Powder and liquid mixing device in semiconductor industry

Abstract

The utility model discloses a powder and liquid mixing device in the semiconductor industry. The device comprises a powder feeding mechanism, a liquid feeding mechanism, a stirring and mixing mechanism, a mixture density detection mechanism and a mixture viscosity detection mechanism. According to the device, powder is measured through the weighing module, liquid is measured through the weighing module and the mass flow meter, the viscometer is additionally arranged in the device, the mass flow meter is used for monitoring the density value of a mixed material in real time, the viscometer is used for monitoring the viscosity value of the mixed material in real time, and it is guaranteed that the proportion of the material is accurate according to the monitored numerical values.

Description

Technical Field

[0001] The utility model relates to the technical field of liquid feeding, in particular to a mixing device for powder and liquid in the semiconductor industry. Background Art

[0002] Mixing and stirring of liquids and powders is a common operation in many industrial and laboratory processes. Its purpose is to uniformly mix two or more substances to achieve chemical reactions, prepare mixtures or suspensions, etc. The technical background of this mixing process involves multiple disciplines such as physics, chemistry, and engineering.

[0003] Stirring principle: The basic principle of mixing is to apply external forces (such as mechanical stirring, air flow stirring, or magnetic stirring) to create flow and vortex in the liquid, thereby dispersing solid particles into the liquid. The stirring effect depends on the type and speed of the stirrer, the viscosity of the liquid, and the properties of the solid particles.

[0004] Agitator type: Common agitator types include propeller agitators, turbine agitators, magnetic agitators, etc. Choosing the appropriate agitator type requires considering factors such as the viscosity of the liquid, the size and concentration of the solid particles, and the purpose of the agitation.

[0005] Liquid viscosity: The viscosity of a liquid depends on the stirring speed and force of the equipment. High-viscosity liquids require greater stirring force and slower stirring speeds to ensure uniform dispersion of solid particles. For low-viscosity liquids, high-speed stirring can be used to achieve rapid mixing.

[0006] Solid Particle Properties: Solid particle properties such as size, shape, density, and wettability affect the uniformity and speed of mixing. Smaller particles generally disperse more easily in liquids, but may also be more likely to agglomerate. Furthermore, the wettability of solid particles affects their interaction with liquids.

[0007] Stirring time and speed: Stirring time and speed need to be adjusted according to specific circumstances. Stirring too long or too fast may cause solid particles to break or liquid emulsification, while stirring too short or too slow may not achieve a sufficient mixing effect.

[0008] Mixing effect evaluation: To ensure the uniformity of mixing, the mixing effect can be evaluated by sampling analysis, visual inspection or other appropriate methods. This helps to determine whether the mixing time and conditions meet the requirements.

[0009] In short, the technical background of mixing powders and liquids involves knowledge from multiple disciplines, and it is necessary to comprehensively consider factors such as the physical and chemical properties of powders and liquids, mixing equipment and process parameters to achieve a good mixing effect.

[0010] In view of the material characteristics, the mixing device of powder and liquid needs to solve the following problems: (1) The environment must be clean (10,000-level clean area), and the powder must be prevented from diffusing into the ambient air during the mixing process to avoid environmental pollution; (2) The powder in the mixture is hard and the liquid has high viscosity, and the two are incompatible. After mixing, it is a suspension, and the appropriate device must be selected according to the material characteristics; (3) After mixing, it is a suspension, and it is necessary to consider how to prevent the mixture from settling; (4) The ratio requires high precision, and accurate measurement is required for both powder and liquid loading, and a measurement error prevention function is added during the measurement process; (5) The density and viscosity of the mixture must be monitored in real time during the mixing process to ensure that the mixture meets the parameter values ​​required by the customer. Utility Model Content

[0011] The present application provides a device for mixing powder and liquid in the semiconductor industry to solve the problems of powder diffusion causing pollution, easy precipitation of the mixed material, and high ratio accuracy requirements in liquid feeding.

[0012] In an embodiment of the present application, a device for mixing powder and liquid in the semiconductor industry is provided, wherein the device includes a powder feeding mechanism, a liquid feeding mechanism, a stirring and mixing mechanism, a mixture density detection mechanism, and a mixture viscosity detection mechanism;

[0013] The stirring and mixing mechanism includes a stirring tank, a driving mechanism, a stirring shaft, a stirring blade and a support bearing, wherein the stirring shaft is fixed in the stirring tank by a support bearing, the stirring blade is arranged on the stirring shaft, the driving mechanism is arranged above the stirring tank, the driving mechanism includes a variable frequency motor, a reducer and a rigid coupling connected in sequence, the rigid coupling is connected to the stirring shaft, the upper surface of the stirring tank is provided with a liquid feed port, a tank body circulating liquid feed port and a viscometer circulating feed port, and the bottom of the stirring tank is provided with a mixed material discharge port;

[0014] The powder feeding mechanism includes a powder storage and weighing bin, a powder discharger and a powder weighing module. The powder storage and weighing bin is provided with a powder feed port, the powder storage and weighing bin is connected to the powder weighing module, the weighing module is arranged above the mixing tank, the powder discharger is arranged at the lower part of the powder storage and weighing bin, and the powder discharge port of the powder storage and weighing bin is connected to the mixing tank;

[0015] The liquid feeding mechanism includes a liquid feeding pump and a liquid mass flow meter, the liquid raw material is introduced into the inlet of the liquid feeding pump, the outlet of the liquid feeding pump is connected to the liquid feeding port through a pipeline, and the liquid mass flow meter is arranged on the pipeline between the outlet of the liquid feeding pump and the liquid feeding port;

[0016] The mixture density detection mechanism includes a mixture circulation pump and a mixture mass flow meter, the inlet of the mixture circulation pump is connected to the mixture discharge port, the outlet of the mixture circulation pump is connected to the tank body circulating liquid feed port through a pipeline, and the mixture mass flow meter is arranged on the pipeline between the outlet of the mixture circulation pump and the tank body circulating liquid feed port;

[0017] The mixture viscosity detection mechanism includes a viscosity testing pipeline pump, a viscometer and a viscometer detection device. The inlet of the viscosity testing pipeline pump is connected to the mixture discharge port, and the outlet of the viscosity testing pipeline pump is connected to the viscometer circulation feed port through a pipeline. The viscometer and the viscometer detection device are arranged on the pipeline between the outlet of the viscosity testing pipeline pump and the viscometer circulation feed port.

[0018] Furthermore, the powder storage and weighing bin is provided with a bin wall vibrator.

[0019] Furthermore, a manhole and a breathing hole are provided on the surface of the powder storage and weighing bin.

[0020] Furthermore, a sample liquid taking port is provided at the lower portion of the stirring tank.

[0021] Furthermore, a maintenance manhole is provided on the surface of the mixing tank.

[0022] Furthermore, a radar level gauge is provided on the stirring tank.

[0023] Furthermore, a pressure gauge is provided on the pipeline between the outlet of the viscosity testing pipeline pump and the circulation feed port of the viscometer.

[0024] The present application provides a mixing device for powder and liquid in the semiconductor industry, which has the following advantages: a closed mixing device is used during the mixing process to reduce the contact between the powder and the ambient air, and a filter is installed at the exhaust port of the equipment; the material has high hardness, the powder in the mixed material has high hardness, the liquid has high viscosity, and the two are incompatible, and the mixture is a suspension. According to the material characteristics, the material is selected to be mirror stainless steel; the mixed material is a suspension, has high viscosity and is easy to precipitate, and the mixing equipment needs to be stirred continuously, and a liquid circulation pipeline needs to be added to keep the mixed material in a flowing state; a screw pump is used as the pump for conveying the mixed liquid; the powder is measured by a weighing module, and the liquid is measured by a weighing module and a mass flowmeter, and a viscometer is added to the device, and the mass flowmeter monitors the density value of the mixed material in real time, and the viscometer monitors the viscosity value of the mixed material in real time, and the material ratio can be ensured to be accurate according to the monitored values; the stirring drive of the material mixing is driven by a variable frequency motor, which is convenient for adjusting the speed. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1A structural diagram of a device for mixing powder and liquid in the semiconductor industry provided by one embodiment of the utility model;

[0026] Figure 2 A front view of a device for mixing powder and liquid in the semiconductor industry provided by one embodiment of the utility model;

[0027] Figure 3 A top view of a device for mixing powder and liquid in the semiconductor industry provided by one embodiment of the utility model.

[0028] In the figure: powder storage and weighing bin 1, manhole 2, powder feed port 3, bin wall vibrator 4, powder discharger 5, powder weighing module 6, mixture discharge port 7, viscometer detection device 8, reducer 9, rigid coupling 10, mechanical seal group 11, frequency conversion motor 12, stirring tank 13, stirring blade 14, stirring shaft 15, support bearing 16, sample liquid collection port 17, maintenance manhole 18, breathing port 19, radar level gauge 20, liquid feed port 21, tank body circulation liquid feed port 22, viscometer circulation feed port 23, viscometer 24, pressure gauge 25, liquid feeding pump 26, liquid mass flowmeter 27, mixture circulation pump 28, mixture mass flowmeter 29, viscosity testing pipeline pump 30. DETAILED DESCRIPTION

[0029] The present invention is further described in detail below through specific embodiments in conjunction with the accompanying drawings. Similar elements in different embodiments use associated similar element numbers. In the following embodiments, many detailed descriptions are intended to enable the present application to be better understood. However, those skilled in the art can easily recognize that some of the features can be omitted in different situations, or can be replaced by elements, materials, and methods. In some cases, some operations related to the present application are not shown or described in the specification. This is to avoid the core part of the present application being overwhelmed by too much description. For those skilled in the art, it is not necessary to describe these related operations in detail. They can fully understand the related operations based on the description in the specification and the general technical knowledge in the art.

[0030] In addition, the features, operations, or characteristics described in the specification may be combined in any appropriate manner to form various embodiments. Furthermore, the steps or actions in the method description may be reordered or adjusted in a manner readily apparent to those skilled in the art. Therefore, the various sequences in the specification and drawings are provided solely for the purpose of clearly describing a particular embodiment and are not intended to be mandatory, unless otherwise specified.

[0031] The embodiment of the present invention provides a device for mixing powder and liquid in the semiconductor industry, such as Figure 1 、 Figure 2 and Figure 3 As shown, the device includes a powder feeding mechanism, a liquid feeding mechanism, a stirring and mixing mechanism, a mixture density detection mechanism and a mixture viscosity detection mechanism.

[0032] The stirring and mixing mechanism includes a stirring tank 13, a driving mechanism, a stirring shaft 15, a stirring blade 14 and a support bearing 16. The stirring shaft 15 is fixed in the stirring tank 13 through the support bearing 16. The stirring blade 14 is arranged on the stirring shaft 15. The driving mechanism is arranged above the stirring tank 13. The driving mechanism includes a variable frequency motor 12, a reducer 9 and a rigid coupling 10 connected in sequence. The rigid coupling 10 is connected to the stirring shaft 15. The driving mechanism and the stirring tank 13 are sealed by a mechanical sealing group 11. The upper surface of the stirring tank 13 is provided with a liquid feed port 21, a tank body circulation liquid feed port 22 and a viscometer circulation feed port 23. The bottom of the stirring tank 13 is provided with a mixed material discharge port 7.

[0033] The powder feeding mechanism includes a powder storage and weighing bin 1, a powder feeder 5, and a powder weighing module 6. The powder storage and weighing bin 1 is provided with a powder feed port 3. The powder storage and weighing bin 1 is connected to the powder weighing module 6. The weighing module is arranged above the mixing tank 13. The powder feeder 5 is arranged at the bottom of the powder storage and weighing bin 1. The powder discharge port of the powder storage and weighing bin 1 is connected to the mixing tank 13. In this embodiment, a bin wall vibrator 4 is provided on the powder storage and weighing bin 1. A manhole 2 and a breathing port 19 are provided on the surface of the powder storage and weighing bin 1. In this embodiment, a sample liquid collection port 17 is provided at the bottom of the mixing tank 13. A radar liquid level meter 20 is provided on the mixing tank 13. An inspection manhole 18 is provided on the surface of the mixing tank 13.

[0034] The liquid feeding mechanism includes a liquid feeding pump 26 and a liquid mass flowmeter 27. The liquid raw material is introduced into the inlet of the liquid feeding pump 26, and the outlet of the liquid feeding pump 26 is connected to the liquid feed port 21 through a pipeline. The liquid mass flowmeter 27 is arranged on the pipeline between the outlet of the liquid feeding pump 26 and the liquid feed port 21.

[0035] The mixture density detection mechanism includes a mixture circulation pump 28 and a mixture mass flow meter 29. The inlet of the mixture circulation pump 28 is connected to the mixture discharge port 7, and the outlet of the mixture circulation pump 28 is connected to the tank circulation liquid feed port 22 through a pipeline. The mixture mass flow meter 29 is arranged on the pipeline between the outlet of the mixture circulation pump 28 and the tank circulation liquid feed port 22.

[0036] The mixture viscosity detection mechanism includes a viscosity testing pipeline pump 30, a viscometer 24, and a viscometer detection device 8. The inlet of the viscosity testing pipeline pump 30 is connected to the mixture discharge port 7, and the outlet of the viscosity testing pipeline pump 30 is connected to the viscometer circulation feed port 23 via a pipeline. The viscometer 24 and the viscometer detection device 8 are arranged on the pipeline between the outlet of the viscosity testing pipeline pump 30 and the viscometer circulation feed port 23. A pressure gauge 25 is provided on the pipeline between the outlet of the viscosity testing pipeline pump 30 and the viscometer circulation feed port 23.

[0037] The embodiment of the present invention provides a device for mixing powder and liquid in the semiconductor industry. The material mixing process is as follows:

[0038] 1. The powder enters the powder storage and weighing bin 1 through the powder feed port 3;

[0039] 2. Start the liquid feeding pump 26, add a certain amount of liquid through the pipeline and the liquid mass flow meter 27, and enter the mixing tank 13 through the liquid feed port 21;

[0040] 3. Start the variable frequency motor 12, and drive the stirring shaft 15 and the stirring blade 14 to rotate through the reducer 9 and the rigid coupling 10 to stir;

[0041] 4. Start the powder feeder 5 to add powder into the mixing tank 13. Feedback of a fixed amount of powder is given by the powder weighing module 6. The silo wall vibrator 4 is started intermittently to prevent the powder from accumulating in the powder storage weighing silo 1.

[0042] 5. Start the mixture circulation pump 28. The mixture enters through the mixture outlet 7 and enters the mixing tank 13 through the mixture mass flow meter 29 and the tank body circulation liquid feed port 22. At the same time, the mixture mass flow meter 29 monitors the density of the mixture in real time and provides feedback.

[0043] 6. Start the viscosity test pipeline pump 30, and the mixed material enters the viscometer detection device 8 through the pipeline, and then returns to the stirring tank 13 through the viscometer circulation feed port 23. At the same time, the viscometer 24 detects the viscosity of the mixed material in real time and provides feedback.

[0044] The viscosity and density parameters monitored in real time are compared with the required parameters, and a small amount of powder or liquid is added in real time to correct the detection parameters of the mixed material.

[0045] The powder feeder 5, the mixed material circulation pump 28, and the viscosity test pipeline pump 30 are started simultaneously.

[0046] Functions of other components:

[0047] Manhole 2: Inspection port for powder storage and weighing bin 1;

[0048] Support bearing 16: supports the rotation of the stirring shaft 15;

[0049] Sample liquid taking port 17: mixed liquid sample taking port;

[0050] Maintenance manhole 18: maintenance port for inspecting the interior of the mixing tank 13;

[0051] Breathing port 19: release the pressure inside the tank;

[0052] Radar level gauge 20: detects the liquid level in the mixing tank 13 to prevent the tank from being empty or overflowing with material;

[0053] Pressure gauge 25: detects the pipeline pressure in the pipeline between the viscometers.

[0054] The above examples are used to illustrate the present invention, which are only used to help understand the present invention and are not intended to limit the present invention. Those skilled in the art of the present invention can make some simple deductions, modifications or substitutions based on the concept of the present invention.

Claims

1. A mixing device for powder and liquid in the semiconductor industry, characterized in that: The device comprises a powder feeding mechanism, a liquid feeding mechanism, a stirring and mixing mechanism, a mixture density detection mechanism and a mixture viscosity detection mechanism; The stirring and mixing mechanism comprises a stirring tank, a driving mechanism, a stirring shaft, a stirring blade and a supporting bearing, wherein the stirring shaft is fixed in the stirring tank through a supporting bearing, the stirring blade is arranged on the stirring shaft, the driving mechanism is arranged above the stirring tank, the driving mechanism comprises a variable frequency motor, a reducer and a rigid coupling connected in sequence, the rigid coupling is connected to the stirring shaft, a liquid feed port, a tank body circulating liquid feed port and a viscometer circulating feed port are arranged on the upper surface of the stirring tank, and a mixed material discharge port is arranged at the bottom of the stirring tank; The powder feeding mechanism comprises a powder storage weighing bin, a powder feeder and a powder weighing module, the powder storage weighing bin is provided with a powder feed port, the powder storage weighing bin is connected to the powder weighing module, the weighing module is arranged above the stirring tank, the powder feeder is arranged at the lower part of the powder storage weighing bin, and the powder discharge port of the powder storage weighing bin is connected to the stirring tank; The liquid feeding mechanism comprises a liquid feeding pump and a liquid mass flow meter, the liquid raw material is introduced into the inlet of the liquid feeding pump, the outlet of the liquid feeding pump is connected to the liquid feeding port through a pipeline, and the liquid mass flow meter is arranged on the pipeline between the outlet of the liquid feeding pump and the liquid feeding port; The mixture density detection mechanism comprises a mixture circulation pump and a mixture mass flow meter, wherein the inlet of the mixture circulation pump is connected to the mixture discharge port, the outlet of the mixture circulation pump is connected to the tank body circulating liquid feed port through a pipeline, and the mixture mass flow meter is arranged on the pipeline between the outlet of the mixture circulation pump and the tank body circulating liquid feed port; The mixture viscosity detection mechanism includes a viscosity test pipeline pump, a viscometer and a viscometer detection device. The inlet of the viscosity test pipeline pump is connected to the mixture discharge port, and the outlet of the viscosity test pipeline pump is connected to the viscometer circulation feed port through a pipeline. The viscometer and the viscometer detection device are arranged on the pipeline between the outlet of the viscosity test pipeline pump and the viscometer circulation feed port.

2. A semiconductor industry powder and liquid mixing device as claimed in claim 1, characterized in that: The powder material storage weighing bin is provided with a bin wall vibrator.

3. A semiconductor industry powder and liquid mixing device as claimed in claim 1, characterized in that: A manhole and a breathing hole are arranged on the surface of the powder material storage and weighing bin.

4. A semiconductor industry powder and liquid mixing device as claimed in claim 1, characterized in that: A sample liquid taking port is arranged at the lower part of the stirring tank.

5. A semiconductor industry powder and liquid mixing device as claimed in claim 1, characterized in that: A maintenance manhole is arranged on the surface of the mixing tank.

6. A semiconductor industry powder and liquid mixing device as claimed in claim 1, characterized in that: The stirring tank is provided with a radar level meter.

7. A semiconductor industry powder and liquid mixing device as claimed in claim 1, characterized in that: A pressure gauge is arranged on the pipeline between the outlet of the viscosity testing pipeline pump and the circulation feed port of the viscometer.

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