Auxiliary support device of aging material receiving machine and aging material receiving machine

Abstract

The utility model belongs to the technical field of wafer production, and particularly relates to an auxiliary support device of an aging material receiving machine and the aging material receiving machine. The push-pull driving part is connected with the driving end of the jacking driving part through a connecting plate; and the linkage plate is arranged at the driving end of the push-and-pull driving part and used for abutting against the outer wall of the tray and pulling out the tray under the action of the push-and-pull driving part. When the special aging oven receives materials, the tray can be effectively prevented from being pulled over and scattered, so that the defects caused by product scrapping and material mixing are overcome, and the waste of the products is reduced.

Description

Technical Field

[0001] The utility model belongs to the technical field of wafer production, and particularly relates to an auxiliary support device for an aging material receiving machine and an aging material receiving machine. Background Art

[0002] During the production process of quartz wafers, the assembled products need to be aged at high temperature. High temperature aging is mainly to let the wafer run in a high temperature environment for a period of time to observe whether its performance is stable and whether there is any failure or degradation. It is mainly to simulate the actual working environment and test the reliability of the wafer under long-term high temperature operation.

[0003] Since the aging tray, aging furnace and aging furnace receiving machine all have tolerances during design, the aging tray, aging furnace and aging furnace receiving machine are too loosely matched, so that the aging tray may be pulled over when the aging furnace receiving machine receives materials, and the products are scattered inside the machine and on the ground, resulting in product scrapping, material mixing and loss of work time. Utility Model Content

[0004] In view of the above-mentioned deficiencies in the prior art, the purpose of the utility model is to provide an auxiliary bracket device for an aging material receiving machine and an aging material receiving machine, which are used to solve the technical problem that the aging furnace material receiving machine in the prior art is easy to overturn the aging tray when receiving materials.

[0005] In order to achieve the above-mentioned purpose and other related purposes, the technical solution of the utility model is as follows:

[0006] An auxiliary support device for an aging material receiving machine, comprising:

[0007] Lifting drive parts;

[0008] A push-pull driving member connected to the driving end of the lifting driving member via a connecting plate; and

[0009] The linkage plate is arranged at the driving end of the push-pull driving member, and is used for abutting against the outer wall of the tray, and pulling out the tray under the action of the push-pull driving member.

[0010] Optionally, the extending direction of the linkage plate is perpendicular to the driving direction of the push-pull driving member.

[0011] Optionally, it also includes a guide assembly, which includes a guide column and a sliding member sleeved on the guide column, the sliding member is installed on the connecting plate and slidably cooperates with the guide column, and the linkage plate is connected to the front end of the guide column.

[0012] Optionally, two guide assemblies are provided and are arranged oppositely on two sides of the push-pull driving member, and the axial direction of the guide column is parallel to the driving direction of the push-pull driving member.

[0013] Optionally, a first mounting hole for mounting a push-pull driving member and a second mounting hole for mounting a sliding member are provided on the connecting plate, and the first mounting hole is located between the two second mounting holes.

[0014] Optionally, the sliding member includes a first sliding part and a second sliding part that are coaxially connected, the diameter of the first sliding part is larger than the diameter of the second sliding part, the second sliding part passes through the connecting plate, and the first sliding part is connected to the connecting plate.

[0015] Optionally, the connecting plate includes a first connecting portion and a second connecting portion which are perpendicular to each other, the lifting driving member is connected to the first connecting portion, and the push-pull driving member and the sliding member are connected to the second connecting portion.

[0016] Optionally, the linkage plate is parallel to the second connecting portion of the connecting plate.

[0017] Optionally, the lifting drive member is a lifting cylinder, and the push-pull drive member is a linear push-pull cylinder.

[0018] Based on the same concept, the utility model also provides an aging material receiving machine, including the auxiliary support device of the aging material receiving machine as described above.

[0019] As described above, the utility model has the following beneficial effects:

[0020] By reliably supporting the outer wall of the pallet with the linkage plate and cooperating with the operation of the push-pull drive component and the jacking drive component, the pallet can be effectively prevented from being overturned and the materials scattered when the special aging furnace is collecting the materials, thereby solving the problems caused by product scrapping and mixing of materials and reducing product waste. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 The structure diagram of the auxiliary support device of the aging material receiving machine of the utility model embodiment is shown in FIG. Figure 1 ;

[0022] Figure 2 The assembly diagram of the auxiliary support device for the aging material receiving machine of the utility model is shown in FIG. Figure 2 ;

[0023] Figure 3 The structure of the tray of the utility model embodiment is shown in FIG. Figure 1 ;

[0024] Figure 4 The structure of the tray of the utility model embodiment is shown in FIG. Figure 2 .

[0025] Description of Reference Numerals

[0026] 1-lifting drive member; 2-push-pull drive member; 3-connecting plate; 31-first connecting part; 32-second connecting part; 4-linkage plate; 5-guide column; 6-sliding member; 61-first sliding part; 62-second sliding part; 100-tray. DETAILED DESCRIPTION

[0027] The following is a specific embodiment of the present invention. People familiar with the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments. The details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention.

[0028] It should be noted that the diagrams provided in the present embodiment are only used to illustrate the basic concept of the present invention in a schematic manner, so the diagrams only show the components related to the present invention rather than being drawn according to the number, shape and size of the components in actual implementation. The form, quantity and proportion of each component in actual implementation can be changed at will, and the layout of the components may also be more complicated. It should be noted that the structure, proportion, size, etc. shown in the drawings attached to this specification are only used to match the content disclosed in the specification for people familiar with this technology to understand and read, and are not used to limit the limiting conditions that the present invention can be implemented, so they have no technical substantive significance. Any modification of the structure, change in the proportional relationship or adjustment of the size should still fall within the scope of the technical content disclosed by the present invention without affecting the effect and purpose that the present invention can produce. At the same time, the terms such as "upper", "lower", "left", "right", "middle" and "one" cited in this specification are only for the convenience of description and are not used to limit the scope of the implementation of the present utility model. Changes or adjustments to their relative relationships should be regarded as the scope of the implementation of the present utility model without substantially changing the technical content.

[0029] The existing aging trays, aging furnaces and aging furnace receiving machines are often designed with tolerances. The aging trays, aging furnaces and aging furnace receiving machines are too loosely matched, so that when the aging furnace receiving machine receives the materials, the aging tray (such as Figure 3 and Figure 4 The product may be overturned (as shown in the figure), scattering the product inside the machine and on the ground, resulting in product scrapping, material mixing and loss of work time.

[0030] In order to describe the present invention in detail, the auxiliary bracket device of the aging material receiving machine and the aging material receiving machine of the present invention are specifically described below:

[0031] Please combine Figure 1 and Figure 2As shown, the utility model provides an auxiliary support device for an aging material receiving machine, comprising: a lifting drive member 1, a push-pull drive member 2 and a linkage plate 4, the fixed end of the lifting drive member 1 is arranged on the aging material receiving machine, and the lifting drive member 1 is used to lift or drop the push-pull drive member 2 and the linkage plate 4, and raise or lower them to the required positions; the push-pull drive member 2 is connected to the driving end of the lifting drive member 1 through a connecting plate 3; the linkage plate 4 is arranged at the driving end of the push-pull drive member 2, and is used to abut against the outer wall of the tray 100, and pull the tray 100 out under the action of the push-pull drive member 2.

[0032] Specifically, the fixed end of the jacking drive member 1 is arranged on the aging material receiving machine. The main function of the jacking drive member 1 is to lift the push-pull drive member 2 and the linkage plate 4 to the desired position through the driving force. This design allows the device to adjust the height according to actual needs and adapt to different working environments and usage requirements. The push-pull drive member 2 is connected to the driving end of the jacking drive member 1 through the connecting plate 3. When the jacking drive member 1 is working, the push-pull drive member 2 will also move accordingly. The main function of the push-pull drive member 2 is to pull the pallet 100 with the cooperation of the linkage plate 4. The linkage plate 4 is arranged at the driving end of the push-pull drive member 2, and it can be against the outer wall of the pallet 100. Under the action of the push-pull drive member 2, the linkage plate 4 can make the pallet 100 be pulled out. This design can facilitate the operation of collecting the pallet 100 and improve work efficiency. Among them, the bottom of the pallet 100 can be supported by the chain of the aging furnace.

[0033] The specific operation process of the auxiliary support device of the aging receiving machine is as follows: when the wafer product outputs the tray 100 (aging tray) on the aging machine, because there is no linkage between the two moving parts from the aging machine to the receiving machine, the tray 100 needs to be dragged out with the help of an external device. When the tray 100 reaches the aging furnace mouth (there is a sensor on the machine to sense whether the tray 100 is in place), the push-pull drive member 2 is actuated (with the linkage plate 4 and the guide column 5), so that the driving end of the push-pull drive member 2 is extended; then, the driving end of the jacking drive member 1 is jacked up to lift the push-pull drive member 2 and the linkage plate 4 together; the push-pull drive member 2 is retracted (with the linkage plate 4 and the guide column 5), and the tray 100 is safely supported back to the receiving machine; the jacking drive member 1 falls, and the receiving of the tray 100 is completed. The use of this auxiliary support device for the aging receiving machine can effectively prevent the tray 100 from being pulled over and scattered, solve the problems of product scrapping, mixing of materials and loss of working hours, and reduce product waste.

[0034] In some embodiments, the extension direction of the linkage plate 4 is perpendicular to the driving direction of the push-pull drive 2. Specifically, the extension direction of the linkage plate 4 is perpendicular to the driving direction of the push-pull drive 2. This structural design enables the linkage plate 4 to reciprocate along the driving direction when the push-pull drive 2 moves along its driving direction. This vertical relationship ensures that the linkage plate 4 can be effectively driven by the push-pull drive 2, and the motion trajectory is linear and stable; and the linkage plate 4 can have a large contact area with the tray 100, which is beneficial for the linkage plate 4 to apply a balanced force to the tray 100, reducing local pressure and reducing the risk of the tray 100 tilting or deforming due to uneven force.

[0035] In the above embodiment, the auxiliary support device of the aging receiving machine also includes a guide assembly, which includes a guide column 5 and a sliding member 6 sleeved on the guide column 5, the sliding member 6 is installed on the connecting plate 3 and slidably cooperates with the guide column 5, and the linkage plate 4 is connected to the front end of the guide column 5. Specifically, the guide assembly plays a push-pull guiding role for the push-pull drive member 2. Due to the existence of the guide column 5, the push-pull drive member 2 will move along the axial direction of the guide column 5 when performing the push-pull operation, thereby ensuring the reliability and stability of the push-pull operation, and also avoiding the deviation and shaking of the push-pull drive member 2 during the push-pull process; the sliding member 6 slides with the guide column 5, which means that when the linkage plate 4 moves, the guide column 5 will also move accordingly. Due to the sliding cooperation between the sliding member 6 and the guide column 5, it is ensured that the guide column 5 can move synchronously with the linkage plate 4. This design ensures the coordination and consistency of the entire auxiliary support device during the push-pull operation.

[0036] In the above embodiment, the guide assembly is provided with two and is relatively arranged on both sides of the push-pull drive member 2, and the axial direction of the guide column 5 is parallel to the driving direction of the push-pull drive member 2. Specifically, the guide assembly is provided with two, which can play a role in guiding and balancing the push-pull drive member 2, and ensures the symmetrical balance force on both sides to avoid the situation of uneven guiding force. The two guide assemblies are symmetrically arranged on both sides of the push-pull drive member 2, ensuring that the guiding forces applied on both sides are balanced during the push-pull process. This avoids the problem of the push-pull drive member 2 being offset or tilted due to the uneven guiding force, thereby improving the stability and reliability of the push-pull operation. The axial direction of the guide column 5 is parallel to the driving direction of the push-pull drive member 2, which means that the guiding effect of the guide column 5 is matched with the movement direction of the push-pull drive member 2. This design ensures that the guide column 5 can accurately guide the push-pull drive member 2 to move along the predetermined direction. The two relatively arranged guide assemblies enhance the structural stability of the entire auxiliary bracket device. They form a stable support and guide system, providing more reliable support and guidance for the push-pull drive member 2.

[0037] It can be understood that the connecting plate 3 is provided with a first mounting hole for installing the push-pull driver 2 and a second mounting hole (not shown) for installing the sliding member 6, and the first mounting hole is located between the two second mounting holes. Among them, the first mounting hole facilitates the installation of the push-pull driver 2 on the connecting plate 3, and the second mounting hole facilitates the installation of the sliding member 6 on the connecting plate 3. This structure makes the installation process simple and direct, and improves the assembly efficiency. Considering the arrangement of the layout and the balance of the guide, two guide columns 5 are provided, and two second mounting holes are provided accordingly, the first mounting hole is located between the two second mounting holes, and the first mounting hole is located in the middle of the connecting plate 3. This layout arrangement makes the distribution of the push-pull driver 2 and the sliding member 6 on the connecting plate 3 more balanced. This layout not only helps to improve the stability of the structure, but also helps to maintain the balance of the guide, avoiding the performance degradation or failure risk caused by unreasonable layout. The middle position is usually the area where the force of the connecting plate 3 is most concentrated. Installing the push-pull driver 2 here can disperse the force and reduce stress concentration, thereby improving the bearing capacity and stability of the entire auxiliary bracket device.

[0038] In the above embodiment, the sliding member 6 includes a first sliding portion 61 and a second sliding portion 62 which are coaxially connected. The diameter of the first sliding portion 61 is larger than the diameter of the second sliding portion 62. The second sliding portion 62 passes through the connecting plate 3, and the first sliding portion 61 is connected to the connecting plate 3. Specifically, the first sliding portion 61 and the second sliding portion 62 of the sliding member 6 are both hollow cylindrical structures, so that the guide column 5 can be slidably inserted into the sliding member 6. The diameter of the first sliding portion 61 is larger than the diameter of the second sliding portion 62, so that the first sliding portion 61 can be stuck on the connecting plate 3 and can be connected to the connecting plate 3 by fasteners such as bolts. The sliding member 6 can also use a linear bearing to facilitate the linear sliding of the guide column 5.

[0039] In the above embodiment, the connecting plate 3 includes a first connecting portion 31 and a second connecting portion 32 which are perpendicular to each other, the lifting drive 1 is connected to the first connecting portion 31, and the push-pull drive 2 and the sliding member 6 are connected to the second connecting portion 32. Specifically, the first connecting portion 31 is connected to the lifting drive 1, which is conducive to the lifting drive 1 being able to drive the first connecting portion 31 to drive the connecting plate 3 to rise or fall together during operation. This design ensures the synchronization and stability of the lifting action, so that the entire auxiliary support device remains stable during the lifting process. The push-pull drive 2 and the sliding member 6 are connected to the second connecting portion 32, which is conducive to providing stable installation support for the push-pull drive 2 and the sliding member 6 through the connecting plate 3 on the one hand, and on the other hand, when the connecting plate 3 is lifted and lowered with the lifting drive 1, the push-pull drive 2, the sliding member 6 and the guide column 5 can be lifted and lowered synchronously. This structure not only facilitates processing and assembly during the manufacturing process, but also reduces the manufacturing cost.

[0040] It should be noted that the linkage plate 4 is parallel to the second connection portion 32 of the connecting plate 3. This structure is conducive to the installation of the push-pull drive member 2 on the second connection portion 32 of the connecting plate 3. The installer can easily install the push-pull drive member 2 on the second connection portion 32 and fix it by appropriate fasteners or connection methods. This parallel structure reduces the alignment and adjustment work during installation and improves the installation efficiency; and the driving end of the push-pull drive member 2 can be easily connected to the linkage plate 4, and its driving end can directly act on the linkage plate 4 to generate a direct and efficient driving force. This direct drive method reduces energy loss and transmission error and improves driving efficiency. When the push-pull drive member 2 is working, it can drive the linkage plate 4 to perform synchronous action. This synchronization ensures the stability and consistency of the entire auxiliary bracket device during the push-pull process. The linkage plate 4 can accurately move with the movement of the push-pull drive member 2 to achieve precise control.

[0041] For example, the lifting drive member 1 is a lifting cylinder, and the push-pull drive member 2 is a linear push-pull cylinder. While ensuring the realization of the required lifting function and push-pull function, the cost can be reduced. The lifting cylinder and the linear push-pull cylinder have low production costs and simple maintenance.

[0042] Based on the same concept, the utility model also provides an aging material receiving machine, including the auxiliary support device of the aging material receiving machine as described above. In this way, the aging material receiving machine can be convenient for receiving the tray 100 of the aging furnace and effectively prevent the tray 100 from being pulled over and scattered, thereby avoiding product scrapping and mixing.

[0043] In summary, the auxiliary support device of the aging material receiving machine and the aging material receiving machine provided by the utility model can reliably support the outer wall of the tray 100 through the linkage plate 4, cooperate with the operation of the push-pull drive component 2 and the jacking drive component 1, and can effectively prevent the tray 100 from being pulled over and scattered when receiving materials in the special aging furnace, thereby solving the defects caused by product scrapping and mixing of materials and reducing product waste.

[0044] The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Anyone familiar with the technology may modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by a person of ordinary skill in the art without departing from the spirit and technical concept disclosed in the present invention shall still be covered by the claims of the present invention.

Claims

1. An auxiliary support device for an aging material receiving machine, characterized in that: include: Lifting drive parts; A push-pull driving member connected to the driving end of the lifting driving member via a connecting plate; as well as The linkage plate is arranged at the driving end of the push-pull driving member, and is used for abutting against the outer wall of the tray, and pulling out the tray under the action of the push-pull driving member.

2. The auxiliary support device for the aging material receiving machine according to claim 1, characterized in that: The extending direction of the linkage plate is perpendicular to the driving direction of the push-pull driving member.

3. The auxiliary support device for the aging material receiving machine according to claim 1, characterized in that: It also includes a guide assembly, which includes a guide column and a sliding member sleeved on the guide column. The sliding member is installed on the connecting plate and slidably cooperates with the guide column. The linkage plate is connected to the front end of the guide column.

4. The auxiliary support device for the aging material receiving machine according to claim 3, characterized in that: The guide assemblies are provided with two and are arranged oppositely at two sides of the push-pull driving member, and the axial direction of the guide column is parallel to the driving direction of the push-pull driving member.

5. The auxiliary support device for the aging material receiving machine according to claim 3, characterized in that: The connecting plate is provided with a first mounting hole for mounting a push-pull driving member and a second mounting hole for mounting a sliding member, wherein the first mounting hole is located between the two second mounting holes.

6. The auxiliary support device for the aging material receiving machine according to claim 5, characterized in that: The sliding member includes a first sliding part and a second sliding part that are coaxially connected, the diameter of the first sliding part is greater than the diameter of the second sliding part, the second sliding part passes through the connecting plate, and the first sliding part is connected to the connecting plate.

7. The auxiliary support device for the aging material receiving machine according to claim 5, characterized in that: The connecting plate includes a first connecting portion and a second connecting portion which are perpendicular to each other, the lifting driving member is connected to the first connecting portion, and the push-pull driving member and the sliding member are connected to the second connecting portion.

8. The auxiliary support device for the aging material receiving machine according to claim 7, characterized in that: The linkage plate is parallel to the second connection portion of the connection plate.

9. The auxiliary support device for the aging material receiving machine according to claim 1, characterized in that: The lifting driving member is a lifting cylinder, and the push-pull driving member is a linear push-pull cylinder.

10. An aging material receiving machine, characterized in that: It comprises an auxiliary support device for an aging material receiving machine as described in any one of claims 1-9.

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