Vertical silicon boat assembling tool

Abstract

The utility model provides a vertical silicon boat assembling tool which comprises a mounting platform and a plurality of supporting frames, the mounting platform is provided with a first through hole, the bottom end of the mounting platform extends towards the direction of the first through hole to form a plurality of supporting plates, the top end of the mounting platform is provided with a plurality of pressing plates, and the pressing plates are detachably connected with the mounting platform through compression bolts. The supporting frame is fixedly connected with the mounting platform, a clamping part is arranged at the other end of the supporting frame, the other end of the supporting frame is universally connected with the clamping part through a universal shaft, and the bottom end of the mounting platform is connected with a plurality of telescopic mechanisms. In the silicon boat assembling process, the lower mounting plate is pressed between the pressing plate and the supporting plate, the levelness of the lower mounting plate is adjusted through the telescopic mechanism, the tooth bar is clamped and fastened in the clamping part, the angle of the clamping part is adjusted through the universal shaft, the perpendicularity of the tooth bar is adjusted, the perpendicularity of the upper mounting plate and the lower mounting plate of the silicon boat is good in the assembling process, and the assembling efficiency is improved. The assembling precision is high, operation is convenient, connecting parts of the parts are not prone to damage, and reliability is high.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing equipment, in particular to a vertical silicon boat assembly tool. Background Art

[0002] The wafer boat is an important carrier used to carry and transport wafers in the diffusion process of semiconductor chip manufacturing. It is mainly composed of two upper and lower mounting plates and a gear rod with several tooth grooves. The tooth grooves at the same height form the wafer bearing grooves, and the wafers are placed in the bearing grooves for storage or transportation. According to the material, the wafer boat can be divided into quartz crystal boat, silicon crystal boat, silicon carbide crystal boat, etc. Quartz crystal boat and silicon carbide crystal boat belong to the one-piece manufacturing method and do not require assembly. The overall length of the silicon boat is relatively large, and the longest can exceed 1200mm. The silicon crystal material has hard and brittle characteristics. According to the manufacturing method, the silicon boat can be divided into two methods: welding and mechanical splicing. Among them, the mechanical splicing method requires specific tooling to assemble the various components.

[0003] The technical solution currently adopted in the prior art is horizontal assembly of the silicon boat, which can lower the center of gravity of the entire silicon boat. However, this solution has the following defects during the assembly process: it is rather troublesome to adjust the verticality of the gear rod and the upper and lower mounting plates, and the horizontal assembly tooling is difficult to ensure the vertical accuracy of the upper and lower mounting plates. In actual operation, the verticality needs to be repeatedly adjusted, and the operation is complicated. Once the verticality is poor, the connecting parts of the components will be broken or damaged, and the reliability is poor. Utility Model Content

[0004] The problem to be solved by the utility model is to provide a vertical silicon boat assembly tool which is easy to operate, safe and reliable and has high precision.

[0005] In order to solve the above problems, the utility model provides a vertical silicon boat assembly tool, including a mounting platform and a plurality of support frames, wherein a first through hole is provided on the mounting platform, and a plurality of support plates extend from the bottom end of the mounting platform toward the first through hole, and the support plates are suitable for supporting the lower mounting plate of the silicon boat during the assembly of the silicon boat, and a plurality of pressure plates corresponding to the support plates are provided on the top of the mounting platform, and the plurality of pressure plates are detachably connected to the mounting platform by tightening bolts, and the pressure plates are suitable for tightening the lower mounting plate of the silicon boat by adjusting the tightening bolts during the assembly of the silicon boat. Tightly fixed, the bottom ends of several of the support frames are fixedly connected to the top end of the mounting platform, each of the support frames is vertically arranged along the circumference of the first through hole, and a clamping part is respectively provided on the top end of each of the support frames, and each of the support frames is universally connected to each of the clamping parts through a universal shaft, and the clamping part is suitable for clamping the gear rod of the silicon boat during the assembly of the silicon boat, and the verticality of the gear rod is adjusted by adjusting the setting angle of the clamping part, and several telescopic mechanisms are fixedly connected to the bottom end of the mounting platform, and several of the telescopic mechanisms are suitable for adjusting the horizontality of the lower mounting plate of the silicon boat during the assembly of the silicon boat.

[0006] Compared with the prior art, the vertical silicon boat assembly tool of the utility model can press the lower mounting plate of the silicon boat between the pressure plate and the support plate when the operator actually assembles the silicon boat, and adjust the horizontality of the lower mounting plate through the telescopic mechanism, clamp the gear rod of the silicon boat in the clamping part, and adjust the verticality of the gear rod by adjusting the setting angle of the clamping part through the universal shaft, so as to clamp and tighten the gear rod and ensure that the gear rod is in good verticality and does not shift during the assembly of the silicon boat. The verticality of the silicon boat is good during the assembly process and does not need to be repeatedly adjusted. The assembly precision is high, the operation is convenient, the connecting parts of the components are not easy to be damaged, and the reliability is strong.

[0007] Furthermore, the support frame includes a rotating support, a fixed rod and a fixed platform, the rotating support and the fixed rod are vertically arranged, and one end of the rotating support is horizontally rotatably connected to one end of the fixed rod, one end of the rotating support is universally connected to the clamping part through the universal shaft, the other end of the fixed rod is connected to the fixed platform, and the fixed platform is fixedly connected to the mounting platform. The rotating support can adjust the orientation of the clamping part, and cooperate with the clamping part to make the vertical adjustment of the gear rod of the silicon boat more accurate, and also make the loading and removal of the gear rod more convenient. The fixed rod and the fixed platform can improve the stability of the support frame, and improve the reliability of the utility model.

[0008] Furthermore, the rotating bracket is L-shaped, and the rotating bracket includes a vertical sub-bracket and a horizontal sub-bracket, the vertical sub-bracket is coaxially arranged with the fixed rod, and one end of the vertical sub-bracket is horizontally rotatably connected with the fixed rod, the other end of the vertical sub-bracket is fixedly connected with one end of the horizontal sub-bracket, and the other end of the horizontal sub-bracket is universally connected with the clamping part through the universal shaft. The horizontal sub-bracket can keep a certain distance between the gear rod of the silicon boat and the fixed rod and the vertical sub-bracket, which can reduce the probability of the gear rod hitting the fixed rod and the vertical sub-bracket, reduce the possibility of damage to the silicon boat during assembly, and improve the safety of using the utility model.

[0009] Further, the clamping part is U-shaped, and the U-shaped opening faces away from the universal shaft. Each of the clamping parts includes a first clamping plate, a second clamping plate and a connecting plate. Each of the first clamping plates and each of the second clamping plates are located on the left and right sides respectively. One end of each of the connecting plates is fixedly connected to each of the first clamping plates, and the other end of each of the connecting plates is fixedly connected to each of the second clamping plates. One end of each of the connecting plates close to the rotating bracket is connected to the universal shaft. Each of the first clamping plates and each of the second clamping plates is provided with a second through hole, and each of the second through holes is provided with a thread on the inner wall. Each of the second through holes is provided with a fastener, and each of the fasteners is provided with a thread on the outer wall. Each of the fasteners passes through each of the second through holes and is threadedly connected to the clamping part. The clamping part is designed to be U-shaped and fasteners are provided on both sides of the clamping part to improve the clamping and fastening effect of the toothed rod. The fastener is threadedly connected to the clamping part, which improves the fastening of the toothed rod by the clamping part and improves the reliability of the support frame.

[0010] Furthermore, a plurality of grooves for placing the pressing plate are provided near the first through hole at the top of the mounting platform, and the pressing plate includes a supporting portion, the supporting portion is provided in the groove, and the bottom end of the supporting portion is in contact with the bottom of the groove. The groove acts as a limit for the pressing plate, thereby improving the stability of the pressing plate being pressed and fixed to the lower mounting plate of the silicon boat by the clamping bolts, and improving the reliability of the entire vertical silicon boat assembly tooling.

[0011] Furthermore, a clamping portion is extended from the top of the abutting portion toward the first through hole, and the clamping portion is located directly above the support plate. The clamping portion is adapted to cooperate with the support plate in the process of assembling the silicon boat to limit the lower mounting plate in the vertical direction. The clamping portion is adapted to cooperate with the support plate to prevent the lower mounting plate from shifting during the assembly of the silicon boat, thereby improving the reliability of the utility model.

[0012] Furthermore, the number of the support plates and the pressure plates is at least three. The number of the support plates and the pressure plates is at least three, which can improve the limiting effect of the lower mounting plate of the silicon boat.

[0013] Each of the telescopic mechanisms includes a support leg and a telescopic base, one end of the support leg is fixedly connected to the bottom end of the mounting platform, and the other end of the support leg is fixedly connected to the telescopic base, and the telescopic base is suitable for adjusting the horizontal height of the top of the support leg during the assembly of the silicon boat to adjust the horizontality of the lower mounting plate of the silicon boat. The support leg can enhance the strength and stability of the support frame, and the horizontal height of the top of the support leg can be adjusted by adjusting the telescopic base, thereby driving the adjustment of the height of the mounting platform, so as to achieve the adjustment of the horizontality of the lower mounting plate of the silicon boat, making the adjustment process more convenient.

[0014] Furthermore, the material of the plurality of support legs is composed of at least one of stainless steel, aluminum-lithium alloy, titanium alloy, and carbon-based composite material. Stainless steel, aluminum-lithium alloy, titanium alloy, and carbon-based composite material all have strong durability and good corrosion resistance. Using at least one of the above materials as the material for making the support legs enhances the strength and rigidity of the support legs and improves the stability of the entire vertical silicon boat assembly tooling.

[0015] Furthermore, the materials of the mounting platform and the support frame are both plastic. Both plastic and acrylic have good electrical insulation and corrosion resistance. Using at least one of the above materials as the manufacturing material of the mounting platform and the support frame enhances the stability of the mounting platform and the support frame and improves the reliability of the entire vertical silicon boat assembly tooling. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a structural schematic diagram of a vertical silicon boat assembly tool in an embodiment of the utility model;

[0017] Figure 2 It is an enlarged view of point A in the vertical silicon boat assembly tooling in the embodiment of the utility model;

[0018] Figure 3 It is an enlarged view of the B position in the vertical silicon boat assembly tooling in the embodiment of the utility model;

[0019] Figure 4 It is a cross-sectional view of the vertical silicon boat assembly tool at B in the embodiment of the utility model;

[0020] Figure 5 It is a schematic structural diagram of a vertical silicon boat in an embodiment of the utility model.

[0021] Description of reference numerals:

[0022] 1-mounting platform, 11-first through hole, 12-support plate, 13-pressing plate, 131-pressing bolt, 132-holding portion, 133-pressing portion, 14-groove, 2-support frame, 21-clamping portion, 211-first clamping plate, 212-second clamping plate, 213-connecting plate, 214-second through hole, 215-fastener, 22-universal shaft, 221-spherical joint, 222-ball cavity connection Connector, 223-spherical inner cavity, 23-rotating bracket, 231-vertical sub-bracket, 232-horizontal sub-bracket, 233-reinforcement rib, 234-rotating shaft, 24-fixing rod, 25-fixed platform, 3-telescopic mechanism, 31-support leg, 32-telescopic base, 4-silicon boat, 41-lower mounting plate, 411-slot, 42-tooth rod, 421-tooth groove, 43-fastening bolt, 44-upper mounting plate. DETAILED DESCRIPTION

[0023] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Generally, the components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.

[0024] It should be noted that similar symbols and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not require further definition and explanation in the subsequent drawings.

[0025] In the description of the present utility model, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance. The terms "first position" and "second position" are two different positions, and the first feature "above", "above" and "above" the second feature include the first feature being directly above and obliquely above the second feature, or simply indicate that the first feature is higher in level than the second feature. The first feature "below", "below" and "below" the second feature include the first feature being directly below and obliquely below the second feature, or simply indicate that the first feature is lower in level than the second feature.

[0026] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "setting", "connection", etc. should be understood in a broad sense. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0027] The preferred embodiments of the present invention are described below in conjunction with the accompanying drawings. It should be understood that the preferred embodiments described herein are only used to illustrate and explain the present invention, and are not used to limit the present invention.

[0028] Combination Figures 1 to 5 As shown, this embodiment provides a vertical silicon boat assembly tool, including a mounting platform 1 and a plurality of support frames 2. The mounting platform 1 is square, and a circular first through hole 11 is provided on the mounting platform 1. A plurality of support plates 12 extend from the bottom end of the mounting platform 1 toward the first through hole 11, and each support plate 12 is vertically arranged along the circumference of the first through hole 11. During the assembly process, the operator places the lower mounting plate 41 of the silicon boat 4 on each support plate 12 in the first through hole 11, and the support plate 12 supports the lower mounting plate 41 of the silicon boat 4. A plurality of pressing plates 13 corresponding to the support plates 12 are provided on the top of the mounting platform 1, and the plurality of pressing plates 13 are detachably connected to the mounting platform 1 through clamping bolts 131. During the assembly process of the silicon boat 4 by the operator, the clamping bolts 131 are adjusted to 131 realizes the pressing and fixing effect of the pressure plate 13 on the lower mounting plate 41 of the silicon boat 4. The bottom ends of several support frames 2 are fixedly connected to the top end of the mounting platform 1. The top end of each support frame 2 is respectively provided with a clamping portion 21. The clamping portion 21 is suitable for clamping the toothed rod 42 of the silicon boat 4 during the process of the operator assembling the silicon boat 4. The top end of each support frame 2 is universally connected to each clamping portion 21 through a universal shaft 22. During the process of the operator assembling the silicon boat 4, the operator can change the setting angle of the clamping portion 21 by adjusting the universal shaft 22 to thereby adjust the verticality of the toothed rod 42 of the silicon boat 4. Several telescopic mechanisms 3 are fixedly connected to the bottom end of the mounting platform 1. During the process of the operator assembling the silicon boat 4, the operator can adjust the length of the telescopic mechanism 3 to thereby adjust the horizontality of the lower mounting plate 41 of the silicon boat 4.

[0029] In this embodiment, the mounting platform 1 is square, and the first through hole 11 is circular and is opened at the center of the mounting platform 1. This arrangement can balance the center of gravity and prevent the utility model from tipping over when the operator assembles the silicon boat 4.

[0030] Combination Figure 1 and Figure 5As shown, each telescopic mechanism 3 includes a supporting leg 31 and a telescopic base 32. One end of the supporting leg 31 is fixedly connected to the bottom end of the mounting platform 1, and the other end of the supporting leg 31 is fixedly connected to the telescopic base 32. The operator can adjust the horizontality of the lower mounting plate 41 of the silicon boat 4 by changing the height of the telescopic base 32. The telescopic base 32 is a prior art, and reference can be made to CN217030648U, which will not be described in detail here.

[0031] In this embodiment, the number of telescopic mechanisms 3 is 4, wherein the number of supporting legs 31 and the number of telescopic bases 32 correspond one to one, and the telescopic mechanisms 3 are arranged at the four corners of the bottom end of the mounting platform 1. Such an arrangement can improve the stability of the utility model. In other embodiments, the number and arrangement position of the telescopic mechanisms 3 can be adjusted according to actual needs.

[0032] The support leg 31 can strengthen the strength of the telescopic mechanism 3 and improve the stability of the utility model. When the telescopic base 32 is actually adjusted, the telescopic base 32 drives the adjustment of the horizontal height of the top of the support leg 31, thereby driving the adjustment of the height of the mounting platform 1, and further realizing the adjustment of the horizontality of the mounting plate 41 under the silicon boat 4.

[0033] The support legs 31 can also raise the height of the installation platform 1 above the ground, reserving operating space for installing the fastening bolts 43 on the lower mounting plate 41 of the silicon boat 4, making it convenient for the operator to install the fastening bolts 43 into the bottom end of the lower mounting plate 41 and the bottom end of the gear rod 42 from below the installation platform 1 after adjusting the verticality of the gear rod 42.

[0034] The material of the support leg 31 is composed of at least one of stainless steel, aluminum-lithium alloy, titanium alloy, and carbon-based composite material. The above materials have high hardness and high strength, which can improve the durability and stability of the utility model.

[0035] Specifically, in the present embodiment, the support leg 31 is made of 304 stainless steel, which has high strength, good toughness, strong corrosion resistance and strong oxidation resistance. 304 stainless steel enhances the strength and rigidity of the support leg 31 and improves the stability of the entire vertical silicon boat assembly tooling.

[0036] Combination Figure 1 , Figure 2 and Figure 5 As shown, a plurality of grooves 14 for placing the pressing plates 13 are provided at the top of the mounting platform 1 near the first through hole 11 , and the number of the grooves 14 corresponds to the number of the pressing plates 13 .

[0037] The pressure plate 13 includes a supporting portion 132, which is arranged in the groove 14. Except for the side wall facing the first through hole 11, the other side walls of each supporting portion 132 are in contact with the inner wall of each groove 14, and the bottom end of the supporting portion 132 is in contact with the bottom of the groove 14. When the operator assembles the silicon boat 4, the end of the supporting portion 132 close to the first through hole 11 cooperates with the inner wall of the first through hole 11 to achieve horizontal limiting of the lower mounting plate 41 of the silicon boat 4, thereby improving the stability of the lower mounting plate 41 during the assembly process.

[0038] The top end of the abutting portion 132 extends a clamping portion 133 toward the first through hole 11, and the clamping portion 133 is located directly above the support plate 12. When the operator uses the utility model to assemble the silicon boat 4, the operator adjusts the clamping bolt 131 so that the bottom end of the clamping portion 133 abuts against the top end of the lower mounting plate 41, and the clamping portion 133 cooperates with the support plate 12 up and down to achieve vertical limitation of the lower mounting plate 41.

[0039] The screwing depth of the clamping bolt 131 can be adjusted according to actual needs, which makes the utility model adaptable to lower mounting plates 41 of different thicknesses, thereby improving the practicality of the utility model.

[0040] The number of support plates 12 and pressure plates 13 is at least three, the support plates 12 are evenly distributed, and each pressure plate 13 is located in a groove 14 above each support plate 12. This arrangement can enhance the limiting effect of the utility model on the mounting plate 41 under the silicon boat 4 during the operator's assembly of the silicon boat 4.

[0041] The material of the mounting platform 1 is composed of at least one of plastic or acrylic plate. Both plastic and acrylic have good electrical insulation and corrosion resistance, which enhances the stability of the mounting platform 1 and the support frame 2 and improves the reliability of the entire vertical silicon boat 4 assembly tooling.

[0042] Specifically, in the present embodiment, the material of the mounting platform 1 is polyvinyl chloride (PVC). PVC plastic has good electrical insulation, corrosion resistance, heat resistance, stable physical and chemical properties, high strength, and cost savings. PVC plastic improves the strength and stability of the mounting platform 1, reduces the manufacturing cost of the present invention, and improves the durability of the present invention.

[0043] Combination Figure 1 , Figure 3 , Figure 4 and Figure 5As shown, the clamping portion 21 is U-shaped, and the U-shaped opening faces away from the universal shaft 22. Each clamping portion 21 includes a first clamping plate 211, a second clamping plate 212 and a connecting plate 213. Each first clamping plate 211 and each second clamping plate 212 are respectively located on the left and right sides, one end of each connecting plate 213 is fixedly connected to each first clamping plate 211, and the other end of each connecting plate 213 is fixedly connected to each second clamping plate 212. Each first clamping plate 211 and each second clamping plate 212 is provided with a second through hole 214, and the inner wall of each second through hole 214 is provided with a thread, and each second through hole 214 is provided with a fastener 215, and the outer wall of each fastener 215 is provided with a thread, and each fastener 215 passes through each second through hole 214 and is threadedly connected to the clamping portion 21.

[0044] When the toothed rod 42 is installed in the clamping part 21, the fasteners 215 on both sides are screwed into the middle to clamp and fasten the toothed rod 42. When the toothed rod 42 needs to be taken out from the clamping part 21, the fasteners 215 on both sides are screwed out in the direction of the side to take out the toothed rod 42.

[0045] The support frame 2 includes a rotating bracket 23 , which is vertically arranged and universally connected to the clamping portion 21 via a universal shaft 22 .

[0046] The universal joint 22 includes a spherical joint 221 and a spherical cavity connector 222. One end of the spherical cavity connector 222 is threadedly connected to the rotating bracket 23, and the other end is provided with a spherical inner cavity 223. One end of the spherical joint 221 is a smooth spherical surface and is arranged in the spherical inner cavity 223. The spherical joint 221 is universally rotatably connected to the spherical inner cavity 223. The other end of the spherical joint 221 is fixedly connected to the connecting plate 213 of the clamping part 21 by screws. During the assembly of the silicon boat 4, the operator can adjust the setting angle of the clamping part 21 by adjusting the setting angle of the spherical joint 221, thereby adjusting the verticality of the gear rod 42.

[0047] In this embodiment, the universal rotation connection between the clamping portion 21 and the rotating bracket 23 can be achieved by the above method. In other embodiments, the universal rotation connection can also be achieved by other methods, which will not be described in detail here.

[0048] The support frame 2 also includes a fixed rod 24 and a fixed platform 25. The fixed rod 24 is vertically arranged. The bottom end of the rotating bracket 23 is horizontally rotatably connected to the top end of the fixed rod 24 through a rotating shaft 234. The rotatable angle is 360°. The operator can change the setting orientation of the clamping part 21 by adjusting the setting angle of the rotating bracket 23, so that the utility model can be better adapted to different silicon boats 4, making the process of loading or removing the gear rod 42 from the clamping part 21 more convenient, thereby improving the practicality and convenience of the utility model.

[0049] The rotating bracket 23 is L-shaped, and the rotating bracket 23 includes a vertical sub-bracket 231 and a horizontal sub-bracket 232. The vertical sub-bracket 231 is coaxially arranged with the fixed rod 24, and the bottom end of the vertical sub-bracket 231 is horizontally rotatably connected to the top end of the fixed rod 24 through a rotating shaft 234, the top end of the vertical sub-bracket 231 is fixedly connected to one end of the horizontal sub-bracket 232, and the other end of the horizontal sub-bracket 232 is universally connected to the clamping part 21 through the universal shaft 22.

[0050] A reinforcing rib 233 is provided at the intersection of the rotating bracket 23 , and the reinforcing rib 233 improves the strength of the rotating bracket 23 and the durability of the supporting frame 2 .

[0051] The bottom end of the fixing rod 24 is connected to one end of the fixing platform 25, and the bottom end of the fixing platform 25 is fixedly connected to the top end of the mounting platform 1. The fixing rod 24 and the fixing platform 25 can improve the strength and stability of the support frame 2, thereby improving the durability of the utility model.

[0052] In this embodiment, the number of support frames 2 is 3, and each support frame 2 is respectively arranged at the midpoint of each side of the top of the installation platform 1. Finally, after the silicon boat 4 is assembled, the silicon boat 4 is moved out from the end of the side of the installation platform 1 where the support frame 2 is not arranged. The number of support frames 2 is consistent with the number of gear rods 42 in the silicon boat 4 assembled using the utility model. In other implementations, the number and setting positions of the support frames 2 in the utility model can be changed according to actual needs such as the number of gear rods 42 that need to be clamped and fastened and the positions at which they are located.

[0053] The material of the mounting platform 1 is composed of at least one of plastic or acrylic plate. Both plastic and acrylic have good electrical insulation and corrosion resistance, which enhances the stability of the mounting platform 1 and the support frame 2 and improves the reliability of the entire vertical silicon boat 4 assembly tooling.

[0054] Specifically, in the present embodiment, the support frame 2 is made of polypropylene (PP). PP plastic has good electrical insulation, good chemical resistance, heat resistance and electrical insulation, high-strength mechanical properties and high wear-resistant processing properties. PP plastic strengthens the strength of the support frame 2 and improves the durability of the present invention.

[0055] When using the present invention to assemble the silicon boat 4, first place the present invention on a horizontal ground or table, use a level to measure the horizontality of the mounting platform 1, adjust the mounting platform 1 to a horizontal level by adjusting the telescopic base 32, then remove the fastening bolts 43 and the pressing plate 13, place the lower mounting plate 41 of the silicon boat 4 on the support plate 12 in the first through hole 11, then fix the pressing plate 13 with the fastening bolts 43, use the support plate 12 and the pressing plate 13 to limit the lower mounting plate 41 in the vertical direction, and then Next, according to the above method of adjusting the level of the mounting platform 1, the lower mounting plate 41 of the silicon boat 4 is adjusted to be horizontal, and then a tooth bar 42 of the silicon boat 4 is taken out, and its tooth groove 421 is set to face away from the U-shaped opening direction of the clamping part 21, and one end of it is placed in the slot 411 on the lower mounting plate 41, and the rotating bracket 23 and the universal shaft 22 on the support frame 2 are adjusted to set the tooth bar 42 in the clamping part 21, and the clamping part 21 is clamped and fastened at a suitable position of the tooth bar 42 by adjusting the fastener 215, and then the tooth bar 42 is clamped and fastened by adjusting the fastener 215. Set the level vertically to measure the verticality of the gear rod 42, and change the angle of the clamping part 21 by adjusting the universal shaft 22 until the verticality is qualified. Then, according to the above method of installing and adjusting the gear rod 42, correctly set the other two gear rods 42, and then screw each fastening screw into the bottom end of the lower mounting plate 41 and the bottom end of each gear rod 42 from the bottom of the mounting platform 1 to achieve the fastening connection of the parts, and then make the position of the slot 411 on the upper mounting plate 44 of the silicon boat 4 correspond to the gear rod 42 one by one, and put the upper mounting plate 44 of the silicon boat 4 4 is covered on the upper end of each toothed rod 42, and each fastening bolt 43 is screwed into the top end of the upper mounting plate 44 and the top end of each toothed rod 42 from above the upper mounting plate 44, and then each fastener 215 of each clamping part 21 is screwed out, and the universal shaft 22 and the rotating bracket 23 are rotated to a suitable position to eliminate the clamping and fastening effect of the clamping part 21 on the toothed rod 42, and each clamping bolt 131 is screwed out to remove each pressing plate 13, and finally the assembled silicon boat 4 is lifted upward and removed from the tooling from a suitable position, and the assembly is completed.

[0056] According to the above-mentioned operation process of assembling the silicon boat 4 using the utility model, one person can complete the installation of the various parts of the silicon boat 4 from bottom to top, and the installation process is safe and simple to operate, reducing the risk of damage caused by errors such as collisions, improving the convenience and reliability of the silicon boat 4 in the assembly process, and greatly reducing the installation cost; by using the utility model to assemble the silicon boat 4, the verticality of the gear rod 42 is guaranteed, the number of adaptations in the assembly process is reduced, and the risk of damage to the fastening bolts 43 due to poor verticality is reduced, thereby improving the accuracy of the silicon boat 4 assembly process.

[0057] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, ordinary technicians in the field should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the utility model.

Claims

1. A vertical silicon boat assembly tool, characterized in that: The invention comprises a mounting platform (1) and a plurality of support frames (2), wherein the mounting platform (1) is provided with a first through hole (11), and a plurality of support plates (12) extend from the bottom end of the mounting platform (1) in the direction of the first through hole (11), and the support plates (12) are suitable for supporting the lower mounting plate (41) of the silicon boat (4) during the process of assembling the silicon boat (4), and a plurality of pressure plates (13) corresponding to the support plates (12) are provided at the top end of the mounting platform (1), and the plurality of pressure plates (13) are detachably connected to the mounting platform (1) through clamping bolts (131), and the pressure plates (13) are suitable for clamping and fixing the lower mounting plate (41) of the silicon boat (4) by adjusting the clamping bolts (131) during the process of assembling the silicon boat (4), and the plurality of support frames (2) are suitable for clamping and fixing the lower mounting plate (41) of the silicon boat (4) by adjusting the clamping bolts (131) during the process of assembling the silicon boat (4), and the plurality of support frames (2) are suitable for clamping and fixing the lower mounting plate (41) of the silicon boat (4) by adjusting the clamping bolts (131) during the process of assembling the silicon boat (4). The bottom end of the support frame (2) is fixedly connected to the top end of the mounting platform (1), and each of the support frames (2) is vertically arranged along the circumference of the first through hole (11). The top end of each of the support frames (2) is provided with a clamping portion (21), and each of the support frames (2) is universally connected to each of the clamping portions (21) via a universal shaft (22). The clamping portion (21) is suitable for clamping the toothed rod (42) of the silicon boat (4) during the assembly of the silicon boat (4), and the verticality of the toothed rod (42) is adjusted by adjusting the setting angle of the clamping portion (21). The bottom end of the mounting platform (1) is fixedly connected with a plurality of telescopic mechanisms (3), and the plurality of telescopic mechanisms (3) are suitable for adjusting the horizontality of the lower mounting plate (41) of the silicon boat (4) during the assembly of the silicon boat (4).

2. The vertical silicon boat assembly tool according to claim 1, characterized in that: The support frame (2) comprises a rotating bracket (23), a fixing rod (24) and a fixing platform (25); the rotating bracket (23) and the fixing rod (24) are arranged vertically; one end of the rotating bracket (23) is horizontally rotatably connected to one end of the fixing rod (24); one end of the rotating bracket (23) is universally connected to the clamping portion (21) via the universal shaft (22); the other end of the fixing rod (24) is connected to the fixing platform (25); and the fixing platform (25) is fixedly connected to the mounting platform (1).

3. The vertical silicon boat assembly tool according to claim 2, characterized in that: The rotating bracket (23) is L-shaped, and comprises a vertical sub-bracket (231) and a horizontal sub-bracket (232); the vertical sub-bracket (231) is coaxially arranged with the fixing rod (24), and one end of the vertical sub-bracket (231) is horizontally rotatably connected to the fixing rod (24); the other end of the vertical sub-bracket (231) is fixedly connected to one end of the horizontal sub-bracket (232); and the other end of the horizontal sub-bracket (232) is universally connected to the clamping portion (21) via the universal shaft (22).

4. The vertical silicon boat assembly tool according to claim 2, characterized in that: The clamping portion (21) is U-shaped, with the U-shaped opening facing away from the universal shaft (22). Each of the clamping portions (21) comprises a first clamping plate (211), a second clamping plate (212) and a connecting plate (213). Each of the first clamping plates (211) and each of the second clamping plates (212) are located on the left and right sides respectively. One end of each of the connecting plates (213) is fixedly connected to each of the first clamping plates (211), and the other end of each of the connecting plates (213) is fixedly connected to each of the second clamping plates (212). One end of the connecting plate (213) close to the rotating bracket (23) is connected to the universal shaft (22); each of the first clamping plates (211) and each of the second clamping plates (212) is provided with a second through hole (214); the inner wall of each of the second through holes (214) is provided with a thread; each of the second through holes (214) is provided with a fastener (215); the outer wall of each of the fasteners (215) is provided with a thread; each of the fasteners (215) passes through each of the second through holes (214) and is threadedly connected to the clamping portion (21).

5. The vertical silicon boat assembly tool according to claim 1, characterized in that: A plurality of grooves (14) for accommodating the pressure plate (13) are provided at the top of the mounting platform (1) near the first through hole (11); the pressure plate (13) comprises a supporting portion (132); the supporting portion (132) is arranged in the groove (14); and the bottom end of the supporting portion (132) is in contact with the bottom of the groove (14).

6. The vertical silicon boat assembly tool according to claim 5, characterized in that: A clamping portion (133) extends from the top end of the abutting portion (132) toward the first through hole (11), and the clamping portion (133) is located directly above the support plate (12). The clamping portion (133) is suitable for cooperating with the support plate (12) up and down during the assembly of the silicon boat (4) to achieve vertical positioning of the lower mounting plate (41).

7. The vertical silicon boat assembly tool according to claim 5, characterized in that: The number of the support plates (12) and the number of the pressing plates (13) are at least three.

8. The vertical silicon boat assembly tool according to claim 1, characterized in that: Each of the telescopic mechanisms (3) comprises a supporting leg (31) and a telescopic base (32), one end of the supporting leg (31) is fixedly connected to the bottom end of the mounting platform (1), and the other end of the supporting leg (31) is fixedly connected to the telescopic base (32), and the telescopic base (32) is suitable for adjusting the horizontal height of the top end of the supporting leg (31) during the assembly of the silicon boat (4) to adjust the horizontality of the lower mounting plate (41) of the silicon boat (4).

Images