Semiconductor processing cooling device

Abstract

The utility model discloses a semiconductor processing cooling device, which relates to the technical field of semiconductor processing and comprises a cooling box and a water tank, a water outlet hopper is fixedly sleeved at the bottom of the cooling box, a first guide pipe is fixedly sleeved between the bottom of the water outlet hopper and the water tank, and a first box cover is hinged at the top of the cooling box. Two L-shaped rods are symmetrically and fixedly arranged on the inner wall of the first box cover, and the inner wall of the first box cover is fixedly connected with a hollow block through the two L-shaped rods. According to the cooling device, the fan blades can be driven to rotate in the rotating process of the rotating rod through the arranged fan blades, so that air flow in the cooling box can be accelerated through the two air inlets and the two air outlets, the auxiliary cooling effect is achieved, and the cooling effect is improved through the arranged first driving mechanism and the arranged second driving mechanism; according to the cooling device, the rotating rod and the stirring rod can be driven to work synchronously in the working process of the water pump, double cooling is achieved, meanwhile, cooling water can be recycled through the arranged water pump, and waste of water resources is effectively avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing, in particular to a semiconductor processing cooling device. Background Art

[0002] A semiconductor is a material with an electrical conductivity between that of an insulator and that of a conductor. Its electrical conductivity is easily controlled. In the process of wafer semiconductor production, it is often necessary to anneal and cool the wafers after high-temperature heating. However, current cooling devices generally operate by water cooling. When cooling the semiconductor, the semiconductor needs to be in contact with cold water to transfer the heat of the semiconductor body to the water, thereby reducing its own heat. However, the semiconductor will float in the water, resulting in a poor cooling effect.

[0003] After searching, the publication number is: CN214701445U, a cooling device for semiconductor production and processing, including a cooling box, two U-shaped plates are fixedly connected on both sides of the inner wall of the cooling box, a bearing plate is slidably connected between the four U-shaped plates, a baffle is movably clamped between the four U-shaped plates, two rings are fixedly connected on both sides of the top of the bearing plate, the outer walls of the four rings are fixedly connected with connecting ropes, vertical plates are symmetrically fixedly connected on both sides of the top of the bearing plate, a handle is fixedly connected to the top of the vertical plate, one end of the two connecting ropes on the same side are respectively fixedly connected to the two sides of the corresponding vertical plates, a protective cover is fixedly inserted and connected to the top of one side of the cooling box, and a cold water pipe is fixedly inserted and connected to the top of the other side of the cooling box.

[0004] The above technical solution has the following shortcomings:

[0005] First, the conveyor belt in the above technical solution is arranged inside the protective cover, which is not convenient to replace after long-term use due to aging and wear, thereby affecting the normal use of the entire device;

[0006] Second, the water used in the above technical solution cannot be recycled, which easily causes waste of water resources. Utility Model Content

[0007] In view of the above problems existing in the existing semiconductor processing cooling device, the present utility model is proposed.

[0008] Therefore, the purpose of the utility model is to provide a semiconductor processing cooling device, which solves the problem that the belt is aged and worn, affecting the normal use of the entire device and causing waste of water resources.

[0009] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0010] A semiconductor processing cooling device comprises a cooling box and a water tank, wherein a water outlet bucket is fixedly sleeved at the bottom of the cooling box, a first conduit is fixedly sleeved between the bottom of the water outlet bucket and the water tank, a first box cover is hingedly arranged at the top of the cooling box, two L-shaped rods are symmetrically fixedly arranged on the inner wall of the first box cover and a hollow block is fixedly connected to the two L-shaped rods, a rotating rod is rotatably sleeved inside the hollow block, a fan blade is fixedly connected to the lower end of the rotating rod, an air outlet is opened at the top of the first box cover, and two air inlets are symmetrically opened on the side wall of the cooling box;

[0011] A second box cover is provided on the top of the water tank, a water pump is fixedly provided on the upper surface of the second box cover, a second conduit and a third conduit are fixedly connected at both ends of the water pump, the other end of the second conduit passes through the second box cover and extends to the inside of the water tank, a three-way pipe is fixedly sleeved on the other end of the third conduit, the other two ports of the three-way pipe are respectively connected to the first driving mechanism and the second driving mechanism, a stirring rod is rotatably provided inside the cooling box, the first driving mechanism is transmission-connected to the rotating rod, and the second driving mechanism is transmission-connected to the stirring rod.

[0012] Preferably, the first driving mechanism includes a fourth conduit and a first impeller, the fourth conduit is fixedly sleeved with the first box cover, one end of the fourth conduit is fixedly sleeved with one of the ports of the three-way pipe, the other end of the fourth conduit passes through the interior of the hollow block and is fixedly sleeved with the hollow block, the first impeller is rotatably arranged inside the hollow block and fixedly sleeved with the rod wall of the rotating rod, and a fifth conduit is fixedly sleeved on a side of the hollow block away from the fourth conduit.

[0013] Preferably, the second driving mechanism includes a sixth conduit and a second impeller, a rod wall at one end of the stirring rod is rotatably sleeved with a box body, an opening is provided on one side of the box body, and the side of the box body with the opening is fixedly connected to the inner wall of the cooling box, the second impeller is rotatably arranged inside the box body and fixedly sleeved with the rod wall of the stirring rod, the sixth conduit is fixedly sleeved with the cooling box, one end of the sixth conduit is fixedly sleeved with one of the ports of the three-way pipe, the other end of the sixth conduit passes through the interior of the box body and is fixedly sleeved with the box body, and a one-way valve is fixedly sleeved on the bottom of the box body.

[0014] Preferably, two fixing rods are symmetrically fixed inside the water tank, an annular plate is fixedly connected between the two fixing rods, a sleeve is movably inserted inside the annular plate, a tube wall of the sleeve is provided with a plurality of strip openings and gauze, a disc is fixedly connected to the top of the sleeve, the disc and the annular plate are fixedly connected by bolts, and the second conduit is movably inserted inside the sleeve.

[0015] Preferably, a solenoid valve is fixedly provided on the tube wall of the first conduit.

[0016] Preferably, a plurality of stirring blades are symmetrically fixedly arranged on the rod wall of the stirring rod.

[0017] Preferably, filter screens are provided inside the air outlet and the two air inlets.

[0018] Preferably, a first sealing ring is fixedly provided at the bottom of the sleeve, and the first sealing ring is in contact with the bottom inner wall of the water tank.

[0019] Preferably, a second sealing ring is fixedly provided at the bottom of the disc, and the second sealing ring is in contact with and connected to the upper surface of the annular plate.

[0020] In the above technical solution, the technical effects and advantages provided by the utility model are:

[0021] The utility model can drive the fan blades to rotate during the rotation of the rotating rod through the arranged fan blades, thereby accelerating the air flow inside the cooling box through the two air inlets and the air outlet, thereby achieving the effect of auxiliary cooling; through the arranged first driving mechanism and the second driving mechanism, the rotating rod and the stirring rod can be driven to work synchronously during the operation of the water pump, thereby realizing double cooling; at the same time, through the arranged water pump, the cooling water can be recycled, effectively avoiding the waste of water resources. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present utility model. For ordinary technicians in this field, other drawings can also be obtained based on these drawings.

[0023] Figure 1 It is a schematic diagram of the structure of the utility model;

[0024] Figure 2 It is a cross-sectional structural schematic diagram of the utility model;

[0025] Figure 3 For the utility model Figure 2 A magnified schematic diagram of part A;

[0026] Figure 4 For the utility model Figure 2 An enlarged schematic diagram of part B;

[0027] Figure 5 It is a structural schematic diagram of the sleeve of the utility model.

[0028] Description of reference numerals:

[0029] 1. Cooling box; 2. Water tank; 3. Water outlet hopper; 4. First conduit; 5. First box cover; 6. L-shaped rod; 7. Hollow block; 8. Rotating rod; 9. Fan blade; 10. Second box cover; 11. Water pump; 12. Second conduit; 13. Third conduit; 14. Tee pipe; 15. Stirring rod; 16. Fourth conduit; 17. First impeller; 18. Fifth conduit; 19. Sixth conduit; 20. Second impeller; 21. Box body; 22. Fixed rod; 23. Ring plate; 24. Sleeve; 25. Gauze; 26. Solenoid valve; 27. Stirring blade; 28. Filter; 29. ​​First sealing ring; 30. Second sealing ring; 31. Disc; 32. One-way valve. DETAILED DESCRIPTION

[0030] In order to enable those skilled in the art to better understand the technical solution of the present invention, the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0031] The utility model embodiment discloses a semiconductor processing cooling device.

[0032] Embodiment 1

[0033] The utility model provides Figure 1-5 A semiconductor processing cooling device shown in the figure comprises a cooling box 1 and a water box 2. A water outlet hopper 3 is fixedly sleeved at the bottom of the cooling box 1. A first conduit 4 is fixedly sleeved between the bottom of the water outlet hopper 3 and the water box 2. A solenoid valve 26 is fixedly sleeved on the wall of the first conduit 4. By setting the first solenoid valve 26, the conduction and closing of the first conduit 4 can be controlled, so as to prevent water from flowing out of the first conduit 4 when water needs to be retained in the cooling box 1. A first box cover 5 is hingedly provided at the top of the cooling box 1. Two L-shaped rods 6 are symmetrically fixedly provided on the inner wall of the first box cover 5 and are connected to the first conduit 4 through the two L-shaped rods 6. The hollow block 7 is fixedly connected to the shaped rod 6, and a rotating rod 8 is rotatably sleeved inside the hollow block 7. The lower end of the rotating rod 8 is fixedly connected to a fan blade 9. An air outlet is provided on the top of the first box cover 5, and two air inlets are symmetrically provided on the side wall of the cooling box 1. A filter screen 28 is provided inside the air outlet and the two air inlets. The filter screen 28 can effectively prevent dust from entering the interior of the cooling box 1. The fan blade 9 can be driven to rotate during the rotation of the rotating rod 8, so that the air flow inside the cooling box 1 can be accelerated through the two air inlets and the air outlet, thereby achieving an auxiliary cooling effect.

[0034] A second box cover 10 is provided on the top of the water tank 2, and a water pump 11 is fixedly provided on the upper surface of the second box cover 10. The two ends of the water pump 11 are respectively fixedly connected with a second conduit 12 and a third conduit 13. The other end of the second conduit 12 passes through the second box cover 10 and extends to the inside of the water tank 2. The other end of the third conduit 13 is fixedly sleeved with a tee 14. The other two ports of the tee 14 are respectively connected with a first driving mechanism and a second driving mechanism. A stirring rod 15 is rotatably provided inside the cooling box 1. The first driving mechanism is transmission-connected to the rotating rod 8, and the second driving mechanism is transmission-connected to the stirring rod 15. By utilizing the first driving mechanism and the second driving mechanism, the rotating rod 8 and the stirring rod 15 can be driven to work synchronously during the operation of the water pump 11, thereby realizing double cooling. A plurality of stirring blades 27 are symmetrically fixedly provided on the rod wall of the stirring rod 15. By utilizing the plurality of stirring blades 27 provided on the rod wall of the stirring rod 15, the plurality of stirring blades 27 can be driven to effectively stir the water inside the cooling box 1 during the rotation of the stirring rod 15.

[0035] like Figure 1-3 As shown, the first driving mechanism includes a fourth conduit 16 and a first impeller 17, the fourth conduit 16 is fixedly sleeved with the first box cover 5, one end of the fourth conduit 16 is fixedly sleeved with one of the ports of the three-way pipe 14, the other end of the fourth conduit 16 penetrates into the interior of the hollow block 7 and is fixedly sleeved with the hollow block 7, the first impeller 17 is rotatably arranged in the interior of the hollow block 7 and is fixedly sleeved with the rod wall of the rotating rod 8, and a fifth conduit 18 is fixedly sleeved on one side of the hollow block 7 away from the fourth conduit 16. By utilizing the fourth conduit 16 and the first impeller 17, the first impeller 17 can be impacted in the process of water flowing into the interior of the hollow block 7 to drive the rotating rod 8 to rotate, thereby ensuring the normal operation of the fan blades 9, and the fifth conduit 18 is a hard conduit to avoid swinging during the water discharge process.

[0036] like Figure 2As shown, the second driving mechanism includes a sixth conduit 19 and a second impeller 20, one end of the stirring rod 15 is rotatably sleeved with a box body 21, one side of the box body 21 is provided with an opening, and the side of the box body 21 with the opening is fixedly connected to the inner wall of the cooling box 1, the second impeller 20 is rotatably arranged inside the box body 21 and is fixedly sleeved with the rod wall of the stirring rod 15, the sixth conduit 19 is fixedly sleeved with the cooling box 1, one end of the sixth conduit 19 is fixedly sleeved with one of the ports of the three-way pipe 14, and the other end of the sixth conduit 19 passes through the interior of the box body 21 and is fixedly sleeved with the box body 1. The box body 21 is fixedly sleeved, and a one-way valve 32 is fixedly sleeved on the bottom of the box body 21. By utilizing the sixth conduit 19 and the second impeller 20, the second impeller 20 can be impacted to drive the stirring rod 15 to rotate during the process of water flowing into the box body 21, thereby ensuring the normal operation of the stirring rod 15. By utilizing the one-way valve 32, the water in the cooling box 1 can be prevented from flowing back into the box body 21. The second conduit 12, the third conduit 13, the fourth conduit 16 and the sixth conduit 19 are all rubber hoses, so as to facilitate opening the first box cover 5 and the second box cover 10.

[0037] Embodiment 2

[0038] Based on the first embodiment, Figure 2 and Figure 4 As shown, two fixing rods 22 are symmetrically fixedly arranged inside the water tank 2, an annular plate 23 is fixedly connected between the two fixing rods 22, a sleeve 24 is movably penetrated inside the annular plate 23, a tube wall of the sleeve 24 is provided with a plurality of strip openings, and a gauze 25 is provided, a disc 31 is fixedly connected to the top of the sleeve 24, and the disc 31 is fixedly connected to the annular plate 23 by bolts, the second conduit 12 is movably penetrated inside the sleeve 24, and the gauze 25 is provided to filter the water, so as to prevent impurities from being drawn into the interior of the water pump 11 and causing damage to the water pump 11.

[0039] Embodiment 3

[0040] Based on the first embodiment, Figure 2 and Figure 4-5 As shown, a first sealing ring 29 is fixedly provided at the bottom of the sleeve 24, and the first sealing ring 29 is in contact with the bottom inner wall of the water tank 2. The first sealing ring 29 can effectively ensure the sealing of the bottom of the sleeve 24, thereby ensuring the filtering effect of the bottom of the sleeve 24. A second sealing ring 30 is fixedly provided at the bottom of the disc 31, and the second sealing ring 30 is in contact with the upper surface of the annular plate 23. The second sealing ring 30 can effectively ensure the filtering effect of the upper end of the sleeve 24.

[0041] The above only describes some exemplary embodiments of the present invention by way of illustration. It is undoubted that those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A semiconductor processing cooling device, comprising a cooling box (1) and a water tank (2), characterized in that: The bottom of the cooling box (1) is fixedly sleeved with a water outlet bucket (3), the bottom of the water outlet bucket (3) and the water box (2) are jointly fixedly sleeved with a first conduit (4), the top of the cooling box (1) is hingedly sleeved with a first box cover (5), the inner wall of the first box cover (5) is symmetrically fixedly provided with two L-shaped rods (6) and is fixedly connected to a hollow block (7) via the two L-shaped rods (6), the inner rotatable sleeve of the hollow block (7) is provided with a rotating rod (8), the lower end of the rotating rod (8) is fixedly connected to a fan blade (9), the top of the first box cover (5) is provided with an air outlet, and the side wall of the cooling box (1) is symmetrically provided with two air inlets; A second box cover (10) is arranged on the top of the water tank (2), a water pump (11) is fixedly arranged on the upper surface of the second box cover (10), the two ends of the water pump (11) are respectively fixedly connected with a second conduit (12) and a third conduit (13), the other end of the second conduit (12) passes through the second box cover (10) and extends to the inside of the water tank (2), the other end of the third conduit (13) is fixedly sleeved with a three-way pipe (14), the other two ports of the three-way pipe (14) are respectively connected with a first driving mechanism and a second driving mechanism, a stirring rod (15) is rotatably arranged inside the cooling box (1), the first driving mechanism is transmission-connected to the rotating rod (8), and the second driving mechanism is transmission-connected to the stirring rod (15).

2. A semiconductor processing cooling device according to claim 1, characterized in that: The first driving mechanism comprises a fourth conduit (16) and a first impeller (17); the fourth conduit (16) is fixedly sleeved with the first box cover (5); one end of the fourth conduit (16) is fixedly sleeved with one of the ports of the three-way pipe (14); the other end of the fourth conduit (16) penetrates into the interior of the hollow block (7) and is fixedly sleeved with the hollow block (7); the first impeller (17) is rotatably arranged in the interior of the hollow block (7) and is fixedly sleeved with the rod wall of the rotating rod (8); and a fifth conduit (18) is fixedly sleeved on a side of the hollow block (7) away from the fourth conduit (16).

3. A semiconductor processing cooling device according to claim 1, characterized in that: The second driving mechanism comprises a sixth conduit (19) and a second impeller (20); a rod wall at one end of the stirring rod (15) is rotatably sleeved with a box body (21); an opening is provided on one side of the box body (21); the side of the box body (21) provided with the opening is fixedly connected to the inner wall of the cooling box (1); the second impeller (20) is rotatably arranged inside the box body (21) and is fixedly sleeved with the rod wall of the stirring rod (15); the sixth conduit (19) is fixedly sleeved with the cooling box (1); one end of the sixth conduit (19) is fixedly sleeved with one of the ports of the three-way pipe (14); the other end of the sixth conduit (19) passes through the inside of the box body (21) and is fixedly sleeved with the box body (21); a one-way valve (32) is fixedly sleeved on the bottom of the box body (21).

4. A semiconductor processing cooling device according to claim 1, characterized in that: Two fixing rods (22) are symmetrically fixedly arranged inside the water tank (2), an annular plate (23) is fixedly connected between the two fixing rods (22), a sleeve (24) is movably inserted inside the annular plate (23), a tube wall of the sleeve (24) is provided with a plurality of strip-shaped openings and a gauze (25), a disc (31) is fixedly connected to the top of the sleeve (24), the disc (31) and the annular plate (23) are fixedly connected by bolts, and the second conduit (12) is movably inserted inside the sleeve (24).

5. A semiconductor processing cooling device according to claim 1, characterized in that: A solenoid valve (26) is fixedly arranged on the tube wall of the first conduit (4).

6. A semiconductor processing cooling device according to claim 1, characterized in that: A plurality of stirring blades (27) are symmetrically fixedly arranged on the rod wall of the stirring rod (15).

7. A semiconductor processing cooling device according to claim 1, characterized in that: Filter screens (28) are arranged inside the air outlet and the two air inlets.

8. A semiconductor processing cooling device according to claim 4, characterized in that: A first sealing ring (29) is fixedly arranged at the bottom of the sleeve (24), and the first sealing ring (29) is in contact with the inner wall of the bottom of the water tank (2).

9. A semiconductor processing cooling device according to claim 4, characterized in that: A second sealing ring (30) is fixedly arranged at the bottom of the disc (31), and the second sealing ring (30) is in contact with and connected to the upper surface of the annular plate (23).

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