Pole base mechanism for vacuum evaporation

Abstract

The pole seat mechanism comprises an evaporation tank, a positive pole seat, a negative pole seat, an evaporation boat and a clamping assembly, the negative pole seat is installed in the evaporation tank, a pole seat hole is formed in one side of the evaporation tank, the positive pole seat penetrates through the pole seat hole, the two ends of the positive pole seat are located inside and outside the evaporation tank respectively, and the clamping assembly is installed on the evaporation boat. The positive electrode seat is movably arranged in the electrode seat hole through the clamping assembly, the positive electrode seat and the negative electrode seat are arranged at an interval, placing grooves are formed in the close ends of the positive electrode seat and the negative electrode seat, the two ends of the evaporation boat are placed in the two placing grooves, and the evaporation boat is clamped through the clamping assembly. According to the polar base mechanism for vacuum evaporation, the evaporation boat is clamped and fixed in a clamping mode, so that the evaporation boat is easy to disassemble and assemble, later maintenance and replacement of the evaporation boat are facilitated, and the limitation on the structure of the evaporation boat is small.

Description

Technical Field

[0001] The utility model relates to the technical field of conductive film production, in particular to a pole seat mechanism for vacuum evaporation. Background Art

[0002] Conductive film is a polymer material with metal coated on the surface. It is widely used in lithium-ion batteries, and is mainly used as a battery current collector in lithium-ion batteries. The most commonly used method for producing conductive films is vacuum evaporation process. Vacuum coating is to place the film material in a vacuum coating chamber and heat it through an evaporation source to evaporate it. The evaporated particles escape from the surface of the evaporation source and condense on the surface of the substrate to form a film. Vacuum coating is usually resistive heating. The evaporation boat is fixed between the positive and negative electrodes, and the material to be evaporated is placed in the evaporation boat. Current is passed through the electrodes, and the current flows through the evaporation boat. The evaporation boat heats up to evaporate the material to be evaporated.

[0003] However, the existing evaporation boat fixing mechanism usually uses screws to fix the evaporation boat between the positive and negative motors. This evaporation boat fixing method has the following defects:

[0004] 1) Inconvenient maintenance and replacement: The existing evaporation boat fixing mechanism usually uses screws to fix the evaporation boat between the positive and negative motors, which makes the evaporation boat difficult to disassemble and assemble. When the evaporation boat needs to be repaired or replaced, it takes a lot of time and manpower, increasing production costs.

[0005] 2) Production efficiency and quality are affected: Due to the existing evaporation boat fixing mechanism, the evaporation boat is not easy to disassemble and assemble, making it difficult to adjust and calibrate the evaporation boat during the production process. This may lead to reduced production efficiency and fluctuations in product quality.

[0006] 3) Structural limitations: The use of screw fixation may impose certain restrictions on the size and shape of the evaporation boat, making it difficult to use this fixation method for some specially designed evaporation boats, limiting its wide application. Utility Model Content

[0007] In order to overcome the problems in the prior art of the evaporation boat fixing mechanism that the evaporation boat is inconvenient to repair and replace, affects production efficiency and quality, and the evaporation boat structure is limited, the utility model provides a pole seat mechanism for vacuum evaporation.

[0008] The technical solution of the utility model is as follows:

[0009] A pole seat mechanism for vacuum evaporation comprises an evaporation tank, a positive pole seat, a negative pole seat, an evaporation boat and a clamping assembly, wherein the negative pole seat is installed in the evaporation tank, a pole seat hole is provided on one side of the evaporation tank, the positive pole seat passes through the pole seat hole and its two ends are respectively located inside and outside the evaporation tank, the positive pole seat is movably arranged in the pole seat hole through the clamping assembly, the positive pole seat and the negative pole seat are arranged at intervals, and a placement groove is provided at one end adjacent to the two pole seats, the two ends of the evaporation boat are placed in the two placement grooves, and the evaporation boat is clamped by the clamping assembly.

[0010] According to the above-mentioned scheme, the electrode seat mechanism for vacuum evaporation, the clamping assembly includes a clamping spring, a spring base and a first limiting ring, the spring base is installed on the outside of the evaporation tank, the spring base has an installation cavity, the positive electrode seat passes through the installation cavity, the first limiting ring is installed at the front end of the installation cavity, the end of the positive electrode seat located outside the evaporation tank is provided with a second limiting ring, the spring is arranged in the spring base and is located between the first limiting ring and the second limiting ring.

[0011] Furthermore, the spring base is installed on the outer side of the evaporation tank by bolts.

[0012] Furthermore, the clamping assembly includes a clamping spring, a spring base and a first limiting ring, the spring base is installed on the outside of the evaporation tank, the spring base has an installation cavity, the positive electrode seat passes through the installation cavity, the first limiting ring is installed at the front end of the installation cavity, and the second limiting ring is provided at one end of the positive electrode seat located outside the evaporation tank, the clamping spring is provided in the spring base and between the first limiting ring and the second limiting ring, and the two ends of the clamping spring are respectively abutted against the first limiting ring and the second limiting ring.

[0013] Furthermore, a pole seat insulating sleeve is provided between the evaporation tank and the positive pole seat.

[0014] Furthermore, the pole seat insulating baffle includes a second insulating sleeve and a second insulating baffle connected to one end of the second insulating sleeve close to the second limiting ring, the second insulating sleeve is located between the positive pole seat and the evaporation tank, and the second insulating baffle is located between the second limiting ring and the evaporation tank.

[0015] According to the above-mentioned pole seat mechanism for vacuum evaporation, one end of the positive pole seat located inside the evaporation tank is sleeved with a pole seat insulating sleeve, and one end of the pole seat insulating sleeve is arranged between the evaporation tank and the positive pole seat.

[0016] Furthermore, the pole seat insulating sleeve is a mica insulating sleeve.

[0017] According to the electrode seat mechanism for vacuum evaporation of the above scheme, both the positive electrode seat and the negative electrode seat are provided with a plurality of cooling water channels.

[0018] According to the pole seat mechanism for vacuum evaporation of the above scheme, graphite paper is arranged between the evaporation boat and the two placement grooves.

[0019] Compared with the prior art, the beneficial effects of the utility model are:

[0020] The pole seat mechanism for vacuum evaporation provided by the utility model can drive the positive pole seat to be pressed toward the negative pole seat by arranging a clamping assembly, so that the evaporation boat is clamped between the positive pole seat and the negative pole seat. Since the evaporation boat is clamped and fixed by clamping, the evaporation boat is easy to disassemble and assemble, and the maintenance and replacement of the evaporation boat in the later stage are convenient, which can effectively improve the production efficiency and product quality, and has little restriction on the structure of the evaporation boat. The clamping assembly can not only realize automatic clamping of the evaporation boat by arranging a clamping spring, a spring base and a first limit ring, but also has a simple and compact structure and high stability. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0022] Figure 1 It is a schematic diagram of the structure of the utility model;

[0023] Figure 2 It is a cross-sectional view of the utility model;

[0024] Figure 3 It is an exploded view of the utility model.

[0025] In the figure,

[0026] 1. Evaporation tank; 11. Pole seat hole; 2. Positive pole seat; 21. Placement groove; 22. Second limiting ring; 23. Cooling water channel; 3. Negative pole seat; 4. Evaporation boat; 5. Clamping assembly; 51. Clamping spring; 52. Spring base; 521. Installation cavity; 53. First limiting ring; 54. Spring insulating sleeve; 541. First insulating sleeve body; 542. First insulating baffle; 6. Pole seat insulating sleeve; 61. Second insulating sleeve body; 62. Second insulating baffle; 7. Pole seat insulating sleeve; 8. Bolt. DETAILED DESCRIPTION

[0027] In order to make the technical problems, technical solutions and beneficial effects to be solved by the utility model more clearly understood, the utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be noted that similar numbers and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings. At the same time, it is stated that the embodiments described below are only used to explain the utility model and are not used to limit the utility model.

[0028] It should be noted that the terms "install", "set", "connect", "fix" and the like should be understood in a broad sense, for example, they can be fixedly connected, detachably connected, or integrated; they can be mechanically connected or electrically connected; they can be directly connected, or indirectly connected through an intermediate medium, or they can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. The indication of orientation or position relationship is based on the orientation or position relationship shown in the drawings, or the orientation or position relationship in which the application product is usually placed when in use, or the orientation or position relationship commonly understood by those skilled in the art, or the orientation or position relationship in which the application product is usually placed when in use. It is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application. The terms "first" and "second" are only used for the purpose of convenience of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features. The meaning of "several" is one or more, unless otherwise clearly and specifically defined.

[0029] See also Figures 1 to 3 The present embodiment provides a pole seat mechanism for vacuum evaporation, including an evaporation tank 1, a positive pole seat 2, a negative pole seat 3, an evaporation boat 4 and a clamping assembly 5. The negative pole seat 3 is installed in the evaporation tank 1. A pole seat hole 11 is provided on one side of the evaporation tank 1. The positive pole seat 2 passes through the pole seat hole 11 and its two ends are respectively located inside and outside the evaporation tank 1. The positive pole seat 2 is movably arranged in the pole seat hole 11 through the clamping assembly 5. The positive pole seat 2 and the negative pole seat 3 are arranged at intervals, and a placement groove 21 is provided at one end close to the positive pole seat 2 and the negative pole seat 3. The two ends of the evaporation boat 4 are placed in the two placement grooves 21, and the evaporation boat 4 is clamped by the clamping assembly 5. The utility model can drive the positive pole seat 2 to press against the negative pole seat 3 by providing the clamping assembly 5, so that the evaporation boat 4 is clamped between the positive pole seat 2 and the negative pole seat 3. Since the evaporation boat 4 is clamped and fixed by clamping, the evaporation boat 4 is easy to disassemble and assemble, and is convenient for the later maintenance and replacement of the evaporation boat 4, which can effectively improve the production efficiency and product quality, and has little restriction on the structure of the evaporation boat 4.

[0030] See also Figure 2 , Figure 3In one embodiment, the clamping assembly 5 includes a clamping spring 51, a spring base 52 and a first limiting ring 53. The spring base 52 is installed on the outer side of the evaporation tank 1 by bolts 8. The spring base 52 has an installation cavity 521. The positive electrode seat 2 passes through the installation cavity 521. The first limiting ring 53 is installed at the front end of the installation cavity 521. The positive electrode seat 2 is located at the end outside the evaporation tank 1 and is provided with a second limiting ring 22. The clamping spring 51 is arranged in the spring base 52 and is located between the first limiting ring 53 and the second limiting ring 22. The two ends of the clamping spring 51 are respectively abutted against the first limiting ring 53 and the second limiting ring 22. Under the elastic force of the clamping spring 51, the second limiting ring 22 drives the positive electrode seat 2 to press against the negative electrode seat 3, so that the evaporation boat 4 is clamped between the two evaporation tanks 1 of the positive electrode seat 2 and the negative electrode seat 3. When the evaporation boat 4 needs to be disassembled, it is only necessary to pull the positive electrode seat 2 outwards to make the positive electrode seat 2 away from the negative electrode seat 3, and the evaporation boat 4 on the two evaporation tanks 1 can be easily taken out. At the same time, the clamping assembly 5 also includes a spring insulating sleeve 54, which is slidably sleeved on the end of the positive electrode seat 2 located outside the evaporation tank 1, and the spring insulating sleeve 54 includes a first insulating sleeve 541 and a first insulating baffle 542 connected to the end of the first insulating sleeve 541 close to the evaporation tank 1, the first insulating sleeve 541 is located between the positive electrode seat 2 and the first limiting ring 53, and the first insulating baffle 542 is located between the first limiting ring 53 and the clamping spring 51. The spring insulating sleeve 54 can not only separate the positive electrode seat 2 from the first limiting ring 53, but also separate the first limiting ring 53 from the clamping spring 51 to prevent the positive electrode seat 2 from being electrically conductive with the first limiting ring 53. The clamping assembly 5 set up as above can not only realize automatic clamping of the evaporation boat 4, but also has a simple and compact structure and high stability.

[0031] In one embodiment, a pole seat insulating baffle 6 is provided between the evaporation tank 1 and the positive pole seat 2, and the pole seat insulating baffle 6 includes a second insulating sleeve 61 and a second insulating baffle 62 connected to one end of the second insulating sleeve 61 close to the second limiting ring 22, the second insulating sleeve 61 is located between the positive pole seat 2 and the evaporation tank 1, and the second insulating baffle 62 is located between the second limiting ring 22 and the evaporation tank 1. The pole seat insulating baffle 6 provided above can not only prevent the positive pole seat 2 from being electrically conductive with the evaporation tank 1 through the second limiting ring 22, but also seal the gap between the pole seat hole 11 and the positive pole seat 2, thereby reducing the probability of aluminum slag being deposited in the gap.

[0032] See also Figures 1 to 3In one embodiment, one end of the positive electrode seat 2 located inside the evaporation tank 1 is provided with a pole seat insulating sleeve 7, and one end of the pole seat insulating sleeve 7 is arranged between the evaporation tank 1 and the positive electrode seat 2. The pole seat insulating sleeve 7 can well separate the evaporation tank 1 and the positive electrode seat 2, prevent the positive electrode seat 2 and the evaporation tank 1 from being electrically conductive, reduce the phenomenon of holes in the film, and can also seal the gap between the pole seat hole 11 and the positive electrode seat 2, thereby reducing the probability of aluminum slag being deposited in the gap. Preferably, the pole seat insulating sleeve 7 is a mica insulating sleeve, which has the advantages of high insulation, high temperature resistance, good stability, etc. It is not easy to decompose or deform at high temperature, so it is suitable for use in a high temperature environment such as the evaporation tank 1.

[0033] See also Figure 2 , Figure 3 In one embodiment, the positive electrode seat 2 and the negative electrode seat 3 are provided with a plurality of cooling water channels 23, and the cooling water channels 23 are used to cool the positive electrode seat 2 and the negative electrode seat 3 to avoid serious heating of the positive electrode seat 2 and the negative electrode seat 3 during the evaporation coating process, which can effectively improve the service life of the positive electrode seat 2 and the negative electrode seat 3.

[0034] In one embodiment, graphite paper may be disposed between the evaporation boat 4 and the two placement slots 21 . The graphite paper may enhance the electrical conductivity between the positive electrode seat 2 , the evaporation boat 4 and the negative electrode seat 3 , thereby accelerating the evaporation efficiency.

[0035] It should be understood that those skilled in the art can make improvements or changes based on the above description, and all these improvements and changes should fall within the scope of protection of the claims attached to the utility model.

[0036] The above is an exemplary description of the utility model patent in conjunction with the accompanying drawings. It is obvious that the implementation of the utility model patent is not limited to the above-mentioned method. As long as various improvements are made by adopting the method concept and technical solution of the utility model patent, or the concept and technical solution of the utility model patent are directly applied to other occasions without improvement, they are all within the protection scope of the utility model.

Claims

1. A pole seat mechanism for vacuum evaporation, characterized in that: It includes an evaporation tank, a positive electrode seat, a negative electrode seat, an evaporation boat and a clamping assembly, the negative electrode seat is installed in the evaporation tank, a pole seat hole is arranged on one side of the evaporation tank, the positive electrode seat passes through the pole seat hole and its two ends are respectively located inside and outside the evaporation tank, the positive electrode seat is movably arranged in the pole seat hole through the clamping assembly, the positive electrode seat and the negative electrode seat are arranged at intervals, and a placement groove is arranged at one end close to the two, the two ends of the evaporation boat are placed in the two placement grooves, and the evaporation boat is clamped by the clamping assembly.

2. The pole seat mechanism for vacuum evaporation according to claim 1, characterized in that: The clamping assembly includes a clamping spring, a spring base and a first limiting ring, the spring base is installed on the outside of the evaporation tank, the spring base has an installation cavity, the positive electrode seat passes through the installation cavity, the first limiting ring is installed at the front end of the installation cavity, and the second limiting ring is provided at one end of the positive electrode seat located outside the evaporation tank. The clamping spring is arranged in the spring base and between the first limiting ring and the second limiting ring, and the two ends of the clamping spring are respectively abutted against the first limiting ring and the second limiting ring.

3. The pole seat mechanism for vacuum evaporation according to claim 2, characterized in that: The spring base is installed on the outer side of the evaporation tank by bolts.

4. The pole seat mechanism for vacuum evaporation according to claim 2, characterized in that: The clamping assembly also includes a spring insulating sleeve, which is slidably mounted on one end of the positive electrode seat located outside the evaporation tank. The spring insulating sleeve includes a first insulating sleeve body and a first insulating baffle connected to one end of the first insulating sleeve body close to the evaporation tank. The first insulating sleeve body is located between the positive electrode seat and the first limiting ring, and the first insulating baffle is located between the first limiting ring and the clamping spring.

5. The pole seat mechanism for vacuum evaporation according to claim 2, characterized in that: A pole seat insulating sleeve is arranged between the evaporation tank and the positive pole seat.

6. The pole seat mechanism for vacuum evaporation according to claim 5, characterized in that: The pole seat insulating baffle includes a second insulating sleeve and a second insulating baffle connected to one end of the second insulating sleeve close to the second limiting ring, the second insulating sleeve is located between the positive pole seat and the evaporation tank, and the second insulating baffle is located between the second limiting ring and the evaporation tank.

7. The pole seat mechanism for vacuum evaporation according to claim 1, characterized in that: One end of the positive electrode seat located inside the evaporation tank is sleeved with a pole seat insulating sleeve, and one end of the pole seat insulating sleeve is arranged between the evaporation tank and the positive electrode seat.

8. The pole seat mechanism for vacuum evaporation according to claim 7, characterized in that: The pole seat insulating sleeve is a mica insulating sleeve.

9. The pole seat mechanism for vacuum evaporation according to any one of claims 1 to 8, characterized in that: The positive electrode seat and the negative electrode seat are both provided with a plurality of cooling water channels.

10. The pole seat mechanism for vacuum evaporation according to any one of claims 1 to 8, characterized in that: Graphite paper is arranged between the evaporation boat and the two placement grooves.

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