Clamping module for clamping super lens and debugging system comprising same

Abstract

The utility model provides a clamping module for clamping a super lens, and relates to the technical field of super lenses. Comprising a first clamping piece and a second clamping piece, and the first clamping piece comprises a first wide part and a first narrow part extending out of the bottom of the first wide part; a first side, far away from the tail end of the first wide part, of the first narrow part is provided with a first partial groove, and the first partial groove is used for placing a first end of a super lens; the second clamping piece comprises a second wide part and a second narrow part extending out of the bottom of the second wide part; a second side, far away from the tail end of the second wide part, of the second narrow part is provided with a second partial groove, and the second partial groove is used for placing a second end of the super lens; the second end is parallel to the first end; the first clamping piece is detachably connected with the second clamping piece; by using the clamping module, not only can the super lens be stably clamped, but also the clamping module can be easily separated from the super lens on the premise that no acting force is applied to the super lens after debugging is completed.

Description

Technical Field

[0001] The present application relates to the technical field of metalens, and in particular, to a clamping module for clamping a metalens and a debugging system comprising the same. Background Art

[0002] With the rapid development of optical technology, superlens, as a new type of optical element, has been widely used in many fields due to its unique performance. Superlens has brought revolutionary changes to the design of optical systems with its ultra-thin thickness and excellent optical properties.

[0003] However, there are significant differences in size between metalenses and traditional optical elements. In particular, the thickness of traditional optical elements ranges from millimeters, while the size of metalenses is smaller, usually in the millimeter range, and the thickness range is usually in the hundreds of micrometers. The surface morphology of its nanostructure is easily affected by the manufacturing tolerance, which brings challenges to the assembly of metalenses. Therefore, the assembly equipment designed for traditional optical elements often has the problem of incompatibility during the assembly process of metalenses. For example, the ultra-thin thickness and surface nanostructure of the metalens require that it must not only ensure accuracy and stability during the assembly process, but also ensure that it will not affect the structure and surface morphology of the metalens, so as to avoid destroying the accuracy and stability of the optical performance of the metalens.

[0004] Therefore, how to assemble metalenses efficiently and with high precision has become an urgent problem that needs to be solved. Utility Model Content

[0005] In order to solve the assembly problem of the metalens in the prior art, the first aspect of the present application provides a clamping module for clamping the metalens, including: a first clamping member and a second clamping member.

[0006] The first clamping member includes a first wide portion and a first narrow portion extending from the bottom of the first wide portion; a first partial groove is provided on a first side of the first narrow portion away from the end of the first wide portion, and the first partial groove is used to place the first end of the super lens.

[0007] The second clamping member includes a second wide portion and a second narrow portion extending from the bottom of the second wide portion; a second partial groove is provided on a second side of the second narrow portion away from the end of the second wide portion, and the second partial groove is used to place the second end of the super lens; the second end is parallel to the first end.

[0008] The first clamping member is connected to the second clamping member in a detachable manner; after the first clamping member is connected to the second clamping member in a manner that the first side and the second side face each other, the end of the first narrow portion and the end of the second narrow portion are combined to form a clamp; the clamp is used to place and clamp the metalens; the shape of the clamp matches the shape of the metalens, and the size of the clamp matches the size of the metalens.

[0009] Optionally, in the first clamping member, a connection between the first wide portion and the first narrow portion has a first sloped structure; in the second clamping member, a connection between the second wide portion and the second narrow portion has a second sloped structure.

[0010] Optionally, the complementary angle of the first slope angle of the first slope-shaped structure is greater than the half-divergence angle of the output light of the metalens, and the complementary angle of the second slope angle of the second slope-shaped structure is greater than the half-divergence angle of the output light of the metalens.

[0011] Optionally, the width of the first slope-shaped structure is equal to the width of the first narrow portion; the width of the second slope-shaped structure is equal to the width of the second narrow portion.

[0012] Optionally, a metalens is used to generate a line spot.

[0013] Optionally, the first clamping member is threadedly connected to the second clamping member, wherein a first threaded hole is provided on the side surface of the first wide portion, and a second threaded hole is provided on the side surface of the second wide portion, and the setting positions of the first threaded hole and the second threaded hole correspond one to one.

[0014] Optionally, the first threaded hole is a countersunk threaded hole.

[0015] Optionally, the number of the first threaded holes is greater than or equal to 2, and the number of the second threaded holes is greater than or equal to 2.

[0016] Optionally, a first connection device for connecting to an external device is provided at an end of the first wide portion away from the first narrow portion; and a second connection device for connecting to an external device is provided at an end of the second wide portion away from the second narrow portion.

[0017] The second aspect of the present application provides a debugging system for assembling a superlens, comprising: a clamping module in any technical solution of the first aspect; a superlens module; and a translation stage.

[0018] The super lens module includes a light source, and the super lens module is configured to support the light source and the super lens; the translation stage includes a movable support rod, and the movable support rod is connected to the clamping module.

[0019] Optionally, the super lens module is arranged on one side of the bottom surface of the clamping module.

[0020] Optionally, the superlens module includes a first structural member; the first structural member is plate-shaped and is provided with a through hole; the first end of the through hole is used to accommodate a supporting light source, and the first structural member is provided with a protruding structure on the outer side of the second end of the through hole, and the protruding structure is used to set the superlens.

[0021] Optionally, the super lens module also includes a second structural member, which is used to fix the first structural member and arrange the wires of the light source.

[0022] Optionally, the material of the second structural member is a heat dissipation material.

[0023] Optionally, the movable support rod includes a horizontal support rod and a vertical support rod; the vertical support rod is arranged on the displacement platform; the first end of the horizontal support rod is connected to the vertical support rod, and the second end of the horizontal support rod is connected to the clamping module.

[0024] The clamping module in the technical solution of the present application can adapt to the assembly of the superlens. While realizing high-precision and high-efficiency assembly of the superlens, when the clamping module is separated from the superlens, the first clamping member and the second clamping member can be separated from both sides of the superlens. The clamping module can be separated from the superlens more easily without applying pressure to the side of the superlens, thereby effectively reducing the influence of the separation step on the assembly accuracy of the superlens. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] The accompanying drawings are included to provide a further understanding of the present application and are incorporated in and constitute a part of this specification. The accompanying drawings illustrate embodiments of the present application and together with the following description serve to explain the principles of the present application.

[0026] Figure 1 A schematic structural diagram of a first clamping member provided in an embodiment of the present application is shown;

[0027] Figure 2 A schematic structural diagram of a second clamping member provided in an embodiment of the present application is shown;

[0028] Figure 3 A schematic diagram of the positive micro-nano structure of a superlens provided in an embodiment of the present application is shown;

[0029] Figure 4 A schematic diagram of the negative micro-nano structure of a superlens provided in an embodiment of the present application is shown;

[0030] Figure 5 A schematic diagram of phase modulation in the line width direction of a superlens provided in an embodiment of the present application is shown;

[0031] Figure 6 A schematic diagram of phase modulation in the line length direction of a superlens provided in an embodiment of the present application is shown;

[0032] Figure 7 The two-dimensional light intensity distribution diagram of the line spot in Example 1 provided in the embodiments of the present application is shown;

[0033] Figure 8 The figure shows the simulation result of the normalized light intensity distribution in the line width direction in Example 1 provided in the embodiments of the present application;

[0034] Fig. 9 A diagram showing the simulation result of normalized light intensity distribution in the line length direction in Example 1 provided in the embodiments of the present application is shown;

[0035] Fig.10 The two-dimensional light intensity distribution diagram of the line spot in Example 2 provided in the embodiment of the present application is shown;

[0036] Fig.11 The figure shows the simulation result of the normalized light intensity distribution in the line width direction in Example 2 provided in the embodiment of the present application;

[0037] Fig.12 The figure shows the simulation result of the normalized light intensity distribution in the line length direction in Example 2 provided in the embodiment of the present application;

[0038] Fig.13 A schematic structural diagram of a first clamping member embodiment provided in an embodiment of the present application is shown;

[0039] Fig.14 A schematic structural diagram of a second clamping member embodiment provided in an embodiment of the present application is shown;

[0040] Fig.15 A schematic diagram of the structure of a six-axis translation platform provided in an embodiment of the present application is shown;

[0041] Fig.16 A schematic diagram of the structure of the first structural component of the metalens module provided in an embodiment of the present application is shown;

[0042] Fig.17 A schematic diagram of the structure of the second structural component of the metalens module provided in an embodiment of the present application is shown;

[0043] Fig.18 A schematic diagram showing the positional relationship between the clamping module and the metalens module during the debugging process is shown;

[0044] Fig.19 A three-dimensional stereogram of the clamping module provided in an embodiment of the present application is shown.

[0045] The reference numerals in the figure represent respectively:

[0046] 11: first clamping member; 101: first wide portion; 102: first narrow portion;

[0047] 103: first groove; 104: first slope structure;

[0048] 105: complementary angle of the first slope angle; 106: first width; 107: second width;

[0049] 108: bottom surface of the first clamping member; 21: second clamping member;

[0050] 201: second wide portion; 202: second narrow portion; 203: second partial groove;

[0051] 204: second slope structure; 205: complementary angle of the second slope angle;

[0052] 206: third width; 207: fourth width; 208: bottom surface of the second clamping member;

[0053] 1301: height of the first clamping member; 1401: height of the second clamping member;

[0054] 1501: displacement adjustment device;

[0055] 1502: vertical support rod; 1503: horizontal support rod; 1504: support rod adapter; 1505: clamping module. DETAILED DESCRIPTION

[0056] The present application will now be described more fully below with reference to the accompanying drawings, in which various embodiments are shown. However, the present application can be implemented in many different ways and should not be construed as being limited to the embodiments set forth herein. On the contrary, these embodiments are provided so that the present application will be exhaustive and complete, and will fully convey the scope of the present application to those skilled in the art. The same reference numerals throughout the text represent the same components. Furthermore, in the accompanying drawings, the thickness, ratios, and sizes of the components are exaggerated for clarity.

[0057] The terms used herein are only used for the purpose of describing specific embodiments and are not intended to be limiting. Unless the context clearly indicates otherwise, "one", "the", "at least one" as used herein do not represent a limitation on quantity, but are intended to include both the singular and the plural. For example, unless the context clearly indicates otherwise, "a component" has the same meaning as "at least one component". "At least one" should not be interpreted as being limited to the number "one". "Or" means "and / or". The term "and / or" includes any and all combinations of one or more of the associated listed items.

[0058] Unless otherwise defined, all terms used herein, including technical and scientific terms, have the same meanings as those generally understood by those skilled in the art. Terms defined in commonly used dictionaries should be interpreted as having the same meanings as in the relevant technical context, and unless clearly defined in the specification, these terms are not interpreted as having formal meanings in an idealized or overly formal sense.

[0059] The meaning of “include” or “comprising” specifies properties, quantities, steps, operations, components, parts or a combination thereof, but does not exclude other properties, quantities, steps, operations, components, parts or a combination thereof.

[0060] Embodiments are described herein with reference to cross-sectional views as idealized embodiments. Thus, variations in shape relative to the illustrated diagram are anticipated as a result of, for example, manufacturing techniques and / or tolerances. Therefore, the embodiments described herein should not be interpreted as being limited to the specific shapes of the regions as shown herein, but should include deviations in shape due to, for example, manufacturing. For example, a region shown or described as flat may typically have rough and / or nonlinear features. Moreover, the sharp angles shown may be rounded. Therefore, the regions shown in the figures are schematic in nature, and their shapes are not intended to illustrate the precise shape of the regions and are not intended to limit the scope of the claims.

[0061] Based on this, the inventor provides a clamping module for clamping a metalens.

[0062] Hereinafter, exemplary embodiments according to the present application will be described with reference to the accompanying drawings.

[0063] In some embodiments, Figure 1 and Figure 2 As shown, the present application provides a clamping module for clamping a metalens, which includes a first clamping member 11 and a second clamping member 21. Figure 1 middle, Figure 1 (b) is a right side view of the first clamping member, Figure 1 (a) is Figure 1 The cross-sectional view along the AA direction in (b) is as follows: Figure 1 (c) is a bottom view of the first clamping member; Figure 2 middle, Figure 2 (a) is a bottom view of the second clamping member, Figure 2 (b) is a left view of the second clamping member, Figure 2 (c) is Figure 2 (b) is a cross-sectional view along the AA direction.

[0064] The first clamping member 11 includes a first wide portion 101 and a first narrow portion 102 extending from the bottom of the first wide portion 101; a first partial groove 103 is provided on the first side of the first narrow portion 102 away from the end of the first wide portion 101, and the first partial groove 103 is used to place the first end of the super lens.

[0065] The second clamping member 21 includes a second wide portion 201 and a second narrow portion 202 extending from the bottom of the second wide portion 201; a second partial groove 203 is provided on the second side of the second narrow portion 202 away from the end of the second wide portion, and the second partial groove 203 is used to place the second end of the super lens; the second end is parallel to the first end.

[0066] The first clamping member 11 is connected to the second clamping member 21 in a detachable manner; after the first clamping member 11 is connected to the second clamping member 21 in a manner that the first side and the second side face each other, the end of the first narrow portion 102 and the end of the second narrow portion 202 are combined to form a clamp; the clamp is used to place and clamp the metalens; the shape of the clamp matches the shape of the metalens, and the size of the clamp matches the size of the metalens.

[0067] After the first clamp 11 is connected to the second clamp 21, the ends of the two are combined to form a clamp. The shape and size of the clamp match the metalens, which can clamp and fix the metalens, and prepare for the subsequent metalens position debugging. The first clamp 11 and the second clamp 21 are connected by a detachable connection. After the metalens is debugged and the position is fixed, the first clamp 11 is separated from the second clamp 21, which can achieve the premise of not applying force to the metalens. The clamp can be easily separated from the metalens, which can effectively avoid the error caused by separating the metalens.

[0068] In some embodiments, optionally, in the first clamping member 11, a first sloped structure 104 is configured at the connection between the first wide portion 101 and the first narrow portion 102; in the second clamping member 21, a second sloped structure 204 is configured at the connection between the second wide portion 201 and the second narrow portion 202. Since the structure of the first narrow portion 102 and the second narrow portion 202 is thin and light, the first sloped structure 104 is provided between the first wide portion 101 and the first narrow portion 102, and the second sloped structure 204 is provided between the second wide portion 201 and the second narrow portion 202, which is conducive to improving the strength of the overall structure and extending the service life.

[0069] In some embodiments, optionally, the complementary angle 105 of the first slope angle of the first slope-shaped structure 104 is greater than the half-divergence angle of the light emitted from the metalens, and the complementary angle 205 of the second slope angle of the second slope-shaped structure 204 is greater than the half-divergence angle of the light emitted from the metalens. The complementary angle 105 of the first slope angle and the complementary angle 205 of the second slope angle are both greater than the half-divergence angle of the light emitted from the metalens, which is intended to prevent the first slope-shaped structure 104 and the second slope-shaped structure 204 from blocking the light source and reducing the influence of the clamping module on the debugging of the metalens.

[0070] In some embodiments, optionally, the first width 106 of the first sloped structure 104 is equal to the second width 107 of the first narrow portion 102; the third width 206 of the second sloped structure 204 is equal to the fourth width 207 of the second narrow portion 202. The equal width should be understood as the equal or approximately equal width, and the absolute value of the difference between the width of the sloped structure and the width of the narrow portion is less than 0.5 mm, which can be understood as approximately equal; equal or approximately equal are both within the protection scope of this application.

[0071] In some embodiments, the metalens is optionally used to generate a line spot. Since the clamping module has a high precision in assembling the metalens, it is suitable for metalens with high requirements for assembly precision, such as metalens for generating a line spot, a metalens for generating a uniform light spot, and a metalens for generating a dot light spot.

[0072] In some embodiments, the metalens for generating a line spot is composed of a substrate, a micro-nano structure disposed on one side of the substrate, and a film layer; preferably, the substrate is composed of materials such as silicon or silicon dioxide. Preferably, the micro-nano structure is composed of materials such as silicon or silicon nitride, and the gaps in the micro-nano structure can also be filled with materials. According to the relationship between the substrate material, the micro-nano structure material, and the filling material of the micro-nano structure gap, the micro-nano structure of the metalens can be divided into a positive micro-nano structure and a negative micro-nano structure.

[0073] like Figure 3 As shown, the metalens including the positive micro-nano structure includes: a substrate, a positive micro-nano structure (ie, Figure 3 The positive structure nanopillars shown), the filling material, the base surface film layer (i.e., Figure 3 The positive micro-nano structure is arranged on one side of the substrate, the filling material is arranged in the gap of the positive micro-nano structure, the filling material can be air or a filling material with high transmittance to the working wavelength, the structural surface mask layer is arranged on the surface of the positive micro-nano structure, and the substrate surface mask layer is arranged on the opposite side of the substrate where the positive micro-nano structure is arranged. The characteristic of the metalens containing the positive micro-nano structure is that the material constituting the substrate is the same as the material constituting the positive micro-nano structure.

[0074] like Figure 4 As shown, the metalens including the negative micro-nano structure includes: a substrate, a negative micro-nano structure (ie, Figure 4 The negative structure nanopillars shown), the filling material, the base surface film layer (i.e., Figure 4 The negative micro-nano structure is arranged on one side of the substrate, and the filling material is arranged in the gap of the negative micro-nano structure. The material constituting the negative micro-nano structure is air or a filling material with high transmittance to the working wavelength, and the filling material is the same as the material constituting the substrate; the material and the structural mask layer are arranged on the surface of the positive micro-nano structure, and the substrate mask layer is arranged on the opposite side of the substrate where the positive micro-nano structure is arranged. The characteristic of the metalens containing the negative micro-nano structure is that the material constituting the substrate is the same as the filling material filling the negative micro-nano structure.

[0075] The structured mask layer and the base mask layer are used to improve the light transmittance and protect the micro-nano structure. Preferably, the structured mask layer and the base mask layer are multi-layer structures.

[0076] The phase distribution of the metalens used to generate the line spot is divided into the phase distribution in the line width direction and the phase distribution in the line length direction. The phase distribution in the line width direction is composed of the collimation phase or the focusing phase, and the phase distribution in the line length direction is composed of the collimation phase and the shaping phase. Through the above phase distribution design, the light can be modulated to generate a line spot with a certain width and length and uniform light intensity distribution on the target plane.

[0077] Figure 5 Schematic diagram of the phase modulation effect of the metalens line width direction. As shown in the figure, the light source emits a light beam with a certain divergence angle. After the light beam passes through the metalens, it is collimated or focused and phase modulated, presenting a light beam of preset width on the target plane.

[0078] Figure 6 Schematic diagram of the phase modulation effect of the metalens in the line length direction. As shown in the figure, the light source emits a light beam with a certain divergence angle. After passing through the metalens, the light beam is collimated and shaped. The light beam presents a preset divergence angle in the line length direction, has a certain light intensity distribution, and presents a line light spot of a preset length on the target plane. The divergence angle of the generated line light spot in the line length direction is related to the line length of the final line light spot. By superimposing the modulation phase in the line length direction with the modulation phase in the line width direction, the light source beam can be modulated into a line light spot with a preset length and preset width on the target plane and with uniformity.

[0079] In some embodiments, optionally, the first clamping member 11 is threadedly connected to the second clamping member 21, wherein a first threaded hole is provided on the side of the first wide portion 101, and a second threaded hole is provided on the side of the second wide portion, and the first threaded hole and the second threaded hole are arranged in a one-to-one correspondence. Preferably, the first threaded hole is a countersunk threaded hole. Preferably, the number of the first threaded holes is greater than or equal to 2, and the number of the second threaded holes is greater than or equal to 2. The number of threaded holes greater than 2 is conducive to improving the stability when the first clamping member 11 is connected to the second clamping member 21.

[0080] In some embodiments, optionally, a first connection device for connecting to an external device is provided at the end of the first wide portion 101 away from the first narrow portion 102; a second connection device for connecting to an external device is provided at the end of the second wide portion 201 away from the second narrow portion 202. The first connection device and the second connection device are used to connect to a debugging device.

[0081] In some embodiments, the present application provides a debugging system for assembling a superlens, comprising: a clamping module, a superlens module, and a translation platform in any technical solution of the first aspect; the superlens module includes a light source, and the superlens module is configured to support the light source and the superlens; the translation platform includes a movable support rod, and the movable support rod is connected to the clamping module.

[0082] In some embodiments, the metalens module is optionally disposed on one side of the bottom surface of the clamping module. The bottom surface of the clamping module is the plane where the bottom surface 108 of the first clamping member and the bottom surface 208 of the second clamping member are located when the first clamping member 11 and the second clamping member 21 are connected. Placing the metalens module on one side of the bottom surface of the clamping module is conducive to fixing the metalens after debugging is completed.

[0083] In some embodiments, optionally, the metalens module includes a first structural member; the first structural member is plate-shaped and is provided with a through hole; the first end of the through hole is used to accommodate and support the light source, and the first structural member is provided with a convex structure on the outside of the second end of the through hole, and the convex structure is used to set the metalens. The metalens module is provided with and fixed with a light source at one end of the through hole, and a metalens is provided on the outside of the convex structure at the other end of the through hole.

[0084] In some embodiments, the metalens module may further include a second structural member, which is used to fix the first structural member and arrange the wires of the light source. The second structural member is threadedly connected to the first structural member by screws, and is connected to other debugging equipment by a connecting device.

[0085] In some embodiments, the material of the second structural member is optionally a heat dissipation material. During the debugging stage of the metalens, heat energy is generated in the process of the light source emitting light. When the second structural member and the first structural member are in a connected state, the contact area between the two is large. Using a heat dissipation material (preferably a metal material) as the material of the second structural member can effectively dissipate the heat energy generated by the light source during the debugging process, thereby improving the stability of the metalens module during the debugging work.

[0086] In some embodiments, the movable support rod may include a horizontal support rod and a vertical support rod; the vertical support rod is disposed on the displacement platform; the first end of the horizontal support rod is connected to the vertical support rod, and the second end of the horizontal support rod is connected to the clamping module.

[0087] Example 1

[0088] This embodiment is a specific embodiment of a superlens for generating a line spot.

[0089] In this embodiment, the light source is an EEL (Edge-Emitting Laser) type light source with a wavelength of 400nm; the total divergence angle along the line length is 9.5 degrees, the total divergence angle along the line width is 19 degrees, and the size of the light emitting area along the line length is 10μm.

[0090] This embodiment requires that the light beam modulated by the superlens generates a line spot with a line width less than 0.09 mm, uniform light intensity distribution in the line length direction, unevenness less than 5%, and a full divergence angle of 90 degrees on a target plane 100 mm away from the light source.

[0091] In this embodiment, the superlens micro-nano structure is a negative micro-nano structure, the negative micro-nano structure period is 0.2μm, and the negative micro-nano structure height is 0.35μm. The focusing phase in the line width direction and the collimation and shaping phase in the line length direction are designed according to the above requirements. The phase distribution expression of the focusing phase and the collimation phase is:

[0092]

[0093] In formula (1), λ is the wavelength of the laser light source, x1 is the projection length of the distance between each negative micro-nanostructure on the superlens and the center of the superlens in the linear length direction, and d1 is the distance from the light source to the superlens.

[0094] Phase shaping is achieved by observing the intensity distribution of the line light spot generated on the target plane and adjusting the angle at which the output light is deflected to the target plane so that the energy output by the line light spot on the target plane is equal.

[0095] After the phase distribution design is completed, the phase distribution in the line width direction is superimposed with the phase distribution in the line length direction to obtain the specific phase of each micro-nano structure on the metalens. Then, in order to further observe the width in the line width direction and the light intensity distribution in the line length direction, the one-dimensional light intensity distribution in the line width and line length directions is simulated. Figure 7 The two-dimensional light intensity distribution diagram of the line spot generated by the modulated superlens on the target plane. As shown in the figure, the line width of the line spot is consistent and the light intensity distribution in the line length direction is uniform. Figure 8 This is the simulation result diagram of the normalized light intensity distribution in the line width direction. As shown in the figure, the size of the line spot in the line width direction is 0.089mm, which meets the line width requirement of less than 0.09mm. Fig. 9 The figure is a simulation result diagram of the normalized light intensity distribution in the line length direction. As shown in the figure, the unevenness of the line spot along the line length direction is 3.3%, and the divergence angle of the line spot is 90.47 degrees, which meets the requirements that the unevenness of the line spot is less than 5% and the divergence angle is 90 degrees.

[0096] After the phase modulation is completed and verified, the micro-nanostructure database is used to match the modulation phase with the specific structure of the micro-nanostructure, and the micro-nanostructure of corresponding geometric size is set at the corresponding position to complete the production of the superlens.

[0097] Example 2

[0098] This embodiment is a specific embodiment of a superlens for generating a line spot.

[0099] In this embodiment, the light source is an EEL type light source with a wavelength of 905nm; the total divergence angle along the line length is 16.2 degrees, the total divergence angle along the line width is 59 degrees, and the size of the light emitting area along the line length is 200μm.

[0100] This embodiment requires that the light beam modulated by the superlens generates a line spot with a line width of less than 2 mm, uniform light intensity distribution in the line length direction, unevenness less than 5%, and a full divergence angle of 45 degrees on a target plane 2000 mm away from the light source.

[0101] In this embodiment, the superlens micro-nano structure is a negative micro-nano structure, the negative micro-nano structure period is 0.5 μm, and the negative micro-nano structure height is 0.7 μm. The focusing phase in the line width direction and the collimation and shaping phase in the line length direction are designed according to the above requirements. The phase distribution expression of the focusing phase and the collimation phase is formula (1).

[0102] After the phase distribution design is completed, the phase distribution in the line width direction is superimposed with the phase distribution in the line length direction to obtain the specific phase of each micro-nano structure on the metalens. Then, in order to further observe the width in the line width direction and the light intensity distribution in the line length direction, the one-dimensional light intensity distribution in the line width and line length directions is simulated. Fig.10 The two-dimensional light intensity distribution diagram of the line spot generated by the modulated superlens on the target plane. As shown in the figure, the line width of the line spot is consistent and the light intensity distribution in the line length direction is uniform. Fig.11 This is the simulation result diagram of the normalized light intensity distribution in the line width direction. As shown in the figure, the size of the line spot in the line width direction is 1.8mm, which meets the line width requirement of less than 2mm. Fig.12 The figure is a simulation result diagram of the normalized light intensity distribution in the line length direction. As shown in the figure, the unevenness of the line spot along the line length direction is 1.57%, and the divergence angle of the line spot is 45.05 degrees, which meets the requirements that the unevenness of the line spot is less than 5% and the divergence angle is 45 degrees.

[0103] Example 3

[0104] During the installation and debugging of the metalens, while fixing the metalens, it is also necessary to ensure that the metalens can be moved within a certain range, and after the metalens is debugged and fixed, the clamping module is relatively easy to separate from the metalens without applying force to the side of the metalens as much as possible. Therefore, this embodiment provides a clamping module for a metalens.

[0105] like Fig.13As shown, the main body length of the first clamping member 11 is 28.5mm, and it consists of a first wide portion 101 and a first narrow portion 102; the first wide portion 101 is a right-angled trapezoid, and the angle between the right-angled trapezoid hypotenuse and the first narrow portion 102 is 139.1 degrees; the length of the first wide portion 101 is 21.37mm, and the height 1301 of the first clamping member is 6mm. Two threaded holes are arranged in the center of the side of the first clamping member 11, and the spacing between the centers of the two threaded holes is 5.5mm; the distance between the center of the threaded hole arranged away from the first narrow portion 102 and the side of the first wide portion 101 away from the first narrow portion 102 is 7mm; the threaded hole is a countersunk hole, and a thread is arranged in the threaded hole, and the screw can be rotatably fixed in the threaded hole. A threaded hole is arranged on the side of the first wide portion 101 away from the first narrow portion 102, and the threaded hole is used to connect the debugging equipment. The first narrow portion 102 is extended from one end of the first wide portion and has a width of 0.8 mm. A first partial groove 103 is provided at the end of the first narrow portion 102 .

[0106] like Fig.14 As shown, the main body length of the second clamping member 21 is 28.5mm, and it is composed of the second wide part 201 and the second narrow part 202; the second wide part 201 is a right-angled trapezoid, and the angle between the right-angled trapezoid hypotenuse and the second narrow part 202 is 139.1 degrees; the length of the second wide part 201 is 21.37mm, and the height of the second clamping member 1401 is 6mm. Two threaded holes are arranged at the center of the side of the second clamping member 21, and the distance between the two threaded holes is 5.5mm. The distance between the center of the threaded hole arranged away from the second narrow part 202 and the side of the second wide part 201 away from the second narrow part 202 is 7mm; the setting position of the threaded hole in the second clamping member 21 corresponds to the setting position of the threaded hole in the first clamping member 11; the threaded hole is provided with a thread, and the screw can be rotatably fixed in the threaded hole. A threaded hole is arranged on the side of the second wide part 201 away from the second narrow part 202, and the threaded hole is used to connect the debugging equipment. The second narrow portion 202 is extended from one end of the second wide portion 201, has a width of 0.8 mm, and a second partial groove 203 is provided at the end of the second narrow portion 202. When the first clamping member 11 is connected to the second clamping member 21, the first partial groove 103 and the second partial groove 203 are combined to form a clamp, which is used to clamp and fix the metalens.

[0107] The first clamping member 11 and the second clamping member 21 work together to clamp the metalens. During the debugging process, the threaded holes of the first clamping member 11 and the second clamping member 21 are first aligned according to the corresponding relationship. At this time, the first part groove 103 and the second part groove 203 are merged to form a complete groove; then the two vertices of the side of the metalens correspond to the vertices of the first part groove 103 and the second part groove 203, and the metalens is placed in the groove of the clamp composed of the first part groove 103 and the second part groove 203. Then, the screw is screwed in and fixed from the position of the threaded hole to complete the connection work of the first clamping member 103 and the second clamping member 103, and the clamp is used to apply a force from both sides to the center of the metalens to complete the clamping and fixing work of the metalens. After the metalens is clamped and fixed, the clamping module is connected and fixed to the debugging device according to the placement position of the debugging device to complete the debugging preparation work of the metalens. After the position of the superlens is adjusted and fixed on the superlens module, the screws in the threaded holes on the sides of the first wide portion 101 and the second wide portion 201 are unscrewed to separate the first clamping member 11 from the second clamping member 21, thereby completing the separation of the clamping module and the superlens.

[0108] The clamping module plays a role in clamping and fixing the metalens during the debugging process of the metalens. The clamp composed of the first part groove 103 and the second part groove 203 is a thin sheet structure, which is light, thin and compact, and can effectively avoid the interference between the position of the clamp and the light source, thereby ensuring that the metalens can move within a certain range during the debugging process. In the debugging preparation stage, the clamping state of the metalens is fine-tuned by adjusting the screw-in depth of the screw. The depths of the two screws are different, and a gap with a micro angle is generated between the first clamp 11 and the second clamp 21, thereby fine-tuning the clamping force of the metalens by the clamping module. When the metalens is debugged and fixed in position, it is only necessary to unscrew the screw to complete the separation of the clamp and the metalens. During this period, the force acting on the metalens is extremely small, that is, the position of the debugged metalens is extremely affected.

[0109] Example 4

[0110] This embodiment provides a debugging system for assembling a metalens, including a clamping module, a metalens module, and a six-axis translation stage. Fig.15 As shown, the six-axis translation platform includes: a displacement adjustment device 1501, a vertical support rod 1502, a horizontal support rod 1503 and a support rod adapter 1504. The vertical support rod 1502 is vertically connected to the top of the six-axis translation platform 1501, and the horizontal support rod 1503 is connected to the vertical support rod 1502 through the support rod adapter 1504, and the horizontal support rod 1503 is vertical or approximately vertical to the vertical support rod 1502. The other end of the horizontal support rod is provided with a screw and connected to the clamping module 1505 to fix the clamping module on the horizontal support rod.

[0111] During the debugging process of the metalens, the light source is set in the metalens module, and the position of the light source is fixed. The clamping module 1505 is fixedly connected to the horizontal support rod 1503. The clamping module can be controlled by the six-axis translation stage to make fine adjustments in the up and down, front and back, left and right, up and down tilt, left and right tilt and rotation directions; by observing the light spot through the light source, or using relevant optical instruments for detection, it is judged whether the metalens position is debugged. After the debugging is completed, the metalens is fixed to the metalens module by dispensing glue. The location of the dispensing glue is preferably the edge of the metalens. The edge of the metalens generally has no optical structure, so dispensing glue on the edge of the metalens will not affect the optical performance of the metalens.

[0112] like Fig.16 As shown, the metalens module includes a first structural member and a second structural member. The first structural member is a rounded square structure as a whole, with a tube through hole at the center. One end of the through hole is used to set a light source, and the other end is provided with a convex structure, which is a rounded square ring and is used to fix the debugged metalens. Four threaded holes are provided at the four corners of the first structural member around the through hole, and the threaded holes are used to be threadedly connected with the second structural member.

[0113] like Fig.17 As shown, the second structural member is in an "L" shape as a whole, and a through hole is provided at the center thereof. The through hole is provided corresponding to the through hole in the first structural member, and is used to pass the wire of the light source. Four threaded holes are provided at the four corners of the second structural member, and the setting positions of the threaded holes correspond one-to-one to the setting positions of the threaded holes in the first structural member, and are used to connect with the first structural member. A threaded hole is provided at the bottom of the "L"-shaped structure of the second structural member for connecting external equipment. The second structural member is in contact with the first structural member over a large area, and the material of the second structural member is metal material, which helps to transfer the heat generated during the operation of the light source to the second structural member, increase the heat dissipation area, and improve the heat dissipation efficiency.

[0114] During the debugging process, firstly, the light source is set on the metalens module, and the metalens module is fixed; the clamping module is connected to the horizontal support rod, and the metalens is placed in the groove in the clamping module holder. Fig.18 As shown in FIG. 1 , the position relationship diagram of the clamping module and the super lens module during the debugging process is shown. After the debugging is completed, the super lens is fixed on the raised structure of the super lens module, and the clamping module is separated from the super lens module to complete the debugging process. Fig.19 Shown is a three-dimensional stereogram of the clamping module.

[0115] In summary, the embodiments of the present application provide a clamping module for clamping a metalens and a debugging system for assembling a metalens. The clamping module is adapted to the metalens to clamp and fix the metalens more conveniently, and the assembly position of the metalens is fine-tuned by the above-mentioned debugging system for assembling the metalens. After the metalens position is debugged and fixed, when the clamping module is separated from the metalens, the first clamping member and the second clamping member can be separated from both sides of the metalens, and the clamping module can be easily separated from the metalens without applying pressure to the side of the metalens, effectively reducing the influence of the separation step on the assembly accuracy of the metalens.

[0116] The above is only a specific implementation of the embodiment of the present application, but the protection scope of the embodiment of the present application is not limited thereto. Any technician familiar with the technical field can easily think of changes or replacements within the technical scope disclosed in the embodiment of the present application, which should be included in the protection scope of the embodiment of the present application. Therefore, the protection scope of the embodiment of the present application shall be based on the protection scope of the claims.

Claims

1. A clamping module for clamping a metalens, characterized in that: comprising a first clamping member and a second clamping member; The first clamping member includes a first wide portion and a first narrow portion extending from the bottom of the first wide portion; a first partial groove is provided on a first side of the first narrow portion away from the end of the first wide portion, and the first partial groove is used to place the first end of the super lens; The second clamping member includes a second wide portion and a second narrow portion extending from the bottom of the second wide portion; a second partial groove is provided on a second side of the second narrow portion away from the end of the second wide portion, and the second partial groove is used to place the second end of the super lens; the second end is parallel to the first end; The first clamping member is connected to the second clamping member in a detachable manner; the first side and the second side are connected to each other in a manner that the first clamping member faces each other, and the end of the first narrow portion and the end of the second narrow portion are combined to form a clamp; the clamp is used to place and clamp the metalens; the shape of the clamp matches the shape of the metalens, and the size of the clamp matches the size of the metalens.

2. The clamping module for clamping a metalens according to claim 1, characterized in that: In the first clamping member, a connection between the first wide portion and the first narrow portion has a first slope-shaped structure; in the second clamping member, a connection between the second wide portion and the second narrow portion has a second slope-shaped structure.

3. The clamping module for clamping a metalens according to claim 2, characterized in that: The complementary angle of the first slope angle of the first slope-shaped structure is greater than the half-divergence angle of the output light of the super lens, and the complementary angle of the second slope angle of the second slope-shaped structure is greater than the half-divergence angle of the output light of the super lens.

4. The clamping module for clamping a metalens according to claim 2, characterized in that: The width of the first slope-shaped structure is equal to the width of the first narrow portion; the width of the second slope-shaped structure is equal to the width of the second narrow portion.

5. The clamping module for clamping a metalens according to claim 2, characterized in that: The super lens is used to generate a line spot.

6. The clamping module for clamping a metalens according to claim 1, characterized in that: The first clamping member is threadedly connected to the second clamping member, wherein a first threaded hole is provided on the side surface of the first wide portion, and a second threaded hole is provided on the side surface of the second wide portion, and the first threaded hole and the second threaded hole are arranged in a one-to-one corresponding position.

7. The clamping module for clamping a metalens according to claim 6, characterized in that: The first threaded hole is a countersunk threaded hole.

8. The clamping module for clamping a metalens according to claim 6, characterized in that: The number of the first threaded holes is greater than or equal to 2, and the number of the second threaded holes is greater than or equal to 2.

9. The clamping module for clamping a metalens according to claim 1, characterized in that: A first connection device for connecting to an external device is disposed at an end of the first wide portion away from the first narrow portion; and a second connection device for connecting to an external device is disposed at an end of the second wide portion away from the second narrow portion.

10. A debugging system for assembling a metalens, characterized in that: include: The clamping module according to any one of claims 1 to 9; Super lens module; Translation stage; The superlens module includes a light source, and the superlens module is configured to support the light source and the superlens; The displacement platform comprises a movable support rod, and the movable support rod is connected to the clamping module.

11. The debugging system for assembling a metalens according to claim 10, characterized in that: The super lens module is arranged on one side of the bottom surface of the clamping module.

12. The debugging system for assembling a metalens according to claim 10, characterized in that: The super lens module includes a first structural member; the first structural member is plate-shaped and is provided with a through hole; the first end of the through hole is used to accommodate and support the light source, and the first structural member is provided with a protruding structure on the outer side of the second end of the through hole, and the protruding structure is used to set the super lens.

13. The debugging system for assembling a metalens according to claim 12, characterized in that: The super lens module also includes a second structural member, which is used to fix the first structural member and arrange the wires of the light source.

14. The debugging system for assembling a metalens according to claim 13, characterized in that: The second structural member is made of heat dissipation material.

15. The debugging system for assembling a metalens according to claim 10, characterized in that: The movable support rod comprises a horizontal support rod and a vertical support rod; the vertical support rod is arranged on the displacement platform; the first end of the horizontal support rod is connected to the vertical support rod, and the second end of the horizontal support rod is connected to the clamping module.

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