Evaporation source baffle mechanism of vacuum coating machine

Abstract

The utility model provides an evaporation source baffle mechanism of a vacuum coating machine, which relates to the field of vacuum coating machines and comprises a mounting cover in a cylindrical bin shape with an open lower end, an annular track and a plurality of clamping grooves are arranged on the inner side wall surface of the mounting cover, and the clamping grooves are circumferentially arrayed and communicated with the annular track and the bottom of the mounting cover. Extrusion blocks matched with the clamping grooves in number are vertically and movably arranged in the annular track, and the extrusion blocks are arranged between the adjacent clamping grooves in a circumferential array mode. A matching disc is arranged on the upper surface of the baffle, the outer diameter of the matching disc is matched with the inner diameter of the mounting cover, clamping blocks matched with the clamping grooves in number are arranged on the edge of the matching disc, and the clamping blocks are arranged in a circumferential array mode and matched with the clamping grooves in size; and the baffle frame is arranged in the vacuum coating machine chamber and is used for supporting and driving the mounting cover to move. According to the utility model, the baffle plate can be taken down without a tool, so that the coating environment is not polluted, and the practicability is stronger.

Description

Technical Field

[0001] The present application relates to the field of vacuum coating machines, and in particular to a target baffle structure of a vacuum coating machine. Background Art

[0002] A vacuum coating machine is a coating device that can provide a high degree of vacuum for coating. Its main coating principles are evaporation and sputtering. In evaporation coating with multiple evaporation sources, it is necessary to control the baffle mechanism to block the designated evaporation source so that the unblocked evaporation source can work normally.

[0003] The baffle mechanism generally includes a baffle and a baffle frame that controls the movement of the baffle. Since a large amount of film material is attached to the bottom surface of the baffle, the baffle needs to be removed and cleaned regularly. Since the baffle and the baffle frame are connected by bolts, certain tools are needed to assist in removing the baffle, which is more laborious, and the coating environment may be contaminated when using tools to remove the baffle. Utility Model Content

[0004] In order to solve the above-mentioned defects of the related prior art, the present application provides an evaporation source baffle mechanism of a vacuum coating machine, which can be removed without tools, will not pollute the coating environment, and has strong practicality.

[0005] In order to achieve the above purpose, the utility model adopts the following technologies:

[0006] A vacuum coating machine evaporation source baffle mechanism, comprising:

[0007] The mounting cover is in the shape of a cylindrical bin body with an open lower end, and an annular track and a plurality of slots are provided on the inner wall of the mounting cover. The slots are arranged in a circular array and connect the annular track and the bottom of the mounting cover. Extrusion blocks matching the number of slots are arranged vertically in the annular track, and the extrusion blocks are arranged in a circular array and respectively arranged between adjacent slots.

[0008] The baffle plate has a matching plate on its upper surface, the outer diameter of the matching plate matches the inner diameter of the mounting cover, and the edge of the matching plate is provided with a number of card blocks that match the card slots, and the card blocks are arranged in a circular array and have sizes that match the card slots;

[0009] The baffle frame is arranged in the chamber of the vacuum coating machine and is used to support and drive the installation cover to move.

[0010] Furthermore, a lifting channel is provided on the upper surface of the mounting cover, which vertically penetrates into the annular track. The number and size of the lifting channels match the extrusion block. The extrusion block slides in the lifting channel, and a drive plate is connected to its upper end. The drive plate is equipped with an electric screw, which is vertically arranged on the upper surface of the mounting cover.

[0011] Furthermore, both ends of the lower surface of the extrusion block along the circumferential direction of the mounting cover and both ends of the upper surface of the clamping block along the circumferential direction of the matching disk are provided with chamfers, and a spring is vertically connected between the extrusion block and the driving plate.

[0012] Furthermore, the baffle frame includes a fixed rod and a driving rod. The fixed rod is vertically installed in the vacuum coating machine chamber, and the upper end of the fixed rod is coaxially connected to a first rotating mechanism. The driving shaft of the first rotating mechanism is connected to a rotating seat. One end of the driving rod is rotatably matched with the rotating seat. A second rotating mechanism is provided on the rotating seat. The second rotating mechanism is arranged perpendicular to the driving rod. The driving shaft of the second rotating mechanism is vertically connected to one end of the driving rod, and the other end of the driving rod is connected to the mounting cover.

[0013] The beneficial effects of the utility model are:

[0014] The mating disk on the baffle is fitted into the mounting cover, and the extrusion block is fixed to the clamping block by the rotation of the baffle and the movement of the extrusion block, thereby fixing the baffle on the mounting cover. The baffle can also be removed from the mounting cover by the rotation of the baffle and the movement of the extrusion block, thereby avoiding the use of tools to remove the baffle, improving the convenience of baffle removal and protecting the cleanliness of the internal environment of the vacuum coating machine. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a three-dimensional schematic diagram of the evaporation source baffle mechanism of the vacuum coating machine according to an embodiment of the present application.

[0016] Figure 2 It is a schematic three-dimensional diagram of the exploded structure of the evaporation source baffle mechanism of the vacuum coating machine according to an embodiment of the present application.

[0017] Figure 3 This application Figure 2 A local enlarged schematic diagram of point A in the middle.

[0018] Figure 4 It is a three-dimensional schematic diagram of the installation cover of an embodiment of the present application.

[0019] Markings in the figure: 1-installation cover, 11-annular track, 12-card slot, 13-extrusion block, 14-lifting channel, 15-drive plate, 16-electric screw, 17-spring, 2-baffle, 21-matching disk, 22-card block, 3-baffle frame, 31-fixing rod, 32-drive rod, 33-first rotating mechanism, 34-rotating seat, 35-second rotating mechanism. DETAILED DESCRIPTION

[0020] In order to make the purpose, technical solutions and advantages of the embodiments of the utility model clearer, the implementation methods of the utility model are described in detail below in conjunction with the accompanying drawings, but the embodiments described in the utility model are only part of the embodiments of the utility model, rather than all the embodiments.

[0021] like Figure 1 As shown, this embodiment provides an evaporation source baffle mechanism of a vacuum coating machine, including a mounting cover 1, a baffle 2, and a baffle frame 3.

[0022] Specifically, Figure 4 As shown, the mounting cover 1 is in the shape of a cylindrical bin with an open lower end, and an inner wall surface of the mounting cover 1 is provided with an annular track 11 and a plurality of slots 12. Specifically, in this example, four slots 12 are provided; the slots 12 are arranged in a circular array and connect the annular track 11 and the bottom of the mounting cover 1, and extrusion blocks 13 matching the number of the slots 12 are provided vertically movable in the annular track 11, and the extrusion blocks 13 are arranged in a circular array and are respectively arranged between adjacent slots 12.

[0023] Specifically, Figure 2 and Figure 4 As shown, a mating disk 21 is provided on the upper surface of the baffle 2, and the outer diameter of the mating disk 21 matches the inner diameter of the mounting cover 1, and is used to extend into the interior of the mounting cover 1; a number of clamping blocks 22 matching the clamping slot 12 are provided on the edge of the mating disk 21, and the clamping blocks 22 are arranged in a circular array and have sizes matching the clamping slot 12, and the clamping blocks 22 are used to extend from the clamping slot 12 into the annular track 11.

[0024] Specifically, Figure 1 As shown, the baffle frame 3 is arranged in the chamber of the vacuum coating machine, and is used to support and drive the installation cover 1 to move.

[0025] During operation, when the baffle 2 needs to be installed, the block 22 is aligned with the slot 12, and the block 22 is extended into the annular track 11 through the slot 12, and the baffle 2 is rotated so that the block 22 slides in the annular track 11 to just below the extrusion block 13, and the extrusion block 13 is moved downward so that the extrusion block 13 presses the block 22 into the annular track 11, thereby completing the fixation of the baffle 2 in the installation cover 1; when the baffle 2 needs to be removed, only the extrusion block 13 needs to be moved upward and the baffle 2 needs to be rotated so that the block 22 can be withdrawn from the slot 21 and the annular track 11, and the baffle 2 can be removed from the installation cover 1.

[0026] Preferably, Figure 3 and Figure 4 As shown, a lifting channel 14 is provided on the upper surface of the mounting cover 1 and vertically penetrates into the annular track 11. The number and size of the lifting channels 14 match the extrusion blocks 13. The extrusion blocks 13 are slidably fitted in the lifting channels 14. A driving plate 15 is connected to the upper end thereof. The driving plate 15 is matched with an electric screw 16. The electric screw 16 is vertically arranged on the upper surface of the mounting cover 1. The electric screw 16 is used to drive the extrusion blocks 13 to move vertically in the lifting channels 14 through the driving plate 15.

[0027] Preferably, Figure 2~Figure 4As shown, both ends of the lower surface of the extrusion block 13 along the circumferential direction of the mounting cover 1 and both ends of the upper surface of the clamping block 22 along the circumferential direction of the matching disk 21 are provided with chamfers, and a spring 17 is vertically connected between the extrusion block 13 and the driving plate 15. During operation, when the clamping block 22 slides in the lifting channel 14, its chamfered surface contacts the chamfered surface of the extrusion block 13 and pushes the extrusion block 13 upward, and the spring 17 is compressed. When the upper surface of the clamping block 22 contacts the lower surface of the extrusion block 13, the elastic force of the spring 17 drives the extrusion block 13 to squeeze the clamping block 22, thereby fixing the clamping block 22. Under this preferred scheme, there is no need to actively move the extrusion block 13 during the installation of the baffle 2 to the mounting cover 1, thereby simplifying the operating steps of fixing the baffle 2.

[0028] Preferably, Figure 2 As shown, the baffle frame 3 includes a fixed rod 31 and a driving rod 32. The fixed rod 31 is vertically installed in the vacuum coating machine chamber, and the upper end of the fixed rod is coaxially connected with a first rotating mechanism 33. The first rotating mechanism can adopt a rotating motor, a rotating cylinder or other rotating driving mechanical device; the driving shaft of the first rotating mechanism 33 is connected with a rotating seat 34, one end of the driving rod 32 is rotatably matched with the rotating seat 34, and a second rotating mechanism 35 is provided on the rotating seat 34. The second rotating mechanism 35 can adopt a rotating motor, a rotating cylinder or other rotating driving mechanical device; the second rotating mechanism 35 is arranged perpendicular to the driving rod 32, the driving shaft of the second rotating mechanism 35 is vertically connected to one end of the driving rod 32, and the other end of the driving rod 32 is connected to the mounting cover 1, the first rotating mechanism 33 is used to drive the mounting cover 1 and the baffle 2 to rotate along a horizontal axis, and the horizontal axis refers to the axis parallel to the bottom of the vacuum coating machine chamber; the second rotating mechanism 35 is used to drive the mounting cover 1 and the baffle 2 to rotate along a vertical axis, and the vertical axis refers to the axis perpendicular to the bottom of the vacuum coating machine chamber.

[0029] The above description is only a preferred embodiment of the present application and is not intended to limit the present application. Obviously, those skilled in the art can make various modifications and variations to the present application without departing from the spirit and scope of the present application.

Claims

1. A vacuum coating machine evaporation source baffle mechanism, characterized in that: include: The mounting cover (1) is in the shape of a cylindrical bin with an open lower end. The inner wall surface of the mounting cover (1) is provided with an annular track (11) and a plurality of slots (12). The slots (12) are arranged in a circular array and connect the annular track (11) and the bottom of the mounting cover (1). A number of extrusion blocks (13) matching the slots (12) are arranged vertically in the annular track (11). The extrusion blocks (13) are arranged in a circular array and are respectively arranged between adjacent slots (12). The baffle (2) has a matching disk (21) on its upper surface, the outer diameter of the matching disk (21) matches the inner diameter of the mounting cover (1), and the edge of the matching disk (21) is provided with a number of clamping blocks (22) that match the clamping slot (12), the clamping blocks (22) being arranged in a circular array and having a size that matches the clamping slot (12); The baffle frame (3) is arranged in the chamber of the vacuum coating machine and is used to support and drive the installation cover (1) to move.

2. The evaporation source baffle mechanism of the vacuum coating machine according to claim 1, characterized in that: The upper surface of the mounting cover (1) is provided with a lifting channel (14) which vertically penetrates into the annular track (11). The number and size of the lifting channels (14) match the extrusion block (13). The extrusion block (13) is slidably fitted in the lifting channel (14). The upper end of the extrusion block (13) is connected to a driving plate (15). The driving plate (15) is fitted with an electric screw (16). The electric screw (16) is vertically arranged on the upper surface of the mounting cover (1).

3. The evaporation source baffle mechanism of the vacuum coating machine according to claim 2, characterized in that: Both ends of the lower surface of the extrusion block (13) along the circumferential direction of the mounting cover (1) and both ends of the upper surface of the clamping block (22) along the circumferential direction of the matching disk (21) are provided with chamfers, and a spring (17) is vertically connected between the extrusion block (13) and the driving plate (15).

4. The evaporation source baffle mechanism of the vacuum coating machine according to claim 1, characterized in that: The baffle frame (3) comprises a fixed rod (31) and a driving rod (32). The fixed rod (31) is vertically installed in the chamber of the vacuum coating machine, and its upper end is coaxially connected to a first rotating mechanism (33). The driving shaft of the first rotating mechanism (33) is connected to a rotating seat (34). One end of the driving rod (32) is rotatably matched with the rotating seat (34). A second rotating mechanism (35) is provided on the rotating seat (34). The second rotating mechanism (35) is arranged perpendicular to the driving rod (32). The driving shaft of the second rotating mechanism (35) is vertically connected to one end of the driving rod (32), and the other end of the driving rod (32) is connected to the mounting cover (1).

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