Movable wireless calibration device for pressure gauge of silicon carbide growth equipment

Abstract

The utility model provides a movable wireless silicon carbide growth equipment pressure gauge calibration device, which comprises a sealing barrel provided with a sealing cavity and used for being arranged in vacuum equipment; a hanging ring for hanging the rope is arranged on the sealing barrel; and the pressure calibration mechanism is arranged in the sealing cavity and is used for measuring the pressure in the vacuum equipment. The movable wireless calibration device for the pressure gauge of the silicon carbide growth equipment, provided by the utility model, is provided with the sealing barrel, and the sealing barrel can be placed in vacuum equipment by connecting a rope through a hanging ring on the sealing barrel; and the pressure calibration mechanism is arranged in the sealing barrel, so that the pressure in the vacuum equipment can be measured, the phenomenon that pressure measurement equipment on the original equipment is dismounted for inspection at regular intervals can be avoided, and the adaptability and the practicability are good.

Description

Technical Field

[0001] The utility model belongs to the technical field of auxiliary measurement of pressure equipment, and in particular relates to a movable wireless pressure gauge calibration device for silicon carbide growth equipment. Background Art

[0002] With the continuous development of science and technology, vacuum technology is increasingly used in various fields, such as semiconductor manufacturing, aerospace, nuclear fusion research, etc. In these applications, the performance of vacuum equipment plays a vital role in the operation of the entire system. Among them, an important component for monitoring the performance of vacuum equipment is the pressure sensor. The pressure sensor needs to be calibrated regularly to ensure the accuracy of its measurement results. Calibration is a process of determining the accuracy of a measuring device by comparing it with a standard device of known accuracy. If the pressure measuring device is not calibrated regularly, it may cause measurement errors, which may lead to product quality, equipment safety, scientific research errors, etc.

[0003] In the prior art, when the pressure measuring equipment needs to be calibrated, it is usually removed from the original equipment regularly and sent to the metrology department for inspection. However, the inspection cycle is long, and it is necessary to wait for the test results and the certificate issued by the metrology department, and a certain fee needs to be paid. The inspection cost is high, and the inspection requires the pressure sensor to be removed from the original equipment, which will destroy the sealing of the equipment, causing air or other gases to enter the equipment, affecting the normal operation of the equipment, and having poor adaptability and practicality. Utility Model Content

[0004] The embodiment of the utility model provides a movable wireless pressure gauge calibration device for silicon carbide growth equipment, aiming to solve the problem of poor practicality of the existing pressure gauge calibration method.

[0005] To achieve the above purpose, the technical solution adopted by the utility model is: to provide a movable wireless silicon carbide growth equipment pressure gauge calibration device, including:

[0006] A sealed barrel having a sealed cavity, the sealed barrel being used to be arranged in a vacuum device; the sealed barrel is provided with a lifting ring for hanging a rope;

[0007] The pressure calibration mechanism is arranged in the sealed cavity and is used to measure the pressure in the vacuum equipment.

[0008] In a possible implementation, the pressure calibration mechanism includes:

[0009] A fixing frame, fixedly arranged in the sealing cavity;

[0010] A pressure sensing module, fixed on the fixing frame, having a detection port passing through the side wall of the sealing barrel and communicating with the outside;

[0011] A power source, fixedly disposed in the sealed cavity and electrically connected to the pressure sensing module;

[0012] Matching controller.

[0013] In a possible implementation, a dustproof piece is provided in the detection port.

[0014] In a possible implementation, the dust-proof component is a copper sintered filter element.

[0015] In a possible implementation, the sealed barrel includes a cylinder and a sealing cover, the cylinder and the sealing cover together constitute the sealed cavity, and the sealing cover is provided with the lifting ring;

[0016] Wherein, the sealing cover is provided with a through hole for the detection port to pass through.

[0017] In a possible implementation, the sealing barrel and the sealing cover are connected by a flange.

[0018] In this implementation, compared with the prior art, a sealing barrel is provided, and a rope can be connected through a lifting ring on the sealing barrel to prevent the sealing barrel from being placed in the vacuum equipment; a pressure calibration mechanism is provided in the sealing barrel to measure the pressure in the vacuum equipment, thereby avoiding the need to regularly dismantle and inspect the pressure measuring equipment on the original equipment, and having good adaptability and practicality. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 A schematic diagram of the internal structure of a movable wireless pressure gauge calibration device for silicon carbide growth equipment provided by an embodiment of the utility model;

[0020] Figure 2 A schematic diagram of the top view of the structure of a movable wireless silicon carbide growth equipment pressure gauge calibration device provided by an embodiment of the utility model;

[0021] Description of reference numerals:

[0022] 10. Sealing barrel; 11. Sealing chamber; 12. Lifting ring; 13. Cylinder body; 14. Sealing cover; 20. Pressure calibration mechanism; 21. Fixing bracket; 22. Pressure sensing module; 221. Detection port; 2211. Dustproof part; 23. Power supply; 24. Matching controller. DETAILED DESCRIPTION

[0023] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0024] Please also read Figure 1 and Figure 2 The portable wireless pressure gauge calibration device for silicon carbide growth equipment provided by the utility model is now described. The portable wireless pressure gauge calibration device for silicon carbide growth equipment comprises: a sealing barrel 10 and a pressure calibration mechanism 20.

[0025] The sealed barrel 10 has a sealed cavity 11 and is used to be arranged in a vacuum device. The sealed barrel 10 is provided with a lifting ring 12 for hanging a rope.

[0026] The pressure calibration mechanism 20 is disposed in the sealed chamber 11 and is used to measure the pressure in the vacuum equipment.

[0027] Compared with the prior art, the portable wireless silicon carbide growth equipment pressure gauge calibration device provided in this embodiment is provided with a sealed barrel 10, and a rope can be connected through a ring 12 on the sealed barrel 10 to prevent the sealed barrel 10 from being placed in a vacuum device. A pressure calibration mechanism 20 is provided in the sealed barrel 10, which can measure the pressure in the vacuum device, and can avoid the need to regularly remove the pressure measuring device on the original device for inspection, and has good adaptability and practicality.

[0028] In some embodiments, the pressure calibration mechanism 20 may be implemented as follows: Figure 1 See the structure shown. Figure 1 , characterized in that the pressure calibration mechanism 20 includes: a fixing frame 21, a pressure sensing module 22, a power supply 23 and a matching controller 24. The fixing frame 21 is fixed in the sealed cavity 11. The pressure sensing module 22 is fixed on the fixing frame 21, and has a detection port 221 that passes through the side wall of the sealed barrel 10 and communicates with the outside. The power supply 23 is fixed in the sealed cavity 11 and is electrically connected to the pressure sensing module 22. A matching controller 24.

[0029] The fixing frame 21 can be understood as a positioning frame arranged in the sealed cavity 11 to support the pressure sensing module 22, the power supply 23 and the matching controller 24, and can be a fixing column arranged in the sealed cavity 11 parallel to the axis direction of the sealed barrel 10. The power supply 23 can be arranged on the fixing column, and the pressure sensing module 22 can be arranged on the fixing column and electrically connected to the power supply 23. The matching controller 24 can be electrically connected to the power supply 23 and the pressure sensing module 22, and can measure the pressure in the vacuum device and transmit the data in real time.

[0030] In some embodiments, the detection port 221 may be configured as follows: Figure 1 See the structure shown. Figure 1 A dustproof part 2211 is provided in the detection port 221 .

[0031] The dustproof member 2211 can prevent the material in the vacuum device from entering the detection port 221 .

[0032] In some embodiments, the dustproof member 2211 may be Figure 1 See the structure shown. Figure 1 , the dustproof part 2211 is a copper sintered filter element.

[0033] The copper sintered filter element can prevent the material in the vacuum device from entering the detection port 221. The copper sintered filter element is a filter material with a variety of industrial applications. It can effectively remove suspended matter and particles. The pore structure is stable and the pore size will not change even when the pressure changes. The copper sintered filter element is an existing technology and will not be described in detail here.

[0034] In some embodiments, the sealing barrel 10 may be Figure 1 , Figure 2 See the structure shown. Figure 1 , Figure 2 The sealed barrel 10 includes a cylinder 13 and a sealing cover 14 . The cylinder 13 and the sealing cover 14 together form a sealed chamber 11 . A hanging ring 12 is provided on the sealing cover 14 .

[0035] The sealing cover 14 is provided with a through hole for the detection port 221 to pass through.

[0036] The cylinder 13 and the sealing cover 14 can be understood as sealed bearing parts. The pressure in the sealed chamber 11 can be set to a standard atmospheric pressure through the sealed chamber 11. The pressure can be calibrated by measuring the pressure difference between the pressure in the vacuum equipment and the pressure in the sealed chamber 11 through the pressure calibration mechanism 20 in the sealed chamber 11.

[0037] The sealing cover 14 may be provided with a plurality of electrode connectors, all of which are arranged on the sealing cover 14, one end of each electrode connector is arranged in the sealing cavity 11 and electrically connected to the battery, and the other end is arranged outside the sealing cavity 11 for connecting to a charging device. An antenna may also be provided on the sealing cover 14 for amplifying the signal sent by the matching controller 24.

[0038] In some embodiments, the sealing barrel 10 may be Figure 1 See the structure shown. Figure 1 The sealing barrel 10 and the sealing cover 14 are connected by flanges.

[0039] The sealing performance of flange connection depends on the synergy of gasket, flange and bolts, among which gasket is the core component to achieve sealing. Flange connection is a common pipeline connection method, which connects two flanges tightly together by bolts, and gaskets are placed between the flanges to prevent leakage. Flange connection is an existing technology and will not be described in detail here.

[0040] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A mobile wireless pressure gauge calibration device for silicon carbide growth equipment, characterized in that: include: A sealed barrel having a sealed cavity, the sealed barrel being used to be arranged in a vacuum device; the sealed barrel is provided with a lifting ring for hanging a rope; The pressure calibration mechanism is arranged in the sealed cavity and is used to measure the pressure in the vacuum equipment.

2. The mobile wireless silicon carbide growth equipment pressure gauge calibration device according to claim 1, characterized in that: The pressure calibration mechanism comprises: A fixing frame, fixedly arranged in the sealing cavity; A pressure sensing module, fixed on the fixing frame, having a detection port passing through the side wall of the sealing barrel and communicating with the outside; A power source, fixedly disposed in the sealed cavity and electrically connected to the pressure sensing module; Matching controller.

3. The portable wireless silicon carbide growth equipment pressure gauge calibration device according to claim 2, characterized in that: A dustproof part is arranged in the detection port.

4. The portable wireless silicon carbide growth equipment pressure gauge calibration device according to claim 3, characterized in that: The dustproof part is a copper sintered filter element.

5. The mobile wireless silicon carbide growth equipment pressure gauge calibration device according to claim 2, characterized in that: The sealing barrel comprises a cylinder and a sealing cover, wherein the cylinder and the sealing cover together constitute the sealing cavity, and the sealing cover is provided with the lifting ring; Wherein, the sealing cover is provided with a through hole for the detection port to pass through.

6. The portable wireless silicon carbide growth equipment pressure gauge calibration device according to claim 5, characterized in that: The sealing barrel and the sealing cover are connected by flanges.

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