Purification equipment for semiconductor waste gas

Abstract

The utility model relates to the technical field of semiconductor production, and discloses semiconductor waste gas purification equipment which comprises a bottom plate, a purification mechanism is arranged at the top of the bottom plate and comprises a first filter box and a second filter box, and the first filter box and the second filter box are both fixedly connected with the bottom plate. The bottom of the first filter box communicates with a liquid discharge pipe, an inner cavity of the liquid discharge pipe is provided with an electromagnetic valve, and the left side of the first filter box communicates with an air inlet pipe. By arranging the purification mechanism, waste gas can be purified, purification liquid in the first filter box can filter impurities in the waste gas, discharge of the purification liquid can be accelerated by controlling extension of the first electric push rod, liquid replacement is facilitated, the waste gas can be further filtered through an activated carbon screen plate, the purification effect is good, and by arranging the moving mechanism, the waste gas can be conveniently purified. And the universal wheels can be ejected out and retracted by controlling extension and retraction of the second electric push rod, so that the device is convenient to move.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor production, in particular to a purification device for semiconductor waste gas. Background Art

[0002] Semiconductor waste gas purification equipment is a kind of equipment that purifies the waste gas generated in the process of semiconductor production. It uses different process technologies to recycle or remove harmful components in the waste gas to achieve the purpose of purifying the air and protecting the environment, thereby protecting the environment from pollution. It plays a very important role in the rapid development of modern industrial production.

[0003] Chinese patent CN208678692U discloses a semiconductor waste gas purification device, which relates to the technical field of waste gas purification devices. The semiconductor waste gas purification device comprises a dust collector, a first air inlet is connected to the left outer surface of the dust collector near the upper position, a first air pump is fixedly installed on the outer surface of the first air inlet, a water trough is fixedly installed at the bottom position of the interior of the dust collector, a dust filter net is movably installed inside the water trough, a water tank is fixedly installed at the top of the dust collector, a filter membrane is fixedly installed inside the water tank, and a first water pump is fixedly installed on the left side of the water tank, and a reflux pipe is fixedly installed between the water tank and the water trough. The semiconductor waste gas purification device can separate and collect dust contained in the waste gas well, and can also recycle water, saving water resources, and the waste gas is purified, so that harmful substances are effectively separated from the waste gas. A large amount of dust will not be generated in the semiconductor production process, and a small amount of dust can be filtered out by using a purification liquid. The device is not convenient for replacing the filter liquid and is not convenient for carrying and moving.

[0004] Therefore, those skilled in the art provide a purification device for semiconductor exhaust gas to solve the problems raised in the above background technology. Utility Model Content

[0005] In order to improve the problem that semiconductor waste gas purification equipment is inconvenient to replace the filter liquid and is inconvenient to carry and move, the utility model provides a semiconductor waste gas purification equipment.

[0006] The utility model provides a purification device for semiconductor waste gas, which adopts the following technical solutions:

[0007] A purification device for semiconductor exhaust gas comprises a bottom plate, a purification mechanism is arranged on the top of the bottom plate, the purification mechanism comprises a first filter box and a second filter box, the first filter box and the second filter box are both fixedly connected to the bottom plate, the bottom of the first filter box is connected with a drain pipe, the inner cavity of the drain pipe is provided with a solenoid valve, the left side of the first filter box is connected with an air inlet pipe, the top of the first filter box is fixedly installed with a support frame, the top of the inner cavity of the support frame is fixedly installed with a first electric push rod, the output end of the first electric push rod is fixedly installed with a piston, the inner cavity of the first filter box is slidably connected with a filter screen plate, the right side of the first filter box is connected with a connecting pipe, the left side of the second filter box is fixedly installed with a fan, the input end of the fan is connected with the connecting pipe, the output end of the fan is connected with the second filter box through a pipeline, the inner cavity of the second filter box is slidably connected with an activated carbon screen plate, and the right side of the second filter box is connected with an exhaust pipe;

[0008] A moving mechanism is provided at the bottom of the base plate, and the moving mechanism includes a moving box, which is fixedly connected to the base plate. A second electric push rod is fixedly installed on the top of the inner cavity of the moving box, a cross plate is fixedly installed on the output end of the second electric push rod, and a universal wheel is fixedly installed on the output end of the cross plate.

[0009] By adopting the above technical solution and setting up a purification mechanism, the exhaust gas can be purified, wherein the purification liquid in the first filter box can filter impurities in the exhaust gas, and by controlling the extension of the first electric push rod, the discharge of the purification liquid can be accelerated, which is convenient for liquid replacement, and the activated carbon mesh plate can further filter the exhaust gas, with a good purification effect. By setting up a moving mechanism, wherein the universal wheel can be pushed out and retracted by controlling the extension and retraction of the second electric push rod, thereby facilitating the movement of the device.

[0010] Optionally, the top of the left side of the first filter box is connected to a liquid adding pipe, and a screw cap is provided at the left end of the liquid adding pipe.

[0011] By adopting the above technical solution, the rotary cover can be opened and purified liquid can be added into the first filter box through the liquid adding pipe.

[0012] Optionally, the front side of the first filter box is movably connected to a first box door via a hinge, and a lock is provided on the right side of the first box door.

[0013] By adopting the above technical solution, the first box door is opened by the lock, and impurities on the top of the filter plate can be cleaned.

[0014] Optionally, the front side of the second filter box is movably connected to a second box door via a hinge, and a lock is provided on the left side of the second box door.

[0015] By adopting the above technical solution, the second box door is opened by the lock, so that the activated carbon mesh plate can be easily pulled out and replaced.

[0016] Optionally, the number of the activated carbon mesh plates is three, and sliding grooves for use with the activated carbon mesh plates are provided at both upper and lower ends of the inner cavity of the second filter box.

[0017] By adopting the above technical solution, the three activated carbon mesh panels can perform triple filtration on the air to improve the purification effect, and the sliding groove facilitates the positioning of the activated carbon mesh panels.

[0018] Optionally, guide sliding blocks are fixedly installed on both the left and right sides of the transverse plate, and the inner cavity of the movable box is provided with a guide sliding groove.

[0019] By adopting the above technical solution, the guide sliding block is slidably connected with the guide sliding groove, which can guide the cross plate and make the cross plate more stable when moving up and down.

[0020] Optionally, a controller is disposed on the front of the base plate, and a battery box is disposed on the left side of the base plate.

[0021] By adopting the above technical solution, the controller is used to control the switches of various electrical appliances, and the batteries in the battery box provide backup power for the device.

[0022] In summary, the utility model has the following beneficial effects:

[0023] 1. The utility model can purify the exhaust gas by setting a purification mechanism, wherein the purification liquid in the first filter box can filter the impurities in the exhaust gas, and by controlling the extension of the first electric push rod, the discharge of the purification liquid can be accelerated, which is convenient for liquid replacement, and the activated carbon mesh plate can further filter the exhaust gas, with good purification effect. By setting a moving mechanism, the universal wheel can be pushed out and retracted by controlling the extension and retraction of the second electric push rod, thereby facilitating the movement of the device.

[0024] 2. The utility model opens the rotary cover and adds purification liquid into the first filter box through the liquid adding tube. The first box door is opened by the lock to clean the impurities on the top of the filter screen. The second box door is opened by the lock to facilitate the removal and replacement of the activated carbon screen. The three activated carbon screens can perform triple filtration on the air to enhance the purification effect. The sliding groove is convenient for limiting the activated carbon screen. The guide slider is slidably connected to the guide slide groove and can guide the cross plate to make it more stable when moving up and down. The controller is used to control the switches of various electrical appliances. The battery in the battery box provides backup power for the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a schematic diagram of the structure of the utility model.

[0026] Figure 2It is a left-side structural schematic diagram of the utility model.

[0027] Figure 3 It is a schematic diagram of the internal structure of the first filter box of the utility model.

[0028] Figure 4 It is a schematic diagram of the internal structure of the second filter box of the utility model.

[0029] Figure 5 It is a schematic diagram of the structure of the liquid discharge pipe of the utility model.

[0030] Figure 6 It is a schematic diagram of the cross-sectional structure of the mobile box of the utility model.

[0031] Description of reference numerals:

[0032] 1. Bottom plate; 2. Purification mechanism; 201. First filter box; 202. Inlet pipe; 203. Support frame; 204. First electric push rod; 205. Liquid adding pipe; 206. Piston; 207. Filter screen; 208. First box door; 209. Connecting pipe; 210. Second filter box; 211. Fan; 212. Second box door; 213. Exhaust pipe; 214. Activated carbon screen; 215. Drain pipe; 216. Solenoid valve; 3. Moving mechanism; 301. Moving box; 302. Second electric push rod; 303. Horizontal plate; 304. Universal wheel; 4. Controller; 5. Battery box. DETAILED DESCRIPTION

[0033] The following is combined with Figure 1-6 This application is described in further detail.

[0034] Embodiment 1:

[0035] Please refer to Figure 1-5, a purification device for semiconductor waste gas, comprising a base plate 1, a purification mechanism 2 is arranged on the top of the base plate 1, the purification mechanism 2 includes a first filter box 201 and a second filter box 210, the first filter box 201 and the second filter box 210 are both fixedly connected to the base plate 1, the front of the first filter box 201 is movably connected to a first box door 208 through a hinge, and a lock is arranged on the right side of the first box door 208, the front of the second filter box 210 is movably connected to a second box door 212 through a hinge, and a lock is arranged on the left side of the second box door 212, the top of the left side of the first filter box 201 is connected to a liquid adding pipe 205, and a rotary cover is arranged on the left end of the liquid adding pipe 205, the bottom of the first filter box 201 is connected to a drain pipe 215, the inner cavity of the drain pipe 215 is provided with a solenoid valve 216, the left side of the first filter box 201 is connected to an air inlet pipe 202, A support frame 203 is fixedly installed on the top of a filter box 201, and a first electric push rod 204 is fixedly installed on the top of the inner cavity of the support frame 203, and a piston 206 is fixedly installed on the output end of the first electric push rod 204. A filter screen plate 207 is slidably connected to the inner cavity of the first filter box 201, and a connecting pipe 209 is connected to the right side of the first filter box 201. A fan 211 is fixedly installed on the left side of the second filter box 210, and the input end of the fan 211 is connected to the connecting pipe 209, and the output end of the fan 211 is connected to the second filter box 210 through a pipeline. An activated carbon screen plate 214 is slidably connected to the inner cavity of the second filter box 210, and the number of activated carbon screen plates 214 is three. Sliding grooves used in conjunction with the activated carbon screen plate 214 are provided at the upper and lower ends of the inner cavity of the second filter box 210, and an exhaust pipe 213 is connected to the right side of the second filter box 210.

[0036] In this embodiment: by setting up the purification mechanism 2, the exhaust gas can be purified with good purification effect. By opening the rotary cover, the purification liquid can be added into the first filter box 201 through the liquid adding pipe 205. The first box door 208 is opened by the lock, and the impurities on the top of the filter mesh plate 207 can be cleaned. The second box door 212 is opened by the lock, and the activated carbon mesh plate 214 can be conveniently pulled out and replaced. The three activated carbon mesh plates 214 can perform triple filtration on the air to improve the purification effect. The sliding groove is convenient for limiting the activated carbon mesh plate 214.

[0037] Embodiment 2:

[0038] Reference Figure 1 , Figure 2 and Figure 6A moving mechanism 3 is provided at the bottom of the base plate 1, and the moving mechanism 3 includes a moving box 301, and the moving box 301 is fixedly connected to the base plate 1. A second electric push rod 302 is fixedly installed on the top of the inner cavity of the moving box 301, and a cross plate 303 is fixedly installed on the output end of the second electric push rod 302. Guide sliders are fixedly installed on the left and right sides of the cross plate 303. A guide slide groove is opened in the inner cavity of the moving box 301, and a universal wheel 304 is fixedly installed on the output end of the cross plate 303. A controller 4 is provided on the front of the base plate 1, and a battery box 5 is provided on the left side of the base plate 1.

[0039] In this embodiment: by setting up a moving mechanism 3, in which the extension and retraction of the second electric push rod 302 are controlled, the universal wheel 304 can be pushed out and retracted, thereby facilitating the movement of the device. The guide slider is slidably connected to the guide slide groove, which can guide the cross plate 303, so that the cross plate 303 is more stable when moving up and down. The controller 4 is used to control the switches of various electrical appliances, and the batteries in the battery box 5 provide backup power for the device.

[0040] The implementation principle of the utility model is as follows: when in use, the air inlet pipe 202 is connected to the exhaust gas of the production equipment, the exhaust gas enters the first filter box 201, the purification liquid in the first filter box 201 can filter the exhaust gas, the fan 211 is turned on to draw the exhaust gas along the connecting pipe 209, and then sent to the second filter box 210, the activated carbon mesh plate 214 can further filter the exhaust gas, and the air is then discharged along the exhaust pipe 213, and the first electric push rod 204 is controlled to push the piston 206 to move downward, so as to compress the purification liquid. Open the solenoid valve 216, and the purified liquid is discharged along the drain pipe 215. The filter screen 207 can filter impurities. Open the first box door 208 to clean the impurities. Open the second box door 212 to facilitate the removal and replacement of the activated carbon screen 214. Control the second electric push rod 302 to extend and push the cross plate 303 to move downward. The cross plate 303 drives the universal wheel 304 to move downward. The universal wheel 304 contacts the ground to facilitate the movement of the device. Control the second electric push rod 302 to retract and retract the universal wheel 304.

[0041] The above are all preferred embodiments of the present utility model, and are not intended to limit the protection scope of the present utility model. Therefore, any equivalent changes made based on the structure, shape, and principle of the present utility model should be included in the protection scope of the present utility model.

Claims

1. A semiconductor waste gas purification device, comprising a base plate (1), characterized in that: A purification mechanism (2) is arranged on the top of the bottom plate (1), and the purification mechanism (2) comprises a first filter box (201) and a second filter box (210). The first filter box (201) and the second filter box (210) are both fixedly connected to the bottom plate (1). The bottom of the first filter box (201) is connected to a drain pipe (215), and the inner cavity of the drain pipe (215) is provided with a solenoid valve (216). The left side of the first filter box (201) is connected to an air intake pipe (202). A support frame (203) is fixedly installed on the top of the first filter box (201), and a first electric push rod (204) is fixedly installed on the top of the inner cavity of the support frame (203). , a piston (206) is fixedly installed on the output end of the first electric push rod (204), a filter screen plate (207) is slidably connected to the inner cavity of the first filter box (201), a connecting pipe (209) is connected to the right side of the first filter box (201), a fan (211) is fixedly installed on the left side of the second filter box (210), the input end of the fan (211) is connected to the connecting pipe (209), the output end of the fan (211) is connected to the second filter box (210) through a pipeline, an activated carbon screen plate (214) is slidably connected to the inner cavity of the second filter box (210), and an exhaust pipe (213) is connected to the right side of the second filter box (210); A moving mechanism (3) is provided at the bottom of the base plate (1), and the moving mechanism (3) comprises a moving box (301), and the moving box (301) is fixedly connected to the base plate (1), and a second electric push rod (302) is fixedly installed at the top of the inner cavity of the moving box (301), and a transverse plate (303) is fixedly installed at the output end of the second electric push rod (302), and a universal wheel (304) is fixedly installed at the output end of the transverse plate (303).

2. The semiconductor waste gas purification device according to claim 1, characterized in that: The top of the left side of the first filter box (201) is connected to a liquid adding pipe (205), and a screw cap is provided at the left end of the liquid adding pipe (205).

3. The semiconductor waste gas purification device according to claim 1, characterized in that: The front side of the first filter box (201) is movably connected to a first box door (208) via a hinge, and a lock is provided on the right side of the first box door (208).

4. The semiconductor waste gas purification device according to claim 1, characterized in that: The front side of the second filter box (210) is movably connected to a second box door (212) via a hinge, and a lock is provided on the left side of the second box door (212).

5. The semiconductor waste gas purification device according to claim 1, characterized in that: The number of the activated carbon mesh plates (214) is three, and the upper and lower ends of the inner cavity of the second filter box (210) are provided with sliding grooves for use with the activated carbon mesh plates (214).

6. The semiconductor waste gas purification device according to claim 1, characterized in that: Guide sliding blocks are fixedly mounted on both the left and right sides of the transverse plate (303), and a guide sliding groove is provided in the inner cavity of the moving box (301).

7. The semiconductor waste gas purification device according to claim 1, characterized in that: A controller (4) is arranged on the front of the base plate (1), and a battery box (5) is arranged on the left side of the base plate (1).

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