Sample clamping device for scanning electron microscope

Abstract

The utility model discloses a sample clamping device for a scanning electron microscope, which comprises a carrier, a sample table arranged on the carrier, a first clamping plate, a second clamping plate and a fixing unit arranged on the first clamping plate and the second clamping plate, the adjusting unit is used for adjusting the relative position of the first clamping plate and the second clamping plate; the fixing unit is used for fixing a sample piece placed on the sample table; the adjusting unit comprises a first sliding groove, a second sliding groove, a first rack connected with the first clamping plate, a second rack connected with the second clamping plate and a gear meshed with the first rack and the second rack, wherein the first sliding groove and the second sliding groove are formed in the carrier. Therefore, the distance between the sample table and the sample table can be more easily and accurately controlled, the operation accuracy is improved, meanwhile, it can be ensured that a sample placed on the sample table is always located in the center of the sample table, and a microscope can be more easily used for observation; and a transmission mechanism and a control system are simplified.

Description

Technical Field

[0001] The utility model relates to a sample clamping device, in particular to a sample clamping device used for a scanning electron microscope. Background Art

[0002] Scanning electron microscopy is an observation method between transmission electron microscopy and optical microscopy. It uses a focused high-energy electron beam to scan the sample surface, stimulates various physical information through the interaction between electrons and matter, collects, amplifies and re-images this information, and thus achieves the characterization of the microscopic morphology of the material. When using a scanning electron microscope, the sample slide on the sample stage needs to be fixed to avoid any slight movement or vibration of the sample, which may cause image distortion or blurring, affecting the accuracy of observation and analysis.

[0003] The prior art CN219626588U discloses a scanning electron microscope sample clamping device, including a support plate, a mounting plate, a fixing seat, a clamping block, a fastening block and a threaded rod, wherein the support plate is connected to the mounting plate through an adjustment mechanism, the fixing seat is arranged at one end of the upper surface of the mounting plate, the clamping block is arranged at one end of the upper surface of the mounting plate away from the fixing seat, the front of the fixing seat is threadedly connected to the threaded rod through a threaded hole, one end of the threaded rod passing through the fixing seat is rotatably connected to the fastening block, the upper surfaces of the clamping block and the fastening block are both threadedly connected to a connecting rod through a threaded hole, and one end of the connecting rod is sleeved with a pressing plate. When using this utility model, it is necessary to first rotate the threaded rod to adjust the position of the fastening block to fix the sample, and then fix the sample for a second time by rotating the connecting rod, thereby solving the problem of sample fixation.

[0004] However, the prior art has the following problems during use:

[0005] During the fixation process, only one side of the fastening block is changed to fix the sample. This makes it difficult to accurately control the distance. At the same time, the position of the sample may change, which is not conducive to observation. At the same time, the complex fixation steps also increase the difficulty of operation.

[0006] When pressing and fixing the sample, it is easy to cause damage to the sample piece, thus affecting subsequent operations.

[0007] Therefore, there is an urgent need for a sample clamping device for a scanning electron microscope to solve the above technical problems. Summary of the invention

[0008] The utility model overcomes the shortcomings of the prior art and provides a sample clamping device for a scanning electron microscope.

[0009] To achieve the above-mentioned purpose, the technical solution adopted by the utility model is: a sample clamping device for a scanning electron microscope, comprising: a carrier, a sample stage installed on the carrier, a first clamping plate, a second clamping plate, a fixing unit installed on the first clamping plate and the second clamping plate, and an adjustment unit for adjusting the relative position of the first clamping plate and the second clamping plate.

[0010] The fixing unit is used to fix the sample sheet placed on the sample stage; the adjusting unit includes: a first slide groove at the carrier, a second slide groove, a first rack connected to the first clamping plate, a second rack connected to the second clamping plate, and a gear meshing with the first rack and the second rack; the first rack is located in the first slide groove, and the second rack is located in the second slide groove. Under the same time conditions, the displacement directions of the first rack and the second rack are opposite.

[0011] In a preferred embodiment of the utility model, the fixing unit includes: an adjusting plate, a spring, and a pressure plate; the first clamping plate and the second clamping plate are both provided with grooves, the adjusting plate is slidably connected to the inner wall of the groove, the spring is used to connect the bottom of the adjusting plate with the inner wall of the groove, the pressure plate is located at the top of the adjusting plate, and the pressure plate and the adjusting plate are rotatably connected, and a fine-tuning unit for adjusting the height of the adjusting plate is provided on the adjusting plate.

[0012] In a preferred embodiment of the utility model, the fine-tuning unit includes: a threaded rod and a telescopic rod; one end of the threaded rod is connected to the top of the adjustment plate through a bearing, and the other end passes through the top of the groove, and the connection with the groove is a threaded connection; one end of the telescopic rod is fixedly connected to the adjustment plate, and the other end is connected to the top of the groove.

[0013] In a preferred embodiment of the present invention, the threaded rod and the telescopic rod are respectively located on two sides of the pressing plate.

[0014] In a preferred embodiment of the utility model, a connecting rod is arranged at the central axis of the gear, the connecting rod passes through the bottom of the carrier, and an adjustment hinge is arranged at the end of the connecting rod.

[0015] In a preferred embodiment of the utility model, the top of the gear is connected to the bottom of the sample stage through a bearing.

[0016] In a preferred embodiment of the present invention, the number of the springs is not less than two groups.

[0017] In a preferred embodiment of the utility model, a shaft sleeve is provided at one end of the threaded rod located outside the groove.

[0018] In a preferred embodiment of the present invention, the distance between the adjustment plate and the inner wall of the bottom of the groove is 1-2 cm.

[0019] In a preferred embodiment of the present invention, the first rack is slidably connected to the first sliding groove, and the second rack is slidably connected to the second sliding groove.

[0020] The utility model solves the defects existing in the background technology, and has the following beneficial effects:

[0021] The utility model is provided with a first rack and a second rack which move in opposite directions under the same time condition, so that when in use, the forces generated by the two racks can cancel each other out, which is beneficial to the stability of the entire device; and the two racks which move in opposite directions can more easily achieve precise control of the distance between them, thereby improving the accuracy of the operation; at the same time, it can also ensure that the sample placed on the sample stage is always in the center of the sample stage, so that it is easier to observe with a microscope; and it also simplifies the transmission mechanism and the control system, thereby reducing the manufacturing cost and the difficulty of maintenance.

[0022] The utility model is provided with an adjusting plate and a spring at the pressure plate, and when in use, the height of the adjusting plate can be adjusted to fix sample sheets of different thicknesses. At the same time, the spring can also effectively disperse the pressure on the adjusting plate, so that the pressure distribution is more uniform, thereby effectively avoiding the sample sheet from being damaged. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] The utility model is further described below in conjunction with the accompanying drawings and embodiments;

[0024] Figure 1 It is a schematic diagram of the structure of the object carrier of the utility model;

[0025] Figure 2 It is a structural schematic diagram of the utility model's carrier in a working state;

[0026] Figure 3 It is a structural schematic diagram of the meshing of the first rack, the second rack and the gear of the utility model;

[0027] Figure 4 yes Figure 3 A schematic diagram of the enlarged structure at point A in the middle.

[0028] In the figure: 1. Loading rack; 2. Sample table; 3. First slide slot; 4. Second slide slot; 5. First clamping plate; 6. Second clamping plate; 7. First rack; 8. Second rack; 9. Gear; 10. Adjustment hub; 11. Groove; 12. Adjustment plate; 13. Spring; 14. Pressure plate; 15. Threaded rod; 16. Telescopic rod. DETAILED DESCRIPTION

[0029] The present invention will now be further described in detail in conjunction with the accompanying drawings and embodiments. These drawings are simplified schematic diagrams that only illustrate the basic structure of the present invention in a schematic manner, and therefore only show the components related to the present invention.

[0030] like Figure 1 As shown, a sample clamping device for a scanning electron microscope includes: a carrier 1, a sample stage 2 installed on the carrier 1, a first clamping plate 5, a second clamping plate 6, a fixing unit installed on the first clamping plate 5 and the second clamping plate 6, and an adjusting unit for adjusting the relative position of the first clamping plate 5 and the second clamping plate 6; the fixing unit is used to fix the sample sheet placed on the sample stage 2.

[0031] The adjustment unit includes: a first slide slot 3 at the carrier 1, a second slide slot 4, a first rack 7 connected to the first clamping plate 5, a second rack 8 connected to the second clamping plate 6, and a gear 9 meshing with the first rack 7 and the second rack 8; the first rack 7 is located in the first slide slot 3, and the second rack 8 is located in the second slide slot 4. Under the same time condition, the displacement directions of the first rack 7 and the second rack 8 are opposite. The forces generated by the two racks will offset each other, which is beneficial to the stability of the entire device. Two racks with opposite movement directions make it easier to achieve precise control of the distance between them, thereby improving the accuracy of the operation.

[0032] like Figure 2 As shown, the fixing unit includes: an adjusting plate 12, a spring 13, and a pressing plate 14; a groove 11 is provided on the first clamping plate 5 and the second clamping plate 6, the adjusting plate 12 is slidably connected to the inner wall of the groove 11, the spring 13 is used to connect the bottom of the adjusting plate 12 to the inner wall of the groove 11, the pressing plate 14 is located on the top of the adjusting plate 12, and the pressing plate 14 is rotatably connected to the adjusting plate 12, and a fine-tuning unit for adjusting the height of the adjusting plate 12 is provided at the adjusting plate 12. It can be suitable for fixing sample sheets of different thicknesses.

[0033] like Figure 3 As shown, the fine-tuning unit includes: a threaded rod 15 and a telescopic rod 16; one end of the threaded rod 15 is connected to the top of the adjustment plate 12 through a bearing, and the other end passes through the top of the groove 11, and the connection with the groove 11 is threaded, and one end of the telescopic rod 16 is fixedly connected to the adjustment plate 12, and the other end is connected to the top of the groove 11. The pressure on the adjustment plate can be effectively dispersed, so that the pressure distribution is more uniform, thereby effectively avoiding the damage of the sample sheet.

[0034] like Figure 4As shown, the threaded rod 15 and the telescopic rod 16 are respectively located on both sides of the pressure plate 14. A connecting rod is provided at the central axis of the gear 9, and the connecting rod passes through the bottom of the carrier 1, and an adjustment hub 10 is provided at the end of the connecting rod. The top of the gear 9 is connected to the bottom of the sample stage 2 through a bearing. The number of springs 13 is not less than two groups. A sleeve is provided at one end of the threaded rod 15 located outside the groove 11. The distance between the adjustment plate 12 and the inner wall of the bottom of the groove 11 is 1~2cm. The first rack 7 is slidably connected to the first slide groove 3, and the second rack 8 is slidably connected to the second slide groove 4.

[0035] When the utility model is used, the sample is placed on the sample stage 2, and the adjusting hinge 10 is held and rotated, so that the first rack 7 and the second rack 8 start to move in opposite directions under the rotation of the gear 9, thereby achieving the effect of the first clamping plate 5 and the second clamping plate 6 moving toward each other, thereby continuously reducing the distance between the two clamping plates; when the pressing plate 14 on the clamping plate can fix the sample, stop rotating the adjusting hinge 10, then adjust the pressing plate 14 to fix the sample, and at the same time adjust and rotate the threaded rod 15, so that the distance between the adjusting plate 12 and the bottom of the groove 11 is continuously reduced, thereby achieving the effect of further fixing the sample.

[0036] The above is based on the ideal embodiment of the utility model. Through the above description, relevant personnel can make various changes and modifications without deviating from the technical concept of the utility model. The technical scope of this utility model is not limited to the content in the specification, and the technical scope must be determined according to the scope of the claims.

Claims

1. A sample holding device for a scanning electron microscope, comprising: A sample carrier (1), a sample stage (2) mounted on the sample carrier (1), a first clamping plate (5), a second clamping plate (6), a fixing unit mounted on the first clamping plate (5) and the second clamping plate (6), and an adjusting unit for adjusting the relative position of the first clamping plate (5) and the second clamping plate (6); characterized in that: The fixing unit is used to fix the sample sheet placed on the sample stage (2); The adjustment unit comprises: a first slide groove (3) at the load carrier (1), a second slide groove (4), a first rack (7) connected to the first clamping plate (5), a second rack (8) connected to the second clamping plate (6), and a gear (9) meshing with the first rack (7) and the second rack (8); the first rack (7) is located in the first slide groove (3), the second rack (8) is located in the second slide groove (4), and under the same time condition, the displacement directions of the first rack (7) and the second rack (8) are opposite.

2. A sample holding device for a scanning electron microscope according to claim 1, characterized in that: The fixing unit comprises: an adjusting plate (12), a spring (13), and a pressing plate (14); a groove (11) is provided on the first clamping plate (5) and the second clamping plate (6); the adjusting plate (12) is slidably connected to the inner wall of the groove (11); the spring (13) is used to connect the bottom of the adjusting plate (12) to the inner wall of the groove (11); the pressing plate (14) is located on the top of the adjusting plate (12), and the pressing plate (14) and the adjusting plate (12) are rotatably connected; and a fine-tuning unit for adjusting the height of the adjusting plate (12) is provided on the adjusting plate (12).

3. A sample holding device for a scanning electron microscope according to claim 2, characterized in that: The fine-tuning unit comprises: a threaded rod (15) and a telescopic rod (16); one end of the threaded rod (15) is connected to the top of the adjustment plate (12) via a bearing, and the other end passes through the top of the groove (11), and the connection with the groove (11) is threaded; one end of the telescopic rod (16) is fixedly connected to the adjustment plate (12), and the other end is connected to the top of the groove (11).

4. A sample holding device for a scanning electron microscope according to claim 3, characterized in that: The threaded rod (15) and the telescopic rod (16) are respectively located on two sides of the pressing plate (14).

5. The sample holding device for a scanning electron microscope according to claim 1, characterized in that: A connecting rod is arranged at the central axis of the gear (9), the connecting rod passes through the bottom of the object carrier (1), and an adjustment hub (10) is arranged at the end of the connecting rod.

6. The sample holding device for a scanning electron microscope according to claim 1, characterized in that: The top of the gear (9) is connected to the bottom of the sample stage (2) via a bearing.

7. The sample holding device for a scanning electron microscope according to claim 2, characterized in that: The number of the springs (13) is not less than two groups.

8. The sample holding device for a scanning electron microscope according to claim 4, characterized in that: A shaft sleeve is provided at one end of the threaded rod (15) located outside the groove (11).

9. The sample holding device for a scanning electron microscope according to claim 2, characterized in that: The distance between the adjustment plate (12) and the inner wall of the bottom of the groove (11) is 1 to 2 cm.

10. The sample holding device for a scanning electron microscope according to claim 1, characterized in that: The first rack (7) is slidably connected to the first slide groove (3), and the second rack (8) is slidably connected to the second slide groove (4).

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