Low-temperature plasma jet spray gun

Abstract

A low-temperature plasma jet spray gun comprises a low-temperature plasma nozzle, a low-temperature electrode cover, a low-temperature electrode, a gas guide wheel, a power transmission block, a fixing base, a gas inlet connector, a spray gun body outer cover, a high-voltage wire and a spray gun base. The low-temperature plasma nozzle and the low-temperature electrode cover are locked and matched through threads, and the interior of the low-temperature plasma nozzle is communicated with the interior of the low-temperature electrode cover; the low-temperature electrode is installed at the front end of a center hole of the gas guide wheel, the front end of the power transmission block is connected with the low-temperature electrode through threads, the gas guide wheel is pressed to the low-temperature electrode, and a plurality of gas through holes are formed in the periphery of the center hole. The low-temperature electrode extends into the low-temperature electrode cover in an inserting manner; the front end of the fixing base is fixedly connected with the rear end of the low-temperature electrode cover, an air inlet and a positive electrode hole are formed in the middle of the fixing base, an air inlet connector is connected to the air inlet, the air inlet is communicated to the air through hole, and a high-voltage wire penetrates through the positive electrode hole to be connected to the power transmission block. The plasma flame generator can efficiently generate uniform and low-temperature plasma flames, and is light in structure.

Description

Technical Field

[0001] The utility model relates to a plasma technology, in particular to a low-temperature plasma jet spray gun. Background Art

[0002] Plasma cleaning machines are widely used in the semiconductor industry, optical industry, machinery and aerospace industry. In the large-scale integrated circuit and discrete device industries, plasma cleaning is generally used in the following key steps: 1. Degumming, using oxygen plasma to treat silicon wafers to remove photoresist; 2. Plasma cleaning of device substrates before metallization; 3. Plasma cleaning before hybrid circuit bonding; 4. Plasma cleaning before bonding; 5. Plasma cleaning before metallized ceramic tube capping. The main ones are: the application of plasma cleaning machines in the treatment process before further processing of plastic products, the application of plasma cleaning machines to remove dirt on glass surfaces, and other application areas of plasma cleaning machines.

[0003] The plasma torch of conventional jet plasma spray guns currently available on the market has concentrated energy, and high temperatures can easily damage heat-sensitive products, seriously affecting production. In addition, excessively high temperatures cause the plasma generator inside the spray gun and the plasma nozzle to be consumed too quickly, resulting in excessive losses of the jet spray gun, which reduces structural reliability and requires frequent and regular maintenance, increasing the cost of use. The energy of a long-term spray gun accumulates, leading to heat accumulation, so that when it is used in conjunction with automated equipment, it is necessary to install a heat dissipation structure with a larger cooling capacity, which increases the cost of the automated structure, increases the equipment footprint, and makes the structure more complicated. In particular, some materials that are not suitable for high-temperature treatment are prone to discoloration and deformation after being heated. Utility Model Content

[0004] The technical problem solved by the utility model is to provide a low-temperature plasma jet spray gun which can efficiently generate uniform and low-temperature plasma flames and has a light structure.

[0005] The technical solution of the utility model is:

[0006] A low-temperature plasma jet spray gun, comprising a low-temperature plasma nozzle, a low-temperature electrode cover, a low-temperature electrode, a gas guide wheel, a power transmission block, a fixing seat, an air inlet connector, and a high-voltage wire;

[0007] The low-temperature plasma nozzle and the low-temperature electrode cover are locked together via threads, and the interior of the low-temperature plasma nozzle is connected to the interior of the low-temperature electrode cover; the low-temperature electrode is installed at the front end of the center hole of the gas guide wheel, and the power transmission block is a screw-like structure inserted through the center hole, and its front end is connected to the low-temperature electrode via threads, pressing the gas guide wheel onto the low-temperature electrode, and a plurality of gas through holes are provided at the periphery of the center hole; the low-temperature electrode is inserted and extended into the low-temperature electrode cover, and a plasma channel connecting the gas through hole and the low-temperature plasma nozzle is formed between the low-temperature electrode and the low-temperature electrode cover;

[0008] The front end of the fixing seat is fixedly connected to the rear end of the low-temperature electrode cover, and an air inlet hole and a positive electrode hole are provided in the middle of the fixing seat. An air inlet connector is connected to the air inlet hole, and the air inlet hole is connected to the gas through hole. A high-voltage line passes through the positive electrode hole and is connected to the power transmission block.

[0009] As described above, the low-temperature plasma jet spray gun, wherein a spray gun base is fixedly connected below the fixing seat, and the spray gun base is grounded.

[0010] As described above, in the low-temperature plasma jet spray gun, a spray gun body outer cover is correspondingly provided on the spray gun base.

[0011] As described above, the low-temperature plasma jet spray gun, wherein a bellows fixing seat is provided at the rear end of the spray gun base, a bellows is fixed on the bellows fixing seat, and an air intake pipe connected to the air intake joint and the high-voltage line are passed through the bellows.

[0012] As described above, in the low-temperature plasma jet spray gun, a sealing ring is provided between the gas guide wheel and the electrode fixing seat and the fixing seat.

[0013] In the low-temperature plasma jet spray gun as described above, the gas through holes on the gas guide wheel and the electrode fixing seat are inclined holes that form a set angle with their central axes.

[0014] As described above, the low-temperature plasma jet spray gun, wherein the gas guide wheel and the electrode fixing seat are made of ceramic material, the spray gun base and the fixing seat are made of 6 series aluminum material, the low-temperature electrode is made of copper with chrome-plated surface, and the low-temperature plasma nozzle is made of 316 stainless steel material.

[0015] From the above description, it can be seen that compared with the prior art, the utility model can indeed achieve the following effects:

[0016] The low-temperature plasma jet spray gun of the utility model can efficiently generate uniform and low-temperature plasma flames to improve the surface performance of products. The utility model has a compact structure, small size, light weight, low processing temperature, good processing effect, and is easy to integrate into a mechanical arm or an automated production line to improve processing efficiency.

[0017] Its low-temperature electrode nozzle structure, internal gas uniformity structure, electrode, ceramic gas guide wheel and electrode fixing seat. The small cavity composed of the ceramic gas guide wheel, electrode fixing seat and sealing ring allows the gas in the chamber to be ejected only from a single direction toward the nozzle, so that the process gas can be used to the greatest extent. The internal structure of the low-temperature nozzle will concentrate the gas in the chamber to the center of the nozzle for ejection, so that the plasma is ejected evenly.

[0018] There is a gap between the ceramic medium and the fixing seat, and the gap is filled with a silicone sealing ring so that the ceramic can be firmly installed in the chamber without any shaking, thereby ensuring the integrity of the ceramic material during use and transportation.

[0019] The electrode is made of chrome-plated copper, which ensures efficient power output, greatly increases the material life, and makes the discharge more uniform.

[0020] The low-temperature plasma jet spray gun of the utility model can generate low-temperature plasma, which greatly reduces the thermal damage to the material and enables many products with temperature requirements to be better processed by plasma. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 This is a schematic diagram of the product structure of a preferred embodiment of the utility model;

[0022] Figure 2 The figure is a schematic diagram of the explosion structure of a preferred embodiment of the utility model.

[0023] Description of main component numbers:

[0024] The utility model:

[0025] 1: Low temperature plasma nozzle 2: Low temperature electrode cover 3: Low temperature electrode

[0026] 4: Gas guide wheel and electrode holder 5: Power transmission block 6: Holder

[0027] 7: Sealing ring 8: Air inlet connector 9: Spray gun body cover

[0028] 10: Bellows fixing seat 11: Bellows 13: High voltage wire

[0029] 14: Spray gun base DETAILED DESCRIPTION

[0030] In order to have a clearer understanding of the technical features, purposes and effects of the utility model, the specific implementation methods of the utility model are now described with reference to the accompanying drawings.

[0031] The utility model is a low-temperature plasma jet spray gun, in which a preferred embodiment is shown in FIG. Figure 1 and Figure 2 As shown, the utility model includes a low-temperature plasma nozzle 1, a low-temperature electrode cover, a low-temperature electrode 3, a gas guide wheel, a power transmission block 5, a fixing seat 6, an air intake connector 8, and a high-voltage line 13.

[0032] The low-temperature plasma nozzle 1 and the low-temperature electrode cover 2 are screw-locked together to form the cathode part of the low-temperature spray gun.

[0033] The interior of the low-temperature plasma nozzle 1 is connected to the interior of the low-temperature electrode cover; the low-temperature electrode 3 is installed at the front end of the center hole of the gas guide wheel, and the power transmission block 5 is a screw-like structure inserted through the center hole, and its front end is connected to the low-temperature electrode 3 via a thread, pressing the gas guide wheel onto the low-temperature electrode 3. A plurality of gas through holes are provided around the center hole; the low-temperature electrode 3 is inserted and extended into the low-temperature electrode cover, and a plasma channel connecting the gas through hole and the low-temperature plasma nozzle 1 is formed between the low-temperature electrode 3 and the low-temperature electrode cover.

[0034] The front end of the fixing seat 6 is fixedly connected to the rear end of the low-temperature electrode cover, and an air inlet hole and a positive electrode hole are provided in the middle of the fixing seat 6. An air inlet connector 8 is connected to the air inlet hole, and the air inlet hole is connected to the gas through hole. A high-voltage line 13 passes through the positive electrode hole and is connected to the power transmission block 5. The power transmission block 5 and the low-temperature electrode 3 constitute the anode part.

[0035] The utility model inserts the air inlet pipe into the air inlet joint 8 to pass the process gas into the spray gun. The process gas is mainly compressed air / nitrogen (depending on the processed product), etc. The power and the power transmission block 5 are transmitted to the low-temperature electrode through the high-voltage line 13, and plasma is generated by the tip discharge and sprayed from the low-temperature nozzle.

[0036] As described above, in the preferred embodiment of the low-temperature plasma jet spray gun of the utility model, a spray gun base 14 is fixedly connected below the fixing seat 6, and the spray gun base 14 is grounded. The cathode part is formed by the grounding.

[0037] As described above, in the preferred embodiment of the low-temperature plasma jet spray gun of the utility model, a spray gun body outer cover 9 is correspondingly provided on the spray gun base 14, which can play a role of protection and fixing.

[0038] As described above, in the preferred embodiment of the low-temperature plasma jet spray gun of the utility model, a bellows fixing seat 10 is provided at the rear end of the spray gun base 14, a bellows 12 is fixed on the bellows fixing seat 10, and the air intake pipe connected to the air intake connector 8 and the high-voltage line 13 are passed through the bellows 12. The protective effect of the bellows 12 can ensure that the utility model will not be easily damaged on the rear end protection pipe during long-term use.

[0039] In the preferred embodiment of the low-temperature plasma jet spray gun of the utility model as described above, a sealing ring 7 is provided between the gas guide wheel and the electrode fixing seat 4 and the fixing seat. Through the provision of the sealing ring 7, the channel for transmitting the process gas is relatively sealed from the outside to avoid gas leakage.

[0040] In the preferred embodiment of the low-temperature plasma jet spray gun of the utility model as described above, the gas through holes on the gas guide wheel and the electrode fixing seat 4 are inclined holes that form a set angle with their central axis. The front gas outlet adopts a circumferential array inclined hole design, so that the gas is ejected more evenly, thereby making the plasma generation more even.

[0041] As described above, in the preferred embodiment of the low-temperature plasma jet spray gun of the utility model, the gas guide wheel and the electrode fixing seat 4 are made of ceramic material, the spray gun base 14 and the fixing seat are made of 6 series aluminum material, the low-temperature electrode is made of copper surface chrome-plated material, and the low-temperature plasma nozzle 1 is made of 316 stainless steel material. The gas guide wheel and the electrode fixing seat 4 are made of ceramic material, and the insulation performance is reliable; the spray gun base 14 and the fixing seat are made of 6 series aluminum material, the overall structure is firm and reliable, and the outer surface is sprayed with corrosion-resistant materials. In the plasma working environment, it can work more reliably and longer. The low-temperature electrode is made of copper surface chrome-plated material. In the case of internal discharge, it can have a longer life than brass and other materials, and does not need to be replaced frequently, thereby reducing the subsequent maintenance cost, so that the equipment can operate stably for a long time. The low-temperature plasma nozzle 1 is processed with 316 stainless steel material, and can still maintain a good state in the environment of the plasma torch, and is not easily corroded by plasma and quickly consumed. The long-term stable nozzle structure can enable the plasma to maintain a better ejection state.

[0042] The utility model is preferably powered by a 25k-30k medium frequency power supply, with an input power of 200-500W. 20-30L / min compressed air or nitrogen is used as the main gas, mixed with a small amount of hydrogen, oxygen, and other process gases. The surface of the treated product is 5-10mm away from the nozzle of the plasma generator to achieve the best use state.

[0043] The low-temperature plasma jet spray gun of the utility model can efficiently generate uniform and low-temperature plasma flames to improve the surface performance of products. The utility model has a compact structure, small size, light weight, low processing temperature, good processing effect, and is easy to integrate into a mechanical arm or an automated production line to improve processing efficiency.

[0044] Its low-temperature electrode nozzle structure, internal uniform gas structure, electrode, ceramic gas guide wheel and electrode fixing seat 4. The small cavity composed of the ceramic gas guide wheel, electrode fixing seat 4 and sealing ring 7 allows the gas in the chamber to be ejected only from a single direction toward the nozzle, so that the process gas can be used to the greatest extent. The internal structure of the low-temperature nozzle will concentrate the gas in the chamber to the center of the nozzle for ejection, so that the plasma is ejected evenly.

[0045] There is a gap between the ceramic medium and the fixing seat, and the gap is filled with a silicone sealing ring 7 so that the ceramic can be firmly installed in the chamber without any shaking, which can ensure the integrity of the ceramic material during use and transportation.

[0046] The electrode is made of chrome-plated copper, which ensures efficient power output, greatly increases the material life, and makes the discharge more uniform.

[0047] The low-temperature plasma jet spray gun of the utility model can generate low-temperature plasma, which greatly reduces the thermal damage to the material and enables many products with temperature requirements to be better processed by plasma.

[0048] The above description is only an illustrative embodiment of the present invention and is not intended to limit the scope of the present invention. Any equivalent changes and modifications made by any person skilled in the art without departing from the concept and principle of the present invention shall fall within the scope of protection of the present invention.

Claims

1. A low temperature plasma jet spray gun, characterized in that: It includes a low-temperature plasma nozzle, a low-temperature electrode cover, a low-temperature electrode, a gas guide wheel, a power transmission block, a fixing seat, an air intake connector, and a high-voltage wire; The low-temperature plasma nozzle and the low-temperature electrode cover are locked together via threads, and the interior of the low-temperature plasma nozzle is connected to the interior of the low-temperature electrode cover; the low-temperature electrode is installed at the front end of the center hole of the gas guide wheel, and the power transmission block is a screw-like structure inserted through the center hole, and its front end is connected to the low-temperature electrode via threads, pressing the gas guide wheel onto the low-temperature electrode, and a plurality of gas through holes are provided at the periphery of the center hole; the low-temperature electrode is inserted and extended into the low-temperature electrode cover, and a plasma channel connecting the gas through hole and the low-temperature plasma nozzle is formed between the low-temperature electrode and the low-temperature electrode cover; The front end of the fixing seat is fixedly connected to the rear end of the low-temperature electrode cover, and an air inlet hole and a positive electrode hole are provided in the middle of the fixing seat. An air inlet connector is connected to the air inlet hole, and the air inlet hole is connected to the gas through hole. A high-voltage line passes through the positive electrode hole and is connected to the power transmission block.

2. The low-temperature plasma jet spray gun according to claim 1, characterized in that: A spray gun base is fixedly connected below the fixing seat, and the spray gun base is grounded.

3. The low-temperature plasma jet spray gun according to claim 2, characterized in that: The spray gun base is correspondingly provided with a spray gun main body outer cover.

4. The low-temperature plasma jet spray gun according to claim 3, characterized in that: A bellows fixing seat is provided at the rear end of the spray gun base, a bellows is fixed on the bellows fixing seat, and an air intake pipe connected to the air intake joint and the high-voltage line are passed through the bellows.

5. The low-temperature plasma jet spray gun according to claim 1, characterized in that: A sealing ring is provided between the gas guide wheel and the electrode fixing seat and the fixing seat.

6. The low-temperature plasma jet spray gun according to claim 1, characterized in that: The gas through holes on the gas guide wheel and the electrode fixing seat are inclined holes that form a set angle with their central axes.

7. The low-temperature plasma jet spray gun according to claim 2, characterized in that: The gas guide wheel and the electrode fixing seat are made of ceramic material, the spray gun base and the fixing seat are made of 6 series aluminum material, the low-temperature electrode is made of copper with chrome plating on the surface, and the low-temperature plasma nozzle is made of 316 stainless steel material.

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