Persulfate micro-etching liquid cyclic regeneration system device

Abstract

The utility model provides a persulfate micro-etching liquid cyclic regeneration system device. The persulfate micro-etching liquid cyclic regeneration system device comprises an electrolysis unit and a PLC (Programmable Logic Controller) control unit, the electrolysis unit comprises a cathode module and an anode module, the cathode module comprises a cathode chamber, the anode module comprises an anode chamber, and the cathode chamber and the anode chamber are adjacently arranged and separated through a cation exchange membrane; a cathode and a copper ion detector are arranged in the cathode chamber, and the copper ion detector is electrically connected with the PLC control unit; a high oxygen evolution potential anode is arranged in the anode chamber; the cathode module is connected with a persulfate micro-etching waste liquid storage device; and the anode module is connected with a regenerated liquid storage device. After the persulfate micro-etching liquid cyclic regeneration system device provided by the utility model is adopted for electrolysis, regenerated persulfate micro-etching liquid can be obtained in the anode chamber, the regenerated micro-etching liquid can be recycled by 100%, and the whole device is high in automation degree and does not need to be manually attended.

Description

Technical Field

[0001] The utility model belongs to the technical field of persulfate micro-etching solution circulation regeneration, and relates to a persulfate micro-etching solution circulation regeneration system device. Background Art

[0002] Persulfate microetching solution is often used to etch copper. The reaction formula is as follows: S2O8 2- +Cu=SO4 2- +CuSO4. However, as the etching progresses, the accumulation of sulfate in the persulfate micro-etching solution will limit the amount of Cu dissolved, and the persulfate micro-etching solution after etching needs to be regenerated.

[0003] The traditional persulfate micro-etching liquid regeneration device electrolyzes copper, and the copper recovery rate can only reach 70-80%. At the same time, the residual liquid after electrolysis needs to be discharged after secondary treatment, which not only wastes chemical raw materials, but also requires micro-etching line employees to prepare persulfate micro-etching liquid every day, increasing labor costs. In addition, the device requires manual operation and has a low degree of automation.

[0004] Therefore, it is urgent to design a persulfate micro-etching solution regeneration device to improve the copper recovery rate, make the residual solution after electrolysis reusable, reduce raw material waste and labor costs, and improve the degree of automation of the device. Utility Model Content

[0005] In view of the shortcomings of the prior art, the purpose of the utility model is to provide a persulfate micro-etching solution circulation and regeneration system device. The persulfate micro-etching solution circulation and regeneration system device provided by the utility model adopts a high oxygen evolution potential anode, so that after electrolysis, regenerated persulfate micro-etching solution can be obtained in the anode chamber, and the regenerated micro-etching solution can be 100% reused, and the copper in the waste persulfate micro-etching solution can be completely converted into metallic copper, which can reduce the waste of raw materials and labor costs; and the automation degree of the overall device can be improved through the PLC control unit, without the need for manual supervision.

[0006] To achieve this purpose, the utility model adopts the following technical solutions:

[0007] The utility model provides a persulfate micro-etching solution circulation regeneration system device, comprising: an electrolysis unit and a PLC control unit;

[0008] The electrolysis unit comprises a cathode module and an anode module, wherein the cathode module comprises a cathode chamber, and the anode module comprises an anode chamber, wherein the cathode chamber and the anode chamber are arranged adjacent to each other and separated by a cation exchange membrane; a cathode and a copper ion detector are arranged in the cathode chamber, and the copper ion detector is electrically connected to the PLC control unit; and a high oxygen evolution potential anode is arranged in the anode chamber;

[0009] The cathode module is connected to a persulfate micro-etching waste liquid storage device; the anode module is connected to a regeneration liquid storage device.

[0010] The utility model provides a persulfate micro-etching solution circulation regeneration system device, wherein the anode used in the electrolysis unit is a high oxygen evolution potential anode, so that the main reaction at the anode is: 2SO4 2- -2e=S2O8 2- ; The reaction at the cathode is: Cu 2+ +2e=Cu; therefore, after electrolysis, regenerated persulfate micro-etching solution can be obtained in the anode chamber, and the regenerated micro-etching solution can be 100% reused without any wastewater discharge, and the copper in the waste persulfate micro-etching solution can be completely converted into metallic copper, which can reduce the waste of raw materials and labor costs;

[0011] In addition, the persulfate micro-etching liquid recycling regeneration system device of the utility model adopts an offline electrolysis method, which does not require changing the production method of the production line; and the automation level of the overall device can be improved through the PLC control unit, without manual supervision. At the same time, the equipment cost is low, the floor space is small, and the energy consumption is low.

[0012] Preferably, the volume ratio of the anode chamber to the cathode chamber is 1:(1.5-3).

[0013] Preferably, the area ratio of the high oxygen evolution potential anode to the cathode is 1:(2-6).

[0014] Preferably, the cathode module further comprises a cathode circulation chamber, and the cathode circulation chamber is communicated with the cathode chamber.

[0015] Preferably, the anode module further comprises an anode circulation chamber, and the anode circulation chamber is communicated with the anode chamber.

[0016] Preferably, the cathode circulation chamber, cathode chamber, anode chamber and anode circulation chamber are an integrated structure, the cathode circulation chamber and the cathode chamber are separated by a cathode partition, and the anode chamber and the anode circulation chamber are separated by an anode partition; overflow ports are provided on the cathode partition and the anode partition.

[0017] Preferably, the cathode chamber and the cathode circulation chamber are also connected via a cathode connecting pipeline; a cathode circulation pump is provided on the cathode connecting pipeline.

[0018] Preferably, the anode chamber and the anode circulation chamber are also connected via an anode connecting pipeline; and an anode circulation pump is provided on the anode connecting pipeline.

[0019] Preferably, the cathode chamber and the anode circulation chamber are also connected via a drainage pipeline.

[0020] Preferably, a cathode drainage pump is provided on the drainage pipeline.

[0021] Preferably, a plurality of liquid level probes are provided in the cathode circulation chamber, the cathode chamber, the anode chamber and the anode circulation chamber.

[0022] Preferably, the plurality of liquid level probes are all electrically connected to the PLC control unit.

[0023] Preferably, the persulfate micro-etching waste liquid storage device is connected to the cathode circulation chamber, and a liquid adding pump is provided on the connecting pipeline between the persulfate micro-etching waste liquid storage device and the cathode circulation chamber.

[0024] Preferably, the regeneration liquid storage device is connected to the anode chamber, and an anode drainage pump is provided on the connecting pipeline between the regeneration liquid storage device and the anode chamber.

[0025] Preferably, the electrolysis unit further comprises a power supply, wherein the positive electrode and the negative electrode of the power supply are respectively connected to the high oxygen evolution potential anode and the cathode.

[0026] Preferably, the power supply is electrically connected to the PLC control unit.

[0027] Preferably, the cathode circulation pump, the anode circulation pump, the cathode drainage pump, the anode drainage pump and the liquid adding pump are all electrically connected to the PLC control unit.

[0028] The system refers to an equipment system, a device system or a production device.

[0029] Compared with the prior art, the beneficial effects of the utility model are:

[0030] The utility model provides a persulfate micro-etching solution circulation regeneration system device, wherein the anode used in the electrolysis unit is a high oxygen evolution potential anode, so that the main reaction at the anode is: 2SO4 2- -2e=S2O8 2- ; The reaction at the cathode is: Cu 2+ +2e=Cu; therefore, after electrolysis, regenerated persulfate micro-etching solution can be obtained in the anode chamber, and the regenerated micro-etching solution can be 100% reused without any wastewater discharge, and the copper in the waste persulfate micro-etching solution can be completely converted into metallic copper, which can reduce the waste of raw materials and labor costs;

[0031] In addition, the persulfate micro-etching liquid recycling regeneration system device of the utility model adopts an offline electrolysis method, which does not require changing the production method of the production line; and the automation level of the overall device can be improved through the PLC control unit, without manual supervision. At the same time, the equipment cost is low, the floor space is small, and the energy consumption is low. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 A schematic diagram of an electrolysis unit provided for an embodiment of the utility model;

[0033] Among them, 1-cathode chamber; 2-anode chamber; 3-cathode circulation chamber; 4-anode circulation chamber; 5-regeneration liquid storage device; 6-regeneration liquid sub-liquid adjustment device; 7-persulfate micro-etching waste liquid storage device; 8-anode drainage pump; 9-liquid adding pump; 10-cathode circulation pump; 11-cathode drainage pump; 12-anode circulation pump. DETAILED DESCRIPTION

[0034] It should be understood that, in the description of the present invention, the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0035] It should be noted that in the description of the present invention, unless otherwise clearly specified and limited, the terms "disposed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood by specific circumstances.

[0036] Those skilled in the art should understand that the present invention necessarily includes necessary pipelines, conventional valves and general pump equipment for realizing a complete process, but the above content does not constitute the main innovation of the present invention. Those skilled in the art can add layouts on their own based on the process flow and equipment structure selection, and the present invention does not make special requirements or specific limitations on this.

[0037] The technical solution of the utility model is further explained below with reference to the accompanying drawings and through specific implementation methods.

[0038] The utility model provides a persulfate micro-etching solution circulation regeneration system device, comprising: an electrolysis unit and a PLC control unit;

[0039] The electrolysis unit includes a cathode module and an anode module. Figure 1As shown, the cathode module includes a cathode chamber 1, and the anode module includes an anode chamber 2, wherein the cathode chamber 1 and the anode chamber 2 are arranged adjacent to each other and separated by a cation exchange membrane; a cathode and a copper ion detector are arranged in the cathode chamber 1, and the copper ion detector is electrically connected to the PLC control unit; and a high oxygen evolution potential anode is arranged in the anode chamber 2;

[0040] The cathode module is connected to a persulfate micro-etching waste liquid storage device 7 ; the anode module is connected to a regeneration liquid storage device 5 .

[0041] It should be noted that the persulfate micro-etching waste liquid storage device 7 is used to store the persulfate micro-etching waste liquid, that is, the persulfate micro-etching liquid after etching copper. The "high oxygen evolution potential" in the high oxygen evolution potential anode refers to an oxygen evolution potential greater than or equal to 2.5V.

[0042] The utility model provides a persulfate micro-etching solution circulation regeneration system device, wherein the anode used in the electrolysis unit is a high oxygen evolution potential anode, so that the main reaction at the anode is: 2SO4 2- -2e=S2O8 2- ; The reaction at the cathode is: Cu 2+ +2e=Cu; therefore, after electrolysis, a regenerated persulfate micro-etching solution can be obtained in the anode chamber 2, and the regenerated micro-etching solution can be 100% reused without any wastewater discharge, and the copper in the waste persulfate micro-etching solution can be completely converted into metallic copper, which can reduce the waste of raw materials and labor costs;

[0043] In addition, the persulfate micro-etching liquid recycling regeneration system device of the utility model adopts an offline electrolysis method, which does not require changing the production method of the production line; and the automation level of the overall device can be improved through the PLC control unit, without manual supervision. At the same time, the equipment cost is low, the floor space is small, and the energy consumption is low.

[0044] Furthermore, the volume ratio of the anode chamber 2 to the cathode chamber 1 is 1:(1.5-3), for example, it can be 1:1.5, 1:1.6, 1:1.8, 1:2, 1:2.2, 1:2.5 or 1:3, etc.

[0045] Furthermore, the area ratio of the high oxygen evolution potential anode to the cathode is 1:(2-6), for example, it can be 1:2, 1:3, 1:4, 1:5 or 1:6.

[0046] In the present invention, 2H2O-4e=4H + +O2 side reaction, the side reaction only accounts for 10-30%, and the efficiency of the main sulfate oxidation reaction can reach 70-90%.

[0047] Since oxygen will be evolved as a side reaction at the anode, the anode current efficiency will be lower than the cathode current efficiency. Therefore, when the volume ratio of the anode chamber 2 to the cathode chamber 1 and the area ratio of the high oxygen evolution potential anode to the cathode are limited to the above ratios, the difference in cathode and anode current efficiencies can be matched.

[0048] The present invention does not limit the material of the cathode, for example, it can be any one of pure titanium, pure copper or stainless steel. The present invention does not limit the material of the anode, as long as the oxygen evolution potential is greater than or equal to 2.5V, for example, it can be any one of boron-doped diamond, titanium dioxide or lead-tin alloy, and the oxygen evolution potentials of the above anode materials are relatively close.

[0049] Furthermore, the cathode module further comprises a cathode circulation chamber 3 , and the cathode circulation chamber 3 is communicated with the cathode chamber 1 .

[0050] Furthermore, the anode module further includes an anode circulation chamber 4 , and the anode circulation chamber 4 is communicated with the anode chamber 2 .

[0051] Furthermore, the cathode circulation chamber 3, cathode chamber 1, anode chamber 2 and anode circulation chamber 4 are an integrated structure, the cathode circulation chamber 3 and the cathode chamber 1 are separated by a cathode partition, and the anode chamber 2 and the anode circulation chamber 4 are separated by an anode partition; overflow ports are provided on the cathode partition and the anode partition.

[0052] Furthermore, the cathode chamber 1 and the cathode circulation chamber 3 are connected via a cathode connecting pipeline; a cathode circulation pump 10 is provided on the cathode connecting pipeline.

[0053] Furthermore, the anode chamber 2 and the anode circulation chamber 4 are connected via an anode connecting pipeline; an anode circulation pump 12 is provided on the anode connecting pipeline.

[0054] In the utility model, during the electrolysis process, the liquid in the anode circulation chamber 4 can be pumped into the anode chamber 2 by the anode circulation pump 12, and after the liquid level in the anode chamber 2 rises, the liquid returns to the anode circulation chamber 4 through the overflow port; similarly, the liquid in the cathode circulation chamber 3 is pumped into the cathode chamber 1 by the cathode circulation pump 10, and after the liquid level in the cathode chamber 1 rises, the liquid can overflow back into the cathode circulation chamber 3.

[0055] Furthermore, the cathode chamber 1 and the anode circulation chamber 4 are also connected via a drainage pipeline.

[0056] In the utility model, the liquid in the cathode chamber 1 after electrolysis is mainly sulfuric acid and sodium sulfate, and this part of the liquid can be returned to the anode chamber 2 for regeneration to generate sodium persulfate.

[0057] Furthermore, a cathode drainage pump 11 is provided on the drainage pipeline.

[0058] Furthermore, a plurality of liquid level probes are independently arranged in the cathode circulation chamber 3 , the cathode chamber 1 , the anode chamber 2 and the anode circulation chamber 4 .

[0059] In the present invention, the several refers to at least 2, for example, it can be 2, 3 or 4.

[0060] Furthermore, the plurality of liquid level probes are all electrically connected to the PLC control unit.

[0061] Furthermore, the persulfate micro-etching waste liquid storage device 7 is connected to the cathode circulation chamber 3 , and a liquid adding pump 9 is provided on the connecting pipeline between the persulfate micro-etching waste liquid storage device 7 and the cathode circulation chamber 3 .

[0062] Furthermore, the regeneration liquid storage device 5 is connected to the anode chamber 2 , and an anode drainage pump 8 is provided on the connecting pipeline between the regeneration liquid storage device 5 and the anode chamber 2 .

[0063] Furthermore, the output end of the regeneration liquid storage device 5 is also connected to a regeneration liquid sub-liquid regulating device 6 .

[0064] In the utility model, part of the persulfate micro-etching liquid will be taken away by the circuit board during use. In addition, considering the evaporation of water, the concentration of sulfuric acid or persulfate in the liquid in the anode chamber after electrolysis will not reach the set value. Therefore, it needs to enter the regeneration liquid sub-liquid regulating device 6 for simple mixing before use.

[0065] Furthermore, the electrolysis unit also includes a power supply, and the positive electrode and the negative electrode of the power supply are respectively connected to the high oxygen evolution potential anode and the cathode.

[0066] Furthermore, the power supply is electrically connected to the PLC control unit.

[0067] Furthermore, the power supply includes an AC power supply and a rectifier, and the rectifier is electrically connected to the PLC control unit.

[0068] In the utility model, the copper ion detector and the rectifier are both connected to the PLC control unit, and the PLC can automatically adjust the rectifier according to the copper ion concentration detected by the copper ion detector, thereby regulating the current.

[0069] Furthermore, the cathode circulation pump 10 , the anode circulation pump 12 , the cathode drainage pump 11 , the anode drainage pump 8 and the liquid adding pump 9 are all electrically connected to the PLC control unit.

[0070] Furthermore, the entire device can be embedded with 5G signals, and real-time data of the equipment can be viewed on the mobile client or PC. Operators can also directly operate the equipment through the mobile client or PC, which is simple and convenient. At the same time, when the device is abnormal, the PLC will turn off the power supply and send the abnormal system to the client to remind the operator, which is safe and reliable.

[0071] Example

[0072] This embodiment provides a persulfate micro-etching solution circulation regeneration system device, including: an electrolysis unit and a PLC control unit;

[0073] The electrolysis unit includes a cathode module and an anode module. Figure 1 As shown, the cathode module includes a cathode circulation chamber 3 and a cathode chamber 1, and the anode module includes an anode chamber 2 and an anode circulation chamber 4. The cathode circulation chamber 3, the cathode chamber 1, the anode chamber 2 and the anode circulation chamber 4 are integrated structures. The cathode chamber 1 and the anode chamber 2 are adjacently arranged and separated by a cation exchange membrane. The volume ratio of the anode chamber 2 to the cathode chamber 1 is 1:2. The cathode chamber 1 and the anode circulation chamber 4 are also connected through a drainage pipeline, and a cathode drainage pump 11 is arranged on the drainage pipeline; the cathode circulation chamber 3 and the cathode chamber 1 are separated by a cathode partition, and the anode chamber 2 and the anode circulation chamber 4 are separated by an anode partition, and overflow ports are arranged on the cathode partition and the anode partition; the cathode chamber 1 and the cathode circulation chamber 3 are also connected through a cathode connecting pipeline, and a cathode circulation pump 10 is arranged on the cathode connecting pipeline; the anode chamber 2 and the anode circulation chamber 4 are also connected through an anode connecting pipeline; an anode circulation pump 12 is arranged on the anode connecting pipeline;

[0074] The cathode chamber 1 is provided with a titanium cathode and a copper ion detector, the anode chamber 2 is provided with a boron-doped diamond anode, and the area ratio of the boron-doped diamond anode to the titanium cathode is 1:4; the cathode circulation chamber 3, the cathode chamber 1, the anode chamber 2 and the anode circulation chamber 4 are all provided with an ultra-high liquid level probe, a high liquid level probe, a medium liquid level probe and a low liquid level probe in order from top to bottom;

[0075] The cathode circulation chamber 3 is connected to a persulfate micro-etching waste liquid storage device 7, and a liquid adding pump 9 is provided on the connecting pipeline between the persulfate micro-etching waste liquid storage device 7 and the cathode circulation chamber 3; the anode chamber 2 is connected to a regeneration liquid storage device 5, and an anode liquid discharge pump 8 is provided on the connecting pipeline between the regeneration liquid storage device 5 and the anode chamber 2, and the output end of the regeneration liquid storage device 5 is also connected to a regeneration liquid sub-liquid regulating device 6;

[0076] The electrolysis unit further comprises a power supply, which comprises an AC power supply and a rectifier, wherein the positive electrode and the negative electrode of the rectifier are respectively connected to the boron-doped diamond anode and the titanium cathode;

[0077] The copper ion detector, all liquid level probes, rectifier, cathode circulation pump 10, anode circulation pump 12, cathode drainage pump 11, anode drainage pump 8 and liquid adding pump 9 are all electrically connected to the PLC control unit.

[0078] When the above-mentioned persulfate micro-etching solution recycling and regeneration system device is used to regenerate the sodium persulfate micro-etching solution after etching copper, during the electrolysis process, the copper ion detector detects a decrease in the copper ion concentration in the cathode chamber 1 and transmits a signal to the PLC control unit, which then controls the rectifier to reduce the output current. When it is detected that the copper ion concentration is less than the preset value (i.e., 5 g / L), the PLC control unit turns off the rectifier to stop electrolysis, and then controls to turn on the anode drainage pump 8 to discharge the anode liquid into the regeneration liquid storage device 5. When the anode liquid level is lower than the low liquid level probe position of the anode chamber 2, the PLC automatically turns off the anode drainage pump 8, and at the same time turns on the cathode drainage pump 11 to pump the cathode liquid into the anode circulation chamber 4. When the liquid level reaches the middle liquid level, the PLC controls the anode circulation pump 12 to turn on. When the liquid level in the anode chamber 2 reaches the high liquid level, the PLC controls the cathode drainage pump 11 to turn off, and at the same time turns on the liquid adding pump 9 to pump the waste liquid in the persulfate micro-etching waste liquid storage device 7 into the cathode circulation chamber 3. When the liquid level in the cathode circulation chamber 3 reaches the middle liquid level, the PLC controls the cathode circulation pump 10 to turn on. When the liquid level in the cathode chamber 1 reaches the high liquid level, the PLC controls the liquid adding pump 9 to turn off and stop adding waste liquid. The PLC continues to perform electrolysis according to the copper ion concentration in the waste liquid detected by the copper ion detector.

[0079] The above description is only a specific implementation method of the present utility model, but the protection scope of the present utility model is not limited thereto. Technicians in the relevant technical field should understand that any changes or substitutions that can be easily thought of by technicians in the relevant technical field within the technical scope disclosed in the present utility model fall within the protection scope and disclosure scope of the present utility model.

Claims

1. A persulfate micro-etching solution circulation regeneration system device, characterized in that: include: Electrolysis unit and PLC control unit; The electrolysis unit comprises a cathode module and an anode module, wherein the cathode module comprises a cathode chamber, and the anode module comprises an anode chamber, wherein the cathode chamber and the anode chamber are arranged adjacent to each other and separated by a cation exchange membrane; a cathode and a copper ion detector are arranged in the cathode chamber, and the copper ion detector is electrically connected to the PLC control unit; and a high oxygen evolution potential anode is arranged in the anode chamber; The cathode module is connected to a persulfate micro-etching waste liquid storage device; the anode module is connected to a regeneration liquid storage device.

2. The persulfate micro-etching solution circulation regeneration system device according to claim 1, characterized in that: The volume ratio of the anode chamber to the cathode chamber is 1:(1.5-3).

3. The persulfate micro-etching solution circulation regeneration system device according to claim 1, characterized in that: The area ratio of the high oxygen evolution potential anode to the cathode is 1:(2-6).

4. The persulfate micro-etching solution circulation regeneration system device according to claim 1, characterized in that: The cathode module further comprises a cathode circulation chamber, wherein the cathode circulation chamber is in communication with the cathode chamber; The anode module further includes an anode circulation chamber, which is communicated with the anode chamber.

5. The persulfate micro-etching solution circulation regeneration system device according to claim 4, characterized in that: The cathode circulation chamber, cathode chamber, anode chamber and anode circulation chamber are integrated structures, the cathode circulation chamber and the cathode chamber are separated by a cathode separator, and the anode chamber and the anode circulation chamber are separated by an anode separator; overflow ports are provided on the cathode separator and the anode separator; The cathode chamber and the cathode circulation chamber are also connected via a cathode connecting pipeline; a cathode circulation pump is provided on the cathode connecting pipeline; The anode chamber and the anode circulation chamber are also connected through an anode connecting pipeline; an anode circulation pump is arranged on the anode connecting pipeline.

6. The persulfate micro-etching solution circulation regeneration system device according to claim 5, characterized in that: The cathode chamber and the anode circulation chamber are also connected via a drainage pipeline; The drainage pipeline is provided with a cathode drainage pump.

7. The persulfate micro-etching solution circulation regeneration system device according to claim 4, characterized in that: The cathode circulation chamber, cathode chamber, anode chamber and anode circulation chamber are independently provided with a plurality of liquid level probes; The plurality of liquid level probes are all electrically connected to the PLC control unit.

8. The persulfate micro-etching solution circulation regeneration system device according to claim 6, characterized in that: The persulfate micro-etching waste liquid storage device is connected to the cathode circulation chamber, and a liquid adding pump is provided on the connecting pipeline between the persulfate micro-etching waste liquid storage device and the cathode circulation chamber; The regeneration liquid storage device is connected to the anode chamber, and an anode drainage pump is arranged on the connecting pipeline between the regeneration liquid storage device and the anode chamber.

9. The persulfate micro-etching solution circulation regeneration system device according to claim 1, characterized in that: The electrolysis unit further comprises a power supply, wherein the positive electrode and the negative electrode of the power supply are connected to the high oxygen evolution potential anode and the cathode respectively; The power supply is electrically connected to the PLC control unit.

10. The persulfate micro-etching solution circulation regeneration system device according to claim 8, characterized in that: The cathode circulation pump, the anode circulation pump, the cathode drainage pump, the anode drainage pump and the liquid adding pump are all electrically connected to the PLC control unit.

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