Cleaning tool for cleaning cylindrical workpiece
By designing rotatable inner and outer wall cleaning components and cleaning tools for collectors, the problem of splashing silicon deposition on the diversion cylinder affects the movement of crystal rods is solved, and safe and efficient splashing silicon cleaning is achieved, avoiding the difficulty of traditional baking operations and Safety hazards.
Patent Information
- Application Number
- CN202420488531.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-13
- Publication Date
- 2024-12-17
- Estimated Expiration
- 2034-03-13
AI Technical Summary
During the drawing process of large-diameter crystal rods, if the splashed silicon deposited on the diversion cylinder is not cleaned regularly, it will affect the normal movement of the crystal rod and may lead to the breaking of the barrel. The existing technology lacks special cleaning tools, resulting in manual drying. The baking operation is difficult and poses safety risks.
A cleaning tool for cleaning cylindrical workpieces is designed, including a central shaft, an inner wall cleaning assembly and an outer wall cleaning assembly. The rotation of the central shaft causes the inner wall and the outer wall cleaning assembly to rotate about the axis at the same time to form an interpolation gap to clean the cylinder. The inner and outer walls of the workpiece, and the inner and outer wall cleaning assembly can be stretched or closed, equipped with scraping edges and collectors to effectively peel off the splashed silicon.
It can safely and efficiently clean the splashed silicon on the diversion cylinder without baking, avoid safety accidents and barrel breakage, and is easy to operate, improving production safety and equipment reliability.
Smart Images
Figure CN222175281U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of cleaning tooling, and in particular to a cleaning tool for cleaning cylindrical workpieces. Background Art
[0002] In the process of pulling large diameter crystal rods, secondary feeding is often required. During the feeding process, when the newly added silicon material falls into the molten silicon solution, the silicon melt usually splashes, and a large amount of splashed silicon solution (referred to as splashed silicon) will be deposited on the bottom and sides of the guide tube. Over time, if the splashed silicon is not cleaned regularly, more and more splashed silicon will be deposited on the guide tube. A large amount of splashed silicon will form bulges, which will not only affect the normal upward movement of the crystal rod during crystal pulling, but also easily collide with the barrel and cause the barrel to break.
[0003] However, in the prior art, there is no special cleaning tool to clean the silicon splashes on the inner and outer walls of the bottom of the guide tube. When cleaning a large amount of abnormal silicon splashes, the usual practice is to manually lower the guide tube so that the guide tube is close to the graphite crucible in the furnace, and use the temperature emitted by the silicon solution in the graphite crucible to bake the silicon splashes on the guide tube to melt it. This method is not easy to control the height of the guide tube and is difficult to operate. In addition, since the silicon splashes often contain impurities, the impurities may easily cause safety accidents after mixing with the silicon solution in the furnace. Utility Model Content
[0004] Based on this, it is necessary to provide a cleaning tool for cleaning cylindrical workpieces to clean the spattered silicon attached to the inner and outer walls of the guide tube, in order to address the technical problem that there is no special cleaning tool in the prior art to clean the spattered silicon attached to the guide tube, which leads to the above-mentioned series of problems.
[0005] According to one aspect of the present application, there is provided a cleaning tool for cleaning a cylindrical workpiece, comprising:
[0006] A central shaft, the central shaft being controllably rotatable about its own central axis;
[0007] An inner wall cleaning assembly is connected to the central axis and coaxially surrounds the central axis;
[0008] An outer wall cleaning component is connected to the inner wall cleaning component and coaxially surrounds the inner wall cleaning component;
[0009] An insertion gap surrounding the central axis is formed between the outer wall cleaning component and the inner wall cleaning component, and the insertion gap is used for inserting at least part of the cylindrical wall of the cylindrical workpiece so that the outer wall and the inner wall of the cylindrical workpiece can contact the outer wall cleaning component and the inner wall cleaning component respectively; when the central axis rotates around its own central axis, the inner wall cleaning component and the outer wall cleaning component can rotate around their own central axis at the same time to clean the inner wall and the outer wall of the cylindrical workpiece.
[0010] In one embodiment, the inner wall cleaning assembly is movably connected to the central axis and can be expanded or retracted relative to the central axis; the outer wall cleaning assembly is movably connected to the inner wall cleaning assembly, so that when the inner wall cleaning assembly is expanded or retracted, the outer wall cleaning assembly can be expanded or retracted together with the inner wall cleaning assembly.
[0011] In one embodiment, along the axial direction of the central axis, the cleaning tool has a large diameter end and a small diameter end that are arranged opposite to each other, and the diameters of the inner wall cleaning component and the outer wall cleaning component gradually decrease in the direction from the large diameter end to the small diameter end;
[0012] A slider is provided on the central axis, and the slider is movably connected to the inner wall cleaning assembly and can move axially along the central axis; in response to the axial movement of the slider along the central axis, the inner wall cleaning assembly and the outer wall cleaning assembly are expanded or retracted together.
[0013] In one embodiment, a connecting block is provided on the central axis, and the connecting block and the sliding block are spaced apart in the axial direction of the central axis. One end of the inner wall cleaning component and one end of the outer wall cleaning component converge together and are connected to the connecting block to form the small diameter end.
[0014] In one embodiment, the inner wall cleaning assembly includes a plurality of inner layer skeletons surrounding the central axis, one ends of all the inner layer skeletons converge at the connecting block, and the distance between any two inner layer skeletons gradually decreases in the direction from the large diameter end to the small diameter end.
[0015] In one embodiment, each of the inner layer skeletons is connected to the slider via a first connecting rod, one end of each of the first connecting rods is rotatably connected to the slider, and the other end is rotatably connected to a corresponding inner layer skeleton.
[0016] In one embodiment, the outer wall cleaning assembly includes multiple outer layer skeletons surrounding the central axis, one end of all the outer layer skeletons and one end of all the inner layer skeletons converge at the connecting block, and the distance between any two of the outer layer skeletons gradually decreases in the direction from the large diameter end to the small diameter end.
[0017] In one embodiment, each of the outer layer frames is connected to a corresponding one of the inner layer frames via a second connecting rod, and one end of each of the second connecting rods is rotatably connected to an inner layer frame, and the other end is rotatably connected to a corresponding one of the outer layer frames.
[0018] In one embodiment, a scraping edge is provided on the side wall of each outer layer skeleton facing a corresponding inner layer skeleton, and / or a scraping edge is provided on the side wall of each inner layer skeleton facing a corresponding outer layer skeleton.
[0019] In one embodiment, the cleaning tool further comprises a collecting piece, wherein the collecting piece is conically fitted to all the outer layer skeletons, and the collecting piece forms a convergence point at the small diameter end.
[0020] The cleaning tool for cleaning a cylindrical workpiece is provided by arranging an inner wall cleaning component connected to the central axis and coaxially surrounding the central axis, and by arranging an outer wall cleaning component connected to the inner wall cleaning component and coaxially surrounding the inner wall cleaning component, so that an insertion gap surrounding the central axis is formed between the outer wall cleaning component and the inner wall cleaning component, so that at least part of the cylinder wall of the cylindrical workpiece (such as a guide tube) can be inserted into the insertion gap, and the outer wall and the inner wall of the cylindrical workpiece can contact the outer wall cleaning component and the inner wall cleaning component respectively. When the central axis rotates around its own central axis, the inner wall cleaning component and the outer wall cleaning component can rotate around their own central axis at the same time to clean the inner wall and the outer wall of the cylindrical workpiece at the same time. In this way, large pieces of silicon splashes attached to the inner and outer surfaces of the guide tube can be effectively peeled off, without the need to use the traditional baking method for cleaning, which is not only easy to operate, but also effectively prevents the occurrence of safety accidents. BRIEF DESCRIPTION OF THE DRAWINGS
[0021] FIG1 is a schematic diagram of the internal structure of a common single crystal furnace.
[0022] Figure 2 An axial side view of a cleaning tool for cleaning a cylindrical workpiece provided in one embodiment of the present application.
[0023] Figure 3 for Figure 2 A magnified schematic diagram of area A in the middle.
[0024] Figure 4A schematic diagram of a cleaning tool provided in an embodiment of the present application for cleaning a guide tube in a single crystal furnace.
[0025] Description of reference numerals:
[0026] 1. Furnace body; 2. Guide tube; 3. Graphite crucible; 4. Graphite resistance heater; 10. Cleaning tool; 10a. Large diameter end; 10b. Small diameter end; 10c. Insertion gap; 100. Center axis; 200. Inner wall cleaning assembly; 210. Inner layer skeleton; 220. Scraping blade; 300. Outer wall cleaning assembly; 310. Outer layer skeleton; 400. Sliding block; 500. Connecting block; 600. First connecting rod; 700. Second connecting rod; 800. Collecting piece. DETAILED DESCRIPTION
[0027] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.
[0028] In the description of the present application, it should be understood that if the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. appear, the orientation or position relationship indicated by these terms is based on the orientation or position relationship shown in the accompanying drawings, which is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application.
[0029] In addition, if the terms "first" or "second" appear, these terms are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of this application, if the term "plurality" appears, "plurality" means at least two, such as two, three, etc., unless otherwise clearly and specifically defined.
[0030] In this application, unless otherwise clearly specified and limited, if the terms "installed", "connected", "connected", "fixed" and the like appear, these terms should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integrated connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to the specific circumstances.
[0031] In the present application, unless otherwise clearly specified and limited, if there is a description that a first feature is "above" or "below" a second feature, etc., or similar descriptions appear, it may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.
[0032] It should be noted that if an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. If an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. If any, the terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in this application are for illustrative purposes only and do not represent the only implementation method.
[0033] As shown in Figure 1, it is a schematic diagram of the internal structure of a common single crystal furnace used for pulling large crystal rods. The single crystal furnace shown in the figure includes a furnace body 1, a guide tube 2 arranged on the upper part of the furnace body 1 and a graphite crucible 3 arranged below the guide tube 2. A graphite resistance heater 4 is provided on the outside of the graphite crucible 3. The graphite crucible 3 is used to hold silicon material. The graphite resistance heater 4 is used to heat the silicon material held in the graphite crucible 3. The guide tube 2 is used to guide and adjust the gas in the tube, which can effectively control the volatilization of the latent heat of crystallization at the solid-liquid interface of the crystal, thereby effectively maintaining the flatness of the solid-liquid interface.
[0034] As described in the background technology, during the pulling process of large-diameter crystal rods, secondary feeding is often required. During the feeding process, when the newly added silicon material falls into the molten silicon solution, the silicon melt usually splashes, and a large amount of splashed silicon solution (referred to as splashed silicon) will be deposited on the bottom and sides of the guide tube 2. Over time, if the splashed silicon is not cleaned regularly, more and more splashed silicon will be deposited on the guide tube 2, and a large amount of splashed silicon will form bulges, which will not only affect the normal upward movement of the crystal rod during crystal pulling, but also easily collide with the barrel and cause the barrel to break.
[0035] However, in the prior art, there is no special cleaning tool to clean the inner and outer walls of the bottom of the guide tube 2 from the silicon splashes. When cleaning a large amount of abnormally generated silicon splashes, the usual method is to manually lower the guide tube 2 so that the guide tube 2 is close to the graphite crucible 3 and 3 cm to 4 cm away from the graphite crucible, and use the temperature of the silicon solution in the graphite crucible 3 to bake the silicon splashes on the guide tube 2 to melt it. This method is not easy to control the height of the guide tube 2 and is difficult to operate. Once the operation is improper, the guide tube 2 is easy to extend into the silicon solution contained in the graphite crucible 3. Since the silicon splashes are often mixed with impurities, the impurities are easily mixed with the silicon solution in the furnace and cause safety accidents. In addition, after the guide tube 2 is baked for a long time, the metal on the guide tube 2 will be deformed, causing the cooling circulating water in the guide tube 2 to leak out. Once the silicon solution is mixed with water, the water will undergo thermal decomposition to produce a small amount of oxygen under high temperature and low pressure, which will cause combustion, and the water vapor will also cause pressure imbalance, thereby causing the furnace body 1 to explode.
[0036] In order to avoid the above accidents, the present application provides a cleaning tool for cleaning cylindrical workpieces, which is used to clean the objects to be cleaned attached to the inner and outer walls of the cylindrical workpiece (such as spattered silicon attached to the outer and inner walls of the guide tube).
[0037] The following takes the cylindrical workpiece to be cleaned as a guide tube in a single crystal furnace as an example to illustrate the structure of the cleaning tool for cleaning the cylindrical workpiece. It can be understood that in other embodiments, the cleaning tool of the present application is not limited to cleaning the guide tube in the single crystal furnace, but can also be used to clean any cylindrical workpiece, which is not limited here.
[0038] like Figure 2As shown, it is a structural schematic diagram of a cleaning tool 10 (hereinafter referred to as the cleaning tool 10) for cleaning a cylindrical workpiece provided by an embodiment of the present application. The cleaning tool 10 provided by an embodiment of the present application includes a central shaft 100, a driving element (not shown in the figure), an inner wall cleaning assembly 200 and an outer wall cleaning assembly 300, wherein the central shaft 100 is transmission-connected to the driving element, the inner wall cleaning assembly 200 is connected to the central shaft 100 and coaxially surrounds the central shaft 100, and the outer wall cleaning assembly 300 is connected to the inner wall cleaning assembly 200 and coaxially surrounds the inner wall cleaning assembly 200. An insertion gap 10c surrounding the central shaft 100 is formed between the outer wall cleaning assembly 300 and the inner wall cleaning assembly 200, and the insertion gap 10c is used for inserting at least part of the cylindrical wall of the cylindrical workpiece, so that the outer wall and the inner wall of the cylindrical workpiece can contact the outer wall cleaning assembly 300 and the inner wall cleaning assembly 200 respectively.
[0039] The driving element can be a driving source such as a motor, which is used to drive the central shaft 100 so that the central shaft 100 can be controlled to rotate around its own central shaft 100 line. The inner wall cleaning assembly 200 is used to clean the inner wall of the cylindrical workpiece, and the outer wall cleaning assembly 300 is used to clean the outer wall of the cylindrical workpiece. When the central shaft 100 rotates around its own central shaft 100 line, the inner wall cleaning assembly 200 and the outer wall cleaning assembly 300 can rotate around their own central shaft 100 line at the same time to achieve simultaneous cleaning of the inner wall and outer wall of the cylindrical workpiece.
[0040] In an optional embodiment, in order to facilitate the storage of the cleaning tool 10 and to facilitate the removal of the cleaning tool 10 from the furnace body, the inner wall cleaning assembly 200 is movably connected to the central axis 100 and can be expanded or retracted relative to the central axis 100; the outer wall cleaning assembly 300 is movably connected to the inner wall cleaning assembly 200, so that when the inner wall cleaning assembly 200 is expanded or retracted, the outer wall cleaning assembly 300 can be expanded or retracted together with the inner wall cleaning assembly 200.
[0041] In this way, when the outer wall cleaning component 300 and the inner wall cleaning component 200 are both expanded, the diameter of the inner wall cleaning component 200 can be approximately equal to the inner diameter of the cylindrical workpiece, and the diameter of the outer wall cleaning component 300 can be approximately equal to the outer diameter of the cylindrical workpiece, and at least part of the cylindrical wall of the cylindrical workpiece can extend into the insertion gap 10c; when the outer wall cleaning component 300 and the inner wall cleaning component 200 are both folded, the cleaning tool 10 can pass through the inner cavity of the cylindrical workpiece, so that after the cleaning of the cylindrical workpiece is completed, the cleaning tool 10 can be taken out from bottom to top.
[0042] It can be understood that the shape of the cleaning tool 10 depends on the shape of the cylindrical workpiece. When the shape of the cylindrical workpiece is a tapered cylindrical shape with gradually changing inner and outer diameters (for example, the shape of the guide tube is such a shape), the shape of the cleaning tool 10 is Figure 2when the shape of the cylindrical workpiece is a cylindrical cylindrical shape with constant inner and outer diameters, the shape of the cleaning tool 10 is also correspondingly cylindrical, that is, the diameter of the outer wall cleaning component 300 and the diameter of the inner wall cleaning component 200 are always constant.
[0043] by Figure 2 Taking the embodiment shown in as an example, since the cleaning tool 10 is used to clean the inner and outer walls of the guide tube, and the guide tube is a cylindrical shape with gradually changing inner and outer diameters, the cleaning tool 10 is shaped like an umbrella. In the axial direction of the central axis 100, the cleaning tool 10 has a relatively large diameter end 10a and a small diameter end 10b. From the large diameter end 10a to the small diameter end 10b, the diameters of the inner wall cleaning component 200 and the outer wall cleaning component 300 are gradually reduced; combined with Figure 2 and Figure 3 As shown, a slider 400 is provided on the central shaft 100, and the slider 400 is movably connected to the inner wall cleaning assembly 200 and slidably connected to the central shaft 100, and can move along the axial direction of the central shaft 100. In response to the axial movement of the slider 400 along the central shaft 100, the inner wall cleaning assembly 200 and the outer wall cleaning assembly 300 are opened or closed together.
[0044] Further, in order to make the overall structure of the cleaning tool 10 more compact and to better fix the ends of the inner wall cleaning assembly 200 and the outer wall cleaning assembly 300 and the end of the inner wall cleaning assembly 200, please continue to refer to Figure 3 A connecting block 500 is fixedly provided at one end of the central shaft 100 in the axial direction thereof. The connecting block 500 and the slider 400 are spaced apart in the axial direction of the central shaft 100. One end of the inner wall cleaning assembly 200 and one end of the outer wall cleaning assembly 300 converge and are connected to the connecting block 500 to form a small diameter end 10b.
[0045] In this way, one end of the inner wall cleaning component 200 and the outer wall cleaning component 300 is fixed and the other end is movable, so that the opening or closing action can be achieved more easily, avoiding the occurrence of incomplete opening or incomplete closing during the opening or closing action.
[0046] More specifically, combined with Figure 2 and Figure 3 As shown, in some embodiments, the inner wall cleaning assembly 200 is a skeleton structure, which includes a plurality of rod-shaped inner layer skeletons 210 surrounding the central axis 100, and one end of all the inner layer skeletons 210 converges together at the connecting block 500. From the large diameter end 10a to the small diameter end 10b, the distance between any two inner layer skeletons 210 gradually decreases.
[0047] Furthermore, each inner layer skeleton 210 is connected to the slider 400 via a first connecting rod 600, so that there are multiple first connecting rods 600, and the multiple first connecting rods 600 are surrounded by the central axis 100, and one end of each first connecting rod 600 is rotatably connected to the slider 400, and the other end is connected to a corresponding inner layer skeleton 210.
[0048] Similarly, the outer wall cleaning assembly 300 is also a skeleton structure, which includes multiple outer skeletons 310 surrounding the central axis 100. One end of all the outer skeletons 310 and one end of all the inner skeletons 210 converge at the connecting block 500. From the large diameter end 10a to the small diameter end 10b, the distance between any two outer skeletons 310 gradually decreases.
[0049] from Figure 2 and Figure 3 It can be seen that multiple outer layer skeletons 310 are arranged in a one-to-one correspondence with multiple inner layer skeletons 210, and each outer layer skeleton 310 is connected to a corresponding inner layer skeleton 210 through a second connecting rod 700, so that there are also multiple second connecting rods 700, and one end of the multiple second connecting rods 700 is rotatably connected to an inner layer skeleton 210.
[0050] In this way, when performing an expansion or contraction action, the first connecting rod 600 can rotate relative to the slider 400 and the inner layer skeleton 210, and the second connecting rod 700 can rotate relative to the inner layer skeleton 210 and the outer layer skeleton 310, so that the radial distance between the inner layer skeleton 210 and the slider 400 in the central axis 100 and the radial distance between the outer layer skeleton 310 and the corresponding inner layer skeleton 210 in the central axis 100 change, thereby realizing the action of expanding or contracting the inner wall cleaning component 200 and the outer wall cleaning component 300 together.
[0051] It is understandable that in other embodiments, the first connecting rod 600 and the second connecting rod 700 can also be structures that are foldable themselves. For example, when the cleaning tool 10 is in the expanded state, each first connecting rod 600 and each second connecting rod 700 are respectively in a straight line shape, and when the cleaning tool 10 is changed from the expanded state to the collapsed state, each first connecting rod 600 and each second connecting rod 700 can be folded into a V shape respectively.
[0052] It can also be understood that the inner wall cleaning component 200 and the outer wall cleaning component 300 are not limited to the skeleton structure described in the above embodiment, but can also be continuous surface structures made of soft materials respectively; and the connection between the inner wall cleaning component 200 and the slider 400, and the connection between the outer wall cleaning component 300 and the inner wall cleaning component 200 can also be connected by a continuous surface structure made of soft materials, which is not limited here, but the skeleton structure can obviously make the overall structure of the cleaning tool 10 more solid and less prone to loosening.
[0053] Furthermore, in order to ensure that the overall structure of the cleaning tool 10 is firm and not easy to loosen, and to ensure that the cleaning tool 10 can collect the splashed silicon scraped from the guide tube, such as Figure 2 As shown, the cleaning tool 10 further includes a collecting member 800 made of a soft material (e.g., a high temperature resistant fiber material), the collecting member 800 is conically attached to all the outer layer frames 310, and the collecting member 800 forms a convergence point at the small diameter end 10b. When the inner wall cleaning assembly 200 and the outer wall cleaning assembly 300 are expanded or folded, the collecting member 800 can also be expanded or folded together.
[0054] By setting the collecting piece 800, a continuous collecting surface which is closed at the small diameter end 10b is formed on the side of the collecting piece 800 facing the outer layer skeleton 310. When the spattered silicon on the guide tube is stripped, the spattered silicon can fall on the collecting surface, thereby facilitating subsequent centralized cleaning and preventing the scraped spattered silicon from falling into the graphite crucible or other places in the furnace body again. In addition, the collecting piece 800 is supported by all the outer layer skeletons 310, so that the collecting piece 800 is not easily damaged after receiving the stripped spattered silicon.
[0055] In addition, in order to make the inner wall cleaning assembly 200 and the outer wall cleaning assembly 300 have a better scraping effect on the silicon splashes attached to the inner wall and the outer wall of the guide tube, as shown in FIG. Figure 3 As shown, a scraping blade 220 is provided on the side wall of each outer layer skeleton 310 facing the corresponding inner layer skeleton 210, and on the side wall of each inner layer skeleton 210 facing the corresponding outer layer skeleton 310, respectively, and the scraping blade 220 is in contact with the inner wall and the outer wall of the guide tube to complete the cleaning of the silicon splash. The scraping blade 220 is preferably made of a material that is resistant to high temperature, has non-metallic hardness and high wear resistance, which can ensure that the silicon splash attached to the guide tube can be scraped off relatively easily, and can also ensure that the guide tube is not scratched.
[0056] Optionally, the number of scraping blades 220 provided on each inner layer skeleton 210 or each outer layer skeleton 310 is not limited, and one or more scraping blades 220 may be provided. The scraping blades 220 may be provided only on the inner layer skeleton 210 or on the outer layer skeleton 310, and the above may be provided according to actual needs.
[0057] The following combined Figure 2 and Figure 4 , the process of how to use the cleaning tool 10 provided in the present application to clean the guide tube 2 in the single crystal furnace is introduced:
[0058] First, the inner wall cleaning assembly 200 and the outer wall cleaning assembly 300 of the cleaning tool 10 are in a folded state, so that the overall diameter of the cleaning tool 10 is smaller than the inner diameter of the guide tube 2 . At this time, the cleaning tool 10 can be moved downward to pass through the guide tube 2 .
[0059] Then, the inner wall cleaning assembly 200 and the outer wall cleaning assembly 300 are changed from the folded state to the expanded state, and then the cleaning tool 10 is lifted upward as a whole for a certain distance, so that the bottom end of the guide tube 2 (that is, part of the tube wall of the guide tube 2) is inserted into the insertion gap 10c formed by the outer wall cleaning assembly 300 and the inner wall cleaning assembly 200, and the outer wall cleaning assembly 300 and the inner wall cleaning assembly 200 are respectively in contact with the outer wall and inner wall of the guide tube 2.
[0060] Afterwards, start the driving element to make the central axis 100 rotate around its own axis, and at the same time drive the inner wall cleaning component 200 and the outer wall cleaning to rotate around their own central axis 100, so that the spattered silicon attached to the inner wall and outer wall of the guide tube 2 can be peeled off, and the peeled spattered silicon will fall onto the collection surface of the collection piece 800.
[0061] After cleaning, turn off the driving element, stop rotating the center shaft 100, lower the cleaning tool 10 as a whole for a certain distance, fold the inner wall cleaning assembly 200 and the outer wall cleaning assembly 300, and finally lift the cleaning tool 10 upward, so that the cleaning assembly passes upward through the guide tube 2 and enters the auxiliary chamber, and the stripped silicon spatter collected in the collecting piece 800 is cleaned centrally outside the furnace body 1.
[0062] It can be seen that the cleaning tool 10 for cleaning cylindrical workpieces provided in the present application, by setting an inner wall cleaning component 200 and an outer wall cleaning component 300, and being designed as a structure that can be expanded or folded, when cleaning the guide tube 2 in the single crystal furnace, there is no need to remove the guide tube 2 from the single crystal furnace to peel off and clean the spattered silicon attached to the guide tube 2. Compared with cleaning by traditional baking methods, it is not only easy to operate, but also effectively prevents the occurrence of safety accidents.
[0063] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.
[0064] The above-described embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be construed as limiting the scope of the patent application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent application shall be subject to the attached claims.
Claims
1. A cleaning tool for cleaning cylindrical workpieces, It is characterized in that include: A central shaft (100), wherein the central shaft (100) is controllably rotatable about its own central axis; An inner wall cleaning assembly (200) is connected to the central axis (100) and coaxially surrounds the central axis (100); An outer wall cleaning component (300) is connected to the inner wall cleaning component (200) and coaxially surrounds the inner wall cleaning component (200); An insertion gap (10a) surrounding the central axis (100) is formed between the outer wall cleaning component (300) and the inner wall cleaning component (200), and the insertion gap (10a) is used for inserting at least a portion of the wall of the cylindrical workpiece so that the outer wall and the inner wall of the cylindrical workpiece can contact the outer wall cleaning component (300) and the inner wall cleaning component (200) respectively; when the central axis (100) rotates around its own central axis, the inner wall cleaning component (200) and the outer wall cleaning component (300) can simultaneously rotate around their own central axis to clean the inner wall and the outer wall of the cylindrical workpiece.
2. The cleaning tool according to claim 1, It is characterized in that The inner wall cleaning component (200) is movably connected to the central axis (100) and can be expanded or retracted relative to the central axis (100); the outer wall cleaning component (300) is movably connected to the inner wall cleaning component (200), so that when the inner wall cleaning component (200) is expanded or retracted, the outer wall cleaning component (300) can be expanded or retracted together with the inner wall cleaning component (200).
3. The cleaning tool according to claim 2, It is characterized in that Along the axial direction of the central axis (100), the cleaning tool (10) has a large diameter end (10b) and a small diameter end (10c) arranged opposite to each other, and in a direction from the large diameter end (10b) to the small diameter end (10c), the diameters of the inner wall cleaning component (200) and the outer wall cleaning component (300) are gradually reduced; A slider (400) is provided on the central axis (100), and the slider (400) is movably connected to the inner wall cleaning assembly (200) and can move axially along the central axis (100); in response to the axial movement of the slider (400) along the central axis (100), the inner wall cleaning assembly (200) and the outer wall cleaning assembly (300) are expanded or retracted together.
4. The cleaning tool according to claim 3, It is characterized in that A connecting block (500) is provided on the central shaft (100), and the connecting block (500) and the sliding block (400) are spaced apart in the axial direction of the central shaft (100); one end of the inner wall cleaning component (200) and one end of the outer wall cleaning component (300) converge together and are connected to the connecting block (500) to form the small diameter end (10c).
5. The cleaning tool according to claim 4, It is characterized in that The inner wall cleaning assembly (200) comprises a plurality of inner layer skeletons (210) surrounding the central axis (100), one end of all the inner layer skeletons (210) converge at the connecting block (500), and the distance between any two inner layer skeletons (210) gradually decreases in the direction from the large diameter end (10b) to the small diameter end (10c).
6. The cleaning tool according to claim 5, It is characterized in that Each of the inner layer skeletons (210) is connected to the slider (400) via a first connecting rod (600), one end of each of the first connecting rods (600) is rotatably connected to the slider (400), and the other end is rotatably connected to a corresponding inner layer skeleton (210).
7. The cleaning tool according to claim 5, It is characterized in that The outer wall cleaning assembly (300) comprises a plurality of outer layer skeletons (310) surrounding the central axis (100), one end of all the outer layer skeletons (310) and one end of all the inner layer skeletons (210) converge at the connecting block (500), and the distance between any two of the outer layer skeletons (310) gradually decreases in the direction from the large diameter end (10b) to the small diameter end (10c).
8. The cleaning tool according to claim 7, It is characterized in that Each of the outer layer frames (310) is connected to a corresponding inner layer frame (210) via a second connecting rod (700), and one end of each of the second connecting rods (700) is rotatably connected to an inner layer frame (210), and the other end is rotatably connected to a corresponding outer layer frame (310).
9. The cleaning tool according to claim 7, It is characterized in that A scraping blade (220) is provided on the side wall of each outer layer skeleton (310) facing a corresponding inner layer skeleton (210), and / or a scraping blade (220) is provided on the side wall of each inner layer skeleton (210) facing a corresponding outer layer skeleton.
10. The cleaning tool according to claim 7, It is characterized in that The cleaning tool (10) further comprises a collecting piece (800), wherein the collecting piece (800) is conically fitted to all the outer layer skeletons (310), and the collecting piece (800) forms a convergence point at the small diameter end (10c).