Curved surface electrode plasma generating device capable of discharging uniformly

Abstract

The utility model discloses a curved surface electrode plasma generating device capable of discharging uniformly, which comprises an air conveying device and a generating device, the generating device is arranged on the air conveying device, and the air conveying device comprises an air compression tank, a first conveying pipe, a flow regulator shell, a controller and an electric push rod. One end of the first conveying pipe is fixedly connected to the output end of the air compression tank, the input end of the flow regulator shell is fixedly connected to the other end of the first conveying pipe, and the controller is fixedly connected to the side, away from the air compression tank, of the flow regulator shell. According to the utility model, through the design of the spherical curved surface electrode, the uniformity and the stability of plasma are effectively improved, the temperature of the electrode is kept stable by conveying air through the spiral fan blade cooling fan, the air flow is controlled through the controller, the air flow is in a stable conveying state, and the generation efficiency and the stability of the plasma are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of electronic components, in particular to a curved surface electrode plasma generating device with uniform discharge. Background Art

[0002] In many industrial and scientific applications, plasma is needed as a reaction medium or processing method. However, existing plasma generators often have problems such as uneven discharge and poor stability, which affect the use effect and application scope of plasma. Therefore, a curved electrode plasma generator with uniform discharge is urgently needed to solve the above problems. Utility Model Content

[0003] The purpose of the utility model is to provide a plasma generating device with a curved electrode and uniform discharge, so as to solve the problems raised in the above-mentioned background technology.

[0004] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a uniformly discharged curved electrode plasma generating device, comprising an air conveying device and a generating device, wherein the generating device is arranged on the air conveying device, the air conveying device comprises an air compression tank, a first conveying pipe, a flow regulator housing, a controller, a second conveying pipe, an air flow sensor, a sealing sheet, a regulating valve and an electric push rod, one end of the first conveying pipe is fixedly connected to the output end of the air compression tank, the input end of the flow regulator housing is fixedly connected to the other end of the first conveying pipe, the controller is fixedly connected to a side of the flow regulator housing away from the air compression tank, one end of the second conveying pipe is fixedly connected to the output end of the flow regulator housing, the air flow sensor is fixedly installed on the second conveying pipe, the sealing sheet is fixedly connected to the inside of the side wall of the flow regulator housing, the regulating valve is slidably connected to the sealing sheet, the electric push rod is fixedly connected to the inner top end of the flow regulator housing, and the top end of the electric push rod is fixedly connected to an end of the regulating valve close to the electric push rod.

[0005] Preferably, the generating device comprises a plasma generating box, a grounding electrode, an output cover, an observation window, an air transmission chamber, a radiation electrode, a heat dissipation fan, a fixed bracket, an air input joint, a radiation electrode plug and a grounding electrode plug, wherein the grounding electrode is fixedly mounted on the inner top of the plasma generating box, the bottom end of the output cover is fixedly connected to the top of the plasma generating box, the observation window is fixedly connected to the plasma generating box, the top of the air transmission chamber is fixedly connected to the bottom of the plasma generating box, the bottom end of the radiation electrode is fixedly connected to the air transmission chamber, the heat dissipation fan is rotatably connected to the air transmission chamber, and the heat dissipation fan is located outside the radiation electrode, the top of the fixed bracket is fixedly connected to the outside of the top of the air transmission chamber, the air input joint is fixedly connected to the bottom of the air transmission chamber, the radiation electrode plug is fixedly connected to the bottom end of the radiation electrode, and one end of the radiation electrode plug away from the radiation electrode is located outside the air transmission chamber, the grounding electrode plug is fixedly connected to the grounding electrode, and one end of the generating device away from the grounding electrode is located outside the plasma generating box.

[0006] Preferably, one end of the second delivery pipe away from the flow regulator housing is fixedly connected to the air input connector.

[0007] Preferably, the controller is electrically connected to the electric push rod and the air flow sensor by wires, respectively.

[0008] Preferably, the end of the regulating valve away from the electric push rod is spherical in design, and the spherical end of the regulating valve matches the inner groove of the output end of the flow regulator housing.

[0009] Preferably, the observation window is made of transparent glass, the top of the radiating electrode is designed as a hemispherical surface, and the radiating electrode is located inside the cooling fan, and the radiating electrode and the cooling fan do not contact each other, and the blades of the cooling fan are spirally designed, the cooling fan is designed as an aluminum alloy, and the surface of the cooling fan is sprayed with insulating paint.

[0010] Compared with the prior art, the beneficial effects of the utility model are as follows:

[0011] The utility model effectively improves the uniformity and stability of plasma through the design of spherical curved surface electrodes, delivers air through the spiral blade heat dissipation fan to maintain the temperature of the electrode stable, controls the air flow through the controller to achieve a stable air flow state, and improves the generation efficiency and stability of plasma. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is a schematic diagram of the main three-dimensional structure of the utility model;

[0013] Figure 2 This is a schematic diagram of the structure of the air conveying device in the utility model;

[0014] Figure 3 It is a schematic diagram of the structure of the air conveying device A in the utility model;

[0015] Figure 4 It is a schematic diagram of the structure of the generating device in the utility model.

[0016] In the figure: 1-air conveying device, 2-generating device, 3-air compression tank, 4-first conveying pipe, 5-flow regulator housing, 6-controller, 7-second conveying pipe, 8-air flow sensor, 9-sealing plate, 10-regulating valve, 11-electric push rod, 12-plasma generating box, 13-ground electrode, 14-output cover, 15-observation window, 16-air transmission chamber, 17-radiation electrode, 18-cooling fan, 19-fixed bracket, 20-air input connector, 21-radiation electrode plug, 22-ground electrode plug. DETAILED DESCRIPTION

[0017] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0018] See also Figure 1-4 The utility model provides an embodiment: a uniformly discharged curved electrode plasma generating device, comprising an air conveying device 1 and a generating device 2, wherein the generating device 2 is arranged on the air conveying device 1, and the air conveying device 1 comprises an air compression tank 3, a first conveying pipe 4, a flow regulator housing 5, a controller 6, a second conveying pipe 7, an air flow sensor 8, a sealing sheet 9, a regulating valve 10 and an electric push rod 11, wherein one end of the first conveying pipe 4 is fixedly connected to the output end of the air compression tank 3, the input end of the flow regulator housing 5 is fixedly connected to the other end of the first conveying pipe 4, the controller 6 is fixedly connected to the side of the flow regulator housing 5 away from the air compression tank 3, one end of the second conveying pipe 7 is fixedly connected to the output end of the flow regulator housing 5, the air flow sensor 8 is fixedly installed on the second conveying pipe 7, the sealing sheet 9 is fixedly connected to the inside of the side wall of the flow regulator housing 5, the regulating valve 10 is slidably connected to the sealing sheet 9, the electric push rod 11 is fixedly connected to the internal top of the flow regulator housing 5, and the top end of the electric push rod 11 is fixedly connected to the end of the regulating valve 10 close to the electric push rod 11.

[0019] The generating device 2 includes a plasma generating box 12, a grounding electrode 13, an output cover 14, an observation window 15, an air transmission chamber 16, a radiation electrode 17, a cooling fan 18, a fixing bracket 19, an air input connector 20, a radiation electrode plug 21 and a grounding electrode plug 22. The grounding electrode 13 is fixedly mounted on the top of the plasma generating box 12, the bottom end of the output cover 14 is fixedly connected to the top of the plasma generating box 12, the observation window 15 is fixedly connected to the plasma generating box 12, the top end of the air transmission chamber 16 is fixedly connected to the bottom end of the plasma generating box 12, the bottom end of the radiation electrode 17 is fixedly connected to the On the air transmission chamber 16, the cooling fan 18 is rotatably connected to the air transmission chamber 16, and the cooling fan 18 is located on the outside of the radiation electrode 17, the top of the fixed bracket 19 is fixedly connected to the outside of the top of the air transmission chamber 16, the air input connector 20 is fixedly connected to the bottom of the air transmission chamber 16, the radiation electrode plug 21 is fixedly connected to the bottom of the radiation electrode 17, and the end of the radiation electrode plug 21 away from the radiation electrode 17 is located on the outside of the air transmission chamber 16, the grounding electrode plug 22 is fixedly connected to the grounding electrode 13, and the end of the generating device 2 away from the grounding electrode 13 is located on the outside of the plasma generating box 12.

[0020] One end of the second delivery pipe 7 away from the flow regulator housing 5 is fixedly connected to the air input connector 20, and air is delivered to the plasma generating box 12 through the air compression tank 3, so as to control the air flow.

[0021] The controller 6 is electrically connected to the electric push rod 11 and the air flow sensor 8 by wires. The canned air flow is unstable. The controller 6 is used to maintain the air flow in a fixed range, so that the end of the radiation electrode 17 can stably generate plasma.

[0022] The end of the regulating valve 10 away from the electric push rod 11 is spherical in design, and the spherical end of the regulating valve 10 matches the inner groove of the output end of the flow regulator housing 5, so that the air flow can be easily controlled by moving the regulating valve 10.

[0023] The observation window 15 is made of transparent glass, which is convenient for observing the internal situation. The top of the radiation electrode 17 is designed with a hemispherical surface, and the discharge of the curved surface is uniform and stable. The radiation electrode 17 is located inside the heat dissipation fan 18, and the radiation electrode 17 and the heat dissipation fan 18 do not contact each other. When the heat dissipation fan 18 rotates, it does not affect the operation of the radiation electrode 17. The blades of the heat dissipation fan 18 are spirally designed. The heat dissipation fan 18 is designed with aluminum alloy, and the surface of the heat dissipation fan 18 is sprayed with insulating paint, which is convenient for heat dissipation of the radiation electrode 17. The heat dissipation is achieved by accelerating the air circulation and diffusion through rotation.

[0024] Working principle: During use, first input the air flow interval threshold program instruction to the controller 6 through the computer, then connect the grounding electrode plug 22 to the grounding wire, connect the radiation electrode plug 21 to the positive pole of the power supply, and then open the valve of the air compression tank 3. At this time, the air flows from the air compression tank 3 through the first delivery pipe 4 into the flow regulator housing 5. The controller 6 controls the electric push rod 11 to contract, and the end of the electric push rod 11 drives the regulating valve 10 to move upward. When the spherical end of the regulating valve 10 is away from the output port of the flow regulator housing 5, the air enters the second delivery pipe 7. The air flow sensor 8 located on the second delivery pipe 7 detects the air flow. The air flow sensor 8 transmits the air flow data to the controller 6. When the air flow data received by the controller 6 is greater than the preset threshold, the controller 6 controls the electric push rod 11 to extend, and the end of the electric push rod 11 pushes the regulating valve 10 to move downward close to the output port of the flow regulator housing 5. When the air flow data received by the controller 6 is less than the preset threshold, the controller 6 controls the electric push rod 11 to extend. The rod 11 contracts, and the end of the electric push rod 11 drives the regulating valve 10 to move upward away from the output port of the flow regulator housing 5. When the air flow data received by the controller 6 is in the preset range, the controller 6 controls the electric push rod 11 to maintain this state, and the air enters the air transmission chamber 16 through the air input connector 20. When the air passes through the heat dissipation fan 18, since the blades of the heat dissipation fan 18 are spirally designed, the flow of air drives the heat dissipation fan 18 to rotate, and the air is uniformly input into the plasma generator box 12 in a spiral shape. At this time, the power is turned on to transmit electrical energy to the radiation electrode plug 21, and the radiation electrode plug 21 transmits the electrical energy to the radiation electrode 17. The radiation electrode 17 transmits the electrical energy to the ground electrode 13 through the air. The air generates plasma under the action of the electric field. The process inside the plasma generator box 12 is observed through the observation window 15. Due to continuous discharge, the radiation electrode 17 generates heat. The heat dissipation fan 18 absorbs the heat generated by the radiation electrode 17 and transmits it to the fan blades and dissipates the heat through the flowing air, thereby maintaining stable discharge of the radiation electrode 17.

[0025] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A uniformly discharged curved electrode plasma generating device, comprising an air conveying device (1) and a generating device (2), characterized in that: The generating device (2) is arranged on the air conveying device (1), and the air conveying device (1) comprises an air compression tank (3), a first conveying pipe (4), a flow regulator housing (5), a controller (6), a second conveying pipe (7), an air flow sensor (8), a sealing sheet (9), a regulating valve (10) and an electric push rod (11), one end of the first conveying pipe (4) is fixedly connected to the output end of the air compression tank (3), the input end of the flow regulator housing (5) is fixedly connected to the other end of the first conveying pipe (4), and the controller (6) is fixedly connected to the flow regulator housing (5). On a side away from the air compression tank (3), one end of the second delivery pipe (7) is fixedly connected to the output end of the flow regulator housing (5), the air flow sensor (8) is fixedly installed on the second delivery pipe (7), the sealing sheet (9) is fixedly connected to the inside of the side wall of the flow regulator housing (5), the regulating valve (10) is slidably connected to the sealing sheet (9), the electric push rod (11) is fixedly connected to the internal top end of the flow regulator housing (5), and the top end of the electric push rod (11) is fixedly connected to one end of the regulating valve (10) close to the electric push rod (11).

2. The uniform discharge curved electrode plasma generator according to claim 1, characterized in that: The generating device (2) comprises a plasma generating box (12), a grounding electrode (13), an output cover (14), an observation window (15), an air transmission chamber (16), a radiation electrode (17), a heat dissipation fan (18), a fixing bracket (19), an air input joint (20), a radiation electrode plug (21) and a grounding electrode plug (22); the grounding electrode (13) is fixedly mounted on the top of the interior of the plasma generating box (12); the bottom end of the output cover (14) is fixedly connected to the top of the plasma generating box (12); the observation window (15) is fixedly connected to the plasma generating box (12); the top end of the air transmission chamber (16) is fixedly connected to the bottom end of the plasma generating box (12); the bottom end of the radiation electrode (17) is fixedly connected to the bottom of the air transmission chamber (16), the heat dissipation fan (18) is rotatably connected to the air transmission chamber (16), and the heat dissipation fan (18) is located outside the radiation electrode (17), the top end of the fixing bracket (19) is fixedly connected to the outside of the top end of the air transmission chamber (16), the air input connector (20) is fixedly connected to the bottom end of the air transmission chamber (16), the radiation electrode plug (21) is fixedly connected to the bottom end of the radiation electrode (17), and the end of the radiation electrode plug (21) away from the radiation electrode (17) is located outside the air transmission chamber (16), the grounding electrode plug (22) is fixedly connected to the grounding electrode (13), and the end of the generating device (2) away from the grounding electrode (13) is located outside the plasma generating box (12).

3. The uniform discharge curved electrode plasma generator according to claim 2, characterized in that: One end of the second delivery pipe (7) away from the flow regulator housing (5) is fixedly connected to the air input connector (20).

4. The uniform discharge curved electrode plasma generator according to claim 3, characterized in that: The controller (6) is electrically connected to the electric push rod (11) and the air flow sensor (8) respectively by wire.

5. The uniform discharge curved electrode plasma generator according to claim 4, characterized in that: The end of the regulating valve (10) away from the electric push rod (11) is spherical in design, and the spherical end of the regulating valve (10) matches the inner groove of the output end of the flow regulator housing (5).

6. The uniform discharge curved electrode plasma generator according to claim 5, characterized in that: The observation window (15) is made of transparent glass, the top of the radiation electrode (17) is designed as a hemispherical surface, the radiation electrode (17) is located inside the heat dissipation fan (18), the radiation electrode (17) and the heat dissipation fan (18) are not in contact with each other, the blades of the heat dissipation fan (18) are designed as spirals, the heat dissipation fan (18) is designed as an aluminum alloy, and the surface of the heat dissipation fan (18) is sprayed with insulating paint.

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