Carrier plate material box and carrier plate processing device

Abstract

The utility model provides a carrier plate material box and a carrier plate processing device, and relates to the technical field of semiconductor processing. The carrier plate material box comprises a material box handle and a carrier plate support, the carrier plate support comprises two sub-supports which are arranged in parallel in the first direction, the surfaces, close to each other, of the two sub-supports are each provided with a plurality of carrier plate grooves, the carrier plate grooves extend in the second direction and are distributed at intervals in the third direction, the first direction, the second direction and the third direction are perpendicular to each other in pairs, and the carrier plate grooves are formed in the carrier plate support. The second direction is parallel to the surface of the material box handle, the inserting ends of the plate carrying grooves extend to the edges of the sub-supports, the multiple plate carrying grooves in one sub-support correspond to the multiple plate carrying grooves in the other sub-support in position in a one-to-one mode, and the two sub-supports are arranged on the material box handle in a sliding mode. The first sliding direction of the sub-support on the material box handle is parallel to the first direction. According to the carrier plate material box, the carrier plate is jointly supported by the two sub-supports capable of sliding relative to the material box handle, high adaptability is achieved, and the production cost can be reduced.

Description

Technical Field

[0001] The present application relates to the field of semiconductor processing technology, and in particular to a substrate material box and a substrate processing device. Background Art

[0002] In the field of semiconductor packaging, the IC substrate (Integrated Circuit Substrate) is also called the packaging substrate. It is mainly used to carry IC (integrated circuit). It has circuits inside to conduct signals between the chip and the circuit board, provide support, heat dissipation and protection for the chip, and is an indispensable part of semiconductor packaging.

[0003] The process flow of IC substrates is extremely complex and lengthy, and they often need to be transferred to different workstations for processing during the production process. IC substrates are fragile items. In order to protect the IC substrates and improve the transfer efficiency, multiple IC substrates are usually loaded into a substrate material box and then transferred together. However, the existing substrate material box can only accommodate one size of IC substrate. When another size of IC substrate needs to be transferred, a new substrate material box needs to be configured, which is costly. Utility Model Content

[0004] The purpose of the present application is to provide a substrate material box and a substrate processing device to address the deficiencies in the above-mentioned prior art, which can adapt to IC substrates of various sizes, thereby reducing production costs.

[0005] To achieve the above purpose, the technical solution adopted in the embodiment of the present application is as follows:

[0006] On the one hand, an embodiment of the present application provides a plate carrier box, comprising: a plate carrier box handle and a plate carrier bracket, the plate carrier bracket comprising two sub-brackets arranged in parallel along a first direction, the surfaces of the two sub-brackets close to each other are respectively provided with a plurality of plate carrier grooves, the plurality of plate carrier grooves extend along a second direction and are distributed at intervals along a third direction, wherein the first direction, the second direction and the third direction are perpendicular to each other, the second direction is parallel to the surface of the plate carrier box handle, the insertion end of the plate carrier groove extends to the edge of the sub-bracket, the plurality of plate carrier grooves on one sub-bracket correspond one-to-one to the plurality of plate carrier grooves on the other sub-bracket, the two sub-brackets are respectively slidably arranged on the plate carrier box handle, and the first sliding direction of the sub-brackets on the plate carrier box handle is parallel to the first direction.

[0007] Optionally, there are two carrier brackets, and the two carrier brackets are spaced apart along the second direction.

[0008] Optionally, it also includes a first connecting plate, each sub-bracket corresponds to a first connecting plate, the first connecting plate is slidably set on the material box handle, the sub-bracket is slidably set on the first connecting plate, the sliding direction of the first connecting plate on the material box handle is parallel to the first sliding direction, and the second sliding direction of the sub-bracket on the first connecting plate is parallel to the second direction.

[0009] Optionally, a first strip hole is provided on the material box handle, the first strip hole extends along the first direction, a first boss is provided on the first connecting plate and cooperates with the first strip hole, the first boss slides in the first strip hole, and the first connecting plate and the carrier material box are fixed by a first connecting piece; a second connecting plate is provided on the side of the sub-bracket, a second strip hole is provided on the second connecting plate, the second strip hole extends along the second direction, a second boss is also provided on the first connecting plate and cooperates with the second strip hole, the second boss slides in the second strip hole, and the first connecting plate and the second connecting plate are fixed by a second connecting piece.

[0010] Optionally, the material box handle includes a gripping portion and connecting portions respectively arranged at opposite ends of the gripping portion, the width of the gripping portion is smaller than the width of the connecting portion, and the two connecting portions are respectively used for sliding connection with two carrier brackets.

[0011] Optionally, the sub-bracket is provided with ventilation holes, the ventilation holes are located on the side of the carrier groove, and the ventilation holes extend along the second direction.

[0012] Optionally, the ventilation holes include two groups, the two groups of ventilation holes are spaced apart along the second direction, and the multiple ventilation holes in each group of ventilation holes are spaced apart along the third direction.

[0013] Optionally, the insertion end of the carrier slot is provided with a chamfer.

[0014] Optionally, the two end faces of the sub-bracket along the third direction are respectively provided with a first step structure and a second step structure, and the second step structure can cooperate with the first step structure. The first step structure on one sub-bracket is used to cooperate with the second step structure on another sub-bracket to realize stacking of two sub-brackets in the third direction.

[0015] According to another aspect of the embodiments of the present application, a substrate processing device is provided, comprising a substrate material box as described above.

[0016] The beneficial effects of this application include:

[0017] The present application provides a plate carrier material box, comprising: a material box handle and a plate carrier bracket, the plate carrier bracket comprising two sub-brackets arranged in parallel along a first direction, the surfaces of the two sub-brackets close to each other are respectively provided with a plurality of plate carrier grooves, the plurality of plate carrier grooves extend along a second direction and are spaced apart along a third direction, wherein the first direction, the second direction and the third direction are perpendicular to each other, the second direction is parallel to the surface of the material box handle, the insertion end of the plate carrier groove extends to the edge of the sub-bracket, the plurality of plate carrier grooves on one sub-bracket correspond to the plurality of plate carrier grooves on the other sub-bracket in one-to-one position, the two sub-brackets are respectively slidably arranged on the material box handle, and the first sliding direction of the sub-bracket on the material box handle is parallel to the first direction. The plate carrier material box adopts two sub-brackets arranged in parallel along the first direction to jointly support the carrier, and by sliding the sub-bracket relative to the material box handle along the first direction, the distance between the two sub-brackets is adjusted, so that the two sub-brackets can support carriers of different sizes. Therefore, the plate carrier material box has strong adaptability and can reduce production costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0019] Figure 1 A schematic diagram of the structure of a carrier material box and a carrier provided in an embodiment of the present application;

[0020] Figure 2 A schematic diagram of a carrier material box accommodating a carrier provided in an embodiment of the present application;

[0021] Figure 3 A schematic diagram of the structure of a carrier material box provided in an embodiment of the present application;

[0022] Figure 4 for Figure 1 A local enlarged schematic diagram of point A in the middle.

[0023] Icons: 100-board carrier box; 110-box handle; 111-first strip hole; 112-gripping portion; 113-connecting portion; 120-board carrier bracket; 121-sub-bracket; 1211-support surface; 1212-outer side surface; 1213-board carrier slot; 1213a-insertion end; 1213b-chamfer; 1214-ventilation hole; 1215-first step structure; 1216-second step structure; 130-first connecting plate; 131-first boss; 132-second boss; 140-second connecting plate; 141-second strip hole; 200-board carrier; a-first direction; b-second direction; c-third direction. DETAILED DESCRIPTION

[0024] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.

[0025] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for protection, but merely represents selected embodiments of the present application. It should be noted that, in the absence of conflict, the various features in the embodiments of the present application can be combined with each other, and the combined embodiments are still within the scope of protection of the present application.

[0026] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0027] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, or the positions or positional relationships in which the product of the application is usually placed when in use. They are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific position, be constructed and operated in a specific position, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0028] In the description of this application, it should also be noted that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0029] In one aspect of the embodiment of the present application, please refer to Figure 1 and Figure 2 , a carrier material box 100 is provided for accommodating and transferring a carrier 200, wherein the carrier 200 may be a plate-shaped or sheet-shaped material such as an IC carrier, a bare board for preparing a circuit board, etc.

[0030] Please refer to Figure 3 The carrier material box 100 includes: a material box handle 110 and a carrier bracket 120, wherein the carrier bracket 120 is used to accommodate and support the carrier 200, and the material box handle 110 is used for a user or a robot to hold when transferring the carrier 200.

[0031] The carrier bracket 120 includes two sub-brackets 121 arranged in parallel along a first direction a. The sub-bracket 121 has a supporting surface 1211. The supporting surface 1211 is larger than other surfaces on the sub-bracket 121. The supporting surfaces 1211 of the two sub-brackets 121 are close to each other and are arranged opposite to each other. A plurality of carrier grooves 1213 are respectively provided on the supporting surfaces 1211 of the two sub-brackets 121. The carrier grooves 1213 are used to accommodate and support the edges of the carrier 200. The plurality of carrier grooves 1213 extend along a second direction b and are spaced apart along a third direction c, wherein the first direction a, the second direction b and the third direction c are perpendicular to each other, and the second direction b is parallel to the surface of the material box handle 110. Please refer to Figure 4 The end of the board slot 1213 for inserting the board 200 is the insertion end 1213a. The insertion end 1213a of the board slot 1213 extends to the edge of the sub-bracket 121, thereby penetrating the sub-bracket 121, so that the board 200 can directly enter the board slot 1213 from the side of the sub-bracket 121 through the insertion end 1213a. The other end of the board slot 1213 opposite to the insertion end 1213a can also extend to the edge of the sub-bracket 121, thereby penetrating the sub-bracket 121 in an open state, or it can be located in the middle of the sub-bracket 121 in a closed state. The multiple board slots 1213 on one sub-bracket 121 correspond to the multiple board slots 1213 on another sub-bracket 121 in one-to-one correspondence. In this way, a pair of board slots 1213 corresponding to each other on the two sub-brackets 121 are respectively used to support the two opposite edges of the same board 200, and cooperate with each other to support a board 200.

[0032] The two sub-brackets 121 are respectively slidably disposed on the material box handle 110, and the first sliding direction of the sub-brackets 121 on the material box handle 110 is parallel to the first direction a. The sub-brackets 121 slide along the first direction a on the material box handle 110, and the vertical distance between the two relative sub-brackets 121 can be adjusted, thereby changing the distance between the two relative carrier slots 1213, so that the carrier bracket 120 can accommodate carriers 200 of different sizes, thereby improving the adaptability of the carrier material box 100. When it is necessary to accommodate or transfer carriers 200 of different sizes, it is only necessary to adjust the positions of the two sub-brackets 121 in the first direction a, without replacing a new carrier material box 100, which can effectively reduce production costs.

[0033] It is understood that the sub-bracket 121 can slide along the first direction a on the cartridge handle 110, but after sliding to the preset position, the sub-bracket 121 needs to be fixed to prevent the sub-bracket 121 from sliding during use and causing the carrier 200 to fall. As for the method of fixing the sub-bracket 121, this embodiment does not limit this. For example, the sub-bracket 121 can be directly or indirectly fixed to the cartridge handle 110 through a connecting member so that it cannot slide relative to the cartridge handle 110 during use.

[0034] The above-mentioned carrier material box 100 uses two sub-brackets 121 arranged in parallel along the first direction a to jointly support the carrier 200, and by sliding the sub-brackets 121 relative to the material box handle 110 along the first direction a, the distance between the two sub-brackets 121 is adjusted, so that the two sub-brackets 121 can support carriers 200 of different sizes. Therefore, the carrier material box 100 has strong adaptability and can reduce production costs.

[0035] Optionally, the number of the board support brackets 120 is two, and the two board support brackets 120 are arranged at intervals along the second direction b.

[0036] It can be understood that if there are two carrier brackets 120, then there are two pairs of sub-brackets 121. The two carrier brackets 120 can accommodate carriers 200 respectively, thereby increasing the capacity of the carrier material box 100. In addition, the two sub-brackets 121 located on the same side of the material box handle 110 in the two carrier brackets 120 can also be located on the same plane by adjusting their positions, so that the two sub-brackets 121 located on the same plane can jointly accommodate the edge of a carrier 200, that is, the two pairs of sub-brackets 121 cooperate to accommodate and support a group of longer carriers 200, so that the carrier material box 100 can adapt to more carriers 200 with different lengths and widths.

[0037] Optionally, see Figure 1 and Figure 3 The carrier material box 100 further includes a first connecting plate 130, each sub-bracket 121 corresponds to a first connecting plate 130, and the sub-bracket 121 is slidably connected to the carrier material box 100 through the first connecting plate 130. The first connecting plate 130 is slidably disposed on the material box handle 110, and the sub-bracket 121 is slidably disposed on the first connecting plate 130. The sliding direction of the first connecting plate 130 on the material box handle 110 is parallel to the first sliding direction, and the second sliding direction of the sub-bracket 121 on the first connecting plate 130 is parallel to the second direction b.

[0038] When the first connecting plate 130 slides along the first sliding direction (i.e., the first direction a), the sub-bracket 121 is driven to slide along the first direction a relative to the magazine handle 110, so that the carrier magazine 100 can adapt to carriers 200 of different widths. When the sub-bracket 121 slides along the second sliding direction (i.e., the second direction b), the distance between the two sub-brackets 121 on the same side of the magazine handle 110 changes, so that the carrier magazine 100 can adapt to carriers 200 of different lengths.

[0039] It can be understood that the first connecting plate 130 can slide along the first direction a relative to the magazine handle 110, but after sliding to the preset position, the first connecting plate 130 needs to be fixed. Similarly, the sub-bracket 121 can slide along the second direction b relative to the first connecting plate 130, but after sliding to the preset position, the sub-bracket 121 also needs to be fixed to prevent the carrier 200 from falling due to the sliding of the first connecting plate 130 and the sub-bracket 121.

[0040] Optionally, the magazine handle 110 is provided with a first strip hole 111, the first strip hole 111 extends along the first direction a, the first connecting plate 130 is provided with a first boss 131 that matches the first strip hole 111, and the first boss 131 slides in the first strip hole 111, so that the first connecting plate 130 can slide relative to the magazine handle 110 along the first direction a, and the first connecting plate 130 further drives the sub-bracket 121 to slide relative to the magazine handle 110 along the first direction a. After the first connecting plate 130 slides to the preset position, the first connecting plate 130 and the carrier magazine 100 are fixed by a first connecting member (not shown in the figure) to prevent the first connecting plate 130 from continuing to slide.

[0041] In order to facilitate the connection between the sub-bracket 121 and the first connecting plate 130, a second connecting plate 140 is provided on the side of the sub-bracket 121, and a second strip hole 141 is provided on the second connecting plate 140, and the second strip hole 141 extends along the second direction b. The first connecting plate 130 is also provided with a second boss 132 that matches the second strip hole 141, and the second boss 132 slides in the second strip hole 141, so that the sub-bracket 121 slides relative to the first connecting plate 130 along the second direction b. After the sub-bracket 121 slides to the preset position, the first connecting plate 130 and the second connecting plate 140 are fixed by a second connecting member (not shown in the figure) to prevent the sub-bracket 121 from continuing to slide.

[0042] For example, the two first connecting plates 130 corresponding to the two opposite sub-brackets 121 share a first strip hole 111 , that is, the first bosses 131 on the two first connecting plates 130 slide in the same first strip hole 111 to facilitate adjustment of the distance between the two opposite sub-brackets 121 .

[0043] For example, the second connecting plate 140 is perpendicular to the supporting surface 1211 of the sub-bracket 121 and parallel to the first connecting plate 130 , so as to facilitate adjusting the position of the sub-bracket 121 .

[0044] For example, the first connecting member and the second connecting member are both bolts.

[0045] Optionally, the material box handle 110 includes a gripping portion 112 and connecting portions 113 respectively arranged at opposite ends of the gripping portion 112, the width of the gripping portion 112 is smaller than the width of the connecting portion 113, and the two connecting portions 113 are respectively used for sliding connection with two carrier brackets 120.

[0046] The width of the middle gripping portion 112 is relatively narrow, which is convenient for a user or a manipulator to hold. The width of the connecting portions 113 on both sides is relatively wide, which can make the sub-bracket 121 slide a larger distance relative to the material box handle 110, thereby being able to adapt to a carrier 200 with a larger size range.

[0047] Optionally, a ventilation hole 1214 is provided on the sub-bracket 121 . The ventilation hole 1214 is located on a side of the board-carrying slot 1213 , and the ventilation hole 1214 extends along the second direction b.

[0048] The vents 1214 can keep the carrier material box 100 in an open state, so that hot air can pass through the gaps between the carriers 200, so that the carriers 200 are heated more evenly during the process. At the same time, the vents 1214 can also reduce the weight of the sub-bracket 121 to facilitate the transfer of the carriers 200.

[0049] Preferably, two opposite sides of the carrier groove 1213 are provided with ventilation holes 1214 so that the upper and lower surfaces of the carrier 200 are heated evenly.

[0050] Optionally, the ventilation holes 1214 include two groups, the two groups of ventilation holes 1214 are arranged at intervals along the second direction b, and the multiple ventilation holes 1214 in each group of ventilation holes 1214 are distributed at intervals along the third direction c.

[0051] exist Figure 1 On the same sub-bracket 121 in the embodiment, the row of ventilation holes 1214 on the left is one group of ventilation holes 1214, and the row of ventilation holes 1214 on the right is another group of ventilation holes 1214. The two groups of ventilation holes 1214 can improve the ventilation effect of the carrier material box 100 while maintaining a high strength of the sub-bracket 121.

[0052] Optionally, see Figure 2 and Figure 4 The inserting end 1213a of the carrier slot 1213 is provided with a chamfer 1213b.

[0053] The chamfer 1213b makes the insertion end 1213a of the carrier slot 1213 open, making it easier for the carrier 200 to enter the carrier slot 1213. At the same time, the inclined surface of the chamfer 1213b can also guide the carrier 200 to enter the carrier slot 1213.

[0054] Optionally, the two end faces of the sub-bracket 121 along the third direction c are respectively provided with a first step structure 1215 and a second step structure 1216, and the second step structure 1216 can cooperate with the first step structure 1215. The first step structure 1215 on one sub-bracket 121 is used to cooperate with the second step structure 1216 on another sub-bracket 121 to achieve stacking of the two sub-brackets 121 in the third direction c, and further achieve stacking of the carrier material box 100 in the third direction c.

[0055] For example, the sub-bracket 121 has a supporting surface 1211 and an outer side surface 1212 opposite to the supporting surface 1211, the first step structure 1215 is a first groove arranged on the upper edge of the outer side surface 1212, the second step structure 1216 is a second groove arranged on the lower edge of the inner side surface, and the sum of the depth of the first groove in the first direction a and the depth of the second groove in the first direction a is equal to the thickness of the sub-bracket 121 in the first direction a.

[0056] This embodiment further provides a carrier plate 200 processing device, including any one of the carrier plate material boxes 100 as described above.

[0057] The carrier plate 200 processing device includes the same structure and beneficial effects as the carrier plate magazine 100 in the previous embodiment. The structure and beneficial effects of the carrier plate magazine 100 have been described in detail in the previous embodiment and will not be repeated here.

[0058] The above description is only the preferred embodiment of the present application and is not intended to limit the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A carrier material box, characterized in that: include: A material box handle and a carrier bracket, the carrier bracket includes two sub-brackets arranged in parallel along a first direction, and the surfaces of the two sub-brackets close to each other are respectively provided with a plurality of carrier grooves, and the plurality of carrier grooves extend along a second direction and are distributed at intervals along a third direction, wherein the first direction, the second direction and the third direction are perpendicular to each other, the second direction is parallel to the surface of the material box handle, the insertion end of the carrier groove extends to the edge of the sub-bracket, the plurality of carrier grooves on one sub-bracket correspond to the plurality of carrier grooves on the other sub-bracket in a one-to-one manner, and the two sub-brackets are respectively slidably arranged on the material box handle, and the first sliding direction of the sub-bracket on the material box handle is parallel to the first direction.

2. The sheet carrier box according to claim 1, characterized in that: The number of the board carrier brackets is two, and the two board carrier brackets are spaced apart along the second direction.

3. The carrier material box according to claim 2, characterized in that: It also includes a first connecting plate, each of the sub-brackets corresponds to one first connecting plate, the first connecting plate is slidably set on the material box handle, the sub-bracket is slidably set on the first connecting plate, the sliding direction of the first connecting plate on the material box handle is parallel to the first sliding direction, and the second sliding direction of the sub-bracket on the first connecting plate is parallel to the second direction.

4. The sheet carrier box according to claim 3, characterized in that: The material box handle is provided with a first strip hole, the first strip hole extends along the first direction, the first connecting plate is provided with a first boss matched with the first strip hole, the first boss slides in the first strip hole, and the first connecting plate is fixed to the carrier material box by a first connecting member; A second connecting plate is provided on the side of the sub-bracket, and a second strip hole is provided on the second connecting plate. The second strip hole extends along the second direction. A second boss that cooperates with the second strip hole is also provided on the first connecting plate. The second boss slides in the second strip hole. The first connecting plate and the second connecting plate are fixed by a second connecting piece.

5. The carrier material box according to claim 2, characterized in that: The material box handle includes a gripping portion and connecting portions respectively arranged at two opposite ends of the gripping portion, the width of the gripping portion is smaller than the width of the connecting portion, and the two connecting portions are respectively used for sliding connection with the two carrier brackets.

6. The carrier material box according to claim 1, characterized in that: The sub-bracket is provided with a ventilation hole, the ventilation hole is located on a side of the board carrier slot, and the ventilation hole extends along the second direction.

7. The sheet carrier box according to claim 6, characterized in that: The ventilation holes include two groups, the two groups of ventilation holes are arranged at intervals along the second direction, and the plurality of ventilation holes in each group of ventilation holes are distributed at intervals along the third direction.

8. The sheet carrier box according to claim 1, characterized in that: The insertion end of the carrier slot is provided with a chamfer.

9. The sheet carrier box according to claim 1, characterized in that: The two end faces of the sub-bracket along the third direction are respectively provided with a first step structure and a second step structure, the second step structure can cooperate with the first step structure, and the first step structure on one sub-bracket is used to cooperate with the second step structure on another sub-bracket to realize stacking of the two sub-brackets in the third direction.

10. A carrier processing device, characterized in that: It comprises a sheet carrier box as claimed in any one of claims 1 to 9.

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