Bearing seat, bearing structure and molecular pump

Abstract

The utility model relates to a bearing seat, a bearing structure and a molecular pump, the bearing seat comprises a bearing seat body, a mounting hole used for containing a bearing is formed in the bearing seat body, a vibration reduction hole is formed in at least one end, in the axis direction of the mounting hole, of the bearing seat body, and the vibration reduction hole is formed in the circumferential direction of the mounting hole; and a vibration reduction wall is formed between the vibration reduction hole and the mounting hole. The bearing rotates at a high speed along with the rotor, and huge heat generated by the bearing can be subjected to metal transfer through contact between the bearing and the inner wall of the mounting hole, so that the heat is transferred to the bearing seat body, and finally the heat is dissipated to the external environment through the bearing seat. Due to the fact that the bearing directly makes contact with the vibration reduction wall to achieve vibration reduction, elastic elements such as O-shaped rings do not need to be arranged to achieve vibration reduction, heat of the bearing can be directly transmitted to the bearing seat body through the vibration reduction wall, the heat dissipation effect of the bearing is effectively improved, normal use of the bearing is guaranteed, and the service life of the bearing is prolonged.

Description

Technical Field

[0001] The present application relates to the technical field of vacuum equipment, and in particular to a bearing seat, a bearing structure and a molecular pump. Background Art

[0002] As a vacuum obtaining device, the working speed of the molecular pump rotor is generally as high as tens of thousands of revolutions per minute. The unbalanced mass of the rotor at high speed will cause the rotor to have bending vibration and torsional vibration, etc. This vibration is ultimately transmitted to the bearing of the molecular pump, affecting its performance and reducing its life. In addition, when the bearing is running at high speed, it will generate huge heat due to friction. If this heat is not dissipated in time, it will cause a sharp temperature rise. When the temperature exceeds the normal operating range of the bearing, it will cause the grease to degenerate, leading to bearing failure, or long-term operation at a relatively high temperature will reduce the life.

[0003] At present, the existing technology generally provides elastic elements such as O-rings between the outer ring of the bearing and the bearing seat for supporting the bearing to achieve vibration reduction, but this will result in less contact area between the bearing and the bearing seat, making the heat conduction effect between the bearing and the bearing seat worse, and finally making it difficult for the heat of the bearing to be dissipated in time, reducing the service life of the bearing. Summary of the invention

[0004] Based on this, it is necessary to provide a bearing seat, a bearing structure and a molecular pump to address the problem that the heat of existing bearings is difficult to dissipate in time.

[0005] A bearing seat, comprising:

[0006] The bearing seat body is provided with a mounting hole for accommodating the bearing, and the bearing seat body is provided with a vibration-damping hole on at least one end in the axial direction of the mounting hole. The vibration-damping hole is arranged circumferentially around the mounting hole, and a vibration-damping wall is formed between the vibration-damping hole and the mounting hole.

[0007] In one of the embodiments, the vibration-damping holes form a circle around the circumference of the mounting hole.

[0008] In one embodiment, the vibration-damping holes located at the same end of the bearing seat body are arranged in a radial direction of the mounting hole to form at least two circles;

[0009] The vibration-damping wall is constructed between any two radially adjacent circles of the vibration-damping holes, and between a circle of the vibration-damping holes closest to the mounting hole and the mounting hole.

[0010] In one embodiment, the circle where each circle of the vibration-damping holes is located is concentric with the circle where the hole wall of the mounting hole is located.

[0011] In one embodiment, each circle of the vibration-damping holes includes a plurality of vibration-damping sub-holes, and all the vibration-damping sub-holes in the same circle of the vibration-damping holes are arranged at intervals along the circumference of the mounting hole;

[0012] Furthermore, in the circumferential direction of the mounting hole, an extension path of each of the vibration-damping sub-holes in the same circle of the vibration-damping holes is an arc shape surrounding the circumference of the mounting hole.

[0013] In one of the embodiments, in the circumferential direction of the mounting hole, all the vibration-damping sub-holes in the same circle of the vibration-damping holes are staggered with all the vibration-damping sub-holes in an adjacent circle of the vibration-damping holes.

[0014] In one of the embodiments, the vibration damping hole is filled with thermal grease, and the bearing seat further includes a sealing cover, which is disposed on the bearing body and seals the vibration damping hole.

[0015] In one of the embodiments, a mounting groove is provided on the outer peripheral wall of the bearing seat body, the mounting groove is coaxially arranged with the mounting hole, and the mounting groove is used for installing a vibration damping ring.

[0016] A bearing structure comprises a bearing and a bearing seat as described in any one of the above items, wherein the bearing is installed in the mounting hole of the bearing seat, and the outer wall of the bearing is in contact with the vibration-damping wall.

[0017] A molecular pump comprises the bearing structure as described above.

[0018] In the above-mentioned bearing structure, when the bearing is installed in the mounting hole, the outer wall of the bearing and the vibration-damping wall fit each other, so that the bearing can generate huge heat through metal transfer through the contact between the bearing and the inner wall of the mounting hole, thereby transferring the heat to the bearing seat body, and finally dissipating the heat to the external environment through the bearing seat.

[0019] Since the bearing is in direct contact with the vibration-damping wall to achieve vibration reduction, there is no need to set elastic elements such as O-rings to achieve vibration reduction. The heat of the bearing can be directly transferred to the bearing seat body through the vibration-damping wall, thereby effectively improving the heat dissipation effect of the bearing, ensuring the normal use of the bearing, and increasing the service life of the bearing.

[0020] Moreover, during the processing of the bearing seat, a vibration-damping hole can be formed by directly drilling a hole on the end face of the bearing seat body. Compared with the method of drilling grooves inside the mounting hole to set elastic elements such as O-rings, the method of directly processing on the end face of the bearing body is simpler and effectively reduces the processing difficulty of the bearing seat body. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] FIG. 1 is a schematic diagram of the structure of a bearing seat in some embodiments of the present application.

[0022] FIG. 2 is a schematic cross-sectional view of a bearing seat of the bearing structure in FIG. 1 .

[0023] FIG. 3 is a top view of the bearing seat of the bearing structure in FIG. 1 .

[0024] Description of reference numerals:

[0025] Bearing seat body 10; mounting hole 11; vibration reduction hole 12; vibration reduction wall 13; vibration reduction sub-hole 14; mounting groove 15;

[0026] Bearing 100. DETAILED DESCRIPTION

[0027] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

[0028] In the description of the present application, it should be understood that if the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. appear, the orientation or position relationship indicated by these terms is based on the orientation or position relationship shown in the accompanying drawings, which is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application.

[0029] In addition, if the terms "first" or "second" appear, these terms are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of this application, if the term "plurality" appears, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0030] In this application, unless otherwise clearly specified and limited, if the terms "installed", "connected", "connected", "fixed" and the like appear, these terms should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integrated connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to the specific circumstances.

[0031] In the present application, unless otherwise clearly specified and limited, if there is a description that a first feature is "above" or "below" a second feature, etc., or similar descriptions appear, it may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0032] It should be noted that if an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. If an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. If any, the terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in this application are for illustrative purposes only and do not represent the only implementation method.

[0033] Referring to Figures 1, 2 and 3, a bearing structure provided in an embodiment of the present application includes a bearing 100 and a bearing seat. The bearing 100 is installed on the bearing seat. In actual use, the bearing structure can be used in devices such as motors and molecular pumps that output torque through a rotor. After the bearing structure is fixed, the rotor is passed through the bearing 100 on the bearing seat, so that the bearing seat and the bearing 100 are used to radially limit and support the rotor.

[0034] The bearing seat includes a bearing seat body 10, and a mounting hole 11 for accommodating a bearing 100 is opened on the bearing seat body 10. When the bearing 100 is in the mounting hole 11 and runs at high speed with the rotor, in addition to generating heat, the vibration generated by the rotor due to the unbalanced mass of the rotor will also be transmitted to the bearing 100. Moreover, since the bearing 100 is installed in the mounting hole 11, the vibration will directly act between the bearing seat body 10 and the bearing 100, affecting the performance and service life of the bearing 100.

[0035] To this end, a vibration-damping hole 12 is formed at at least one end of the bearing seat body 10 in the axial direction of the mounting hole 11. The vibration-damping hole 12 is arranged around the circumference of the mounting hole 11, and a vibration-damping wall 13 is formed between the vibration-damping hole 12 and the mounting hole 11. When the bearing 100 is installed in the mounting hole 11, the outer wall of the bearing 100 fits against the vibration-damping wall 13. In this way, when the bearing 100 vibrates due to the rotor, the vibration is first transmitted to the vibration-damping wall 13, and the vibration will push the vibration-damping wall 13 to swing between the mounting hole 11 and the vibration-damping hole 12, so that the vibration transmitted from the bearing 100 to the bearing seat body 10 is reduced by the swing of the vibration-damping wall 13, thereby achieving a vibration reduction effect.

[0036] Specifically, the vibration-damping wall 13 between the vibration-damping hole 12 and the mounting hole 11 is a relatively thin-walled structure. In actual use, the vibration-damping wall 13 can form a vibration-damping effect similar to a metal leaf spring between the bearing 100 and the bearing seat body 10, thereby improving the vibration suppression effect of the bearing 100.

[0037] Furthermore, when the bearing 100 is installed in the mounting hole 11, the outer wall of the bearing 100 and the vibration-damping wall 13 fit together, so that the bearing 100 can generate huge heat through metal transfer through the contact between the bearing 100 and the inner wall of the mounting hole 11, thereby transferring the heat to the bearing seat body 10, and finally dissipating the heat to the external environment through the bearing seat.

[0038] Since the bearing 100 is in direct contact with the vibration-damping wall 13 to achieve vibration reduction, there is no need to set elastic elements such as O-rings to achieve vibration reduction. The heat of the bearing 100 can be directly transferred to the bearing seat body 10 through the vibration-damping wall 13, thereby effectively improving the heat dissipation effect of the bearing 100, ensuring the normal use of the bearing 100, and increasing the service life of the bearing 100.

[0039] Moreover, during the processing of the bearing seat, the vibration-damping hole 12 can be formed by directly drilling a hole on the end face of the bearing seat body 10. Compared with the method of drilling grooves inside the mounting hole 11 to set elastic elements such as O-rings, the method of directly processing on the end face of the bearing 100 body is simpler and effectively reduces the processing difficulty of the bearing seat body 10.

[0040] Among them, a vibration damping hole 12 is set at one end of the bearing seat body 10, and the other end is closed. The length of the vibration damping hole 12 in the axial direction of the mounting hole 11 is greater than the length of the bearing 100, so that the vibration damping wall 13 can cover the outer wall of the bearing 100.

[0041] It can be understood that, according to actual usage requirements, in some other embodiments, a vibration-damping hole 12 is provided at one end of the bearing seat body 10 in the axial direction of the mounting hole 11, and the vibration-damping hole 12 can directly pass through the bearing seat body 10 along the axial direction of the mounting hole 11, so that a vibration-damping hole 12 is also provided on the other end of the bearing seat body 10. In some other embodiments, vibration-damping holes 12 can also be provided at both ends of the bearing seat body 10, but the vibration-damping holes 12 at both ends are not interconnected.

[0042] In some embodiments of the present application, the vibration-damping hole 12 forms a circle around the circumference of the mounting hole 11, that is, the vibration-damping hole 12 surrounds the mounting hole 11, so that the vibration-damping wall 13 formed between the vibration-damping hole 12 and the mounting hole 11 can surround the mounting hole 11 in a circle. When the bearing 100 is subjected to vibration from the rotor in any radial direction, the vibration can be transmitted to the vibration-damping wall 13 and vibration can be reduced by the vibration-damping wall 13.

[0043] It is understandable that, in other embodiments, the vibration-damping hole 12 may only surround a portion of the space around the mounting hole 11 , that is, the vibration-damping hole 12 is arc-shaped as a whole, so as to reduce vibration in a specific direction.

[0044] In some embodiments, the vibration-damping holes 12 may also form multiple circles around the circumference of the mounting hole 11 to form multi-level vibration reduction. Specifically, the bearing seat body 10 is provided with multiple vibration-damping holes 12 at one end in the axial direction of the mounting hole 11. The vibration-damping holes 12 located at the same end of the bearing seat body 10 are arranged at intervals in the radial direction of the mounting hole 11 to form at least two circles, and each circle of vibration-damping holes 12 is arranged along the circumferential direction of the mounting hole 11.

[0045] A vibration-damping wall 13 is formed between any two radially adjacent vibration-damping holes 12, and the vibration-damping wall 13 is formed between the vibration-damping hole 12 closest to the mounting hole 11 and the mounting hole 11. In this way, a plurality of vibration-damping walls 13 arranged at intervals are formed on the bearing seat body 10 along the radial direction of the mounting hole 11. When the bearing 100 vibrates due to the rotor, the vibration is transmitted to the bearing seat body 10 and passes through the plurality of vibration-damping walls 13 in sequence. Each time the vibration-damping wall 13 passes through, a certain vibration-damping effect is achieved through the swing of the vibration-damping wall 13. After passing through the plurality of vibration-damping walls 13 in sequence, the vibration can be effectively reduced, thereby further improving the vibration-damping effect of the bearing seat and increasing the service life of the bearing 100.

[0046] In some embodiments, in order to ensure the vibration-damping effect of the vibration-damping wall 13, it is necessary to control the thickness of the vibration-damping wall 13 within a certain range so that the vibration-damping wall 13 forms a thin-walled structure, thereby achieving a vibration-damping effect similar to that of a metal leaf spring. To this end, the thickness of each vibration-damping wall 13 is controlled between 1 mm and 2 mm so that the thickness of the vibration-damping wall 13 can be made as thin as possible without affecting its use, thereby improving the vibration-damping effect of the vibration-damping wall 13.

[0047] In some embodiments, the circle where each circle of vibration-damping holes 12 is located is concentric with the circle where the hole wall of the mounting hole 11 is located, that is, each circle of vibration-damping holes 12 is coaxially arranged with the mounting hole 11. In this way, since the vibration-damping holes 12 are coaxially arranged with the mounting hole 11, the distance between the vibration-damping holes 12 and the mounting hole 11 in the radial direction of the mounting hole 11 is always kept equal, and thus the thickness of the vibration-damping wall 13 in the radial direction of the mounting hole 11 is kept consistent, and the vibration-damping effect of the bearing 100 in all directions is better.

[0048] In some embodiments, each circle of vibration damping holes 12 includes multiple vibration damping sub-holes 14, and all the vibration damping sub-holes 14 in the same circle of vibration damping holes 12 are arranged at intervals along the circumference of the mounting hole 11, and in the circumferential direction of the mounting hole 11, the extension path of each vibration damping sub-hole 14 is an arc around the circumference of the mounting hole 11, and the arc formed by each vibration damping sub-hole 14 is coaxially arranged with the mounting hole 11.

[0049] The vibration-damping hole 12 is arranged as a plurality of vibration-damping sub-holes 14, so that there is a connecting portion between two vibration-damping sub-holes 14, and two adjacent vibration-damping walls 13 can be connected to each other through the connecting portion. When the vibration is transmitted to one of the vibration-damping walls 13, the vibration can be transmitted to another adjacent vibration-damping wall 13 through the connecting portion connected to the vibration-damping wall 13, so that the vibration can be transmitted between the plurality of vibration-damping walls 13, thereby improving the vibration-damping effect of the plurality of vibration-damping walls 13 on the vibration.

[0050] Specifically in some embodiments, in the circumferential direction of the mounting hole 11, all the vibration damping sub-holes 14 in the same circle of vibration damping holes 12 are staggered with all the vibration damping sub-holes 14 in an adjacent circle of vibration damping holes 12, so that after the vibration is transmitted to one vibration damping wall 13, it can be directly transmitted to the adjacent vibration damping wall 13 through the connecting part, thereby improving the vibration transmission rate and further improving the vibration damping efficiency of each vibration damping wall 13.

[0051] Specifically in some embodiments, the bearing seat body 10 has two circles of vibration damping holes 12, each circle of vibration damping holes 12 includes two vibration damping sub-holes 14, and the arc formed by each vibration damping sub-hole 14 in the circumferential direction of the mounting hole 11 is a semicircle. The two semicircular vibration damping sub-holes 14 wrap the mounting hole 11, and the vibration damping sub-holes 14 of a circle of vibration damping holes 12 close to the mounting hole 11 and the vibration damping sub-holes 14 of a circle of vibration damping holes 12 away from the mounting hole 11 are staggered with each other, and the staggered angle is 180°. In some other embodiments, if the number of circles of vibration damping holes 12 increases, the staggered angle between all the vibration damping sub-holes 14 in the same circle of vibration damping holes 12 and all the vibration damping sub-holes 14 in an adjacent circle of vibration damping holes 12 is 360° / N, where N is the number of circles of vibration damping holes 12.

[0052] It is understandable that, in some other embodiments, a circle of vibration-damping holes 12 may also include only one vibration-damping sub-hole 14 , which is circular and surrounds the mounting hole 11 .

[0053] In some embodiments of the present application, in order to improve the heat dissipation efficiency between the bearing 100 and the bearing seat body 10, thermal grease is filled in the vibration damping hole 12. When the bearing 100 is installed in the mounting hole 11, the outer wall of the bearing 100 is in contact with the vibration damping wall 13. The heat generated by the bearing 100 during operation is transferred to the vibration damping wall 13. Thereafter, the heat received by the vibration damping wall 13 is transferred to the thermal grease, and the heat is transferred to other inner walls of the thermal hole through the thermal grease, and finally to the entire bearing seat body 10.

[0054] When there are multiple vibration damping holes 12, each vibration damping hole 12 is filled with thermal grease. After the thermal grease in the vibration damping hole 12 closest to the mounting hole 11 receives the heat from the bearing 100, the heat can be transferred in each vibration damping hole 12 in turn through the thermal grease in each vibration damping hole 12, and finally diffused to the entire bearing seat body 10, which not only ensures the heat dissipation effect of the friction heat of the bearing 100, but also improves the overall structural utilization rate of the bearing seat body 10.

[0055] In order to prevent the thermal grease from leaking from the vibration damping hole 12 to the outside, the bearing seat also includes a sealing cover, which is arranged on the bearing 100 body and seals the vibration damping hole 12, thereby preventing the thermal grease in the vibration damping hole 12 from being lost during the high-speed operation of the bearing 100.

[0056] In some embodiments of the present application, an installation groove 15 is further provided on the outer peripheral wall of the bearing seat body 10. The installation groove 15 is coaxially arranged with the installation hole 11. The installation groove 15 is used to install a vibration damping ring. The vibration damping ring can be an elastic component such as an O-ring. In actual use, the vibration damping ring is installed on the bearing seat body 10, and then installed on the mounting base. After the bearing seat body 10 is installed on the mounting base, the vibration damping ring can be used to reduce vibration between the bearing seat body 10 and the mounting base. In conjunction with the vibration damping wall 13 on the bearing seat body 10, the vibration damping wall 13 and the vibration damping ring are used in series, which effectively improves the vibration damping effect of the bearing 100. While having a simple structure, it also increases the service life of the bearing 100.

[0057] The present application also provides a molecular pump, which includes a rotor and a bearing structure as in any of the above embodiments, the rotor passes through a bearing 100 of the bearing structure, and the bearing seat body 10 is fixed on the motor housing of the molecular pump to support the rotor on the motor housing.

[0058] Furthermore, a fixing hole for installing the bearing seat body 10 is provided on the motor housing, the bearing seat body 10 is installed in the fixing hole, and a vibration damping ring is provided on the mounting groove 15 on the bearing seat body 10, the vibration damping ring abuts against the inner wall of the fixing hole, so that the vibration damping ring can achieve a vibration reduction effect between the bearing seat body 10 and the motor housing.

[0059] The above bearing structure has at least the following advantages:

[0060] When the bearing 100 is installed in the mounting hole 11, the outer wall of the bearing 100 and the vibration-damping wall 13 fit each other, so that the bearing 100 runs at high speed with the rotor and generates huge heat, which can be transferred to the bearing seat body 10 through metal transfer through the contact between the bearing 100 and the inner wall of the mounting hole 11, and finally dissipated to the external environment through the bearing seat.

[0061] Since the bearing 100 is in direct contact with the vibration-damping wall 13 to achieve vibration reduction, there is no need to set elastic elements such as O-rings to achieve vibration reduction. The heat of the bearing 100 can be directly transferred to the bearing seat body 10 through the vibration-damping wall 13, thereby effectively improving the heat dissipation effect of the bearing 100, ensuring the normal use of the bearing 100, and increasing the service life of the bearing 100.

[0062] Moreover, during the processing of the bearing seat, the vibration-damping hole 12 can be formed by directly drilling a hole on the end face of the bearing seat body 10. Compared with the method of drilling grooves inside the mounting hole 11 to set elastic elements such as O-rings, the method of directly processing on the end face of the bearing 100 body is simpler and effectively reduces the processing difficulty of the bearing seat body 10.

[0063] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0064] The above-described embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be construed as limiting the scope of the patent application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent application shall be subject to the attached claims.

Claims

1. A bearing seat, characterized in that: The bearing seat comprises: A bearing seat body (10) is provided with a mounting hole (11) for accommodating a bearing (100), and a vibration-damping hole (12) is provided on at least one end of the bearing seat body (10) in the axial direction of the mounting hole (11), the vibration-damping hole (12) is arranged around the circumference of the mounting hole (11), and a vibration-damping wall (13) is formed between the vibration-damping hole (12) and the mounting hole (11).

2. The bearing seat according to claim 1, characterized in that: The vibration-damping holes (12) form at least one circle around the circumference of the mounting hole (11).

3. The bearing seat according to claim 2, characterized in that: The vibration-damping holes (12) located at the same end of the bearing seat body (10) are arranged at intervals in the radial direction of the mounting hole (11) to form at least two circles; The vibration-damping wall (13) is constructed between any two radially adjacent circles of the vibration-damping holes (12), and between a circle of the vibration-damping holes (12) closest to the mounting hole (11) and the mounting hole (11).

4. The bearing seat according to claim 2, characterized in that: The circle where each circle of the vibration-damping holes (12) is located and the circle where the hole wall of the mounting hole (11) is located are concentric circles.

5. The bearing seat according to claim 2, characterized in that: Each circle of the vibration-damping holes (12) comprises a plurality of vibration-damping sub-holes (14), and all of the vibration-damping sub-holes (14) in the same circle of the vibration-damping holes (12) are arranged at intervals along the circumference of the mounting hole (11); Furthermore, in the circumferential direction of the mounting hole (11), the extension path of each of the vibration-damping sub-holes (14) in the same circle of the vibration-damping holes (12) is an arc around the circumference of the mounting hole (11).

6. The bearing seat according to claim 5, characterized in that: In the circumferential direction of the mounting hole (11), all the vibration-damping sub-holes (14) in the same circle of the vibration-damping holes (12) are staggered with all the vibration-damping sub-holes (14) in an adjacent circle of the vibration-damping holes (12).

7. The bearing seat according to claim 1, characterized in that: The vibration damping hole (12) is filled with heat-conducting grease, and the bearing seat further comprises a sealing cover, which is arranged on the bearing (100) body and seals the vibration damping hole (12).

8. The bearing seat according to claim 1, characterized in that: An installation groove (15) is provided on the outer peripheral wall of the bearing seat body (10), the installation groove (15) is coaxially arranged with the installation hole (11), and the installation groove (15) is used to install a vibration damping ring.

9. A bearing structure, characterized in that: It comprises a bearing (100) and a bearing seat according to any one of claims 1 to 8, wherein the bearing (100) is installed in the mounting hole (11) of the bearing seat, and the outer wall of the bearing (100) is in contact with the vibration-damping wall (13).

10. A molecular pump, characterized in that: Comprising the bearing structure as claimed in claim 9.

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