Novel vacuum suction sheet
By designing a vacuum suction piece with an I-shaped structure, using single-line multi-point ventilation hole distribution, the problems of scratches and excessive friction of silicon wafers under large-sized silicon wafers are solved, and uniform adsorption force distribution and silicon wafer stability are achieved Improved, improve product yield.
Patent Information
- Application Number
- CN202420258007.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-02-02
- Publication Date
- 2024-12-27
- Estimated Expiration
- 2034-02-02
AI Technical Summary
Under large-sized silicon wafers, existing vacuum adsorption devices can easily cause scratches and excessive friction in the silicon wafers, affecting product yield.
A vacuum suction piece with an I-shaped structure was designed, including the left, middle and right vacuum suction piece. It is distributed through a single-line multi-point ventilation hole and is symmetrically arranged around the center point of the silicon wafer to avoid excessive local adsorption force. , reduce silicon wafer slip and scratches.
It effectively reduces friction caused by deviation of the center of gravity of the silicon wafer, ensures uniform distribution of adsorption force, avoids scratches of the silicon wafer, and improves product yield.
Smart Images
Figure CN222261009U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to an adsorption device, in particular to a vacuum sheet adsorption device for adsorbing silicon sheets. Background Art
[0002] In recent years, the scale of the photovoltaic power generation market has grown explosively, and various new technologies and processes have emerged one after another. However, "reducing costs and increasing efficiency" is still the core driving force of the photovoltaic cell industry. Ways to reduce costs include technological innovation, structural innovation, etc., and improving yield through equipment adjustment has also become one of the effective means of reducing costs.
[0003] Specifically, in the manufacturing of crystalline silicon cells, any improvement in contact with silicon wafers can improve the yield of products. Among them, the contact between the robot and the silicon wafer is more common, and the most common contact method is the vacuum adsorption principle. The existing vacuum adsorption plates or sheets have unreasonable design problems, which can easily cause scratches on silicon wafers and excessive friction. The problem is particularly prominent when the size of silicon wafers becomes larger. Utility Model Content
[0004] The technical problem to be solved by the utility model is: how to solve the problem of scratches caused by contact between a manipulator and a silicon wafer in a large-size silicon wafer.
[0005] The technical solution adopted by the utility model is: a new type of vacuum suction piece, including a left vacuum suction piece 1, a middle vacuum suction piece 2, and a right vacuum suction piece 3 which are integrally connected together to form an I-shaped structure, and the left vacuum suction piece 1, the middle vacuum suction piece 2, and the right vacuum suction piece 3 have a channel connected to a vacuum generator 5; the left vacuum suction piece 1 is a rectangular parallelepiped structure with a channel 4 inside, and the front of the left vacuum suction piece 1 has three circular air holes connected to the channel 4 inside, namely, the middle air hole 11 of the left vacuum suction piece, the upper air hole 12 of the left vacuum suction piece, and the lower air hole 13 of the left vacuum suction piece; the middle vacuum suction piece 2 is a rectangular parallelepiped structure with a channel 4 inside, and the front of the middle vacuum suction piece 2 has three circular air holes connected to the channel 4 inside The right vacuum suction plate 3 is a rectangular parallelepiped structure with a channel 4 inside, and the front of the right vacuum suction plate 3 has three circular ventilation holes connected to the channel 4 inside, namely, the right vacuum suction plate middle vent 31, the right vacuum suction plate upper vent 32, and the right vacuum suction plate lower vent 33; the length direction of the left vacuum suction plate 1 is parallel to the length direction of the right vacuum suction plate 3, and the length of the right vacuum suction plate 3 is greater than that of the left vacuum suction plate 1, the length direction of the middle vacuum suction plate 2 is perpendicular to the length direction of the right vacuum suction plate 3, and the thickness of the left vacuum suction plate 1, the middle vacuum suction plate 2, and the right vacuum suction plate 3 are the same.
[0006] The left vacuum suction sheet 1 is 8-12 cm long, 1-3 cm wide, and 1-3 cm thick. The diameters of the three vents of the left vacuum suction sheet 1 are the same, which is 0.5-2 mm. The front of the left vacuum suction sheet 1 is a surface including a long side and a wide side. The vent 11 in the left vacuum suction sheet is located at the center of the front. The connecting line of the vent 11 in the left vacuum suction sheet, the upper vent 12 in the left vacuum suction sheet, and the lower vent 13 in the left vacuum suction sheet is parallel to the length direction of the left vacuum suction sheet 1. The distances from the upper vent 12 in the left vacuum suction sheet and the lower vent 13 in the left vacuum suction sheet to the vent 11 in the left vacuum suction sheet are the same, which is 3-5 cm.
[0007] The middle vacuum suction plate 2 is 5-10 cm long, 1-3 cm wide, and 1-3 mm thick. The diameters of the three vents of the middle vacuum suction plate 2 are the same, which is 0.5-2 mm. The front of the middle vacuum suction plate 2 is a surface including a long side and a wide side. The vent 23 in the middle vacuum suction plate is located at the center of the front. The connecting line of the vent 23 in the middle vacuum suction plate, the left vent 21 in the middle vacuum suction plate, and the right vent 22 in the middle vacuum suction plate is parallel to the length direction of the middle vacuum suction plate 2. The distances from the left vent 21 in the middle vacuum suction plate, the right vent 22 in the middle vacuum suction plate to the vent 23 in the middle vacuum suction plate are the same, which is 2-4 cm.
[0008] The right vacuum suction sheet 3 is 15-25 cm long, 1-3 cm wide, and 1-3 cm thick. The diameters of the three vents of the right vacuum suction sheet 3 are the same, which is 0.5-2 mm. The front of the right vacuum suction sheet 3 is a surface including a long side and a wide side. The middle vent 31 of the right vacuum suction sheet is located at the center of the front. The connecting line of the middle vent 31 of the right vacuum suction sheet, the upper vent 32 of the right vacuum suction sheet, and the lower vent 33 of the right vacuum suction sheet is parallel to the length direction of the right vacuum suction sheet 3. The upper vent 32 of the right vacuum suction sheet and the lower vent 33 of the right vacuum suction sheet are at the same distance from the middle vent 31 of the right vacuum suction sheet, which is 3-5 cm.
[0009] The beneficial effects of the present invention are: by designing a left-right symmetrical vacuum suction structure around the center point of the silicon wafer and using single-line multi-point vents, the silicon wafer can be effectively prevented from slipping or scratching. The specific effects are as follows:
[0010] 1. For large-sized silicon wafers, the friction caused by torque generated by the deviation of the center of gravity of the silicon wafer can be significantly reduced.
[0011] 2. The multi-point vacuum vents are symmetrically distributed on the left and right sides of the silicon wafer to evenly distribute the adsorption force and avoid the problem of excessive local adsorption force. BRIEF DESCRIPTION OF THE DRAWINGS
[0012] Figure 1 It is a schematic diagram of the overall structure of the utility model;
[0013] Figure 2 It is a schematic diagram of the vacuum suction piece structure on the left;
[0014] Figure 3 The diagram of the vacuum suction results in the middle and right sides is as follows;
[0015] Among them: 1-left vacuum suction plate, 2-middle vacuum suction plate, 3-right vacuum suction plate, 4-channel, 5-vacuum generator, 11-middle vent hole of left vacuum suction plate, 12-upper vent hole of left vacuum suction plate, 13-lower vent hole of left vacuum suction plate, 21-left vent hole of middle vacuum suction plate, 22-right vent hole of middle vacuum suction plate, 23-middle vent hole of middle vacuum suction plate, 31-middle vent hole of right vacuum suction plate, 32-upper vent hole of right vacuum suction plate, 33-lower vent hole of right vacuum suction plate. DETAILED DESCRIPTION
[0016] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present utility model patent is further described in detail below in conjunction with embodiments.
[0017] This utility model patent is a new type of vacuum suction piece, such as Figure 1 As shown, it mainly includes a left vacuum suction plate 1, a middle vacuum suction plate 2, and a right vacuum suction plate 3, and the overall design is an I-shape. The three are only divided according to their positions, and are actually a whole interconnected through a channel 4.
[0018] The left side vacuum suction plate. Figure 1 , 2 As shown, the left vacuum suction plate 1 is a rectangular parallelepiped, and in the front, the longer side of the rectangular parallelepiped is along the longitudinal direction, and the shorter side is along the horizontal direction. Along the longitudinal centerline direction of the left vacuum suction plate 1, three circular vents are evenly distributed, among which the center of the vent 11 in the left vacuum suction plate is located at the center point of the left vacuum suction plate (front); the center of the vent 12 on the left vacuum suction plate is located at the upper end of the left vacuum suction plate 1, and the center of the vent 12 on the left vacuum suction plate is located at the lower end of the left vacuum suction plate 1.
[0019] like Figure 1 , 2 As shown, the left vacuum suction plate 1 is 8-12 cm long, 1-3 cm wide, and 1-3 mm thick. The diameters of the three vents of the left vacuum suction plate 1 are all 0.5-2 mm. The center of the vent 12 on the left vacuum suction plate is 3-5 cm away from the center point of the left vacuum suction plate; the center of the vent 13 on the left vacuum suction plate is 3-5 cm away from the center point of the left vacuum suction plate.
[0020] The middle vacuum suction piece. Figure 1 , 3As shown, the structure of the middle vacuum suction plate 2 is a rectangular parallelepiped, with the longer side of the rectangular parallelepiped along the horizontal direction and the shorter side along the vertical direction. The center point of the middle vacuum suction plate coincides with the center point of the silicon wafer when the silicon wafer is adsorbed. Along the horizontal center line direction of the middle side vacuum suction plate 2, three circular vents are evenly distributed, wherein the center of the left vent 21 of the middle vacuum suction plate is located at the left end of the middle vacuum suction plate 2, and the center of the right vent 22 of the middle vacuum suction plate is located at the right end of the middle vacuum suction plate 2.
[0021] like Figure 1 , 3 As shown, the middle vacuum suction plate 2 is 5-10 cm long, 1-3 cm wide, and 1-3 mm thick. The diameters of the three vents of the middle vacuum suction plate 2 are all 0.5-2 mm. The center of the left vent 21 of the middle vacuum suction plate is 2-4 cm away from the center point of the middle vacuum suction plate; the center of the right vent 22 of the left vacuum suction plate is 2-4 cm away from the center point of the left vacuum suction plate.
[0022] Vacuum the right side. Figure 1 , 3 As shown, the right vacuum suction plate 3 is a rectangular parallelepiped, with the longer side of the rectangular parallelepiped along the longitudinal direction and the shorter side along the horizontal direction. Along the longitudinal centerline direction of the right vacuum suction plate 3, three circular vents are distributed, wherein the center of the middle vent 31 of the right vacuum suction plate is located at the intersection of the horizontal centerline of the middle vacuum suction plate 3 and the longitudinal centerline of the right vacuum suction plate 3; the center of the upper vent 32 of the right vacuum suction plate is located at the upper end of the right vacuum suction plate 3, and the center of the lower vent 33 of the right vacuum suction plate is located at the lower end of the right vacuum suction plate 3.
[0023] like Figure 1 , 3 As shown, the right vacuum suction plate 3 is 15-25cm long, 1-3cm wide, and 1-3mm thick. The diameters of the three vents of the right vacuum suction plate 3 are all 0.5-2mm. The center of the upper vent 32 of the right vacuum suction plate is 5-15cm away from the center of the middle vent 31 of the right vacuum suction plate; the center of the lower vent 33 of the right vacuum suction plate is 5-15cm away from the center of the middle vent 31 of the right vacuum suction plate. Example
[0024] A novel vacuum suction piece, comprising:
[0025] The left side vacuum suction plate. Figure 1 , 2 As shown, the left vacuum suction plate 1 is 10 cm long, 2 cm wide and 1.5 mm thick. The diameters of the three vents of the left vacuum suction plate 1 are all 1 mm. The center of the vent 12 on the left vacuum suction plate is 4 cm away from the center point B of the left vacuum suction plate; the center of the vent 13 on the left vacuum suction plate is 4 cm away from the center point B of the left vacuum suction plate.
[0026] The middle vacuum suction piece. Figure 1 , 3 As shown, the middle vacuum suction plate 2 is 7 cm long, 2 cm wide and 1.5 mm thick. The diameters of the three vents of the middle vacuum suction plate 2 are all 1 mm. The center of the left vent 21 of the middle vacuum suction plate is 2.5 cm away from the center point of the middle vacuum suction plate (the middle vent of the middle vacuum suction plate); the center of the right vent 22 of the left vacuum suction plate is 2.5 cm away from the center point A of the left vacuum suction plate.
[0027] Vacuum the right side. Figure 1 , 3 As shown, the right vacuum suction plate 3 is 18 cm long, 2 cm wide, and 1.5 mm thick. The diameters of the three vents of the right vacuum suction plate 3 are all 1 mm. The center of the upper vent 32 of the right vacuum suction plate is 7 cm away from the center of the middle vent 31 of the right vacuum suction plate; the center of the lower vent 33 of the right vacuum suction plate is 7 cm away from the center of the middle vent 31 of the right vacuum suction plate.
[0028] By designing a left-right symmetrical vacuum suction structure around the center of the silicon wafer and using single-line multi-point vents, the silicon wafer can be effectively prevented from slipping or scratching. Under large-sized silicon wafers, the friction caused by torque generated by the deviation of the center of gravity of the silicon wafer can be significantly reduced. The multi-point vacuum vents symmetrically distributed on the left and right sides of the silicon wafer can evenly distribute the suction force to avoid the problem of excessive local suction force.
Claims
1. A new type of vacuum suction piece, characterized by: The invention comprises a left vacuum suction plate (1), a middle vacuum suction plate (2), and a right vacuum suction plate (3) which are integrally connected to form an I-shaped structure. The left vacuum suction plate (1), the middle vacuum suction plate (2), and the right vacuum suction plate (3) have a channel connected to a vacuum generator (5); the left vacuum suction plate (1) is a rectangular parallelepiped structure with a channel (4) inside, and the front of the left vacuum suction plate (1) has three circular ventilation holes connected to the channel (4) inside, namely, the middle ventilation hole (11) of the left vacuum suction plate, the upper ventilation hole (12) of the left vacuum suction plate, and the lower ventilation hole (13) of the left vacuum suction plate; the middle vacuum suction plate (2) is a rectangular parallelepiped structure with a channel (4) inside, and the front of the middle vacuum suction plate (2) has three circular ventilation holes connected to the channel (4) inside, namely, the middle ventilation hole (11) of the middle vacuum suction plate The right vacuum suction piece (3) is a rectangular parallelepiped structure with a channel (4) inside. The front of the right vacuum suction piece (3) is provided with three circular ventilation holes connected to the channel (4) inside, namely, the middle ventilation hole (31) of the right vacuum suction piece, the upper ventilation hole (32) of the right vacuum suction piece, and the lower ventilation hole (33) of the right vacuum suction piece. The length direction of the left vacuum suction piece (1) is parallel to the length direction of the right vacuum suction piece (3), and the length of the right vacuum suction piece (3) is greater than the length of the left vacuum suction piece (1). The length direction of the middle vacuum suction piece (2) is perpendicular to the length direction of the right vacuum suction piece (3). The thickness of the left vacuum suction piece (1), the middle vacuum suction piece (2) and the right vacuum suction piece (3) are the same.
2. A novel vacuum suction sheet according to claim 1, characterized in that: The left vacuum suction plate (1) is 8-12 cm long, 1-3 cm wide and 1-3 cm thick. The diameters of the three ventilation holes of the left vacuum suction plate (1) are the same, 0.5-2 mm. The front side of the left vacuum suction plate (1) is a surface including a long side and a wide side. The ventilation hole (11) in the left vacuum suction plate is located at the center of the front side. The connecting line of the ventilation hole (11) in the left vacuum suction plate, the upper ventilation hole (12) in the left vacuum suction plate and the lower ventilation hole (13) in the left vacuum suction plate is parallel to the length direction of the left vacuum suction plate (1). The distances from the upper ventilation hole (12) in the left vacuum suction plate and the lower ventilation hole (13) in the left vacuum suction plate to the ventilation hole (11) in the left vacuum suction plate are the same, 3-5 cm.
3. A novel vacuum suction sheet according to claim 1, characterized in that: The middle vacuum suction plate (2) is 5-10 cm long, 1-3 cm wide and 1-3 mm thick. The diameters of the three ventilation holes of the middle vacuum suction plate (2) are the same, 0.5-2 mm. The front side of the middle vacuum suction plate (2) is a side including a long side and a wide side. The middle ventilation hole (23) of the middle vacuum suction plate is located at the center of the front side. The connecting line of the middle ventilation hole (23), the left ventilation hole (21) and the right ventilation hole (22) of the middle vacuum suction plate is parallel to the length direction of the middle vacuum suction plate (2). The distances from the left ventilation hole (21) and the right ventilation hole (22) of the middle vacuum suction plate to the middle ventilation hole (23) of the middle vacuum suction plate are the same, 2-4 cm.
4. A novel vacuum suction sheet according to claim 1, characterized in that: The right vacuum suction plate (3) is 15-25 cm long, 1-3 cm wide and 1-3 cm thick. The three vent holes of the right vacuum suction plate (3) have the same diameter of 0.5-2 mm. The front side of the right vacuum suction plate (3) is a surface including a long side and a wide side. The middle vent hole (31) of the right vacuum suction plate is located at the center of the front side. The connecting line of the middle vent hole (31) of the right vacuum suction plate, the upper vent hole (32) of the right vacuum suction plate and the lower vent hole (33) of the right vacuum suction plate is parallel to the length direction of the right vacuum suction plate (3). The distances from the upper vent hole (32) of the right vacuum suction plate and the lower vent hole (33) of the right vacuum suction plate to the middle vent hole (31) of the right vacuum suction plate are the same, which is 3-5 cm.