time flow rate of the fluid. In the third working mode, the first preset value remains unchanged.

17. The control method according to claim 16, characterized in that, In the second working mode, acquiring the real-time flow rate of the fluid and adjusting the first preset value according to the real-time flow rate of the fluid specifically includes: If the real-time flow rate of the fluid is greater than the preset flow rate, the control device (30) increases the first preset value; If the real-time flow rate of the fluid is less than the preset flow rate, the control device (30) reduces the first preset value; When the real-time flow rate of the fluid is equal to the preset flow rate, the control device (30) maintains the current first preset value.

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