Crucible edge device for reducing bulging rate of quartz crucible

Abstract

The utility model provides a crucible edge device for reducing the bulging rate of a quartz crucible, which is applied to the outer side of the quartz crucible and is characterized by comprising a crucible edge body, and a first exhaust array and a second exhaust array are arranged on the inner wall of the crucible edge body. The first exhaust array comprises a plurality of transverse exhaust channels which are sequentially arranged in the vertical direction and extend along the inner wall of the crucible edge body in the horizontal direction, and the second exhaust array comprises a plurality of vertical exhaust channels which are sequentially arranged in the transverse direction and extend along the inner wall of the crucible edge body in the horizontal direction; the vertical exhaust channels extend along the inner wall of the crucible edge body in the vertical direction, and the transverse exhaust channels correspond to the vertical exhaust channels, so that the transverse exhaust channels are communicated with the corresponding vertical exhaust channels.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnaces, in particular to a crucible bulging device for reducing the bulging rate of a quartz crucible. Background Art

[0002] Single crystal silicon crystal is a very important semiconductor material and is widely used in solar cells, integrated circuits, sensors and other fields. At present, the production of single crystal silicon crystal mainly adopts the Czochralski method, which requires the use of a quartz crucible with a crucible bonnet provided on the outer shell of the quartz crucible. Single crystal silicon crystal is generated by heating the quartz crucible. However, after the quartz crucible is softened by heat, it will stick to the inner wall of the crucible bonnet, which is not conducive to the discharge of gas between the quartz crucible and the crucible bonnet, causing the gas to continue to increase, resulting in bulging of the quartz crucible, affecting normal crystal pulling. Utility Model Content

[0003] The utility model aims to provide a crucible device for reducing the bulging rate of a quartz crucible. A transverse exhaust channel and a vertical exhaust channel which are interconnected are arranged in the inner wall of a crucible body, and one end of the vertical exhaust channel is toward the top of the crucible body, so that the gas between the quartz crucible and the inner wall of the crucible body can be discharged toward the top of the crucible body along the mutually conductive exhaust channels, thereby reducing the bulging rate of the quartz crucible.

[0004] In order to solve the above technical problems, the utility model adopts the following solutions:

[0005] A crucible device for reducing the bulging rate of a quartz crucible is applied to the outside of a quartz crucible and is characterized in that it includes a crucible body, and a first exhaust array and a second exhaust array are arranged on the inner wall of the crucible body, the first exhaust array includes a plurality of transverse exhaust channels arranged in sequence in the vertical direction, and the transverse exhaust channels extend along the inner wall of the crucible body in the horizontal direction, the second exhaust array includes a plurality of vertical exhaust channels arranged in sequence in the transverse direction, and the vertical exhaust channels extend along the inner wall of the crucible body in the vertical direction, the transverse exhaust channels correspond to the vertical exhaust channels, and the transverse exhaust channels are connected to the corresponding vertical exhaust channels.

[0006] Furthermore, the cross-sections of the transverse exhaust channel and the vertical exhaust channel are both semicircular, and the radius of the semicircle is smaller than the thickness of the inner wall of the crucible body.

[0007] Furthermore, one end of the vertical exhaust channel faces the bottom of the Crucible body and is connected to the corresponding transverse exhaust channel, and the other end of the vertical exhaust channel faces the top of the Crucible body and is connected to the top.

[0008] Furthermore, the transverse exhaust channel is arranged in an annular shape on the inner wall of the Crucible body, and the vertical exhaust channel extends downward from the top of the Crucible body and penetrates the transverse exhaust channel, so that the vertical exhaust channel is connected with the transverse exhaust channel.

[0009] Furthermore, the number of the transverse exhaust channels is greater than 3, and the transverse exhaust channels are arranged in sequence at the same interval in the vertical direction.

[0010] Furthermore, the number of the vertical exhaust channels is greater than 3, and the vertical exhaust channels are arranged in sequence along the same interval in the transverse direction.

[0011] Further, the first exhaust array includes a dense exhaust array and a sparse exhaust array, the dense exhaust array is arranged near the top of the crucible body, and the sparse exhaust array is arranged near the bottom of the crucible body.

[0012] The dense exhaust array includes a plurality of transverse exhaust channels arranged in sequence along the same first spacing distance in the vertical direction, and the sparse exhaust array includes a plurality of transverse exhaust channels arranged in sequence along the same second spacing distance in the vertical direction, and the first spacing distance is smaller than the second spacing distance.

[0013] Furthermore, the number of transverse exhaust channels in the dense exhaust array is greater than the number of transverse exhaust channels in the sparse exhaust array.

[0014] Beneficial effects of the utility model:

[0015] The utility model provides a crucible device for reducing the bulging rate of a quartz crucible. A transverse exhaust channel and a vertical exhaust channel that are interconnected are arranged in the inner wall of a crucible body, and one end of the vertical exhaust channel is toward the top of the crucible body, so that the gas between the quartz crucible and the inner wall of the crucible body can be discharged toward the top of the crucible body along the mutually conductive exhaust channels, thereby reducing the bulging rate of the quartz crucible. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic diagram of the structure of the Canbang body in Example 1 of the utility model;

[0017] Figure 2 It is a schematic diagram of the cross-sectional structure of the Canbang body in Example 1 of the utility model;

[0018] Figure 3 It is a schematic diagram of the cross-sectional structure of the Canbang body in Example 2 of the utility model;

[0019] Explanation of the reference numerals: 1-Baobang body, 2-lateral exhaust channel, 3-vertical exhaust channel. DETAILED DESCRIPTION

[0020] In order to enable those skilled in the art to better understand the technical solution of the present invention, the present invention is further described in detail below in conjunction with the accompanying drawings and specific implementation methods, but the implementation methods of the present invention are not limited thereto.

[0021] In the description of the present utility model, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "longitudinal", "lateral", "horizontal", "inside", "outside", "front", "back", "top", "bottom", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings, or are the directions or positional relationships in which the utility model product is usually placed when in use. They are only for the convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on the present utility model.

[0022] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "open", "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0023] The present invention is described in detail below with reference to the accompanying drawings and in combination with embodiments:

[0024] Example 1

[0025] A crucible device for reducing the bulging rate of a quartz crucible is applied to the outside of a quartz crucible, characterized in that it includes a crucible body 1, and a first exhaust array and a second exhaust array are arranged on the inner wall of the crucible body 1, the first exhaust array includes a plurality of transverse exhaust channels 2 arranged in sequence in the vertical direction, and the transverse exhaust channels 2 extend along the inner wall of the crucible body 1 in the horizontal direction, the second exhaust array includes a plurality of vertical exhaust channels 3 arranged in sequence in the transverse direction, and the vertical exhaust channels 3 extend along the inner wall of the crucible body 1 in the vertical direction, the transverse exhaust channels 2 correspond to the vertical exhaust channels 3, so that the transverse exhaust channels 2 are connected to the corresponding vertical exhaust channels 3.

[0026] Preferably, the cross-sections of the transverse exhaust channel 2 and the vertical exhaust channel 3 are both semicircular, and the radius of the semicircle is smaller than the thickness of the inner wall of the crucible body 1, in order to ensure the strength of the crucible while ensuring that the gas between the quartz crucible and the crucible can be effectively discharged. Specifically, in this embodiment, the best choice is to set the radius of the semicircle to 1 / 10-1 / 5 of the thickness of the straight wall of the crucible body 1.

[0027] Preferably, one end of the vertical exhaust channel 3 faces the bottom of the crucible body 1 and is connected to the corresponding transverse exhaust channel 2, and the other end of the vertical exhaust channel 3 faces the top of the crucible body 1 and is connected to the top, so as to ensure that the gas between the quartz crucible and the crucible can be discharged to the channel opening at the top of the crucible through the vertical exhaust channel 3.

[0028] Preferably, the transverse exhaust channel 2 is arranged in an annular shape on the inner wall of the crucible body 1, and the vertical exhaust channel 3 extends downward from the top of the crucible body 1 and penetrates the transverse exhaust channel 2, so that the vertical exhaust channel 3 is connected to the transverse exhaust channel 2, the purpose is to make the transverse exhaust channel 2 evenly distributed on the inner wall of the crucible, and to ensure that the transverse exhaust channel 2 is connected to the vertical exhaust channel 3.

[0029] Preferably, the number of the transverse exhaust channels 2 is greater than 3, and the transverse exhaust channels 2 are arranged in sequence along the same interval in the vertical direction, so as to evenly distribute the plurality of transverse exhaust channels 2 on the inner wall of the crucible.

[0030] Preferably, the number of the vertical exhaust channels 3 is greater than 3, and the vertical exhaust channels 3 are arranged in sequence along the same interval in the transverse direction, so as to evenly distribute the plurality of transverse exhaust channels 2 on the inner wall of the crucible.

[0031] Based on the above principles, the utility model is further described:

[0032] At present, the production of single crystal silicon crystal mainly adopts the Czochralski method, which requires the use of a quartz crucible, with a crucible bonnet arranged outside the quartz crucible, and the single crystal silicon crystal is generated by heating the quartz crucible. However, after the quartz crucible is softened by heat, it will cling to the inner wall of the crucible bonnet, which is not conducive to the discharge of gas between the quartz crucible and the crucible bonnet, causing the gas to continue to increase, resulting in bulging of the quartz crucible, affecting normal crystal pulling.

[0033] Moreover, the quality of quartz sand used in the straight wall of quartz crucible is usually worse than that of the bottom of quartz crucible, and the inner wall of the crucible is not provided with exhaust channels, which leads to the inability to discharge the gas between the quartz crucible and the crucible normally, making the risk of bulging of the quartz crucible greater. Therefore, the utility model provides a crucible device for reducing the bulging rate of quartz crucible, and an exhaust channel is added to the inner wall of the straight wall of the crucible to promote the discharge of gas at this position. Specifically, a transverse exhaust channel 2 and a vertical exhaust channel 3 that are interconnected are provided in the inner wall of the crucible body 1, and one end of the vertical exhaust channel 3 is toward the top of the crucible body 1, so that the gas between the inner wall of the quartz crucible and the crucible body 1 can be discharged toward the top of the crucible body 1 along the mutually conductive exhaust channels, thereby reducing the bulging rate of the quartz crucible.

[0034] In this embodiment, if Figure 1 , Figure 2 As shown, five channels can be evenly arranged horizontally on the inner wall of the crucible body 1, and three channels can be evenly arranged vertically to penetrate the horizontal channels from the top of the crucible downward to ensure that all channels are connected and the gas pressure is equal everywhere; once the gas is generated, it will flow to the channel and be discharged to the channel opening at the top of the crucible.

[0035] Example 2

[0036] Based on Example 1, in this embodiment, the first exhaust array includes a dense exhaust array and a sparse exhaust array, the dense exhaust array is arranged near the top of the Crucible body 1, and the sparse exhaust array is arranged near the bottom of the Crucible body 1;

[0037] The dense exhaust array includes a plurality of transverse exhaust channels 2 arranged in sequence along the same first spacing distance in the vertical direction, and the sparse exhaust array includes a plurality of transverse exhaust channels 2 arranged in sequence along the same second spacing distance in the vertical direction, and the first spacing distance is smaller than the second spacing distance.

[0038] Preferably, the number of transverse exhaust channels 2 in the dense exhaust array is greater than the number of transverse exhaust channels 2 in the sparse exhaust array. The purpose is to make the number of exhaust channels in the dense exhaust array in the upper middle part of the quartz crucible greater than the number of exhaust channels in the sparse exhaust array in the lower part of the quartz crucible.

[0039] Because, in actual use, the upper part of the quartz crucible is heated the most, and more gas is generated in this position. Figure 3 As shown, the dense exhaust array in the middle and upper part of the inner wall of the Crucible body 1 can be encrypted, so that several additional exhaust channels are added to the middle and upper part of the inner wall of the Crucible body 1 to enhance the exhaust effect of this position, make the upper channels dense and the lower channels sparse, and increase the exhaust channels to promote exhaust and reduce the incidence of bulging in the quartz crucible.

[0040] It is understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of the present invention, but the present invention is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A crucible bulging device for reducing the bulging rate of a quartz crucible, applied to the outer side of a quartz crucible, characterized in that: The invention comprises a crucible body (1), wherein a first exhaust array and a second exhaust array are arranged on the inner wall of the crucible body (1), wherein the first exhaust array comprises a plurality of transverse exhaust channels (2) arranged in sequence in the vertical direction, and the transverse exhaust channels (2) extend along the inner wall of the crucible body (1) in the horizontal direction, and the second exhaust array comprises a plurality of vertical exhaust channels (3) arranged in sequence in the transverse direction, and the vertical exhaust channels (3) extend along the inner wall of the crucible body (1) in the vertical direction, and the transverse exhaust channels (2) correspond to the vertical exhaust channels (3), so that the transverse exhaust channels (2) are connected to the corresponding vertical exhaust channels (3).

2. A crucible bulging device for reducing the bulging rate of a quartz crucible according to claim 1, characterized in that: The cross-sections of the transverse exhaust channel (2) and the vertical exhaust channel (3) are both semicircular, and the radius of the semicircle is smaller than the thickness of the inner wall of the crucible body (1).

3. A crucible bulging device for reducing the bulging rate of a quartz crucible according to claim 1, characterized in that: One end of the vertical exhaust channel (3) faces the bottom of the Crucible body (1) and is connected to the corresponding transverse exhaust channel (2), and the other end of the vertical exhaust channel (3) faces the top of the Crucible body (1) and is connected to the top.

4. A crucible bulging device for reducing the bulging rate of a quartz crucible according to claim 2, characterized in that: The transverse exhaust channel (2) is arranged in an annular shape on the inner wall of the crucible body (1), and the vertical exhaust channel (3) extends downward from the top of the crucible body (1) and penetrates the transverse exhaust channel (2), so that the vertical exhaust channel (3) is connected to the transverse exhaust channel (2).

5. A crucible bulging device for reducing the bulging rate of a quartz crucible according to claim 1, characterized in that: The number of the transverse exhaust channels (2) is greater than 3, and the transverse exhaust channels (2) are arranged in sequence along the same interval in the vertical direction.

6. A crucible bulging device for reducing the bulging rate of a quartz crucible according to claim 1, characterized in that: The number of the vertical exhaust channels (3) is greater than 3, and the vertical exhaust channels (3) are arranged in sequence along the same interval in the transverse direction.

7. A crucible bulging device for reducing the bulging rate of a quartz crucible according to claim 1, characterized in that: The first exhaust array comprises a dense exhaust array and a sparse exhaust array, wherein the dense exhaust array is arranged close to the top of the crucible body (1), and the sparse exhaust array is arranged close to the bottom of the crucible body (1). The dense exhaust array comprises a plurality of transverse exhaust channels (2) arranged in sequence along a same first spacing distance in a vertical direction, and the sparse exhaust array comprises a plurality of transverse exhaust channels (2) arranged in sequence along a same second spacing distance in a vertical direction, wherein the first spacing distance is smaller than the second spacing distance.

8. A crucible bulging device for reducing the bulging rate of a quartz crucible according to claim 7, characterized in that: The number of transverse exhaust channels (2) in the dense exhaust array is greater than the number of transverse exhaust channels (2) in the sparse exhaust array.

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