Anti-blocking waste gas washing device

Abstract

The utility model relates to the technical field of environmental protection equipment, and provides an anti-blocking waste gas washing device which comprises a shell, a gas inlet, a gas outlet, a gas inlet and a gas outlet, the washing liquid system and the spraying system are respectively arranged on the bottom side and the top side in the shell; the circulating system is used for communicating the spraying system with the washing liquid system and enabling the washing liquid to circulate; the liquid discharging system is arranged on the circulating system, and the liquid discharging system is discontinuously opened or closed. When the liquid drainage system is started to drain liquid, the liquid drainage system is arranged on the circulating system, and the liquid drainage mode is under pressure drainage, so that the liquid drainage pipe can be further flushed to prevent blockage; the first liquid outlet can be opened or closed according to the conductivity of the washing liquid, and when the conductivity value is lower than a set value, circulating water enters the spraying system for spraying; when the conductivity value is larger than or equal to the set value, the first valve is opened.

Description

Technical Field

[0001] The utility model relates to the technical field of environmental protection equipment, in particular to an anti-clogging exhaust gas washing device. Background Art

[0002] In the semiconductor industry, the manufacturing process is complex. A large amount of acid, alkali, organic solvents and a variety of special gases are required in the cleaning, photolithography, degumming and drying processes. The entire production process produces a large amount of three wastes with many types.

[0003] At present, the common process for acidic and alkaline waste gas is wet spray washing, which uses the principle of acid-base neutralization reaction to remove it. Sodium hydroxide or sulfuric acid is often used as a washing liquid to convert gaseous pollutants into salts, and the gas is discharged after neutralization meets the standards.

[0004] In the prior art, the common washing device drainage is to open at the bottom of the water tank, and discharge the high-concentration sewage after washing by gravity. This drainage will also discharge the residues and sediments in the water tank of the washing device.

[0005] However, the salts generated during the neutralization process have reached saturated solubility in the washing device and precipitated as crystals. After the washing device has been running for a period of time, it is easy to experience serious crystal scaling and blockage of the drain pipe. Utility Model Content

[0006] The utility model provides an anti-clogging exhaust gas washing device, which is used to solve the defect that most of the drainage systems in the prior art drain liquid by gravity and the drainage pipe is prone to clogging, and achieves the technical effect of avoiding clogging of the drainage pipe.

[0007] The utility model provides an anti-clogging exhaust gas washing device, comprising:

[0008] A shell having a gas inlet on one side and a gas outlet on the other side;

[0009] A washing liquid system and a spraying system are respectively arranged on the bottom side and the top side of the shell;

[0010] A circulation system, used for connecting the spray system with the washing liquid system and circulating the washing liquid;

[0011] The drainage system is arranged on the circulation system, and the drainage system is opened or closed intermittently.

[0012] According to an anti-clogging exhaust gas washing device provided by the utility model, the drainage system includes:

[0013] Conductivity meter, used to detect the conductivity of the washing liquid at the location;

[0014] A first liquid discharge port is arranged on the circulation system;

[0015] The first valve is arranged at the first liquid discharge port, and the first valve is used to open or close based on the detection result of the conductivity meter.

[0016] According to an anti-clogging exhaust gas washing device provided by the utility model, the first valve includes an electric valve or a manual valve.

[0017] According to an anti-clogging exhaust gas washing device provided by the utility model, the circulation system includes:

[0018] A circulation pump, one end of which is connected to the washing liquid system;

[0019] A connecting pipe is used to connect the circulation pump and the spray system; the drain system is arranged on the connecting pipe.

[0020] According to an anti-clogging exhaust gas washing device provided by the utility model, the circulating pumps include two, the connecting pipes include a main pipe and a branch pipe, each of the circulating pumps is connected to the branch pipe one by one, one end of the main pipe is connected to the branch pipe, and the other end of the main pipe is connected to the spray system, and the drainage system is arranged on the main pipe.

[0021] According to an anti-clogging exhaust gas washing device provided by the utility model, a second liquid discharge port is provided at the washing liquid system, and a second valve is provided at the second liquid discharge port.

[0022] According to an anti-clogging exhaust gas washing device provided by the utility model, the washing liquid system includes a dosing device and a water replenishing device, and the dosing device and the water replenishing device are both arranged on the shell.

[0023] According to the utility model, an anti-clogging exhaust gas washing device also includes a pH meter, which is arranged inside the shell, and the pH meter is used to detect the pH value of the washing liquid.

[0024] According to an anti-clogging exhaust gas washing device provided by the utility model, a plurality of viewing windows are further provided on the shell, and the viewing windows are used to observe the interior of the shell.

[0025] According to the anti-clogging exhaust gas washing device provided by the utility model, it also includes an ultrasonic liquid level meter, which is arranged inside the shell, and the ultrasonic liquid level meter is used to detect the liquid level of the washing liquid.

[0026] The utility model provides an anti-clogging exhaust gas washing device, which is provided with a gas inlet on one side of a shell body, and a gas outlet on the other side; the washing liquid system and the spray system are respectively arranged on the bottom side and the top side inside the shell body, respectively providing washing liquid and spray for the exhaust gas, the circulation system connects the spray system and the washing liquid system and circulates the washing liquid, the drainage system is arranged on the circulation system, the drainage system is intermittently opened or closed, and when the drainage system is opened to drain, since the drainage system is arranged on the circulation system, the drainage method is pressurized drainage, and the drainage pipe can be further flushed to prevent clogging.

[0027] In addition, the first drain port can be opened or closed according to the conductivity of the washing liquid. When the conductivity value is lower than the set value, the circulating water enters the spray system for spraying; when the conductivity value is greater than or equal to the set value, it means that the ion concentration in the washing liquid is too high, which may affect the washing effect or require replacement of new washing liquid. The first valve opens and part of the washing liquid is discharged from the first drain port. At the same time, the washing liquid system is replenished with new washing liquid until the conductivity value returns to the normal range, at which time the first valve is closed and the discharge stops. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0029] Figure 1 It is a structural schematic diagram of the anti-clogging exhaust gas washing device provided by the utility model;

[0030] Figure 2 This is a schematic diagram of the connection structure of the first valve provided by the utility model;

[0031] Reference numerals:

[0032] 1. Shell; 2. Gas inlet; 3. Gas outlet; 4. Washing liquid system; 5. Spraying system; 6. Circulation system; 7. Drainage system; 8. PH meter; 9. Window;

[0033] 71. Conductivity meter; 72. First liquid discharge port; 73. Electric valve; 74. Manual valve;

[0034] 61. Circulation pump; 62. Main pipe; 63. Branch pipe;

[0035] 41. Second liquid discharge port; 42. Dosing device; 43. Water replenishing device. DETAILED DESCRIPTION

[0036] In order to make the purpose, technical solution and advantages of the utility model clearer, the technical solution of the utility model will be described clearly and completely in conjunction with the drawings in the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0037] In the description of the embodiments of the present utility model, it should be noted that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the embodiments of the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the embodiments of the present utility model. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0038] Combine the following Figure 1 to Figure 2 The utility model is described as an anti-clogging exhaust gas washing device.

[0039] like Figure 1 As shown, the anti-clogging exhaust gas washing device provided by the utility model includes a shell 1, a washing liquid system 4, a spray system 5 and a circulation system 6. The shell 1 is used to accommodate and treat exhaust gas. A gas inlet 2 is provided on one side of the shell 1, which is where the exhaust gas enters the device. A gas outlet 3 is provided on the other side of the shell 1, which is where the treated exhaust gas is discharged. The washing liquid system 4 is a place for storing and replenishing washing liquid, which is a key substance for washing exhaust gas. On the top side of the shell 1, a spray system 5 is provided. The function of the spray system 5 is to evenly spray the washing liquid onto the incoming exhaust gas, thereby achieving exhaust gas washing.

[0040] In order to maintain the circulation of washing liquid between the spray system 5 and the washing liquid system 4, a circulation system 6 is provided; the function of the circulation system 6 is to recycle the washing liquid used by the spray system 5 and send it back to the washing liquid system 4 for further processing, thereby realizing the recycling of the washing liquid, which not only improves the utilization rate of the washing liquid, but also reduces the cost. The drainage system 7 is provided on the circulation system 6, and the drainage system 7 is opened or closed intermittently. When the washing liquid needs to be discharged, the drainage system 7 will be opened to discharge the washing liquid; when it is not necessary to discharge, it will be closed to avoid the waste of washing liquid. When the drainage system 7 is opened for drainage, since the drainage system 7 is provided on the circulation system 6, the drainage method is pressure drainage, and the drainage pipe can be further flushed to prevent blockage.

[0041] In a feasible embodiment of the utility model, the drainage system 7 includes a conductivity meter 71, a first drainage port 72 and a first valve. The conductivity meter 71 is used to detect the conductivity value of the washing liquid at the location; the conductivity value is a physical quantity that measures the conductivity of the solution and is closely related to the ion concentration in the solution. By monitoring the conductivity of the washing liquid, the concentration change of the ions in the washing liquid can be indirectly understood, so as to judge the use status of the washing liquid and whether it needs to be discharged. The conductivity meter 71 and the first drainage port 72 are arranged on the circulation system 6; the first drainage port 72 is used to discharge the washing liquid; the first valve is arranged at the first drainage port 72, and the first valve is used to open or close based on the detection result of the conductivity meter.

[0042] It should be understood that the conductivity meter 71 can measure the conductivity value, and a conductivity setting value can be set. When the conductivity value is lower than the setting value, the washing liquid enters the spray system 5 for spraying; when the conductivity value is greater than or equal to the setting value, it means that the ion concentration in the washing liquid is too high, which may affect the washing effect or need to be replaced with a new washing liquid. The first valve is opened and part of the washing liquid is discharged from the first drain port 72. When the conductivity value returns to the normal range, the first valve is closed and the discharge is stopped. Generally speaking, for a washing device that processes acidic gases, the conductivity setting value is between 5-20ms / cm, and for a washing device that processes alkaline gases, the conductivity setting value is between 20-40ms / cm.

[0043] like Figure 2 As shown, in a feasible embodiment of the utility model, the first valve includes an electric valve 73 and a manual valve 74, and the outlet end of the first liquid discharge port is connected to the waste liquid treatment station. Among them, only the electric valve 73 or only the manual valve 74 can be set, and the open state at the first liquid discharge port 72 is achieved by the electric valve 73 or the manual valve 74. When the electric valve 73 and the manual valve 74 are set at the same time, the manual valve is generally in a normally open state, and the electric valve 73 is closed. When the conductivity value is greater than the conductivity setting value, the electric valve 73 is opened. When the electric valve 73 fails, the drainage of the first liquid discharge port can be achieved through the manual valve 74. In addition, when the entire equipment is under maintenance, it can also be closed by the manual valve 74.

[0044] In a feasible embodiment of the utility model, the circulation system 6 is a key part of the anti-clogging exhaust gas washing device, which ensures the smooth flow of washing liquid between the washing liquid system 4 and the spray system 5, thereby realizing the recycling of washing liquid. The circulation system 6 includes a circulation pump 61 and a connecting pipe. The circulation pump 61 is the core component of the circulation system. One end of the circulation pump 61 is connected to the washing liquid system 4; the circulation pump 61 extracts the washing liquid from the washing liquid system 4 by providing power and pushes it to the spray system 5. In this way, the washing liquid sprayed by the spray system 5 can be returned to the washing liquid system 4 again through the circulation system to form a closed circulation loop. The connecting pipe is used to connect the circulation pump 61 and the spray system 5; the connecting pipe is provided with a drainage system 7. Through the coordinated work of the circulation pump 61 and the connecting pipe, the circulation system 6 realizes the circulation and reuse of the washing liquid, improves the utilization rate of the washing liquid, and reduces the operating cost.

[0045] In a feasible embodiment of the utility model, the circulation pump 61 includes two, the connecting pipe includes a main pipe 62 and a branch pipe 63, each circulation pump 61 is connected to the branch pipe 63 in a one-to-one correspondence, one end of the main pipe 62 is connected to the branch pipe 63, and the other end of the main pipe 62 is connected to the spray system 5, and the main pipe 62 is provided with a drainage system 7. The two circulation pumps 61 can be arranged at different positions in the washing liquid system 4, which not only improves the circulation efficiency, but also improves the uniformity of the circulating water. In addition, when one circulation pump 61 fails or needs maintenance, the other circulation pump 61 can still work normally, thereby ensuring the continuous operation of the whole system. The branching structure allows each circulation pump 61 to work independently without interfering with each other. At the same time, the main pipe 62 is responsible for collecting the washing liquid in the two branch pipes 63 and transporting it to the spray system 5. This design not only simplifies the pipeline layout, but also makes the circulation of the washing liquid smoother.

[0046] In summary, the stability and reliability of the system are improved by adopting two circulation pumps 61 and a branched pipeline structure; at the same time, a drainage system 7 is provided on the main pipe 62, so that the discharge of the washing liquid is more accurate and efficient.

[0047] In addition, a filtering device may be provided at the bottom of the circulation pump 61 to intercept the residues and sediments in the washing liquid system from entering the drainage system. The circulation pump 61 has a positive pressure circulation and can flush the substances in the drainage pipe without clogging.

[0048] In a feasible embodiment of the utility model, a second drain port 41 is provided at the washing liquid system 4, and a second valve is provided at the second drain port 41. The second drain port 41 is usually used for draining during device maintenance, and the second drain port 41 drains liquid by gravity. It can be understood that the second drain port 41 is provided at the bottom side wall of the housing 1, and when the second valve is opened, the washing liquid in the washing liquid system is directly discharged under the action of gravity. It should be noted that the second drain port also needs to be connected to the waste liquid treatment station.

[0049] In a feasible embodiment of the utility model, the washing liquid system 4 includes a dosing device 42, a water replenishing device 43 and a pH meter 8, and the dosing device 42 and the water replenishing device 43 are both arranged on the shell 1. The dosing device 42 is an important component of the washing liquid system 4, which is responsible for adding the required reagents to the system. These reagents usually have specific chemical properties and can react with harmful substances in the exhaust gas to achieve the purpose of purification. The water replenishing device 43 is used to replenish the water required by the system. During the exhaust gas washing process, the washing liquid will gradually be consumed, so it is necessary to continuously replenish water to maintain the normal operation of the system. The water replenishing device 43 is usually connected to a water source, and water can be automatically or manually replenished according to the needs of the system. The pH meter 8 is arranged inside the shell 1, and the pH meter 8 is used to detect the pH value of the washing liquid.

[0050] It should be understood that the pH value can be set to 10-13. When the pH in the water tank is lower than the set value, the washing liquid system 4 is started to inject washing liquid, sodium hydroxide or potassium hydroxide solution. When the pH value reaches the set value, the addition of the drug is stopped.

[0051] In a feasible embodiment of the present invention, a plurality of windows 9 are further provided on the housing 1, and the windows 9 are used to observe the interior of the housing 1. The provision of the windows 9 allows the operator to directly observe the operation inside the housing 1, thereby better monitoring and managing the exhaust gas scrubbing process.

[0052] The viewing window 9 is usually made of a transparent material, such as glass or transparent plastic, to ensure that the operator can clearly see the situation inside the housing 1. Through the viewing window 9, the operator can observe the storage and flow of the washing liquid in the washing liquid system 4, the spraying effect of the nozzles in the spray system 5, and the flow state of the exhaust gas in the housing 1.

[0053] In a feasible embodiment of the utility model, an ultrasonic liquid level meter is also included, which is arranged inside the housing 1, and the ultrasonic liquid level meter is used to detect the liquid level of the washing liquid. The ultrasonic liquid level meter uses the principle of ultrasound to measure the liquid level. Specifically, it emits high-frequency ultrasonic pulses, which are reflected back after encountering the surface of the washing liquid and are received by the ultrasonic liquid level meter. By measuring the emission and reception time of the ultrasonic pulses, the liquid level height of the washing liquid can be accurately calculated. The ultrasonic liquid level meter also has the characteristics of non-contact measurement, which means that it will not cause pollution or interference to the washing liquid, ensuring the accuracy and reliability of the measurement.

[0054] It should be noted that in the housing 1, from the gas inlet 2 to the gas outlet 3, there are a treatment layer, a buffer layer and a demisting layer, and these structures are the same as those in the prior art and will not be described in detail here.

[0055] The anti-clogging exhaust gas washing device provided by the utility model effectively solves the problem of blockage in the drainage pipe by changing the position and method of drainage and adopting pressurized discharge. Moreover, the opening and closing of the first valve can be controlled according to the conductivity measured by the conductivity meter to realize the discharge of circulating water on demand, so that the pH value of the circulating water is always within the normal range.

[0056] In the description of the embodiments of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present utility model can be understood according to specific circumstances.

[0057] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "mode", "specific mode", or "some modes" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or mode are included in at least one embodiment or mode of the utility model embodiment. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or mode. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or modes in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or modes described in this specification and the features of the different embodiments or modes, without contradiction.

[0058] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the utility model.

Claims

1. An anti-clogging exhaust gas washing device, characterized in that: include: A shell (1) is provided with a gas inlet (2) on one side and a gas outlet (3) on the other side; A washing liquid system (4) and a spray system (5) are respectively arranged on the bottom side and the top side of the shell (1); a circulation system (6), used for connecting the spray system (5) with the washing liquid system (4) and circulating the washing liquid; The drainage system (7) is arranged on the circulation system (6), and the drainage system (7) is opened or closed intermittently.

2. The anti-clogging exhaust gas washing device according to claim 1, characterized in that: The drainage system (7) comprises: A conductivity meter (71) for detecting the conductivity of the washing liquid at a location; A first liquid discharge port (72) is provided on the circulation system (6); A first valve is arranged at the first liquid discharge port (72), and the first valve is used to open or close based on the detection result of the conductivity meter (71).

3. The anti-clogging exhaust gas washing device according to claim 2, characterized in that: The first valve comprises an electric valve (73) and / or a manual valve (74).

4. The anti-clogging exhaust gas washing device according to claim 1, characterized in that: The circulation system (6) comprises: A circulation pump (61), one end of which is connected to the washing liquid system (4); A connecting pipe is used to connect the circulation pump (61) and the spray system (5); the drain system (7) is arranged on the connecting pipe.

5. The anti-clogging exhaust gas washing device according to claim 4, characterized in that: The circulation pumps (61) include two, the connecting pipes include a main pipe (62) and a branch pipe (63), each of the circulation pumps (61) is connected to the branch pipe (63) in a one-to-one correspondence, one end of the main pipe (62) is connected to the branch pipe (63), the other end of the main pipe (62) is connected to the spray system (5), and the main pipe (62) is provided with the drainage system (7).

6. The anti-clogging exhaust gas washing device according to claim 1, characterized in that: The washing liquid system (4) is provided with a second liquid discharge port (41), and the second liquid discharge port (41) is provided with a second valve.

7. The anti-clogging exhaust gas washing device according to claim 1, characterized in that: The cleaning liquid system (4) comprises a dosing device (42) and a water replenishing device (43), and the dosing device (42) and the water replenishing device (43) are both arranged on the shell (1).

8. The anti-clogging exhaust gas washing device according to claim 1, characterized in that: It also comprises a pH meter (8) which is arranged inside the housing (1), and the pH meter (8) is used to detect the pH value of the washing liquid.

9. The anti-clogging exhaust gas washing device according to claim 1, characterized in that: The shell (1) is also provided with a plurality of viewing windows (9), and the viewing windows (9) are used to observe the interior of the shell (1).

10. The anti-clogging exhaust gas washing device according to claim 1, characterized in that: It also comprises an ultrasonic liquid level meter, which is arranged inside the housing (1) and is used to detect the liquid level of the washing liquid.

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