Metal reflecting film evaporation source observation device for continuous observation
By setting up mirrors and guide groove structures in the coating machine, the observation difficulties caused by metal film deposition during coating process are solved, real-time observation of the evaporation source and monitoring of the film layer quality are achieved, and the processing efficiency of abnormal alarms is improved .
Patent Information
- Application Number
- CN202323573258.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2023-12-26
- Publication Date
- 2024-12-27
- Estimated Expiration
- 2033-12-26
AI Technical Summary
During the coating process, due to the high reflection and high absorption of the metal film, when the thickness of the metal film deposited on the window glass exceeds 40nm, the observation window is almost impermeable, resulting in the inability to observe the evaporation source in real time, affecting the film layer quality and abnormal alarm processing .
Design a device including a mirror, a connecting block, a guide groove and a baffle, reflecting the evaporation source process to the observation window through the mirror, using the structure of the guide groove and a baffle to ensure that the mirror does not detach from its position during operation, and passes through The rotating block and adjustment bolt adjust the mirror angle and fixed position.
The evaporation source is observed through a mirror during the coating process, avoiding observation difficulties due to light opacity, and improving real-time monitoring of the evaporation source and controlling the film layer quality.
Smart Images
Figure CN222250956U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of evaporation source observation, in particular to a metal reflection film evaporation source observation device used for continuous observation. Background Art
[0002] The coating observation windows currently use transparent quartz glass for direct observation. There are generally two coating observation windows on the left and right for observing the evaporation source. Due to the long distance and the obstruction of other components in the coating machine, if you want to see the specific situation of the evaporation source clearly, you can only observe through the observation window on the same side. When observing the evaporation source, the evaporation source will deposit a thicker film on the window glass of the same side of the observation window. Generally, the transmittance of dielectric film materials is high, which will not affect the observation of the evaporation source in a short time. When coating metal materials, due to the high reflection and high absorption of the metal film, generally when the thickness of about 40nm or more is deposited on the window glass, the observation window is almost opaque, and the evaporation source cannot be observed and monitored in real time. If an abnormal alarm related to the evaporation source position occurs at this time and in the subsequent coating process, since the evaporation source cannot be directly observed, it can only be checked by inflating the door, which has a significant impact on the quality of the film layer. Utility Model Content
[0003] In order to solve the above technical problems, the utility model provides a metal reflective film evaporation source observation device used for continuous observation, which can observe the evaporation source process through the reflection effect of the reflector.
[0004] The utility model is implemented by the following technical scheme: a metal reflective film evaporation source observation device used for continuous observation, including a reflector arranged in a coating machine, the inner wall of the coating machine is connected to a back plate via a connecting block, and guide rails with guide grooves are fixed at both ends of the front side surface of the back plate, and the two sides of the reflector are embedded in the guide grooves.
[0005] Preferably, the connecting block is hinged to the back plate via two rotating blocks, and two adjusting bolts are installed at the lower end of the front side of the back plate, and the ends of the adjusting bolts are in contact with the front side of the connecting block.
[0006] Preferably, a baffle is provided at the top of the guide groove to prevent the reflector from escaping from the guide groove during operation.
[0007] Preferably, the baffle is connected to the top of the guide groove via a torsion spring, and the baffle is fixed to the back plate via fixing bolts.
[0008] Preferably, the baffle is hinged at the top of the guide groove; a latch is connected to the guide rail via a spring, both front and rear ends of the latch penetrate the guide rail, and a pull plate is connected to the front end of the latch; a socket for inserting the latch is provided on the baffle.
[0009] Preferably, the pull plate is connected to the latch via a bearing; and stoppers are fixed on both sides of the latch on the guide rail.
[0010] Beneficial effects of the utility model:
[0011] (1) The utility model provides an embodiment, in which the evaporation source process can be reflected by a reflector, which is convenient for staff to observe; the guide groove is used to place the reflector, and it is convenient to disassemble and replace the reflector; the back plate can be rotated by a rotating block, so that the angle of the reflector can be adjusted; the back plate can be fixed after the angle is adjusted by an adjusting bolt.
[0012] (2) In one embodiment of the present invention, the reflector can be limited in position in the guide groove by a baffle to prevent the reflector from being separated from the guide groove during operation.
[0013] (3) In one embodiment of the present invention, the baffle can be automatically reset when it is displaced by a torsion spring.
[0014] The utility model can observe the evaporation source process through the reflection effect of the reflection mirror. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] Figure 1 It is a front view schematic diagram of the coating machine.
[0016] Figure 2 This is the internal structure diagram of the coating machine.
[0017] Figure 3 It is a partial schematic diagram of the coating machine from the left or right side.
[0018] Figure 4 It is a three-dimensional schematic diagram of the back panel.
[0019] Figure 5 This is a front view of the back panel.
[0020] Figure 6 It is a schematic diagram of the right side view of the back panel.
[0021] Figure 7 It is a schematic diagram of a first embodiment in which a baffle is arranged on a guide groove.
[0022] Figure 8 It is a schematic diagram of a second embodiment in which the baffle is fixed on the guide groove. DETAILED DESCRIPTION
[0023] The utility model is further described below in conjunction with the accompanying drawings.
[0024] See also Figures 1 to 6The utility model provides an embodiment: a metal reflective film evaporation source observation device for continuous observation, comprising a reflector 21 arranged in a coating machine 1, through which the evaporation source process can be reflected, so that the staff can observe it conveniently; a back plate 23 is connected to the inner wall of the coating machine 1 via a connecting block 22, and the connecting block 22 is used to connect the back plate 23, and guide rails 25 with guide grooves 24 are fixed at both ends of the front side surface of the back plate 23, and the guide grooves 24 are used to place the reflector 21, and are convenient for disassembly and replacement of the reflector 21, and the two sides of the reflector 21 are embedded in the guide grooves 24.
[0025] The coating machine 1 has two observation windows on both sides, which are observation window A11 and observation window C13. The observation window A11 is used to observe the evaporation source process at the evaporation source device C15 reflected by the reflector 21, and the observation window C13 is used to observe the evaporation source process at the evaporation source device A14 reflected by the reflector 21. The coating machine 1 has an evaporation source device A14 located at the observation window A11, and has an evaporation source device C15 located at the right observation window C13. The coating machine 1 is located above the evaporation source device A14 and above the evaporation source device C15, both of which are connected to the back plate 23 via the connecting block 22.
[0026] The evaporation source process at the evaporation source device A14 can be reflected to the observation window C13 by the reflector 21 located above the evaporation source device A14, so that the staff can observe from the observation window C13; the evaporation source process at the evaporation source device C15 can be reflected to the observation window A11 by the reflector 21 located above the evaporation source device C15, so that the staff can observe from the observation window A11.
[0027] The connecting block 22 is hinged to the back plate 23 via two rotating blocks 26. The back plate 23 can be rotated by the rotating blocks 26, so that the angle of the reflector 21 can be adjusted. Two adjusting bolts 27 are installed at the lower end of the front side of the back plate 23. The ends of the adjusting bolts 27 are in contact with the front side of the connecting block 22. The adjusting bolts 27 can be used to fix the back plate 23 after the angle is adjusted.
[0028] When the angle of the back plate 23 is adjusted, the adjusting bolt 27 is rotated so that the end of the adjusting bolt 27 contacts the front side of the connecting block 22, so that the adjusting bolt 27 is stuck on the connecting block 22 through the friction between the adjusting bolt 27 and the connecting block 22, thereby fixing the back plate 23.
[0029] Please continue reading Figures 7 and 8In one embodiment of the utility model, a baffle 31 is provided at the top of the guide groove 24, and the baffle 31 can limit the reflector 21 in the guide groove 24 to prevent the reflector 21 from escaping from the guide groove 24 during operation.
[0030] In one embodiment of the utility model, the baffle 31 is connected to the top of the guide groove 24 via a torsion spring 32, and the torsion spring 32 can automatically reset the baffle 31 when it shifts. The baffle 31 is fixed to the back plate 23 via a fixing bolt 33 for fixing the baffle 31.
[0031] The two baffles 31 are turned upwards, and the reflector 21 is inserted into the guide groove 24 . After the insertion is completed, the baffle 31 is reset due to the reset effect of the torsion spring 32 , and then the fixing bolt 33 is screwed in to complete the fixing of the baffle 31 .
[0032] In one embodiment of the utility model, the baffle 31 is hinged at the top of the guide groove 24, so that the baffle 31 can rotate, which is convenient for inserting the reflector 21 into the guide groove 24; the guide rail 25 is connected to a pin 35 via a spring 34, and the front and rear ends of the pin 35 both penetrate the guide rail 25, and the front end of the pin 35 is connected to a pull plate 36 for pulling the pin 35; the baffle 31 is provided with a socket for inserting the pin 35, so that the baffle 31 can be fixed.
[0033] Pull the pull plate 36 to disengage the pin 35 from the socket. At this time, the spring 34 is compressed, the baffle 31 is rotated upward, and then the reflector 21 is inserted into the guide groove 24. Then the baffle 31 is turned back and the pull plate 36 is released. Due to the reset action of the spring 34, the pin 35 is inserted into the socket, and the baffle 31 is fixed.
[0034] In an embodiment of the utility model, the pull plate 36 is connected to the latch 35 via a bearing 37 to facilitate the rotation of the pull plate 36 ; blocks 38 are fixed on both sides of the latch 35 on the guide rail 25 to block the pull plate 36 .
[0035] Pull the pull plate 36 to disengage the pin 35 from the socket, then rotate the pull plate 36, and release the pull plate 36 so that the pull plate 36 contacts the baffle 31 and is limited on the baffle 31; rotate the baffle 31 upward, then insert the reflector 21 into the guide groove 24, and then rotate the baffle 31 back; then rotate the pull plate 36 again to disengage from the baffle 31, and then release the pull plate 36 so that the pin 35 is inserted into the socket, thereby completing the fixation of the baffle 31.
[0036] The coating machine and evaporation source device in the utility model are both prior art, which can be clearly understood by those skilled in the art and will not be described in detail here. The utility model protects the structural features of a metal reflective film evaporation source observation device used for continuous observation.
[0037] The above description is only a preferred embodiment of the present utility model and cannot be understood as a limitation of the present application. All equivalent changes and modifications made within the scope of the patent application of the present utility model shall fall within the scope of the present utility model.
Claims
1. A metal reflective film evaporation source observation device for continuous observation, characterized in that: It comprises a reflecting mirror arranged in a coating machine, wherein a back plate is connected to the inner wall of the coating machine via a connecting block, guide rails with guide grooves are fixed to the left and right ends of the front side of the back plate, and the two sides of the reflecting mirror are embedded in the guide grooves.
2. The metal reflective film evaporation source observation device for continuous observation according to claim 1, characterized in that: The connecting block is hinged to the back plate via two rotating blocks. Two adjusting bolts are installed at the lower end of the front side of the back plate. The ends of the adjusting bolts are in contact with the front side of the connecting block.
3. The metal reflective film evaporation source observation device for continuous observation according to claim 1, characterized in that: A baffle is provided on the top of the guide groove to prevent the reflector from escaping from the guide groove during operation.
4. The metal reflective film evaporation source observation device for continuous observation according to claim 3, characterized in that: The baffle is connected to the top of the guide groove via a torsion spring, and the baffle is fixed to the back plate via fixing bolts.
5. The metal reflective film evaporation source observation device for continuous observation according to claim 3, characterized in that: The baffle is hinged at the top of the guide groove; a latch is connected to the guide rail via a spring, both front and rear ends of the latch penetrate the guide rail, and a pull plate is connected to the front end of the latch; a socket for inserting the latch is provided on the baffle.
6. The metal reflective film evaporation source observation device for continuous observation according to claim 5, characterized in that: The pull plate is connected to the latch via a bearing; and stoppers are fixed on both sides of the latch on the guide rail.