Sealing device for high and low temperature test
By designing a sealing device in semiconductor optical communication testing equipment and using dry gas circulation and dew point detection systems, the problem of temperature instability in low-temperature testing is solved, ensuring the accuracy of test data and the stability of production processes.
Patent Information
- Application Number
- CN202421062993.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-15
- Publication Date
- 2025-01-03
- Estimated Expiration
- 2034-05-15
AI Technical Summary
During low-temperature testing of existing semiconductor optical communication high and low temperature testing equipment, air convection caused by protection gas purge, causes temperature instability, affecting the accuracy of the test data, resulting in misjudgment and production process losses.
Design a sealing device including a sealing body, a temperature-controlled carrier stage, a gas circuit system and a dew point detection system. It charges dry gas through the intake pipe, and discharges mixed air from the outlet pipe, and circulates to reduce the air and water molecules in the sealed body. Increase the dew point value and use the dew point detection system to monitor it in real time to ensure the stability of the test environment.
It effectively reduces the harm of condensation in low-temperature testing, improves temperature stability, ensures the reliability of test data, and avoids misjudgment and production process losses.
Smart Images
Figure CN222287340U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the field of semiconductor optical communication testing, in particular to a sealing device for high and low temperature testing. Background Art
[0002] At present, the more common semiconductor optical communication high and low temperature test equipment on the market is to place the test device on a stage with temperature control. During low temperature testing, the protective gas is blown towards the test device to isolate the water molecules in the surrounding air and avoid condensation under low temperature conditions, which may cause damage to the device. However, during the protective gas blowing process, a large amount of air convection will be brought to the temperature-controlled stage, causing temperature stability and instability, resulting in unstable test data of the test device, resulting in misjudgment, and thus causing certain losses to the entire production process. Utility Model Content
[0003] The main purpose of the utility model is to provide a sealing device which has a simple structure and can be reasonably used for high and low temperature testing.
[0004] The technical solution adopted by the utility model is:
[0005] A sealing device for high and low temperature testing is provided, comprising a base, a sealing body is arranged on the base, a detection platform and a dew point detection system are arranged in the sealing body, and an air path system is arranged in the base, wherein:
[0006] The testing platform is provided with a stage with temperature control, on which the semiconductor device to be tested is placed;
[0007] The gas circuit system includes an air inlet pipeline and an air outlet pipeline, and a pressure regulating valve and a solenoid valve switch are arranged on the air inlet pipeline. When working at low temperature, dry gas is filled into the sealed body through the air inlet pipeline, and the mixed air is discharged out of the sealed body through the air outlet pipeline. Through the circulation of dry gas, the water molecules in the air in the sealed body are continuously reduced to increase the dew point value.
[0008] The dew point detection system is equipped with a sensor and an analyzer. The sensor is provided with micropores. The sensor senses the number of water molecules entering the micropores. The analyzer calculates the moisture content based on the sensed number of water molecules and the water partial pressure under the gas around the sensor, obtains the current dew point value and displays it.
[0009] According to the above technical solution, the drying gas is dry air or dry inert gas.
[0010] According to the above technical solution, the base is provided with universal wheels.
[0011] According to the above technical solution, the dew point detection system is fixed on the upper side of the inside of the sealing body.
[0012] According to the above technical solution, an observation window and an inspection door are provided on the sealing body, and both are sealed with sealing strips.
[0013] According to the above technical solution, both the air inlet pipeline and the air outlet pipeline are connected to the sealing body through the sealing joint.
[0014] According to the above technical solution, the detection platform is a marble platform, and the sealing body is installed on the marble platform.
[0015] According to the above technical solution, the sealing body is formed by integrally welding sheet metal.
[0016] According to the above technical solution, the base is a steel frame base.
[0017] The utility model also provides a testing method based on the sealing device for high and low temperature testing, comprising the following steps:
[0018] S1. When low temperature testing is required, fill the sealed body with dry gas;
[0019] S2. During the inflation process, the air in the sealed body is continuously mixed with dry gas, and the mixed gas is discharged through the gas path system to circulate dry air, thereby reducing the number of air water molecules in the low-sealed body to increase the dew point value;
[0020] S3. The dew point value in the sealed body is displayed in real time through the dew point detection system. When the required dew point value is reached, a low temperature test is performed on the semiconductor device to be tested.
[0021] The beneficial effect of the utility model is that the sealing device for high and low temperature testing of the utility model is provided with a sealing body. When a semiconductor needs to be tested at a low temperature, dry gas is circulated to reduce water molecules in the air and increase the dew point value. When the required dew point value is reached, the semiconductor device to be tested can be tested at a low temperature in the sealing body. The utility model mainly provides a processing environment for high and low temperature testing, especially a low temperature environment. During the low temperature testing process, the semiconductor device to be tested and the testing equipment will not be harmed by condensation.
[0022] Of course, any product implementing the present invention does not necessarily need to achieve all of the advantages described above at the same time. BRIEF DESCRIPTION OF THE DRAWINGS
[0023] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.
[0024] Figure 1 This is a schematic diagram of the structure of the sealing device used for high and low temperature testing in the embodiment of the utility model Figure 1 ;
[0025] Figure 2 This is a schematic diagram of the structure of the sealing device used for high and low temperature testing in the embodiment of the utility model. Figure 2 ;
[0026] Figure 3 It is a schematic diagram of the dew point detection system of the embodiment of the utility model (displaying the dew point value of -60°C);
[0027] Figure 4 It is a schematic diagram of the air intake pipeline of an embodiment of the utility model. DETAILED DESCRIPTION
[0028] In order to make the purpose, technical solution and advantages of the utility model more clear, the utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the utility model and are not used to limit the utility model.
[0029] It should be noted that the illustrations provided in the embodiments of the present invention are only used to illustrate the basic concept of the present invention in a schematic manner. Therefore, the drawings only show components related to the present invention rather than being drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component may be changed arbitrarily, and the component layout may also be more complicated.
[0030] In the present invention, it is also necessary to explain that, if the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. appear, the orientation or position relationship indicated is based on the orientation or position relationship shown in the drawings, which is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application. In addition, if the terms "first" and "second" appear, they are only used for description and distinction purposes, and cannot be understood as indicating or implying relative importance.
[0031] like Figure 1-3 As shown, the sealing device for high and low temperature testing of the utility model comprises a base 1, on which a sealing body 2 is provided, in which a detection platform 3 and a dew point detection system 4 are provided, and in which a gas path system 5 is provided in the base, wherein:
[0032] The testing platform is provided with a stage with temperature control, on which the semiconductor device to be tested is placed;
[0033] The gas circuit system includes an air inlet pipeline and an air outlet pipeline, and a pressure regulating valve and a solenoid valve switch are arranged on the air inlet pipeline. When working at low temperature, dry gas is filled into the sealed body through the air inlet pipeline, and the mixed air is discharged out of the sealed body through the air outlet pipeline. Through the circulation of dry gas, the water molecules in the air in the sealed body are continuously reduced to increase the dew point value.
[0034] The dew point detection system is equipped with a sensor and an analyzer. The sensor is provided with micropores. The sensor senses the number of water molecules entering the micropores. The analyzer calculates the moisture content based on the sensed number of water molecules and the water partial pressure under the gas around the sensor, obtains the current dew point value and displays it.
[0035] The drying gas is dry air or dry inert gas, such as nitrogen.
[0036] Specifically, the base 1 can be a steel frame base, which can be welded from square steel and used to support the entire device. Universal wheels can be set at the bottom for easy movement. The detection platform is mainly used to install the detection system and can be made of marble. A temperature control system is provided on the detection platform to control the semiconductor device to be tested to be tested at a specific temperature. The sealing body is used to seal the entire equipment and can be installed on a marble platform. It is made of sheet metal and welded as a whole. The sealing body is provided with an inspection door and an observation window, both of which are sealed with sealing strips.
[0037] like Figure 4 As shown in the figure, the gas circuit system is mainly composed of various gas circuit control components, including pressure regulating valves, solenoid valve switches and other components. The pressure regulating valve is mainly a pressure reducing valve, and a manual pressure regulating valve can be selected, which is mainly used for pressure stabilization. The dew point detection system uses a sensor to measure the number of water molecules entering the micropores. The number of water molecules entering the micropores is proportional to the water partial pressure under the gas around the sensor, and the water partial pressure depends on the water content in the gas and the total pressure of the gas. When the analyzer already knows the total pressure of the gas, the water content can be calculated, and then the current dew point value can be calculated.
[0038] When working at low temperature, dry air (or other inert gases such as nitrogen) is filled into the sealed body. During the filling process, the air in the sealed body will be continuously mixed with dry air and discharged out of the shell through the air path system. Through the circulation of dry air, the water molecules in the air in the sealed body are continuously reduced to increase the dew point value. According to the prompt of the dew point detection system, when the required dew point value is reached, low temperature treatment can be carried out. At this time, since there is dry air inside the sealed body, condensation will not occur and will not cause harm to the test device.
[0039] The manufacturing process of the sealing device for high and low temperature testing of the utility model is as follows:
[0040] First, select a suitable dew point detection system according to the test environment temperature requirements;
[0041] Secondly, based on the equipment testing scenario, design a closed casing of reasonable size, and also provide a marble platform and steel frame base.
[0042] Third, select appropriate gas path components according to the volume of the closed shell;
[0043] Finally, assemble and seal various joints, etc. At the same time, seal the observation window and inspection door. During the test, dry air is filled into the closed shell for air exchange, thus overcoming the shortcomings of the background technology and ensuring that no condensation will occur during low-temperature testing, and no damage will be caused to the test device.
[0044] The utility model also provides a testing method based on the sealing device for high and low temperature testing, comprising the following steps:
[0045] S1. When low temperature testing is required, fill the sealed body with dry gas;
[0046] S2. During the inflation process, the air in the sealed body is continuously mixed with dry gas, and the mixed gas is discharged through the gas path system to circulate dry air, thereby reducing the number of air water molecules in the low-sealed body to increase the dew point value;
[0047] S3. The dew point value in the sealed body is displayed in real time through the dew point detection system. When the required dew point value is reached, a low temperature test is performed on the semiconductor device to be tested.
[0048] In summary, the sealing device for high and low temperature testing of the utility model is provided with a sealing body. When a semiconductor needs to be tested at a low temperature, dry gas is circulated to reduce water molecules in the air and increase the dew point value. When the required dew point value is reached, the semiconductor device to be tested can be tested at a low temperature in the sealing body. The utility model mainly provides a processing environment for high and low temperature testing, especially a low temperature environment. During the low temperature testing process, the semiconductor device to be tested and the testing equipment will not be harmed by condensation.
[0049] It should be pointed out that, according to the needs of implementation, the various steps / components described in this application can be split into more steps / components, and two or more steps / components or partial operations of steps / components can be combined into new steps / components to achieve the purpose of the present utility model.
[0050] The order of execution of each step in the above embodiment does not mean the order of execution. The order of execution of each process should be determined by its function and internal logic, and should not constitute any limitation on the implementation process of the embodiment of the present application.
[0051] It should be understood that those skilled in the art can make improvements or changes based on the above description, and all these improvements and changes should fall within the scope of protection of the claims attached to the utility model.
Claims
1. A sealing device for high and low temperature testing, characterized in that: It includes a base, on which a sealing body is provided, in which a detection platform and a dew point detection system are provided, and a gas path system is provided in the base, wherein: The testing platform is provided with a stage with temperature control, on which the semiconductor device to be tested is placed; The gas circuit system includes an air inlet pipeline and an air outlet pipeline, and a pressure regulating valve and a solenoid valve switch are arranged on the air inlet pipeline. When working at low temperature, dry gas is filled into the sealed body through the air inlet pipeline, and the mixed air is discharged out of the sealed body through the air outlet pipeline. Through the circulation of dry gas, the water molecules in the air in the sealed body are continuously reduced to increase the dew point value. The dew point detection system is equipped with a sensor and an analyzer. The sensor is provided with micropores. The sensor senses the number of water molecules entering the micropores. The analyzer calculates the moisture content based on the sensed number of water molecules and the water partial pressure under the gas around the sensor, obtains the current dew point value and displays it.
2. The sealing device for high and low temperature testing according to claim 1, characterized in that: The drying gas is dry air or dry inert gas.
3. The sealing device for high and low temperature testing according to claim 1, characterized in that: The base is provided with universal wheels.
4. The sealing device for high and low temperature testing according to claim 1, characterized in that: The dew point detection system is fixed on the upper side of the inner part of the sealing body.
5. The sealing device for high and low temperature testing according to claim 1, characterized in that: The sealing body is provided with an observation window and an inspection door, and both are sealed with sealing strips.
6. The sealing device for high and low temperature testing according to claim 1, characterized in that: The air inlet pipeline and the air outlet pipeline are both connected to the sealing body through the sealing joint.
7. The sealing device for high and low temperature testing according to claim 1, characterized in that: The detection platform is a marble platform, and the sealing body is installed on the marble platform.
8. The sealing device for high and low temperature testing according to claim 1, characterized in that: The sealing body is made of integrally welded sheet metal.
9. The sealing device for high and low temperature testing according to claim 1, characterized in that: The base is a steel frame base.