Probe adjusting machine for probe card

Abstract

The utility model discloses a probe adjusting machine for a probe card, which comprises a base, a door-shaped bracket is arranged on the base, and a microscope assembly is arranged on the door-shaped bracket; the base is further provided with an object carrying table top and an adjusting assembly driving the object carrying table top to adjust the position, a mounting platform is erected above the object carrying table top, and an opening allowing the object carrying table top to pass through is formed in the middle of the mounting platform. A mounting shaft is fixedly mounted above the mounting platform, a reference card fixing seat is rotationally mounted on the mounting shaft, and a reference card is mounted on the reference card fixing seat; and a handle is arranged on one side of the reference card fixing seat and can drive the reference card fixing seat to rotate around the mounting shaft. According to the utility model, the original whole rotating transverse shaft is changed into the mode that only the reference card fixing seat rotates around the mounting shaft, so that the overturning of the reference card is more stable and is not easy to shake; and the limiting blocks are arranged on the two sides of the reference card fixing seat, so that the position of the reference card fixing seat can be adjusted, and the reference card is prevented from shifting in the using process.

Description

Technical Field

[0001] The utility model relates to the technical field of probe cards, in particular to a needle adjusting machine for probe cards. Background Art

[0002] The probe card is the interface between the electronic test system and the semiconductor wafer. Typically, the probe card is mechanically docked with probes and electrically connected to the tester. Its purpose is to provide an electrical path between the test system and the circuits on the wafer, allowing the circuits to be tested and verified at the wafer level.

[0003] During the use of the probe card, problems such as wear and tilt often occur, which causes the probes on the probe card to tilt and have inconsistent spacing, ultimately affecting the test results of the wafer. Therefore, after the probe card has been used for a period of time, the probe card needs to be adjusted to adjust the tilt of the probes so that the spacing remains consistent.

[0004] Patent 2020232788669 discloses an epoxy probe card needle adjustment machine, including a needle card fixing device and an observation device, and also includes a pinhole comparison device, the pin card fixing device is used to fix the needle card, and the pin card can be moved horizontally and rotated; the pinhole comparison device can be used to install a sheet, the sheet is provided with a pinhole, the position of the pinhole corresponds to the standard position of the probe on the needle card, the observation device is located above the pinhole comparison device, and a light source is provided. By observing and comparing the pinhole position and the probe position, it is possible to quickly determine whether the probe is tilted or bent, and then correct it. The pinhole comparison device here is a liftable crossbar, the crossbar can rotate axially, a pair of fixed blocks are provided on the crossbar, and a cross groove is provided in the fixed block, and the edge of the sheet can be inserted into the cross groove. During the needle adjustment process, it is necessary to rotate the crossbar back and forth all the time, so as to turn the sheet over all the time. After long-term use, the crossbar is prone to shaking during rotation, resulting in deviation of the pinhole on the sheet, thereby affecting the needle adjustment effect. Utility Model Content

[0005] In order to solve the above problems, the utility model provides a probe card needle adjusting machine with simple structure and accurate needle adjustment.

[0006] To this end, the technical solution of the utility model is: a needle adjustment machine for a probe card, comprising a base, a gate-shaped bracket is provided on the base, and a microscope assembly is provided on the gate-shaped bracket; the base is also provided with a loading table and an adjustment assembly for driving the loading table to adjust the position, a mounting platform is erected above the loading table, and an opening is provided in the middle of the mounting platform for the loading table to pass through; a mounting shaft is fixedly installed above the mounting platform, a reference card fixing seat is rotatably installed on the mounting shaft, and a reference card is installed on the reference card fixing seat; a handle is provided on one side of the reference card fixing seat, which can drive the reference card fixing seat to rotate around the mounting shaft.

[0007] On the basis of the above scheme and as a preferred scheme of the above scheme: the end of the reference card fixing seat is provided with a through hole, which is sleeved on the installation shaft; the installation shaft is also provided with two limit blocks, which are located on both sides of the reference card fixing seat.

[0008] On the basis of the above scheme and as a preferred scheme of the above scheme: a horizontal plane is extended from the limit block on the mounting axis close to the handle side, and a vertical leveling piece is provided on the side of the reference card fixing seat. When the reference card fixing seat is rotated to the lowest position, the bottom of the leveling piece abuts against the horizontal plane, that is, the reference card fixing seat is in a horizontal state.

[0009] On the basis of the above scheme and as a preferred scheme of the above scheme: the reference card is made of a transparent material, and a plurality of pinhole reference points are provided on the reference card.

[0010] On the basis of the above scheme and as a preferred scheme of the above scheme: the adjustment component includes an X-axis adjustment table, a Y-axis adjustment table, a Z-axis adjustment table and a rotating adjustment table arranged in a stacked manner, and the loading table surface is fixed on the rotating adjustment table.

[0011] On the basis of the above scheme and as a preferred scheme of the above scheme: a plurality of ventilation holes are arranged on the loading platform, and the side of the loading platform is connected to the negative pressure device through an air pipe, and the ventilation holes on the loading platform are in a negative pressure state.

[0012] On the basis of the above scheme and as a preferred scheme of the above scheme: the microscope assembly includes a microscope and a movable seat, the microscope is installed on the movable seat, and the movable seat is slidably installed on the crossbeam of the door-type bracket.

[0013] Before adjusting the needle, place the probe card on the stage and fix it by negative pressure. Then adjust the height of the stage so that when the reference card holder is flipped down, the end of the probe can contact the reference card. According to the pinhole reference point on the reference card, adjust the position of the stage on the X-axis and Y-axis and the rotational orientation of the stage so that most of the probes on the probe card are relative to the pinhole reference point. Then start adjusting the probes with inconsistent positions.

[0014] When adjusting the needle, turn the reference card holder downward so that the reference card fits the probe, observe the gap between one of the probes and the pinhole reference point through the microscope, then lift the reference card holder upward, use tweezers to adjust the probe just observed, and then put the reference card down for comparison. Adjust it multiple times until the position of the probe is consistent with the pinhole reference point, and so on. Adjust all the probes that need to be adjusted one by one, and the needle adjustment work of this probe card is completed.

[0015] Compared with the prior art, the beneficial effects of the utility model are:

[0016] 1. The original entire rotating horizontal axis is changed to only the reference card fixing seat rotating around the installation axis, so that the flipping of the reference card is more stable and not easy to shake; and limit blocks are provided on both sides of the reference card fixing seat to adjust the position of the reference card fixing seat and prevent the reference card from shifting during use.

[0017] 2. A leveling piece is arranged on the side of the reference card fixing seat so that the reference card fixing seat can be rotated to the lowest horizontal state every time to avoid incomplete rotation, which changes the relative position of the probe and the reference point and improves the needle adjustment effect and efficiency.

[0018] 3. The stage surface fixes the probe card through negative pressure adsorption, which is suitable for fixing probe cards of different specifications. The adjustment component can adjust the position of the stage surface from four directions: X-axis, Y-axis, Z-axis and rotation, so that the position comparison between the probe on the probe card and the reference card is more accurate, and the final needle adjustment effect is better. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The following is a further detailed description of the embodiments of the present invention in conjunction with the accompanying drawings.

[0020] Figure 1 It is a schematic diagram of the structure of the utility model;

[0021] Figure 2 It is a structural schematic diagram of the adjustment component of the utility model;

[0022] Figure 3 It is an exploded view of the parts of the adjustment assembly of the utility model;

[0023] Figure 4 This is a schematic diagram of the structure of the reference card fixing seat of the utility model;

[0024] Figure 5 for Figure 4 A partial enlarged view of

[0025] Figure 6 This is a schematic diagram of the horizontal state of the reference card fixing seat of the utility model;

[0026] Figure 7 This is a schematic diagram of the vertical state of the reference card fixing seat of the utility model;

[0027] Figure 8 It is a structural schematic diagram of the microscope assembly of the utility model.

[0028] Marked in the figure are: base 1, stage surface 2, adjustment assembly 3, X-axis adjustment table 31, Y-axis adjustment table 32, Z-axis adjustment table 33, rotation adjustment table 34, mounting platform 4, mounting axis 5, reference card fixing seat 6, mounting frame 61, handle 62, leveling piece 63, limit block 7, horizontal plane 71, door-type bracket 8, first guide rail 81, microscope assembly 9, microscope 90, moving seat 91, upper slider 92, lower slider 93, second guide rail 94, lifting seat 95. DETAILED DESCRIPTION

[0029] In the description of the present invention, it should be noted that directional words, such as the terms "center", "lateral (X)", "longitudinal (Y)", "vertical (Z)", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", etc., indicating directions and positional relationships are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of narrating the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and cannot be understood as limiting the specific protection scope of the present invention.

[0030] In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features. Therefore, the definition of "first" and "second" features can explicitly or implicitly include one or more of the features. In the description of the utility model, the meaning of "several" and "a number" is two or more, unless otherwise clearly and specifically defined.

[0031] See the attached drawings. The probe card needle adjustment machine described in this embodiment includes a base 1, on which is provided a loading table 2 and an adjustment component 3 for driving the loading table to adjust its position. The adjustment component 3 includes a stacked X-axis adjustment table 31, a Y-axis adjustment table 32, a Z-axis adjustment table 33 and a rotating adjustment table 34, and the loading table 2 is fixed on the rotating adjustment table 34. A plurality of vents are provided on the loading table 2, and the side of the loading table is connected to the negative pressure device through an air pipe, and the vents on the loading table 2 are in a negative pressure state. The X-axis adjustment table 31, the Y-axis adjustment table 32, the Z-axis adjustment table 33 and the rotating adjustment table 34 are all manual adjustment tables, which are existing mature technologies and will not be described in detail here.

[0032] A mounting platform 4 is provided above the stage surface 2, and an opening is provided in the middle of the mounting platform 4 for the stage surface 2 to pass through; a horizontally arranged mounting shaft 5 is fixedly installed above the mounting platform 4, and a reference card fixing seat 6 is rotatably installed on the mounting shaft 5; a through hole is provided at the end of the reference card fixing seat 6, and is rotatably mounted on the mounting shaft 5, and a mounting frame 61 is provided at the front end of the reference card fixing seat 6, and a reference card (not shown in the figure) is pasted under the mounting frame. The reference card is made of transparent material, and a plurality of pinhole reference points are provided on the reference card. Different reference cards can be replaced according to the type of probe card, and needle adjustment operations can be performed on different types of probe cards.

[0033] A handle 62 is provided on one side of the reference card fixing seat 6, which can drive the reference card fixing seat 6 to rotate around the installation axis 5. Two limit blocks 7 are also provided on the installation axis 5, located on both sides of the reference card fixing seat 6. The limit block 7 on the side of the installation axis 5 close to the handle is provided with a horizontal surface 71 extending outward, and a vertical leveling member 63 is provided on the side of the reference card fixing seat 6. When the reference card fixing seat 6 is rotated to the lowest position, the bottom of the leveling member 63 can abut against the horizontal surface 71 to ensure that the reference card fixing seat 6 is in a horizontal state at this time. Through the handle 62, the reference card fixing seat 6 can be driven to rotate upward around the installation axis 5 to a vertical state, which is convenient for the user to adjust the probe spacing with tweezers.

[0034] The base 1 is provided with a gate-shaped bracket 8, and the gate-shaped bracket 8 is provided with a microscope assembly 9; a first guide rail 81 is provided under the crossbeam of the gate-shaped bracket 8, and a slider is provided on each side of the movable seat 91, and the slotting directions of the two sliders are perpendicular to each other, and the upper slider 92 of the movable seat is slidably matched with the first guide rail 81, and the position of the microscope 90 on the X-axis can be adjusted; the lower slider 93 of the movable seat 91 is slidably matched with the second guide rail 94, and the position of the microscope 90 on the Y-axis can be adjusted; a lifting seat 95 is fixed under the second guide rail 94, and the microscope 90 is installed on the lifting seat 95, and the position of the microscope on the Z-axis can be adjusted.

[0035] Before adjusting the needle, place the probe card on the stage surface 2 and fix it by negative pressure. Then adjust the height of the stage surface 2 so that when the reference card fixing seat 6 is flipped down, the end of the probe can contact the reference card. According to the pinhole reference point on the reference card, adjust the position of the stage surface 2 on the X-axis and Y-axis and the rotational orientation of the stage surface so that most of the probes on the probe card are relative to the pinhole reference point. Then start adjusting the probes with inconsistent positions.

[0036] When adjusting the needle, turn the reference card fixing seat 6 downward to make the reference card fit with the probe, observe the difference between one of the probes and the pinhole reference point through the microscope 90, then lift the reference card fixing seat 6 upward, use tweezers to adjust the probe just observed, and then put the reference card down for comparison, and adjust it multiple times until the position of the probe is consistent with the pinhole reference point. Similarly, adjust all the probes that need to be adjusted one by one, and the needle adjustment work of this probe card is completed.

[0037] The above is only a preferred embodiment of the present invention. The protection scope of the present invention is not limited to the above embodiments. All technical solutions under the concept of the present invention belong to the protection scope of the present invention. It should be pointed out that for ordinary technicians in this technical field, some improvements and modifications without departing from the principle of the present invention should also be regarded as the protection scope of the present invention.

Claims

1. A needle adjustment machine for a probe card, comprising a base, a door-shaped bracket on the base, a microscope assembly on the door-shaped bracket; the base is also provided with a stage and an adjustment assembly for driving the stage to adjust the position, a mounting platform is arranged above the stage, and an opening is arranged in the middle of the mounting platform for the stage to pass through; the characteristics are: A mounting shaft is fixedly installed above the mounting platform, a reference card fixing seat is rotatably installed on the mounting shaft, and a reference card is installed on the reference card fixing seat; a handle is provided on one side of the reference card fixing seat, which can drive the reference card fixing seat to rotate around the mounting shaft.

2. A probe card needle adjustment machine as claimed in claim 1, characterized in that: The end of the reference card fixing seat is provided with a through hole, which is sleeved on the installation shaft; the installation shaft is also provided with two limit blocks, which are located on both sides of the reference card fixing seat.

3. A probe card needle adjustment machine as claimed in claim 2, characterized in that: A horizontal plane is extended from the limit block on the mounting shaft near the handle side, and a vertical leveling piece is provided on the side of the reference card fixing seat. When the reference card fixing seat is rotated to the lowest position, the bottom of the leveling piece abuts against the horizontal plane, that is, the reference card fixing seat is in a horizontal state.

4. The probe card needle adjustment machine according to claim 1, characterized in that: The reference card is made of transparent material and is provided with a plurality of pinhole reference points.

5. The probe card needle adjustment machine according to claim 1, characterized in that: The adjustment assembly comprises an X-axis adjustment table, a Y-axis adjustment table, a Z-axis adjustment table and a rotation adjustment table which are stacked and arranged, and the object loading table surface is fixed on the rotation adjustment table.

6. The probe card needle adjustment machine according to claim 1, characterized in that: The loading platform is provided with a plurality of ventilation holes, and the side surface of the loading platform is connected to the negative pressure device through an air pipe, and the ventilation holes on the loading platform are in a negative pressure state.

7. The probe card needle adjustment machine according to claim 1, characterized in that: The microscope assembly comprises a microscope and a moving seat, the microscope is mounted on the moving seat, and the moving seat is slidably mounted on a crossbeam of a door-shaped bracket.

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