Source bottle for solar cell diffusion

Abstract

The utility model discloses a solar cell diffusion source bottle, which comprises a closed bottle body, an air inlet pipe and an air outlet pipe, the air inlet pipe and the air outlet pipe are inserted into the bottle body, a thickening part is arranged at the bottom of the bottle body, an air passage is arranged in the thickening part, two end ports of the air passage are both communicated with an inner cavity of the bottle body, and the air outlet pipe is communicated with the bottle body. The lower end of the air inlet pipe is detachably and fixedly connected with a port of one end of the air channel. The phosphorus oxychloride source bottle overcomes the defects in the prior art, and solves the problems that after the source bottle is used for a period of time, due to the fact that the position of the gas inlet pipe is fixed, the contact area of nitrogen and source liquid is reduced, and a large amount of phosphorus oxychloride liquid remains in the source bottle to cause waste.

Description

Technical Field

[0001] The utility model relates to the technical field of solar cell production, in particular to a source bottle for solar cell diffusion. Background Art

[0002] Currently in the field of solar cells, the production of PN junctions, that is, diffusion, is the core of solar cell technology. The diffusion process is carried out in a furnace tube at high temperature to react with a phosphorus source. Phosphorus is brought into the furnace tube by gas using phosphorus oxychloride as the source. The source undergoes a high-temperature decomposition reaction in the tube to produce phosphorus trioxide. The phosphorus trioxide then undergoes a replacement reaction with silicon and diffuses on the surface of the silicon wafer to form n-type doping.

[0003] After the existing source bottle has been used for a period of time, since the phosphorus oxychloride liquid level continues to decrease with process consumption, while the position of the air inlet pipe remains unchanged, when the phosphorus oxychloride liquid level in the phosphorus oxychloride storage container is low, the contact area between nitrogen and the source liquid will gradually become smaller, and the generated source steam will gradually decrease, thereby causing the steam entering the diffusion furnace to gradually decrease, resulting in poor diffusion effect. The remaining phosphorus oxychloride liquid in the source bottle cannot be fully utilized, causing waste and increasing production costs. Utility Model Content

[0004] The utility model aims to provide a source bottle for solar cell diffusion, overcome the defects of the prior art, and solve the problem that after the source bottle has been used for a period of time, the contact area between nitrogen and source liquid becomes smaller due to the fixed position of the air inlet pipe, and a large amount of phosphorus oxychloride liquid remains in the source bottle, causing waste.

[0005] To achieve the above-mentioned purpose, the technical solution adopted by the utility model is: a source bottle for solar cell diffusion, comprising a closed bottle body and an air inlet pipe and an air outlet pipe inserted into the bottle body, a thickened portion is provided at the bottom of the bottle body, an airway is provided in the thickened portion, both end ports of the airway are connected to the inner cavity of the bottle body, and the lower end of the air inlet pipe is detachably fixedly connected to a port at one end of the airway.

[0006] A further improvement of the present invention is that the upper surface of the thickened portion is a concave surface, the center point of the concave surface has the lowest height, and the port at the other end of the airway is coaxially arranged with the center point of the concave surface.

[0007] A further improvement of the present invention is that the concave surface is an inner concave cone surface, and the port at one end of the airway is coaxially arranged with the generatrix of the inner concave cone surface.

[0008] A further improvement of the utility model is that the airway is a U-shaped airway.

[0009] A further improvement of the utility model is that a baffle is provided in the port of the airway, and a plurality of bubble-breaking holes are provided on the baffle.

[0010] A further improvement of the utility model is that a secondary cracking net is provided in the concave surface, and the mesh openings of the secondary cracking net are smaller than the mesh openings of the cracking bubble holes.

[0011] A further improvement of the utility model is that the lower end of the air outlet pipe is located above the liquid level in the bottle body.

[0012] A further improvement of the present invention is that a liquid level sensor for detecting the liquid level therein is provided on one side of the bottle body.

[0013] The beneficial effects of the utility model are:

[0014] The utility model arranges a thickened portion and an airway in the source bottle so that the air intake of the air intake pipe can rush out upward from the thickened portion. Compared with the source bottle in the prior art, the distance between the air intake pipe and the bottom surface of the source bottle is reduced, thereby overcoming the defects of the prior art and solving the problem that after the source bottle has been used for a period of time, the contact area between nitrogen and source liquid becomes smaller due to the fixed position of the air intake pipe, and a large amount of phosphorus oxychloride liquid remains in the source bottle, causing waste.

[0015] The utility model sets the upper surface of the thickened part as a concave surface, so that when there is little residual liquid in the bottle body, it can be gathered to the middle through the concave surface, which is convenient for contact with the gas outlet end of the airway, thereby increasing the contact area between nitrogen and source liquid and improving resource utilization.

[0016] The utility model provides a baffle in the port of the airway, and a plurality of bubble-breaking holes are provided on the baffle, so that large-bubble nitrogen discharged from the air inlet pipe can be divided into small-bubble nitrogen, thereby increasing the specific surface area of ​​the nitrogen, so that the nitrogen can bring out more phosphorus oxychloride vapor, providing sufficient phosphorus source for subsequent formation of PN junction on the surface of the silicon wafer, and further improving the effect by arranging a secondary split network.

[0017] The utility model provides a liquid level sensor for detecting the liquid level in the bottle on one side of the bottle body, which can detect the height of the liquid level in the bottle body and facilitate the reaction. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the main cross-section of the structure of the utility model.

[0019] Figure 2 It is a partially enlarged schematic diagram of the main cross-section of the structure of the utility model.

[0020] In the figure, 1-bottle body, 2-air inlet pipe, 3-air outlet pipe, 4-thickened part, 5-airway, 6-concave surface, 7-blocking piece, 8-split hole, 9-secondary split net, 10-liquid level sensor. DETAILED DESCRIPTION

[0021] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0022] Example 1: Combination Figure 1~2 It can be seen that a source bottle for solar cell diffusion includes a closed bottle body 1 and an air inlet pipe 2 and an air outlet pipe 3 inserted into the bottle body 1. A thickened portion 4 is provided at the bottom of the bottle body 1, and an air duct 5 is provided in the thickened portion 4. Both end ports of the air duct 5 are connected to the inner cavity of the bottle body 1, and the lower end of the air inlet pipe 2 is detachably fixedly connected to a port at one end of the air duct 5.

[0023] The upper surface of the thickened portion 4 is a concave surface 6, the center point of the concave surface 6 is the lowest, and the port at the other end of the airway 5 is coaxially arranged with the center point of the concave surface 6. Preferably, the concave surface 6 is an inner concave cone, and the port at one end of the airway 5 is coaxially arranged with the generatrix of the inner concave cone.

[0024] A baffle 7 is provided in the port of the airway 5, and a plurality of bubble-breaking holes 8 are provided on the baffle 7. Preferably, the airway 5 is a U-shaped airway.

[0025] A secondary cracking net 9 is arranged in the concave surface 6, and the mesh of the secondary cracking net 9 is smaller than the mesh of the cracking bubble hole 8. The lower end of the air outlet pipe 3 is located above the liquid level in the bottle body 1.

[0026] A liquid level sensor 10 for detecting the liquid level in the bottle body 1 is disposed on one side of the bottle body 1. Preferably, a scale is disposed on the bottle body 1.

[0027] Preferably, the air intake pipe 2 is clamped with a port at one end of the air duct 5. Further preferably, an elastic sealing ring is provided in a port where the air duct 5 and the air intake pipe 2 are clamped, and the elastic sealing ring is located between the air intake pipe 2 and the port for sealing.

[0028] The working principle of a source bottle for solar cell diffusion provided by the utility model is as follows: when in use, the air inlet pipe 2 is used as a gas carrying port (such as nitrogen), which penetrates into the lower part of the phosphorus oxychloride liquid in the bottle body 1 through the air inlet pipe 2 and is connected to the thickened part 3, and the gas then emerges and floats up through the outlet at the other end of the airway 5. Under the action of buoyancy, the bubbles carry out and mix the vapor of the phosphorus oxychloride, and bring the phosphorus source into the high-temperature quartz tube through the air outlet pipe 3 for diffusion. When there is not much liquid left in the bottle body 1, the remaining liquid is collected through the concave surface 6 so that it can better contact with the gas, thereby reducing waste.

[0029] In the description of the present utility model, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", "top", "bottom", "inside", "outside", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on the present utility model. Any equivalent structure or equivalent process transformation made using the contents of the utility model specification and the accompanying drawings, or directly or indirectly used in other related technical fields, are similarly included in the patent protection scope of the present utility model.

Claims

1. A source bottle for solar cell diffusion, comprising a closed bottle body (1) and an air inlet pipe (2) and an air outlet pipe (3) inserted into the bottle body (1), characterized in that: The bottom of the bottle body (1) is provided with a thickened portion (4), an airway (5) is provided in the thickened portion (4), both ends of the airway (5) are in communication with the inner cavity of the bottle body (1), and the lower end of the air inlet pipe (2) is detachably fixedly connected to a port at one end of the airway (5).

2. A source bottle for solar cell diffusion according to claim 1, characterized in that: The upper surface of the thickened portion (4) is a concave surface (6), the center point of the concave surface (6) has the lowest height, and the port at the other end of the airway (5) is coaxially arranged with the center point of the concave surface (6).

3. A source bottle for solar cell diffusion according to claim 2, characterized in that: The concave surface (6) is an inwardly concave cone surface, and a port at one end of the airway (5) is coaxially arranged with a generatrix of the inwardly concave cone surface.

4. A source bottle for solar cell diffusion according to claim 1, characterized in that: The airway (5) is a U-shaped airway.

5. A source bottle for solar cell diffusion according to claim 2, characterized in that: A baffle (7) is provided in the port of the airway (5), and a plurality of bubble-breaking holes (8) are provided on the baffle (7).

6. A source bottle for solar cell diffusion according to claim 5, characterized in that: A secondary splitting net (9) is provided in the concave surface (6), and the mesh openings of the secondary splitting net (9) are smaller than the mesh openings of the splitting pores (8).

7. A source bottle for solar cell diffusion according to claim 1, characterized in that: The lower end of the air outlet pipe (3) is located above the liquid level in the bottle body (1).

8. The source bottle for solar cell diffusion according to claim 1, characterized in that: A liquid level sensor (10) for detecting the liquid level therein is provided on one side of the bottle body (1).

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