Cleaning and etching device

Abstract

The utility model relates to the field of etching and cleaning, and discloses a cleaning and etching device. According to the drying device, the drying assembly shell is arranged on the upper surface of the device body, to-be-treated materials can be contained in the center of the interior of the device body, the drying assembly shell serves as an installation foundation of the drying device, a protective net can prevent foreign matter from falling into the drying assembly shell, and air can enter the drying assembly shell by opening an electric air valve; an electric air valve is closed, so that the interior of the device body is kept at a certain temperature within a certain time, an air inlet fan can allow external air to enter, a heating pipe can heat the external air, and therefore the interior of the device body is heated to achieve the drying effect, and a drying assembly power source is used for driving the whole drying assembly to operate; the device is provided with the component for drying the cleaned materials, and the drying component is started to quickly dry the materials after the materials are cleaned, so that the time consumed for naturally airing the materials is shortened.

Description

Technical Field

[0001] The present application belongs to the technical field of etching and cleaning, and specifically relates to a cleaning and etching device. Background Art

[0002] Etching and cleaning equipment is an important equipment used in the manufacture of semiconductor devices and integrated circuits. Its main function is to remove unnecessary substances on the surface of the device, such as oxides, metal impurities, etc., so as to carry out the next manufacturing process. Etching and cleaning equipment can achieve high-precision and high-efficiency removal, and will not cause damage or deformation to the device.

[0003] For example, the patent with announcement number CN209772898U discloses a PCB etching cleaning device, including a housing, a first clamp arm, a cleaning chamber, a second clamp arm and a control panel, wherein a cleaning chamber is provided at the center position inside the housing, and a second clamp arm is hinged on the inner wall of one side of the cleaning chamber, and the second clamp arm clamps the PCB body inside, and the first clamp arm is provided at the end of the PCB body away from the second clamp arm, a water storage tank is provided at the center position of the top of the cleaning chamber, and nozzles with equal spacing are provided at the bottom end of the water storage tank, a power cavity is provided inside the housing on one side of the cleaning chamber, and a rotating mechanism is provided at the center position of the bottom of the power cavity, and a circulation cavity is provided inside the housing on the side of the cleaning chamber away from the power cavity. The utility model not only avoids the phenomenon that dirt remains on the inner wall of the cleaning chamber when the cleaning device is used, reduces the cost of using water resources when the cleaning device is used, but also improves the cleaning effect when the cleaning device is used.

[0004] However, the device is not equipped with a component for drying the material after cleaning. After the material is cleaned, it needs to be dried, which takes too long. Utility Model Content

[0005] The purpose of the present application is to provide a cleaning and etching device in order to solve the problem that the above-mentioned device is not equipped with a component for drying the material after cleaning, and the material needs to be dried after cleaning, which consumes too much time.

[0006] The technical solution adopted in the present application is as follows: it includes a device body, a drying component shell is opened on the upper surface of the device body, a protective net is fixedly installed on the inner upper surface of the drying component shell, an electric air valve is fixedly installed on the lower surface of the protective net, an air intake fan is fixedly installed on the lower surface of the electric air valve, a heating pipe is fixedly installed on the lower surface of the air intake fan, and a drying component power supply is fixedly installed on the right side of the drying component shell.

[0007] By adopting the above technical scheme, a drying component shell is opened on the upper surface of the device body, a protective net is fixedly installed on the inner upper surface of the drying component shell, an electric air valve is fixedly installed on the lower surface of the protective net, an air inlet fan is fixedly installed on the lower surface of the electric air valve, a heating pipe is fixedly installed on the lower surface of the air inlet fan, and a drying component power supply is fixedly installed on the right side of the drying component shell. The inner center of the device body can accommodate materials to be processed, and the drying component shell serves as the installation basis of the drying equipment. The protective net can prevent foreign matter from falling into the drying component shell. Opening the electric air valve can allow wind to enter the drying component shell, and closing the electric air valve can keep the interior of the device body at a certain temperature for a certain period of time. The air inlet fan can allow external air to enter, and the heating pipe can heat the air entering from the outside, thereby heating the interior of the device body to achieve a drying effect. The drying component power supply is used to drive the operation of the entire drying component. By installing a component for drying the material after cleaning in the device, the drying component is started after the material cleaning is completed to dry the material quickly, thereby reducing the time consumed by the material to dry naturally.

[0008] In a preferred embodiment, a water inlet valve is provided on the left side of the device body, a water tank is fixedly installed on the other end of the water inlet valve, and a water supply pipe is fixedly connected to the lower surface of the water tank.

[0009] By adopting the above technical solution, a water inlet valve is opened on the left side of the device body, a water tank is fixedly installed on the other end of the water inlet valve, the lower surface of the water tank is fixedly connected to the water supply pipe, the water inlet valve is used to replenish the water required by the cleaning device, the water tank can temporarily store clean water, and the water supply pipe can transport the water inside the water tank to the cleaning device.

[0010] In a preferred embodiment, a rotating base is connected to both sides of the inner middle of the device body, a fixed bracket is connected to the same inner side of the outer circumferential surface of the rotating base, and a plurality of pressure nozzles are fixedly installed on the same inner side of the fixed bracket.

[0011] By adopting the above technical scheme, a rotating base is connected and installed on both sides of the middle of the inner body of the device, a fixed bracket is connected and installed between the same inner sides of the outer surface of the circumference of the rotating base, and a plurality of pressure nozzles are fixedly installed on the same inner side of the fixed bracket. The rotating base serves as the installation base of the cleaning device, and the fixed bracket is used to support the pressure nozzle. A pipe is arranged inside the fixed bracket and connected with the water supply pipe to supply water to the pressure nozzle. The pressure nozzle sprays clean water onto the material to complete the cleaning of the material.

[0012] In a preferred embodiment, a gripper track is fixedly installed in the middle of the same inner side of the rotating base, and an electric gripper is movably installed on the same inner side of the gripper track.

[0013] By adopting the above technical solution, a gripper track is fixedly installed in the middle of the same inner side of the rotating base, and an electric gripper is movably installed on the same inner side of the gripper track. By adopting the combination of the gripper track and the electric gripper, the material can be clamped inside the device body for cleaning and drying.

[0014] In a preferred embodiment, a guide plate is fixedly installed at the lower end of the inner part of the device body, an inspection door is opened at the position of the guide plate on the outer surface of the device body, and a water outlet valve is fixedly connected to the lower end of the guide plate.

[0015] By adopting the above technical solution, a guide plate is fixedly installed at the lower end of the interior of the device body, an inspection door is provided on the outer surface of the device body at a position corresponding to the guide plate, the lower end of the guide plate is fixedly connected to the water outlet valve, the guide plate guides the used waste water to the water outlet valve, the water outlet valve can be connected to the external waste water pipe to discharge the waste water out of the interior of the device body, and the debris inside the guide plate can be cleaned by opening the inspection door.

[0016] In a preferred embodiment, a movable door is hingedly installed on the front outer surface of the device body, the outer surface of the movable door is provided with glass, and a handle is connected and installed in the middle of the outer surface of the movable door.

[0017] By adopting the above technical solution, a movable door is hingedly installed on the front outer surface of the device body, a glass is provided on the outer surface of the movable door, and a handle is connected and installed in the middle of the outer surface of the movable door. The movable door can be opened to put in and take out materials to be processed, and the material processing situation inside the device body can be observed through the glass. The handle is used to prevent the movable door from being accidentally opened, which causes the heat inside the device body to be released during the drying process, affecting the drying effect.

[0018] In a preferred embodiment, a driving motor is fixedly installed on the right side inside the device body.

[0019] By adopting the above technical solution, a drive motor is fixedly installed on the right side inside the device body, and the drive motor is used to drive the equipment inside the device body to operate normally.

[0020] In a preferred embodiment, a control panel is fixedly mounted on the right side of the front outer surface of the device body.

[0021] By adopting the above technical solution, a control panel is fixedly installed on the right side of the front outer surface of the device body, and the control panel can control the overall structure and parameters of the device.

[0022] In summary, due to the adoption of the above technical solution, the beneficial effects of this application are:

[0023] In the present application, after the material inside the device body is cleaned, the drying component inside the drying component shell is started, so that the air inside the device body can be heated to form a high temperature, so that the material can be dried quickly, and the production efficiency is accelerated. A drying component shell is opened on the upper surface of the device body, and a protective net is fixedly installed on the upper surface of the inner surface of the drying component shell, and an electric air valve is fixedly installed on the lower surface of the protective net. An air intake fan is fixedly installed on the lower surface of the electric air valve, and a heating pipe is fixedly installed on the lower surface of the air intake fan. A drying component power supply is fixedly installed on the right side of the drying component shell. The inner center of the device body can accommodate the material to be processed. The drying component shell serves as the installation basis of the drying equipment. The protective net can prevent foreign matter from falling into the inner part of the drying component shell. Opening the electric air valve allows wind to enter the inner part of the drying component shell, and closing the electric air valve allows the inner part of the device body to maintain a certain temperature for a certain period of time. The air intake fan allows external air to enter, and the heating pipe can heat the air entering from the outside, thereby heating the inner part of the device body to achieve a drying effect. The drying component power supply is used to drive the operation of the entire drying component. By installing a component for drying the material after cleaning in the device, the drying component is started after the material cleaning is completed to dry the material quickly, thereby reducing the time consumed by the material to dry naturally. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 This is a schematic diagram of the three-dimensional structure of a cleaning and etching device in this application;

[0025] Figure 2 It is a schematic diagram of the internal structure in this application;

[0026] Figure 3 This is a schematic diagram of the cleaning structure in this application.

[0027] Markings in the figure: 1. Device body; 2. Control panel; 3. Water inlet valve; 4. Water tank; 5. Water supply pipe; 6. Rotating base; 7. Fixed bracket; 8. Pressure nozzle; 9. Clamp track; 10. Electric clamp; 11. Guide plate; 12. Water outlet valve; 13. Inspection door; 14. Drive motor; 15. Movable door; 16. Glass; 17. Handle; 18. Drying component housing; 19. Protective net; 20. Electric air valve; 21. Inlet fan; 22. Heating tube; 23. Drying component power supply. DETAILED DESCRIPTION

[0028] In order to make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme in the embodiments of the present application will be clearly and completely described below in combination with the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0029] Example:

[0030] Reference Figure 1-Figure 2 A drying component housing 18 is provided on the upper surface of the device body 1, a protective net 19 is fixedly installed on the inner upper surface of the drying component housing 18, an electric air valve 20 is fixedly installed on the lower surface of the protective net 19, an air inlet fan 21 is fixedly installed on the lower surface of the electric air valve 20, a heating pipe 22 is fixedly installed on the lower surface of the air inlet fan 21, a drying component power supply 23 is fixedly installed on the right side of the drying component housing 18, the inner center of the device body 1 can accommodate the material to be processed, the drying component housing 18 serves as the installation base of the drying equipment, and the protective net 19 can prevent foreign matter from falling into the drying component housing 18 Internally, opening the electric air valve 20 allows air to enter the drying component housing 18, and closing the electric air valve 20 allows the interior of the device body 1 to maintain a certain temperature for a certain period of time. The air inlet fan 21 allows external air to enter, and the heating tube 22 can heat the air entering from the outside, thereby heating the interior of the device body 1 to achieve a drying effect. The drying component power supply 23 is used to drive the operation of the entire drying component. By installing a component for drying the material after cleaning in the device, the drying component is started after the material is cleaned to dry the material quickly, thereby reducing the time consumed by the material to dry naturally.

[0031] Reference Figure 1-Figure 2 A water inlet valve 3 is opened on the left side of the device body 1, and a water tank 4 is fixedly installed on the other end of the water inlet valve 3. The lower surface of the water tank 4 is fixedly connected to a water supply pipe 5. The water inlet valve 3 is used to replenish the water required by the cleaning device. The water tank 4 can temporarily store clean water, and the water supply pipe 5 can transport the water inside the water tank 4 to the cleaning device.

[0032] Reference Figure 3 A rotating base 6 is connected and installed on both sides of the middle of the inner part of the device body 1, and a fixed bracket 7 is connected and installed between the same inner sides of the outer surface of the circumference of the rotating base 6. A plurality of pressure nozzles 8 are fixedly installed on the same inner side of the fixed bracket 7. The rotating base 6 serves as the installation base of the cleaning device, and the fixed bracket 7 is used to support the pressure nozzle 8. A pipeline is arranged inside the fixed bracket 7 and connected with the water supply pipeline 5 to supply water to the pressure nozzle 8. The pressure nozzle 8 sprays clean water onto the material to complete the cleaning of the material.

[0033] Reference Figure 3 A gripper track 9 is fixedly installed in the middle of the same inner side of the rotating base 6, and an electric gripper 10 is movably installed on the same inner side of the gripper track 9. The combination of the gripper track 9 and the electric gripper 10 can allow the material to be clamped inside the device body 1 for cleaning and drying.

[0034] Reference Figure 1-Figure 2 A guide plate 11 is fixedly installed at the lower end of the interior of the device body 1, and an inspection door 13 is provided on the outer surface of the device body 1 at a position corresponding to the guide plate 11. The lower end of the guide plate 11 is fixedly connected to a water outlet valve 12. The guide plate 11 guides the used waste water to the water outlet valve 12. The water outlet valve 12 can be connected to an external waste water pipe to discharge the waste water out of the device body 1. The inspection door 13 can be opened to clean up the debris inside the guide plate 11.

[0035] Reference Figure 1 A movable door 15 is hingedly installed on the front outer surface of the device body 1, and a glass 16 is provided on the outer surface of the movable door 15. A handle 17 is connected and installed in the middle of the outer surface of the movable door 15. The movable door 15 can be opened to put in and take out the materials to be processed. The material processing situation inside the device body 1 can be observed through the glass 16. The handle 17 is used to prevent the movable door 15 from being accidentally opened, which causes the heat inside the device body 1 to be released during the drying process, affecting the drying effect.

[0036] Reference Figure 2 A drive motor 14 is fixedly installed on the right side inside the device body 1, and the drive motor 14 is used to drive the equipment inside the device body 1 to operate normally.

[0037] Reference Figure 1 A control panel 2 is fixedly installed on the right side of the front outer surface of the device body 1, and the control panel 2 can control the overall structure and parameters of the device.

[0038] The implementation principle of an embodiment of a cleaning and etching device of the present application is as follows: a drying component shell 18 is provided on the upper surface of the device body 1, a protective net 19 is fixedly installed on the inner upper surface of the drying component shell 18, an electric air valve 20 is fixedly installed on the lower surface of the protective net 19, an air intake fan 21 is fixedly installed on the lower surface of the electric air valve 20, a heating tube 22 is fixedly installed on the lower surface of the air intake fan 21, a drying component power supply 23 is fixedly installed on the right side of the drying component shell 18, the inner center of the device body 1 can accommodate materials to be processed, the drying component shell 18 serves as the installation base of the drying equipment, and the protective net 19 can prevent foreign matter from entering the drying component shell 18. Fall into the drying component shell 18, open the electric air valve 20 to allow air to enter the drying component shell 18, close the electric air valve 20 to keep a certain temperature inside the device body 1 for a certain period of time, and the air inlet fan 21 can allow external air to enter. The heating tube 22 can heat the air entering from the outside, thereby heating the inside of the device body 1 to achieve a drying effect. The drying component power supply 23 is used to drive the operation of the entire drying component. By installing a component for drying the material after cleaning in the device, the drying component is started after the material is cleaned to dry the material quickly, thereby reducing the time consumed by the material to dry naturally.

[0039] The above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. A cleaning and etching device, comprising a device body (1), characterized in that: A drying component shell (18) is provided on the upper surface of the device body (1), a protective net (19) is fixedly installed on the inner upper surface of the drying component shell (18), an electric air valve (20) is fixedly installed on the lower surface of the protective net (19), an air intake fan (21) is fixedly installed on the lower surface of the electric air valve (20), a heating pipe (22) is fixedly installed on the lower surface of the air intake fan (21), and a drying component power supply (23) is fixedly installed on the right side of the drying component shell (18).

2. A cleaning and etching device as claimed in claim 1, characterized in that: A water inlet valve (3) is provided on the left side of the device body (1); a water tank (4) is fixedly mounted on the other end of the water inlet valve (3); and a water supply pipe (5) is fixedly connected to the lower surface of the water tank (4).

3. A cleaning and etching device as claimed in claim 1, characterized in that: A rotating base (6) is connected and installed on both sides of the middle of the device body (1), a fixed bracket (7) is connected and installed between the same inner sides of the circumferential outer surface of the rotating base (6), and a plurality of pressure nozzles (8) are fixedly installed on the same inner side of the fixed bracket (7).

4. A cleaning and etching device as claimed in claim 3, characterized in that: A gripper track (9) is fixedly installed in the middle of the same inner side of the rotating base (6), and an electric gripper (10) is movably installed on the same inner side of the gripper track (9).

5. A cleaning and etching device as claimed in claim 1, characterized in that: A guide plate (11) is fixedly mounted on the lower end of the interior of the device body (1), an inspection door (13) is provided on the outer surface of the device body (1) at a position corresponding to the guide plate (11), and a water outlet valve (12) is fixedly connected to the lower end of the guide plate (11).

6. A cleaning and etching device as claimed in claim 1, characterized in that: A movable door (15) is hingedly mounted on the front outer surface of the device body (1), a glass (16) is provided on the outer surface of the movable door (15), and a handle (17) is connected and mounted in the middle of the outer surface of the movable door (15).

7. A cleaning and etching device as claimed in claim 1, characterized in that: A driving motor (14) is fixedly installed on the right side of the inside of the device body (1).

8. A cleaning and etching device as claimed in claim 1, characterized in that: A control panel (2) is fixedly mounted on the right side of the front outer surface of the device body (1).

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