Micropump

Abstract

The micropump comprises a pump body, an actuator, a first base plate, a second base plate, a first sealing gasket and a second sealing gasket, the first sealing gasket is used for achieving sealing between an inlet and a liquid inlet flow channel, the second sealing gasket is used for achieving sealing between an outlet and a liquid outlet flow channel, and the first sealing gasket and the second sealing gasket are independent sealing pieces; the sealing gasket has no fixed connection relation with a sealed structure, only the first sealing gasket and the second sealing gasket deform when thermal expansion and cold contraction occur due to the influence of the environment temperature, the connection relation between the first sealing gasket and the sealed structure and the connection relation between the second sealing gasket and the sealed structure are not affected, and the sealing reliability is improved; the first sealing gasket and the second sealing gasket can generate compression deformation during compression sealing, when the environment temperature is reduced, the shrinkage amount of the first sealing gasket and the second sealing gasket is reduced, when the environment temperature is increased, the first sealing gasket and the second sealing gasket expand, the sealing gasket can be more tightly attached to a sealed structure, and the sealing effect is better.

Description

Technical Field

[0001] The present application relates to the technical field of medical devices, and in particular to a micro pump. Background Art

[0002] A micropump is a device that achieves liquid transfer through the contraction or expansion of a pump body, comprising a pump body and a substrate. The pump body has an outlet and an inlet, and the substrate has an inlet channel for communicating with the inlet and an outlet channel for communicating with the outlet. The outlet of the inlet channel is connected to the inlet connector, and the outlet of the outlet channel is connected to the outlet connector.

[0003] In the prior art, the inlet of the pump body is connected to the liquid inlet channel by glue sealing, and the outlet of the pump body is connected to the liquid outlet channel by glue sealing.

[0004] Since the glue will expand and contract with changes in external temperature, the bonding surfaces (including the bonding surfaces between the glue and the outlet, the bonding surfaces between the glue and the liquid inlet channel, the bonding surfaces between the glue and the inlet, and the bonding surfaces between the glue and the liquid outlet channel) of the glue and the sealed structure (the sealed structure is the inlet and the liquid inlet channel, and the outlet and the liquid outlet channel) will separate, resulting in seal failure and leakage.

[0005] Therefore, how to improve the reliability of the sealing between the inlet and the liquid inlet joint of the pump body, and the outlet and the liquid outlet joint of the pump body, has become a technical problem that needs to be solved urgently by those skilled in the art. Utility Model Content

[0006] The present application proposes a micro pump to improve the reliability of sealing between the inlet and liquid inlet joint of a pump body, and between the outlet and liquid outlet joint of the pump body.

[0007] In order to achieve the above-mentioned object, the present application provides a micro pump, comprising a pump body, an actuator, a first substrate and a second substrate.

[0008] The pump body has an inlet and an outlet, and the pump body is connected to the actuator;

[0009] A liquid inlet channel is provided in the first substrate, a first end of the liquid inlet channel is connected to the inlet, and a liquid inlet joint is provided at the other end of the liquid inlet channel;

[0010] A first sealing gasket having a first through hole corresponding to the position of the inlet and communicating with the inlet, wherein the first sealing gasket is pressed against the pump body through the first substrate to achieve sealing between the inlet and the liquid inlet channel;

[0011] A liquid outlet channel is provided on the second substrate, one end of the liquid outlet channel is connected to the outlet, and a liquid outlet joint is provided at the other end of the liquid outlet channel;

[0012] The second sealing gasket has a second through hole corresponding to the position of the outlet and communicating with the outlet. The second sealing gasket is pressed against the pump body through the second substrate to achieve sealing between the outlet and the liquid outlet channel.

[0013] Preferably, in the above micro pump, the tail end of the actuator is firmly connected to the second substrate via an annular connector.

[0014] The tail end of the actuator and the second substrate are located in the annular connector, and an opening is provided at the position where the annular connector cooperates with the second substrate so that the outer circumference of the annular connector can be adjusted to adjust the locking force applied by the annular connector on the actuator and the second substrate.

[0015] Preferably, in the above-mentioned micro pump, the annular connecting member is provided with fixing holes on both sides of the opening, and the annular connecting member is connected to the second substrate via fixing members matched with the fixing holes; and / or,

[0016] A limiting groove is arranged on one side of the second base plate connected to the annular connecting member, and the annular connecting member has a limiting boss matched with the limiting groove, and the opening and the fixing hole are arranged on the limiting boss.

[0017] Preferably, in the above-mentioned micro pump, a first mounting groove is formed on the first substrate for mounting the pump body, and the first sealing gasket is arranged between the pump body and the bottom of the first mounting groove.

[0018] Preferably, in the above micro pump, a second mounting groove is formed on the second substrate, the pump body is embedded on the second substrate through the second mounting groove, and the second sealing gasket is arranged between the pump body and the bottom of the second mounting groove.

[0019] Preferably, the micro pump further comprises a pressure sensor for detecting the fluid pressure in the liquid inlet channel.

[0020] A pressure measuring channel connected to the liquid outlet channel is provided on the second substrate, and the pressure sensor is connected to the pressure measuring channel.

[0021] Preferably, in the above-mentioned micro pump, a third mounting groove connected to the pressure measuring channel is provided on the second substrate for mounting the pressure sensor, a third sealing gasket is provided between the pressure sensor and the bottom of the third mounting groove, and the third sealing gasket is used to seal the pressure sensor and the pressure measuring channel.

[0022] The pressure sensor is pressed into the third mounting groove via a pressure sensor circuit board, and the pressure sensor circuit board is connected to the second substrate.

[0023] Preferably, in the above-mentioned micro pump, the first sealing gasket is adapted in shape to a side of the pump body where the inlet is opened; and / or,

[0024] The second sealing gasket is adapted in shape to a side of the pump body where the outlet is opened.

[0025] Preferably, in the above-mentioned micro pump, a guide convex ring is provided on one side of the second substrate that cooperates with the pump body.

[0026] The first substrate is provided with a guide groove matched with the guide convex ring, and the first substrate and the second substrate are plug-connected through the guide convex ring and the guide groove.

[0027] Preferably, in the above-mentioned micro pump, the liquid inlet connector and the liquid outlet connector are both needle-type metal tubes.

[0028] The micro pump provided by the embodiment of the present application includes a pump body, an actuator, a first substrate and a second substrate, and also includes a first sealing pad and a second sealing pad. The first sealing pad is pressed on the pump body through the first substrate to achieve the sealing of the inlet and the liquid inlet flow channel, and the second sealing pad is pressed on the pump body through the second substrate to achieve the sealing of the outlet and the liquid outlet flow channel. The micro pump disclosed in the present application realizes the compression and sealing of the inlet and the liquid inlet flow channel of the pump body through the first sealing pad, and realizes the compression and sealing of the outlet and the liquid outlet flow channel of the pump body through the second sealing pad. The first sealing pad and the second sealing pad are independent seals, and there is no fixed connection relationship between the sealed structure. When thermal expansion and contraction occur under the influence of ambient temperature, only the first sealing pad and the second sealing pad themselves are deformed, which does not affect the connection relationship between the first sealing pad and the second sealing pad and the sealed structure, thereby improving the reliability of the seal; the first sealing pad and the second sealing pad will be compressed and deformed when compressed and sealed, and when the ambient temperature decreases, the shrinkage of the first sealing pad and the second sealing pad decreases. When the ambient temperature increases, the first sealing pad and the second sealing pad expand, and will be more closely attached to the sealed structure, and the sealing effect is better. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings required for use in the embodiments or the prior art descriptions are briefly introduced below. Obviously, the drawings described below are only some examples or embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without creative work, and the present application can also be applied to other similar scenarios based on the provided drawings. Unless it is obvious from the language environment or otherwise explained, the same reference numerals in the figures represent the same structure or operation.

[0030] Figure 1 It is a schematic diagram of the structure of the micro pump of the present application;

[0031] Figure 2 It is a schematic diagram of the structure of the micro pump of the present application;

[0032] Figure 3 It is a schematic diagram of the structure of the micro pump of the present application;

[0033] Figure 4 yes Figure 1 Section view along AA;

[0034] Figure 5 yes Figure 1 Sectional view along BB;

[0035] Figure 6 is a partial enlarged view of the liquid path of the micropump of the present application;

[0036] Figure 7 It is a schematic structural diagram of the cooperation between the annular connecting member and the fixing member of the micro pump of the present application.

[0037] The accompanying drawings are as follows:

[0038] 1- pump body; 2- actuator; 3- first substrate; 4- second substrate; 5- liquid inlet channel; 6- first sealing gasket; 7- liquid outlet channel; 8- second sealing gasket; 9- liquid inlet connector; 10- liquid outlet connector; 11- annular connector; 12- fixing member; 13- pressure sensor; 14- pressure measuring channel; 15- pressure sensor circuit board. DETAILED DESCRIPTION

[0039] The present application will be further described in detail below in conjunction with the accompanying drawings and embodiments. It will be understood that the specific embodiments described herein are only used to explain the related application, rather than to limit the application. The described embodiments are only a part of the embodiments of the present application, rather than all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without making creative work are within the scope of protection of the present application.

[0040] It should be noted that, for ease of description, only the parts related to the relevant applications are shown in the accompanying drawings. In the absence of conflict, the embodiments in this application and the features in the embodiments can be arbitrarily combined with each other, as long as the combined technical features are not contradictory. All feasible feature combinations are technical contents clearly recorded in this article. Any of the multiple sub-features contained in the same sentence can be applied independently, and does not have to be applied together with other sub-features.

[0041] As shown in this application and claims, unless the context clearly indicates an exception, the words "a", "an", "a kind" and / or "the" do not refer to the singular, but also include the plural. Generally speaking, the terms "include" and "comprise" only indicate the inclusion of clearly identified steps and elements, and these steps and elements do not constitute an exclusive list. The method or device may also include other steps or elements. The elements defined by the sentence "includes a..." do not exclude the existence of other identical elements in the process, method, commodity or device that includes the elements.

[0042] In the description of the embodiments of the present application, unless otherwise specified, " / " means or, for example, A / B can mean A or B; "and / or" in this article is only a description of the association relationship of associated objects, indicating that there can be three relationships, for example, A and / or B can mean: A exists alone, A and B exist at the same time, and B exists alone. In addition, in the description of the embodiments of the present application, "multiple" means two or more than two.

[0043] See also Figure 1-Figure 7 .

[0044] Some embodiments of the present application disclose a micro pump, including a pump body 1 , an actuator 2 , a first substrate 3 and a second substrate 4 .

[0045] The pump body 1 has an inlet and an outlet;

[0046] The actuator 2 is connected to the pump body 1 and is used to drive the pump body 1 to contract or expand;

[0047] A liquid inlet channel 5 is provided in the first substrate 3, one end of the liquid inlet channel 5 is connected to the inlet, and the other end of the liquid inlet channel 5 is connected to the liquid inlet connector 9;

[0048] A liquid outlet channel 7 is provided in the second substrate 4 , one end of the liquid outlet channel 7 is connected to the outlet, and the other end of the liquid outlet channel 7 is connected to the liquid outlet connector 10 .

[0049] The micropump disclosed in this scheme also includes a first sealing gasket 6 and a second sealing gasket 8. The first sealing gasket 6 is pressed onto the pump body 1 through the first substrate 3 to achieve sealing between the inlet and the liquid inlet channel 5. The second sealing gasket 8 is pressed onto the pump body 1 through the second substrate 4 to achieve sealing between the outlet and the liquid outlet channel 7.

[0050] The micro pump disclosed in the present application realizes the compression sealing between the inlet of the pump body 1 and the liquid inlet channel 5 through the first sealing gasket 6, and realizes the compression sealing between the outlet of the pump body 1 and the liquid outlet channel 7 through the second sealing gasket 8. Compared with the method of realizing the sealing of the inlet and outlet and the liquid path through glue in the prior art, the first sealing gasket 6 and the second sealing gasket 8 are independent sealing parts, and there is no fixed connection relationship between them and the sealed structure. When thermal expansion and contraction occur under the influence of ambient temperature, only the first sealing gasket 6 and the second sealing gasket 8 themselves are deformed. Therefore, there is no problem of affecting the fixed connection relationship between the first sealing gasket 6 and the second sealing gasket 8 and the sealed structure, thereby improving the reliability of the seal.

[0051] Furthermore, the first sealing gasket 6 and the second sealing gasket 8 will be compressed and deformed when they are pressed to seal, so that when the ambient temperature of the first sealing gasket 6 and the second sealing gasket 8 decreases, the shrinkage of the first sealing gasket 6 and the second sealing gasket 8 will also decrease to ensure the sealing of the inlet and the liquid inlet channel 5, and the outlet and the liquid outlet channel 7. When the ambient temperature of the first sealing gasket 6 and the second sealing gasket 8 increases, the first sealing gasket 6 and the second sealing gasket 8 will expand, and the first sealing gasket 6 and the second sealing gasket 8 will be more closely attached to the sealed structure, thereby achieving a better sealing effect.

[0052] Since the apertures of the inlet and outlet of the pump body 1 of the micropump are less than 0.5 mm, and the area around the inlet and outlet holes for applying glue is also very small, it is very difficult to seal with glue. The present application achieves sealing of the inlet and outlet respectively through a first sealing gasket 6 and a second sealing gasket 8 that are arranged in a large area, which not only ensures the sealing effect but also reduces the sealing difficulty.

[0053] The first sealing gasket 6 and the second sealing gasket 8 are flexible gaskets or flexible sealing rings. The first sealing gasket 6 is provided with a first through hole corresponding to and connected with the inlet position, and the second sealing gasket 8 is provided with a second through hole corresponding to and connected with the outlet position, so as to ensure sealing without affecting the circulation of liquid.

[0054] In addition, compared with the form of sealing with glue, the first sealing gasket 6 and the second sealing gasket 8 age slowly. Accordingly, the first sealing gasket 6 and the second sealing gasket 8 have a long service life and can reduce the maintenance times of the micro pump to a certain extent.

[0055] In this solution, the first sealing gasket 6 is located between the first substrate 3 and the pump body 1, and the first substrate 3 is located between the pump body 1 and the actuator 2. Figure 1As shown, the distance between the connection position of the actuator 2 and the pump body 1 and the connection position of the liquid inlet channel 5 and the outlet of the pump body 1 is relatively small. In order to reduce the size restriction of the first sealing gasket 6 and ensure the sealing reliability of the first sealing gasket 6, the first sealing gasket 6 in this solution can cover the plane where the pump body 1 is located, or the first sealing gasket 6 can cover the outlet of the pump body 1 and the connection position between the actuator 2 and the pump body 1. It should be noted here that the first sealing gasket 6 needs to be provided with a third through hole for connecting the actuator 2 and the pump body 1.

[0056] There are many actuation modes for the pump body 1 , such as piezoelectric, electrostatic, electromagnetic and thermal drive, etc., to achieve volume changes of the pump body 1 .

[0057] This solution is described by taking the actuator 2 as a piezoelectric ceramic as an example.

[0058] like Figure 4 As shown, the piezoelectric ceramic, the first substrate 3 , the pump body 1 and the second substrate 4 are stacked in sequence, and the piezoelectric ceramic is connected to the pump body 1 through the first substrate 3 .

[0059] The first substrate 3 is connected to the second substrate 4 by chemical bonding or physical fastening. The second substrate 4 has a mounting groove for mounting the first substrate 3. The side of the second substrate 4 opposite to the mounting groove is connected to the actuator 2. Figure 3 In the illustrated embodiment, the second substrate 4 has a protrusion for supporting the actuator 2 , and the actuator 2 and the protrusion are located in the annular connecting member 11 .

[0060] like Figure 1-Figure 3 and Figure 7 As shown, it is an embodiment in which the tail end of the piezoelectric ceramic is connected to the second substrate 4 through an annular connector 11. The annular connector 11 is sleeved on the piezoelectric ceramic and the second substrate 4 (or the tail end of the piezoelectric ceramic and the second substrate 4 are located in the annular connector 11). An opening is provided at the position where the annular connector 11 cooperates with the second substrate 4. The size of the outer circumference of the annular connector 11 is adjusted through the opening so that the force of the annular connector 11 acting on the piezoelectric ceramic and the second substrate 4 can be adjusted; the annular connector 11 is provided with fixing holes on both sides of the opening, and the annular connector 11 is fastened to the second substrate 4 through fixing members 12 that cooperate with the fixing holes.

[0061] The piezoelectric ceramic of the present application is connected to the second substrate 4 through an annular connector 11, replacing the conventional piezoelectric ceramic and the second substrate 4 being connected by adhesive, that is, a mechanical method is used instead of an adhesive connection. The piezoelectric ceramic is fixed to the second substrate 4 through a fastener and the annular connector 11. The annular connector 11 provides a clamping force to the piezoelectric ceramic, effectively preventing the tail of the piezoelectric ceramic from tilting. When the piezoelectric ceramic is driven by voltage to do work and a force of less than 50N is applied, the tail of the piezoelectric ceramic remains stable, effectively reducing the energy loss in the transmission process caused by fixing the tail end of the piezoelectric ceramic with glue, and the conduction efficiency is increased from the original 40% to more than 63%, thereby improving the transmission efficiency and at the same time improving the stability and reliability of the connection between the piezoelectric ceramic and the second substrate 4.

[0062] The annular connector 11 is made of elastic material. After the annular connector 11 is opened through the opening, the annular connector 11 can retract under the action of its own restoring force, so that the opening returns to its initial size. The shape of the annular connector 11 is adapted to the overall shape of the piezoelectric ceramic and the second substrate 4. Preferably, the circumferential size of the annular connector 11 is smaller than the circumferential size of the entirety of the piezoelectric ceramic and the second substrate 4, so that after the annular connector 11 is sleeved on the entirety of the piezoelectric ceramic and the second substrate 4, the annular connector 11 can apply a circumferential locking force to the piezoelectric ceramic and the second substrate 4 under the action of its own restoring force.

[0063] During installation, the annular connector 11 is first sleeved on the piezoelectric ceramic and the second substrate 4. The annular connector 11 can achieve preliminary connection with the piezoelectric ceramic and the second substrate 4 under the action of the self-restoring force, and then the fasteners fix the annular connector 11 on the second substrate 4 through the fixing holes.

[0064] The fixing holes of the annular connector 11 on both sides of the opening are semicircular holes. The two semicircular holes on both sides of the opening form a circular hole through which the fastener is connected to the second substrate 4 . The fastener presses the annular connector 11 onto the second substrate 4 .

[0065] The fixing holes on both sides of the opening of the annular connector 11 are circular holes, and the fixing holes on both sides of the opening are not connected to each other. The user can select appropriate fixing holes to fix the annular connector 11 according to needs.

[0066] The annular connector 11 is fixedly connected to the second substrate 4 through the fixing member 12, which improves the stability of the annular connector 11 fixing the piezoelectric ceramic. The fastener is preferably a screw. The advantage of using a screw is that the screw can be screwed into the second substrate 4 without the need to pre-open a hole in the second substrate 4, so when the annular connector 11 is connected to the second substrate 4, there is no need to align the holes.

[0067] It should be noted here that the tail of the piezoelectric ceramic is the position where the piezoelectric ceramic is not connected to the pump body 1. The tail of the piezoelectric ceramic can be installed with a transfer circuit board, and the bottom of the transfer circuit board has metal electrode contacts as the external circuit interface of the micro pump.

[0068] like Figure 4 As shown, a limiting groove is provided on one side of the second substrate 4 connected to the annular connector 11, and a limiting boss that matches the limiting groove is provided on the annular connector 11. When the annular connector 11 is connected to the actuator 2 and the second substrate 4 as a whole, the annular connector 11 is inserted from the end of the second substrate 4 and the limiting boss faces the limiting groove.

[0069] The limiting groove has a limiting effect on the limiting boss and can also indicate the assembly direction of the annular connector 11. After assembly, the limiting boss is located in the limiting groove, and the groove wall of the limiting groove applies a thrust to the limiting bosses located on both sides of the opening, so that the limiting bosses move toward the direction of the opening, which plays a role in tightening the annular connector 11 and reducing the difficulty of connecting the annular connector 11 with the second substrate 4.

[0070] The limiting bosses may be formed by bending on both sides of the opening position of the annular connector 11 , or may be boss-type structures separately provided on both sides of the opening position of the annular connector 11 .

[0071] The first substrate 3 is located on the side of the pump body 1 where the inlet is arranged, and the second substrate 4 is located on the side of the pump body 1 where the outlet is arranged. Figure 4 As shown, the inlet and outlet of the pump body 1 are respectively arranged on both sides of the pump body 1 , and correspondingly, the first substrate 3 and the second substrate 4 are also respectively located on both sides of the pump body 1 , and the pump body 1 is located between the first substrate 3 and the second substrate 4 .

[0072] In order to improve the stability of the installation of the pump body 1 on the first substrate 3, the present application provides a first installation groove on the first substrate 3, the first installation groove is adapted to the shape of the pump body 1, the pump body 1 is embedded in the first installation groove, and the first installation groove limits the pump body 1 to ensure the connection and sealing between the pump body 1 and the liquid inlet channel.

[0073] The first sealing gasket 6 is located at the bottom of the first mounting groove, and between the pump body 1 and the bottom of the first mounting groove. Preferably, the shape of the first sealing gasket 6 matches the shape of the first mounting groove.

[0074] In order to further improve the stability of the installation of the pump body 1 on the second substrate 4, the present application provides a second mounting groove on the second substrate 4, and the second mounting groove is adapted to the shape of the pump body 1. The pump body 1 is embedded in the second substrate 4 through the second mounting groove. The second mounting groove limits the pump body 1 to ensure the connection and sealing between the pump body 1 and the liquid outlet channel.

[0075] The second sealing gasket 8 is located at the bottom of the second mounting groove, and between the pump body 1 and the bottom of the second mounting groove.

[0076] The micro pump disclosed in this solution may have only the first mounting groove on the first substrate 3 , or only the second mounting groove on the second substrate 4 . Preferably, the first mounting groove is provided on the first substrate 3 , and the second mounting groove is provided on the second substrate 4 .

[0077] In the embodiment where only the first mounting groove is formed on the first base plate 3 , the depth of the first mounting groove does not exceed the thickness of the pump body 1 along the groove bottom perpendicular to the first mounting groove.

[0078] In the embodiment where a first mounting groove is formed on the first substrate 3 and a second mounting groove is formed on the second substrate 4, the depth of the first mounting groove is greater than the depth of the second mounting groove, and both are less than the thickness of the bottom of the pump body 1 perpendicular to the first mounting groove.

[0079] The micro pump disclosed in the present application further includes a pressure sensor 13 , which is used to detect the fluid pressure in the liquid flow channel 7 .

[0080] like Figure 1 As shown, the pressure sensor 13 is mounted on the second substrate 4 , and a pressure measuring channel 14 communicating with the liquid outlet channel 7 is provided on the second substrate 4 , and the pressure measuring channel 14 is communicated with the pressure sensor 13 .

[0081] The liquid outlet channel 7 includes a first channel, a second channel and a third channel. The first end of the first channel is connected to the liquid outlet connector 10, the second end of the first channel is connected to the first end of the second channel, the second end of the second channel is connected to the first end of the third channel, and the second end of the third channel is connected to the outlet of the pump body 1. Figure 3 and Figure 4 As shown, the first flow channel and the third flow channel are respectively located at two ends of the second flow channel, and the first flow channel, the second flow channel and the third flow channel are perpendicular to each other, and the first flow channel and the second flow channel are opened along the plane where the second substrate 4 is located.

[0082] The pressure measuring channel 14 is connected to the second channel and is parallel to the first channel. The pressure measuring channel 14 is close to a side where the second channel is connected to the third channel.

[0083] The first flow channel and the pressure measuring flow channel 14 have the same cross-sectional area and the same height, the second flow channel and the third flow channel have the same cross-sectional area, and the cross-sectional area of ​​the second flow channel and the third flow channel is larger than the cross-sectional area of ​​the first flow channel.

[0084] The liquid inlet channel 5 includes a fourth channel connected to the inlet of the pump body 1 and a fifth channel for introducing liquid. The fifth channel is opened along the plane where the first substrate 3 is located, and the fifth channel is parallel to the first channel.

[0085] The inlet of the fifth flow channel and the outlet of the first flow channel are respectively located on both sides of the length direction of the first substrate 3 or the second substrate 4 , and the outlet of the pressure measuring channel 14 and the outlet of the first flow channel are located on the same side of the second substrate 4 .

[0086] A third mounting groove is formed on the second substrate 4 . The third mounting groove is communicated with the pressure measuring channel 14 . The third mounting groove is used to realize the embedded connection between the pressure sensor 13 and the second substrate 4 .

[0087] In some embodiments of the present application, the pressure sensor 13 and the pressure measuring channel 14 are sealed by a third sealing gasket, and the third sealing gasket is located between the pressure sensor 13 and the groove wall of the third installation groove.

[0088] In this solution, the pressure sensor 13 is pressed into the third mounting groove by the pressure sensor circuit board 15, and the pressure sensor circuit board 15 is firmly connected to the second substrate 4. The pressure sensor circuit board 15 has metal electrode contacts as an external circuit interface of the micro pump.

[0089] The connection between the pressure sensor 13 and the second substrate 4 is not limited to being pressed by the pressure sensor circuit board 15. The pressure sensor 13 may also be directly connected to the third mounting groove. The specific connection method is selected by technicians in this field according to actual needs.

[0090] The thickness of the second substrate 4 is greater than that of the first substrate 3 . The second substrate 4 serves as a supporting structure, and the first substrate 3 serves as a cover. The strength of the first substrate 3 may be lower than that of the second substrate 4 .

[0091] like Figure 4 As shown, the first substrate 3 is plug-connected with the second substrate 4. Specifically, a guide convex ring is provided on the side of the second substrate 4 that cooperates with the pump body 1, and a guide groove that cooperates with the guide convex ring is provided on the first substrate 3. The first substrate 3 and the second substrate 4 are plug-connected through the guide convex ring and the guide groove.

[0092] like Figure 4 As shown, the guide protruding ring is opened along the notch of the first installation groove, and the groove wall of the guide groove is L-shaped and opened along the notch of the second installation groove.

[0093] The connection method between the first substrate 3 and the second substrate 4 is not limited to plug-in connection, and may also be bolt-fastened or clamped.

[0094] like Figure 1 and Figure 3 As shown, the liquid inlet connector 9 and the liquid outlet connector 10 can be needle-type metal tubes.

[0095] The liquid inlet connector 9 pierces the sealing rubber plug of the product used in conjunction with the micropump disclosed in the present invention, so that the external liquid path is sealed and connected to the liquid inlet channel 5. Similarly, the liquid outlet connector 10 pierces the sealing rubber plug of the product used in conjunction with the micropump disclosed in the present invention, so that the external liquid path is sealed and connected to the liquid outlet channel 7. This design can reduce the toxicity hazards of glue caused by using glue to seal in the sealing design of small apertures or sizes, and the risk of cracking and leakage during high and low temperature storage or product operation, thereby improving the reliability of the seal.

[0096] The above description is only a preferred embodiment of the present application and an explanation of the technical principles used, and is not intended to limit the present application. For those skilled in the art, the present application may have various modifications and variations. The scope of application involved in the present application is not limited to the technical solution formed by a specific combination of the above-mentioned technical features, but should also cover other technical solutions formed by any combination of the above-mentioned technical features or their equivalent features without departing from the above-mentioned application concept. For example, the above-mentioned features are replaced with the technical features with similar functions disclosed in this application (but not limited to) to form a technical solution.

Claims

1. A micro pump, characterized in that: It comprises a pump body (1), an actuator (2), a first substrate (3) and a second substrate (4), The pump body (1) has an inlet and an outlet, and the pump body (1) is connected to the actuator (2); A liquid inlet channel (5) is provided in the first substrate (3), a first end of the liquid inlet channel (5) is connected to the inlet, and a liquid inlet connector (9) is provided at the other end of the liquid inlet channel (5); A first sealing gasket (6) having a first through hole corresponding to the position of the inlet and communicating with the inlet, wherein the first sealing gasket (6) is pressed against the pump body (1) through the first substrate (3) to achieve sealing between the inlet and the liquid inlet channel (5); The second substrate (4) is provided with a liquid outlet channel (7), one end of the liquid outlet channel (7) is connected to the outlet, and the other end of the liquid outlet channel (7) is provided with a liquid outlet joint (10); The second sealing gasket (8) has a second through hole corresponding to the position of the outlet and in communication with the outlet. The second sealing gasket (8) is pressed against the pump body (1) through the second substrate (4) to achieve sealing between the outlet and the liquid outlet channel (7).

2. The micro pump according to claim 1, characterized in that The rear end of the actuator (2) is firmly connected to the second substrate (4) via an annular connecting piece (11). The tail end of the actuator (2) and the second substrate (4) are located inside the annular connecting member (11), and an opening is provided at a position where the annular connecting member (11) cooperates with the second substrate (4), so that the outer circumference of the annular connecting member (11) can be adjusted, thereby adjusting the locking force applied by the annular connecting member (11) on the actuator (2) and the second substrate (4).

3. The micro pump according to claim 2, characterized in that: The annular connecting member (11) is provided with fixing holes on both sides of the opening, and the annular connecting member (11) is connected to the second substrate (4) via fixing members (12) matched with the fixing holes; and / or, A limiting groove is provided on one side of the second base plate (4) connected to the annular connecting member (11); the annular connecting member (11) has a limiting boss that cooperates with the limiting groove; the opening and the fixing hole are provided on the limiting boss.

4. The micro pump according to claim 1, characterized in that: The first base plate (3) is provided with a first mounting groove for mounting the pump body (1), and the first sealing gasket (6) is arranged between the pump body (1) and the bottom of the first mounting groove.

5. The micro pump according to claim 1 or 4, characterized in that: The second base plate (4) is provided with a second mounting groove, the pump body (1) is embedded in the second base plate (4) through the second mounting groove, and the second sealing gasket (8) is arranged between the pump body (1) and the bottom of the second mounting groove.

6. The micro pump according to claim 1, characterized in that: It also includes a pressure sensor (13) for detecting the fluid pressure of the liquid outlet channel (7). The second substrate (4) is provided with a pressure measuring channel (14) which is in communication with the liquid outlet channel (7), and the pressure sensor (13) is in communication with the pressure measuring channel (14).

7. The micro pump according to claim 6, characterized in that The second substrate (4) is provided with a third mounting groove which is in communication with the pressure measuring channel (14) and is used for mounting the pressure sensor (13). A third sealing gasket is provided between the pressure sensor (13) and the bottom of the third mounting groove. The third sealing gasket is used for sealing the pressure sensor (13) and the pressure measuring channel (14). The pressure sensor (13) is pressed tightly into the third mounting groove via a pressure sensor circuit board (15), and the pressure sensor circuit board (15) is connected to the second substrate (4).

8. The micro pump according to claim 1, characterized in that: The first sealing gasket (6) is adapted in shape to a side of the pump body (1) where the inlet is opened; and / or, The second sealing gasket (8) is adapted in shape to a side of the pump body (1) where the outlet is opened.

9. The micro pump according to claim 1, characterized in that: A guide convex ring is provided on one side of the second base plate (4) that cooperates with the pump body (1). The first substrate (3) is provided with a guide groove that cooperates with the guide convex ring, and the first substrate (3) and the second substrate (4) are plug-connected via the guide convex ring and the guide groove.

10. The micro pump according to claim 1, characterized in that: The liquid inlet connector (9) and the liquid outlet connector (10) are both needle-type metal tubes.

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