Rolling device for nanoimprint

Abstract

The utility model relates to the field of nanoimprint, in particular to a rolling device for nanoimprint, which comprises a workbench, a rolling mechanism is arranged at the top of the workbench, the rolling mechanism comprises a support, a first transverse plate is connected to the top of the support, a hydraulic rod is fixedly arranged on one side of the first transverse plate, and the hydraulic rod is connected to the top of the workbench. A second transverse plate is fixedly connected to the output end of the hydraulic rod, a stroke groove is formed in the side wall of the first transverse plate, a displacement block is movably connected into the stroke groove, and a connecting rod is fixedly connected to the side wall of the displacement block; the rolling mechanism is in inclined plane contact with the rollers on the rolling mechanism, the rollers are driven by lifting of the hydraulic rods to move up and down, and the impressing film plate is gradually attached to the wafer during contact, so that the rollers roll the impressing film plate, the rolling device can provide a stable impressing environment and a repeatable impressing result, the consistency and quality of production are ensured, and the production efficiency is improved. And the rolling device can provide highly accurate pressure control and uniform impressing force, so that accurate processing and impressing of a nanoscale structure are realized.

Description

Technical Field

[0001] The utility model relates to the field of nano-imprinting, and in particular to a roller pressing device for nano-imprinting. Background Art

[0002] Imprinting is essentially a printing and replication technology, which is a technology for mass replication of templates. Imprinting technology processing technology can be divided into nanoimprinting technology and mold pressing technology according to the size of the pattern. The first proposed nanoimprinting technology is hot imprinting nanoimprinting technology and room temperature nanoimprinting technology;

[0003] There are some potential defects in the roller pressing device for nanoimprinting, which will affect the quality, efficiency and stability of the imprinting process. There is a problem of uneven roller pressing, which leads to uneven imprinting effects during the imprinting process, affecting the quality and consistency of the product. The device for controlling roller pressing has the problem of inaccurate pressure control, which makes it difficult to accurately control the pressure applied during the imprinting process, affecting the stability and repeatability of the imprinting results. The device requires complex adjustment and operation procedures, and requires special training and skills to operate correctly, which increases the workload and cost of the operator.

[0004] Therefore, there is an urgent need for a roller pressing device for nanoimprinting to solve the above problems. Summary of the invention

[0005] The purpose of the present invention is to solve the shortcomings of the prior art and to propose a roller pressing device for nanoimprinting.

[0006] In order to achieve the above purpose, this utility adopts the following technical solutions:

[0007] A rolling device for nano-imprinting comprises a workbench, a rolling mechanism is arranged on the top of the workbench, the rolling mechanism comprises a bracket, a first horizontal plate is connected to the top of the bracket, a hydraulic rod is fixedly arranged on one side of the first horizontal plate, a second horizontal plate is fixedly connected to the output end of the hydraulic rod, a travel groove is opened on the side wall of the first horizontal plate, a displacement block is movably connected in the travel groove, a connecting rod is fixedly connected to the side wall of the displacement block, the side wall of the connecting rod is fixedly connected to the second horizontal plate, limit blocks are arranged on the corresponding two side walls of the second horizontal plate, and the same two limit blocks are rotatably connected to rollers.

[0008] Preferably, the substrate fixing mechanism includes the support rod connected to the running rail, and a pressure monitoring device is fixed on the top of the first cross plate, and the pressure monitoring device is used to monitor the surface pressure of the roller in real time.

[0009] Preferably, the roller surface is made of flexible resin or rubber.

[0010] Preferably, the inner bearing of the roller is made of metal or ceramic material.

[0011] Beneficial effects of this utility:

[0012] 1. Through the rolling mechanism, the inclined surface formed by the rollers on the upper surface is in contact, and the rollers are driven to move up and down by the lifting of the hydraulic rod. When in contact, the imprinting film and the wafer are gradually fitted, so that the rollers roll the imprinting film. The rolling device can provide a stable imprinting environment and repeatable imprinting results to ensure the consistency and quality of production. The rolling device can provide highly precise pressure control and uniform imprinting force, thereby realizing precise processing and imprinting of nano-scale structures.

[0013] 2. The pressure surface of the roller is made of flexible resin or rubber, so the roller will also deform at the raised position. The roller will not concentrate the rolling force on the raised position, resulting in greater pressure at the raised position, thereby avoiding uneven pressure on the imprint template at this position, making the overall pressure on the imprint template more uniform, and reducing the phenomenon that the imprint template is easily damaged at the above-mentioned raised position. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 This is a schematic diagram of the overall structure of a roller pressing device for nanoimprinting proposed in this utility model;

[0015] Figure 2 A schematic diagram of the structure of a roller pressing mechanism of a roller pressing device for nanoimprinting proposed in this utility model;

[0016] Figure 3 A schematic diagram of a portion of the structure of a roller pressing device for nanoimprinting proposed in this utility model;

[0017] Figure 4 This is a partial structural schematic diagram of a roller pressing device for nanoimprinting proposed in this utility model.

[0018] In the figure: 1, workbench; 2, rolling mechanism; 21, bracket; 22, first cross plate; 23, hydraulic rod; 24, second cross plate; 25, travel groove; 26, displacement block; 27, connecting rod; 28, limit block; 29, roller. DETAILED DESCRIPTION

[0019] The technical scheme in the practical embodiment of the present invention will be clearly and completely described below in conjunction with the drawings in the practical embodiment of the present invention. Obviously, the described embodiment is only a part of the practical embodiment of the present invention, rather than all the embodiments.

[0020] In the description of the present invention, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", "top", "bottom", "inside", "outside", etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings and are only for the convenience of describing the present invention and simplifying the description. They do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be understood as a limitation on the present invention.

[0021] Reference Figure 1-4 A rolling device for nano-imprinting, a workbench 1, a rolling mechanism 2 is arranged on the top of the workbench 1, the rolling mechanism 2 includes a bracket 21, a first horizontal plate 22 is connected to the top of the bracket 21, a hydraulic rod 23 is fixedly arranged on one side of the first horizontal plate 22, and a second horizontal plate 24 is fixedly connected to the output end of the hydraulic rod 23, a stroke groove 25 is opened on the side wall of the first horizontal plate 22, a displacement block 26 is movably connected in the stroke groove 25, a connecting rod 27 is fixedly connected to the side wall of the displacement block 26, and the side wall of the connecting rod 27 is fixedly connected to the second horizontal plate 24, and limit blocks 28 are arranged on the corresponding two side walls of the second horizontal plate 24, and the same two limit blocks 28 are rotatably connected to a roller 29, and the rolling mechanism 2 can provide highly accurate pressure control and uniform imprinting force, thereby realizing accurate processing and imprinting of nano-scale structures.

[0022] Specifically, a pressure monitoring device is fixed on the top of the first transverse plate 22, and the pressure monitoring device is used to monitor the surface pressure of the roller 29 in real time, provide a stable imprinting environment and repeatable imprinting results, and ensure the consistency and quality of production.

[0023] Specifically, the surface material of the roller 29 is flexible resin or rubber, so as to avoid uneven pressure on the imprint template at this position, so that the pressure on the imprint template as a whole is more uniform.

[0024] Specifically, the inner bearing of the roller 29 is made of metal or ceramic material, which can achieve high-speed stamping, accelerate the production rhythm, improve production efficiency, and reduce production costs.

[0025] Working principle: When the utility model is used, the operator contacts the inclined surface formed by the roller 29 on the rolling mechanism 2, and drives the roller 29 to move up and down by lifting and lowering the hydraulic rod 23. When in contact, the imprinting film plate and the wafer are gradually fitted, so that the roller 29 rolls the imprinting film plate. This process ensures that the imprinting glue on the imprinting template is gradually attached to the wafer, avoiding the overall contact with the imprinting glue on the imprinting film plate to produce fluidity, thereby causing the accuracy to not meet the requirements. Afterwards, the nano-imprinting glue on the imprinting film plate is imprinted on the wafer. After the rolling is completed, the imprinting template returns to a horizontal angle.

[0026] The above is only a preferred specific implementation method of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed in the present invention according to the technical solution and practical concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A roller pressing device for nanoimprinting, characterized in that: include: A workbench (1), wherein a rolling mechanism (2) is arranged on the top of the workbench (1), wherein the rolling mechanism (2) comprises a bracket (21), wherein a first horizontal plate (22) is connected to the top of the bracket (21), wherein a hydraulic rod (23) is fixedly arranged on one side of the first horizontal plate (22), wherein the output end of the hydraulic rod (23) is fixedly connected to a second horizontal plate (24), wherein a travel groove (25) is provided on the side wall of the first horizontal plate (22), wherein a displacement block (26) is movably connected in the travel groove (25), wherein a connecting rod (27) is fixedly connected to the side wall of the displacement block (26), wherein the side wall of the connecting rod (27) is fixedly connected to the second horizontal plate (24), wherein limit blocks (28) are arranged on the corresponding side walls of the second horizontal plate (24), wherein two limit blocks (28) are rotatably connected to rollers (29) together.

2. A roller pressing device for nanoimprinting according to claim 1, characterized in that: A pressure monitoring device is fixed on the top of the first transverse plate (22), and the pressure monitoring device is used to monitor the surface pressure of the roller (29) in real time.

3. A roller pressing device for nanoimprinting according to claim 1, characterized in that: The surface material of the roller (29) is flexible resin or rubber.

4. A roller pressing device for nanoimprinting according to claim 2, characterized in that: The inner bearing of the roller (29) is made of metal or ceramic material.

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