Internal gas analyzer for sealing device

Abstract

The utility model discloses an internal gas analyzer for a sealing device, which is connected with a mass spectrum detection mechanism and is used for transmitting internal gas of a sample on the sealing device to the mass spectrum detection mechanism for analysis. According to the utility model, the puncture needle and the sample injection valve are controlled through the stepping motor, errors caused by manual operation are reduced, the position information of the sample injection valve is corrected in real time through the feedback of the position sensor and the two vacuum gauges, the sample injection process is better controlled, and the accuracy of a quantitative result is improved. And through the design of the separated sealing block, the needle replacing process is optimized, the maintenance time is saved, and the possible risk is reduced. The utility model provides a system and a method for analyzing internal gas of a sealing device, which are suitable for work such as process development, material research, product identification, failure analysis and the like.

Description

Technical Field

[0001] The utility model relates to the technical field of gas detection inside a sealing component, in particular to a gas analyzer inside a sealing component. Background Art

[0002] Gas analysis is very important for production safety and quality control, and has become an indispensable part of industrial production, environmental analysis, and scientific research. However, for the fields of electronics, optical fiber, sensors, medicine, ceramics, etc., the gas to be analyzed is likely to exist inside sealed devices such as chips, collection bottles, material cavities, and smoke collection tubes. In response to this, the traditional method is to integrate sensors inside sealed devices, but this method has high manufacturing costs and complexity, and will affect the size of the device. Therefore, destructive methods are currently commonly used to remove the gas inside the cavity by puncture, bending, extrusion, etc., and then analyze it.

[0003] Mass spectrometry is a general analytical technology that can perform qualitative and quantitative analysis of a variety of chemical substances at low concentrations. It has the characteristics of high sensitivity, high stability, and good reliability, and is very suitable for real-time detection of gas components. When the gas inside the sealed device is introduced into the mass spectrometer, its composition can be continuously analyzed, providing accurate detection data and correctly reflecting the information of various gases to support process development, material research, product identification, failure analysis, etc.

[0004] In current analytical equipment, a puncture needle is generally used to puncture the sample, and then the gas is introduced into the instrument through the injection port for analysis. Due to the complexity of the sample to be analyzed, the pressure in the mass spectrometer cavity will change over time when it is working. In order to achieve the quantification of the internal gas, the repeatability of the same sample injection should be guaranteed. This requires considering the influence of factors such as puncture speed, puncture depth, injection port aperture, injection pressure difference, etc.

[0005] At present, the sampling work of the equipment is generally completed by manually pushing the puncture needle, which will be affected by the sample position and the operator's experience. It is difficult to guarantee the puncture speed and puncture depth, which brings certain errors to the accuracy of the instrument. In addition, the current equipment often uses a stepper motor to control the injection port, but due to the lack of position information feedback, it is easily disturbed by factors such as communication anomalies and mechanical misalignment, affecting the final quantitative results. In addition, since the sealed shell of the device has a certain strength, the puncture needle needs to be replaced frequently. In the current structure of the device, the control valve below needs to be disassembled when replacing the puncture needle, which not only increases the maintenance time, but also may affect the sealing of the valve.

[0006] It can be seen that the current analysis of gases inside sealed devices has defects, it is difficult to ensure the accuracy of quantitative results, and it cannot meet the monitoring needs of various industrial production environments. Utility Model Content

[0007] The utility model aims to provide a device for analyzing the internal gas of a sealing device which can quickly replace a puncture needle, improve puncture accuracy and is easy to maintain.

[0008] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0009] A sealed device internal gas analyzer is connected to a mass spectrometry detection mechanism and is used to transmit the internal gas of a sample on the sealed device to the mass spectrometry detection mechanism for analysis, comprising a sampling mechanism, a sampling evacuation structure, a sample fixing structure and a puncture mechanism; the sampling mechanism is used for gas sampling of the sample and is connected to the mass spectrometry detection mechanism, and the internal gas of the sample in the sampling mechanism is detected and analyzed by the mass spectrometry detection mechanism; the sampling evacuation structure is connected to the mass spectrometry detection mechanism and is used to evacuate the sampling mechanism; the sample fixing mechanism is arranged above the sampling mechanism, and an openable and closable sealing structure is provided between the sample fixing mechanism and the sampling mechanism, and the sample fixing mechanism is used to fix the sample on the sealing structure; the puncture mechanism is vertically movably arranged in the sampling mechanism and is located below the sealing structure, and is used to puncture the sample on the sealing structure.

[0010] Preferably, the injection mechanism comprises an injection chamber shell, a sampling chamber is arranged in the injection chamber shell, the sampling chamber is connected to the injection port through a driving unit, the injection evacuation structure comprises an evacuation port, the evacuation port is connected to the injection chamber through an evacuation valve, the injection port and the evacuation port are connected to the mass spectrometry detection mechanism through an injection flange; the injection chamber is connected to the acupuncture chamber, a sealing block is arranged above the acupuncture chamber, and the center of the sealing block adopts an openable and closable structure; the sample is arranged on the top of the sealing block, and the acupuncture mechanism is vertically movably arranged in the acupuncture chamber and is located below the center of the sealing block.

[0011] Preferably, the acupuncture mechanism includes a needle seat, which is arranged in the acupuncture cavity, one end of the needle seat is connected to the puncture needle, and the other end of the needle seat is threadedly connected to the puncture valve, one end of the puncture valve is arranged in the acupuncture cavity in the injection cavity shell, and the other end of the puncture valve is arranged outside the injection cavity shell and connected to the output end of the puncture motor through a coupling.

[0012] Preferably, the sample fixing mechanism includes a bolt fixing plate and a sample pressing block. The bolt fixing plate, the sample pressing block and the injection chamber housing are connected in series by connecting screws. A vertically movable clamping screw is passed through the center of the bolt fixing plate. The bottom of the clamping screw rests on the sample pressing block by vertical movement. The sample pressing block is used to press the sample onto the sealing block.

[0013] Preferably, the injection chamber is provided with an injection vacuum gauge for monitoring the pressure value in the injection chamber; the mass spectrometry detection mechanism includes a mass spectrometry chamber, on which a mass spectrometry vacuum gauge is provided; an ion source, a mass analyzer and a detector are provided in the mass spectrometry chamber; the mass spectrometry chamber is connected to a fore-stage pump via a molecular pump; a standard sample bottle is also provided outside the mass spectrometry chamber, and the standard sample bottle is used to calibrate the parameters of the mass spectrometry detection mechanism.

[0014] Preferably, the driving unit comprises an injection motor, the injection motor is connected to an injection valve, and the injection port is connected to the injection chamber via the injection valve.

[0015] Preferably, the injection valve is connected to the injection chamber via a coupling, and a position sensor is provided on one side of the coupling for acquiring the position of the coupling.

[0016] Preferably, it further comprises a protective gas mechanism, which is used to fill the injection chamber with protective gas; the protective gas mechanism comprises a protective gas inlet and a protective gas valve, and the protective gas inlet is connected to the injection chamber through the protective gas valve.

[0017] Preferably, the injection chamber is connected to a temperature control device for controlling the temperature in the injection chamber.

[0018] Preferably, the position sensor is a photoelectric sensor or a magnetoelectric sensor.

[0019] Compared with the prior art, the beneficial effects achieved by the utility model include:

[0020] 1. The utility model uses a position sensor to read the position of the coupling reaction injection valve in real time and provide feedback, thereby eliminating position deviations caused by software and hardware reasons.

[0021] 2. The utility model detects the vacuum changes of the injection cavity and the mass spectrometer cavity respectively through the injection vacuum gauge and the mass spectrometer vacuum gauge, so as to judge the depth of sample penetration and reduce the interference of sample shape and position deviation on quantification.

[0022] 3. The utility model uses a sealing block to achieve rapid replacement of the puncture needle, which reduces maintenance time and avoids dislocation and sealing problems caused by disassembly of the valve. Combined with the software's monitoring of pressure, position, and time, it ensures precise control of the injection process, improves the repeatability and stability of the instrument, and improves the accuracy of the quantitative results.

[0023] 4. The puncture motor provided by the utility model adopts a stepper motor, and the puncture valve is controlled by the puncture motor to ensure the consistency of the puncture speed, and the puncture depth is kept consistent by feedback of the pressure change in the injection chamber and the mass spectrometer chamber. The position sensor monitors and feedbacks the position of the injection valve to ensure the consistency of the injection port aperture, and the pressure difference between the injection chamber and the mass spectrometer chamber is kept consistent through a fixed evacuation process. This avoids the influence of position deviation caused by software and hardware reasons, ensures the repeatability of the injection of samples of the same volume, and improves the accuracy of quantitative analysis.

[0024] 5. The utility model realizes the replacement of the puncture needle without disassembling the puncture valve through the design of the separate sealing block.

[0025] In summary, the utility model controls the puncture needle and the injection valve through a stepper motor, reducing the error caused by manual operation, and corrects the position information of the injection valve in real time through the feedback of the position sensor and two vacuum gauges, so as to better control the injection process and improve the accuracy of the quantitative results. And through the separate sealing block design, the needle replacement process is optimized, maintenance time is saved, and possible risks are reduced. A set of internal gas analysis systems and methods for sealing devices is proposed, which are suitable for process development, material research, product identification, failure analysis and other work. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 This is a schematic diagram of the overall structure of a system sampling device in a gas analyzer inside a sealed device proposed by the utility model in this embodiment;

[0027] Figure 2 It is a cross-sectional schematic diagram along the BB' and CC' directions of a gas analyzer inside a sealed device proposed by the utility model in this embodiment;

[0028] Figure 3 It is a cross-sectional schematic diagram along the directions A-A' and BB' of a gas analyzer inside a sealed device proposed by the utility model in this embodiment;

[0029] Figure 4 This is a schematic diagram of the connection between a gas analyzer inside a sealed device and a mass spectrometer proposed by the utility model in this embodiment.

[0030] The serial numbers in the figure are as follows:

[0031] 1. Injection vacuum gauge; 2. Evacuation valve; 3. Protection gas valve; 4. Protection gas inlet; 5. Injection chamber housing; 6. Injection valve; 7. Position sensor; 8. Injection motor; 9. Evacuation port; 10. Injection port; 11. Clamping screw; 12. Screw fixing plate; 13. Connecting screw; 14. Sample pressing block; 15. Piercing valve; 16. Piercing motor; 17. Temperature control device; 18. Injection chamber; 19. Piercing needle; 20. Needle seat; 21. Sample to be tested; 22. Sealing block; 23. O-ring; 24. Injection flange; 25. Ion source; 26. Mass analyzer; 27. Detector; 28. Molecular pump; 29. ​​Fore stage pump; 30. Standard sample bottle; 31. Mass spectrometer vacuum gauge; 32. Mass spectrometer chamber. DETAILED DESCRIPTION

[0032] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0033] Example

[0034] like Figures 1 to 4 As shown, a sealed device internal gas analyzer provided by the utility model is connected to a mass spectrometer detection mechanism and is used to transmit the internal gas of the sample on the sealed device to the mass spectrometer detection mechanism for analysis, including a sampling mechanism, a sampling evacuation structure, a sample fixing structure, a puncture mechanism and a protective gas mechanism, and each valve, pipeline and cavity are airtightly connected.

[0035] With the sampling mechanism as the center, the upper part of the sampling mechanism is connected to a sample fixing structure, the lower part of the sampling mechanism is connected to a needle puncture mechanism, the left side of the sampling mechanism is connected to a protective gas mechanism, the right side of the sampling mechanism is connected to a mass spectrometry detection mechanism, the front side of the sampling mechanism is connected to an injection motor, and the rear side of the sampling mechanism is connected to an injection vacuum structure.

[0036] The sampling mechanism is used for gas sampling of samples; the sampling mechanism includes a sampling chamber shell 5 with a rectangular hexahedral shape, and the sampling chamber shell 5 is provided with a sampling chamber 18 and a temperature control port. The sampling chamber 18 is respectively connected to a pressure detection port, a sampling port 10, an evacuation port 9, a protective gas inlet 4 and a needle puncture chamber.

[0037] Among them, the injection chamber 18 is connected to the injection port 10 through the injection valve 6, and the injection valve 6 adopts a regulating valve, which can adjust the diameter of the gas path between the injection chamber 18 and the injection port 10. The injection port 10 is arranged on the right side of the injection chamber housing 5, and the injection valve 6 is connected to the output end of the injection motor 8 through a coupling. The injection valve 6 and the injection motor 8 are arranged on the front side of the injection chamber housing 5. A position sensor 7 is provided on one side of the coupling, which can monitor the position information of the coupling and feed it back to the injection motor 8, so as to realize accurate control of the injection valve 6 through the injection motor 8, thereby eliminating the position deviation between the software parameters and the hardware. In this embodiment, the position sensor 7 adopts a photoelectric or magnetoelectric sensor.

[0038] The sampling chamber 18 is connected to the sampling vacuum gauge 1 through a pressure detection port. The sampling vacuum gauge 1 is arranged on the sampling chamber housing 5 between the sampling evacuation structure and the protective gas mechanism, and is used to monitor the pressure value in the sampling chamber 18 .

[0039] The protective gas inlet 4 is connected to the injection chamber 18 through the protective gas valve 3. The protective gas valve 3 is arranged on the left side of the injection chamber housing 5. The protective gas inlet 4 is arranged on the front side of the injection chamber housing 5, and is used to fill the injection chamber 18 with protective gas when replacing the sample.

[0040] The temperature control device 17 is placed in the temperature control port of the injection chamber housing 5 and is used to control the temperature in the injection chamber 18 .

[0041] The sampling evacuation structure is used to evacuate the sampling chamber 18; it includes an evacuation port 9, which is arranged on the right side of the sampling chamber housing 5, and the evacuation port 9 is located on one side of the sampling port 10. The evacuation port 9 is connected to the sampling chamber 18 through the evacuation valve 2, and the sampling chamber 18 is connected to the mass spectrometer cavity 32 through the evacuation port 9. The evacuation valve 2 is arranged on the rear side of the sampling chamber housing 5. The sampling chamber 10 and the evacuation port 9 are connected to the mass spectrometer detection mechanism through the sampling flange 24, and the internal gas of the sample in the sampling mechanism is detected and analyzed by the mass spectrometer detection mechanism. The mass spectrometer detection mechanism evacuates the sampling chamber 18 through the evacuation port 9.

[0042] In this embodiment, both the evacuation valve 2 and the protective gas valve 3 are stop valves, through which the connection or cutoff between the injection chamber 18 and the protective gas inlet 4 and the evacuation port 9 can be controlled respectively.

[0043] The sample fixing mechanism is arranged above the injection chamber housing 5, and a sealing block 22 with a central through hole is arranged between the sample fixing mechanism and the injection mechanism. The sample fixing mechanism comprises a bolt fixing plate 12, connecting screws 13 and a sample pressing block 14.

[0044] The connecting screw 13 passes through the bolt fixing plate 12 and the sample pressing block 14 in sequence to fix the bolt fixing plate 12 on the injection chamber housing 5. A threaded clamping screw 11 is provided in the center of the bolt fixing plate 12. The upper section of the clamping screw 11 is a knob handle. The lower section of the clamping screw 11 is threaded in the center of the bolt fixing plate 12. By rotating the knob handle, the clamping screw 11 can be vertically moved in the center of the bolt fixing plate 12. The bottom of the clamping screw 11 can be pressed against the sample pressing block 14 by vertical movement, and the sample pressing block 14 gradually approaches the sealing block 22. In this embodiment, the sample is the sample 21 to be tested. The bottom of the clamping screw 11 transmits the pressure to the sample 21 to be tested through the sample pressing block 14, so that the sample 21 to be tested is tightly pressed on the sealing block 22.

[0045] The acupuncture chamber is vertically located in the injection chamber housing 5 and is vertically connected to the injection chamber 18. The sealing block 22 is placed on the top of the acupuncture chamber. The top and bottom of the sealing block 22 are respectively installed with O-rings 23. The center of the sealing block 22 adopts a through-hole structure. The sample 21 to be tested is placed on the top of the sealing block 22. The O-ring 23 on the top of the sealing block 22 is embedded in the sealing block 22. The sealing block 22 is embedded in the injection chamber housing 5 through the O-ring 23 at its bottom and is located at the top of the acupuncture chamber. The sealing block 22 can be removed from the injection chamber housing 5. Through the rapid separation and disassembly of the sealing block 22, the puncture needle 19 in the acupuncture chamber is exposed to the outside, and the puncture needle 19 can be quickly replaced from the acupuncture chamber, which optimizes the needle replacement process, reduces maintenance time, and avoids the dislocation and sealing problems of the puncture valve caused by disassembly. The precise control of the injection process is guaranteed, the repeatability and stability of the utility model are improved, and the accuracy of the quantitative results is improved.

[0046] The puncture mechanism is used to puncture the sample 21 to be tested; the puncture mechanism includes a needle seat 20, which is arranged in the puncture cavity, one end of the needle seat 20 is threadedly connected to the puncture needle 19, and the puncture needle 19 is located below the center of the sealing block 22, and the other end of the needle seat 20 is threadedly connected to the puncture valve 15, one end of the puncture valve 15 is arranged in the puncture cavity in the injection cavity housing 5, and the other end of the puncture valve 15 is arranged outside the injection cavity housing 5 and connected to the output end of the puncture motor 16 through a coupling, and the puncture motor 16 is below the injection cavity housing 5. The needle seat 20 drives the puncture needle 19 to move vertically through the puncture motor 16 through the puncture valve 15, thereby puncturing the sample 21 to be tested on the sealing block 22.

[0047] The mass spectrometer detection mechanism is used to detect and analyze the internal gas of the sample 21 to be tested. The injection port 10 and the evacuation port 9 are connected to the mass spectrometer detection mechanism through the injection flange 24. The mass spectrometer detection mechanism includes a mass spectrometer cavity 32. The mass spectrometer cavity 32 is provided with an ion source 25, a mass analyzer 26 and a detector 27 in sequence; the mass spectrometer cavity 32 is connected to a pre-stage pump 29 through a molecular pump 28. The molecular pump 28 and the pre-stage pump 29 are used to provide the mass spectrometer cavity 32 with the necessary vacuum conditions when working. The mass spectrometer detection mechanism is connected to the injection cavity through the evacuation port 9, so as to achieve the purpose of evacuating the injection cavity. The standard sample bottle 30 is used to calibrate the parameters of the mass spectrometer itself, and the mass spectrometer vacuum gauge 31 is used to monitor the vacuum degree inside the mass spectrometer cavity 32 in real time. The injection vacuum gauge 1 and the mass spectrometer vacuum gauge 31 can detect the vacuum changes of the injection cavity and the mass spectrometer cavity respectively, so as to judge the depth of the puncture of the sample 21 to be tested, and reduce the interference caused by the shape and position deviation of the sample 21 to be tested on the quantitative.

[0048] Furthermore, a standard sample bottle 30 and a mass spectrometer vacuum gauge 31 are provided outside the mass spectrometer cavity 32 . The standard sample bottle 30 is used to calibrate the parameters of the mass spectrometer detection mechanism. The mass spectrometer vacuum gauge 31 is used to monitor the pressure value in the mass spectrometer cavity 32 .

[0049] Furthermore, the sample injection motor 8 and the puncture motor in the present invention are both stepper motors to ensure speed consistency.

[0050] The working principle of the utility model is as follows:

[0051] Step S1: Change the sample, control the closing of the injection valve 6 and the evacuation valve 2, open the protective gas valve 3, and then the protective gas enters the injection chamber to prevent the ambient gas from interfering with the instrument background. Rotate the clamping screw 11, remove the sample pressing block 14, and place the smooth surface of the sample 21 to be tested on the sealing block 22 with the smooth surface facing downward. Then, the sample 21 to be tested is pressed against the injection chamber housing 5 by the sample pressing block 14, and the clamping screw 11 on the bolt fixing plate 12 is rotated. The bottom of the clamping screw 11 gradually presses the sample pressing block 14. Under the action of the sample pressing block 14 and the O-ring 23 on the top of the sealing block 22, a sealed connection is achieved between the smooth surface of the sample 21 to be tested and the sealing block 22.

[0052] Step S2: Start the vacuuming process, control the protective gas valve 3, close the protective gas inlet 4, ensure the sealing of the injection chamber 18 with the outside world, at this time, the injection chamber 18 is in a relatively high pressure state, adjust the injection motor 8, so that the injection valve 6 is gradually opened, and the gas in the injection chamber 18 will enter the mass spectrometer cavity 32 under the action of the pressure difference, and adjust the injection valve 6 according to the readings of the monitoring injection vacuum gauge 1 and the mass spectrometer vacuum gauge 31. The adjustment principle is: when the pressure in the mass spectrometer cavity is not higher than the working limit of the molecular pump 28, adjust the injection valve 6 to a larger opening as much as possible to reduce the time required for vacuuming. When the pressure in the injection chamber 18 drops to the preset protection pressure, open the vacuum valve 2 so that the injection chamber 18 quickly reaches a relatively high vacuum state. When the vacuum degree in the mass spectrometer cavity 32 reaches the preset working pressure, the vacuuming is completed.

[0053] Step S3: Sampling. After the vacuuming is completed, the puncture injection process begins. The software closes the vacuum valve 2 and adjusts the injection valve 6 to the specified position according to the volume of the sample 21 to be tested. Then, the puncture valve 15 is controlled by the puncture motor 16 to push the needle seat 20 to drive the puncture needle 19 to move upward. A through hole is provided in the center of the sealing block 22. The puncture needle 19 can pass through the through hole to touch and puncture the sample 21 to be tested. After the sample 21 to be tested is punctured, the internal gas will quickly diffuse into the injection chamber 18 under the action of the pressure difference. When the injection vacuum gauge 1 detects a sudden change in pressure, the puncture needle 19 is controlled to retreat quickly. The sample gas enters the mass spectrometer cavity 32 through the injection port 10, and is ionized, separated, and detected in the ion source 25, the mass analyzer 26, and the detector 27 in turn to complete an analysis of the sample.

[0054] When it is necessary to change the sample again, the evacuation valve 2 and the injection valve 6 are controlled to close the evacuation port 9 and the injection port 10 on the injection mechanism, thereby disconnecting the connection between the injection chamber 18 and the mass spectrometer detection mechanism to prevent the vacuum state inside the mass spectrometer detection mechanism from being affected during the sample change. The protection gas valve 3 is controlled to open the protection gas inlet 4, and the protection gas enters the injection chamber 18 at this time to prevent the gas in the environment from entering the chamber and causing interference.

[0055] When the puncture needle 19 needs to be replaced, the maintenance process can be started, the control of the valve is the same as the sample replacement process, and the sealing block 22 is removed, the puncture needle 19 is taken out of the needle seat 20 and replaced, and the sealing between the sealing block 22 and the injection chamber housing 5 is ensured by the O-ring, so that the puncture needle 19 can be replaced without disassembling the puncture valve 16.

[0056] The utility model controls the puncture needle and the injection valve through a stepper motor, reducing the error caused by manual operation, and corrects the position information of the injection valve in real time through the feedback of the position sensor and two vacuum gauges, so as to better control the injection process and improve the accuracy of the quantitative results. And through the design of a separate sealing block, the needle replacement process is optimized, maintenance time is saved, and possible risks are reduced. A set of internal gas analysis systems and methods for sealing devices is proposed, which are suitable for process development, material research, product identification, failure analysis and other work.

[0057] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A sealed device internal gas analyzer, connected to a mass spectrometer detection mechanism, for transmitting the internal gas of a sample on the sealed device to the mass spectrometer detection mechanism for analysis, It is characterized in that It includes a sample injection mechanism, a sample injection evacuation structure, a sample fixing structure and a needle puncture mechanism; The sampling mechanism is used for gas sampling of the sample and is connected to a mass spectrometry detection mechanism, and the internal gas of the sample in the sampling mechanism is detected and analyzed by the mass spectrometry detection mechanism; The sampling and evacuation structure is connected to the mass spectrometry detection mechanism and is used to evacuate the sampling mechanism; The sample fixing mechanism is arranged above the sample injection mechanism, and an openable and closable sealing structure is arranged between the sample fixing mechanism and the sample injection mechanism, and the sample fixing mechanism is used to fix the sample on the sealing structure; The puncture mechanism is vertically movably arranged in the sample injection mechanism and is located below the sealing structure, and is used for puncturing the sample on the sealing structure.

2. A sealed device internal gas analyzer according to claim 1, It is characterized in that The sampling mechanism comprises a sampling chamber housing (5), wherein a sampling chamber (18) is provided in the sampling chamber housing (5), and the sampling chamber (18) is connected to a sampling port (10) via a driving unit; the sampling evacuation structure comprises an evacuation port (9), wherein the evacuation port (9) is connected to the sampling chamber (18) via an evacuation valve (2), and the sampling port (10) and the evacuation port (9) are connected to a mass spectrometry detection mechanism via a sampling flange (24); the sampling chamber (18) is connected to an acupuncture chamber, and a sealing block (22) is provided above the acupuncture chamber, and the center of the sealing block (22) adopts an openable and closable structure; the sample is arranged on the top of the sealing block (22), and the acupuncture mechanism is arranged in the acupuncture chamber in a vertically movable manner and is located below the center of the sealing block (22).

3. A sealed device internal gas analyzer according to claim 2, It is characterized in that The acupuncture mechanism comprises a needle seat (20), wherein the needle seat (20) is arranged in the acupuncture cavity, one end of the needle seat (20) is connected to the puncture needle (19), and the other end of the needle seat (20) is threadedly connected to the puncture valve (15), one end of the puncture valve (15) is arranged in the acupuncture cavity in the injection cavity housing (5), and the other end of the puncture valve (15) is arranged outside the injection cavity housing (5) and connected to the output end of the puncture motor (16) via a coupling.

4. A sealed device internal gas analyzer according to claim 2, It is characterized in that The sample fixing mechanism comprises a bolt fixing plate (12) and a sample pressing block (14); the bolt fixing plate (12), the sample pressing block (14) and the injection chamber housing (5) are connected in series via connecting screws (13); a vertically movable clamping screw (11) is passed through the center of the bolt fixing plate (12); the bottom of the clamping screw (11) abuts against the sample pressing block (14) by vertical movement; the sample pressing block (14) is used to press the sample onto the sealing block (22).

5. A sealed device internal gas analyzer according to claim 2, It is characterized in that The injection chamber (18) is provided with an injection vacuum gauge (1) for monitoring the pressure value in the injection chamber (18); the mass spectrometer detection mechanism comprises a mass spectrometer chamber (32), and the mass spectrometer chamber (32) is provided with a mass spectrometer vacuum gauge (31); the mass spectrometer chamber (32) is provided with an ion source (25), a mass analyzer (26) and a detector (27); the mass spectrometer chamber (32) is connected to a fore pump (29) via a molecular pump (28); and a standard sample bottle (30) is also provided outside the mass spectrometer chamber (32), and the standard sample bottle (30) is used to calibrate the parameters of the mass spectrometer detection mechanism.

6. A gas analyzer inside a sealed device according to claim 2, It is characterized in that The driving unit comprises an injection motor (8), the injection motor (8) is connected to an injection valve (6), and the injection port (10) is connected to an injection chamber (18) via the injection valve (6).

7. A sealed device internal gas analyzer according to claim 6, It is characterized in that The injection valve (6) is connected to the injection chamber (18) via a coupling, and a position sensor (7) is provided on one side of the coupling for obtaining the position of the coupling.

8. A sealed device internal gas analyzer according to claim 7, It is characterized in that The position sensor (7) adopts a photoelectric sensor or a magnetoelectric sensor.

9. A sealed device internal gas analyzer according to claim 2, It is characterized in that It also comprises a protective gas mechanism, which is used to fill the injection chamber with protective gas; the protective gas mechanism comprises a protective gas inlet (4) and a protective gas valve (3), and the protective gas inlet (4) is connected to the injection chamber (18) via the protective gas valve (3).

10. A sealed device internal gas analyzer according to claim 2, It is characterized in that The injection cavity (18) is connected to a temperature control device (17) for controlling the temperature in the injection cavity (18).

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