Top plate turnover mechanism and wafer detection equipment

Abstract

The utility model relates to a top plate turnover mechanism and wafer detection equipment, and the top plate turnover mechanism comprises a top plate, a supporting seat, and a follow-up structure. The top plate is used for mounting a probe card, and one end of the top plate is rotationally connected with the supporting seat, so that the top plate can be opened or closed relative to the supporting seat; the follow-up structure comprises a movable block and a first elastic piece, and the first elastic piece is used for driving the movable block to move, so that the movable block is kept in contact with and supported by the top plate when the top plate is closed. According to the technical scheme, in the process that the top plate is closed relative to the supporting seat, the movable block is always in contact with the top plate, and vibration in the top plate closing process is absorbed through the first elastic piece, so that contact impact generated when the top plate is closed relative to the supporting seat can be reduced; and even contact impact generated when the top plate is closed relative to the supporting seat can be eliminated, so that contact is smooth and impact-free.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer detection, in particular to a top plate flipping mechanism and wafer detection equipment. Background Art

[0002] The wafer detection device comprises a support base, a top plate and a probe card mounted on the top plate, wherein the top plate is mounted on the support base and can be opened or closed relative to the support base. The probe card has probes, which are used to detect the wafer.

[0003] Among them, the equipment often needs to open the top plate when performing daily maintenance and replacing parts. The top plate is prone to contact impact when it is closed relative to the support seat, which can easily cause damage to parts. The top plate is generally supported by a nitrogen spring when open. If the nitrogen spring fails, the top plate will fall, which can easily cause damage to parts or injury to operators. Therefore, this situation needs to be solved. Utility Model Content

[0004] In view of this, the utility model provides a top plate flipping mechanism and a wafer detection device, the main technical problem to be solved is: how to reduce the contact impact when the top plate is closed relative to the support seat.

[0005] In order to achieve the above purpose, the utility model mainly provides the following technical solutions:

[0006] The embodiment of the utility model provides a top plate turning mechanism, which comprises: a top plate, a supporting seat and a follower structure;

[0007] The top plate is used for installing the probe card, and one end of the top plate is rotatably connected to the support base so that the top plate can be opened or closed relative to the support base;

[0008] The follower structure includes a movable block and a first elastic member, wherein the first elastic member is used to drive the movable block to move so that the movable block keeps in contact with and supports the top plate when the top plate is closed.

[0009] In some embodiments, a roller is provided on the movable block, and the movable block is kept in contact with and supported by the top plate through the roller when the top plate is closed.

[0010] In some embodiments, the movable block is further used to be driven by the first elastic member to move to a set position when the top plate is opened to the limit position, so as to stop the top plate and prevent the top plate from closing;

[0011] Wherein, the movable block provides a supporting force to the top plate when it is in the set position, and the direction of the supporting force is perpendicular to the direction in which the first elastic member drives the movable block to move.

[0012] In some embodiments, the top plate flipping mechanism further comprises an unlocking structure, wherein the unlocking structure is used to drive the movable block to move so that the movable block exits the set position, so that the top plate (1) can be closed relative to the support seat (2).

[0013] In some embodiments, the unlocking structure includes a rope, one end of which is connected to a handle, and the other end of the rope is connected to the movable block. The unlocking structure pulls the rope through the handle to drive the movable block to move, so that the movable block exits the set position.

[0014] In some embodiments, the top plate flipping mechanism further includes a guide and limiting structure, and the guide and limiting structure is used to guide and limit the movement of the movable block.

[0015] In some embodiments, the guide limiting structure includes a limiting groove provided on the support seat, the movable block is clamped in the limiting groove, and can be driven by the first elastic member to slide along the limiting groove.

[0016] In some embodiments, the movable block is provided with a first connecting block, the first connecting block is detachable, the movable block is clamped in the limiting groove through the first connecting block, and slides along the limiting groove through the first connecting block.

[0017] In some embodiments, the support seat has a second connecting block, and the second connecting block is detachable; the limiting groove is arranged on the second connecting block so as to be arranged on the support seat through the second connecting block.

[0018] In some embodiments, the top plate flipping mechanism further includes a second elastic member, one end of the second elastic member is connected to the top plate, and the other end is connected to the support seat; the second elastic member is used to provide a force for opening the top plate.

[0019] An embodiment of the utility model further provides a wafer inspection device, which may include any one of the above-mentioned top plate flipping mechanisms.

[0020] By means of the above technical solution, the top plate flipping mechanism and wafer inspection equipment of the utility model have at least the following beneficial effects:

[0021] 1. During the closing process of the top plate relative to the support seat, the movable block is always in contact with the top plate, and the first elastic member absorbs the vibration during the closing process of the top plate, thereby reducing the contact impact when the top plate is closed relative to the support seat, and even eliminating the contact impact when the top plate is closed relative to the support seat, making the contact smooth and impact-free.

[0022] 2. The top plate can be self-locking when opened to prevent the top plate from falling and closing, causing damage to parts or injury to operators, thereby improving the stability and safety of the top plate when it is opened.

[0023] 3. The second elastic member and the first elastic member cooperate to have a greater load-bearing capacity, which can improve the support stability of the top plate. And when the nitrogen spring as the second elastic member fails, the top plate can achieve self-locking, ensuring reliable support and improving safety.

[0024] 4. Easy to operate.

[0025] The above description is only an overview of the technical solution of the utility model. In order to more clearly understand the technical means of the utility model and implement it according to the contents of the specification, the following is a detailed description of the preferred embodiments of the utility model in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0027] Figure 1 This is a structural schematic diagram of a top plate flipping mechanism provided by an embodiment of the utility model when the top plate is closed;

[0028] Figure 2 yes Figure 1 The enlarged schematic diagram of point A in the middle;

[0029] Figure 3 This is a structural schematic diagram of a top plate flipping mechanism provided by an embodiment of the utility model when the top plate is opened;

[0030] Figure 4 yes Figure 3 The enlarged schematic diagram of point B in the middle;

[0031] Figure 5 It is a schematic diagram reflecting the connection between the movable block and the support seat.

[0032] Figure numerals: 1, top plate; 2, support seat; 3, second elastic member; 4, first elastic member; 5, movable block; 6, second connecting block; 7, protrusion; 8, rope; 11, rotating shaft; 51, first connecting block; 52, roller; 61, limiting groove. DETAILED DESCRIPTION

[0033] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0034] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back...), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0035] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the utility model, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or suggesting their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, the technical solutions between the various embodiments can be combined with each other, but they must be based on the ability of ordinary technicians in the field to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the utility model.

[0036] like Figures 1 to 5 As shown, an embodiment of the utility model provides a top plate flipping mechanism, which includes a top plate 1, a support seat 2 and a follower structure. The top plate 1 is used for installing a probe card, and the probe card can be fixed on the top plate 1. One end of the top plate 1 is rotatably connected to the support seat 2, so that the top plate 1 can be opened or closed relative to the support seat 2. Specifically, one end of the top plate 1 can be rotatably connected to the support seat 2 through a rotating shaft 11.

[0037] The aforementioned follower structure includes a movable block 5 and a first elastic member 4. The first elastic member 4 is used to drive the movable block 5 to move so that the movable block 5 maintains contact and support with the top plate 1 when the top plate 1 is closed. It should be noted that the "closing" here refers to the entire closing process of the top plate 1 from the fully open state to the closed state to the extreme position.

[0038] In the above example, during the process of the top plate 1 closing relative to the support seat 2, since the movable block 5 always keeps in contact with the top plate 1 and absorbs the vibration during the closing process of the top plate 1 through the first elastic member 4, the contact impact when the top plate 1 is closed relative to the support seat 2 can be reduced, and even the contact impact when the top plate 1 is closed relative to the support seat 2 can be eliminated, making the contact smooth and impact-free.

[0039] In some embodiments, when the top plate 1 is opened, the first elastic member 4 also drives the movable block 5 to maintain contact and support with the top plate 1. It should be noted that "opening" here refers to the entire opening process of the top plate 1 from a fully closed state to an open limit position.

[0040] In the above example, when the top plate 1 is opened, the first elastic member 4 keeps in contact with and supports the top plate 1 by driving the movable block 5, which has the effect of assisting the top plate 1 to open.

[0041] In some embodiments, the movable block 5 is in contact-type non-connection cooperation with the top plate 1. Since the movable block 5 and the top plate 1 are only in contact and not connected, the impact of the top plate 1 on the movable block 5 during the opening and closing process can be reduced.

[0042] like Figure 5 As shown, the movable block 5 may be provided with a roller 52, and the movable block 5 is kept in contact and supported with the top plate 1 by the roller 52 when the top plate 1 is closed. The roller 52 can roll, so that there is rolling friction between the movable block 5 and the top plate 1, thereby reducing the friction resistance between the movable block 5 and the top plate 1.

[0043] In some embodiments, the movable block 5 is also used to be driven by the first elastic member 4 to move to a set position when the top plate 1 is opened to the limit position, so as to stop the top plate 1 and prevent the top plate 1 from closing. In this way, the top plate 1 can be self-locked when it is opened, preventing the top plate 1 from falling and closing, causing damage to parts or injuries to operators, thereby improving the stability and safety of the top plate 1 when it is opened.

[0044] In some embodiments, the aforementioned movable block 5 provides a supporting force to the top plate 1 when in the set position, and the direction of the supporting force is perpendicular to the direction in which the first elastic member 4 drives the movable block 5 to move. In a specific application example, when the top plate 1 is opened to the extreme position and the movable block 5 is in the set position, the top plate 1 and the movable block 5 are in surface contact, and the direction of the aforementioned supporting force is vertically upward, and the direction in which the first elastic member 4 drives the movable block 5 to move is horizontal.

[0045] Among them, since the direction in which the movable block 5 provides supporting force to the top plate 1 when in the set position is perpendicular to the direction in which the first elastic member 4 drives the movable block 5 to move, the pressure of the top plate on the first elastic member 4 in the self-locking state can be reduced, thereby increasing the service life of the first elastic member 4.

[0046] The aforementioned top plate flipping mechanism may further include an unlocking structure, which is used to drive the movable block 5 to move so that the movable block 5 withdraws from the aforementioned set position, so that the top plate 1 can be closed relative to the support seat 2.

[0047] In the above example, the unlocking structure can unlock the self-locking state of the top plate 1 when it is opened, so that the top plate 1 can be closed smoothly.

[0048] In order to realize the function of the aforementioned unlocking structure, such as Figure 5 As shown, the aforementioned unlocking structure may include a rope 8, one end of the rope 8 is connected to a handle, and the other end of the rope 8 is connected to the movable block 5. The unlocking structure pulls the rope 8 through the handle to drive the movable block 5 to move, so that the movable block 5 exits the aforementioned set position.

[0049] In the above example, a handle can be set on the support seat 2. The handle is not marked in the figure. When the rope 8 is pulled by the handle, the movable block 5 can be driven to move, so that the movable block 5 withdraws from the aforementioned set position, thereby unlocking the top plate 1.

[0050] In some embodiments, the aforementioned top plate flipping mechanism may further include a guide and limit structure, which is used to guide and limit the movement of the movable block 5, thereby having the effect of improving the movement accuracy of the movable block 5.

[0051] In order to realize the function of the aforementioned guide limit structure, in a specific application example, Figure 5 As shown, the aforementioned guide limiting structure may include a limiting groove 61 provided on the support seat 2, and the aforementioned movable block 5 is clamped in the limiting groove 61, and can be driven by the first elastic member 4 to slide along the limiting groove 61. Among them, the movable block 5 can be clamped and slidably matched with the limiting groove 61 through a dovetail structure, and of course, the movable block 5 can also be clamped and slidably matched with the limiting groove 61 using other structures, and the details are not repeated here.

[0052] like Figure 5 As shown, the movable block 5 may be provided with a first connecting block 51, and the first connecting block 51 is detachable, for example, the first connecting block 51 may be detachably connected to the movable block 5 by screws. The movable block 5 is clamped in the limiting groove 61 through the first connecting block 51, and slides along the limiting groove 61 through the first connecting block 51.

[0053] In the above example, since the movable block 5 is engaged and slidably fitted with the limiting groove 61 through the first connecting block 51, the first connecting block 51 wears out quickly. However, by setting the first connecting block 51 in a detachable form, it has the advantage of convenient maintenance.

[0054] like Figure 5 As shown, the aforementioned support base 2 has a second connecting block 6, which is detachable, for example, the second connecting block 6 can be detachably connected to the support base 2 by screws. The aforementioned limiting groove 61 is arranged on the second connecting block 6, so as to be arranged on the support base 2 through the second connecting block 6.

[0055] In the above example, since the movable block 5 is engaged and slidably matched with the limiting groove 61, the limiting groove 61 wears out quickly. However, by setting the second connecting block 6 to be detachable, it has the advantage of convenient maintenance.

[0056] The first elastic member 4 may be a spring or a flexible plastic. Figure 4 and Figure 5 As shown, the first elastic member 4 can be arranged between the support seat 2 and the movable block 5. One end of the first elastic member 4 abuts against the support seat 2, and the other end abuts against the movable block 5. Among them, a convex block 7 can be provided on the support seat 2, and one end of the first elastic member 4 can abut against the convex block 7 to abut against the support seat 2 through the convex block 7.

[0057] like Figure 3 As shown, the aforementioned top plate flipping mechanism may further include a second elastic member 3, one end of which is connected to the top plate 1, and the other end of which is connected to the support seat 2. The second elastic member 3 is used to provide a force for opening the top plate 1. In a specific application example, the second elastic member 3 may be a nitrogen spring.

[0058] In the above example, since the second elastic member 3 is connected to both the support seat 2 and the top plate 1 , it can provide stable support for the top plate 1 when the top plate 1 is opened.

[0059] In addition, the second elastic member 3 and the aforementioned first elastic member 4 cooperate to have a greater load-bearing capacity, which can improve the support stability of the top plate 1. And when the nitrogen spring as the second elastic member 3 fails, the top plate can achieve self-locking, ensuring reliable support and improving safety.

[0060] The utility model also provides a wafer inspection device, which may include the aforementioned top plate flipping mechanism. Because the wafer inspection device adopts the aforementioned top plate flipping mechanism, during the process of the top plate 1 closing relative to the support seat 2, the movable block 5 is always in contact with the top plate 1, and the vibration of the top plate 1 during the closing process is absorbed by the first elastic member 4, thereby reducing the contact impact when the top plate 1 is closed relative to the support seat 2, and even eliminating the contact impact when the top plate 1 is closed relative to the support seat 2, so that the contact is smooth and impact-free.

[0061] The above description is only a preferred embodiment of the utility model, and does not limit the patent scope of the utility model. All equivalent structural changes made by using the contents of the utility model specification and drawings under the utility model concept, or directly / indirectly used in other related technical fields are included in the patent protection scope of the utility model.

Claims

1. A top plate turning mechanism, characterized in that: include: A top plate (1), a support seat (2) and a follower structure; The top plate (1) is used for installing the probe card, and one end of the top plate (1) is rotatably connected to the support seat (2) so that the top plate (1) can be opened or closed relative to the support seat (2); The follower structure comprises a movable block (5) and a first elastic member (4), wherein the first elastic member (4) is used to drive the movable block (5) to move so that the movable block (5) maintains contact with and supports the top plate (1) when the top plate (1) is closed.

2. The top plate turning mechanism according to claim 1, characterized in that: The movable block (5) is provided with a roller (52), and when the top plate (1) is closed, the movable block (5) maintains contact with and supports the top plate (1) through the roller (52).

3. The top plate turning mechanism according to claim 1 or 2, characterized in that: The movable block (5) is also used to be driven by the first elastic member (4) to move to a set position when the top plate (1) is opened to the limit position, so as to stop the top plate (1) and prevent the top plate (1) from closing; Wherein, the movable block (5) provides a supporting force to the top plate (1) when it is in the set position, and the direction of the supporting force is perpendicular to the direction in which the first elastic member (4) drives the movable block (5) to move.

4. The top plate turning mechanism according to claim 3, characterized in that: It also comprises an unlocking structure, wherein the unlocking structure is used to drive the movable block (5) to move so that the movable block (5) exits the set position, so that the top plate (1) can be closed relative to the support seat (2).

5. The top plate turning mechanism according to claim 4, characterized in that: The unlocking structure comprises a rope (8), one end of the rope (8) is connected to a handle, and the other end of the rope (8) is connected to the movable block (5). The unlocking structure pulls the rope (8) through the handle to drive the movable block (5) to move, so that the movable block (5) exits the set position.

6. The top plate turning mechanism according to claim 1, 2, 4 or 5, characterized in that: It also comprises a guiding and limiting structure, which is used for guiding and limiting the movement of the movable block (5).

7. The top plate turning mechanism according to claim 6, characterized in that: The guide limiting structure comprises a limiting groove (61) arranged on the support seat (2), and the movable block (5) is clamped in the limiting groove (61) and can be driven by the first elastic member (4) to slide along the limiting groove (61).

8. The top plate turning mechanism according to claim 7, characterized in that: The movable block (5) is provided with a first connecting block (51), the first connecting block (51) is detachable, the movable block (5) is clamped in the limiting groove (61) through the first connecting block (51), and slides along the limiting groove (61) through the first connecting block (51).

9. The top plate turning mechanism according to claim 7 or 8, characterized in that: The support seat (2) has a second connecting block (6), and the second connecting block (6) is detachable; the limiting groove (61) is arranged on the second connecting block (6) so as to be arranged on the support seat (2) through the second connecting block (6).

10. A wafer inspection device, characterized in that: The invention comprises the top plate turning mechanism according to any one of claims 1 to 9.

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