Wafer cassette transmission mechanism, wafer cassette storage equipment and automatic material carrying system
By designing multi-track structures and transport components, the problem of wafer box transmission difficulties caused by unreasonable location of Tianche transmission equipment and repository is solved, and the correct pick-up and repository expansion is achieved when the factory space layout is limited.
Patent Information
- Application Number
- CN202422640143.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-31
- Publication Date
- 2024-12-10
- Estimated Expiration
- 2034-10-31
AI Technical Summary
In wafer processing factories, due to the influence of the factory space location, it is difficult to properly arrange the relative position of Tianche transmission equipment and the repository, which leads to Tianche's inability to correctly pick up and place the wafer box through the wafer box transmission mechanism, which in turn leads to the wafer box. Difficult to enter and exit the warehouse.
A wafer box transmission mechanism is designed, including the first track and the second track, which moves between different positions through the transfer assembly and the transport vehicle to form two wafer box transmission paths to avoid docking to the curved track of the Tianche Track. , ensure that the skycar can accurately locate and pick up and place the wafer box in the straight track section.
It realizes that Tianche can correctly pick up and place the wafer box when the factory space layout is limited, avoiding the difficulty of picking and putting up the curved rail section due to docking, and improving the storage library expansion capability of the wafer box.
Smart Images
Figure CN222146172U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductor processing, and in particular to a wafer box transmission mechanism, a wafer box storage device and an automatic material handling system. Background Art
[0002] With the rapid development of intelligent technology, a large number of processing plants have achieved fully intelligent production. Among them, in wafer processing plants, automatic material handling systems (AMHS) are widely used. The automatic material handling system usually includes overhead crane transmission equipment and wafer box storage equipment, among which the storage equipment includes a wafer box transmission mechanism and a storage library. When the wafer box is put into storage, the overhead crane transmission equipment transports the wafer box to the wafer box transmission mechanism (also called the "transmission port"), and the wafer box transmission mechanism then transports the wafer box to the entrance of the storage library, and then the wafer box is transported to the target position inside the storage library by the handling robot in the storage library. On the contrary, when the wafer box is out of the warehouse, the handling robot transports the wafer box in the storage library to the wafer box transmission mechanism, and transports the wafer box to the overhead crane transmission equipment via the wafer box transmission mechanism.
[0003] However, due to the spatial location of the factory, the relative positions of the overhead crane transmission equipment and the storage warehouse are difficult to arrange reasonably, making it difficult to transfer wafer boxes between the overhead crane transmission equipment and the storage warehouse through the wafer box transmission mechanism, which in turn makes it difficult for wafer boxes to enter and exit the warehouse. Utility Model Content
[0004] In order to overcome the above-mentioned shortcomings, the purpose of the utility model is to provide a wafer box transmission mechanism, which can enable the overhead crane to correctly pick up and place the wafer box when the storage library portion corresponds to the curved track section of the overhead crane track, thereby avoiding the situation where the track on the wafer box transmission mechanism is connected to the curved track section of the overhead crane track, causing the overhead crane to stay on the curved track section and resulting in the overhead crane being unable to correctly pick up and place the wafer box.
[0005] The wafer box transmission mechanism according to the embodiment of the utility model includes:
[0006] A first track, the first track extends along a first direction, and two ends of the first track are respectively used to dock with a crane and a storage bin of a crane transmission device;
[0007] The second track includes a first track segment and a second track segment spaced in parallel with the first track in the second direction and spaced in the first direction, an end of the first track segment away from the second track segment is used to dock with the overhead traveling vehicle of the overhead traveling vehicle transmission device, and an end of the second track segment away from the first track segment is used to dock with the storage library; in the second direction, the spacing between the first track segment and the first track is smaller than the spacing between the second track segment and the first track;
[0008] The transfer component is arranged between the first track segment and the second track segment. The transfer component includes a transfer track, and the transfer track can move between a first position and a second position along a second direction; in the first position, the transfer track is connected to the first track segment; in the second position, the transfer track is connected to the second track segment.
[0009] Furthermore, the wafer box transport mechanism also includes a carrier vehicle, which is used to transport the wafer box on the first track or to transport the wafer box on the transfer track and the first track segment / second track segment connected to the transfer track.
[0010] Furthermore, vehicles are provided on the first track, the first track segment and the second track segment, and each vehicle is connected to and driven by a power source via electric wires.
[0011] Furthermore, the wafer box transmission mechanism also includes at least one of a first storage position and a second storage position; wherein the first storage position is arranged between the first track and the second track segment; the second storage position is arranged on the side of the first track segment away from the first track; and when the transfer track moves to the first position, one end of the transfer track docks with the first storage position; when the transfer track moves to the second position, one end of the transfer track docks with the second storage position.
[0012] Furthermore, the wafer box transmission mechanism also includes a bracket supporting the first track and the second track, and the transfer assembly also includes a linear module, the linear module has a fixed pair and a movable pair that can move relative to the fixed pair, the bracket is connected to the fixed pair, and the movable pair is connected to the transfer track.
[0013] Furthermore, the wafer box transmission mechanism also includes a supporting assembly, which includes a fixing rod and a first adjusting rod. The fixing rod extends along the second direction, and both ends of the fixing rod lift the bracket through the first adjusting rod.
[0014] Furthermore, the support assembly also includes a second adjusting rod, and both ends of the fixed rod are lifted by the first adjusting rod and the second adjusting rod. The lower end of the first adjusting rod intersects with the lower end of the second adjusting rod, and the upper end of the first adjusting rod is arranged on the inner side of the upper end of the second adjusting rod.
[0015] Furthermore, there are multiple support assemblies, including a first support assembly close to the storage library and a second support assembly away from the storage library, the first support assembly is connected to the bracket, the wafer box transmission mechanism also includes a support rod extending along the second direction, the support rod abuts against the lower end of the first rail and the first rail segment away from the storage library, and the lower ends of the first adjustment rod and the second adjustment rod of the second support assembly are both connected to the support rod.
[0016] Furthermore, at least one detection sensor for detecting the presence of a wafer box is disposed on the first track, the first track segment, the second track segment and the transfer track, and the detection direction of the detection sensor is inclined to the vertical direction and to the first direction.
[0017] The utility model also provides a wafer box storage device, the wafer box storage device comprising:
[0018] Any of the above wafer box transfer mechanisms;
[0019] The storage library is located on one side of the wafer box transmission mechanism in the first direction. The storage library has a robot operation area and two wafer box storage areas both extending along the first direction. The two wafer box storage areas are arranged at intervals on both sides of the robot operation area in the second direction. The first track and the second track segment are connected to the two wafer box storage areas one by one.
[0020] The utility model also provides an automatic material handling system, which includes an overhead crane transmission device and a wafer box storage device, the wafer box storage device is the above-mentioned wafer box storage device, the overhead crane transmission device includes an overhead crane track, the overhead crane track has a curved track section and a straight track section, in the second direction, the curved track section corresponds to the second track section, and the straight track section corresponds to the first track and the first track section. BRIEF DESCRIPTION OF THE DRAWINGS
[0021] Figure 1 It is a structural schematic diagram of the overhead travelling crane transmission device in the embodiment of the utility model;
[0022] Figure 2 This is a schematic diagram of the structure of a wafer box transmission mechanism according to an embodiment of the utility model assembled on one side of a storage library;
[0023] Figure 3 for Figure 2 A partial enlarged view of the A part;
[0024] Figure 4 It is a structural schematic diagram of a wafer box transmission mechanism according to an embodiment of the utility model;
[0025] Figure 5 It is a schematic diagram of the positions of the wafer box transmission mechanism, the overhead crane transmission device and the storage bin in accordance with an embodiment of the utility model;
[0026] Figure 6 This is a schematic diagram of the structure of a wafer box placed on a carrier vehicle according to an embodiment of the utility model;
[0027] Figure 7 A schematic diagram of the structure of a carrier vehicle according to an embodiment of the utility model;
[0028] Figure 8This is a schematic diagram of the structure of the transfer assembly of an embodiment of the utility model;
[0029] Fig. 9 It is a structural schematic diagram of the connection between the second supporting assembly and the supporting rod in an embodiment of the utility model. DETAILED DESCRIPTION
[0030] The preferred embodiments of the present invention are described in detail below in conjunction with the accompanying drawings so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making a clearer and more definite definition of the protection scope of the present invention.
[0031] In the prior art, see the attached Figure 1 As shown, the overhead crane transmission equipment 1 generally includes an overhead crane track 11 and at least one overhead crane 12 running along the overhead crane track 11, wherein the overhead crane track 11 includes a straight track section 111 and a curved track section 112. At present, when a factory is laying out an automatic material handling system, the storage library is generally arranged near the straight track section 111 of the overhead crane track 11, so that the wafer box transmission mechanism is directly connected to the straight track section 111 of the overhead crane track 11. When the overhead crane 12 needs to store or access a wafer box, the overhead crane 12 determines the real-time position of the overhead crane 12 by scanning the QR code on the straight track section 111. The overhead crane 12 can be accurately positioned at the position where the wafer box needs to be placed or taken on the straight track section 111. At this time, the clamping claw of the overhead crane 12 is directly opposite to the grasping position of the wafer box, and the overhead crane 12 can correctly grasp the wafer box. When a factory needs to increase the wafer box storage capacity, it will consider adding a storage library. Sometimes, due to the factory space layout, the storage library has to be planned near the curved track section 112 of the overhead crane track 11. At this time, the wafer box transmission mechanism will inevitably be partially connected to the curved track section 112 of the overhead crane track 11. When the overhead crane 12 stays on the curved track section 112, it cannot accurately scan the code for positioning, and the gripper of the overhead crane 12 is not aligned with the grabbing position of the wafer box on the wafer box transmission mechanism. Therefore, the overhead crane 12 cannot store and take the wafer box on the wafer box transmission mechanism. In other words, the overhead crane cannot take and store the wafer box through the wafer box transmission mechanism and the storage library, resulting in the factory being unable to add a storage library. Based on this, see the attached Figure 2-5As shown, a wafer box transmission mechanism 2 of an embodiment of the utility model comprises a first track 21, a second track 22 and a transfer assembly 23, wherein the first track 21 extends along the first direction, and its two ends are respectively used to dock with the overhead crane 12 of the overhead crane transmission device 1 and the storage bin 3. The second track 22 comprises a first track segment 221 and a second track segment 222 which are spaced and parallel with the first track 21 in the second direction and spaced in the first direction, the end of the first track segment 221 away from the second track segment 222 is used to dock with the overhead crane 12 of the overhead crane transmission device 1, and the end of the second track segment 222 away from the first track segment 221 is used to dock with the storage bin 3. In the second direction, the spacing between the first track segment 221 and the first track 21 is smaller than the spacing between the second track segment 222 and the first track 21. The transfer assembly 23 is arranged between the first track segment 221 and the second track segment 222, and the transfer assembly 23 comprises a transfer track 232, and the transfer track 232 can move between the first position and the second position along the second direction. In the first position, the transfer track 232 is connected to the first track segment 221 ; in the second position, the transfer track 232 is connected to the second track segment 222 .
[0032] In the wafer box transmission mechanism 2, two wafer box transmission paths can be formed between the overhead crane transmission device 1 and the storage library 3 by setting the first track 21 and the second track 22; wherein the second track 22 includes a first track segment 221 and a second track segment 222, and by setting the spacing between the first track segment 221 and the first track 21 to be smaller than the spacing between the second track segment 222 and the first track 21, the first track segment 221 and the second track segment 222 can be staggered by a distance in the second direction. This arrangement makes the spacing between the first track 21 and the second track segment 222 larger on the side close to the storage library 3, so as to ensure the normal flow of the wafer box 4 between the wafer box transmission mechanism 2 and the storage library 3; and on the side close to the overhead crane transmission device 1, the spacing between the first track 21 and the second track segment 221 is smaller, and the layout is relatively compact, and then, when the second track segment 222 is set to extend in the direction of the curved track segment 112 of the overhead crane track 11 due to the limitation of the factory space layout, The first track section 221 can avoid the curved track section 112 of the overhead crane track 11 and connect to the straight track section 111 of the overhead crane track 11. The overhead crane 12 can accurately position when storing or taking out the wafer box at the straight track section 111. The clamping claws of the overhead crane 12 are directly opposite to the grasping position of the wafer box 4. The overhead crane 12 can correctly grasp the wafer box 4, avoiding the situation where the track on the wafer box transmission mechanism 2 connects to the curved track section 112 of the overhead crane track 11, causing the overhead crane 12 to stay on the curved track section 112 and resulting in the overhead crane 12 being unable to correctly take and place the wafer box 4.
[0033] In addition, due to the structural design of the storage library 3, there is inevitably a certain distance between the first track 21 and the second track segment 222, and in the second direction, the first track segment 221 is offset in the direction close to the first track 21, occupying the original distance between the first track 21 and the second track segment 222. Therefore, the offset setting of the first track segment 221 does not occupy additional external space of the wafer box transport mechanism 2.
[0034] It should be noted that the first direction and the second direction are both horizontal directions, and the first direction and the second direction are perpendicular to each other.
[0035] In some embodiments, see Appendix Figure 6-7 As shown, the wafer box transport mechanism 2 also includes a carrier 26 for transporting the wafer box 4 on the first track 21 or for transporting the wafer box 4 on the transfer track 232 and the first track segment 221 / second track segment 222 connected to the transfer track 232 .
[0036] Specifically, a carrier 26 is provided on each of the first track 21, the first track section 221, and the second track section 222, and each carrier 26 is connected and driven by a power source through an electric wire. During the movement of the carrier 26, the electric wire will be dragged along. The electric wire is usually protected by a drag chain, so when the carrier 26 is powered by the electric wire and the power source, the carrier 26 can only move in a straight line. For the second track 22, since the first track section 221 and the second track section 222 are not in the same straight line direction, a carrier 26 is required on each of the first track section 221 and the second track section 222 to realize the transportation of the wafer box 4, which is equivalent to having two carriers 26 on the second track 22.
[0037] Exemplarily, when the transfer track 232 is connected to the first track segment 221 at a first position, the carrier 26 on the first track segment 221 can move back and forth between the first track segment 221 and the transfer track 232; when the transfer track 232 is connected to the second track segment 222 at a second position, the carrier 26 on the second track segment 222 can move back and forth between the second track segment 222 and the transfer track 232. For ease of understanding, taking the example of the wafer box 4 being transported from the first track segment 221 to the second track segment 222, the transfer track 232 moves to the first position and is connected to the first track segment 221, and the carrier 26 on the first track segment 221 immediately drives the wafer box 4 into the transfer track 232, and then the carrier 26 places the wafer box 4 on the transfer track 232, and then returns to the first track segment 221. At this time, the wafer box 4 is placed on the transfer track 232; then the transfer track 232 moves to the second position and is connected to the second track segment 222, and the carrier 26 on the second track segment 222 enters the transfer track 232 along the second track segment 222 and supports the wafer box 4 located on the transfer track 232; then the carrier 26 on the second track segment 222 drives the wafer box 4 into the second track segment 222. During this process, the wafer box 4 is carried in sequence by the carrier 26 on the first track segment 221 , the transfer track 232 , and the carrier 26 on the second track segment 222 .
[0038] Of course, only one carrier 26 may be arranged on the second track 22. In this case, the carrier 26 is powered and driven by a battery or by charging. For example, if the carrier 26 is located on the first track segment 221 in the initial state, when the transfer track 232 is connected to the first track segment 221 at the first position, the carrier 26 can move along the first track segment 221 to the transfer track 232; then the transfer track 232 carries the carrier 26 to the second position, and when the transfer track 232 is connected to the second track segment 222 at the second position, the carrier 26 can move along the transfer track 232 to the second track segment 222. In this process, the wafer box 4 is always carried by the carrier 26.
[0039] Obviously, the power supply method of wires and power supply can provide real-time power supply to the carrier 26, thereby ensuring that the carrier 26 can work at any time, avoiding the wafer box 4 being blocked during transportation due to the battery being exhausted or the carrier 26 being unable to continue working during charging.
[0040] In some embodiments, see Appendix Figure 6-7As shown, the carrier 26 includes a walking part 261, a lifting part 262, and a rotating part 263, wherein the walking part 261 is used to move along the first track 21, the second track 22 or the transfer track 232. The lifting part 262 is installed on the walking part 261 to drive the rotating part 263 to move up and down. The rotating part 263 includes a carrier that can rotate, and the upper end of the carrier is used to carry the wafer box 4.
[0041] When the wafer box 4 is placed on the carrier, the lifting part 262 is started to make the rotating part 263 rise to the highest position. At this time, the carrier supports the wafer box 4 to move upward synchronously, and the wafer box 4 is suspended on the first track 21, the second track 22 or the transfer track 232 (it can be understood that the lower end of the wafer box 4 does not contact the first track 21, the second track 22 or the transfer track 232); then, the walking part 261 is started, and the carrier 26 can move along the first track 21, the second track 22 or the transfer track 232 moves and drives the wafer box 4 on the carrier to move synchronously to realize the in-and-out storage transfer of the wafer box 4; and when the rotating part 263 is lowered to the lowest position under the action of the lifting part 262, the wafer box 4 can be separated from the carrier and abut against the first track 21, the second track 22 or the transfer track 232. At this time, the wafer box 4 is placed on the first track 21, the second track 22 or the transfer track 232, and the carrier can leave the position of the wafer box 4 under the action of the walking part 261.
[0042] In this embodiment, the carrier 26 only needs to realize the functions of carrying the wafer box 4 and lifting and rotating the wafer box 4. Among them, the rotation of the wafer box 4 is because the placement direction of the wafer box 4 on the overhead crane 12 is different from the direction in which the handling robot (in the storage bin 3) grabs the wafer box 4. Therefore, in the process of the wafer box transmission mechanism 2 transmitting the wafer box 4, the direction of the wafer box 4 needs to be adjusted, and the wafer box 4 usually needs to be rotated 90°. It should be noted that when the wafer box 4 is transmitted on the second track 22, the rotation movement of the wafer box 4 can be performed on the first track segment 221, the second track segment 222 or the transfer track 232.
[0043] In actual working conditions, it is possible that the wafer box 4 on the first track segment 221 cannot be taken out in time due to the busy overhead crane transmission device 1, or the wafer box 4 on the second track segment 222 cannot be stored in time due to the busy handling robot in the storage bin 3, which causes the wafer box 4 to be stranded on the first track segment 221 and the second track segment 222, affecting the normal operation of the wafer box transmission mechanism 2. Therefore, in some embodiments, the wafer box transmission mechanism 2 also includes at least one of a first storage position 24 and a second storage position 25. The first storage position 24 is arranged between the first track 21 and the second track segment 222; the second storage position 25 is arranged on the side of the first track segment 221 away from the first track 21; and when the transfer track 232 moves to the first position, one end of the transfer track 232 docks with the first storage position 24; when the transfer track 232 moves to the second position, one end of the transfer track 232 docks with the second storage position 25.
[0044] When the overhead crane transport device 1 is busy, if the first track segment 221 is full of wafer boxes 4, and the second track segment 222 is still transporting wafer boxes 4 toward the first track segment 221, the transfer track 232 can temporarily store the wafer boxes 4 on the second track segment 222 in the first storage position 24 and / or the second storage position 25 to relieve the taking pressure of the overhead crane transport device 1. When the handling robot in the storage library 3 is busy, the second track segment 222 is full of wafer boxes 4, and the overhead crane transport device 1 is still transporting wafer boxes 4 toward the first track segment 221, the transfer track 232 can temporarily store the wafer boxes 4 on the first track segment 221 in the first storage position 24 and / or the second storage position 25 to relieve the storage pressure of the handling robot.
[0045] In addition, since there is a gap between the first track 21 and the second track segment 222, the first storage position 24 is directly set at the gap between the first track 21 and the second track segment 222. The first track segment 221 is staggered with the second track segment 222, so there is space for setting the second storage position 25 on the side of the first track segment 221 away from the first track 21. This arrangement allows the layout of the first storage position 24 and the second storage position 25 to utilize the space occupied by the wafer box transmission mechanism 2 itself, and no additional space will be occupied.
[0046] In some embodiments, see Appendix Figure 8 As shown, in order to timely detect the position of the wafer box 4, at least one detection sensor 201 for detecting the presence or absence of the wafer box 4 is provided on the first track 21, the first track segment 221, the second track segment 222 and the transfer track 232. Furthermore, the detection direction of the detection sensor 201 is inclined to the vertical direction and to the first direction to improve the detection accuracy.
[0047] In some embodiments, see Appendix Figure 3 The wafer box transmission mechanism 2 also includes a bracket 27 that supports the first track 21 and the second track 22. The transfer assembly 23 also includes a linear module 231. The linear module 231 has a fixed pair and a movable pair that can move relative to the fixed pair. The bracket 27 is connected to the fixed pair, and the movable pair is connected to the transfer track 232. In this way, the linear module 231 can drive the transfer track 232 to move between the first position and the second position. It can be understood that the linear module 231 can adopt any device that can perform linear drive, such as a nut screw mechanism or a linear motor. In some embodiments, see the attached Figure 8 As shown, the transfer track 232 includes a transfer base 2321 and two side rails 2322 symmetrically arranged on the transfer base 2321. The moving pair of the linear module 231 is connected to the transfer base 2321. The upper ends of the two side rails 2322 are jointly provided with a supporting plane for supporting the wafer box 4. Furthermore, the side rails 2322 are also provided with side baffles 233 for preventing the wafer box 4 from slipping.
[0048] In some embodiments, the wafer box transport mechanism 2 further includes a support assembly, the support assembly includes a fixed rod 2801 and a first adjustment rod 2802, the fixed rod 2801 extends along the second direction, and both ends of the fixed rod 2801 are lifted by the bracket 27 through the first adjustment rod 2802. Figure 3 As shown, the support assembly includes a fixed rod 2801 and a first adjustment rod 2802, wherein the fixed rod 2801 is hoisted and fixed on the roof in the horizontal direction. The first adjustment rods 2802 are arranged in pairs, and the two first adjustment rods 2802 arranged in pairs are respectively distributed on the side away from each other of the first track 21 and the second track 22, and the upper end of each first adjustment rod 2802 is connected to the fixed rod 2801, and the lower end of each first adjustment rod 2802 is connected to the bracket 27. The second track 22 can prevent the root of the bracket 27 connected to the storage 3 from being damaged by excessive bending moment by pulling the bracket 27 through the support assembly.
[0049] Furthermore, the first adjustment rod 2802 includes an upper rod body, a lower rod body and an adjustment sleeve, one end of the upper rod body is connected to the fixed rod 2801, and the other end is threadedly connected to the adjustment sleeve. One end of the lower rod is threadedly connected to the adjustment sleeve, and the other end is connected to the bracket 27. This arrangement can adjust the length of the first adjustment rod 2802 by using the threaded connection between the adjustment sleeve and the upper rod and the lower rod body, thereby facilitating the adjustment of the height of the bracket 27.
[0050] In some embodiments, the support assembly also includes a second adjustment rod 2803, and both ends of the fixed rod 2801 lift the bracket 27 through the first adjustment rod 2802 and the second adjustment rod 2803, the lower end of the first adjustment rod 2802 intersects with the lower end of the second adjustment rod 2803, and the upper end of the first adjustment rod 2802 is arranged on the inner side of the upper end of the second adjustment rod 2803.
[0051] For details, see the attached Fig. 9 As shown, the first adjustment rod 2802 extends in the vertical direction, the second adjustment rod 2803 extends downward and inward, the lower ends of the first adjustment rod 2802 and the second adjustment rod 2803 intersect and are connected to the bracket 27, the upper ends of the first adjustment rod 2802 and the second adjustment rod 2803 are connected to the fixed rod 2801, and the upper end of the first adjustment rod 2802 is arranged at intervals on the inner side of the upper end of the second adjustment rod 2803, and the fixed rod 2801 between the first adjustment rod 2802 and the second adjustment rod 2803 forms a triangular structure with the first adjustment rod 2802 and the second adjustment rod 2803. When the transfer track 232 reciprocates along the second direction, the first adjustment rod 2802, the second adjustment rod 2803 and the fixed rod 2801 cooperate to improve the hoisting stability of the first track 21 and the second track 22.
[0052] In some embodiments, there are multiple support assemblies, including a first support assembly 281 close to the storage 3 and a second support assembly 282 far from the storage 3. The first support assembly 281 is connected to the bracket 27. Figure 3 and Fig. 9 As shown, the wafer box transfer mechanism 2 also includes a support rod 283 extending along the second direction, the support rod 283 abuts against the lower end of the first rail 21 and the first rail segment 221 away from the storage library 3, and the lower ends of the first adjustment rod 2802 and the second adjustment rod 2803 of the second support assembly 282 are both connected to the support rod 283.
[0053] When equipment that interferes with the wafer box transfer mechanism 2 in height needs to be transported below the crane track 11 and the bracket 27, the second support assembly 282, the support rod 283, part of the first track 21 and the first track segment 221 can be disassembled to avoid the equipment that needs to be transported without disassembling the entire wafer box transfer mechanism 2.
[0054] The utility model also provides a wafer box storage device, see attached Figure 2 and Figure 5As shown, a wafer box storage device of this embodiment includes a wafer box transmission mechanism 2 and a storage library 3. Among them, the wafer box transmission mechanism 2 is the wafer box transmission mechanism 2 according to the above embodiment of the utility model, and the storage library 3 is located on one side of the wafer box transmission mechanism 2 in the first direction. The storage library 3 has a robot operation area 31 and two wafer box storage areas 32 extending along the first direction. The two wafer box storage areas 32 are arranged at intervals on both sides of the robot operation area 31 in the second direction, and the first track 21 and the second track segment 222 are connected to the two wafer box storage areas 32 in a one-to-one correspondence.
[0055] Specifically, the storage 3 is provided with a robot operation area 31 and two wafer box storage areas 32 located on both sides of the robot operation area 31. The storage 3 is located on one side of the wafer box transmission mechanism 2 in the first direction, and a first docking window and a second docking window are opened on the storage 3. The first docking window and the second docking window are respectively located on the side of the two wafer box storage areas 32 facing the wafer box transmission mechanism 2. A transport robot is provided in the robot operation area 31, and the transport robot can transport the wafer box 4 at any wafer box storage area 32 to the first docking window or the second docking window.
[0056] The robot operation area 31 and two wafer box storage areas 32 of the storage library 3 are extended along the first direction, and the storage library 3 is located on one side of the wafer box transmission mechanism 2 in the first direction, which can save the factory's space in the second direction and avoid the wafer box storage device from interfering with other devices in the second direction. The storage library 3 and the wafer box transmission mechanism 2 cooperate to realize the storage and outbound actions of the wafer box 4, providing convenience for the storage or retrieval of the wafer box 4.
[0057] In addition, due to the setting of the robot operation area 31, there must be a distance between the two wafer box storage areas 32, and therefore, there will also be a distance between the first docking window and the second docking window, which makes it inevitable that there is a distance between the first track 21 and the second track segment 222. Therefore, when the wafer box transmission mechanism 2 is arranged, the first track segment 221 can use the existing distance between the first track 21 and the second track segment 222, and no additional space will be occupied.
[0058] The utility model also provides an automatic material handling system, which includes an overhead crane transmission device 1 and a wafer box storage device. The wafer box storage device is the wafer box storage device of the above embodiment. The overhead crane transmission device 1 includes an overhead crane track. The overhead crane track has a curved track segment 112 and a straight track segment 111. In the second direction, the curved track segment 112 corresponds to the second track segment 222, and the straight track segment 111 corresponds to the first track 21 and the first track segment 221.
[0059] The automatic material handling system of the embodiment of the utility model can stop the overhead crane 12 at the straight track section 111 through the wafer box transmission mechanism 2 of the wafer box equipment. The overhead crane 12 cooperates with the first track section 221 to correctly pick up and place the wafer box 4, avoiding the situation where the overhead crane 12 cannot pick up and place the wafer box at the curved track section 112 corresponding to the second track section 222.
[0060] The above implementation modes are only for illustrating the technical concept and features of the utility model, and their purpose is to allow people familiar with this technology to understand the content of the utility model and implement it. It cannot be used to limit the protection scope of the utility model. Any equivalent changes or modifications made according to the spirit of the utility model should be included in the protection scope of the utility model.
Claims
1. A wafer box transmission mechanism, characterized in that: include: A first track, the first track extending along a first direction, and two ends of which are respectively used to dock with a crane and a storage bin of the crane transmission equipment; Track 2; The second track comprises a first track segment and a second track segment which are spaced apart and parallel to the first track in the second direction and spaced apart in the first direction, an end of the first track segment away from the second track segment is used for docking with the overhead travelling vehicle, and an end of the second track segment away from the first track segment is used for docking with the storage bin; In the second direction, a distance between the first track segment and the first track is smaller than a distance between the second track segment and the first track; A transfer component is arranged between the first track segment and the second track segment, and the transfer component includes a transfer track, and the transfer track can move between a first position and a second position along the second direction. In the first position, the transfer track is connected to the first track segment; in the second position, the transfer track is connected to the second track segment.
2. The wafer box transport mechanism according to claim 1, characterized in that: The first track, the first track segment and the second track segment are all provided with a carrier vehicle, and each of the carrier vehicles is connected to and driven by a power source via an electric wire.
3. The wafer box transport mechanism according to claim 1, characterized in that: It also includes at least one of a first storage position and a second storage position; wherein the first storage position is arranged between the first track and the second track segment; the second storage position is arranged on the side of the first track segment away from the first track; and when the transfer track moves to the first position, one end of the transfer track docks with the first storage position; when the transfer track moves to the second position, one end of the transfer track docks with the second storage position.
4. The wafer box transport mechanism according to claim 1, characterized in that: It also includes a bracket supporting the first track and the second track. The transfer assembly also includes a linear module, which has a fixed pair and a movable pair that can move relative to the fixed pair. The bracket is connected to the fixed pair, and the movable pair is connected to the transfer track.
5. The wafer box transport mechanism according to claim 4, characterized in that: It also includes a support assembly, which includes a fixing rod and a first adjusting rod. The fixing rod extends along the second direction, and both ends of the fixing rod lift the bracket through the first adjusting rod.
6. The wafer box transport mechanism according to claim 5, characterized in that: The support assembly also includes a second adjusting rod, and both ends of the fixed rod lift the bracket through the first adjusting rod and the second adjusting rod, the lower end of the first adjusting rod intersects with the lower end of the second adjusting rod, and the upper end of the first adjusting rod is arranged at an interval on the inner side of the upper end of the second adjusting rod.
7. The wafer box transport mechanism according to claim 6, characterized in that: There are multiple support assemblies, including a first support assembly close to the storage library and a second support assembly away from the storage library, the first support assembly is connected to the bracket, the wafer box transmission mechanism also includes a support rod extending along the second direction, the support rod abuts against the first rail and the lower end of the first rail segment away from the storage library, and the lower ends of the first adjustment rod and the second adjustment rod of the second support assembly are connected to the support rod.
8. The wafer box transport mechanism according to claim 1, characterized in that: At least one detection sensor for detecting the presence or absence of a wafer box is disposed on the first track, the first track segment, the second track segment and the transfer track. The detection direction of the detection sensor is inclined to the vertical direction and to the first direction.
9. A wafer box storage device, characterized in that: include: The wafer box transmission mechanism according to any one of claims 1 to 8; A storage library, wherein the storage library is located on one side of the wafer box transmission mechanism in the first direction, the storage library has a robot operation area and two wafer box storage areas both extending along the first direction, the two wafer box storage areas are arranged at intervals on both sides of the robot operation area in the second direction, and the first track and the second track segments are connected to the two wafer box storage areas in a one-to-one correspondence.
10. An automatic material handling system, characterized in that: It includes an overhead crane transmission device and a wafer box storage device, wherein the wafer box storage device is the wafer box storage device according to claim 9, and the overhead crane transmission device includes an overhead crane track, wherein the overhead crane track has a curved track segment and a straight track segment, and in the second direction, the curved track segment corresponds to the second track segment, and the straight track segment corresponds to the first track and the first track segment.