Cleaning device for wafer adhesive tape cutting blade

Abstract

The utility model discloses a cleaning device for a wafer adhesive tape cutting blade. The cleaning device comprises a bottom plate, a brush cleaning mechanism is arranged above the bottom plate, an upper cover plate covers the front side of the brush cleaning mechanism, a storage box is arranged below the bottom plate, and an exhaust mechanism is arranged on the side edge of the storage box. The brush cleaning mechanism comprises a first fixing plate, a motor, a first synchronous belt wheel, a second synchronous belt wheel, a third synchronous belt wheel, a fourth synchronous belt wheel and a synchronous belt, the third synchronous belt wheel is connected with a first brush, the fourth synchronous belt wheel is connected with a second brush, and a cutter hole is formed in the upper cover plate. The cleaning device has the advantages that rolling brush cleaning can be conducted on the cutting blade through the brush cleaning mechanism, and particulate matter generated when the cutting blade is cleaned can be pumped out to the outer side of the cleaning device through the exhaust mechanism; according to the cleaning device, automatic cleaning of the cutting blade is achieved, the efficiency is high, the shutdown frequency of equipment is reduced, labor is saved, and meanwhile personnel injury is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor wafers, in particular to a cleaning device for wafer tape cutting blades. Background Art

[0002] Wafer refers to the silicon chip used to make silicon semiconductor circuits, and its original material is silicon. Wafer cutting process is an indispensable process in the semiconductor chip manufacturing process. It belongs to the post-processing process of crystal column slicing. The whole wafer with the chip is divided into single chips according to the chip size. Since the material silicon of the wafer is a brittle material, the broken edges and corners will affect the strength of the chip. The surface finish is easily damaged during the cutting process, which will cause pollution to the subsequent processes. Therefore, it is necessary to set a layer of protective tape in the wafer cutting process to play a certain protective role and avoid subsequent troubles.

[0003] After the wafer is taped, the excess tape needs to be cut off, which is usually done automatically with a cutting blade. However, after the tape cutting blade has been used a certain number of times, adhesive will stick to the cutting blade, which needs to be cleaned manually or replaced with a new blade. Manual cleaning of the blade is inefficient and may cause harm to the person who replaces it; directly replacing a new blade will increase the cost of use, both of which will affect the normal production time of the equipment and waste labor. Utility Model Content

[0004] The utility model aims to provide a cleaning device for a wafer tape cutting blade to solve the problems raised in the above-mentioned background technology.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a cleaning device for a wafer tape cutting blade, comprising a base plate, a brush cleaning mechanism is arranged above the base plate, an upper cover is arranged on the front side cover of the brush cleaning mechanism, a material storage box is arranged below the base plate, and an exhaust mechanism is arranged on the side of the material storage box; the brush cleaning mechanism comprises a first fixed plate vertically fixed to the rear side of the base plate, a motor is arranged on the rear side of the first fixed plate, an output shaft of the motor passes through the first fixed plate forward and is connected to a first synchronous pulley, a second synchronous pulley is arranged above the first synchronous pulley, and a third synchronous pulley and a fourth synchronous pulley are arranged on the left side between the first synchronous pulley and the second synchronous pulley. Wheels, the third synchronous pulley and the fourth synchronous pulley are arranged on the left and right, the first synchronous pulley, the second synchronous pulley, the fourth synchronous pulley and the third synchronous pulley are all rotatably installed on the first fixed plate and are sequentially connected with the synchronous belt, the first synchronous pulley, the second synchronous pulley and the third synchronous pulley are all located on the inner side of the synchronous belt, the fourth synchronous pulley is located on the outer side of the synchronous belt, the third synchronous pulley is connected with the first brush, the fourth synchronous pulley is connected with the second brush, the first brush and the second brush are arranged side by side in the upper cover plate, the brush surfaces of the first brush and the second brush are in rolling contact, and a cutting hole is provided on the upper cover plate, and the cutting hole is located directly above the middle of the first brush and the second brush.

[0006] Further preferably, the exhaust mechanism comprises a fan and an exhaust pipe, the side wall of the material storage box is provided with a mounting hole, the fan is arranged inside the material storage box and covers the mounting hole, and the exhaust pipe is located outside the material storage box and connected to the mounting hole. By rotating the fan, the particles generated by cleaning can be extracted through the mounting hole and the exhaust pipe.

[0007] Further preferably, a fifth synchronous pulley is provided above the middle of the third synchronous pulley and the fourth synchronous pulley, and the fifth synchronous pulley is arranged on the inner side of the synchronous belt. The fifth synchronous pulley serves as a tensioning pulley for adjusting the tightness of the synchronous belt.

[0008] Further preferably, the rear end of the fifth synchronous pulley is connected to an adjustment block, and the first fixed plate and the adjustment block are both provided with waist-shaped holes for adjusting the fifth synchronous pulley. The position of the fifth synchronous pulley is easily adjusted through the waist-shaped hole on the first fixed plate, and the fifth synchronous pulley is fixed after adjustment through the waist-shaped hole on the adjustment block.

[0009] Further preferably, a first connecting shaft is connected between the third synchronous pulley and the first brush to achieve installation of the first brush; and a second connecting shaft is connected between the fourth synchronous pulley and the second brush to achieve installation of the second brush.

[0010] Further preferably, a second fixing plate for supporting the first connecting shaft and the second connecting shaft is provided on the front side of the first fixing plate to ensure the stability of the first brush and the second brush; bearings are connected between the first connecting shaft, the second connecting shaft and the second fixing plate to ensure smooth rotation of the first connecting shaft and the second connecting shaft.

[0011] Further preferably, a cover plate is provided between the first fixing plate and the second fixing plate to protect the multiple synchronous pulleys and synchronous belts.

[0012] Further preferably, the bottom plate is provided with a drop hole connected to the storage box, so that the particles generated by cleaning can fall into the storage box; the upper cover plate is covered on the drop hole, and the rear side of the upper cover plate is connected to the second fixed plate, which is convenient for fixing the upper cover plate and ensuring the stability of the installation of the upper cover plate.

[0013] Beneficial effects: The cleaning device for wafer tape cutting blades of the utility model can perform rolling brush cleaning on the cutting blades through a brush cleaning mechanism. Specifically, a motor drives the first synchronous pulley to rotate, and the first synchronous pulley drives the third synchronous pulley and the fourth synchronous pulley to rotate synchronously in opposite directions through a synchronous belt, thereby realizing synchronous rolling brushing on the left and right sides of the cutting blade; the particulate matter generated when the brush cleaning mechanism cleans the cutting blade can be extracted to the outside of the cleaning device through the exhaust mechanism; the cleaning device realizes automatic cleaning of the cutting blade, has high efficiency, reduces the number of equipment shutdowns, saves labor, and does not cause personal injury. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 This is a schematic diagram of the axial structure of a cleaning device for a wafer tape cutting blade disclosed in an embodiment of the utility model;

[0015] Figure 2 It is a schematic diagram of the front view of the cleaning device for wafer tape cutting blade disclosed in an embodiment of the utility model;

[0016] Figure 3 This is a schematic diagram of the axial structure of the brush cleaning mechanism disclosed in the embodiment of the utility model;

[0017] Figure 4 It is a schematic diagram of the wafer tape cutting blade cleaning device disclosed in an embodiment of the utility model in the state of cleaning the cutting blade.

[0018] Figure markings: 1-bottom plate, 101-dropping hole, 2-brush cleaning mechanism, 201-first fixed plate, 202-motor, 203-first synchronous pulley, 204-second synchronous pulley, 205-third synchronous pulley, 206-fourth synchronous pulley, 207-fifth synchronous pulley, 208-synchronous belt, 209-first connecting shaft, 210-first brush, 211-second connecting shaft, 212-second brush, 213-adjusting block, 214-second fixed plate, 215-bearing, 3-upper cover, 301-cutter hole, 4-storage box, 5-exhaust mechanism, 501-fan, 502-exhaust duct. DETAILED DESCRIPTION

[0019] The following are specific embodiments of the present invention and the accompanying drawings to further describe the technical solution of the present invention, but the present invention is not limited to these embodiments.

[0020] like Figure 1-4 As shown, a cleaning device for wafer tape cutting blades realizes automatic cleaning of the cutting blades. The cleaning device comprises a bottom plate 1, a brush cleaning mechanism 2 is arranged above the bottom plate 1, an upper cover plate 3 is arranged on the front side cover of the brush cleaning mechanism 2, a material storage box 4 is arranged below the bottom plate 1, and an exhaust mechanism 5 is arranged on the side of the material storage box 4; wherein, the brush cleaning mechanism 2 is used for rolling cleaning of the cutting blade, the upper cover plate 3 is used to cover the two brushes and blades of the brush cleaning mechanism 2 to prevent the cleaned particles from splashing; the material storage box 4 is used to store the cleaned particles to prevent the particles from splashing and falling, and facilitate centralized processing; the exhaust mechanism 5 is used to suck out the particles in the material storage box 4, without stopping the machine for cleaning or manual cleaning.

[0021] In the present application, the brush cleaning mechanism 2 includes a first fixed plate 201 vertically fixed to the rear side of the base plate 1, a motor 202 is provided on the rear side of the first fixed plate 201, the output shaft of the motor 202 passes through the first fixed plate 201 forward and is connected to a first synchronous pulley 203, a second synchronous pulley 204 is provided above the first synchronous pulley 203, a third synchronous pulley 205 and a fourth synchronous pulley 206 are provided on the left side of the middle of the first synchronous pulley 203 and the second synchronous pulley 204, the third synchronous pulley 205 and the fourth synchronous pulley 206 are arranged on the left and right sides, and the first synchronous pulley 203 The second synchronous pulley 204, the fourth synchronous pulley 206 and the third synchronous pulley 205 are all rotatably installed on the first fixed plate 201 and are sequentially connected with the synchronous belt 208. The third synchronous pulley 205 is connected with the first brush 210, and the fourth synchronous pulley 206 is connected with the second brush 212. The first brush 210 and the second brush 212 are arranged side by side in the upper cover 3, and the brush surfaces of the first brush 210 and the second brush 212 are in rolling contact. The upper cover 3 is provided with a cutter hole 301, and the cutter hole 301 is located directly above the middle of the first brush 210 and the second brush 212. Among them, the first synchronous belt pulley 203 is a driving wheel, which can be driven to rotate by the motor 202, and then the second synchronous belt pulley 204, the third synchronous belt pulley 205 and the fourth synchronous belt pulley 206 are driven to rotate synchronously through the synchronous belt 208. Since the first synchronous belt pulley 203, the second synchronous belt pulley 204 and the third synchronous belt pulley 205 are all located on the inner side of the synchronous belt 208, the rotation direction of the second synchronous belt pulley 204 is the same as the rotation direction of the first synchronous belt pulley 203, and the fourth synchronous belt pulley 206 is located on the outer side of the synchronous belt 208. Therefore, the rotation direction of the fourth synchronous belt pulley 206 is opposite to that of the first synchronous belt pulley 203, that is, the rotation direction of the third synchronous belt pulley 205 is opposite to that of the fourth synchronous belt pulley 206. The third synchronous belt pulley 205 and the fourth synchronous belt pulley 206 rotate towards each other, and can simultaneously clean the left and right sides of the cutting blade extending from the cutter hole 301. In the present application, the motor 202 drives the first synchronous pulley 203 to rotate clockwise, drives the third synchronous pulley 205 to rotate clockwise, and the fourth synchronous pulley 206 to rotate counterclockwise, so that the left and right sides of the cutting blade can be cleaned from top to bottom at the same time. The cutter hole 301 is used for the cutting blade to extend into the upper cover plate 3 and to position the cutting blade to ensure that the cutting blade can be accurately inserted between the first brush 210 and the second brush 212 after extending from the cutter hole 301.

[0022] In the present application, the exhaust mechanism 5 includes a fan 501 and an exhaust pipe 502. The side wall of the material storage box 4 is provided with a mounting hole. The fan 501 is arranged inside the material storage box 4 and covers the mounting hole. The exhaust pipe 502 is located outside the material storage box 4 and connected to the mounting hole. The mounting hole is used for the exhaust pipe 502 to communicate with the internal space of the material storage box 4. Through the rotation of the fan 501, the particles swept by the cutting blade in the material storage box 4 can be extracted from the material storage box 4 and sent to the dust collection box outside the cleaning device, so as to realize the self-cleaning of the inside of the material storage box 4. The material storage box 4 is also provided with an air inlet to ensure smooth exhaust of the fan 501.

[0023] In the present application, a fifth synchronous pulley 207 is provided above the middle of the third synchronous pulley 205 and the fourth synchronous pulley 206, and the fifth synchronous pulley 207 is provided on the inner side of the synchronous belt 208. The fifth synchronous pulley 207 is a tensioning pulley, which can adjust the tightness of the synchronous belt 208 and facilitate the installation and replacement of the synchronous belt 208. The rear end of the fifth synchronous pulley 207 is connected to an adjustment block 213, and the first fixed plate 201 and the adjustment block 213 are both provided with a waist-shaped hole for adjusting the fifth synchronous pulley 207. Through the setting of the waist-shaped hole, the left and right position of the fifth synchronous pulley 207 can be adjusted to achieve tension adjustment of the synchronous belt 208.

[0024] In the present application, a first connecting shaft 209 is connected between the third synchronous pulley 205 and the first brush 210, and a second connecting shaft 211 is connected between the fourth synchronous pulley 206 and the second brush 212. The connection between the third synchronous pulley 205 and the first brush 210, and the connection between the fourth synchronous pulley 206 and the second brush 212 are realized through the first connecting shaft 209, and the support of the first connecting shaft 209 and the second connecting shaft 211 is realized through the second fixed plate 214 set on the front side of the first fixed plate 201, so as to ensure the stability of the first brush 210 and the second brush 212; the first connecting shaft 209, the second connecting shaft 211 and the second fixed plate 214 are all connected with bearings 215 to ensure the smooth rotation of the first connecting shaft 209 and the second connecting shaft 211.

[0025] In the present application, a cover plate 216 is provided between the first fixed plate 201 and the second fixed plate 214 to shield dust and protect the synchronous pulley and synchronous belt 208 of the brush cleaning mechanism.

[0026] In the present application, a drop hole 101 connected to the material storage box 4 is provided on the bottom plate 1, and the upper cover plate 3 is covered on the drop hole 101 to facilitate the particles brushed off the cutting blade to fall into the material storage box 4; the rear side of the upper cover plate 3 is connected to the second fixed plate 214, and the lower side of the upper cover plate 3 is fixedly connected to the bottom plate 1. The upper cover plate 3 is connected to the second fixed plate 214 and the bottom plate 1 by screws, which is convenient to connect and can ensure the stability of the upper cover plate 3.

[0027] In the present application, the working process of the cleaning device is as follows: the cutting blade is extended from the cutting hole 301 into the upper cover plate 3 through the tool clamping moving mechanism, and moved between the first brush 210 and the second brush 212, and then the brush cleaning mechanism 2 is actuated, the motor 202 is started, and the first synchronous pulley 203 is driven to rotate clockwise, and the first synchronous pulley 203 drives the third synchronous pulley 205 to rotate clockwise through the synchronous belt 208, and drives the fourth synchronous pulley 206 to rotate counterclockwise, thereby driving the first brush 210 to rotate clockwise, and driving the second brush 212 to rotate counterclockwise, the first brush 210 rolls downward on the left side of the cutting blade, and the second brush 212 rolls downward on the right side of the cutting blade; while the brush cleaning mechanism 2 is actuated, the exhaust mechanism 5 is started at the same time, and the fan 501 rotates to extract the particles generated by cleaning on the cutting blade into the dust collection box outside the device.

[0028] Finally, it should be noted that the above description is only a preferred embodiment of the utility model and is not intended to limit the utility model. Although the utility model is described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions recorded in the aforementioned embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the utility model content within the protection scope of the utility model.

Claims

1. A cleaning device for a wafer tape cutting blade, comprising a bottom plate (1), characterized in that: A brush cleaning mechanism (2) is provided above the bottom plate (1), a front cover of the brush cleaning mechanism (2) is provided with an upper cover plate (3), a material storage box (4) is provided below the bottom plate (1), and an exhaust mechanism (5) is provided on the side of the material storage box (4); the brush cleaning mechanism (2) comprises a first fixing plate (201) vertically fixed to the rear side of the bottom plate (1), a motor (202) is provided on the rear side of the first fixing plate (201), and an output of the motor (202) is provided. The shaft passes through the first fixed plate (201) forward and is connected to a first synchronous belt pulley (203); a second synchronous belt pulley (204) is arranged above the first synchronous belt pulley (203); a third synchronous belt pulley (205) and a fourth synchronous belt pulley (206) are arranged on the left side between the first synchronous belt pulley (203) and the second synchronous belt pulley (204); the third synchronous belt pulley (205) and the fourth synchronous belt pulley (206) are arranged on the left and right sides; the first synchronous belt pulley (203) The first synchronous belt pulley (203), the second synchronous belt pulley (204), the fourth synchronous belt pulley (206) and the third synchronous belt pulley (205) are all rotatably mounted on the first fixed plate (201) and are sequentially connected with a synchronous belt (208); the first synchronous belt pulley (203), the second synchronous belt pulley (204) and the third synchronous belt pulley (205) are all located on the inner side of the synchronous belt (208); the fourth synchronous belt pulley (206) is located on the outer side of the synchronous belt (208); the third synchronous belt pulley (205) is located on the outer side of the synchronous belt (208); A first brush (210) is connected to the fourth synchronous pulley (206), and a second brush (212) is connected to the fourth synchronous pulley (206). The first brush (210) and the second brush (212) are arranged side by side in the upper cover plate (3). The brush surfaces of the first brush (210) and the second brush (212) are in rolling contact. A cutting hole (301) is provided on the upper cover plate (3), and the cutting hole (301) is located directly above the middle of the first brush (210) and the second brush (212).

2. A cleaning device for wafer tape cutting blade according to claim 1, characterized in that: The exhaust mechanism (5) comprises a fan (501) and an exhaust pipe (502); a side wall of the material storage box (4) is provided with a mounting hole; the fan (501) is arranged on the inner side of the material storage box (4) and covers the mounting hole; and the exhaust pipe (502) is located on the outer side of the material storage box (4) and connected to the mounting hole.

3. The cleaning device for wafer tape cutting blade according to claim 1, characterized in that: A fifth synchronous belt pulley (207) is provided above the middle of the third synchronous belt pulley (205) and the fourth synchronous belt pulley (206), and the fifth synchronous belt pulley (207) is arranged on the inner side of the synchronous belt (208).

4. A cleaning device for wafer tape cutting blade according to claim 3, characterized in that: The rear end of the fifth synchronous belt pulley (207) is connected to an adjustment block (213), and the first fixing plate (201) and the adjustment block (213) are both provided with waist-shaped holes for adjusting the fifth synchronous belt pulley (207).

5. The cleaning device for wafer tape cutting blade according to claim 1, characterized in that: A first connecting shaft (209) is connected between the third synchronous pulley (205) and the first brush (210), and a second connecting shaft (211) is connected between the fourth synchronous pulley (206) and the second brush (212).

6. A cleaning device for wafer tape cutting blades according to claim 5, characterized in that: A second fixing plate (214) for supporting the first connecting shaft (209) and the second connecting shaft (211) is provided on the front side of the first fixing plate (201), and bearings (215) are connected between the first connecting shaft (209), the second connecting shaft (211) and the second fixing plate (214).

7. A cleaning device for wafer tape cutting blade according to claim 6, characterized in that: A cover plate (216) is provided between the first fixing plate (201) and the second fixing plate (214).

8. The cleaning device for wafer tape cutting blade according to claim 6, characterized in that: The bottom plate (1) is provided with a material drop hole (101) which is in communication with the material storage box (4); the upper cover plate (3) is covered on the material drop hole (101); and the rear side of the upper cover plate (3) is connected to the second fixing plate (214).

Images