Chemical supply system

Abstract

A chemical supply system comprises at least one metal storage tank, at least one connecting pipe and at least one pump. The at least one metal storage tank comprises a tank body and at least one interface formed on the tank body, and the tank body is integrally formed without a seam generated by forming. The at least one connecting pipe is connected with the at least one interface. The at least one pump and the at least one interface form a liquid circulation relationship through at least one connecting pipe, and the at least one pump is one of the following groups: a magnetic suspension pump and a shaft seal-free pump. According to the chemical supply system disclosed by the utility model, in the process of supplying a chemical, the problems of pollution to the chemical caused by particles generated by errors in the supply process, uneven conveying and the like can be avoided, and the influence on the back-end process yield can be avoided.

Description

Technical Field

[0001] The utility model relates to a chemical supply system, in particular to a chemical supply system which can avoid uneven delivery and pollution of chemicals during the supply process. Background Art

[0002] The current raw material supply for semiconductor equipment is not as simple as providing chemicals to the equipment. In addition to ensuring the safety of the chemicals, it is also necessary to prevent the chemicals from being contaminated during the supply process.

[0003] The general understanding of chemical supply pollution is to avoid adding foreign objects into chemicals, but in actual operation, chemical supply pollution is not limited to the front. For example, the metal storage tanks commonly used in current chemical supply systems are generally formed by welding. If the welds produced after welding are not properly handled, they will cause particulate contamination to the chemicals. On the other hand, the pumps used in current chemical supply systems generally use a bellows pump or a diaphragm pump. The above two are mainly made of plastic materials. Plastic materials are prone to produce particles after long-term use, and are mixed into chemicals, affecting the back-end process. Furthermore, the structure of the above two pumps includes two pump chambers. The two pump chamber structure will cause indirect time in the supply, resulting in the generation of supply pulses and uneven delivery. Utility Model Content

[0004] The main purpose of the utility model is to solve the problems of the existing chemical supply system that the particles may be mistakenly generated during the supply process to cause pollution to the chemicals and uneven delivery.

[0005] To achieve the above-mentioned purpose, the utility model provides a chemical supply system, comprising at least one metal storage tank, at least one connecting pipe, and at least one pump. The at least one metal storage tank comprises a tank body and at least one interface formed on the tank body, and the tank body is integrally formed without a seam generated by the forming. The at least one connecting pipe is connected to the at least one interface. The at least one pump forms a liquid flow relationship with the at least one interface through the at least one connecting pipe, and the at least one pump is one of the following groups: a magnetic levitation pump and a shaftless pump.

[0006] In one embodiment, the at least one interface is located on a top surface or a bottom surface of the slot.

[0007] In one embodiment, the metal storage tank includes at least one support column connected to the tank body.

[0008] In one embodiment, the chemical supply system includes a box and a supply valve group disposed in the box, the at least one pump is disposed in the box, and the at least one metal storage tank is disposed in the box.

[0009] In one embodiment, the pump is disposed at the relative bottom of the box body, and the box body has at least one installation opening formed at the relative bottom to provide the at least one connecting pipe to pass through.

[0010] In one embodiment, the housing includes at least one observation window.

[0011] Through the above implementation of the utility model, compared with the existing ones, the utility model has the following characteristics: the tank body of the at least one metal storage tank included in the chemical supply system of the utility model does not have a joint produced by forming, and the at least one pump is the magnetic levitation pump and the shaftless pump, thereby effectively avoiding the contamination of chemicals caused by particles generated by errors in the supply process, and the problem of uneven delivery, which affects the yield of the back-end process.

[0012] The present invention is described in detail below with reference to the accompanying drawings and specific embodiments, but is not intended to limit the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 , is a schematic structural diagram (I) of an embodiment of the utility model.

[0014] Figure 2 , is a structural schematic diagram (II) of an embodiment of the utility model.

[0015] Figure 3 , is a structural schematic diagram (III) of an embodiment of the utility model.

[0016] Figure 4 , is a structural schematic diagram (I) of another embodiment of the utility model.

[0017] Figure 5 , is a structural schematic diagram (II) of another embodiment of the utility model.

[0018] Figure 6 , is a structural schematic diagram (III) of another embodiment of the utility model.

[0019] Figure 7 , is a structural schematic diagram (IV) of another embodiment of the utility model.

[0020] Among them, the reference numerals

[0021] 10: Chemical supply system

[0022] 11: Metal storage tank

[0023] 111: Slot

[0024] 112: Interface

[0025] 113: Top

[0026] 114: Bottom

[0027] 115: Support column

[0028] 12: Connecting pipe

[0029] 13: Pump

[0030] 14: Cabinet

[0031] 141: Installation port

[0032] 142: Observation window

[0033] 15: Supply valve group DETAILED DESCRIPTION

[0034] The detailed description and technical content of the utility model are now described as follows with reference to the accompanying drawings:

[0035] See also Figures 1 to 7 The utility model provides a chemical supply system 10, which can be configured in conjunction with a semiconductor manufacturing equipment (not shown) for implementation. The chemical supply system 10 supplies a chemical required for manufacturing to the semiconductor manufacturing equipment, and the chemical is in liquid state. The chemical supply system 10 includes at least one metal storage tank 11, at least one connecting pipe 12, and at least one pump 13. The at least one metal storage tank 11 includes a tank body 111 and at least one interface 112 formed on the tank body 111. Further, the tank body 111 is integrally formed without a seam produced by molding. Specifically, the tank body 111 of the utility model is not formed by welding, but is produced by casting. It should be understood that the main purpose of the utility model produced by the casting method is not to save welding steps, but to avoid possible contamination of subsequent chemical supply caused by welding. In addition, the number of implementations of the at least one metal storage tank 11 of the utility model can be determined according to the planning and design of the chemical supply system 10, and is not limited.

[0036] On the other hand, the at least one connecting pipe 12 is connected to at least one interface 112, and the number of the at least one connecting pipe 12 matches the number of the at least one interface 112. Furthermore, the at least one pump 13 forms a liquid flow relationship with the at least one interface 112 through the at least one connecting pipe 12. When the at least one pump 13 is started, it will provide pressure to the chemical inside the liquid flow relationship with it, so that the chemical flows. In order to prevent the at least one pump 13 from generating particles due to excessive friction in its internal structure during the pumping process, thereby contaminating the chemical, the at least one pump 13 of the utility model is one of the following groups: a magnetic levitation pump and a sealless pump. The number of implementations of the at least one pump 13 of the utility model can be determined according to the planning and design of the chemical supply system 10, and is not limited.

[0037] As mentioned above, the chemical supply system 10 of the present invention reduces or avoids the pollution of chemicals caused by particles generated by mistake during the chemical supply process and the problem of uneven transportation, which affects the yield of the back-end process.

[0038] Please refer to Figures 1 to 6 In order to avoid excessive restrictions on casting caused by the structure of the trough body 111 , in one embodiment, the at least one interface 112 is located on a top surface 113 or a bottom surface 114 of the trough body 111 .

[0039] Please refer to Figures 3 to 7 In one embodiment, the chemical supply system 10 includes a box 14 and a supply valve group 15 disposed in the box 14. In addition to providing the supply valve group 15 to be disposed in the box 14, the box 14 also provides the at least one pump 13 to be disposed therein. The at least one pump 13 and the supply valve group 15 can establish a liquid flow relationship in the box 14 through a plurality of pipes. On the other hand, the at least one metal storage tank 11 can be disposed in the box 14 or outside the box 14 according to implementation requirements, and the space arrangement in the box 14 can be adjusted according to the at least one metal storage tank 11. Please refer to Figures 1 to 3 In one embodiment, the at least one pump 13 is disposed at the bottom of the box 14. The box 14 has at least one installation opening 141 formed at the bottom of the box 14. The at least one installation opening 141 is provided for the at least one connecting pipe 12 to pass through. The number of the at least one installation opening 141 can be determined based on the number of the at least one connecting pipe 12 that is designed to enter the box 14 in the chemical supply system 10. Figures 1 to 7 In one embodiment, the housing 14 includes at least one observation window 142 , and the at least one observation window 142 allows a user to observe the operating conditions of the components inside the housing 14 from outside the housing 14 .

[0040] Please refer to Figures 1 to 6 In one embodiment, the at least one metal storage tank 11 includes at least one support column 115 connected to the tank body 111. The support column 115 can be connected to the side wall of the tank body 111, and the at least one support column 115 can be disposed after the tank body 111 is integrally manufactured.

[0041] Of course, the present invention may have many other embodiments. Without departing from the spirit and essence of the present invention, technicians familiar with the field can make various corresponding changes and deformations based on the present invention, but these corresponding changes and deformations should all fall within the scope of protection of the claims attached to the present invention.

Claims

1. A chemical supply system, characterized in that: Include: At least one metal storage tank, comprising a tank body and at least one interface formed on the tank body, the tank body being integrally formed without a seam produced by the forming; at least one connecting pipe connected to the at least one interface; and At least one pump forms a liquid flow relationship with the at least one interface through the at least one connecting pipe, and the at least one pump is one of the following groups: a magnetic levitation pump and a sealless pump.

2. The chemical supply system according to claim 1, characterized in that: The at least one interface is located on a top surface or a bottom surface of the slot body.

3. The chemical supply system according to claim 1 or 2, characterized in that: The at least one metal storage tank comprises at least one supporting column connected to the tank body.

4. The chemical supply system according to claim 1 or 2, characterized in that: The chemical supply system comprises a box body and a supply valve group arranged in the box body, the at least one pump is arranged in the box body, and the at least one metal storage tank is arranged in the box body.

5. The chemical supply system according to claim 4, characterized in that: The at least one pump is arranged at the relative bottom of the box body, and the box body has at least one installation opening formed at the relative bottom to provide the at least one connecting pipe to pass through.

6. The chemical supply system according to claim 5, characterized in that: The box body includes at least one observation window.

7. The chemical supply system according to claim 1 or 2, characterized in that: The chemical supply system comprises a box and a supply valve group arranged in the box, the at least one pump is arranged in the box, and the at least one metal storage tank is arranged outside the box.

8. The chemical supply system according to claim 7, characterized in that: The at least one pump is arranged at the relative bottom of the box body, and the box body has at least one installation opening formed at the relative bottom to provide the at least one connecting pipe to pass through.

9. The chemical supply system according to claim 8, characterized in that: The box body includes at least one observation window.

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