Powder feeding device for clean area in semiconductor industry

Abstract

The utility model discloses a powder feeding device for a clean area in the semiconductor industry. The powder feeding device comprises a small bag feeding station, a ton bag feeding station and a spiral conveying mechanism. The small bag feeding station comprises a small bag bin, a small bag bin support and a small bag feeding station dust removal device. The ton bag feeding station comprises a ton bag bin, a ton bag bin support, a ton bag powder conveying mechanism and a ton bag feeding station dust removal device, the ton bag powder conveying mechanism comprises an electric hoist and a conveying rail, and when a ton bag bin door is opened, the electric hoist moves along the conveying rail and conveys a ton bag powder bag into the ton bag bin; the spiral conveying mechanism comprises a spiral conveyor and a spiral conveyor variable frequency motor, the inlet end of the spiral conveyor is connected with a bottom outlet of the small bag bin, and the outlet end of the spiral conveyor is communicated with the lower portion of the ton bag bin. The powder feeding device can adapt to the application environment of a clean area with the high requirement for environment cleanliness and the high requirement for dust removal in the powder feeding process, and can be compatible with feeding of small-bag powder and ton-bag powder.

Description

Technical Field

[0001] The utility model relates to the technical field of powder material feeding, in particular to a powder material feeding device for a clean area in the semiconductor industry. Background Art

[0002] Powder feeding refers to the process of transporting powder from storage equipment to processing equipment or other target locations. The development background of powder feeding technology is mainly related to the characteristics of powder and the needs of industrial production. With the development of industrial automation and intelligence, powder feeding technology has also been continuously improved and innovated. At present, common powder feeding technologies include vacuum feeding, pneumatic transportation, mechanical transportation, etc. These technologies can realize the automatic feeding of powder, improve production efficiency, reduce dust pollution, and ensure the safety and hygiene of the working environment. In general, the background of powder feeding technology is to meet the requirements of industrial production for efficient, safe and environmentally friendly powder transportation. With the continuous advancement of technology, powder feeding technology will continue to develop and improve.

[0003] Powders usually have the characteristics of fine particles, poor fluidity, easy agglomeration, and easy flying, which brings certain challenges to the feeding and transportation of powders. Traditional powder feeding methods may have problems such as powder leakage, dust flying, and low transportation efficiency. The existing powder feeding technology solutions cannot adapt to the application environment of Class 10,000 clean areas with high requirements for environmental cleanliness and high requirements for dust removal during powder feeding, and are not compatible with small bags of powder and ton bags of powder. Utility Model Content

[0004] The present application provides a powder feeding device for clean areas in the semiconductor industry to solve the problem that the existing powder feeding technical solutions cannot adapt to the application environment of Class 10,000 clean areas with high requirements for environmental cleanliness and high requirements for dust removal during the powder feeding process, and cannot be compatible with small bag powders and ton bags of powders.

[0005] In an embodiment of the present application, a powder feeding device for a clean area in a semiconductor industry is provided, the device comprising a small bag feeding station, a ton bag feeding station and a spiral conveying mechanism;

[0006] The small bag feeding station comprises a small bag silo, a small bag silo bracket and a small bag feeding station dust removal device, the small bag silo is installed on the small bag silo bracket, a small bag silo door is provided on the small bag silo, and the small bag feeding station dust removal device is installed above the small bag silo;

[0007] The ton bag feeding station includes a ton bag silo, a ton bag silo bracket, a ton bag powder material conveying mechanism and a ton bag feeding station dust removal device, the ton bag silo is installed on the ton bag silo bracket, the ton bag silo is provided with a ton bag silo door, the ton bag feeding station dust removal device is installed on the side of the ton bag silo, the ton bag powder material conveying mechanism includes an electric hoist and a conveying track, the conveying track is arranged above the ton bag silo and fixedly connected to the ton bag silo bracket, the electric hoist is movably connected to the conveying track, the hook of the electric hoist is used to connect the ton bag powder material bag, when the ton bag silo door is opened, the electric hoist moves along the conveying track and conveys the ton bag powder material bag into the ton bag silo;

[0008] The screw transport mechanism includes a screw conveyor and a screw conveyor frequency conversion motor. The inlet end of the screw conveyor is connected to the bottom outlet of the small bag silo, and the outlet end of the screw conveyor is connected to the lower part of the ton bag silo.

[0009] Furthermore, the small bag bin door is provided with small bag unpacking gloves and a small bag bin window.

[0010] Furthermore, a small bag powder flow-aiding air hammer is provided at the lower part of the small bag silo.

[0011] Furthermore, a manual confirmation button for feeding small bags is provided on the small bag silo support, and the manual confirmation button for feeding small bags is used for manual start control of the screw conveyor.

[0012] Furthermore, the ton bag silo door is connected to the ton bag silo door cylinder, and the ton bag silo door cylinder is fixed on one side of the ton bag silo bracket.

[0013] Furthermore, the ton bag silo is connected to a ton bag flow-aiding cylinder, and the ton bag flow-aiding cylinder is used to help the ton bag powder to be smoothly poured into the ton bag silo by beating the ton bag powder bags during the pouring process of the ton bag powder.

[0014] Furthermore, a ton bag powder flow-aiding air hammer is provided at the lower part of the ton bag silo.

[0015] Furthermore, a front limit switch device for an electric hoist is arranged at the front end of the transport track, and a rear limit switch device for an electric hoist is arranged at the rear end of the transport track.

[0016] Furthermore, a ton bag unpacking glove and a ton bag silo window are provided at the lower part of the ton bag silo, and a powder material discharge port is provided at the bottom of the ton bag silo.

[0017] Furthermore, a manual confirmation button for ton bag feeding is provided on the ton bag silo bracket, and the manual confirmation button for ton bag feeding is used for manual start control of ton bag feeding.

[0018] The present application provides a powder feeding device for a clean area in the semiconductor industry, the device comprising a small bag feeding station, a ton bag feeding station and a spiral conveying mechanism; the small bag feeding station comprises a small bag silo, a small bag silo bracket and a dust removal device for the small bag feeding station, the small bag silo is installed on the small bag silo bracket, a small bag silo door is provided on the small bag silo, and the dust removal device for the small bag feeding station is installed above the small bag silo; the ton bag feeding station comprises a ton bag silo, a ton bag silo bracket, a ton bag powder conveying mechanism and a dust removal device for the ton bag feeding station, the ton bag silo is installed on the ton bag silo bracket, a ton bag silo door is provided on the ton bag silo, and the ton bag silo is provided with a dust removal device for the ton bag feeding station. The dust removal device of the bag feeding station is installed on the side of the ton bag silo, and the ton bag powder material conveying mechanism includes an electric hoist and a conveying track. The conveying track is arranged above the ton bag silo and fixedly connected to the ton bag silo bracket. The electric hoist is movably connected to the conveying track. The hook of the electric hoist is used to connect the ton bag powder bag. When the ton bag silo door is opened, the electric hoist moves along the conveying track and conveys the ton bag powder bag into the ton bag silo; the screw conveying mechanism includes a screw conveyor and a screw conveyor frequency conversion motor. The inlet end of the screw conveyor is connected to the bottom outlet of the small bag silo, and the outlet end of the screw conveyor is connected to the lower part of the ton bag silo. The semiconductor industry clean area powder feeding device of the present application is suitable for the application environment of the 10,000-level clean area with high requirements for environmental cleanliness and high requirements for dust removal of powder during feeding, and is compatible with the feeding of small bag powder and ton bag powder. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 A structural diagram of a powder material feeding device for a clean area in a semiconductor industry provided by one embodiment of the utility model;

[0020] Figure 2 Another structural diagram of a semiconductor industry clean area powder feeding device provided by one embodiment of the utility model;

[0021] Figure 3 A side view of a powder feeding device for a clean area in a semiconductor industry provided by one embodiment of the utility model;

[0022] Figure 4 Another side view of a powder material feeding device for a clean area of ​​a semiconductor industry provided by one embodiment of the utility model;

[0023] Figure 5 A structural diagram of a dust removal device for a ton bag feeding station in a powder feeding device in a clean area of ​​a semiconductor industry provided by an embodiment of the utility model;

[0024] Figure 6 A structural diagram of a dust removal device for a small bag feeding station in a powder feeding device in a clean area of ​​the semiconductor industry provided by one embodiment of the utility model.

[0025] In the figure: ton bag feeding station 1, screw conveyor 2, small bag feeding station 3, powder material outlet 4, flow-aiding air hammer 5, screw conveyor frequency conversion motor 6, ton bag unpacking gloves 7, ton bag silo window 8, electric hoist 9, ton bag powder bag 10, ton bag silo door 11, ton bag silo 12, ton bag feeding manual confirmation button 13, small bag feeding manual confirmation button 14, small bag unpacking gloves 15, small bag silo window 16, small bag silo Door 17, small bag silo 18, ton bag flow-aiding cylinder 19, ton bag silo door cylinder 20, small bag feeding station dust removal device 21, ton bag feeding station dust removal device 22, electric hoist rear limit switch device 23, electric hoist front limit switch device 24, ton bag dust removal fan 25, filter backblowing device 26, dust filter 27, small bag dust removal fan 28, small bag silo bracket 29, ton bag silo bracket 30, and conveying track 31. DETAILED DESCRIPTION

[0026] The present invention is further described in detail below by specific embodiments in conjunction with the accompanying drawings. Wherein similar elements in different embodiments adopt associated similar element numbers. In the following embodiments, many detailed descriptions are intended to enable the present application to be better understood. However, those skilled in the art can easily recognize that some of the features can be omitted in different situations, or can be replaced by other elements, materials, and methods. In some cases, some operations related to the present application are not shown or described in the specification, in order to avoid the core part of the present application being overwhelmed by too much description, and for those skilled in the art, it is not necessary to describe these related operations in detail, and they can fully understand the related operations based on the description in the specification and the general technical knowledge in the art.

[0027] In addition, the features, operations or characteristics described in the specification can be combined in any appropriate manner to form various implementations. At the same time, the steps or actions in the method description can also be interchanged or adjusted in a manner that is obvious to those skilled in the art. Therefore, the various sequences in the specification and the drawings are only for the purpose of clearly describing a certain embodiment and are not meant to be a required sequence, unless otherwise specified that a certain sequence must be followed.

[0028] The first embodiment of the utility model provides a semiconductor industry clean area powder feeding device, such as Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, the device includes a small bag feeding station 3, a ton bag feeding station 1 and a spiral conveying mechanism.

[0029] The small bag feeding station 3 includes a small bag silo 18, a small bag silo bracket 29 and a small bag feeding station dust removal device 21. The small bag silo 18 is installed on the small bag silo bracket 29. A small bag silo door 17 is provided on the small bag silo 18. The small bag feeding station dust removal device 21 is installed above the small bag silo 18.

[0030] In this embodiment, a small bag unpacking glove 15 and a small bag bin window 16 are provided on the small bag bin door 17. A small bag powder flow-aiding air hammer 5 is provided at the lower part of the small bag bin 18. A small bag feeding manual confirmation button 14 is provided on the small bag bin bracket 29, and the small bag feeding manual confirmation button 14 is used for manual start control of the screw conveyor 2.

[0031] The ton bag feeding station 1 includes a ton bag silo 12, a ton bag silo bracket 30, a ton bag powder conveying mechanism and a ton bag feeding station dust removal device 22. The ton bag silo 12 is installed on the ton bag silo bracket 30. The ton bag silo 12 is provided with a ton bag silo door 11. The ton bag feeding station dust removal device 22 is installed on the side of the ton bag silo 12. The ton bag powder conveying mechanism includes an electric hoist 9 and a conveying track 31. The conveying track 31 is arranged above the ton bag silo 12 and is fixedly connected to the ton bag silo bracket 30. The electric hoist 9 is movably connected to the conveying track 31. The hook of the electric hoist 9 is used to connect the ton bag powder bag 10. When the ton bag silo door 11 is opened, the electric hoist 9 moves along the conveying track 31 and conveys the ton bag powder bag 10 into the ton bag silo 12.

[0032] The screw conveying mechanism includes a screw conveyor 2 and a screw conveyor variable frequency motor 6. The inlet end of the screw conveyor 2 is connected to the bottom outlet of the small bag silo 18, and the outlet end of the screw conveyor 2 is connected to the lower part of the ton bag silo 12. In this embodiment, the front end of the conveying track 31 is provided with an electric hoist front limit switch device 24, and the rear end of the conveying track is provided with an electric hoist rear limit switch device 23.

[0033] In this embodiment, the ton bag silo door 11 is connected to the ton bag silo door cylinder 20, and the ton bag silo door cylinder 20 is fixed on one side of the ton bag silo bracket 30. The ton bag silo 12 is connected to the ton bag flow-aiding cylinder 19, which is used to help the ton bag powder 10 to be smoothly poured into the ton bag silo 12 by beating the ton bag powder bag 10 during the process of pouring the ton bag powder. A ton bag powder flow-aiding air hammer 5 is provided at the lower part of the ton bag silo 12. A ton bag bag unpacking glove 7 and a ton bag silo window 8 are provided at the lower part of the ton bag silo 12, and a powder discharge port 4 is provided at the bottom of the ton bag silo 12. A ton bag feeding manual confirmation button 13 is provided on the ton bag silo bracket 30, and the ton bag feeding manual confirmation button 13 is used for manual start control of ton bag feeding.

[0034] This embodiment proposes a semiconductor industry clean area powder feeding device, and the specific working process is as follows:

[0035] 1. Small bag powder feeding process

[0036] Start the dust removal device 21 of the small bag feeding station and the dust removal device 22 of the ton bag feeding station (the dust removal port is connected to the overall dust removal pipeline of the workshop);

[0037] Manually open the small bag bin door 17 and put the small bag of powder into the small bag bin 18;

[0038] Close the small bag bin door 17 manually, untie the small bag powder in the small bag bin 18 with the small bag untie gloves 15, and pour the small bag powder into the small bag bin 18;

[0039] After the small bag of powder is ready, the small bag feeding manual confirmation button 14 is pressed, and the screw conveyor 2 starts automatically to transport the powder in the small bag silo 18 to the ton bag silo 12. During the transportation process, the flow-aiding air hammer 5 is started intermittently to prevent the powder from accumulating in the silo and not flowing.

[0040] 2. Loading process of 10 tons of powder

[0041] Start the dust removal device 21 of the small bag feeding station and the dust removal device 22 of the ton bag feeding station (the dust removal port is connected to the overall dust removal pipeline of the workshop);

[0042] The ton bag bin door cylinder 20 is retracted, and the ton bag bin door 11 is opened;

[0043] The electric hoist 9 moves forward, moves to the front fixed position through the electric hoist front limit switch device 24, and then the hook is lowered to the height of the fixed point;

[0044] Manually hang the ton bag of powder 10 on the hook of the electric hoist 9, and press the manual confirmation button 13 for ton bag feeding;

[0045] The hook of the electric hoist 9 automatically drives the ton bag powder bag 10 to rise to a fixed height, and the electric hoist 9 moves backward and moves to a fixed position in the ton bag silo 12 through the rear limit switch device 23 of the electric hoist;

[0046] The ton bag bin door cylinder 20 extends, and the ton bag bin door 11 closes;

[0047] The ton bag powder bag 10 is untied in the ton bag silo 12 by the ton bag unpacking glove 7, and the ton bag powder flows into the ton bag silo 12. The feeding preparation is completed, and the ton bag feeding manual confirmation button 13 is pressed;

[0048] During the pouring process of the ton bag powder, the ton bag flow-assisting cylinder 19 continuously beats the ton bag powder 10 to help the ton bag powder to be smoothly poured into the ton bag silo 12;

[0049] The ton bag powder passes through the container fixed by the powder outlet conveyor belt. During this process, the flow-aiding air hammer 5 is started intermittently to prevent the powder from accumulating and not flowing in the ton bag silo 12.

[0050] 3. Dust removal at feeding station

[0051] Ton bag feeding station dust removal device 22 Figure 5 As shown, it includes a ton bag dust removal fan 25, a filter back-blowing device 26 and a dust filter 27. Specifically, the dust removal fan outlet is connected to the workshop dust removal pipeline; the filter back-blowing device 26 is pneumatically driven, and the back-blowing device is started intermittently to prevent the dust filter 27 from being blocked due to long-term dust removal; the powder is filtered through the dust filter 27, and most of the powder returns to the ton bag silo 12, and a small amount of powder is discharged into the workshop exhaust duct through the dust bag. The dust removal device 21 of the small bag feeding station is as shown in FIG. Figure 6 As shown, it includes a small bag dust removal fan 28, a filter back-blowing device 26 and a dust filter 27, and the working principle is similar.

[0052] The above specific examples are used to illustrate the present invention, which are only used to help understand the present invention and are not intended to limit the present invention. For those skilled in the art of the present invention, some simple deductions, deformations or substitutions can be made based on the idea of ​​the present invention.

Claims

1. A powder feeding device for clean area of ​​semiconductor industry, characterized in that: The device comprises a small bag feeding station, a ton bag feeding station and a spiral transport mechanism; The small bag feeding station comprises a small bag silo, a small bag silo bracket and a small bag feeding station dust removal device, the small bag silo is installed on the small bag silo bracket, a small bag silo door is provided on the small bag silo, and the small bag feeding station dust removal device is installed above the small bag silo; The ton bag feeding station includes a ton bag silo, a ton bag silo bracket, a ton bag powder material conveying mechanism and a ton bag feeding station dust removal device, the ton bag silo is installed on the ton bag silo bracket, the ton bag silo is provided with a ton bag silo door, the ton bag feeding station dust removal device is installed on the side of the ton bag silo, the ton bag powder material conveying mechanism includes an electric hoist and a conveying track, the conveying track is arranged above the ton bag silo and fixedly connected to the ton bag silo bracket, the electric hoist is movably connected to the conveying track, the hook of the electric hoist is used to connect the ton bag powder material bag, when the ton bag silo door is opened, the electric hoist moves along the conveying track and conveys the ton bag powder material bag into the ton bag silo; The screw transport mechanism includes a screw conveyor and a screw conveyor frequency conversion motor. The inlet end of the screw conveyor is connected to the bottom outlet of the small bag silo, and the outlet end of the screw conveyor is connected to the lower part of the ton bag silo.

2. A semiconductor industry clean area powder feeding device as claimed in claim 1, characterized in that: The small bag bin door is provided with small bag unpacking gloves and a small bag bin viewing window.

3. A semiconductor industry clean area powder feeding device as claimed in claim 1, characterized in that: A small bag powder flow-aiding air hammer is arranged at the lower part of the small bag material bin.

4. A semiconductor industry clean area powder feeding device as claimed in claim 1, characterized in that: The small bag silo support is provided with a small bag feeding manual confirmation button, and the small bag feeding manual confirmation button is used for manual start control of the screw conveyor.

5. A semiconductor industry clean area powder feeding device as claimed in claim 1, characterized in that: The ton bag silo door is connected to the ton bag silo door cylinder, and the ton bag silo door cylinder is fixed on one side of the ton bag silo bracket.

6. A semiconductor industry clean area powder feeding device as claimed in claim 1, characterized in that: The ton bag silo is connected to a ton bag flow-aiding cylinder, and the ton bag flow-aiding cylinder is used to help the ton bag powder to be smoothly poured into the ton bag silo by beating the ton bag powder bag during the pouring process of the ton bag powder.

7. A semiconductor industry clean area powder feeding device as claimed in claim 1, characterized in that: A ton bag powder flow-aiding air hammer is arranged at the lower part of the ton bag silo.

8. A semiconductor industry clean area powder feeding device as claimed in claim 1, characterized in that: The front end of the transport track is provided with an electric hoist front limit switch device, and the rear end of the transport track is provided with an electric hoist rear limit switch device.

9. A semiconductor industry clean area powder feeding device as claimed in claim 1, characterized in that: Ton-bag unpacking gloves and a ton-bag silo window are arranged at the lower part of the ton-bag silo, and a powder material discharge port is arranged at the bottom of the ton-bag silo.

10. A semiconductor industry clean area powder feeding device as claimed in claim 1, characterized in that: The ton bag silo bracket is provided with a ton bag feeding manual confirmation button, and the ton bag feeding manual confirmation button is used for manual start control of ton bag feeding.

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